CN101743185A - Levitation transportation system - Google Patents
Levitation transportation system Download PDFInfo
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- CN101743185A CN101743185A CN200880024656A CN200880024656A CN101743185A CN 101743185 A CN101743185 A CN 101743185A CN 200880024656 A CN200880024656 A CN 200880024656A CN 200880024656 A CN200880024656 A CN 200880024656A CN 101743185 A CN101743185 A CN 101743185A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Lining And Supports For Tunnels (AREA)
Abstract
Levitation units (17, 29) are arranged in a staggered configuration in straight sections. The centers of most levitation units (45) at each corner section match the intersections between imaginary first parallel lines (VP) and imaginary second parallel lines (VCP). The imaginary first parallel lines (VP) are lines set so as to be parallel to a imaginary bisector (V) bisecting the intersection angle between a first transportation direction (Dl) and a second conveying direction (D2), and simultaneously, so as to be equidistantly located in the direction perpendicular to the imaginary bisector (V). The imaginary second parallel lines (VCP) are lines set so as to be parallel to a imaginary orthogonal line (VC) perpendicular to the imaginary bisector (V), and simultaneously, so as to be equidistantly located in the longitudinal direction of the imaginary bisector (V).
Description
Technical field
The present invention relates to will be as thin plates such as glass substrates with the levitation transportation device of float state to the direction of transfer transmission.
Background technology
In recent years, various exploitations were arranged, and as the correlation technique of levitation transportation device, had Japanese patent gazette, spy to open 2005-75496 number (patent documentation 1) and Japanese patent gazette, the spy opens (patent documentation 2) 2006-182563 number about levitation transportation device.The following describes the structure of the levitation transportation device that relates to above-mentioned correlation technique etc.
That is, levitation transportation device has the system's base that extends to direction of transfer.The delivery unit that transmits thin plate to direction of transfer is set on system's base.Specifically, the vertical direction vertical with direction of transfer in the system base one distolateral and another distolateral on, transmit a plurality of transmission rollers of thin plate and rotate around can be in the axle center that is parallel to above-mentioned vertical direction, and be provided with interval along direction of transfer respectively.And the appropriate location of system's base is provided with the transmission roller rotation motor that a plurality of transmission rollers are rotated.
On system's base, what make that thin plate floats a plurality ofly floats the unit and equally spaced is provided with along direction of transfer and above-mentioned vertical direction, respectively floats the top nozzle that forms the ejection air respectively of unit.And a plurality of ordered states that float the unit are that grid is arranged.
Therefore, from a plurality of nozzle ejection air that float the unit.By transmitting the driving of roller rotation a plurality of transmission rollers are rotated with motor.Thus, can under the state that thin plate floats, transmit to direction of transfer.
But, in the related levitation transportation device of above-mentioned correlation technique, a plurality of ordered states that float the unit are that grid is arranged, so in the levitation transportation device, width is with to transmit width roughly the same and do not bring into play by floating a plurality of non-floating zone of working of floating effect that the unit produces and exist with interval along direction of transfer.Therefore, very easily when direction of transfer transmitted, a part that enters the thin plate in the non-floating zone of working was floated the edge interference of unit to Bian Xing thin plate with float state, and levitation transportation device can cause the obstacle of thin plate transfer operation.And the problems referred to above not only result from the straight portion that extends to linearity in the levitation transportation device along direction of transfer, also result from direction of transfer from the bight of the 1st direction of transfer to the 2nd direction of transfer conversion that is different from the 1st direction of transfer.
Summary of the invention
The present invention invents in order to address the above problem.Thereby interfere the levitation transportation device that can improve thin plate transfer operation efficient with float state is floated the unit when direction of transfer transmits, by the part of abundant inhibition thin plate edge even the object of the present invention is to provide the thin plate that will very easily be out of shape.
In order to achieve the above object, the levitation transportation device of the 1st scheme of the present invention transmits with float state thin plate to direction of transfer, have: system's base; Delivery unit, it is arranged on the said system base, and transmits thin plate; A plurality ofly float the unit, it is arranged on the said system base, and thin plate is floated; In the said structure, a plurality of above-mentioned in the straight portion of extending along above-mentioned direction of transfer linearity ground floated the unit and is set to be staggered.
Here, in the scheme among the present invention, claims and the specification sheets, " setting " also comprises the meaning that is provided with indirectly by centre part except direct setting.In the specification sheets, " transmission width " is meant the width of the transit area of thin plate, the width and the roughly the same meaning that comprises width near the transmission width of transmission width.
According to above-mentioned the 1st scheme, the ordered state that a plurality of above-mentioned in the above-mentioned straight portion of above-mentioned levitation transportation device floated the unit is for being staggered, so do not have width in the above-mentioned straight portion of above-mentioned levitation transportation device and to transmit width roughly the same and do not bring into play by above-mentioned and float the non-floating zone of working of floating effect that the unit produces.
Owing to do not have the above-mentioned non-floating zone of working in the above-mentioned straight portion of above-mentioned levitation transportation device, even very easily the distortion thin plate with float state when direction of transfer transmits, the part that can fully suppress thin plate is floated cell edges and is interfered by above-mentioned, can improve the operating efficiency that above-mentioned levitation transportation device transmits thin plate.
The levitation transportation device of the 2nd scheme of the present invention transmits with float state thin plate to direction of transfer, have: system's base; Delivery unit, it is arranged on the said system base, and transmits thin plate; A plurality ofly float the unit, it is arranged on the said system base, and thin plate is floated; In the said structure, above-mentioned direction of transfer is constituted following arrangement mode from the 1st direction of transfer each above-mentioned center separately of floating the unit of major part to the bight of the 2nd direction of transfer conversion that is different from the 1st direction of transfer: a plurality of imaginary the 1st parallel liness, it is parallel to the binary imaginary bisector of the angle of cut of above-mentioned the 1st direction of transfer and above-mentioned the 2nd direction of transfer, and uniformly-spaced sets along the direction perpendicular to above-mentioned imaginary bisector; A plurality of imaginary the 2nd parallel liness, it is parallel to the imaginary perpendicular line vertical with above-mentioned imaginary bisector, and uniformly-spaced sets along the length direction of above-mentioned imaginary bisector; Above-mentioned each above-mentioned to float center separately, unit consistent with the intersection point of above-mentioned a plurality of imaginary the 2nd parallel liness with above-mentioned a plurality of imaginary the 1st parallel liness.
In the levitation transportation device according to the 3rd scheme of the invention described above the 2nd scheme, it is square that most of above-mentioned in the above-mentioned bight floated the unit, points to equidirectional and arranges.
In the levitation transportation device according to the 4th scheme of the invention described above the 2nd scheme, most of above-mentioned in the above-mentioned bight floated the unit for circular.
According to above-mentioned the 2nd scheme of the present invention to above-mentioned the 4th scheme, it is consistent with the intersection point of a plurality of above-mentioned imaginary the 2nd parallel liness with a plurality of above-mentioned imaginary the 1st parallel liness that most of above-mentioned in the above-mentioned bight of above-mentioned levitation transportation device floated the unit center of unit, so do not have width in the above-mentioned bight of above-mentioned levitation transportation device and to transmit width roughly the same and do not bring into play by above-mentioned and float the non-floating zone of working of floating effect that the unit produces.And, because identical reason, above-mentioned the 1st direction of transfer in the above-mentioned bight of above-mentioned levitation transportation device float performance and above-mentioned the 2nd direction of transfer float performance can remain roughly just as level.
Therefore, there is not the above-mentioned non-floating zone of working in the above-mentioned bight of above-mentioned levitation transportation device, even so the thin plate that will very easily be out of shape with float state when direction of transfer transmits, the part that can fully suppress thin plate is floated cell edges and is interfered by above-mentioned, can improve the operating efficiency that above-mentioned levitation transportation device transmits thin plate.Can be roughly the same level particularly with the property retention of floating of floating performance and above-mentioned the 2nd direction of transfer of above-mentioned the 1st direction of transfer in the above-mentioned bight of above-mentioned levitation transportation device, so in the above-mentioned bight of above-mentioned levitation transportation device, the above-mentioned direction of transfer of thin plate suitably can be changed to above-mentioned the 2nd direction of transfer from above-mentioned the 1st direction of transfer, can further be improved the operating efficiency that above-mentioned levitation transportation device transmits thin plate.
Description of drawings
Fig. 1 relates to the birds-eye view of the levitation transportation device of embodiment of the present invention.
Fig. 2 relates to the birds-eye view that the 1st of embodiment of the present invention is floated conveyer.
Fig. 3 relates to the birds-eye view that the 2nd of embodiment of the present invention is floated conveyer.
Fig. 4 relates to the birds-eye view of the direction of transfer transfer device of embodiment of the present invention.
Fig. 5 relates to the birds-eye view of the direction of transfer transfer device of embodiment of the present invention variation.
The specific embodiment
According to Fig. 1 to Fig. 5 the specific embodiment of the present invention is described below.
Here, Fig. 1 relates to the birds-eye view of the levitation transportation device of embodiment of the present invention, Fig. 2 relates to the birds-eye view that the 1st of embodiment of the present invention is floated conveyer, Fig. 3 relates to the birds-eye view that the 2nd of embodiment of the present invention is floated conveyer, Fig. 4 relates to the birds-eye view of the direction of transfer transfer device of embodiment of the present invention, and Fig. 5 relates to the birds-eye view of the direction of transfer transfer device of embodiment of the present invention variation.Among the figure, " F " be the place ahead to, " P " be the rear to, " L " be left to, " R " is right.
The levitation transportation device 1 that relates to embodiment of the present invention be used to clean the transmission field, will be as thin plate W such as glass substrates with float state to system that direction of transfer transmits.Levitation transportation device 1 has: the 1st floats conveyer 3, and it transmits with float state thin plate W to the 1st direction of transfer (being fore-and-aft direction in the embodiments of the present invention) D1; The 2nd floats conveyer 5, and it is arranged on the 1st and floats near the conveyer 3, and thin plate W is transmitted to the 2nd direction of transfer (being left and right directions in the embodiments of the present invention) D2 perpendicular to the 1st direction of transfer D1 with float state; Direction of transfer transfer device 7, it is arranged on the transfer zone that the 1st transit area downstream side and the 2nd that floats conveyer 3 floats the transit area upstream side of conveyer 5, and the direction of transfer of thin plate W is changed to the 2nd direction of transfer D2 from the 1st direction of transfer D1.Here, the 1st floats the 1st a straight portion part, that extend along the 1st direction of transfer D1 linearity ground that conveyer 3 is equivalent to levitation transportation device 1, the 2nd float conveyer 5 be equivalent to levitation transportation device 1 a part, extend to the 2nd straight portion of linearity along the 2nd direction of transfer D2, direction of transfer transfer device 7 is equivalent to the bight of levitation transportation device 1.
It is as follows that the 1st of levitation transportation device 1 floats the concrete structure of conveyer 3.
That is, as shown in Figures 1 and 2, the 1st floats conveyer 3 has the part that the 1st conveyer body 9, the 1 conveyer bodies 9 that extend to the 1st direction of transfer D1 constitute system's base of levitation transportation device 1.
The 1st conveyer body 9 is provided with the 1st delivery unit 11 that thin plate W is transmitted to the 1st direction of transfer D1.Specifically, in the left end side of the 1st conveyer body 9 and right-hand member side (in other words, the 2nd direction of transfer D2's is one distolateral and another is distolateral) on, transmit a plurality of the 1st of thin plate W transmit rollers 13 (a plurality of keep left the 1st transmit rollers 13 and a plurality of keep right the 1st transmit roller 13) rotate and be provided with interval around can be in the axle center that is parallel to the 2nd direction of transfer D2 along the 1st direction of transfer D1.The appropriate location of the 1st conveyer body 9 is provided with and makes a plurality of the 1st to transmit a pair of the 1st transmission roller rotation motor (the 1st transmits roller rotates an example of using operating mechanism) 15A, the 15B that roller 13 rotates.Here, the output shaft (not shown) that the 1st transmission roller of one side rotates with motor (the 1st transmission roller that keeps left rotates and uses motor) 15A is connected by the link gear (not shown) of formations such as screw rod and wheel and the roller bearings (not shown) of a plurality of the 1st transmission rollers 13 that keep left, equally, the 1st of opposite side the transmission roller rotation is connected by the roller bearings (not shown) of link gear (not shown) with a plurality of the 1st transmission rollers 13 of keeping right with the output shaft (not shown) of motor (the 1st transmission roller of keeping right rotates and uses motor) 15B.
The 1st conveyer body 9 is provided with a plurality of squares that thin plate W floated by air pressure and floats unit 17, respectively floats the top frame shape nozzle 19 that forms the ejection air respectively of unit 17.Respectively float produce respectively between the top of unit 17 and the thin plate W the inside pressure roughly uniformly air stockpile layer, so respectively float the relative vertical direction of a plurality of air squit holes that forms on the frame shape nozzle 19 of unit 17, tilt to respectively floating unit 17 central sides.By this structure, the air that sprays from a plurality of air squit holes sprays to the central side that respectively floats unit 17, can produce the roughly uniform air of pressure on respectively float unit 17 and between the inside of thin plate W respectively and stockpile layer.
Be equivalent to the 1st the floating a plurality of in the conveyer 3 and float the ordered state of unit 17 of the 1st straight portion of levitation transportation device 1 for being staggered.
It is as follows that the 2nd of levitation transportation device 1 floats the concrete structure of conveyer 5.
That is, as Fig. 1 and shown in Figure 3, the 2nd floats conveyer 5 has the part that the 2nd conveyer body 21, the 2 conveyer bodies 21 that extend to the 2nd direction of transfer D2 constitute system's base of levitation transportation device 1.
The 2nd conveyer body 21 is provided with the 2nd delivery unit 23 that thin plate W is transmitted to the 2nd direction of transfer D2.Specifically, in the front of the 2nd conveyer body 21 and rear end side (in other words, the 1st direction of transfer D1's is one distolateral and another is distolateral) on, transmit a plurality of the 2nd of thin plate W and transmit rollers 25 (a plurality of the forward the 2nd transmits the 2nd after rollers 25 and a plurality of the leaning on transmits roller 25) and rotate and be provided with interval around can be in the axle center that is parallel to the 1st direction of transfer D1 along the 2nd direction of transfer D2.The appropriate location of the 2nd conveyer body 21 is provided with and makes a plurality of the 2nd to transmit a pair of the 2nd transmission roller rotation motor (the 2nd transmits roller rotates an example of using operating mechanism) 27A, the 27B that roller 25 rotates.Here, the 2nd of one side transmit roller rotate with the output shaft (not shown) of motor (the forward the 2nd transmit roller rotate use motor) 27A by formations such as screw rod and wheels link gear (not shown) and the roller bearings (not shown) of a plurality of forward the 2nd transmission roller 25 be connected, equally, the 2nd of opposite side the transmission roller rotation is connected by the roller bearings (not shown) of link gear (not shown) with a plurality of the 2nd transmission rollers 25 of keeping right with the output shaft (not shown) of motor (the 2nd transmission roller of keeping right rotates and uses motor) 27B.
The 2nd conveyer body 21 is provided with a plurality of squares that thin plate W floated by air pressure and floats unit 29.Respectively float the top frame shape nozzle 31 that forms the ejection air respectively of unit 29.Respectively float produce respectively between the top of unit 29 and the thin plate W the inside pressure roughly uniformly air stockpile layer, so respectively float the frame shape nozzle 31 relative vertical direction of unit 29, to respectively floating the unit center inclination oblique.
Be equivalent to the 2nd the floating a plurality of in the conveyer 5 and float the ordered state of unit 29 of the 2nd straight portion of levitation transportation device 1 for being staggered.
The concrete structure of the direction of transfer transfer device 7 of levitation transportation device 1 such as following.
That is, as Fig. 1 and shown in Figure 4, direction of transfer transfer device 7 has transfer device body 33, and this transfer device body 33 constitutes the part of system's base of levitation transportation device 1.
On the left end side and right-hand member side of transfer device body 33, a plurality of reception rollers (a plurality of reception rollers that keep left and a plurality of reception roller of keeping right) 35 that receive thin plate W from the 1st transit area that floats conveyer 3 can rotate in the axle center that is parallel to the 2nd direction of transfer D2 and be provided with interval along the 1st direction of transfer D1 on every side.The appropriate location of transfer device body 33 front sides is provided with a pair of reception roller that a plurality of reception rollers 35 are rotated and rotates with motor (receiving the example of roller rotation with operating mechanism) 37A, 37B.Here, the output shaft (not shown) that the reception roller of one side rotates with motor (the reception roller that keeps left rotates and uses motor) 37A is connected by the link gear (not shown) of formations such as screw rod and wheel and the roller bearing (not shown) of a plurality of reception rollers 35 that keep left, equally, the rotation of the reception roller of opposite side is connected by the roller bearing (not shown) of link gear (not shown) with a plurality of reception rollers 35 of keeping right with the output shaft (not shown) of motor (the reception roller of keeping right rotates and uses motor) 37B.
On the front and rear end side of transfer device body 33, a plurality of rollers (a plurality of forward after sending roller and a plurality of leaning on send roller) 39 of sending that thin plate W is sent to the 2nd transit area that floats conveyer 5 rotate and are provided with interval along the 2nd direction of transfer D2 around can be in the axle center that is parallel to the 1st direction of transfer D1.The appropriate location in transfer device body 33 left sides is provided with a plurality of a pair of rollers of sending of sending roller 39 rotations is rotated with motor (send roller and rotate an example of using operating mechanism) 41A, 41B.Here, the roller of sending of one side rotates with the output shaft (not shown) of motor (forward send roller rotate use motor) 41A link gear (not shown) and a plurality of forward roller bearings of sending roller 39 (not shown) by formations such as screw rod and wheels and is connected, equally, opposite side send roller rotate with motor (after leaning on send roller rotate use motor) output shaft (not shown) of the 41B roller bearing of sending roller 39 (not shown) after by link gear (not shown) and a plurality of leaning on is connected.
The front of transfer device body 33 is provided with a plurality of drgs 43 that restriction thin plate W moves to the 1st direction of transfer D1.
On transfer device body 33, a plurality ofly float unit 45 and surrounded by what air pressure made that thin plate W floats by a plurality of reception rollers 35 and a plurality of roller 39 of sending, respectively float the top a plurality of nozzles 47 that form the ejection air respectively of unit 45.Here, major part is floated unit 45 and is square, points to equidirectional, and remaining to float unit 45 be three square.And, as shown in Figure 5, can with major part float unit 45 be shaped as circle, remaining float unit 45 be shaped as semicircle replace major part float unit 45 be shaped as square, it is remaining that to float unit 45 be three square.
Being equivalent to major part in the direction of transfer transfer device 7 in bight of levitation transportation device 1, to float the unit center of unit 45 consistent with the intersection point of imaginary the 2nd parallel lines VCP with a plurality of imaginary the 1st parallel lines VP.Here, a plurality of imaginary the 1st parallel lines VP are meant and are parallel to the 1st direction of transfer D1 and the binary imaginary bisector V of the angle of cut of the 2nd direction of transfer D2 and a plurality of imaginary lines of uniformly-spaced being provided with along the direction vertical with above-mentioned imaginary bisector V.A plurality of imaginary the 2nd parallel lines VCP are meant a plurality of imaginary lines that are parallel to the imaginary perpendicular line VC vertical with above-mentioned imaginary bisector V and uniformly-spaced are provided with along the length direction of above-mentioned imaginary bisector V.
The following describes the effect of embodiment of the present invention.
From the 1st a plurality of nozzle 19 ejection air that float unit 17 that float the conveyer 3, and transmit roller by a pair of the 1st and rotate the driving of using motor 15A, 15B, rotate a plurality of the 1st synchronously and transmit rollers 13.Thus, sending into the 1st thin plate W that floats the transit area of conveyer 3 can transmit to the 1st direction of transfer D1 with float state.
Before thin plate W floats the assigned position of the downstream side in the transit area of conveyer 3 by the 1st, a plurality of from direction of transfer transfer device 7 are floated in the nozzle 47 of unit 45 and are sprayed air, and, rotate a plurality of reception rollers 35 synchronously by the driving of a pair of reception roller rotation with motor 37A, 37B.Thus, can receive thin plate W from the 1st transit area that floats conveyer 3 by a plurality of reception rollers 35.
Behind a plurality of reception rollers 35 reception thin plate W, stop the driving of a pair of reception roller rotation with motor 37A, 37B, rotate with a plurality of rollers 39 of sending of the synchronous rotation of the driving of motor 41A, 41B by a pair of roller of sending simultaneously.Thus, can thin plate W be sent to the 2nd transit area that floats conveyer 5 by a plurality of rollers 39 of sending.
With thin plate W when the 2nd transit area that floats conveyer 5 is sent preceding or is sent, float in the nozzle 31 that a plurality of the conveyer 5 float unit 29 from the 2nd and to spray air, and transmit roller by a pair of the 2nd and rotate the driving of using motor 27A, 27B, rotate a plurality of the 2nd synchronously and transmit rollers 25.Thus, passing out to the 2nd thin plate W that floats the transit area of conveyer 5 can transmit to the 2nd direction of transfer D2 with float state.And each nozzle 31 is relative vertical direction, oblique to the unit center inclination respectively, thus respectively float produce respectively between the inside of the top of unit 29 and thin plate W pressure roughly uniformly air stockpile layer.
By above-mentioned action, thin plate W can transmit the back to the 1st direction of transfer D1 with float state and transmit (general action of levitation transportation device 1) to the 2nd direction of transfer D2.
General action except above-mentioned levitation transportation device 1, because (in other words the 1st float conveyer 3, the 1st straight portion of levitation transportation device 1) ordered state that a plurality of in are floated unit 17 is for being staggered, so do not have width in the 1st straight portion of levitation transportation device 1 and to transmit width roughly the same and do not bring into play by floating the non-floating zone of working of floating effect that unit 17 produces.Equally, because (in other words the 2nd float conveyer 5, the 2nd straight portion of levitation transportation device 1) ordered state that a plurality of in are floated unit 29 is for being staggered, so do not have width in the 2nd straight portion of levitation transportation device 1 and to transmit width roughly the same and do not bring into play by floating the non-floating zone of working of floating effect that unit 29 produces.
And, direction of transfer transfer device 7 (in other words, the bight of levitation transportation device 1) it is consistent with the intersection point of a plurality of imaginary the 2nd parallel lines VCP with a plurality of imaginary the 1st parallel lines VP that the major part in is floated the unit center of unit 45, so do not have width on the bight of levitation transportation device 1 and to transmit width roughly the same and do not bring into play by floating the non-floating zone of working of floating effect that unit 45 produces.Because same reason, the 1st direction of transfer D1's in the bight of levitation transportation device 1 floats floating performance and can remaining roughly the same level of performance and the 2nd direction of transfer D2.
As above-mentioned, pass through embodiments of the present invention, do not produce the non-floating zone of working on the 1st straight portion of levitation transportation device 1, the 2nd straight portion and the bight, even so the thin plate W that will very easily be out of shape with float state when direction of transfer transmits, the part that also can fully suppress thin plate W is floated the interference of 17,29,43 edges, unit, can improve the operating efficiency that levitation transportation device 1 transmits thin plate W.
Particularly the 1st direction of transfer D1's in the bight of levitation transportation device 1 floats floating performance and can remaining roughly the same level of performance and the 2nd direction of transfer D2, so in the bight of levitation transportation device 1, the direction of transfer of thin plate W can be changed to the 2nd direction of transfer D2 from the 1st direction of transfer D1, can further be improved the operating efficiency that levitation transportation device 1 transmits thin plate W.
The present invention is not limited to the explanation of above-mentioned embodiment, for example uses the unit that floats that makes by super sonic that thin plate W floats to replace floating unit 17,29,45 by what air pressure made that thin plate W floats; In direction of transfer transfer device 7, alternative direction of transfer with thin plate W is converted to the 2nd direction of transfer D2 perpendicular to the 1st direction of transfer D1, and is converted to other the 2nd direction of transfers D2 that is different from the 1st direction of transfer D1, or the like.Can both implement by variety of way.
The present invention is not limited to above-mentioned invention embodiment, can be carried out the enforcement of other modes by suitable change.Claim of the present invention is not limited to these embodiments.
The full content of Japanese patent application 2007-189569 number (application on July 20th, 2007) is included in the present specification by reference.
Claims (4)
1. levitation transportation device, it transmits with float state thin plate to direction of transfer, have:
System's base;
Delivery unit, it is arranged on the said system base, and transmits thin plate; And
A plurality ofly float the unit, it is arranged on the said system base, and thin plate is floated;
In the said structure,
A plurality of above-mentioned in the straight portion of extending along above-mentioned direction of transfer linearity ground floated the unit and is set to be staggered.
2. levitation transportation device, it transmits with float state thin plate to direction of transfer, have:
System's base;
Delivery unit, it is arranged on the said system base, and transmits thin plate; And
A plurality ofly float the unit, it is arranged on the said system base, and thin plate is floated;
In the said structure, above-mentioned direction of transfer is constituted following arrangement mode from the 1st direction of transfer each above-mentioned center separately of floating the unit of major part to the bight of the 2nd direction of transfer conversion that is different from the 1st direction of transfer:
A plurality of imaginary the 1st parallel liness, it is parallel to the binary imaginary bisector of the angle of cut of above-mentioned the 1st direction of transfer and above-mentioned the 2nd direction of transfer and along the direction perpendicular to above-mentioned imaginary bisector uniformly-spaced sets;
A plurality of imaginary the 2nd parallel liness, it is parallel to the imaginary perpendicular line vertical with above-mentioned imaginary bisector and uniformly-spaced sets along the length direction of above-mentioned imaginary bisector;
Above-mentioned each above-mentioned to float center separately, unit consistent with the intersection point of above-mentioned a plurality of imaginary the 2nd parallel liness with above-mentioned a plurality of imaginary the 1st parallel liness.
3. levitation transportation device according to claim 2 is characterized in that,
It is square that most of above-mentioned in the above-mentioned bight floated the unit, points to equidirectional and arranges.
4. levitation transportation device according to claim 2 is characterized in that,
Most of above-mentioned in the above-mentioned bight floated the unit for circular.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP189569/2007 | 2007-07-20 | ||
| JP2007189569A JP5012278B2 (en) | 2007-07-20 | 2007-07-20 | Levitation transfer system |
| PCT/JP2008/060537 WO2009013946A1 (en) | 2007-07-20 | 2008-06-09 | Levitation transportation system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101743185A true CN101743185A (en) | 2010-06-16 |
| CN101743185B CN101743185B (en) | 2012-10-17 |
Family
ID=40281205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880024656XA Active CN101743185B (en) | 2007-07-20 | 2008-06-09 | Levitation transportation system |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5012278B2 (en) |
| KR (1) | KR101186901B1 (en) |
| CN (1) | CN101743185B (en) |
| TW (1) | TW200920673A (en) |
| WO (1) | WO2009013946A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107660196A (en) * | 2017-08-07 | 2018-02-02 | 大族激光科技产业集团股份有限公司 | Non-contact handling device |
| CN108502505A (en) * | 2018-03-07 | 2018-09-07 | 佛山科学技术学院 | A kind of assembly line corner conveying device |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009006215A1 (en) * | 2009-01-27 | 2010-07-29 | Knut Lange | Device for receiving a pneumatic valve |
| JP2010173829A (en) * | 2009-01-30 | 2010-08-12 | Ihi Corp | Floating conveyance device and floating unit |
| JP5446403B2 (en) * | 2009-04-07 | 2014-03-19 | 株式会社Ｉｈｉ | Conveyance direction changing device and levitating conveyance system |
| JP5645709B2 (en) * | 2011-02-25 | 2014-12-24 | オイレス工業株式会社 | Non-contact transfer device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4313080B2 (en) * | 2003-04-02 | 2009-08-12 | 第一施設工業株式会社 | Non-contact levitation unit |
| JP2005075499A (en) * | 2003-08-28 | 2005-03-24 | Murata Mach Ltd | Levitation conveyance device |
| KR100527241B1 (en) * | 2004-11-17 | 2005-11-09 | 주식회사 에스에프에이 | Substrate transfering equipment |
| JP4508856B2 (en) * | 2004-12-22 | 2010-07-21 | 三菱重工業株式会社 | Glass substrate deposition equipment |
| KR100713815B1 (en) * | 2005-07-08 | 2007-05-02 | 주식회사 태성기연 | Apparatus for transferring of glass panel |
-
2007
- 2007-07-20 JP JP2007189569A patent/JP5012278B2/en active Active
-
2008
- 2008-06-09 WO PCT/JP2008/060537 patent/WO2009013946A1/en active Application Filing
- 2008-06-09 CN CN200880024656XA patent/CN101743185B/en active Active
- 2008-06-09 KR KR1020107000550A patent/KR101186901B1/en active IP Right Grant
- 2008-07-03 TW TW97125117A patent/TW200920673A/en unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107660196A (en) * | 2017-08-07 | 2018-02-02 | 大族激光科技产业集团股份有限公司 | Non-contact handling device |
| US11345553B2 (en) | 2017-08-07 | 2022-05-31 | Han's Laser Technology Industry Group Co., Ltd. | Non-contact transporting apparatus |
| CN108502505A (en) * | 2018-03-07 | 2018-09-07 | 佛山科学技术学院 | A kind of assembly line corner conveying device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2009013946A1 (en) | 2009-01-29 |
| TWI365840B (en) | 2012-06-11 |
| JP2009023797A (en) | 2009-02-05 |
| TW200920673A (en) | 2009-05-16 |
| KR101186901B1 (en) | 2012-10-02 |
| JP5012278B2 (en) | 2012-08-29 |
| CN101743185B (en) | 2012-10-17 |
| KR20100018616A (en) | 2010-02-17 |
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