KR101167076B1 - Plate transporting appratus - Google Patents

Abstract

A substrate transfer apparatus is disclosed. The substrate transfer apparatus of the present invention comprises: a substrate holding unit for holding and transferring a plurality of substrates one by one from a substrate tray in which a plurality of substrates are stacked with interlayers therebetween; An interlayer clamping unit for clamping the interlayer interposed between the substrate and the next substrate held by the substrate holding transfer unit; And a slip sheet holding unit for holding and transferring the separated sheet after the substrate is transferred by the substrate holding unit. According to the present invention, it is possible to efficiently remove the sheet of paper adhering to the substrate without damaging the substrate, while achieving the effect of rapid transfer of the substrate.

Board, Icebreaker, Clamp, Servo Motor

Description

Substrate transporting device {Plate transporting appratus}

The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus capable of providing rapid speed of substrate transfer while efficiently removing interlayer paper attached to the substrate without damaging the substrate.

In general, substrates used in the manufacture of flat panel displays, such as thin film transistor-liquid crystal displays (TFT-LCDs), plasma display panels (PDPs), and electro luminescent (EL) panels, may be used as substrate trays for transportation. ) Is interposed between the substrate and the substrate in order to prevent the substrate from being damaged or adsorbed from each other by the impact during transportation.

Such kanji is often adhered to the substrate closely due to static electricity, etc., in particular, the phenomenon that the kanji and the substrate is attached to each other more often occurs after long distance transportation.

However, if the substrate is loaded into the work process with the interleaved paper attached, process errors may occur and it may cause a failure of the device in the work process. Therefore, the slip paper must be removed from the board before the board is loaded into the work process. do.

In order to remove the interlayer paper, conventionally, the operator removes the interlayer paper adsorbed on the substrate by hand or by forcibly separating the interlayer paper adhered to the substrate by static electricity by blowing air between the substrate and the interlayer paper through the air nozzle. Alternatively, a method of forcibly separating the Kanji attached to the substrate by vibrating the plurality of substrate holding units that scratch the substrate alternately in different directions.

However, the method of manually removing the kanji, the work time is reduced as the work time is delayed, there is a problem that can damage the substrate.

In addition, the method of removing the slip paper by the air nozzle has a problem in that the efficiency of removing the slip paper is inferior because it is difficult to accurately inject air between the slip paper stuck to the substrate and the substrate.

Finally, the method of vibrating the substrate holding unit has a problem in that not only the efficiency of removing the slip sheets, but also the substrate can be damaged, similar to the method by the air nozzle.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transfer apparatus capable of achieving rapid transfer of substrates while efficiently removing interlayer paper adhered to the substrate without damaging the substrate.

The above object is, according to the present invention, a substrate holding unit for holding and transporting the plurality of substrates one by one from the substrate tray stacked with a plurality of substrates sandwiched between the interlayer; An interlayer clamping unit for clamping the interlayer interposed between the substrate and the next substrate held by the substrate gripping transfer unit; And a paper holding device for holding and transferring the paper sheet after the substrate is transported by the substrate holding device.

The slip sheet clamping unit clamps the slip sheet before the substrate holding unit is gripped by the substrate, and releases the clamping state of the slip sheet after the substrate holding unit transfers the substrate. ; And it may include a slip sheet clamp driving unit for driving the slip sheet clamp.

The slip sheet clamping unit may clamp an edge of the slip sheet.

The diaphragm clamp may include a connecting rod connected to the diaphragm clamp driver; A clamp bar extending in a direction crossing the longitudinal direction of the connecting rod; And an interleaved contact portion bent and extended from one end of the clamp bar.

The slip sheet clamping unit may further include a clamp moving unit for moving the slip sheet clamp and the slip sheet clamp driving unit together in the front-back direction.

The slip sheet clamp driving unit may include one of a servo motor and a stepping motor for adjusting the clamping position of the slip sheet clamp with respect to the corresponding slip sheet.

The substrate holding and transporting unit includes a substrate holding part for holding the substrate; A first horizontal moving part which horizontally moves the substrate holding part horizontally; And a first vertical moving part configured to vertically move the substrate holding part vertically.

The first vertical moving part may include any one of a servo motor and a stepping motor for adjusting the vertical moving speed of the substrate holding part.

The stroke of the substrate holding part vertically moved by the first vertical moving part may have a range of 75 to 250 mm.

The slip sheet gripping transfer unit may grip and transfer the corresponding slip sheet in a direction crossing the moving direction of the substrate gripping transfer unit.

The kanji gripping transfer unit, the kanji gripping portion for gripping the corresponding kanji; A second horizontal moving unit which horizontally moves the interleaved gripping portion in the front-rear direction; And a second vertical moving part configured to vertically move the gripping portion in the vertical direction.

The substrate tray may be provided in a structure in which a plurality of substrate trays are stacked, and the substrate transfer apparatus may further include a tray transfer unit that is integrally formed with the interlayer paper holding unit and transfers the substrate tray disposed at the top of the plurality of substrate trays. can do.

The substrate transfer device is provided adjacent to the interleaf clamping unit, and the air purge unit is configured to inject air between the substrate and the interlayer in a state in which the interlayer is clamped by the interlayer clamping unit. It may further include.

The air purge unit may be provided in pairs adjacent to both side surfaces of the slip sheet clamping unit.

The substrate tray may be provided in a stacked structure, and the substrate transfer apparatus may further include a tray centering unit for centering a substrate tray disposed on an uppermost side of the plurality of substrate trays.

The tray centering unit may include a pair of centering bars respectively contacting both sides of the tray to be centered; And a centering bar driver configured to drive the centering bar.

The substrate conveying apparatus is provided on a conveying path of the substrate holding unit and a roller brush for removing the corresponding sheet from the substrate when the sheet is attached to the substrate being conveyed by the substrate holding unit. The unit may further include.

The roller brush unit, the roller is provided to perform a rotational movement; And it may include a brush coupled to the outer peripheral surface of the roller.

Advantageous Effects of Invention According to the present invention, it is possible to provide a substrate transfer device capable of providing rapid substrate transfer while efficiently removing the interlayer attached to the substrate without damaging the substrate by the interlayer clamping unit for separating the interlayer mechanically. do.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, the well-known functions or constructions are not described in order to simplify the gist of the present invention.

1 is a perspective view of a substrate transfer apparatus according to an embodiment of the present invention, FIG. 2 is a schematic side view of the substrate transfer apparatus of FIG. 1, FIG. 3 is a schematic plan view of the substrate transfer apparatus of FIG. 1, and FIG. 4. 1 is a side view of the substrate gripping transfer unit of FIG. 1, FIG. 5 is a side view of the gripping clamping unit of FIG. 1, FIG. 6 is a perspective view of the gripping transfer unit and the tray transfer unit of FIG. 1, and FIG. 7 is a tray of FIG. 1. A schematic plan view of the centering unit and the roller brush unit.

Hereinafter, the vertical direction refers to the Z direction and the -Z direction shown in FIG. 1, the left and right directions refer to the Y direction and the -Y direction shown in FIG. do.

1 to 7, the substrate transfer device 10 according to an embodiment of the present invention includes a substrate holding unit 110 for holding and transferring a substrate P and an interleaved paper (IP). Intermediate clamping unit 120 for clamping the clamping device, Intermediate gripping transfer unit 130 for holding and transporting the slip sheet (IP), Tray transfer unit 140 for transferring the tray, the substrate (P) and slip sheet (IP) And an air purge unit 150 for injecting air therebetween, a tray centering unit 170 for centering the uppermost tray, and a roller brush unit 180 for preliminarily removing the interlayer IP. .

The substrate holding and transporting unit 110 grips and transfers a plurality of substrates P stacked one by one inside the substrate trays T1 to T7, which are provided in a stacked structure, as shown in detail in FIG. 4. In the configuration provided, the substrate holding portion 111 for holding the substrate P, the first horizontal moving portion 112 for horizontally moving the substrate holding portion 111 in the horizontal direction, and the substrate holding portion 111 It includes a first vertical moving part 113 for vertical movement in the vertical direction.

The substrate holding portion 111 is a portion for holding a plurality of substrates P stacked in the substrate tray T one by one, and is integrally coupled to the vertical movement bar 1111 and the vertical movement bar 1111. Adsorption unit support plate 1112 and a plurality of adsorption unit 1113 connected to the adsorption unit support plate 1112.

In accordance with the driving of the first vertical moving part 113, the adsorption unit support plate 1112 integrally coupled to the vertical movement bar 1111 and the vertical movement bar 1111 moves in the vertical direction, and thus the adsorption unit support plate 1112 The plurality of adsorption units 1113 connected to) may be in close contact with the substrate P or spaced apart from the substrate P.

The adsorption unit 1113 is configured to adsorb the substrate P at a vacuum pressure, and the substrate P stacked on the substrate tray T1 is driven by an actuator (not shown) that generates a vacuum pressure. Adsorb one by one.

The first horizontal moving part 112 is configured to transfer the substrate P adsorbed by the adsorption unit 1113 to a transfer roller (not shown), etc., and includes an operating body 1121 and an operating body 1121. A horizontal guide 1122 for guiding the left and right movement of the) and a horizontal actuator (not shown) for moving the operating body 1121 along the horizontal guide 1122.

The rear surface of the operating body 1121 is provided with a groove corresponding to the projection of the horizontal guide 1122, and thus the operating body 1121 is coupled to the horizontal guide 1122 so as to be relatively movable relative to the horizontal guide 1122. .

The horizontal actuator (not shown) is implemented as a general pneumatic actuator, a hydraulic actuator or an electric motor to supply power required for the operation body 1121 to move in the left and right directions.

The first vertical moving part 113 is configured to vertically move the substrate holding part 111 in the vertical direction. The first vertical moving part 113 connects the vertical actuator 1131, the vertical actuator 1131, and the vertical moving bar 1111. It includes a connecting portion 1132 to.

The vertical actuator 1131 is a part for supplying power for vertically moving the substrate holding part 111 in the vertical direction. The vertical actuator 1131 is implemented as a servo motor or a stepping motor.

Here, the servo motor and the stepping motor is a power source used for precise position control, and refers to a motor capable of precisely controlling the driving speed and the rotation angle according to the speed and number of pulses applied.

In particular, in the present embodiment, the vertical actuator 1131 is provided to adjust the vertical movement speed of the substrate holding part 111, and the substrate P adsorbed by the adsorption unit 1113 according to the driving of the vertical actuator 1131. ) Is initially lifted at low speed and then at high speed.

As such, by varying the vertical transfer speed of the adsorbed substrate P, the interlayer IP attached to the substrate P is temporarily separated from the substrate P, and in this state, the air purge unit 150 is connected to the substrate P. ) And the separation of the substrate (P) and the interlayer (IP) can be obtained by causing air to be jetted between the) and the interlayer (IP).

The connection part 1132 is a configuration for transmitting power generated by the vertical actuator 1131 to the vertical movement bar 1111, and is provided using a general ball screw structure, and may be provided using a link structure or the like as necessary. have.

The stroke of the substrate holding part 111 vertically moved by the first vertical moving part 113 is in a range of about 200 mm, where the stroke is in the vertical direction of the adsorption unit 1113 of the substrate holding part 111. It means the maximum distance to.

When the substrate P is adsorbed and raised by the adsorption unit 1113, if the stroke is too small, not only the interlayer IP may be attached to the substrate P again due to static electricity, but also the air purge unit 150. Since the nozzle space may not be sufficiently secured, the stroke range may be determined in consideration of the number of substrate trays stacked.

However, the substrate transfer apparatus 10 according to the present embodiment primarily separates the attachment state of the substrate P and the interlayer IP by the interlayer clamping unit 120, and by the air purge unit 150. According to the structure of secondary separation, even if the range of stroke is small, the removal of the interlayer slip (IP) can be efficiently removed, the scope of the present invention is not limited by the stroke range of the substrate holding portion (111).

On the other hand, the interlayer clamping unit 120, as shown in detail in Figure 5 is provided on the lower side of the substrate holding the transfer unit 110 is configured to mechanically separate the interlayer (IP) interposed on the lower side of the substrate (P) Thus, the clamp clamp 121, the clamp clamp driver 122 for driving the clamp clamp 121 in the vertical direction, and the clamp clamp for moving the clamp clamp 121 and the clamp clamp 122 in the front and rear direction together ( 123).

The slip sheet clamp 121 clamps the slip sheet IP before the substrate holding unit 110 grips the substrate P, and the slip sheet IP after the substrate holding unit 110 transfers the substrate P. In the configuration to release the clamping state of the connecting rod 1211 connected to the interleaver clamp driving unit 122, the clamp bar 1212 extending in the direction crossing the longitudinal direction of the connecting rod 1211, and the clamp bar ( And an interleaved contact portion 1213 extending from one end of 1212.

The connecting rod 1211, the clamp bar 1212, and the interleaver contacting unit 1213 are formed through a casting using a urethane material, or are integrally provided by a method of manufacturing and combining respective parts, and the interleaver clamp driving unit 122. Vertically move together in the vertical direction by the power transmitted from the.

In the substrate tray T1, at least one stage and as many as ten stages of substrate P are sequentially stacked from the lower side of the tray T1, and interlayer papers IP are interposed between the substrate P and the substrate P. It is interposed. In addition, the slip sheet IP is provided to have a larger area than the substrate P. In this embodiment, the outer peripheral surface of the slip sheet IP adjacent to the slip sheet clamping unit 120 is about 20 mm from the substrate P. The outer peripheral surface of is configured to protrude from the substrate P in a length of about 1 mm (see Fig. 3).

Assuming that 10 substrates P are stacked, the sum of the substrates P and the interlayer IP is considerably thick even if the thickness of each of the substrates P and the interlayer IP is not thick. When all nine sheets of interleaved papers IP are interposed between the substrates P, the interleaved papers IP may be torn, or the interleaved papers IP may not be clamped efficiently.

Therefore, in the present embodiment, the interlayer paper IP interposed between the 10-stage and 6-stage substrates P stacked on the upper side of the substrate tray T1 is lowered by the interlayer paper contact portion 1213 (in Fig. 1). Z clamped in a manner of being pushed toward the front (-X direction of Fig. 1), and interposed between the 5 stage and 1 stage substrate P stacked on the lower side of the substrate tray T1. The slip sheet IP is clamped only by a method of pressing down by the slip sheet contact portion 1213.

That is, the slip sheet IP interposed on the lower side of the tenth-stage substrate P stacked on the uppermost side of the substrate tray T1 is pressed downward by the bottom surface 1213a of the slip sheet contacting portion 1213, and the clamp moving portion Slightly pushed forward by the driving of the 123 is clamped on the side surface 1213b of the interleaver contact portion 1213 and one side of the substrate P of the ninth stage.

Since the slip sheet IP disposed on the lower surface of the substrate P of the ninth stage to the substrate P of the sixth stage is also clamped in the same manner, detailed description thereof will be omitted.

Meanwhile, the interleaver contact portion 1213 is bent to extend from one end of the clamp bar 1212 to have a flat bottom 1213a and a side 1213b as shown in detail in FIG. 5.

The shape of the interleaved contact portion 1213 is for preventing damage to the substrate P and the interleaved paper IP, and the side surface 1213b of the interleaved contact portion 1213 and the interleaved paper IP contact the side surfaces of the substrate P. Damage to the substrate P and the interlayer IP can be prevented by flattening the shape of the bottom surface 1213a of the interlayer contact portion 1213 pressing.

The interleaver clamp driving unit 122 is configured to vertically move the interleaver clamp 121 in the vertical direction, and is implemented using a servo motor or a stepping motor, and the details of the servo motor and the stepping motor are the same as described above. Do.

However, the reason why the servo motor or the stepping motor is used in the interleaver clamp driving unit 122 is mainly for controlling the clamping position of the interleaver clamp 121, and various sizes of the substrate P stacked on the substrate tray T1 are changed. Correspondingly, the clamping position of the slip clamp 121 may be properly adjusted.

That is, the size of the substrate P stacked on the substrate tray T1 may be variously changed, and the size of the interlayer IP may also be variously changed according to the size of the substrate P. The substrate transfer apparatus 10 according to the present invention has an advantage of maximizing the clamping efficiency of the interleaver paper IP by the interleaver clamp driver 122 consisting of a servo motor or a stepping motor and a clamp moving unit 123 described below. Have

The clamp moving part 123 is configured to move the interleaver clamp 121 and the interleaver clamp driving part 122 together in the front-back direction. The clamp moving part 1231 and the clamp moving driving part 1231 are used as power sources. And a connection bar 1232 for interconnecting the gap clamping unit 120 with each other.

The clamp movement driver 1231 can control the exact position by using a servo motor or a stepping motor similarly to the interleaver clamp driver 122, and the connection bar 1232 intercepts the power generated by the clamp movement driver 1231. It serves to deliver the clamping unit 120.

On the other hand, the gripping paper conveying unit 130 is a configuration for holding and transporting the interlayer paper (IP) attached to the lower side of the substrate (P) after the substrate (P) is transferred by the substrate gripping transport unit 110, The gripping gripping part 131, the second horizontal moving part 132 for horizontally moving the gripping gripping part 131 in the front-rear direction, and the second vertical moving part for vertically moving the gripping part 131 vertically ( 133).

The gripping portion 131 is configured to hold and transfer the sheet of paper (IP) one by one, and includes a plurality of suction units 1311 and an actuator (not shown).

The adsorption unit 1311 is configured to lift the sheet of paper (IP) one by one using vacuum pressure, and the actuator (not shown) supplies a vacuum pressure to allow the adsorption unit 1311 to hold the sheet of paper (IP). Configuration.

The second horizontal moving unit 132 is configured to transfer the interlayer paper held by the interlayer holding unit 131 in a direction intersecting with the transfer direction of the substrate holding unit 110. It includes a horizontal guide (1322) for guiding the front and rear movement of the operating body (1321), and a horizontal actuator (not shown) for moving the operating body (1321) along the horizontal guide (1322).

A groove corresponding to the projection of the horizontal guide 1322 is provided on the rear surface of the operating body 1321, and thus the operating body 1321 is coupled to the horizontal guide 1322 so as to be relatively movable with respect to the horizontal guide 1322. .

The horizontal actuator (not shown) is implemented as a general pneumatic actuator, a hydraulic actuator or an electric motor to supply the power required to move the operating body 1321 in the front and rear directions.

The second vertical moving part 133 is configured to vertically move the gripping portion 131 in the vertical direction. The second vertical moving part 133 includes a vertical actuator (not shown), a vertical actuator (not shown), and an adsorption unit 1322. Interconnecting vertical movement bars 1331.

The vertical actuator (not shown) is implemented as a general pneumatic actuator, a hydraulic actuator or an electric motor to supply the power necessary for moving the gripping portion 131 in the vertical direction.

The vertical movement bar 1331 is configured to vertically move the adsorption unit 1322 by the power generated by the vertical actuator (not shown), and is provided using a general piston or the like.

In addition, the tray transfer unit 140 is a configuration provided to transfer the empty tray, the transfer of the substrate (P) and the interleaver (IP) is completed, is provided integrally with the above-mentioned interlayer paper holding unit 130.

The tray conveying unit 140 is connected to the second vertical moving part 133 of the gripping paper conveying unit 130 and the connecting plate 141 vertically moving in the vertical direction according to the driving of the second vertical moving part 133. , A plurality of adsorption units 142 coupled to the connecting plate 141.

The connecting plate 141 is configured to vertically move in the vertical direction according to the driving of the second vertical moving part 133 in order to transfer the empty tray from which the substrate P and the interleaver IP are removed. Is a configuration for adsorbing an empty tray using vacuum pressure by the power supplied from an actuator (not shown).

The vertical actuator (not shown) of the second vertical moving part 133 vertically moves the adsorption unit 1311 of the slipper gripping transfer unit 130 vertically or under the control of the controller (not shown), or the tray transfer unit. The adsorption unit 142 of 140 is vertically moved in the vertical direction.

On the other hand, the air purge unit 150, as shown in detail in Figure 5 is provided in pairs adjacent to both sides of the slip sheet clamping unit 120 is attached to the substrate P and the lower side of the substrate P It is a structure provided so that the interleave IP may be removed by injecting air between IP.

That is, since the interlayer clamping unit 120 is pressed while the substrate holding unit 110 lifts the substrate P, a space is fixed between the substrate P and the interlayer IP. Is formed, and the air purge unit 150 blows air into the space to separate the substrate P and the interlayer IP.

Although not shown, the air purge unit 150 may be configured to include a nozzle in which air is injected in three directions, thereby increasing the efficiency of removing the slip paper (IP).

On the other hand, the tray centering unit 170 is provided to align the center of the substrate tray T7 disposed on the uppermost of the substrate trays T1 to T7 provided in a stacked structure as shown in detail in FIG. 7. The configuration includes a pair of centering bars 171 and 172 in contact with both side surfaces of the substrate tray T7, and a centering bar driving unit (not shown) for driving the centering bars 171 and 172, respectively.

In the case of stacking the plurality of substrate trays T1 to T7, the substrate trays may be formed due to the assembly tolerance between the substrate trays T1 to T7 and the impact generated during the transfer of the substrate P by the substrate gripping transfer unit 110. T1 to T7) may be tilted within a certain range.

In particular, when the substrate tray T7 disposed at the top thereof is inclined, a clamping error of the slip sheet clamping unit 120 with respect to the slip sheet IP may occur, so that the tray centering unit 170 serves to prevent this. do.

The pair of centering bars 171 and 172 contact the left and right sides of the substrate tray T7 disposed at the uppermost position to accurately align the center of the substrate tray T7, and the centering bar driving part (not shown). Is implemented by a pneumatic actuator, a hydraulic actuator or an electric motor, and serves to drive the centering bar (171, 172).

On the other hand, the roller brush unit 180 is provided on the transfer path of the substrate holding unit 110 is not removed even by the slip sheet clamping unit 120 can be attached to the lower surface of the substrate (P) in any case (IP) ) Is a configuration provided to reliably remove.

As the slip sheet clamping unit 120 and the air purge unit 150 are driven, the slip sheet IP attached to the lower side of the substrate P is usually removed, but the slip sheet IP is not removed. In case of the case of being transported, the roller brush unit 180 finally provides a certainty of removing the slip sheet (IP).

The roller brush unit 180 includes a roller 181 provided to perform a rotational movement and a brush (not shown) coupled to an outer circumferential surface of the roller 181, and the brush (not shown) of the substrate P is transferred. It is arranged closely to the lower side.

That is, the brush (not shown) is configured to contact the lower side of the slip sheet (IP) when the slip sheet (IP) is attached to the substrate (P) to sweep the slip sheet (IP) in accordance with the rotation of the roller 181 To perform.

Now, the operation of the substrate transfer apparatus 10 according to the present embodiment will be briefly described.

As described above, a plurality of substrate trays T1 to T7 are sequentially stacked on the lower side of the substrate gripping transfer unit 110, and a plurality of substrates P are disposed inside each of the substrate trays T1 to T7. A plurality of slip sheets IP interposed between the substrate P and the substrate P are disposed.

First, the centering operation of the tray T7 disposed at the uppermost end of the plurality of trays T1 to T7 is performed by the tray centering unit 170, and the uppermost of the plurality of substrates P is formed. Since a slip sheet (IP) is generally disposed on the upper side, the slip sheet holding unit 130 grips the slip sheet (IP) disposed on the upper side of the upper substrate (P) to load the slip sheet (IP) (not shown). Transfer to.

Next, according to the driving of the interlayer clamping unit 120, the interlayer paper (IP) disposed on the lower surface of the uppermost substrate (P) is clamped, and the substrate holding transfer unit (110) is clamped on the interlayer paper (IP) The uppermost substrate P is held and raised.

The substrate P is raised in a state in which the slip sheet IP is pressed downward, and the slip sheet IP is moved from the substrate P due to the difference in the rising speed of the first vertical moving portion 113 of the substrate holding unit 110. Since it is temporarily separated, a predetermined space is created between the substrate P and the slip sheet IP, and the air purge unit 150 blows air into the space to remove the slip sheet IP from the substrate P.

The substrate P from which the interlayer paper IP is removed is transferred to a substrate P stacking unit such as a feed roller (not shown) by the first horizontal moving part 112 of the substrate holding unit 110. Since the transfer direction of the substrate gripping transfer unit 110 is configured to intersect with the transfer direction of the gripping gripping transfer unit 130, the substrate P can be quickly transferred without entanglement of the transfer path.

In addition, the roller brush unit 180 is provided for the case in which the slip sheet IP is not removed by the slip sheet clamping unit 120 and the air purge unit 150, thereby increasing the reliability of removing the slip sheet IP. Can be.

Finally, when the transfer of the substrate P by the substrate gripping transfer unit 110 is completed, the interlayer clamping unit 120 is raised, and the substrate P and the interlayer IP are sequentially transferred by repeating the same process. do.

The empty tray in which all of the substrate P and the slip sheet IP are transferred is transferred by the tray transfer unit 140 which is integrally provided with the slip sheet holding unit 130, and the tray disposed under the transferred empty tray is The substrate P and the interleaver IP are transferred by raising and going through the same process.

The substrate transfer apparatus 10 according to the present invention can efficiently remove the interlayer attached to the substrate without damaging the substrate by the interlayer clamping unit 120 for mechanically separating the interlayer. Has an advantage.

While specific embodiments of the invention have been described and illustrated above, it is to be understood that the invention is not limited to the described embodiments, and that various modifications and changes can be made without departing from the spirit and scope of the invention. It is obvious to those who have knowledge. Accordingly, it should be understood that such modifications or alterations should not be understood individually from the technical spirit and viewpoint of the present invention, and that modified embodiments fall within the scope of the claims of the present invention.

1 is a perspective view of a substrate transfer apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic side view of the substrate transport apparatus of FIG. 1.

3 is a schematic plan view of the substrate transfer apparatus of FIG. 1.

4 is a side view of the substrate holding and transporting unit of FIG. 1.

5 is a side view of the slip sheet clamping unit of FIG.

Figure 6 is a perspective view of the slip sheet holding unit of Figure 1;

7 is a plan view of the tray centering unit and the roller brush unit of FIG.

Description of the Related Art [0002]

10: substrate transfer device 110: substrate holding unit

111: substrate holding part 112: first horizontal moving part

113: first vertical moving part 120: slip sheet clamping unit

121: slip clamp 122: slip clamp drive unit

123: clamp moving unit 130: gripping paper transfer unit

131: gripping gripping portion 140: tray transfer unit

150: air purge unit 170: tray centering unit

171: centering bar 180: roller brush unit

Claims (18)

A substrate holding and transferring unit which grips and transfers the plurality of substrates one by one from a substrate tray on which a plurality of substrates are stacked with gaps between them; An interlayer clamping unit for clamping the interlayer interposed between the substrate and the next substrate held by the substrate gripping transfer unit; And And a slipper gripping transfer unit which grips and transfers the corresponding slip sheets after the substrate is transferred by the substrate holding transfer unit, and grips and transfers the corresponding slip sheets in a direction crossing the moving direction of the substrate holding transfer unit. , The substrate holding transfer unit, A substrate holding part for holding the substrate; A first horizontal moving part which horizontally moves the substrate holding part horizontally; And And a first vertical moving part configured to vertically move the substrate holding part in a vertical direction. The method of claim 1, The slip sheet clamping unit, A slip sheet clamping the slip sheet before the substrate holding transfer unit grips the substrate, and releases the clamping state of the slip sheet after the substrate holding transfer unit transfers the substrate; And Substrate transfer apparatus characterized in that it comprises a slip sheet clamp driving unit for driving the slip sheet clamp. 3. The method of claim 2, The slip sheet clamping unit, The substrate transfer apparatus, characterized in that for clamping the edge of the sheet. 3. The method of claim 2, The diaphragm clamp, A connecting rod connected to the interlayer clamp driving unit; A clamp bar extending in a direction crossing the longitudinal direction of the connecting rod; And Substrate transfer apparatus characterized in that it comprises an interstices contact portion bent extending from one end of the clamp bar. 3. The method of claim 2, The slip sheet clamping unit, And a clamp moving unit for moving the interleaver clamp and the interleaver clamp driving unit together in the front-back direction. 3. The method of claim 2, The slip sheet clamp driving unit, And a servo motor or a stepping motor for adjusting the clamping position of the slip clamp with respect to the slip sheet. delete The method of claim 1, The first vertical moving unit, And a servo motor and a stepping motor for adjusting the vertical movement speed of the substrate holding part. The method of claim 1, The stroke of the substrate holding part vertically moved by the first vertical moving part has a range of 75 to 250 mm. delete The method of claim 1, The slip sheet gripping transfer unit, A sebaceous gripping portion for holding the corresponding selvage; A second horizontal moving unit which horizontally moves the interleaved gripping portion in the front-rear direction; And And a second vertical moving part configured to vertically move the gripping portion in the vertical direction. The method of claim 1, The substrate tray is provided in a plurality of stacked structure, And a tray transfer unit integrally provided with the interlayer paper holding unit and transferring the substrate tray disposed at the top of the plurality of substrate trays. The method of claim 1, It is provided adjacent to the slip sheet clamping unit, characterized in that it further comprises an air purge unit for injecting air (Air) between the substrate and the corresponding sheet of paper in the state that the corresponding sheet of paper is clamped by the sheet of paper. Substrate transfer device. 14. The method of claim 13, The air purge unit is a substrate transfer apparatus, characterized in that provided in pairs adjacent to both sides of the interleaf clamping unit. The method of claim 1, The substrate tray is provided in a plurality of stacked structure, And a tray centering unit for centering the substrate tray disposed above the plurality of substrate trays. 16. The method of claim 15, The tray centering unit, A pair of centering bars each in contact with both sides of the tray to be centered; And Substrate transfer device comprising a centering bar driving unit for driving the centering bar. The method of claim 1, And a roller brush unit provided on the transfer path of the substrate holding unit and removing the sheet from the substrate when the sheet is attached to the substrate to be conveyed by the substrate holding unit. Substrate transfer device characterized in that. 18. The method of claim 17, The roller brush unit, A roller provided to perform a rotational movement; And Substrate transfer apparatus comprising a brush coupled to the outer peripheral surface of the roller.

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