JP4313080B2 - Non-contact levitation unit - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
[0002]
The present invention relates to a non-contact levitation unit for levitating a flat panel such as an LCD or PDP in a non-contact manner.
[0003]
[Prior art]
The applicant has focused on the development of fluid transport technology, which is one of transport methods for glass substrates and the like, and has developed, manufactured, and provided various non-contact transport devices to society (for example, Patent Document 1). reference).
[0004]
[Patent Document 1]
JP 2000-62950 A (FIG. 1)
[0005]
Since this non-contact transfer device can transfer a plate-like substrate in a non-contact manner, the substrate can be protected against dust, the substrate can be bent less, and damage caused by the bend can be prevented. It can be adapted to.
[0006]
[Problems to be solved by the invention]
The first problem of the present invention is that, in addition to the merit of the non-contact conveyance device, the consumption of fluid such as gas can be kept low, the response can be enhanced, and the production cost can be reduced. Furthermore, it is providing the non-contact levitation | floating unit which is easy to assemble various non-contact conveyance lines.
A second problem is to provide a non-contact levitation unit that can quickly remove the broken material from the transport surface in the event that the glass substrate or the like is broken.
A third problem is to provide a non-contact levitation unit capable of localizing a clean area with a high cleanliness.
[0007]
In order to solve the first and second problems, a unitized plate-shaped material having a plurality of holes formed therein, a porous body disposed in each hole of the base, each porous body, mounted so as to surround the back surface, and, a non-contact floating unit with a pressure adjusting cylinder unit for equalizing against the pressure of the gas or liquid supplied to the rear surface from the supply means The number of holes located in the central line along the conveying surface direction of the floating object of the base is made smaller than the number of holes in the other parts, and the broken object is removed along at least one side of the base. A non-contact levitation unit characterized in that a breakage receiving portion for receiving is provided (the invention according to claim 1).
[0008]
The base serves as a conveyance path for the floating object, and gas or liquid (hereinafter also simply referred to as fluid) is continuously ejected from each porous body disposed so as to face each hole of the base. Then, the fluid stays between the floating object and the base, and a wide range of fluid film is formed.
Therefore, the levitating object is levitated on the base, and the levitating object can be conveyed in a non-contact manner by applying a force in the conveying direction to the levitating object.
In addition, since a pressure adjusting cylinder is attached to each porous body, it is easy to adjust the timing of supplying fluid to each porous body, adjust the pressure of fluid, and adjust the amount of fluid supplied.
Therefore, since a wide range of fluid film is formed, the amount of fluid consumption can be kept low.
In addition, since it is easy to adjust the timing of supplying the fluid to each porous body, the response of the unit can be improved.
Moreover, since the adjustment of the pressure of the fluid with respect to each porous body is easy, unevenness of the pressure of the compressed fluid with respect to each porous body can be suppressed.
In addition, since it is easy to adjust the amount of fluid supplied to each porous body, it is also easy to adjust the flying height of the flying object.
Moreover, the point which can suppress the consumption of fluid low means that the ratio for which a porous body occupies to a base can be decreased, and the manufacturing cost cost of the porous body for the part can be suppressed.
Furthermore, since the non-contact floating unit is connected and assembled in units, the conveyance path for the floating object is completed, so that the assembly is flexible and the work is easy.
[0009]
It has been found that the fluid pressure at the center of the floating object is larger than the end of the wide range of fluid film formed by the fluid staying between the floating object and the base.
Therefore, the number of holes located immediately below the central part of the floating object, i.e., the number of holes arranged in the substantially central part of the base is smaller than the number of holes in the other parts. Fluid pressure can be reduced.
The supply amount of the gas or liquid supplied to the porous body disposed in the central portion of the base may be less than the supply amount of the gas or liquid supplied to the porous body in other portions. . The same effect can be obtained without reducing the number of holes in the central portion of the base.
[0010]
Damaged objects are pieces that fall on the base when a glass substrate, typically a flat panel, breaks.
By accommodating broken objects such as glass fragments in a damaged object receiving portion attached along at least one side of the base, glass fragments or the like can be quickly removed from the conveying surface.
[0011]
In the above invention, the porous body is ceramic, glass, synthetic resin, or metal (invention according to claim 2).
The material of the porous body is not particularly limited as long as it has a predetermined porosity. Typically, the porous body is made of ceramic, glass, synthetic resin, or metal.
[0012]
In the above invention, the pores and the porous body are formed in a circular shape (the invention according to claim 3).
The shape of the porous body and the shape of the corresponding hole are not limited, but the circular shape has advantages such as easy manufacture and robustness.
[0013]
In the above invention, the damaged object receiving portion is disposed so as to be rotatable about one end thereof (the invention according to claim 4).
Damaged materials collected in the damaged material receiving portion can be dropped and discarded by rotating the damaged material receiving portion.
[0014]
In order to solve the third problem, the base is covered with a cover to which a fan filter unit is attached. The non-contact levitation unit according to any one of claims 1 to 4 , Described invention).
[0015]
A space which is substantially closed by the front Symbol cover, flushed clean air from the fan filter unit, by flow out to cover the outside from the gap, to the space positive pressure.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the above inventions will be described with reference to the drawings.
FIG. 1 is a perspective view of a non-contact levitation unit according to the embodiment, FIG. 2 is a plan view of the unit, FIG. 3 is a side view of the unit and an enlarged view of the main part, and FIG. 4 is an exploded perspective view of the main part of the unit. FIG. 5 is an explanatory diagram of the operation of the unit.
In each of these drawings and each of the drawings to be described later, the same components are denoted by the same reference numerals, and redundant description is omitted.
In the following description, a flat panel for a flat panel display such as a liquid crystal display (LCD), a plasma display (PDP), a field emission display (FED), or an electroluminescence display (EL) is assumed as a floating object. . These panels include glass substrates and synthetic resin substrates such as plastic.
[0017]
As shown in FIGS. 1 to 3, the non-contact levitation unit 1 according to the embodiment has a plurality of holes 3, 3, 3. Porous bodies 4, 4, 4... Whose surface 40 is substantially the same height as the surface 21 of the base 2 are attached to each of the holes 3. A pressure adjusting cylinder portion 5 is attached.
Then, compressed air, for example, is supplied as a fluid from a supply means (not shown), and is ejected from the surface 40 of the porous body 4 through the pressure adjusting cylinder portion 5.
When a flat panel FP such as a glass substrate is arranged on the base 2, air stays between the flat panel FP and the base 2, and a gas film 6 (see FIG. 5 and the like) is formed over a wide range.
Therefore, the flat panel FP is levitated on the base 2, and can be conveyed in a non-contact manner by applying a force in the conveying direction to the flat panel FP.
[0018]
The base 2 forms the gas film 6 with the flat panel FP and constitutes a conveyance path for the flat panel FP. The flatness of the base surface 21 is preferably accurate.
If the flying height of the flat panel FP is about 0.1 to 0.2 mm from the base surface 21, the flat panel FP may come into contact with the base 2 if there is a problem with the flatness of the base 2. It is.
[0019]
The specific sizes of the vertical dimension L and the horizontal dimension M of the base 2 may correspond to the size of the foot panel FP to be lifted and transported.
In this case, from the viewpoint of the flatness of the base 2, for example, a length L of about 1000 to 1200 mm and a width M of about 1000 to 1500 mm are desirable. Of course, the size may be smaller than that, or may be connected in accordance with the size of the flat panel FP.
In addition, the said plate-shaped material 20 uses metal, for example, plate-shaped materials, such as stainless steel and aluminum. Further, by using the plate-like material 20 as a resin material, even if the foot panel FP contacts the plate-like material, the foot panel FP can be prevented from being damaged. It is also effective against static electricity.
[0020]
The hole 3 formed in the plate-like material 20 has a substantially circular shape, and the porous body 4 attached to the hole 3 is also formed in a substantially circular shape.
This is because the porous body 4 is formed into a substantially circular shape (a disk shape), so that it is hard to break and can be formed firmly, and the manufacturing cost is low.
The holes 3 and the porous body 4 are not limited to a circle, but may be any shape such as a triangle, a rectangle, a rectangle, a polygon, an ellipse, or the like.
[0021]
What is necessary is just to determine the magnitude | size (diameter of a hole) of the said hole 3, the arrangement | positioning of the hole 3, etc. so that the said flying height can be obtained with respect to the size of the flat panel FP.
In this embodiment, the first to fourth rows are formed in parallel with the transport surface direction X, and six holes 3 are formed in the first and third rows in the same pattern, and the second and fourth rows. Six holes 3 are formed in the same pattern.
That is, the holes 3 in the first row L1 and the third row L3 are arranged with five holes 3 at the same pitch P1 and one hole 3 at the pitch P2, and the holes in the second row L2 and the fourth row L4. 3 reverses the arrangement pattern.
In addition, the diameter of each hole 3 is about 40-50 mm.
[0022]
Structural members 23 and 24 are attached to the outer periphery and the rear surface of the plate-like material 20, which constitutes one unit when assembling the conveyance path.
[0023]
The porous body 4 is one in which air is finely dispersed and ejected from the surface 40 by the formed pores, and a porous sintered breathable ceramic having a porosity of about 30% is used.
The porous body 4 is formed in accordance with the shape of the hole 3 and is formed in a disk shape having a thickness of about 4 mm.
The material of the porous body 4 is not limited to a breathable ceramic, and may be a synthetic resin such as a porous resin such as porous glass or plastic, a metal, or the like.
Further, the porosity is not limited to about 30%, and may be 20 to 60%.
[0024]
The pressure adjusting cylinder portion 5 makes the pressure of the air supplied from the supply means substantially uniform over the entire back surface 41 of the porous body 4. It is formed in a substantially cylindrical shape.
That is, as shown in FIG. 4, it is composed of an opening 50 for facing the back surface 41 of the porous body 4, a cylindrical portion 51, and a bottom portion 52, and the longitudinal section is formed in a substantially U shape. The bottom 52 is provided with a joint screw hole 53 for attaching an air hose or the like constituting the supply means.
The pressure adjusting cylinder portion 5 configured as described above can be manufactured at low cost with a synthetic resin such as vinyl chloride.
[0025]
Next, the attachment structure of the porous body 4 and the pressure adjusting cylinder portion 5 to the base 2 will be described with reference to FIG.
The surface 40 of the porous body 4 is disposed so as to be substantially flush with the base surface 21.
More preferably, it is arranged so as to be slightly lower than the base surface 21. For example, the surface 40 of the porous body 4 is made lower than the base surface 21 by about 0.1 to 0.2 mm.
This is to prevent the porous body surface 40 from rubbing the flat panel FP, and when the porous body surface 40 protrudes above the base surface 21, the flat panel FP floats. This is because the capacity of the gas film 6 to be expanded swells and wastes air consumption.
That is, the volume of the gas film 6 may be a product value of the area of the back surface of the flat panel FP, the flying height, and the area of the surface 21 of the base 2 corresponding to the area of the back surface of the flat panel FP. .
However, when the porous body surface 40 protrudes upward from the base surface 21, a gas film having a volume corresponding to the upward protrusion height of the porous body 4 from the base surface 21 is wasted.
[0026]
The outer edge of the back surface 41 of the porous body 4 is disposed so as to be placed on a circular top surface 54 that forms the opening of the pressure adjusting cylinder portion 5.
The circular top surface 54 of the pressure adjusting cylinder 5 is fixed to the step 30 of the hole 3 of the base 2.
The edge of the surface 40 of the porous body 4 and the edge of the hole 3 of the base 2 use, for example, a sealing material (caulking material) that is cured by absorbing moisture in the air.
As a result, generation of dust or the like from the edge of the surface 40 of the porous body 4 or the edge of the hole of the base 2 can be prevented.
[0027]
The supply means includes an air hose that supplies, for example, air supplied from a compressor (about cleanness class 10) to the pressure adjusting cylinder portion 5.
Since air is supplied individually for each pressure adjusting cylinder 5, the air supply amount and supply timing to each porous body 3 can also be controlled for each porous body. Moreover, the time-up of the air supply to each porous body 4 can also be performed quickly.
[0028]
The effects of the non-contact levitation unit configured as described above will be described with reference to FIG.
The air supplied to each porous body 4 from each pressure adjusting cylinder 5 is pressure-equalized, dispersed and diffused from each surface 40 of each porous body 4, and between the base 2 and the flat panel FP. The gas film 6 is formed. The air constituting the gas film 6 is discharged from the ends of the flat panel FP in the left and right and up and down directions, but stays until then.
The air consumption can be suppressed by forming the gas film 6 not only above the porous body 4 but also between the base 2 and the flat panel FP.
The gas film 6 can float the flat panel FP by about 0.1 to 0.2 mm.
[0029]
According to the non-contact levitation unit 1 described above, first, the flat panel FP can be transported without creating transport traces or scratches.
Secondly, the flat panel FP can be prevented from being damaged by suppressing the bending of the flat panel FP due to its own weight.
Thirdly, air does not escape between the base 2 and the flat panel FP and stays for a predetermined time and a gas film 6 is formed, so that air consumption is suppressed by reducing waste of air and running cost is reduced. It can be connected to
Fourth, when a plurality of porous bodies are attached to a single chamber, the pressure of compressed air applied to each porous body may vary. The pressure adjusting cylinder portion 5 that supplies air to the body 4 supplies air to each porous body 4 so that the air pressure to each porous body 4 can be made substantially the same.
Fifth, since air is supplied for each porous body 4, the air supply amount can be adjusted for each porous body 4.
Sixth, when a plurality of porous bodies are attached to one chamber, it may be difficult to adjust the air ejection timing of each porous body disposed at both ends of the chamber.
By supplying air to each porous body 4 as in the above-described embodiment, the air ejection timing of each porous body 4 can be taken, and the air can be quickly started up.
Seventh, by reducing the size of the porous body 4, the cost of the porous body 4 can be reduced, and the pressure adjusting cylinder portion 5 can also be reduced in weight and weight.
[0030]
Note that the gas film 6 of the above embodiment has a tendency to gather at the center of the flat panel FP, and the flat panel FP has a gentle mountain shape when viewed from the transport surface direction X and the direction perpendicular thereto. Has been observed.
Therefore, the number of holes and the porous body 4 in the central portion of the base 2 in the transport surface direction X may be reduced with respect to the flat panel FP on the base 2. For example, the number of holes located in the center line (L2, L3) may be smaller than the number of holes in the other portions (L1.L4).
In addition, with respect to the flat panel FP on the base 2, the amount of air supplied to the porous body positioned directly below the central portion (L2, L3) is set to the porous portion of the other portion (L1.L4). It may be less than the amount of air supplied to the body.
Therefore, the flying height of the flat panel FP to be conveyed is unified, and the flatness of the flat panel FP can be obtained.
[0031]
In the above embodiment, air having a high cleanliness is used as the fluid, but an inert gas or a liquid such as pure water may be used depending on the process.
[0032]
The non-contact levitation unit 1 having the above configuration can be applied to a transfer apparatus 1A as shown in FIG.
The transfer apparatus 1A includes a first plate member 25 provided with a plurality of porous bodies 4 and pressure adjusting cylinder portions 5, and a first plate member provided with a plurality of porous bodies 4 and pressure adjusting cylinder portions 5 similarly. It consists of two plate-like materials 26.
The first and second plate members 25 and 26 are formed in a comb shape, and the second plate member 26 is connected to a robot arm (not shown).
Therefore, when the first and second plate-like members 25 and 26 are meshed with each other, they become a conveyance path, and when the flat plate FP is taken out by the second plate-like material 26, it becomes a robot hand, and the flat panel FP is removed. Can be transferred by contact.
[0033]
Next, the conveyance path comprised by the said non-contact levitation | floating unit 1 is illustrated in FIGS.
As shown in FIG. 9, each structural member 23 is connected by a mounting reinforcing member 27 between each unit 1, and each structural member 23 has a reinforcing structural member 24 in order to maintain the flatness of the base 2. It is fixed.
In this transport path, “FP” is a glass substrate as the flat panel, “7” is a transport roller that moves around the edge of the glass substrate FP, “70” is a roller cover, “71” is FFU, “ 72 ”is a deceleration position detection sensor, and“ 73 ”is a stop position detection sensor.
In this case, since the speed (wind speed) of the air ejected from each porous body 4 is slower than the downflow speed (for example, 0.3 meters per second) from the FFU 71, the unidirectionality is not hindered.
[0034]
According to this conveyance path, in addition to the operation and effect of the non-contact levitation unit 1, it is possible to reduce the labor of designing, installing, changing, and maintaining the conveyance path, and it is excellent in flexibility. The transfer device 1A may be arranged in the middle of the transport path.
[0035]
In the above embodiment, the non-contact levitation unit 1 is arranged in the horizontal direction (horizontal direction). However, the base may be erected and arranged in the vertical direction.
Moreover, in the said embodiment, although flat panels, such as a glass substrate, were used as a floating object, various thin plates, a wafer, an acrylic board, various film substrates, a flexible disk, and a circuit board may be used.
[0036]
Next, in the non-contact levitation unit configured as described above, as shown in FIG. 11, along with the conveyance surface direction X of the base 2, there are provided damaged object receiving portions 8 for receiving damaged objects on both sides. Also good.
The broken object receiving portion 8 is for temporarily accommodating the broken pieces and the like when the glass substrate which is a flat panel is broken and the broken pieces such as broken pieces are scattered on the base 2. Is formed.
[0037]
One of the free ends 80 of the damaged object receiving portion 8 has a hinge structure and is attached to one end of the base 2, and the other free end 81 of the damaged object receiving portion 8 is locked to the transport roller attaching plate 700.
On the other hand, one free end 80 of the damaged object receiving portion 8 is locked to one end side of the base 2 and the other free end 81 of the damaged object receiving portion 8 is connected to the transport roller mounting plate 700 side. May have a hinge structure.
Then, by rotating the damaged object receiving part 8 around the hinge, the damaged object accommodated in the damaged object receiving part 8 is dropped downward and can be discarded.
The non-contact levitation unit 1 </ b> A configured as described above is the same as the non-contact levitation unit 1 of the above-described embodiment in other configurations, and has the same effects.
[0038]
Note that an engagement U portion may be provided on the base 2 and the transport roller mounting plate 700, and an engagement reverse U portion corresponding thereto may be provided on each free end 80, 81 of the damaged object receiving portion 8.
Moreover, in this embodiment, although the said damage receiving part 8 is attached to the both ends of the said base 2, only the one end side of the base 2 may be sufficient.
Further, the damaged object receiving portion 8 may be provided in a non-contact levitation device other than the non-contact levitation unit 1.
[0039]
Next, as shown in FIG. 12, in the non-contact levitation unit 1 or 1A having the above configuration, the base 2 may be covered with the cover 9 and the fan filter unit 71 may be attached to the central portion thereof.
The cover 9 is formed of a resin plate, for example, and both ends thereof extend to the transport roller mounting plate 700, and a hole 90 for disposing the fan filter unit 71 is formed at the center.
[0040]
A HEPA filter is attached to the fan filter unit 71. The damaged object receiving portion 8 has a predetermined opening area so that the space 91 between the cover 9 and the base 2 can be maintained at a positive pressure during the operation of the fan filter unit 71 (details will be described later). A gap 92 is provided.
The height width G of the cover 9 and the flat panel (not shown) is approximately 50 millimeters.
[0041]
In the non-contact levitation unit 1B configured as described above, when the clean air sent out by the fan filter unit 71 flows out of the gap 92 to the outside, the space 91 is positively pressurized. Maintained.
Therefore, it is possible to achieve a pressure-filled clean localization and to save the air volume of the fan filter unit 71.
If the pressure in the space 91 is Pb and the external pressure is Pa, the air volume of the fan filter unit 71 and the opening area of the gap 92 should be designed so that Pb−Pa = 0.3 mmAg or more. Good.
Therefore, according to the non-contact levitation unit 1B, the space 91 can be maintained at the cleanliness class 10 or so even if the external cleanliness is a class 1,000 to 10,000.
[0042]
As long as the said clearance gap is provided in the vicinity of the both sides of the said base 2, what kind of structure may be sufficient as it. For example, as shown in FIG. 13, a gap 92 is formed between the base 2 and the damaged object receiver 8 by attaching the bowl-shaped damaged object receiver 8 to the bracket 93. In this case, one end of the free end of the bracket 93 and the base 2 are configured as a hinge, and the other end of the free end of the bracket 93 is configured to be engaged with the mounting plate 700 so that the bracket 93 can be rotated around the hinge. To do.
Other configurations are the same as those in the above-described embodiments, and have the same effects.
[0043]
【The invention's effect】
According to the present invention, since a wide range of fluid film is formed, the amount of fluid consumption can be kept low. In addition, since it is easy to adjust the timing of supplying the fluid to each porous body, the response of the unit can be improved. Moreover, since the adjustment of the pressure of the fluid with respect to each porous body is easy, unevenness of the pressure of the compressed fluid with respect to each porous body can be suppressed.
[0044]
In addition, since it is easy to adjust the amount of fluid supplied to each porous body, it is also easy to adjust the flying height of the flying object. Moreover, the point which can suppress the consumption of fluid low means that the ratio for which a porous body occupies to a base can be decreased, and the manufacturing cost cost of the porous body for the part can be suppressed. Furthermore, since the non-contact floating unit is connected and assembled in units, the conveyance path for the floating object is completed, so that the assembly is flexible and the work is easy.
[0045]
In particular, by lowering the center of the fluid pressure of the levitation object can be substantially uniform and the flying height.
[0046]
In particular, according to each invention of Claims 1 and 4, glass fragments etc. can be rapidly removed from a conveyance surface by accommodating broken articles, such as glass fragments, in a damaged article receiving part.
[0047]
In particular, according to the fifth aspect of the present invention, the positive pressure inside the cover can be maintained and the inside of the cover can be kept at a cleanness class of about 10.
[Brief description of the drawings]
FIG. 1 is a perspective view of a non-contact levitation unit according to an embodiment,
FIG. 2 is a plan view of the unit,
FIG. 3 is a side view of the unit,
FIG. 4 is an exploded perspective view of the main part of the unit,
FIG. 5 is an explanatory diagram of the operation of the unit;
FIG. 6 is a perspective view of a transfer device to which the unit is applied,
FIG. 7 is a plan view of a conveyance path connecting non-contact levitation units;
FIG. 8 is a side view of the conveyance path,
FIG. 9 is a cross-sectional view taken along the line AA of the transport path,
FIG. 10 is a cross-sectional view taken along the line BB of the transport path,
FIG. 11 is a perspective view of a non-contact levitation unit with a hook of a damaged object receiving portion,
FIG. 12 is a sectional view of a non-contact levitation unit in which a cover with FFU is arranged;
FIG. 13 is a perspective view of a main part of a non-contact levitation unit in which a cover with FFU is arranged.
[Explanation of symbols]
FP Flat panel 1 1A 1B Non-contact levitation unit 1A Transfer device 2 Base 20 Plate material 21 Base surface 23, 24 Structure material 25 First plate material 26 Second plate material 27 Mounting reinforcement 3 Hole 30 Step 4 Porous body 40 Front surface 41 Back surface of porous body 5 Pressure adjusting cylinder portion 50 Opening 51 Cylindrical portion 52 Bottom portion 53 Screw hole 54 Circular top surface 6 Gas film 7 Transport roller 70 Roller cover 71 Fan filter unit (FFU)
72 Deceleration position detection sensor 73 Stop position detection sensor 700 Conveying roller mounting plate 8 Damaged object receiving portion 80 81 Free end 9 Cover 90 Hole 91 Space 92 Clearance 93 Bracket

Claims (5)

A base having a plurality of holes formed in a unitized plate-shaped material,
A porous body disposed in each hole of the base;
For each of the porous body, mounted so as to surround the back surface, and a non-contact floating unit with a pressure adjusting cylinder unit for the pressure of the gas or liquid is supplied to pair with average Ichika to the back from the feed means Because
While reducing the number of holes located in the center line along the conveying surface direction of the floating object of the base to be smaller than the number of holes in other parts,
A non-contact levitation unit comprising a damaged object receiving portion for receiving a damaged object along at least one side of the base .   The non-contact levitation unit according to claim 1, wherein the porous body is made of ceramic, glass, synthetic resin, or metal. The non-contact conveying and floating unit according to claim 1 or 2, wherein the hole and the porous body are formed in a circular shape . The non-contact levitation unit according to any one of claims 1 to 3, wherein the damaged object receiving portion is arranged to be rotatable around one end thereof. The non-contact levitation unit according to any one of claims 1 to 4, wherein the base is covered with a cover to which a fan filter unit is attached.

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