TWI365840B - - Google Patents

Info

Publication number
TWI365840B
TWI365840B TW097125117A TW97125117A TWI365840B TW I365840 B TWI365840 B TW I365840B TW 097125117 A TW097125117 A TW 097125117A TW 97125117 A TW97125117 A TW 97125117A TW I365840 B TWI365840 B TW I365840B
Authority
TW
Taiwan
Application number
TW097125117A
Other languages
Chinese (zh)
Other versions
TW200920673A (en
Inventor
Kensuke Hirata
Kai Tanaka
Original Assignee
Ihi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corp filed Critical Ihi Corp
Publication of TW200920673A publication Critical patent/TW200920673A/en
Application granted granted Critical
Publication of TWI365840B publication Critical patent/TWI365840B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Lining And Supports For Tunnels (AREA)
TW97125117A 2007-07-20 2008-07-03 Levitation transportation system TW200920673A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007189569A JP5012278B2 (en) 2007-07-20 2007-07-20 Levitation transfer system

Publications (2)

Publication Number Publication Date
TW200920673A TW200920673A (en) 2009-05-16
TWI365840B true TWI365840B (en) 2012-06-11

Family

ID=40281205

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97125117A TW200920673A (en) 2007-07-20 2008-07-03 Levitation transportation system

Country Status (5)

Country Link
JP (1) JP5012278B2 (en)
KR (1) KR101186901B1 (en)
CN (1) CN101743185B (en)
TW (1) TW200920673A (en)
WO (1) WO2009013946A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009006215A1 (en) * 2009-01-27 2010-07-29 Knut Lange Device for receiving a pneumatic valve
JP2010173829A (en) * 2009-01-30 2010-08-12 Ihi Corp Floating conveyance device and floating unit
JP5446403B2 (en) * 2009-04-07 2014-03-19 株式会社Ｉｈｉ Conveyance direction changing device and levitating conveyance system
JP5645709B2 (en) * 2011-02-25 2014-12-24 オイレス工業株式会社 Non-contact transfer device
JP6913737B2 (en) * 2017-08-07 2021-08-04 ハンズ レーザー テクノロジー インダストリー グループ カンパニー リミテッド Non-contact transfer device
CN108502505A (en) * 2018-03-07 2018-09-07 佛山科学技术学院 A kind of assembly line corner conveying device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4313080B2 (en) * 2003-04-02 2009-08-12 第一施設工業株式会社 Non-contact levitation unit
JP2005075499A (en) * 2003-08-28 2005-03-24 Murata Mach Ltd Levitation conveyance device
KR100527241B1 (en) * 2004-11-17 2005-11-09 주식회사 에스에프에이 Substrate transfering equipment
JP4508856B2 (en) * 2004-12-22 2010-07-21 三菱重工業株式会社 Glass substrate deposition equipment
KR100713815B1 (en) * 2005-07-08 2007-05-02 주식회사 태성기연 Apparatus for transferring of glass panel

Also Published As

Publication number Publication date
JP2009023797A (en) 2009-02-05
CN101743185A (en) 2010-06-16
WO2009013946A1 (en) 2009-01-29
JP5012278B2 (en) 2012-08-29
KR20100018616A (en) 2010-02-17
CN101743185B (en) 2012-10-17
KR101186901B1 (en) 2012-10-02
TW200920673A (en) 2009-05-16

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