200840784 (1) 九、發明說明 【發明所屬的技術領域] 該發明是關於薄板狀材料搬運裝置、及適合用於該薄 板狀材料搬運裝置的薄板狀材料搬運用滾子單元，當要搬 運使用於液晶顯示器（LCD )面板、電漿顯示器面板（ PDP)等的平面面板顯示器（FPD)的大型且很薄的玻璃 基板這樣的薄板狀材料時，能夠將搬運路線直角地變更。 【先前技術】 液晶顯示器面板、電漿顯示器面板等的平面面板顯示 器的玻璃基板，即使有稍微的瑕疵或塵埃都會對品質造成 很大的影響，所以當搬運時，爲了不會附著讓表面產生瑕 疵的異物，而要求讓玻璃基板保持接近平面的形狀，且沿 著預定的搬運面順暢地進行搬運。 作爲一種搬運手段，像是滾子輸送機，在搬運路線爲 Φ 直角地彎曲時，在兩個直進式滾子輸送機之間，配置有朝 直角方向行進的輸送機，當要將玻璃基板直角地進行方向 轉換時，使輸送機上昇，將玻璃基板的通過路線大約提高 20〜50mm來進行搬運。 也有在垂直相交配置的兩個直進式滾子輸送機的交點 位置，設置用來抬起玻璃基板且使其迴旋的機構、或使直 進式滾子輸送機全體迴旋的方法，而伴隨著近年來的玻璃 基板的大型化，構造也變大，運轉所用的動力或製造成本 也大幅增加，且會有很難縮短生產節拍時間的問題。 -5- (2) (2)200840784 而已知的搬運裝置，是取代滾子輸送機，使用氣動工 作台使玻璃基板上浮，且以空氣的壓力驅動，用非接觸的 方式搬運（例如日本特開平1 0 - 1 3 9 1 60號公報）。 在用氣動工作台的情況，在使玻璃基板上浮的狀態使 其搬運方向變更、或使玻璃基板本身迴旋的方式，要控制 在壓力空氣上的玻璃基板的動作很困難，雖然考慮過藉由 導引滾子來導引浮起的玻璃基板的端緣，可是例如第八代 的玻璃基板，與W 2 2 0 0 m m X L 2 5 0 0 m m的大小相比，厚度爲 0.5〜0.7mm的程度是非常薄的，當因爲慣性而玻璃基板 端緣碰撞到導引滾子時，會有非常容易產生裂紋的問題。 於是習知方式，並無法進行玻璃基板的高速搬運、高速轉 換方向、或高速迴旋動作。 【發明內容】 〔發明欲解決的課題〕 本發明的課題是要提供一種薄板狀材料搬運裝置、及 使用於該裝置的薄板狀材料搬運滾子單元，使用氣動工作 台單元以非接觸方式支承薄板狀材料且進行搬運，不使用 導引滾子等，薄板狀材料可進行搬運方向的高速轉換或高 速迴旋動作。 〔用以解決課題的手段] 藉由以下的各實施例，能解決上述課題。 200840784 (3) (1 ) 一種薄板狀材料搬運用滾子單元，其特徵爲： 是具有：由在上端具備有開口的筒狀體所構成的吸引用管 、在該吸引用管的內側，被支承爲可繞著水平面內的旋轉 軸自由旋轉，且其上端可較上述吸引用管的上端的開口更 稍突出的輸送滾子、以及對上述吸引用管施加負壓的負壓 源。 (2 )在（1 )的薄板狀材料搬運用滾子單元其中，設 φ 置有輸送方向轉換裝置，該裝置將上述輸送滾子支承爲： 讓其旋轉軸，在上述水平面內，繞著通過該輸送滾子的頂 點的鉛直軸線至少90°的範圍可自由改變角度。 (3)在（1)或（2)的薄板狀材料搬運用滾子單元 其中’設置有：將上述輸送滾子支承爲，可在上述輸送滾 子的上端到達上述薄板狀材料的通過路線的搬運位置，與 較上述通過路線更下面的待機位置之間移位的上下移動裝 置、以及用來將從上述負壓源對上述吸引用管施加的負壓 Φ 予以啓動/關閉的負壓控制裝置。 (4 )在（1 )的薄板狀材料搬運用滾子單元其中，上 . 述負壓源爲排氣鼓風機’該排氣鼓風機的進氣口，是連接 於上述吸引用管的下端開口，在上述吸引用管內，配置有 包含有用來驅動上述輸送滾子的馬達的驅動裝置；以 及至少輸送方向轉換裝置中之至少馬達，該輸送方向轉換 裝置，係將上述輸送滾子支承爲，可在上述輸送滾子的上 喃到達上述薄板狀材料的通過路線的搬運位置，與較上述 200840784 (4) 通過路線更下面的待機位置之間移位，以及將上述輸送滾 子支承爲：讓其旋轉軸，在上述水平面內，繞著通過該輸 送滾子的頂點的鉛直軸線至少90°的範圍可自由改變角度 〇 | ( 5 ) —種薄板狀材料搬運裝置，其特徵爲：具有： ' 在藉由氣體使薄板狀材料浮起的狀態直進式地搬運的直進 式氣動輸送機、以及配置面對於該直進式氣動輸送機的搬 φ 運方向的端部，接受該直進式氣動輸送機所搬運過來的薄 板狀材料，且在水平面內將接受的薄板狀材料的行進方向 予以轉換的方向轉換氣動輸送機；上述方向轉換氣動輸送 機，包含有：在平坦的上面部具備有複數個供氣孔的複數 的氣動工作台單元、以及在該複數的氣動工作台單元之間 所配置的複數的上述（2 )〜（4 )的其中之一的薄板狀材 料搬運用滾子單元，上述薄板狀材料搬運用滾子單元，是 包圍著上述方向轉換氣動輸送機的中心點所配置。 # ( 6 )在（5 )的薄板狀材料搬運裝置其中，上述方向 轉換氣動輸送機，包含有轉換中心銷栓，該轉換中心銷栓 ，具備有：在上述中心點位置設置成可繞著鉛直軸自由旋 轉，且在上端可載置上述薄板狀材料的載置盤；上述載置 盤，當將負壓施加到上述複數的薄板狀材料搬運用滾子單 元上的上述吸引用管，而將薄板狀材料朝下方吸引時，會 接觸於該薄板狀材料的下面部，且設定成當負壓解除時會 成爲非接觸的高度。 (7 )在（5 )或（6 )的薄板狀材料搬運裝置其中， -8- 200840784 (5) 上述直進式氣動輸送機，在上述方向轉換氣動輸送機上， 配置有一對且配置成搬運方向互相垂直相交，該一對直進 式氣動輸送機的通過路線的寬度方向中心的延長線，是在 上述中心點交叉。 (8)在（7)的薄板狀材料搬運裝置其中，上述薄板 狀材料搬運用單元，在與上述中心點隔著等距離的位置， 配置有複數座。 # ( 9 )在（7 )的薄板狀材料搬運裝置其中，上述薄板 狀材料搬運用單元，配置有一座。 〔發明效果〕 藉由本發明，薄板狀材料搬運用滾子單元，是藉由施 加在吸引用管的負壓，來吸引藉由氣動工作台單元等而浮 起所搬運的薄板狀材料，而能使其接觸於輸送滾子而進行 薄板狀材料的高速搬運。此時，藉由在水平面使輸送滾子 的旋轉軸改變角度，則不用設置導引滾子，能將與輸送滾 子接觸的薄板狀材料，高速轉換其搬運方向或使其迴旋。 【實施方式】 以下針對本發明的較佳實施方式參考圖面來詳細說明 〇 如第1圖所示，該實施方式的薄板狀材料搬運裝置1 〇 ，在第1圖從左到右方向，是由：以非接觸方式，將例如 大型的L C D用的玻璃基板（薄板狀材料）12沿著直線狀 (6) 200840784 顯示）進行搬運 [進式氣動輸送機 動輸送機1 6、以 圖的上側的端部 4的通過路線Ρ1 5璃基板1 2的第 i板1 2的搬運途 &著通過路線P 1 以及配置在方向 :進式氣動輸送機 ;20及直進式滾 機1 6，與上述同 :方向轉換滾子單 ;圖所示，是具備 ,(氣體）而以非 台26、以及用來 1由鼓風機所構成 {平坦的長方體的 的水平通過路線（以寬度方向中心線P1 的第一直進式氣動輸送機14、與該第一穩 14的在第1圖的右端連接的方向轉換氣 及與該方向轉換氣動輸送機16的在第1 連接，且沿著與第一直進式氣動輸送機1 垂直相交的通過路線P2，可直線地搬運ij 二直進式氣動輸送機1 8，所構成。200840784 (1) EMBODIMENT OF THE INVENTION [Technical Fields of the Invention] The present invention relates to a thin plate-shaped material conveying device and a roller-shaped material conveying roller unit suitable for use in the thin plate-shaped material conveying device, which are to be transported and used In the case of a thin plate-shaped material such as a large-sized and thin glass substrate of a flat panel display (FPD) such as a liquid crystal display (LCD) panel or a plasma display panel (PDP), the conveyance path can be changed at right angles. [Prior Art] The glass substrate of a flat panel display such as a liquid crystal display panel or a plasma display panel has a great influence on the quality even if it is slightly rubbed or dusty. Therefore, when it is handled, the surface is not caused to adhere. The foreign matter is required to keep the glass substrate in a shape close to a plane, and to carry it smoothly along a predetermined conveying surface. As a means of transport, such as a roller conveyor, when the conveyance path is Φ bent at right angles, a conveyor that travels in a right angle direction is disposed between the two straight-in roller conveyors, when the glass substrate is to be right angled When the direction is changed, the conveyor is raised, and the passage of the glass substrate is increased by about 20 to 50 mm to carry it. There is also a mechanism for raising and rotating the glass substrate at the intersection of two straight-in roller conveyors arranged vertically, or a method of swirling the entire straight roller conveyor, accompanied by recent years. The size of the glass substrate is increased, the structure is also increased, and the power or manufacturing cost for operation is also greatly increased, and there is a problem that it is difficult to shorten the tact time. -5- (2) (2) 200840784 The known conveying device replaces the roller conveyor, uses a pneumatic table to float the glass substrate, and is driven by air pressure and is transported in a non-contact manner (for example, Japan Kaiping 1 0 - 1 3 9 1 Bulletin 60). In the case of using a pneumatic table, it is difficult to control the operation of the glass substrate on the pressurized air in such a manner that the glass substrate is floated in a state in which the conveyance direction is changed or the glass substrate itself is rotated. The roller guides the edge of the floating glass substrate, but for example, the eighth generation glass substrate has a thickness of 0.5 to 0.7 mm compared to the size of W 2 2 0 0 ML XL 2 500 mm. It is very thin, and when the edge of the glass substrate collides with the guide roller due to inertia, there is a problem that cracks are easily generated. Therefore, in the conventional manner, high-speed conveyance of the glass substrate, high-speed switching direction, or high-speed turning operation cannot be performed. SUMMARY OF THE INVENTION [Problem to be Solved by the Invention] An object of the present invention is to provide a thin plate-shaped material conveying device and a thin plate-shaped material conveying roller unit used in the device, and supporting the thin plate in a non-contact manner using a pneumatic table unit The material is conveyed and the guide roller is not used, and the thin plate material can perform high-speed conversion or high-speed rotation in the conveyance direction. [Means for Solving the Problem] The above problems can be solved by the following embodiments. 200840784 (3) (1) A roller unit for conveying a thin plate-shaped material, comprising: a suction tube formed of a cylindrical body having an opening at an upper end, and being inside the suction tube The support is a transfer roller that is rotatable about a rotation axis in a horizontal plane, and has an upper end that is slightly protruded from an opening of the upper end of the suction pipe, and a negative pressure source that applies a negative pressure to the suction pipe. (2) In the thin plate-shaped material conveying roller unit of (1), φ is provided with a conveying direction changing device that supports the conveying roller such that the rotating shaft passes through the horizontal plane and passes through The vertical axis of the apex of the transport roller is free to change the angle by a range of at least 90°. (3) The roller unit for conveying a thin plate-shaped material according to (1) or (2), wherein the conveying roller is supported so as to be able to reach a passage of the thin plate-shaped material at an upper end of the conveying roller. a vertical movement device that shifts between a conveyance position and a standby position that is lower than the passage path, and a negative pressure control device that activates/closes the negative pressure Φ applied from the negative pressure source to the suction pipe . (4) In the thin plate-shaped material conveying roller unit of (1), the negative pressure source is an exhaust air blower, and an intake port of the exhaust air blower is connected to a lower end opening of the suction pipe. a driving device including a motor for driving the conveying roller; and at least a motor of at least one of the conveying direction switching devices, wherein the conveying roller is supported by the conveying roller, The conveyance position of the conveyance roller reaching the passage of the thin plate-shaped material is displaced between the standby position lower than the passage of the above-mentioned 200840784 (4), and the conveyance roller is supported to rotate The shaft, in the horizontal plane, is free to change the angle 至少 around a range of at least 90° through the vertical axis of the apex of the conveying roller. (5) A sheet-shaped material handling device having the following features: a straight-in pneumatic conveyor that is conveyed in a straight state by a state in which a thin plate-shaped material is floated by a gas, and a arranging surface of the straight-moving pneumatic conveyor a pneumatic conveying machine that receives the sheet-like material conveyed by the straight-type pneumatic conveyor and converts the traveling direction of the received sheet-like material in a horizontal plane; the above-mentioned direction-converting pneumatic conveyor includes: The flat upper surface portion is provided with a plurality of pneumatic table units having a plurality of air supply holes, and a plurality of thin plate-shaped materials of the above (2) to (4) disposed between the plurality of pneumatic table units In the transporting roller unit, the thin plate-shaped material conveying roller unit is disposed so as to surround a center point of the direction-converting pneumatic conveyor. # (6) The thin plate material conveying device of (5), wherein the direction conversion pneumatic conveyor includes a conversion center pin, and the conversion center pin is provided to be disposed at a position of the center point so as to be vertically The mounting shaft of the thin plate-shaped material is placed on the upper end, and the negative pressure is applied to the suction tube on the plurality of thin plate-shaped material conveying roller units. When the thin plate-shaped material is attracted downward, it contacts the lower surface of the thin plate material and is set to a non-contact height when the negative pressure is released. (7) In the thin plate-shaped material conveying device of (5) or (6), -8- 200840784 (5) The above-described straight-in-type pneumatic conveyor is disposed on the above-described direction-switching pneumatic conveyor, and is disposed in a conveying direction Vertically intersecting each other, the extension line of the center of the width direction of the passing path of the pair of straight-moving pneumatic conveyors intersects at the center point. (8) In the thin plate-shaped material conveying device of (7), the thin plate-shaped material conveying unit is provided with a plurality of seats at positions equidistant from the center point. # (9) In the thin plate-shaped material conveying device of (7), one of the thin plate-shaped material conveying units is disposed. [Effect of the Invention] According to the present invention, the roller unit for conveying a thin plate-shaped material can suck the sheet-like material conveyed by the pneumatic table unit or the like by the negative pressure applied to the suction tube. The sheet-shaped material is conveyed at a high speed by bringing it into contact with the conveying roller. At this time, by changing the angle of rotation of the conveying roller in the horizontal plane, the guide roller can be disposed, and the sheet-shaped material in contact with the conveying roller can be switched at a high speed or rotated. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings. As shown in Fig. 1, the thin plate-shaped material conveying device 1 of this embodiment is oriented from left to right in Fig. 1 By: non-contact, for example, a glass substrate (thin-plate material) 12 for a large LCD is transported along a linear (6) 200840784) [inductive pneumatic conveying motor conveyor 16, on the upper side of the figure The passage of the end portion 4, the conveyance of the i-th plate 1 2 of the glass substrate 1 2, the passage of the route P 1 and the arrangement of the direction: the progressive pneumatic conveyor; 20 and the straight-moving roller 1.6, and the above The same direction: the direction conversion roller single; the figure shows that there is a (horizontal) non-stage 26, and a horizontal pass route for the flattened cuboid composed of a blower (the first in the width direction center line P1) An all-in-one pneumatic conveyor 14, a direction-converting gas connected to the right end of the first figure 14 and a first connection to the direction-switching pneumatic conveyor 16, and along with the first straight-in pneumatic Conveyor 1 intersects perpendicularly through route P2 It can be transported linearly by the ij two-in-one pneumatic conveyor 18.
在第1圖，圖號29，是表示在玻璃^ 中，用來抑制朝其寬度方向外側移動的 、Ρ2的寬度方向兩側配置的校準滾子、 轉換氣動輸送機1 6的外側的校準滾子。 第一直進式氣動輸送機14及第二请 1 8，分別是組合了複數的氣動工作台單元 子單元22所構成。而方向轉換氣動輸送 樣地組合了複數的氣動工作台單元20及 元3 0所構成。 氣動工作台單元20，如第2圖、第2 有：對於玻璃基板1 2的下面部供給空秦 接觸方式來支承玻璃基板12的氣動工作 將正壓空氣供給到氣動工作台26的例 的正壓產生裝置28。 氣動工作台26，爲其上面部27大聲 箱狀體，在上面部27形成有用來對玻璃基板1 2的下面部 供給空氣的複數的供氣孔27Α。 200840784 (7) 第一及第二直進式氣動輸送機14、18，是將二〜四座 的氣動工作台2 6於其長軸方向排成一列，且橫排成五列 (CV — 1A〜CV1E、CV— 2A〜CV— 2E)。在五列其中寬 度方向兩外側列CV — 1A、CV—1E、CV— 2A、CV— 2E上 * 的各氣動工作台單元20之間，配置有直進式滾子單元22 〇 方向轉換氣動輸送機16，連接於：第一直進式氣動輸 φ 送機14的搬運方向上的寬度方向兩側的氣動工作台單元 20 的歹[J CV— 1A、CV — 1E，設置有兩歹ij (CV— 3A、CV — 3E)的氣動工作台單元20，該歹[J CV— 3A、CV — 3E，分 別具有：兩座氣動工作台單元20、與分別設置在該氣動工 作台單元20之間的方向轉換滾子單元30。 在該兩列CV — 3A、CV — 3E之間，配置有：與第二直 進式氣動工作台1 8上的氣動工作台單元20的列平行的六 列氣動工作台單元20 A〜20F，在第 1圖在左側（第一直 Φ 進式氣動輸送機1 4側）的第一列與第二列的氣動工作台 單元20A與20B之間、以及第五列與第六列的氣動工作台 單元20E與20F之間，配置有方向轉換滾子單元30。而 在氣動工作台單元20的列CV — 3E的外側（在第1圖的 下側）也配置有氣動工作台單元20，當玻璃基板12迴旋 時，能使其上浮。 該方向轉換氣動輸送機16上的四座方向轉換滾子單 元30，是將第一及第二直進式氣動輸送機14、18的通過 路線P 1、P2的延長線的交點作爲中心點CR，配置成離該 -11 - 200840784 (8) 中心點CR相等距離，也就是配置成位於同一圓周上。 接著，針對方向轉換單元3 0的詳細構造來加以 〇 如第4圖、第5圖所示，方向轉換滾子單元3 0， _ 備有：在上端具備有開口 33A的鉛直方向的吸引用1 ' 、在該吸引用管3 2的內側，藉由水平面內的旋轉軸 可自由旋轉地所支承著，且其上端可較吸引用管32 φ 端的開口 33A稍突出的輸送滾子34、以及對吸引用1 施加負壓的負壓源也就是鼓風機3 6。 吸引用管3 2，是由：包圍輸送滾子3 4附近的小 部32A、以及與該小直徑部32A的下端連接，從該處 鼓風機36的上端面的大直徑部32B。並且在吸引用1 的大直徑部32B的上部，一體地形成有四支托架32C 該托架32C的前端，是在較包含玻璃基板12的通過 P 1、P2的搬運面更下方的位置加以固定（省略圖示） φ 方向轉換滾子單元30，具備有輸送滾子上下移動 38。該輸送滾子上下移動裝置38，是將輸送滾子34 爲可移位於：輸送滾子34的上端到達上述通過路線 P2的搬運位置（參照第5圖、第6圖）、以及較該 下面，與通過路線P 1、P2上的玻璃基板1 2非接觸的 位置（參照第4圖、第7圖）之間。 輸送滾子上下移動裝置38，是由：配置在吸引 32的大直徑部32B內，在鼓風機36的上面部所固定 板40上所設置的電磁線圈.裝置所構成。 說明 是具 Γ 32 34A 的上 I 32 直徑 到達 f 32 ，在 路線 〇 裝置 支承 P1、 處更 待機 用管 的基 -12- 200840784 (9) 電磁線圈裝置也就是輸送滾子上下移動裝置38的 動部38A，是相對於基板40可在一定範圍上下移動， 該可動部38A的上端，支承著支承板39，在該支承板 的下側支承著：與滾子上下移動裝置3 8鄰接的輸送滾 姿勢控制裝置42。 輸送滾子姿勢控制裝置42，具有：通過輸送滾子 的頂點的鉛直方向的中心軸線32CL上的姿勢控制軸43 • 內置有例如由凸輪機構（省略圖示）所構成的裝置，在 4圖、第5圖，鉛直方向的姿勢控制軸43，在保持鉛直 態下，能在至少90°的範圍，繞著中心軸線32CL擺動。 姿勢控制軸4 3，是貫穿上述支承板3 9的中心而朝 方突出，在其上端支承著滾子支承體44及驅動馬達46。 滾子支承體44，具備有：在較驅動馬達46更高的 置所設置的圓盤狀的支承台45，在該支承台45上，水 地支承著輸送滾子34的旋轉軸34A。 β 輸送滾子34是磁鐵滾子，在該輸送滾子34的前面 置，藉由可自由旋轉地被支承於支承台4 5的驅動磁鐵 _ 子3 5，以非接觸狀態加以驅動。 . 磁鐵滾子3 5的旋轉軸3 5 A，與驅動馬達4 6的驅動 46A直接連結，被該驅動馬達46所旋轉驅動。 該方向轉換滾子單元30，藉由輸送滾子上下移動裝 38，讓輸送滾子34可上下移動於：從吸引用管32的上 面33B稍微突出的搬運位置（參照第5圖、第6圖）、 如第4圖、第7圖所示，上端進入到較上端面33B更下 可 在 39 子 34 5 第 狀 上 位 平 位 滾 軸 置 端 與 方 -13-In Fig. 1, reference numeral 29 is a calibration roller for arranging the calibration rollers disposed on both sides in the width direction of the crucible 2 in the width direction of the glass, and the calibration roller on the outer side of the conversion pneumatic conveyor 16. child. The first progressive pneumatic conveyor 14 and the second servo 18 are respectively composed of a plurality of pneumatic table unit subunits 22. The direction-converting pneumatic conveying sample combines a plurality of pneumatic table units 20 and a unit 30. The pneumatic table unit 20, as shown in Fig. 2 and Fig. 2, is an example in which a pneumatic operation for supporting the glass substrate 12 is performed on the lower surface of the glass substrate 12 to supply positive pressure air to the pneumatic table 26. Pressure generating device 28. The pneumatic table 26 has a large box-shaped body for the upper surface portion 27, and a plurality of air supply holes 27 for supplying air to the lower surface portion of the glass substrate 12 are formed in the upper surface portion 27. 200840784 (7) The first and second straight-in pneumatic conveyors 14, 18 are arranged in a row of two to four seats of pneumatic table 26 in the direction of their long axis, and are arranged in five rows (CV-1A~CV1E). , CV-2A~CV-2E). Between the five pneumatic rows of the two outer rows CV-1A, CV-1E, CV-2A, CV-2E* in the width direction, a straight-through roller unit 22 is disposed. 16, connected to: the first straight-in pneumatic transmission φ conveyor 14 in the direction of the width of the pneumatic table unit 20 on both sides of the pneumatic table unit 20 [J CV-1A, CV-1E, set two 歹 ij (CV- 3A, CV-3E) pneumatic table unit 20, the 歹[J CV-3A, CV-3E, respectively: having two pneumatic table units 20, and a direction respectively disposed between the pneumatic table units 20 The conversion roller unit 30. Between the two columns CV-3A, CV-3E, there are arranged six rows of pneumatic table units 20 A to 20F parallel to the columns of the pneumatic table unit 20 on the second straight-in pneumatic table 18. Figure 1 is a pneumatic table between the first and second columns of pneumatic table units 20A and 20B on the left side (the first straight Φ-type pneumatic conveyor 14 side) and the fifth and sixth columns. A direction change roller unit 30 is disposed between the units 20E and 20F. On the outside of the row CV-3E of the pneumatic table unit 20 (on the lower side of Fig. 1), a pneumatic table unit 20 is also disposed, and when the glass substrate 12 is rotated, it can be floated. The four-seat direction changing roller unit 30 on the direction-converting pneumatic conveyor 16 is configured such that the intersection of the extension lines of the first and second direct-intake pneumatic conveyors 14, 18 through the routes P1 and P2 is used as the center point CR. The distance from the -11 - 200840784 (8) is equal to the center point CR, that is, configured to be on the same circumference. Next, as for the detailed structure of the direction conversion unit 30, as shown in FIGS. 4 and 5, the direction change roller unit 30, _ is provided with a suction 1 in the vertical direction having the opening 33A at the upper end. ' inside the suction tube 3 2, which is rotatably supported by a rotating shaft in a horizontal plane, and a conveying roller 34 whose upper end is slightly protruded from the opening 33A of the suction tube 32 φ end, and The suction source that draws a negative pressure with 1 is the blower 36. The suction pipe 3 2 is composed of a small portion 32A surrounding the vicinity of the conveying roller 34 and a large diameter portion 32B connected to the lower end of the small diameter portion 32A from the upper end surface of the blower 36. Further, four brackets 32C are integrally formed on the upper portion of the large diameter portion 32B of the suction 1 and the front end of the bracket 32C is provided at a position lower than the conveyance surface of the glass substrate 12 passing through P1 and P2. Fixing (not shown) The φ direction changing roller unit 30 is provided with a transport roller that moves up and down 38. The transport roller up-and-down moving device 38 moves the transport roller 34 to a transport position at which the upper end of the transport roller 34 reaches the passage P2 (see FIGS. 5 and 6), and The position is not in contact with the glass substrate 12 on the routes P1 and P2 (see FIGS. 4 and 7). The transport roller up-and-down moving device 38 is constituted by an electromagnetic coil device provided in the large-diameter portion 32B of the suction 32 and provided on the upper surface of the blower 36. The description is that the upper I 32 diameter of the 32 34A reaches the f 32 , and the base of the standby tube is supported at the P1, and the standby tube is used. 12-200840784 (9) The electromagnetic coil device, that is, the moving roller up and down moving device 38 The portion 38A is movable up and down with respect to the substrate 40. The upper end of the movable portion 38A supports the support plate 39, and the lower side of the support plate supports the transfer roller adjacent to the roller up-and-down moving device 38. Posture control device 42. The transport roller posture control device 42 includes a posture control shaft 43 on the central axis 32CL in the vertical direction of the apex of the transport roller. • A device including a cam mechanism (not shown) is incorporated in the figure. In Fig. 5, the posture control shaft 43 in the vertical direction can swing about the central axis 32CL in a range of at least 90 while maintaining the vertical state. The posture control shaft 43 protrudes through the center of the support plate 39, and supports the roller support 44 and the drive motor 46 at the upper end thereof. The roller support body 44 is provided with a disk-shaped support base 45 which is provided higher than the drive motor 46, and the rotation shaft 34A of the transport roller 34 is water-supported on the support base 45. The β transport roller 34 is a magnet roller, and is driven in a non-contact state by a drive magnet _ 3 3 rotatably supported by the support base 45 in front of the transport roller 34. The rotation shaft 35 A of the magnet roller 35 is directly coupled to the drive 46A of the drive motor 46, and is rotationally driven by the drive motor 46. In the direction change roller unit 30, the transport roller 34 is vertically moved by the transport roller, and the transport roller 34 can be moved up and down to a transport position slightly protruding from the upper surface 33B of the suction tube 32 (see FIGS. 5 and 6). ), as shown in Fig. 4 and Fig. 7, the upper end enters the upper end face 33B and can be lowered at 39 sub-34 5 first-level flat-position roller end and square-13-
200840784 (10) 的待機位置之間。 藉由輸送滾子姿勢控制裝置 42，則可在中 32CL周圍至少90°的角度範圍來將玻璃基板12缝 調整成：如第7圖所示的在與通過路線P1平行甶 轉的姿勢、以及如第8圖所示的在與通過路線P2 面內旋轉的姿勢。 在第一及第二直進式氣動輸送機14、18所使 進式滾子單元22，如第9圖所示，是具備有：可 的通過路線P 1、P2平行的鉛直面內可旋轉的直進 滾子22A、上端面配置成較直進式輸送滾子22A的 低的鉛直方向的吸引用管22B、在該吸引用管22B 配置供氣孔連結的鼓風機2 2 C、用來將磁鐵滾子也 進式輸送滾子22A以非接觸方式驅動的磁鐵驅動湲 、以及用來驅動磁鐵驅動滾子22D的馬達22E。 接著來說明：藉由上述薄板狀材料搬運裝置1 | 璃基板12從第一直進式氣動輸送機14，經過方尚 動輸送機16，在該處不使其迴旋，而搬運到第二请 動輸送機1 8的過程。 首先，方向轉換氣動輸送機1 6上的方向轉換 元30，預先如第1圖、第10圖所示，讓輸送滾子 轉面，與第一直進式氣動輸送機1 4的通過路線P 1 藉由從氣動工作台26噴出的正壓空氣，使第一菌 動輸送機1 4上的玻璃基板1 2上浮，此時驅動直達 單元22上的鼓風機22C的話，負壓會從吸引用管 心軸線 行位置 面內旋 平行的 用的直 與分別 式輸送 上端稍 的下端 就是直 子22D >，將玻 轉換氣 進式氣 滾子單 3 4的旋 平行。 進式氣 式滾子 22B作 -14- 200840784 (11) 用於玻璃基板1 2的下面部，吸引住玻璃基板1 2而使其與 位於搬運位置的直進式輸送滾子22A的上端接觸。 於是，藉由磁鐵驅動滾子22D來驅動直進式輸送滾子 22A的話，則在玻璃基板12浮起於氣動工作台26上的狀 ' 態，在第1圖能從左側到右方，確實且高速地搬運。 ' 從方向轉換氣動輸送機16上的氣動工作台26預先提 供正壓的空氣的話，玻璃基板12會在方向轉換氣動輸送 Φ 機1 6上順暢地移動。此時，若從鼓風機3 6對方向轉換滾 子單元3 0上的吸引用管3 2施加負壓的話，則會朝向藉由 驅動磁鐵滾子35所旋轉的輸送滾子36來吸引玻璃基板12 ，藉由其接觸壓力確實地搬運。 在方向轉換滾子單元30，預先藉由輸送滾子上下移動 裝置38，將輸送滾子34設置成：讓輸送滾子34的上端成 爲從吸引用管3 2的上端面3 3 B稍突出的搬運位置。 當玻璃基板1 2於方向轉換氣動輸送機1 6上移動時， # 停止以輸送滾子3 4所進行的搬運，接著，停止施加負壓 ，並且藉由輸送滾子上下移動裝置38，使輸送滾子34下 _ 降至待機位置。 在該待機位置的狀態，在方向轉換滾子單元30，使輸 送滾子姿勢控制裝置42作動，經由姿勢控制軸43，使輸 送滾子34的旋轉軸34A繞著中心軸線32CL旋轉90°，如 第1 1圖所示，讓輸送滾子34的旋轉面與第二直進式氣動 輸送機18上的直進式輸送滾子22A的旋轉面及通過路線 P 2平行。 -15- 200840784 (12) 在此時或前後，將玻璃基板12的中心、與第一及第 二直進式氣動輸送機1 4、1 8的寬度方向中心（通過路線 PI、P2 )及方向轉換氣動輸送機16的中心點CR對準。 接著，藉由輸送滾子上下移動裝置38使輸送滾子34 上昇到搬運位置’冋時’將鼓風機3 6啓動，對玻璃基板 1 2施加負壓，使該玻璃基板1 2接觸於輸送滾子3 4的上端 。在該狀態，驅動輸送滾子3 4來讓玻璃基板1 2朝第二直 進式氣動輸送機18方向移動。 第二直進式氣動輸送機18，預先將直進式輸送滾子 22A作爲搬運位置，且朝輸送方向驅動，並且藉由鼓風機 22C對吸引用管22B施加負壓。 藉由輸送滾子34的驅動，玻璃基板12，從方向轉換 氣動輸送機16上移動到第二直進式氣動輸送機18上，並 且藉由該第二直進式氣動輸送機18，在第1圖、第11圖 的上方，沿著通過路線P 2移動，如第1 2圖所示完成搬運 〇 上述玻璃基板12的搬運過程，雖然是不使玻璃基板 1 2迴旋，而將搬運方向轉換90°，接著，針對將玻璃基板 12在方向轉換氣動輸送機16上迴旋90°來予以搬運的過 程來加以說明。 該玻璃基板搬運過程，從第1圖所示的狀態到第1 0 圖所示的狀態，是與上述相同，而省略說明。 當在方向轉換氣動輸送機1 6上使玻璃基板1 2迴旋時 ，在第1 〇圖所示的狀態，從將玻璃基板1 2移載到方向轉 -16- 200840784 (13) 換氣動輸送機1 6上的輸送滾子3 4上的狀態起，如第1 3 圖所示，將方向轉換氣動輸送機1 6上的只有通過路線p 1 上的輸送滾子34，藉由輸送滾子姿勢控制裝置42，將其 旋轉面迴旋90°(參照第14圖）。將上述迴旋90°的輸送 滾子3 4作爲待機位置，且停止施加負壓的方式與上述相 ‘ 同。 在迴旋90°之後，開始施加負壓，且將輸送滾子34作 • 爲搬運位置，在該狀態，將方向轉換氣動輸送機1 6上的 四座輸送滾子34，使其方向一致地驅動，如第14圖所示 將玻璃基板1 2朝逆時鐘方向旋轉。這樣玻璃基板1 2，以 方向轉換氣動輸送機1 6的中心點CR爲中心旋轉，當朝 9 0°逆時鐘方向旋轉時則停止玻璃基板12的迴旋。 接著，藉由各個輸送滾子姿勢控制裝置42，使方向轉 換氣動輸送機16上的通過路線P2上的一對輸送滾子34 旋轉成，讓其旋轉面成爲與通過路線P2平行的鉛直面（ ® 參照第1 5圖）。此時，將輸送滾子3 4作爲待機位置，且 停止施加負壓的方式與上述相同。 . 在迴旋9 0 °之後，開始施加負壓，且將輸送滾子3 4作 . 爲搬運位置，當在該狀態使輸送滾子34旋轉時’玻璃基 板1 2從方向轉換氣動輸送機1 6上移載到第二直進式氣動 輸送機1 8上，保持該狀態進行搬運。 如第16圖所示，在方向轉換氣動輸送機16，在其中 心點CR的位置，設置可繞著鉛直軸自由旋轉的轉換中心 銷栓48，且也可在該轉換中心銷栓48的上端，設置可載 -17- 200840784 (14) 置玻璃基板12的載置盤48A。 在該情況，載置盤48A，對複數的方向轉換滾子單元 30上的吸引用管32施加負壓，來吸引玻璃基板12，當處 於其下面部接觸於輸送滾子34的狀態時，載置盤48A接 * 觸於玻璃基板1 2的下面部，且設定成：當負壓解除時， ' 成爲與玻璃基板1 2的下面部非接觸的高度。 藉此，玻璃基板1 2，藉由方向轉換氣動輸送機1 6， # 以其中心點CR爲中心迴旋，不需要迴旋之後的校準動作 〇 在使用如上述的轉換中心銷栓4 8時，方向轉換氣動 輸送機16上的方向轉換滾子單元30，不管是四座、三座 或兩座、甚至一座都可以。 在上述實施方式，方向轉換滾子單元30，其輸送滾子 34是相對於吸引用管32的上端面32B上下移動，而本發 明並不限於此，也可將輸送滾子3 4作成與吸引用管3 2 — _ 起上下移動。 同樣地，雖然是藉由滾子姿勢控制裝置42，來使輸送 , 滾子34的旋轉面繞著中心軸線32CL旋轉，而本發明並不 „ 限於此，只要使輸送滾子34，將其輸送方向轉換90。，而 使旋轉軸3 4 A在水平面旋轉即可，所以也可使輸送滾子 34及其旋轉軸34A，與吸引用管32 —起旋轉。 輸送滾子姿勢控制裝置42上的輸送滾子上下移動裝 置 '輸送滾子姿勢控制裝置的構造，並不限於實施方式的 例子’其他構造也可以。例如也可使用凸輪機構、旋轉電 -18- 200840784 (15) 磁線圈、空氣壓力致動器等。 【圖式簡單說明】 第1圖是顯示本發明的實施方式的薄板狀材料搬運裝 置的槪略俯視圖。 第2圖是顯示該薄板狀材料搬運裝置的直進式氣動輸 送機的氣動工作台單元的槪略剖面圖。 # 第3圖是放大顯示該氣動工作台單元的剖面圖。 第4圖是顯示在該薄板狀材料搬運裝置的方向轉換氣 動輸送機所使用的方向轉換滾子單元的局部剖面立體圖。 第5圖是以除去吸引用管來顯示該方向轉換滾子單元 的立體圖。 第6圖是示意性地顯示在該方向轉換滾子單元其輸送 滾子與玻璃基板接觸的搬運位置的狀態的剖面圖。 第7圖是顯示該輸送滾子的待機位置的狀態的與第6 ® 圖相同的剖面圖。 第8圖是示意性地顯示將該方向轉換滾子單元的輸送 滾子改變90°姿勢的狀態的與第6圖同樣的剖面圖。 第9圖是示意性地顯示在該實施方式的直進式氣動輸 送機所使用的直進式滾子單元的剖面圖。 第1 0圖是示意性地顯示將該薄板狀材料搬運裝置所 進行的玻璃基板的搬運方向轉換90°的第一過程的俯視圖 〇 第11圖是示意性地顯示該第二過程的俯視圖。 -19- 200840784 (16) 第1 2圖是示意性地顯示該第三過程的俯視圖。 第1 3圖是示意性地顯示將該薄板狀材料搬運裝置所 進行的玻璃基板在中途迴旋9 〇。來搬運的第一過程的俯視 圖。 第14圖是示意性地顯示該第二過程的俯視圖。 第1 5圖是不意性地顯示該第三過程的俯視圖。 弟Ιό圖是顯示該薄板狀材料搬運裝置上的方向轉換 Φ 輸送機的其他實施方式的立體圖。 【主要元件之符號說明】 10 :薄板狀材料搬運裝鬣 1 2 :玻璃基板（薄板狀材料） 14:第一直進式氣動輸送機 1 6 :方向轉換氣動輸送機 I8:第二直進式氣動輸送機 • 20 :氣動工作台單元 22:直進式滚子單元 . 22A :直進式輸送滾子 26 :氣動工作台 27 :上面部 27A :供氣孔 28 :正壓產生裝置 30:方向轉換滾子單元 32 :吸引用管 •20- 200840784 (17) 32CL ：中心軸線 33A :開口 3 3 B :上端面 3 4 :輸送滾子 34A :旋轉軸 3 5 :驅動磁鐵滾子 36 :鼓風機 38:輸送滾子上下移動裝置 42 :輸送滾子姿勢控制裝置 4 6 :驅動馬達 4 8 :轉換中心銷栓 48A :載置盤200840784 (10) between the standby positions. By conveying the roller posture control device 42, the glass substrate 12 can be slit at an angular range of at least 90° around the middle 32CL to be in a posture parallel to the passing route P1 as shown in FIG. 7 and The posture rotated in the plane with the passing route P2 as shown in Fig. 8. In the first and second direct-intake pneumatic conveyors 14, 18, the progressive roller unit 22, as shown in Fig. 9, is provided with a rotatable surface which is parallel to the parallel paths P1 and P2. The straight feed roller 22A, the upper end surface is disposed so as to be lower than the straight feed roller 22A in the vertical direction of the suction pipe 22B, the suction pipe 22B is provided with the air blower connecting the blower 2 2 C, and the magnet roller is also used. The feed conveyor roller 22A drives the crucible driven in a non-contact manner and a motor 22E for driving the magnet to drive the roller 22D. Next, the above-described thin plate-shaped material conveying device 1 | glass substrate 12 is transported from the first straight-in pneumatic conveyor 14 to the second moving machine 16 through the square moving conveyor 16 without being rotated there. The process of conveyor 18. First, the direction conversion element 30 on the direction-converting pneumatic conveyor 16 is advanced as shown in Figs. 1 and 10 to allow the conveying roller to rotate, and the passage P 1 of the first straight-type pneumatic conveyor 14 The glass substrate 12 on the first agitating conveyor 14 is floated by the positive pressure air ejected from the pneumatic table 26, and at this time, the blower 22C on the direct unit 22 is driven, the negative pressure is from the suction tube. The lower end of the straight line parallel to the upper end of the axial line position is the straight lower 22D >, and the glass-converted gas-inflating gas-roller single 3 4 is parallel. The inlet type gas roller 22B is used as -14- 200840784 (11) The lower surface of the glass substrate 1 2 is attracted to the glass substrate 12 so as to be in contact with the upper end of the straight feed roller 22A at the conveyance position. Then, when the straight-feed conveying roller 22A is driven by the magnet driving roller 22D, the glass substrate 12 floats on the pneumatic table 26, and in the first figure, it can be from the left side to the right side. Handling at high speed. When the pneumatic table 26 on the pneumatic conveyor 16 is supplied with positive pressure air in advance, the glass substrate 12 is smoothly moved on the direction switching pneumatic conveying machine 16. At this time, when a negative pressure is applied from the air blower 36 to the suction tube 3 2 on the direction changing roller unit 30, the glass substrate 12 is attracted toward the transport roller 36 that is rotated by the driving magnet roller 35. , it is reliably carried by its contact pressure. In the direction changing roller unit 30, the conveying roller 34 is disposed in advance by the conveying roller up-and-down moving device 38 so that the upper end of the conveying roller 34 is slightly protruded from the upper end surface 3 3 B of the suction pipe 3 2 . Carrying position. When the glass substrate 12 moves on the direction switching pneumatic conveyor 16, # stops the conveyance by the conveying roller 34, and then stops the application of the negative pressure, and conveys the roller up and down by the conveying roller 38. Roller 34 down _ to the standby position. In the state of the standby position, the roller unit 30 is rotated in the direction, and the transport roller posture control device 42 is actuated. The rotation axis 34A of the transport roller 34 is rotated by 90° about the central axis 32CL via the posture control shaft 43. As shown in Fig. 1, the rotating surface of the conveying roller 34 is made parallel to the rotating surface of the straight-moving conveying roller 22A on the second straight-in pneumatic conveyor 18 and the passage P 2 . -15- 200840784 (12) At the same time or before and after, the center of the glass substrate 12 and the center of the width direction (through the route PI, P2) and direction of the first and second straight-in pneumatic conveyors 14 and 18 are converted. The center point CR of the pneumatic conveyor 16 is aligned. Next, the transport roller 34 is raised to the transport position '冋' by the transport roller up-and-down moving device 38 to activate the blower 36, and a negative pressure is applied to the glass substrate 12 to bring the glass substrate 12 into contact with the transport roller. The upper end of 3 4 . In this state, the transport roller 34 is driven to move the glass substrate 12 toward the second straight pneumatic conveyor 18. The second straight-moving pneumatic conveyor 18 previously uses the straight-moving conveying roller 22A as a conveying position and drives it in the conveying direction, and applies a negative pressure to the suction pipe 22B by the blower 22C. By driving the transport rollers 34, the glass substrate 12 is moved from the direction change pneumatic conveyor 16 to the second straight-in pneumatic conveyor 18, and by the second straight-in pneumatic conveyor 18, in Figure 1 In the upper part of the eleventh figure, the conveyance process of the glass substrate 12 is carried out along the route P 2 and the conveyance process of the glass substrate 12 is completed as shown in Fig. 2, and the conveyance direction is converted by 90° without rotating the glass substrate 12 Next, a description will be given of a process of transporting the glass substrate 12 by 90° on the direction-converting pneumatic conveyor 16. The glass substrate conveyance process is the same as the above described from the state shown in Fig. 1 to the state shown in Fig. 10, and the description thereof is omitted. When the glass substrate 12 is rotated on the direction-converting pneumatic conveyor 16, in the state shown in Fig. 1, the glass substrate 12 is transferred to the direction--16-200840784 (13) for the pneumatic conveyor. From the state on the transport roller 34 on the 16th, as shown in Fig. 3, the direction of the transfer of the pneumatic conveyor 16 is only through the transport roller 34 on the route p1, by the transport roller posture The control unit 42 rotates its rotation surface by 90° (see Fig. 14). The above-described phase of the above-described phase is the same as the above-described phase in which the above-described transfer roller 34 is rotated to a standby position and the negative pressure is stopped. After the 90° rotation, the application of the negative pressure is started, and the transport roller 34 is used as the transport position. In this state, the direction is converted into the four transport rollers 34 on the pneumatic conveyor 16 so that the directions are uniformly driven. As shown in Fig. 14, the glass substrate 12 is rotated in the counterclockwise direction. Thus, the glass substrate 12 rotates around the center point CR of the direction switching pneumatic conveyor 16 and stops the rotation of the glass substrate 12 when it is rotated in the counterclockwise direction of 90°. Then, by the respective conveying roller posture control means 42, the pair of conveying rollers 34 on the passing path P2 on the direction switching pneumatic conveyor 16 are rotated so that the rotating surface thereof becomes a vertical plane parallel to the passing path P2 ( ® Refer to Figure 15). At this time, the conveying roller 34 is used as the standby position, and the manner of stopping the application of the negative pressure is the same as described above. After the swirling 90°, the application of the negative pressure is started, and the conveying roller 34 is used as the carrying position. When the conveying roller 34 is rotated in this state, the glass substrate 12 is switched from the direction to the pneumatic conveyor 16 It is transferred to the second straight-in pneumatic conveyor 18, and is kept in this state for handling. As shown in Fig. 16, in the direction-converting pneumatic conveyor 16, at its center point CR, a switching center pin 48 is provided which is freely rotatable about a vertical axis, and may also be at the upper end of the switching center pin 48. The mounting plate can be loaded -17- 200840784 (14) The mounting plate 48A of the glass substrate 12 is placed. In this case, the loading tray 48A applies a negative pressure to the suction tube 32 on the plurality of direction changing roller units 30 to attract the glass substrate 12, and when the lower surface thereof is in contact with the conveying roller 34, The disk 48A is contacted with the lower surface of the glass substrate 12, and is set such that when the negative pressure is released, 'the height becomes non-contact with the lower surface of the glass substrate 12. Thereby, the glass substrate 12 is rotated around the center point CR by the direction-converting pneumatic conveyor 16, and the calibration operation after the rotation is not required. When the conversion center pin 48 as described above is used, the direction The direction change roller unit 30 on the conversion pneumatic conveyor 16 can be four, three or two, or even one. In the above embodiment, the direction changing roller unit 30 has the conveying roller 34 moved up and down with respect to the upper end surface 32B of the suction pipe 32, but the present invention is not limited thereto, and the conveying roller 3 4 can be made and attracted. Move up and down with tube 3 2 — _. Similarly, although the rotation of the roller 34 is rotated about the central axis 32CL by the roller posture control device 42, the present invention is not limited thereto, as long as the conveying roller 34 is transported Since the rotation axis 34 4 A is rotated in the horizontal plane, the conveying roller 34 and its rotating shaft 34A can be rotated together with the suction pipe 32. The conveying roller posture control device 42 The structure of the transport roller up-and-down moving device 'transport roller attitude control device is not limited to the example of the embodiment. Other configurations may be used. For example, a cam mechanism, a rotary electric -18-200840784 (15) magnetic coil, air pressure may be used. [Embodiment of the drawings] Fig. 1 is a schematic plan view showing a thin plate-shaped material conveying device according to an embodiment of the present invention. Fig. 2 is a view showing a straight-type pneumatic conveying machine of the thin plate-shaped material conveying device. A schematic cross-sectional view of the pneumatic table unit. #3 is a cross-sectional view showing the pneumatic table unit in an enlarged manner. Fig. 4 is a view showing the direction switching pneumatics in the sheet-shaped material handling device. A partial cross-sectional perspective view of the direction changing roller unit used for the machine. Fig. 5 is a perspective view showing the direction changing roller unit by removing the suction tube. Fig. 6 is a view schematically showing the switching roller unit in the direction. A cross-sectional view showing a state in which the transport roller is in contact with the glass substrate. Fig. 7 is a cross-sectional view similar to Fig. 6 in a state in which the standby position of the transport roller is displayed. Fig. 8 is a schematic view A cross-sectional view similar to that of Fig. 6 in a state in which the conveying roller of the direction changing roller unit is changed to a 90° posture. Fig. 9 is a view showing a straight type used in the direct type pneumatic conveying machine of the embodiment. A cross-sectional view of the roller unit. Fig. 10 is a plan view schematically showing a first process of converting the conveyance direction of the glass substrate by the thin plate-shaped material conveying device by 90°, and Fig. 11 is a view schematically showing the Top view of the second process. -19- 200840784 (16) Figure 12 is a plan view schematically showing the third process. Fig. 13 is a schematic view showing the thin plate material conveying device The glass substrate is rotated nine times in the middle. The top view of the first process of transporting. Fig. 14 is a plan view schematically showing the second process. Fig. 15 is a plan view showing the third process unintentionally. The figure is a perspective view showing another embodiment of the direction change Φ conveyor on the thin plate-shaped material conveying device. [Description of Symbols of Main Components] 10: Thin plate-shaped material conveying device 1 2 : Glass substrate (thin plate material) 14 : First straight-in pneumatic conveyor 1 6 : Directional conversion pneumatic conveyor I8: Second straight-in pneumatic conveyor • 20 : Pneumatic table unit 22: Straight-in roller unit. 22A: Straight-in conveyor roller 26: Pneumatic Table 27: Upper surface portion 27A: Air supply hole 28: Positive pressure generating device 30: Direction conversion roller unit 32: Suction tube • 20- 200840784 (17) 32CL: Center axis 33A: Opening 3 3 B: Upper end face 3 4 : Transport roller 34A : Rotary shaft 3 5 : Drive magnet roller 36 : Blower 38 : Transport roller up and down moving device 42 : Transport roller posture control device 4 6 : Drive motor 4 8 : Conversion center pin 48A : Mounting plate
-21-twenty one