CN101284603A - Roller unit for conveying sheet material and conveyer for sheet material - Google Patents
Roller unit for conveying sheet material and conveyer for sheet material Download PDFInfo
- Publication number
- CN101284603A CN101284603A CNA2007101809348A CN200710180934A CN101284603A CN 101284603 A CN101284603 A CN 101284603A CN A2007101809348 A CNA2007101809348 A CN A2007101809348A CN 200710180934 A CN200710180934 A CN 200710180934A CN 101284603 A CN101284603 A CN 101284603A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- conveying
- sheet
- roller
- pneumatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Abstract
A laminate material conveying device is provided, for conveying laminate materials such as a glass substrate with a pneumatic bench, and converting advancing direction without a guide roller reliably with high speed when converting the conveying direction in 90 degrees. The laminate material conveying device is provided with a direction converting pneumatic conveyor (16) between a first and a second direct movement pneumatic conveyors (14, 18) to convert the conveying direction of the conveyed glass substrate (12) in 90 degrees; the direction converting pneumatic conveyor (16) is provided with a plurality of direction conversion roller units (30) between a pneumatic bench unit (20); the direction conversion roller unit (30) absorbs the glass substrate (12) with negative pressure by an absorbing pipe (32), and makes the glass substrate (12) in contact with a conveying roller (34); a rotary shaft (34A) of the conveying roller (34) is capable of altering pose in a certain range in the horizontal plane, and is capable of converting the conveying direction in 90 degrees.
Description
Technical field
The present invention relates to a kind of sheet-like material conveying device, when carrying the such sheet-like material of the employed large-scale and thin glass substrate of Liquid Crystal Display (LCD) (LCD), plasma display flat-panel monitors (FPD) such as (PDP), can change transport path squarely, and the preferred sheet-like material roller unit for conveying that is used for this sheet-like material conveying device.
Background technology
Even the glass substrate of flat-panel monitor such as Liquid Crystal Display (LCD), plasma display has very little flaw or dust to produce a very large impact quality, therefore, when it is carried, require not produce flaw from the teeth outwards or adhere to foreign matter ground substrate is remained shape near the plane, and carry swimmingly along the conveyor surface of stipulating.
There is the roller conveyer as one of this carrying method, under the situation of transport path right-angled bend, the conveyer that configuration is advanced to right angle orientation between 2 craspedodrome roller conveyers, when travel direction is changed squarely with glass substrate, conveyer is risen, the about 20～50mm of current line (pass line) the raising ground of glass substrate is carried.
In addition, the method that exists is, on the position of intersecting point of 2 craspedodrome roller conveyers of orthogonal configuration, the mechanism of glass substrate being lifted and makes its rotation is set, perhaps with the whole rotation of craspedodrome roller conveyer, but the problem which kind of method all exists is, along with the maximization of in recent years glass substrate, it is big that structure also becomes, power that is used to move and manufacturing cost also increase significantly, and the productive temp time is difficult to shorten.
In addition, known a kind of feedway, place of rollers conveyer and use pneumatic glass substrate to be floated and the pressure by air drives, and carry (for example Japanese kokai publication hei 10-139160 communique) non-contactly
Under this pneumatic situation, under the state that glass substrate is floated, change its throughput direction or make glass substrate self rotation, difficulty is controlled in the movement of this glass substrate on pressure air, though consider to lead by the ora terminalis of guiding roller to the glass substrate that floats, but glass substrate is for example being compared with the area of W2200mm * L2500mm in the 8th generation, thickness is about 0.5～0.7mm, extremely thin, make the problem that existence is very easy to break under glass substrate ora terminalis and the guiding roller case of collision by inertia.Therefore, the high speed that in the past can not carry out glass substrate is carried or conversion of high speed direction and high speed revolution.
Summary of the invention
The purpose of this invention is to provide a kind of sheet-like material conveying device, with and employed sheet-like material conveying roller unit, this sheet-like material conveying device uses pneumatic unit to support non-contactly and the transporting thin board-like material, and can not use ground such as guiding roller to carry out the high-speed transitions or the high speed revolution of the throughput direction of sheet-like material.
Can solve the above problems by each following embodiment.
(1) a kind of sheet-like material roller unit for conveying is characterized in that having: managed by the attraction usefulness that the cylindrical body that possesses opening in the upper end constitutes; Conveying roller, the S. A. in horizontal surface is supported in the inboard of this attraction with pipe with rotating freely, and can make the upper end more outstanding a little with the opening of the upper end of pipe than above-mentioned attraction; And the negative pressure source that applies negative pressure to above-mentioned attraction with pipe.
(2) according to (1) described sheet-like material roller unit for conveying, it is characterized in that, conveying direction converter is set, this conveying direction converter supports above-mentioned conveying roller, so as to make its S. A. in above-mentioned horizontal surface, around the vertical axis on the summit by this conveying roller, at least 90 ° scope angular transposition freely.
(3) according to (1) or (2) described sheet-like material roller unit for conveying, it is characterized in that, be provided with: move up and down device, above-mentioned conveying roller is supported, make its upper end can the transfer position of the current line that arrives above-mentioned sheet-like material and than above-mentioned current line by under position of readiness between displacement; With negative pressure control apparatus from pipe to above-mentioned attraction that will open, close from the negative pressure that above-mentioned negative pressure source applies with.
(4) according to (1) described sheet-like material roller unit for conveying, it is characterized in that, above-mentioned negative pressure source is the vented drum blower fan, the air suctiton inlet of this vented drum blower fan is connected with the lower ending opening of above-mentioned attraction with pipe, in pipe is used in above-mentioned attraction, at least dispose electrical motor in actuating device, conveying direction converter, this actuating device comprises the electrical motor that is used to drive above-mentioned conveying roller; This conveying direction converter is, above-mentioned conveying roller is supported, make its upper end can the transfer position of the current line that arrives above-mentioned sheet-like material, and than above-mentioned current line by under position of readiness between displacement, and, above-mentioned conveying roller is supported, so as to make its S. A. in above-mentioned horizontal surface, around the vertical axis on the summit by this conveying roller, at least 90 ° scope angular transposition freely.
(5) a kind of sheet-like material conveying device is characterized in that, has: the craspedodrome pneumatic conveyer, sheet-like material is carried to make its state that floats by gas with keeping straight on; And direction conversion pneumatic conveyer, face ground, the end configuration of the throughput direction of this craspedodrome pneumatic conveyer, the direct of travel that receives sheet-like material that transports by this craspedodrome pneumatic conveyer and the sheet-like material that makes reception is in the horizontal surface internal conversion; Above-mentioned direction conversion pneumatic conveyer constitutes, and comprising: a plurality of pneumatic the unit that has a plurality of air vents on smooth; And be configured in a plurality of above-mentioned (2) to one of (4) described sheet-like material roller unit for conveying between these a plurality of pneumatic unit; Above-mentioned sheet-like material roller unit for conveying is around the center-point ground configuration of above-mentioned direction conversion pneumatic conveyer.
(6) according to (5) described sheet-like material conveying device, it is characterized in that, above-mentioned direction conversion pneumatic conveyer has switching center pole, this switching center pole is arranged on the above-mentioned center position around vertical axis with rotating freely, and has the carrier tray that can put above-mentioned sheet-like material in the upper end, the height of above-mentioned carrier tray is set to, apply negative pressure in above-mentioned attraction with pipe to above-mentioned a plurality of sheet-like material roller unit for conveying, and when sheet-like material is attracted downwards, above-mentioned carrier tray contacted with the following of this sheet-like material, and when negative pressure is released, become noncontact.
(7) according to (5) or (6) described sheet-like material conveying device, it is characterized in that, above-mentioned craspedodrome pneumatic conveyer on above-mentioned direction conversion pneumatic conveyer, throughput direction disposes a pair ofly orthogonally, and the extended line at Width center of the current line of the moving conveyer of this pair of straight promoting the circulation of qi intersected at above-mentioned center-point.
(8) according to (7) described sheet-like material conveying device, it is characterized in that, on the equidistant position of the above-mentioned center-point of distance, dispose many above-mentioned sheet-like materials conveying unit.
(9) according to (7) described sheet-like material conveying device, it is characterized in that, dispose 1 above-mentioned light sheet material conveying unit.
According to the present invention, the sheet-like material roller unit for conveying is by attracting the sheet-like material that floats and carries by pneumatic unit etc. to attracting with the negative pressure that pipe applies, and it is contacted with conveying roller and carries out the high speed conveying of sheet-like material.And the S. A. angular transposition in horizontal surface by making conveying roller can not be provided with guiding roller ground the sheet-like material that contacts with conveying roller was carried out the high-speed transitions of throughput direction or makes its rotation this moment.
Description of drawings
Fig. 1 is the general view of the sheet-like material conveying device of expression embodiments of the present invention.
Fig. 2 is the summary section of pneumatic unit of the craspedodrome pneumatic conveyer of this sheet-like material conveying device of expression.
Fig. 3 is the section-drawing that this air countertop unit is amplified expression.
Fig. 4 is the block diagram that is illustrated in the cut-away section of the direction converting unit of using in the direction conversion pneumatic conveyer of this sheet-like material conveying device.
Fig. 5 is to remove the block diagram that attracts with the state representation of pipe with this direction conversion roller unit.
Fig. 6 for pattern be illustrated in the section-drawing of the state of the transfer position that conveying roller contacts with glass substrate in this direction conversion roller unit.
Fig. 7 for the expression this conveying roller position of readiness state, with the same section-drawing of Fig. 6.
Fig. 8 for pattern ground expression the conveying roller of this direction conversion roller unit has been changed 90 ° of postures state, with the same section-drawing of Fig. 6.
Fig. 9 for pattern be illustrated in the section-drawing of the craspedodrome roller unit that uses in the craspedodrome pneumatic conveyer of this embodiment.
Figure 10 is the planar view that 90 ° the 1st process is changed the throughput direction of glass substrate by this sheet-like material conveying device in the expression of pattern ground.
Figure 11 is the planar view of pattern ground expression the 2nd process.
Figure 12 is the planar view of pattern ground expression the 3rd process.
Figure 13 is pattern ground expression by this light sheet material feedway with the glass substrate planar view of half-twist and the 1st process of carrying on the way.
Figure 14 is the planar view of pattern ground expression the 2nd process.
Figure 15 is the planar view of pattern ground expression the 3rd process.
Figure 16 is the block diagram of other embodiments of the direction conversion conveyer of this sheet-like material conveying device of expression.
The specific embodiment
Followingly preferred implementation of the present invention is elaborated with reference to accompanying drawing.
As shown in Figure 1, the sheet-like material conveying device 10 of this embodiment comprises: the 1st craspedodrome pneumatic conveyer 14, in Fig. 1 along direction from left to right, for example large-scale LCD is carried along the current line (P1 represents with the Width line of centers) of the level of linearity non-contactly with glass substrate (sheet-like material) 12; Direction conversion pneumatic conveyer 16 is connected the 1st right-hand member craspedodrome pneumatic conveyer 14, in Fig. 1; The 2nd craspedodrome pneumatic conveyer 18 is connected this direction conversion upper side end pneumatic conveyer 16, in Fig. 1, and can carry glass substrate 12 point-blank along the current line P2 with the current line P1 quadrature of the 1st craspedodrome pneumatic conveyer 14.
In Fig. 1, symbol 29 expressions, be used for suppressing location (alignment) roller of the Width both sides configuration that move, edge current line P1, P2 outside its Width, and be configured in the registration roller that direction is changed the outside of pneumatic conveyer 16 in the conveying of glass substrate 12.
The 1st craspedodrome pneumatic conveyer 14 and the 2nd craspedodrome pneumatic conveyer 18 are constituted by a plurality of pneumatic unit 20 and craspedodrome roller unit 22 respectively.And direction conversion pneumatic conveyer 16 is by constituting with above-mentioned same a plurality of pneumatic unit 20 and direction conversion roller unit 30.
As Fig. 2, shown in Figure 3, pneumatic unit 20 constitutes, and has: pneumatic 26, be used for supporting non-contactly to the following air supply (gas) of glass substrate 12 and with glass substrate 12; With malleation generation device 28, be used for supplying with positive pressure air to pneumatic 26, for example constitute by blowing engine.
Pneumatic 26 is the box-like body of the roughly cuboid of last facial 27 general planar, is formed with the following air fed a plurality of air vent 27A that are used for glass substrate 12 in the above in the portion 27.
The the 1st and the 2nd craspedodrome pneumatic conveyer 14,18 constitutes, and is arranged as 1 row with 2～4 pneumatic 26 along its length direction, and at 5 row that laterally are arranged side by side (CV-1A～CV-1E, CV-2A～CV2E).And, in 5 row, between each pneumatic unit 20 of row CV-1A, the CV-1E in Width two outsides, CV-2A, CV-2E, dispose craspedodrome roller unit 22.
Direction conversion pneumatic conveyer 16 is connected with row CV-1A, the CV-1E of pneumatic unit 20 of the Width both sides of the throughput direction of the 1st craspedodrome pneumatic conveyer 14, and is provided with 2 pneumatic unit 20 that are listed as (CV-3A, CV-3E).Its row CV-3A, CV-3E have 2 pneumatic unit 20 respectively and are separately positioned on direction conversion roller unit 30 between this pneumatic unit 20.
And, between these 2 row CV-3A, CV-3E, dispose pneumatic unit 20A～20F of 6 row abreast with the row of pneumatic unit 20 of the 2nd craspedodrome pneumatic conveyer 18, the 1st row and the 2nd in the left side of Fig. 1 (the 1st craspedodrome pneumatic conveyer 14 sides) are listed as between pneumatic unit 20A and the 20B and the 5th row and the 6th are listed as between pneumatic unit 20E and the 20F, dispose direction conversion roller unit 30.In addition, also dispose pneumatic unit 20, when glass substrate 12 rotations, it is floated in the outside of the row CV-3E of pneumatic unit 20 (in Fig. 1, being downside).
4 direction conversion roller unit 30 of this direction conversion pneumatic conveyer 16 are configured to, intersection point with the extended line of current line P1, the P2 of the 1st and the 2nd craspedodrome pneumatic conveyer 14,18 is center-point CR, and equidistant apart from this center-point CR, promptly on same circumference.
Below, the detailed structure of direction converting unit 30 is described.
As Fig. 4, shown in Figure 5, direction conversion roller unit 30 constitutes, and has: the attraction pipe 32 that possesses the vertical direction of opening 33A in the upper end; Conveying roller 34 is supported in the inboard of this attraction with pipe 32 by the S. A. 34A in the horizontal surface with being rotated freely, and can make the upper end more outstanding a little with the opening 33A of the upper end of pipe 32 than attraction; And as the blowing engine 36 that applies the negative pressure source of negative pressure to attraction with pipe 32.
Attract to comprise: be enclosed near the minor diameter 32A of conveying roller 34 with pipe 32; And be connected on the lower end of this minor diameter 32A, arrive the large-diameter portion 32B till the upper surface of blowing engine 36 from here.And, attracting top to form 4 carriage 32C with the large-diameter portion 32B of pipe 32, the front end of this carriage 32C is fixed on conveyor surface than the current line P1, the P2 that comprise glass substrate 12 by (omitting and illustrate) on the position of below.
Direction conversion roller unit 30 has conveying roller and moves up and down device 38.This conveying roller moves up and down device 38 and supports conveying rollers 34, make its transfer position (with reference to Fig. 5, Fig. 6) that can arrive above-mentioned current line P1, P2 in the top and than its by time and and current line P1, P2 on glass substrate 12 non-contacting position of readiness (with reference to Fig. 4, Fig. 7) between carry out displacement.
Conveying roller moves up and down device 38 and is configured in the large-diameter portion 32B that attracts with pipe 32, and is made of the spiral piping arrangement that is provided with on the substrate on be fixed on blowing engine 36 40.
This conveying roller as spiral piping arrangement moves up and down the movable part 38A of device 38, can move up and down within the specific limits with respect to substrate 40, support to have mounted panel 39 in the upper end of this movable part 38A, move up and down device 38 at the downside of this mounted panel 39 and roller and hold conveying roller attitude-control device 42 in abutting connection with twelve Earthly Branches.
Conveying roller attitude-control device 42 has by the attitude actuating spindle 43 on the central axis 32CL of the vertical direction on the summit of conveying roller 34, and be built-in with the device that for example constitutes by cam mechanism (omitting diagram), in Fig. 4, Fig. 5, can make the attitude actuating spindle 43 of vertical direction keep plumbness, at least 90 ° scope, center on central axis 32CL swing.
Attitude actuating spindle 43 connects the center of above-mentioned mounted panel 39 and outstanding upward, supports to have roller support 44 and driving motor 46 in the top.
Conveying roller 34 is a magnetic roller, by being supported in the driving magnetic roller of supporting on the platform 45 35 on the anterior locations of this conveying roller 34, drives with contactless state with rotating freely.
The axle drive shaft 46A direct connection of the S. A. 35A of magnetic roller 35 and driving motor 46, and by these driving motor 46 rotation drivings.
This direction conversion roller unit 30 moves up and down device 38 by conveying roller, makes the conveying roller 34 can be from attracting with the outstanding a little transfer position (with reference to Fig. 5, Fig. 6) of the upper surface 33B of pipe 32, and dropping to lean between the position of readiness of below than upper surface 33B as Fig. 4, upper end shown in Figure 7 and move up and down.
And, by conveying roller attitude-control device 42, can make glass substrate 12 at least 90 ° angular range, adjust the position around central axis 32CL, so as to make its become as shown in Figure 7 the attitude that in the face parallel, is rotated with current line P1 and the attitude that in the face parallel, is rotated as shown in Figure 8 with current line P2.
As shown in Figure 9, the 1st and the 2nd craspedodrome pneumatic conveyer 14,18 employed craspedodrome roller units 22 constitute, and have: the craspedodrome conveying roller 22A that can rotate in the vertical surface parallel with each current line P1, P2; The upper surface than the upper end of craspedodrome conveying roller 22A slightly the attraction of the vertical direction of lowland configuration with pipe 22B; Attract to connect the blowing engine 22C of air vent ground configuration at this with the lower end of pipe 22B; Be used for driving non-contactly magnetic drive roller 22D as the craspedodrome conveying roller 22A of magnetic roller; Be used to drive the electrical motor 22E of magnetic drive roller 22D.
Below, following process is described, this process is by above-mentioned sheet-like material conveying device 10 glass substrate 12 to be changed pneumatic conveyers 16 from the 1st craspedodrome pneumatic conveyer 14 through directions, and does not make it be transported to the 2nd pneumatic conveyer 18 rotatably herein.
At first, as Fig. 1, shown in Figure 10, it is parallel with the current line P1 of the 1st craspedodrome conveyer 14 to make the direction conversion roller unit 30 of direction conversion pneumatic conveyer 16 become the plane of revolution of conveying roller 34 in advance.By the air of malleation the glass substrate 12 on the 1st craspedodrome pneumatic conveyer 14 is floated from pneumatic 26 ejection, and, this moment is when driving the blowing engine 22C of craspedodrome roller unit 22, from attracting effect negative pressure below glass substrate 12, attract glass substrate 12 so that make itself and the last end in contact that is positioned at the craspedodrome conveying roller 22A of transfer position with pipe 22B.
Therefore, if drive craspedodrome conveying roller 22A by magnetic drive roller 22D, then glass substrate 12 can with the state that on pneumatic 26, floats, in Fig. 1 along from the left side to the right, reliably and at high speed carrying.
If from pneumatic 26 air of supplying with malleation in advance of direction conversion pneumatic conveyer 16, then glass substrate 12 moves on direction conversion pneumatic conveyer 16 swimmingly.At this moment, when from blowing engine 36 when the attraction of direction conversion roller unit 30 applies negative pressure with pipe 32, glass substrate 12 is by towards attracting by the conveying roller 34 that drives magnetic roller 35 rotations, and presses by its contact and to be carried reliably.
In addition, in direction conversion roller unit 30, move up and down device 38 by conveying roller and set in advance conveying roller 34, so that its upper end is become than attracting the outstanding a little transfer position with the upper surface 33B of pipe 32.
When glass substrate 12 moves on the direction conversion roller conveyer 16, stop the conveying of conveying roller 34, then, stop to apply negative pressure, and move up and down device 38 by conveying roller and make conveying roller 34 drop to position of readiness.
Under the state of this position of readiness, in direction conversion roller unit 30, make 42 actions of conveying roller attitude-control device, the S. A. 34A that makes conveying roller 34 by attitude actuating spindle 43 is around central axis 32CL half-twist, and as shown in figure 11, make the plane of revolution of conveying roller 34 parallel with plane of revolution and the current line P2 of the craspedodrome conveying roller 22A of the 2nd craspedodrome pneumatic conveyer 18.
In addition, at this moment or front and back, make the center-point CR coupling of the center of glass substrate 12 and the Width center of the 1st and the 2nd craspedodrome pneumatic conveyer 14,18 (current line P1, P2) and direction conversion pneumatic conveyer 16 by registration roller 19.
Then, move up and down device 38 by conveying roller and make conveying roller 34 rise to transfer position, simultaneously, starting blowing engine 36 applies negative pressure to glass substrate 12, and makes the last end in contact of this glass substrate 12 and conveying roller 34.Under this state, drive conveying roller 34 so that glass substrate 12 is moved along the 2nd craspedodrome pneumatic conveyer 18 directions.
The 2nd craspedodrome pneumatic conveyer 18 makes craspedodrome conveying roller 22A be in transfer position in advance and drives along throughput direction, and applies negative pressure to attraction with pipe 22B by blowing engine 22C.
Driving by conveying roller 34, glass substrate 12 moves on the 2nd craspedodrome pneumatic conveyer 18 from direction conversion pneumatic conveyer 16, and, move along the current top of line P2 in Fig. 1, Figure 11 by the 2nd craspedodrome pneumatic conveyer 18, and finish as illustrated in fig. 12 to carry.
The course of conveying of above-mentioned glass substrate 12 not rotary glass substrate 12 ground with 90 ° of throughput direction conversion, below, the process that makes glass substrate 12 half-twists and carry on direction conversion pneumatic conveyer 16 is described.
Because this glass substrate course of conveying is same as described above to state shown in Figure 10 from state shown in Figure 1, therefore omit explanation.
Make glass substrate 12 under the situation of rotation on the direction conversion pneumatic conveyer 16, under state shown in Figure 10, from glass substrate 12 by the state of transfer to the conveying roller 34 of direction conversion pneumatic conveyer 16, as shown in figure 13, by conveying roller attitude-control device 42, only make the plane of revolution half-twist (with reference to Figure 14) of the conveying roller 34 on the current line P1 on the direction conversion pneumatic conveyer 16.With above-mentioned same, make the above-mentioned conveying roller 34 that is rotated 90 ° be in position of readiness, and stop to apply of negative pressure.
After 90 ° of rotations, begin applying of negative pressure, and make conveying roller 34 be in transfer position, under this state, as shown in figure 14,4 conveying roller 34 directions of direction conversion pneumatic conveyer 16 are as one man driven, so that glass substrate 12 rotates in the counterclockwise direction.So glass substrate 12 is that the center is rotated with the center-point CR of direction conversion pneumatic conveyer 16, and when having rotated 90 ° in the counterclockwise direction, stops the rotation of glass substrate 12.
Then, by each conveying roller attitude-control device 42, a pair of conveying roller 34 that direction is changed on the current line P2 of pneumatic conveyer 16 rotates, so that plane of revolution is become and the parallel vertical surface of line P2 (with reference to Figure 15) that passes through.At this moment, with above-mentioned same, make conveying roller 34 be in position of readiness, and stop to apply of negative pressure.
After 90 ° of rotations, begin to apply negative pressure, and make conveying roller 34 be in transfer position, when under this state, making conveying roller 34 rotations, glass substrate 12 is by on transfer to the 2 craspedodrome pneumatic conveyers 18 from direction conversion pneumatic conveyer 16, and directly carried.
In addition, as shown in figure 16, also can in direction conversion roller 16, around vertical axis switching center pole 48 be set on the position of CR at the center point with rotating freely, and the carrier tray 48A that can put glass substrate 12 be set in the upper end of this switching center pole 48.
In this case, the height setting of carrier tray 48A is, apply negative pressure in attraction with pipe 32 to a plurality of direction conversion rollers unit 30, glass substrate 12 be attracted and its below during with conveying roller 34 state of contact, carrier tray 48A contacted with the following of glass substrate 12, and when negative pressure is released, do not contact with the following of glass substrate 12.
So, direction of passage conversion pneumatic conveyer 16, glass substrate 12 is that the center is rotated with its center-point CR, and does not need postrotational location.
And under the situation of the switching center pole of stating in the use 48, the direction conversion roller unit 30 of direction conversion pneumatic conveyer 16 is not 4 yet, but 3 or 2 even 1.
In the above-described embodiment, direction conversion roller unit 30 constitutes, and its conveying roller 34 moves up and down with respect to the upper surface 32B of attraction with pipe 32, but the present invention is not limited to this, and conveying roller 34 is moved up and down with pipe 32 with attraction.
Equally, the plane of revolution that makes conveying roller 34 by conveying roller attitude-control device 42 is around central axis 32CL rotation, but the present invention is not limited to this, if desired, then the S. A. 34A of conveying roller 34 can be rotated in horizontal surface so that its throughput direction is got final product by 90 ° of conversions, therefore, also can make conveying roller 34 and S. A. 34A thereof with attracting with pipe 32 rotations.
And the structure that the conveying roller of conveying roller attitude-control device 42 moves up and down device, conveying roller attitude-control device is not limited to the example of embodiment, also can be other structure.For example also can use cam mechanism, rotary solenoid and air to press driving device etc.
Claims (9)
1, a kind of sheet-like material roller unit for conveying is characterized in that having:
Manage by the attraction usefulness that the cylindrical body that possesses opening in the upper end constitutes;
Conveying roller, the S. A. in horizontal surface is supported in the inboard of this attraction with pipe with rotating freely, and the comparable above-mentioned attraction in upper end is outstanding a little with the opening of the upper end of pipe; And
Apply the negative pressure source of negative pressure with pipe to above-mentioned attraction.
2, sheet-like material roller unit for conveying according to claim 1 is characterized in that,
Conveying direction converter is set, and this conveying direction converter supports above-mentioned conveying roller, so as to make its S. A. in above-mentioned horizontal surface around the vertical axis on the summit by this conveying roller, at least 90 ° scope angular transposition freely.
3, sheet-like material roller unit for conveying according to claim 1 and 2 is characterized in that, is provided with:
Move up and down device, this moves up and down device above-mentioned conveying roller is supported, make its upper end can the transfer position of the current line that arrives above-mentioned sheet-like material and than above-mentioned current line by under position of readiness between displacement; With
Negative pressure control apparatus, this negative pressure control apparatus is to opening, close with the negative pressure that pipe applies to above-mentioned attraction from above-mentioned negative pressure source.
4, sheet-like material roller unit for conveying according to claim 1 is characterized in that,
Above-mentioned negative pressure source is the vented drum blower fan, and the air suctiton inlet of this vented drum blower fan is connected with the lower ending opening of above-mentioned attraction with pipe,
With in the pipe, in actuating device, conveying direction converter, dispose electrical motor in above-mentioned attraction at least;
This actuating device has the electrical motor that is used to drive above-mentioned conveying roller;
This conveying direction converter is, above-mentioned conveying roller is supported, make its upper end can the transfer position of the current line that arrives above-mentioned sheet-like material, and than above-mentioned current line by under position of readiness between displacement, and, above-mentioned conveying roller is supported, so as to make its S. A. in above-mentioned horizontal surface, around the vertical axis on the summit by this conveying roller, at least 90 ° scope angular transposition freely.
5, a kind of sheet-like material conveying device is characterized in that, has:
The craspedodrome pneumatic conveyer is carried sheet-like material to make its state that floats by gas with keeping straight on; And
Direction conversion pneumatic conveyer, ground, the end configuration in the face of the throughput direction of this craspedodrome pneumatic conveyer receives the sheet-like material that transports by this craspedodrome pneumatic conveyer, and the direct of travel of sheet-like material that makes reception is in the horizontal surface internal conversion,
Above-mentioned direction conversion pneumatic conveyer constitutes, and has: a plurality of pneumatic the unit that has a plurality of air vents on smooth; And, be configured in a plurality of aforesaid rights between these a plurality of pneumatic unit and require one of 2 to 4 described sheet-like material roller unit for conveying,
Above-mentioned sheet-like material roller unit for conveying surrounds the center-point ground configuration of above-mentioned direction conversion pneumatic conveyer.
6, sheet-like material conveying device according to claim 5 is characterized in that,
Above-mentioned direction conversion pneumatic conveyer has switching center pole, and this switching center pole is arranged on the above-mentioned center position around vertical axis with rotating freely, and has the carrier tray that can put above-mentioned sheet-like material in the upper end,
The height of above-mentioned carrier tray is set to, when the above-mentioned attraction of above-mentioned a plurality of sheet-like material roller unit for conveying applies negative pressure and sheet-like material and is attracted downwards with pipe, above-mentioned carrier tray contacted with the following of this sheet-like material, and became noncontact when negative pressure is released.
7, according to claim 5 or 6 described sheet-like material conveying devices, it is characterized in that,
Above-mentioned craspedodrome pneumatic conveyer on above-mentioned direction conversion pneumatic conveyer, throughput direction disposes a pair ofly orthogonally, and the extended line at Width center of the current line of the moving conveyer of this pair of straight promoting the circulation of qi intersected at above-mentioned center-point.
8, sheet-like material conveying device according to claim 7 is characterized in that,
On the equidistant position of the above-mentioned center-point of distance, dispose many above-mentioned sheet-like materials conveying unit.
9, sheet-like material conveying device according to claim 7 is characterized in that,
Dispose 1 above-mentioned light sheet material conveying unit.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP102108/2007 | 2007-04-09 | ||
| JP2007102108A JP4344755B2 (en) | 2007-04-09 | 2007-04-09 | Roller unit for thin plate material conveyance and thin plate material conveyance device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101284603A true CN101284603A (en) | 2008-10-15 |
| CN101284603B CN101284603B (en) | 2012-08-22 |
Family
ID=39978880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101809348A Active CN101284603B (en) | 2007-04-09 | 2007-10-09 | Roller unit for conveying sheet material and conveyer for sheet material |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4344755B2 (en) |
| KR (1) | KR100861175B1 (en) |
| CN (1) | CN101284603B (en) |
| HK (1) | HK1122005A1 (en) |
| TW (1) | TW200840784A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101857141A (en) * | 2009-04-07 | 2010-10-13 | 株式会社Ihi | Conveying direction converter and levitation transportation system |
| CN102313452A (en) * | 2011-09-21 | 2012-01-11 | 苏州汇科机电设备有限公司 | Material feeding mechanism of sintering furnace for electronic component |
| CN104245547A (en) * | 2012-04-26 | 2014-12-24 | 株式会社Ihi | Conveyance device |
| CN104816947A (en) * | 2015-04-27 | 2015-08-05 | 深圳市华星光电技术有限公司 | LCD (Liquid Crystal Display) panel conveyer |
| CN104959473A (en) * | 2015-07-07 | 2015-10-07 | 江苏金铁人自动化科技有限公司 | Socket press-riveting detection equipment |
| CN105140756A (en) * | 2015-07-07 | 2015-12-09 | 江苏金铁人自动化科技有限公司 | Automation equipment capable of carrying out pressure riveting and detection on socket |
| CN106005900A (en) * | 2016-06-08 | 2016-10-12 | 宜兴市富胜机械有限公司 | Small blanker |
| CN106743657A (en) * | 2012-04-26 | 2017-05-31 | 株式会社Ihi | Handling device |
| CN109148346A (en) * | 2018-08-17 | 2019-01-04 | 浙江雅市晶科技有限公司 | A kind of semiconductor substrate handling device |
| CN109178768A (en) * | 2018-11-14 | 2019-01-11 | 江苏冠宇机械设备制造有限公司 | A kind of double rolling bed transportation systems and its working method |
| CN110893399A (en) * | 2018-09-13 | 2020-03-20 | 云南佳叶现代农业发展有限公司 | Intelligent tobacco leaf grading and sorting equipment and method based on visual identification |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101052754B1 (en) * | 2008-11-18 | 2011-08-01 | 세메스 주식회사 | Substrate Transfer Device |
| JP5402059B2 (en) * | 2009-02-17 | 2014-01-29 | 株式会社Ｉｈｉ | Levitation transfer device |
| JP5471604B2 (en) * | 2010-03-03 | 2014-04-16 | 株式会社Ｉｈｉ | Levitation transfer device |
| KR101149767B1 (en) | 2010-03-05 | 2012-06-04 | (주)미래컴퍼니 | Apparatus and method for manufacturing plate |
| JP5707713B2 (en) * | 2010-03-11 | 2015-04-30 | 株式会社Ihi | Floating transport device and roller drive unit |
| JP5471645B2 (en) * | 2010-03-15 | 2014-04-16 | 株式会社Ｉｈｉ | Levitation transfer device |
| JP5604940B2 (en) * | 2010-03-31 | 2014-10-15 | 株式会社Ｉｈｉ | Levitation transfer device |
| JP2011219209A (en) * | 2010-04-07 | 2011-11-04 | Ihi Corp | Floating conveying device, direction changing device, and floating unit |
| KR101690098B1 (en) * | 2016-06-16 | 2016-12-27 | (주)한테크 | Removal equipment for glass panel |
| EP3480143A4 (en) * | 2016-06-30 | 2020-02-26 | Ace Machinery Co. Ltd. | Transport apparatus |
| CN108502505A (en) * | 2018-03-07 | 2018-09-07 | 佛山科学技术学院 | A kind of assembly line corner conveying device |
| CN115557181A (en) * | 2022-11-21 | 2023-01-03 | 中车长江铜陵车辆有限公司 | Terminal continuous marshalling device of transfer chain |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3909597B2 (en) * | 2003-08-20 | 2007-04-25 | 神鋼電機株式会社 | Board loading / unloading device |
| JP4244000B2 (en) * | 2003-08-29 | 2009-03-25 | 株式会社ダイフク | Transport device |
| KR200339636Y1 (en) | 2003-10-20 | 2004-01-24 | 주식회사 신성이엔지 | Transfer equipment rising air that be made flat panel materials |
| JP2005239392A (en) * | 2004-02-27 | 2005-09-08 | Toyota Industries Corp | Object levitation carrying device |
| JP2005239391A (en) | 2004-02-27 | 2005-09-08 | Toyota Industries Corp | Object levitation device and object levitation carrying device |
| JP4754885B2 (en) * | 2004-11-30 | 2011-08-24 | 株式会社ダイヘン | Substrate transfer device |
| KR101093983B1 (en) * | 2004-12-28 | 2011-12-15 | 엘지전자 주식회사 | Glass transfering apparatus for display panel |
-
2007
- 2007-04-09 JP JP2007102108A patent/JP4344755B2/en active Active
- 2007-06-27 TW TW096123342A patent/TW200840784A/en unknown
- 2007-07-18 KR KR1020070071561A patent/KR100861175B1/en active IP Right Grant
- 2007-10-09 CN CN2007101809348A patent/CN101284603B/en active Active
-
2009
- 2009-03-19 HK HK09102671.3A patent/HK1122005A1/en unknown
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101857141B (en) * | 2009-04-07 | 2012-10-10 | 株式会社Ihi | Conveying direction converter and suspension conveying system |
| CN101857141A (en) * | 2009-04-07 | 2010-10-13 | 株式会社Ihi | Conveying direction converter and levitation transportation system |
| CN102313452A (en) * | 2011-09-21 | 2012-01-11 | 苏州汇科机电设备有限公司 | Material feeding mechanism of sintering furnace for electronic component |
| CN102313452B (en) * | 2011-09-21 | 2012-11-07 | 苏州汇科机电设备有限公司 | Material feeding mechanism of sintering furnace for electronic component |
| CN104245547B (en) * | 2012-04-26 | 2016-07-27 | 株式会社Ihi | Conveyer device |
| CN104245547A (en) * | 2012-04-26 | 2014-12-24 | 株式会社Ihi | Conveyance device |
| CN106743657A (en) * | 2012-04-26 | 2017-05-31 | 株式会社Ihi | Handling device |
| CN104816947A (en) * | 2015-04-27 | 2015-08-05 | 深圳市华星光电技术有限公司 | LCD (Liquid Crystal Display) panel conveyer |
| CN104959473A (en) * | 2015-07-07 | 2015-10-07 | 江苏金铁人自动化科技有限公司 | Socket press-riveting detection equipment |
| CN105140756A (en) * | 2015-07-07 | 2015-12-09 | 江苏金铁人自动化科技有限公司 | Automation equipment capable of carrying out pressure riveting and detection on socket |
| CN106005900A (en) * | 2016-06-08 | 2016-10-12 | 宜兴市富胜机械有限公司 | Small blanker |
| CN109148346A (en) * | 2018-08-17 | 2019-01-04 | 浙江雅市晶科技有限公司 | A kind of semiconductor substrate handling device |
| CN109148346B (en) * | 2018-08-17 | 2023-12-22 | 上海蒂城科技有限公司 | Semiconductor substrate handling device |
| CN110893399A (en) * | 2018-09-13 | 2020-03-20 | 云南佳叶现代农业发展有限公司 | Intelligent tobacco leaf grading and sorting equipment and method based on visual identification |
| CN109178768A (en) * | 2018-11-14 | 2019-01-11 | 江苏冠宇机械设备制造有限公司 | A kind of double rolling bed transportation systems and its working method |
Also Published As
| Publication number | Publication date |
|---|---|
| HK1122005A1 (en) | 2009-05-08 |
| CN101284603B (en) | 2012-08-22 |
| TW200840784A (en) | 2008-10-16 |
| JP4344755B2 (en) | 2009-10-14 |
| JP2008254918A (en) | 2008-10-23 |
| KR100861175B1 (en) | 2008-09-30 |
| TWI337166B (en) | 2011-02-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101284603B (en) | Roller unit for conveying sheet material and conveyer for sheet material | |
| JP4801640B2 (en) | Thin plate material conveyor | |
| KR101067709B1 (en) | Apparatus for transferring of glass panel with magnetic levitationtechnology | |
| JP2011225376A (en) | Multi-gate conveyor | |
| CN101512747B (en) | Substrate conveying apparatus, and substrate conveying method | |
| CN101512748B (en) | Substrate conveying apparatus, and substrate conveying method | |
| CN202729383U (en) | Feeder | |
| JP5077718B2 (en) | Transport device | |
| CN101715421A (en) | Levitation transportation device | |
| WO2020090270A1 (en) | Article transfer facility | |
| JP2006176255A (en) | Conveying system | |
| JP4262848B2 (en) | Reversing equipment for transported goods | |
| JP5134301B2 (en) | Thin plate material conveyor | |
| JP2011207606A (en) | Substrate reversing device and substrate reversing method | |
| KR102221832B1 (en) | Conveyor belt apparatus for narrow space | |
| JP5796674B1 (en) | Transport system | |
| KR20150054536A (en) | Apparatus for turning panel upside down and method for turning panel upside down using the same | |
| CN208747104U (en) | A kind of flexibility automatic sheet feeder | |
| CN218930682U (en) | Adsorption conveying device for conveying aluminum plates | |
| CN115365149A (en) | Automatic conveying and detecting device for display panel | |
| KR102042445B1 (en) | Returning object centering apparatus | |
| TWM527433U (en) | Conveyer | |
| JP6685834B2 (en) | Floating carrier | |
| CN101711218B (en) | Levitation device and levitation transportation device | |
| KR101583473B1 (en) | Glass transfer guide apparatus using magnetic |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1122005 Country of ref document: HK |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| REG | Reference to a national code |
Ref country code: HK Ref legal event code: GR Ref document number: 1122005 Country of ref document: HK |