CN101909814A - Polishing apparatus and polishing method - Google Patents

Polishing apparatus and polishing method Download PDF

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Publication number
CN101909814A
CN101909814A CN2008801226101A CN200880122610A CN101909814A CN 101909814 A CN101909814 A CN 101909814A CN 2008801226101 A CN2008801226101 A CN 2008801226101A CN 200880122610 A CN200880122610 A CN 200880122610A CN 101909814 A CN101909814 A CN 101909814A
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CN
China
Prior art keywords
grinding
mentioned
sheet material
transfer
displacement
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2008801226101A
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Chinese (zh)
Inventor
增田幸则
谷井敏展
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Sharp Corp
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Sharp Corp
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Publication of CN101909814A publication Critical patent/CN101909814A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/26Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for simultaneously grinding or polishing opposite faces of continuously travelling sheets or bands

Abstract

A board material being transferred by a transfer mechanism is sandwiched by two polishing heads, and the board material is transferred by the transfer mechanism by vibrating the two polishing heads by a vibrating mechanism in a direction intersecting with a transfer direction (T) of the board material.

Description

Lapping device and Ginding process
Technical field
The present invention relates to lapping device and Ginding process that two surfaces of sheet materials such as glass plate are ground, particularly the countermeasure that can transmit and simultaneously two surfaces be ground.
Background technology
Usually, when using the product of sheet material manufacturing regulation such as glass plate, can grind the surface of this sheet material.
As employed lapping device this moment, known have: for example put down in writing as patent documentation 1, on one side the lapping device that on one side single surface ground respectively of transfer sheet materials, for example put down in writing as patent documentation 2, maintain the lapping device that sheet material grinds two surfaces simultaneously.
Patent documentation 1: TOHKEMY 2002-066886 communique (the 4th page, Fig. 3)
Patent documentation 2: TOHKEMY 2001-334459 communique (the 5th page, Fig. 1~Fig. 2)
Summary of the invention
The problem that invention will solve
Yet, under above-mentioned situation in the past, two surfaces are ground while can't transmit simultaneously, therefore there is the problem of the high speed that is difficult to realize beat.
The present invention puts in view of the above problems and finishes, and its main purpose is when two surfaces of sheet materials such as glass plate are ground, Yi Bian transfer sheet materials is ground its two surface simultaneously, can help the high speed of beat thus on one side.
The scheme that is used to deal with problems
To achieve the above object, in the present invention, clamp sheet material, on the direction that the direction of transfer with sheet material intersects, make two grinding head vibrations under this state with two grinding heads.
Particularly, lapping device of the present invention possesses: connecting gear, and it is transfer sheet materials on the direction of transfer of regulation; Two grinding heads, it has the abradant surface that the corresponding surface to above-mentioned sheet material grinds respectively, be configured to make above-mentioned abradant surface to contact and clamp this sheet material in the thickness of slab direction with the corresponding surface of sheet material, and be configured on one side allow to utilize above-mentioned connecting gear to come transfer sheet materials, along above-mentioned corresponding surface and in direction that direction of transfer with above-mentioned connecting gear intersect be displacement direction enterprising line displacement on one side; And encourage the mechanism of shaking, it vibrates above-mentioned two grinding heads respectively to carry out the mode that anti-reset moves on above-mentioned direction of displacement.
In addition, as the Ginding process that two surfaces of sheet material are ground, use two grinding heads that respectively two surfaces of sheet material ground, on the direction of transfer of regulation, transmit this sheet material on one side, make on one side above-mentioned two grinding heads with respect to two surfaces of this sheet material respectively being to carry out the mode that anti-reset moves on the displacement direction to vibrate along the corresponding surface of this sheet material and in the direction of intersecting with above-mentioned direction of transfer, thus, Yi Bian can one side transfer sheet materials simultaneously its two surface be ground.
In addition, in said structure, for each grinding head, can make the size of the abradant surface on the direction of displacement of this grinding head bigger than the size of the sheet material on the same displacement direction, also can make this direction of displacement be and the direction of transfer direction of quadrature (with the direction of transfer direction of quadrature in fact) roughly.
In addition, for encouraging the mechanism of shaking, can adopt the structure that two grinding heads are vibrated in the mode of oppositely carrying out displacement mutually.
And except said structure, can also possess liquid provides the unit, and this liquid provides the unit that liquid (for example, water etc.) is provided on the corresponding surface of the sheet material that utilizes grinding head grinding.At this moment, have at grinding head under the situation of a plurality of grinding blocks of the abradant surface that forms this grinding head, liquid provides the unit can adopt the structure with a plurality of jetting nozzles, and wherein, above-mentioned a plurality of jetting nozzles are configured in respectively between the above-mentioned grinding block and come output liquid.
In addition, concrete purposes as lapping device of the present invention, as an example, except in the manufacture process of display panels, the grinding of outside the grinding that the employed glass plate of substrate of electrode base boards such as tft array substrate, opposite electrode substrate is carried out, can enumerate grinding that the display panels self that attaches before the Polarizer is carried out, the display panels that does not attach the kind of as above such Polarizer being carried out etc.
The invention effect
According to the present invention, clamp the sheet material that is transmitting with two grinding heads, make above-mentioned two grinding heads being to carry out the mode that anti-reset moves on the displacement direction to vibrate along the corresponding surface of sheet material and with direction that the direction of transfer of sheet material intersects, transfer sheet materials on one side thus, on one side its two surface is ground, therefore can further, in the manufacture process of the product that uses aforesaid sheet material, help the high speed of beat at grinding step self.
Description of drawings
Fig. 1 is the integrally-built stereogram of the lapping device of expression embodiments of the present invention.
Fig. 2 is that expression is while the side view that transmits the state that glass plate grinds.
Fig. 3 is that expression makes on one side upside grinding head and downside grinding head that the front elevation that provides water to come state that glass plate is ground is provided in the mode of mutually reverse displacement.
Fig. 4 amplifies expression provides the state of water to glass plate and grinding block sectional view.
Fig. 5 is the V-V line sectional view of Fig. 3.
Description of reference numerals:
10: connecting gear; 20: upside grinding head (grinding head); 21: grinding block; 30: downside grinding head (grinding head); 31: grinding block; 40: encourage the mechanism of shaking; 50: feed mechanism (liquid provides mechanism); 51: Water spray nozzle (jetting nozzle); T: direction of transfer; W: glass plate (sheet material).
The specific embodiment
Below based on the description of drawings embodiments of the present invention.
Fig. 1 is the integrally-built stereogram that schematically shows the lapping device of embodiments of the present invention, and this lapping device is in the manufacture process of the product that uses glass plate w to produce as one of material, is used to two surfaces of this glass plate w are ground.
This lapping device possesses: connecting gear 10, the glass plate w that its transmission is fed; Two grinding heads 20,30, it has the abradant surface that the corresponding surface to glass plate w grinds respectively, while the glass plate w that is configured to allow to utilize connecting gear 10 to transmit and is transmitting makes abradant surface contact with the corresponding surface of this glass plate w and clamps this glass plate w in the thickness of slab direction; And encourage the mechanism 40 of shaking, it makes above-mentioned two grinding heads 20,30 separately along the corresponding surface of glass plate w and vibrate on the direction that the direction T that utilizes connecting gear 10 to transmit glass plate w intersects.
In the present embodiment, connecting gear 10 makes glass plate w charging under level, therefore can keep level to transmit glass plate w.Particularly, a plurality of transfer rollers 11 of extending in the horizontal direction of axle center are configured to respectively on the direction of transfer T of regulation side by side.At this moment, shown in Figure 2 also as side view is positioned at a plurality of transfer rollers 11 of direction of transfer T upstream side (with the left side of figure) and the interval that is positioned between a plurality of transfer rollers 11 on equidirectional T downstream (with the right side of figure) is configured to bigger than other adjacent on direction of transfer T transfer roller 11 interval each other.But this is configured to littler than the size of the glass plate w on the direction of transfer T at interval.These transfer rollers 11 are connected with the outer drive division driving of the mode of mutually rotating with same peripheral velocity mutually in the same direction and figure.In addition, the length dimension of transfer roller 11 be configured to than with the direction of direction of transfer T quadrature (below be called transmit the direction of having a lot of social connections) on the size of glass plate w big.
Above-mentioned two grinding heads 20,30 are configured in up and down between the transfer roller 11 and equidirectional T downstream transfer roller 11 of direction of transfer T upstream side overlappingly.Each grinding head 20,30 is supported by the outer guide support mechanism guides of figure, can be at the transmission enterprising line displacement of direction of having a lot of social connections.Be equipped with in the lower face side of upside grinding head 20 staggeredly and contain roughly columned a plurality of (in the illustrated embodiment being 11) grinding block 21 that abrasive particle forms respectively.Particularly, grinding block 21 is configured to upwardly extending two row in the transmission side of having a lot of social connections respectively, side by side, the number of the grinding block 21 of the row in direction of transfer T downstream is that the number (being 5) of grinding block 21 of the row of equidirectional T upstream side adds 1 number (being 6) in the illustrated embodiment in the illustrated embodiment on direction of transfer T.In addition, the gap size that transmits between two grinding blocks 21,21 adjacent on the direction of having a lot of social connections is littler than the size of each grinding block 21 on the direction of having a lot of social connections with transmission.It is in the same plane mutually that these grinding blocks 21 are set to the lower surface of each grinding block 21, forms the abradant surface of grinding heads 20 by these lower surfaces.
On the other hand, upper surface side at downside grinding head 30, also the situation with upside grinding head 20 is identical, be equipped with staggeredly and contain roughly columned a plurality of (in the illustrated embodiment being 11) grinding block 31 that abrasive particle forms respectively, the gap size on direction is had a lot of social connections in transmission between adjacent two grinding blocks 31,31 is littler than the have a lot of social connections size of the grinding block 31 on the direction of identical transmission.Therefore, it is in the same plane mutually that these grinding blocks 31 are configured to the upper surface of each grinding block 31, forms the abradant surface of downside grinding heads 30 by these upper surfaces.In addition, the grinding block 31 of the grinding block 21 of upside grinding head 20 and downside grinding head 30 is configured on above-below direction opposed mutually.In addition, the have a lot of social connections abradant surface of each grinding head 20,30 on the direction of transmission is sized to bigger than the have a lot of social connections size of the glass plate w on the direction of identical transmission, thus, not only make whole the quilt on two surfaces of glass plate w not have to grind vacantly, transmit the lapping device that also can use present embodiment under the situation that the little glass plate of direction size of having a lot of social connections grinds at contrast this glass plate w.
Side (Fig. 1's is right-hand) on the transmission road of above-mentioned connecting gear 10 is provided with and encourages the mechanism 40 of shaking, and wherein encourages the mechanism 40 of shaking the mode of carrying out displacement repeatedly in the given size scope of above-mentioned two grinding heads 20,30 with the direction of having a lot of social connections in transmission is vibrated.At this moment, encouraging the mechanism 40 of shaking makes two grinding heads 20,30 oppositely carry out displacement mutually.Promptly, state is as follows: as shown in the hollow white arrow of solid line among Fig. 3 of front elevation, when upside grinding head 20 to the side (with the left side of figure) opposite when carrying out displacement with connecting gear 10, downside grinding head 30 carries out displacement to connecting gear 10 sides (with the right side of figure), shown in the hollow white arrow of the dotted line among the figure, when upside grinding head 20 to connecting gear 10 sides (with the right side of figure) when carrying out displacement, downside grinding head 30 carries out displacement to the opposite side (with the left side of figure) of connecting gear 10.Thus, therefore the vibration of each grinding head 20,30 can suppress the dislocation of glass plate w on direction is had a lot of social connections in transmission to cancelling out each other in the have a lot of social connections influence of direction of transmission that glass plate w is caused.In addition, as an example of the concrete pattern that vibrates, can enumerate amplitude is the vibration about several during 1 second for number mm, vibration number.
Shown in Figure 4 as the sectional view of wanting portion that amplifies presentation graphs 3 in two grinding heads 20,30, is provided with the feed mechanism 50 that two surfaces of glass plate w is provided water.Particularly, in each grinding head 20,30, be respectively equipped with and be used for a plurality of (illustrated embodiment the is 5) Water spray nozzle 51 of on the corresponding surface of the glass plate w that utilizes this grinding head 20,30 grinding, sprinkling water.Shown in Figure 5 as the V-V line sectional view of Fig. 3, each Water spray nozzle 51 in the upside grinding head 20, be configured in respectively transmission have a lot of social connections direction (with the left and right directions of figure) go up adjacent two long line side grinding blocks 21 and and a short row side grinding block 21 of these two long line side grinding block 21 adjacency between about centre.In addition, the Water spray nozzle 51 watering mouth that is configured to this Water spray nozzle 51 is compared position far away (with reference to figure 4) with respect to the corresponding surface of glass plate w with the end face of the grinding block 21 of same grinding head 20.Each Water spray nozzle 51 is connected with the outlet side of feedwater portion 52 by the outer pipe arrangement of figure, and the water that provides via above-mentioned pipe arrangement from this feedwater portion 52 spills from the watering mouth.Therefore thus, be formed with moisture film, because this moisture film grinding block 21 has reduced with resistance to sliding between the glass plate w, can reduce owing to this resistance to sliding and infringements such as cut that the surface of glass plate w is caused on the surface of glass plate w.In addition, washed away by watering owing to grinding the foreign matters such as lapping rejects that produce, thereby discharged, therefore the situation that can avoid such foreign matter to be pulled or be involved in by grinding block 21 from the surface of glass plate w.Especially, because the friction that is accompanied by grinding is easy to generate under the situation of static, and the generation of such static also is subjected to the inhibition of above-mentioned moisture film, therefore can prevent from advance to remain in the situation on the surface of glass plate w owing to such static makes foreign matter.In addition, in the explanation of the situation of downside grinding head 30, the grinding block in the top explanation 21 is replaced to grinding block 31, therefore omitted explanation.In addition, the arrow that makes progress between the grinding block 31,31 of downward arrow between the grinding block 21,21 of upside grinding head 20 and downside grinding head 30 represents to utilize the state of feed mechanism 50 waterings among Fig. 3.
Next, illustrate as mentioned above and the action of the lapping device that constitutes.
The glass plate w that is fed under level keeps this level to be positioned on the transfer roller 11 of direction of transfer T upstream side of connecting gear 10.Like this, glass plate w transmits to direction of transfer T on transfer roller 11 according to the action of connecting gear 10, enters gap between two grinding heads 20,30 from the leading section of this direction of transfer T.Encouraging the mechanism 40 of shaking makes two grinding heads 20,30 vibrate on direction is had a lot of social connections in transmission with respect to this glass plate w, follow this vibration, upside grinding head 20 grinds the upper surface of glass plate w on direction is had a lot of social connections in transmission, and downside grinding head 30 grinds the lower surface of glass plate w on direction is had a lot of social connections in transmission.On the other hand, on one side glass plate w is subjected to the grinding of two grinding heads 20,30, transmit at direction of transfer T Yi Bian be transmitted mechanism.Therefore, while glass plate w can be transmitted two surperficial grindings simultaneously.
In addition, when carrying out above-mentioned grinding, the water that spills from Water spray nozzle 51 forms moisture film at the corresponding surface of glass plate w, because the resistance to sliding meeting between this moisture film glass plate w and the grinding block 21,31 reduces, therefore can suppress to cause the situation of the infringement of cut etc. owing to 21,31 couples of glass plate w of grinding block.And foreign matters such as lapping rejects are owing to be subjected to flowing water and scrub, and therefore can not take place any residual and be removed on glass plate w.
As mentioned above, keep level discharging from transmitting the road terminal part to next procedure while be transmitted polished glass plate w of two surface whiles.
Therefore, according to present embodiment, in the manufacture process of the product that uses glass plate w to produce as one of material, as employed lapping device in the grinding step that two surfaces of this glass plate w are ground, make the grinding head 20 that is configured to clamp two surfaces that utilize the glass plate w that connecting gear 10 transmitting by encouraging the mechanism 40 of shaking, 30 with the direction of direction of transfer T quadrature on vibrate, can grind its two surface simultaneously while transmitting glass plate w, therefore, with as in the past, respectively the single surface of this glass plate is ground while transmitting glass plate, the static situation of simultaneously its two surface being ground of glass plate is compared, can be helped grinding step self, the high speed that further helps the beat of manufacture process integral body.
In addition, in the above-described embodiment, be configured to transmit glass plate w down in level (α of angle with respect to the horizontal plane be α=0 °), and make two grinding heads 20,30 opposed on above-below direction, but under with respect to the horizontal plane having tilted the state (comprising plumbness) of amount of angle [alpha] (0 °<α≤90 °) of regulation, for example glass plate w is fed etc. under the situation, can be configured under the heeling condition roughly the same with charging the time to transmit glass plate w, and make two grinding heads 20,30 with the direction of its about quadrature in inclined plane on opposed.
In addition, in the above-mentioned embodiment, make two grinding heads 20,30 transmission have a lot of social connections direction (with direction of transfer T angulation β be the direction of β=90 °) enterprising line displacement, but also can be in 90 ° of the angle beta less thaies that becomes with direction of transfer T (β<90 °.But 0 °<β) the enterprising line displacement of direction.Wherein, in this case, need make the size of the abradant surface of the grinding head 20,30 on the direction of displacement become big, and/or make the amplitude of grinding head 20,30 become big.
In addition, in the above-mentioned embodiment, when utilizing a plurality of grinding blocks to form the abradant surface of each grinding head, being shaped as of this grinding block is roughly cylindric, and be roughly cylindric but the shape of grinding block is not limited to, and can form various three-dimensional shapes.
In addition, in the above-described embodiment, utilize a plurality of grinding blocks to form abradant surface, but also can utilize a grinding block to form abradant surface, in this case, the path that water is guaranteed in the hole can be set in grinding block self, and mortise can be set on the abradant surface of grinding block wait and make water flow, be easy to get rid of thus foreign matter.
And, in the above-described embodiment, using glass plate w and in the manufacture process of the product of making as one of material, the situation that two surfaces of this glass plate w are ground has been described, but the present invention can be applied to lapping device except glass plate w, that two surfaces of various sheet materials are ground.
Industrial utilizability
As above shown in the explanation, the present invention is effective for the lapping device that two surfaces of the sheet materials such as glass plate are ground and Ginding process.

Claims (7)

1. lapping device is characterized in that:
Possess:
Connecting gear, it is transfer sheet materials on the direction of transfer of regulation;
Two grinding heads, it has the abradant surface that the corresponding surface to above-mentioned sheet material grinds respectively, be configured to make above-mentioned abradant surface to contact and clamp this sheet material in the thickness of slab direction with the corresponding surface of sheet material, be configured on one side allow to utilize above-mentioned connecting gear to come transfer sheet materials, along above-mentioned corresponding surface and in direction that direction of transfer with above-mentioned connecting gear intersect be displacement direction enterprising line displacement on one side; And
Encourage the mechanism of shaking, it vibrates above-mentioned two grinding heads respectively to carry out the mode that anti-reset moves on the direction of displacement of each grinding head.
2. lapping device according to claim 1 is characterized in that:
The size of the abradant surface of this grinding head on the direction of displacement of each grinding head is bigger than the size of the sheet material on the same displacement direction.
3. lapping device according to claim 1 is characterized in that:
The direction of displacement of each grinding head is and the direction of transfer direction of quadrature roughly.
4. lapping device according to claim 1 is characterized in that:
Encourage the mechanism of shaking and adopt the structure that two grinding heads are vibrated in the mode of oppositely carrying out displacement mutually.
5. lapping device according to claim 1 is characterized in that:
Possessing liquid provides the unit, and aforesaid liquid provides the unit to provide liquid on the corresponding surface of the sheet material that utilizes grinding head grinding.
6. lapping device according to claim 1 is characterized in that:
Grinding head has a plurality of grinding blocks of the abradant surface that forms this grinding head,
Liquid provides the unit to have a plurality of jetting nozzles, and wherein, above-mentioned a plurality of jetting nozzles are configured between the above-mentioned grinding block and come output liquid.
7. a Ginding process grinds two surfaces of sheet material, and above-mentioned Ginding process is characterised in that:
Use two grinding heads that respectively two surfaces of sheet material ground,
On one side upload to serve and state sheet material at the direction of transfer of regulation, Yi Bian make above-mentioned two grinding heads with respect to two surfaces of this sheet material respectively being to carry out the mode that anti-reset moves on the displacement direction to vibrate along the corresponding surface of this sheet material and in the direction of intersecting with above-mentioned direction of transfer.
CN2008801226101A 2008-03-31 2008-12-15 Polishing apparatus and polishing method Pending CN101909814A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008090464 2008-03-31
JP2008-090464 2008-03-31
PCT/JP2008/003773 WO2009122472A1 (en) 2008-03-31 2008-12-15 Polishing apparatus and polishing method

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US (1) US20110053461A1 (en)
CN (1) CN101909814A (en)
WO (1) WO2009122472A1 (en)

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CN103240649A (en) * 2013-05-06 2013-08-14 济南同镒节能材料有限公司 Surface polisher for contour plates
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Application publication date: 20101208