JP5012278B2 - Levitation transfer system - Google Patents

Description

  The present invention relates to a levitation conveyance system that conveys a thin plate such as a glass substrate in the conveyance direction in a floating state.

  In recent years, various developments have been made on the levitation conveyance system, and a prior art of the levitation conveyance system is disclosed in Patent Document 1. The configuration of the levitation conveyance system according to the prior art will be described as follows.

  In other words, the levitation transport system includes a system base extending in the transport direction. The system base is provided with a transport unit that transports the thin plate in the transport direction. Specifically, on one end side and the other end side in the orthogonal direction orthogonal to the transport direction in the system base, a plurality of transport rollers for transporting the thin plate are rotatable around an axis parallel to the orthogonal direction and They are provided at intervals along the transport direction. In addition, a transport roller rotation motor that rotates a plurality of transport rollers is provided at an appropriate position of the system base.

  In the system base, a plurality of levitation units for levitating a thin plate are provided at equal intervals along the transport direction and the orthogonal direction, and nozzles for ejecting air are formed on the upper surface of each levitation unit. . The arrangement state of the plurality of floating units is a lattice arrangement.

Accordingly, air is ejected from the nozzles of the plurality of floating units. The plurality of transport rollers are rotated by driving the transport roller rotating motor. Thereby, it can convey in a conveyance direction in the state which floated the thin plate.
JP-A-2005-75496

  By the way, in the levitation conveyance system according to the prior art, since the arrangement state of the plurality of levitation units is a lattice arrangement, the levitation action by the levitation unit is approximately the same width as the conveyance width in the levitation conveyance system. Thus, there are a plurality of non-levitation action zones that do not exhibit the effect at intervals along the transport direction. Therefore, when transporting in the transport direction in a state where a thin plate that is extremely deformable is levitated, a part of the thin plate that has entered the non-levitation action zone may interfere with the edge of the levitation unit. There is a problem of causing troubles in the transporting work. In addition, the above-mentioned problem is not only the straight portion extending linearly along the conveyance direction in the levitation conveyance system, but also the conveyance direction is changed from the first conveyance direction to the second conveyance direction different from the first conveyance direction. It also occurs at corners.

  Accordingly, an object of the present invention is to provide a floating transportation system having a novel configuration that can solve the above-described problems.

A first feature of the present invention is a levitation conveyance system that conveys a thin plate in a floating state in a conveyance direction. A system base, a conveyance unit that is provided in the system base and conveys a thin plate, and is provided in the system base. A plurality of rectangular levitation units for levitation of a thin plate , wherein a frame-shaped nozzle for ejecting air is formed on the upper surface, the frame-shaped nozzle is configured to be inclined toward the unit center with respect to the vertical direction ; The arrangement state of the frame-like nozzles of the plurality of floating units in a straight portion extending linearly along the conveyance direction is summarized as a staggered arrangement along the conveyance direction. .

  Here, in the claims and the specification of the present application, “provided” means not only being directly provided but also indirectly provided via an intermediate member.

According to the first feature, since the arrangement state of the frame-like nozzles of the plurality of levitation units in the straight portion of the levitation conveyance system is a staggered arrangement along the conveyance direction, the straight of the levitation conveyance system A non-levitation action zone that is substantially the same width as the conveyance width and does not exhibit the levitation action of the levitation unit is not generated in the portion.

  In the specification of the present application, the transport width refers to the width of the transport region of the thin plate, and the substantially same width as the transport width includes a width close to the transport width.

  A second feature of the present invention is a levitation transport system that transports a thin plate in the transport direction in a floating state, a system base, a transport unit that is provided in the system base, and transports the thin plate, and is provided in the system base. A plurality of levitation units for levitating a thin plate, and a unit center of most of the levitation units in a corner portion that changes the conveyance direction from the first conveyance direction to a second conveyance direction different from the first conveyance direction. Are set at equal intervals along a direction parallel to a virtual bisector that bisects the angle of intersection between the first transport direction and the second transport direction and perpendicular to the virtual bisector. A plurality of virtual orthogonal lines orthogonal to the plurality of virtual first parallel lines, or a plurality of virtual lines set in parallel to the virtual orthogonal lines and at equal intervals along the longitudinal direction of the virtual bisector With the second parallel line And summarized in that is adapted to match the point.

  According to a second feature, the unit center of most of the levitation units in the corner portion of the levitation transport system is at the intersection of the plurality of virtual first parallel lines and the plurality of virtual second parallel lines. Therefore, the non-levitation action zone that is substantially the same width as the conveyance width and does not exhibit the levitation action by the levitation unit does not occur in the corner portion of the levitation conveyance system. For the same reason, the flying performance in the first transport direction and the flying performance in the second transport direction in the corner portion of the floating transport system can be maintained at substantially the same level.

  According to the first feature of the present invention, since the non-levitation action zone does not occur in the straight portion of the levitation conveyance system, the sheet is conveyed in the conveyance direction in a state where a highly deformable thin plate is levitated. Even so, it is possible to sufficiently suppress a part of the thin plate from interfering with the edge portion of the levitation unit, and to improve the efficiency of the thin plate conveyance work by the levitation conveyance system.

  According to the second aspect of the present invention, since the non-levitation action zone does not occur in the corner portion of the levitation conveyance system, the extremely deformable thin plate is conveyed in the conveyance direction in a levitated state. Even so, it is possible to sufficiently suppress a part of the thin plate from interfering with the edge portion of the levitation unit, and to improve the efficiency of the thin plate conveyance work by the levitation conveyance system. In particular, since the flying performance in the first transport direction and the flying performance in the second transport direction in the corner portion of the levitation transport system can be maintained at substantially the same level, a thin plate is formed in the corner portion of the levitation transport system. The conveyance direction can be appropriately changed from the first conveyance direction to the second conveyance direction, and the efficiency of the thin plate conveyance work by the levitation conveyance system can be further improved.

  An embodiment of the present invention will be described with reference to FIGS.

  Here, FIG. 1 is a plan view of a levitation transport system according to an embodiment of the present invention, FIG. 2 is a plan view of a first levitation transport apparatus according to an embodiment of the present invention, and FIG. 3 is an embodiment of the present invention. FIG. 4 is a plan view of a transport direction changing device according to an embodiment of the present invention, and FIG. 5 is a plan view of a transport direction changing device according to a modification of the embodiment of the present invention. FIG. In the drawings, “F” indicates the forward direction, “P” indicates the backward direction, “L” indicates the left direction, and “R” indicates the right direction.

  The levitation conveyance system 1 according to the embodiment of the present invention is a system that is used in the field of clean conveyance, and conveys the thin plate W such as a glass substrate in the conveyance direction in a state where it is levitated. The levitation conveyance system 1 includes a first levitation conveyance device 3 that conveys the thin plate W in the first conveyance direction (the front-rear direction in the embodiment of the present invention) D1 in a state where the thin plate W is levitated, and the first levitation conveyance system 3. It conveys to the 2nd conveyance direction (in the embodiment of this invention, left-right direction) D2 which is arrange | positioned in the vicinity of the conveying apparatus 3 and is orthogonal to the 1st conveyance direction D1, in the state which floated the thin plate W. The second levitation conveyance device 5 is disposed in a relay region between the downstream side of the conveyance region of the first levitation conveyance device 3 and the upstream side of the conveyance region of the second levitation conveyance device 5, and the conveyance direction of the thin plate W is set to the first direction. And a transport direction changing device 7 for switching from the transport direction D1 to the second transport direction D2. Here, the first levitation conveyance device 3 corresponds to a first straight portion that is a part of the levitation conveyance system 1 and extends linearly along the first conveyance direction D1, and the second levitation conveyance device 5 is: It corresponds to a second straight portion that is a part of the levitation transfer system 1 and extends linearly along the second transfer direction D2, and the transfer direction change device 7 corresponds to a corner portion of the levitation transfer system 1.

  The specific configuration of the first levitation conveyance device 3 of the levitation conveyance system 1 is as follows.

  That is, as shown in FIGS. 1 and 2, the first levitation transfer device 3 includes a first transfer device body 9 extending in the first transfer direction D1, and the first transfer device body 9 is levitated and transferred. It constitutes a part of the system base of the system 1.

  The first transport device main body 9 is provided with a first transport unit 11 that transports the thin plate W in the first transport direction D1. More specifically, on the left end side and the right end side (in other words, one end side and the other end side in the second transport direction D2) of the first transport apparatus body 9, a plurality of first transport rollers that transport the thin plate W. 13 (a plurality of first transport rollers 13 on the left side and a plurality of first transport rollers 13 on the right side) are rotatable around an axis parallel to the second transport direction D2 and spaced along the first transport direction D1. Is provided. A pair of first transport roller rotating motors (an example of first transport roller rotating actuators) 15A and 15B that rotate the plurality of first transport rollers 13 are provided at appropriate positions of the first transport device main body 9. ing. Here, the output shaft (not shown) of one first conveying roller rotating motor (left-side first conveying roller rotating motor) 15A is connected to a plurality of left-side first conveying rollers 13 (not shown). Similarly, an interlocking mechanism (not shown) composed of a worm, a wheel, and the like is interlocked. Similarly, the output shaft of the other first transport roller rotating motor (first transport roller rotating motor on the right side) 15B ( (Not shown) is linked to a plurality of roller shafts (not shown) of the right-side first transport rollers 13 via a linkage mechanism (not shown).

  The first transport device main body 9 is provided with a plurality of rectangular levitation units 17 that levitate the thin plate W by air pressure. A frame-like nozzle 19 that ejects air is provided on the upper surface of each levitation unit 17. Each is formed. Further, in order to generate an air reservoir layer having a substantially uniform pressure between the upper surface of each floating unit 17 and the back surface of the thin plate W, a frame-shaped nozzle 19 of each floating unit 17 is disclosed in JP-A-2006-182563. As shown in FIG. 4, the unit is configured to be inclined toward the center of the unit with respect to the vertical direction.

The arrangement state of the frame-like nozzles 19 of the plurality of levitation units 17 in the first levitation conveyance device 3 corresponding to the first straight portion of the levitation conveyance system 1 is a staggered arrangement along the first conveyance direction D1. Yes.

  The specific configuration of the second levitation conveyance device 5 of the levitation conveyance system 1 is as follows.

  That is, as shown in FIGS. 1 and 3, the second levitation transport device 5 includes a second transport device body 21 extending in the second transport direction D2, and the second transport device body 21 is levitation transport. It constitutes a part of the system base of the system 1.

  The second transport device main body 21 is provided with a second transport unit 23 that transports the thin plate W in the second transport direction D2. More specifically, a plurality of second transports that transport the thin plate W to the front end side and the rear end side (in other words, one end side and the other end side of the first transport direction D1) of the second transport apparatus body 21. The rollers 25 (a plurality of front second transport rollers 25 and a plurality of rear second transport rollers 25) can rotate around an axis parallel to the first transport direction D1 and are spaced along the second transport direction D2 Is provided. A pair of second transport roller rotating motors (an example of second transport roller rotating actuators) 27A and 27B that rotate the plurality of second transport rollers 25 are provided at appropriate positions of the second transport device body 21. ing. Here, the output shaft (not shown) of one second transport roller rotating motor (front-side second transport roller rotating motor) 27A is a roller shaft (not shown) of a plurality of front-side second transport rollers 25. ) Through an interlocking mechanism (not shown) composed of a worm and a wheel, and the output of the other second transport roller rotating motor (second transport roller rotating motor on the right side) 27B. The shaft (not shown) is interlocked and connected to a roller shaft (not shown) of the plurality of right-side second transport rollers 25 via an interlocking mechanism (not shown).

  The second transport device main body 21 is provided with a plurality of rectangular levitation units 29 that levitate the thin plate W by the pressure of air. On the upper surface of each levitation unit 29, a frame-shaped nozzle 31 that ejects air is provided. Each is formed. In addition, in order to generate an air reservoir layer having a substantially uniform pressure between the upper surface of each floating unit 29 and the back surface of the thin plate W, the frame-shaped nozzle 31 of each floating unit 29 has a unit center in the vertical direction. Each is configured to be inclined to the side.

The arrangement state of the frame-like nozzles 31 of the plurality of levitation units 29 in the second levitation conveyance device 5 corresponding to the second straight portion of the levitation conveyance system 1 is a staggered arrangement along the second conveyance direction D2. Yes.

  The specific configuration of the transfer direction changing device 7 of the levitation transfer system 1 is as follows.

  That is, as shown in FIGS. 1 and 4, the transfer direction changing device 7 includes a changing device main body 33, and this changing device main body 33 constitutes a part of the system base of the levitation transfer system 1. is there.

  A plurality of receiving rollers (a plurality of left-side receiving rollers and a plurality of right-side receiving rollers) 35 that receive the thin plate W from the conveyance area of the first floating conveying device 3 are secondly arranged on the left end side and the right end side of the conversion device main body 33. It is rotatable around an axis parallel to the transport direction D2 and is provided at intervals along the first transport direction D1. Further, a pair of receiving roller rotating motors (an example of receiving roller rotating actuators) 37A and 37B for rotating the plurality of receiving rollers 35 are provided at appropriate positions on the front side of the conversion device main body 33. Here, the output shaft (not shown) of one receiving roller rotating motor (left-side receiving roller rotating motor) 37A is interlocked with the roller shafts (not shown) of the plurality of left-side receiving rollers 35 including worms and wheels. Similarly, an output shaft (not shown) of the other receiving roller rotating motor (right receiving roller rotating motor) 37B is coupled to each other via a mechanism (not shown). It is linked to 35 roller shafts (not shown) via a linkage mechanism (not shown).

  A plurality of delivery rollers (a plurality of front delivery rollers and a plurality of rear delivery rollers) 39 for sending the thin plate W to the conveyance area of the second levitation conveyance device 5 are provided on the front end side and the rear end side of the conversion device main body 33. Are rotatable around an axis parallel to the first transport direction D1 and provided at intervals along the second transport direction D2. In addition, a pair of feed roller rotating motors (an example of a feed roller rotating actuator) 41A and 41B that rotate the plurality of feed rollers 39 are provided at appropriate positions on the left side of the conversion device main body 33. Here, the output shaft (not shown) of one delivery roller rotating motor (front-side delivery roller rotating motor) 41A is connected to the roller shaft (not shown) of the plurality of front-side delivery rollers 39 by a worm, a wheel or the like. Similarly, the output shaft (not shown) of the other feed roller rotation motor (rear feed roller rotation motor) 41B has a plurality of linkages (not shown). It is linked and linked to a roller shaft (not shown) of the rear delivery roller 39 via a linkage mechanism (not shown).

  A plurality of stoppers 43 for restricting the movement of the thin plate W in the first transport direction D1 are provided on the front end side of the conversion device main body 33.

  The conversion device main body 33 is provided with a plurality of floating units 45 that float the thin plate W by air pressure so as to be surrounded by a plurality of receiving rollers 35 and a plurality of sending rollers 39. Are each formed with a plurality of nozzles 47 for ejecting air. Here, most of the floating units 45 are quadrangular and oriented in the same direction, and the remaining floating units 45 are triangular. Instead of making most of the floating units 45 square and the remaining floating units 45 triangular, as shown in FIG. 5, the shape of most of the floating units 45 is circular and the shape of the remaining floating units 45 May be semicircular.

  Then, the unit center of most of the floating units 45 in the conveyance direction changing device 7 corresponding to the corner portion of the floating conveyance system 1 is an intersection of the plurality of virtual first parallel lines VP1 and the virtual second parallel lines VP2. It is supposed to match. Here, the plurality of virtual first parallel lines VP1 are parallel to the virtual bisector V that bisects the intersection angle between the first transport direction D1 and the second transport direction D2, and the virtual bisect. A plurality of virtual lines set at equal intervals along a direction orthogonal to the line V. The plurality of virtual second parallel lines VP2 are virtual orthogonal lines orthogonal to the virtual bisector V A plurality of virtual lines that are parallel to the VC and set at equal intervals along the longitudinal direction of the virtual bisector V.

  Next, the operation of the embodiment of the present invention will be described.

  While the air is ejected from the nozzles 19 of the plurality of levitation units 17 in the first levitation conveyance device 3, the plurality of first conveyance rollers 13 are rotated synchronously by driving the pair of first conveyance roller rotation motors 15A and 15B. . Thereby, the thin plate W carried in the conveyance area | region of the 1st levitation conveyance apparatus 3 can be conveyed in the 1st conveyance direction D1 in the state which floated.

  Before the thin plate W passes through a predetermined position on the downstream side in the conveyance area of the first levitation conveyance device 3, a pair of receiving rollers rotate while air is ejected from the nozzles 47 of the plurality of levitation units 45 in the conveyance direction change device 7. The plurality of receiving rollers 35 driven by the motors 37A and 37B are rotated in synchronization. Accordingly, the thin plate W can be received from the transport area of the first levitation transport device 3 by the plurality of receiving rollers 35.

  After receiving the thin plate W by the plurality of receiving rollers 35, the driving of the pair of receiving roller rotating motors 37A, 37B is stopped, and the plurality of sending rollers 39 are synchronized by driving the pair of sending roller rotating motors 41A, 41B. And rotate. Thereby, the thin plate W can be sent out to the transport area of the second levitation transport device 5 by the plurality of delivery rollers 39.

  Before or when the thin plate W is sent out to the transport area of the second levitation transport device 5, a pair of second transport rollers are rotated while jetting air from the nozzles 31 of the plurality of levitation units 29 in the second levitation transport device 5. The plurality of second transport rollers 25 are rotated in synchronization by driving the motors 27A and 27B. Thereby, the thin plate W sent out to the conveyance area | region of the 2nd levitation conveyance apparatus 5 can be conveyed in the 2nd conveyance direction D2 in the state which floated. In addition, since each nozzle 31 is configured to be inclined toward the unit center with respect to the vertical direction, an air reservoir layer having a substantially uniform pressure is formed between the upper surface of each floating unit 29 and the back surface of the thin plate W. Each can be generated.

  By the above-described operation, the thin plate W can be transported in the first transport direction D1 while being floated and transported in the second transport direction D2 (general operation of the levitation transport system 1).

In addition to the general operation of the levitation conveyance system 1 described above, the arrangement of the frame-like nozzles 19 of the plurality of levitation units 17 in the first levitation conveyance device 3 (in other words, the first straight portion of the levitation conveyance system 1). Since the state is a staggered arrangement along the first conveyance direction D1, the first straight portion of the levitation conveyance system 1 has substantially the same width as the conveyance width and does not exhibit the levitation action by the levitation unit 17 Will not occur. Similarly, the arrangement state of the frame-like nozzles 31 of the plurality of levitation units 29 in the second levitation conveyance device 5 (in other words, the second straight portion of the levitation conveyance system 1) is staggered along the second conveyance direction D2. Therefore, in the second straight portion of the levitation conveyance system 1, a non-levitation action zone that is substantially the same width as the conveyance width and does not exhibit the levitation action by the levitation unit 29 does not occur.

  Furthermore, the unit center of most of the levitation units 45 in the conveyance direction changing device 7 (in other words, the corner portion of the levitation conveyance system 1) is a plurality of virtual first parallel lines VP1 and a plurality of virtual second parallel lines. Since it coincides with the intersection with VP2, a non-levitation action zone that is substantially the same width as the conveyance width and does not exhibit the levitation action by the levitation unit 45 is generated in the corner portion of the levitation conveyance system 1. There is no. For the same reason, the flying performance in the first transport direction D1 and the flying performance in the second transport direction D2 at the corner portion of the floating transport system 1 can be maintained at substantially the same level.

  As described above, according to the embodiment of the present invention, since the non-levitation action zone does not occur in the first straight portion, the second straight portion, and the corner portion of the levitating conveyance system 1, the thin plate W that is extremely easily deformed. Even when the sheet is transported in the transport direction in a state where it is levitated, it is sufficiently suppressed that a part of the thin plate W interferes with the edges of the levitation units 17, 29, 43, and the thin plate W by the levitation transport system 1 is used. The efficiency of the transfer work can be improved.

  In particular, since the floating performance in the first conveyance direction D1 and the floating performance in the second conveyance direction D2 at the corner portion of the levitation conveyance system 1 can be maintained at substantially the same level, the conveyance of the thin plate W at the corner portion of the levitation conveyance system 1 is possible. The direction can be appropriately changed from the first transport direction D1 to the second transport direction D2, and the efficiency of the work of transporting the thin plate W by the levitation transport system 1 can be further improved.

  The present invention is not limited to the description of the above-described embodiment. For example, instead of the levitation units 17, 29, and 45 that levitate the thin plate W by air pressure, the thin plate W is made using ultrasonic waves. Instead of using a levitating unit that floats or changing the transport direction of the thin plate W to the second transport direction D2 orthogonal to the first transport direction D1 in the transport direction changing device 7, another different from the first transport direction D1 It can be implemented in various other ways, such as changing to the second transport direction.

  Further, the scope of rights encompassed by the present invention is not limited to these embodiments.

It is a top view of the levitation conveyance system concerning an embodiment of the present invention. It is a top view of the 1st levitation conveyance device concerning an embodiment of the present invention. It is a top view of the 2nd levitation conveyance device concerning an embodiment of the present invention. It is a top view of the conveyance direction change apparatus which concerns on embodiment of this invention. It is a top view of the conveyance direction change apparatus which concerns on the modification of embodiment of this invention.

Explanation of symbols

D1 1st conveyance direction D2 2nd conveyance direction V Bisecting line VC Orthogonal line W Thin plate VP1 Virtual 1st parallel line VP2 Virtual 2nd parallel line 1 Levitation conveyance system 3 1st levitation conveyance apparatus 5 2nd levitation conveyance apparatus 7 Transport direction changing device 11 First transport unit 17 Floating unit 23 Second transport unit 29 Floating unit 35 Receiving roller 39 Sending roller 45 Floating unit

Claims (4)

In the levitating and conveying system that conveys the thin plate in the conveying direction with the levitated state,
System base,
A transport unit provided on the system base for transporting a thin plate;
A plurality of square- shaped nozzles that are provided on the system base and have a frame-like nozzle that blows air on the upper surface, the frame-like nozzle is inclined toward the center of the unit with respect to the vertical direction, and floats a thin plate And a levitation unit
The levitation conveyance system wherein the arrangement state of the frame-like nozzles of the plurality of levitation units in the straight portion extending linearly along the conveyance direction is a staggered arrangement along the conveyance direction . In the levitating and conveying system that conveys the thin plate in the conveying direction with the levitated state,
System base,
A transport unit provided on the system base for transporting a thin plate;
A plurality of levitation units provided on the system base and levitating a thin plate;
The unit center of most of the levitation units in the corner portion that changes the transport direction from the first transport direction to the second transport direction different from the first transport direction is the difference between the first transport direction and the second transport direction. A plurality of virtual first parallel lines set at equal intervals in a direction parallel to a virtual bisector that bisects the intersection angle and perpendicular to the virtual bisector, and the virtual two It coincides with the intersections of a plurality of virtual second parallel lines that are parallel to a virtual orthogonal line orthogonal to the bisector and set at equal intervals along the longitudinal direction of the virtual bisector. A levitation transport system characterized by   The levitation conveyance system according to claim 2, wherein most of the levitation units in the corner portion are square and are oriented in the same direction.   The levitation conveyance system according to claim 2, wherein most of the levitation units in the corner portion are circular.

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