CN100459052C - 形成具有特定尺寸的栅极侧壁间隔件之半导体装置的方法 - Google Patents

形成具有特定尺寸的栅极侧壁间隔件之半导体装置的方法 Download PDF

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Publication number
CN100459052C
CN100459052C CNB2005800392172A CN200580039217A CN100459052C CN 100459052 C CN100459052 C CN 100459052C CN B2005800392172 A CNB2005800392172 A CN B2005800392172A CN 200580039217 A CN200580039217 A CN 200580039217A CN 100459052 C CN100459052 C CN 100459052C
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China
Prior art keywords
gate electrode
sidewall
spacer
forming
spacers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB2005800392172A
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English (en)
Chinese (zh)
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CN101073143A (zh
Inventor
M·C·克林
D·邦瑟
S·达克希那-穆尔蒂
A·野村
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GlobalFoundries Inc
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Advanced Micro Devices Inc
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Publication of CN101073143A publication Critical patent/CN101073143A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31144—Etching the insulating layers by chemical or physical means using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H01L21/28123—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
    • H01L21/32139—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0221—Manufacture or treatment of FETs having insulated gates [IGFET] having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended-drain MOSFETs [EDMOS]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/027—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
    • H10D30/0275—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs forming single crystalline semiconductor source or drain regions resulting in recessed gates, e.g. forming raised source or drain regions
    • H10D64/01326—
    • H10D64/01328—
    • H10D64/01354—
    • H10P50/71—
    • H10P50/73—

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CNB2005800392172A 2004-12-03 2005-11-29 形成具有特定尺寸的栅极侧壁间隔件之半导体装置的方法 Expired - Fee Related CN100459052C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/002,586 US7279386B2 (en) 2004-12-03 2004-12-03 Method for forming a semiconductor arrangement with gate sidewall spacers of specific dimensions
US11/002,586 2004-12-03

Publications (2)

Publication Number Publication Date
CN101073143A CN101073143A (zh) 2007-11-14
CN100459052C true CN100459052C (zh) 2009-02-04

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CNB2005800392172A Expired - Fee Related CN100459052C (zh) 2004-12-03 2005-11-29 形成具有特定尺寸的栅极侧壁间隔件之半导体装置的方法

Country Status (8)

Country Link
US (1) US7279386B2 (enExample)
EP (1) EP1829092B1 (enExample)
JP (1) JP2008522441A (enExample)
KR (1) KR101142992B1 (enExample)
CN (1) CN100459052C (enExample)
DE (1) DE602005011483D1 (enExample)
TW (1) TWI397107B (enExample)
WO (1) WO2006060528A2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7279386B2 (en) * 2004-12-03 2007-10-09 Advanced Micro Devices, Inc. Method for forming a semiconductor arrangement with gate sidewall spacers of specific dimensions
US7585735B2 (en) * 2005-02-01 2009-09-08 Freescale Semiconductor, Inc. Asymmetric spacers and asymmetric source/drain extension layers
US20110049582A1 (en) * 2009-09-03 2011-03-03 International Business Machines Corporation Asymmetric source and drain stressor regions
CN103928315B (zh) * 2014-04-28 2017-06-23 上海华力微电子有限公司 一种栅极侧墙减薄工艺
CN103943462A (zh) * 2014-04-28 2014-07-23 上海华力微电子有限公司 针对薄膜沉积产生负载效应的消除方法
US9941388B2 (en) * 2014-06-19 2018-04-10 Globalfoundries Inc. Method and structure for protecting gates during epitaxial growth
US10566194B2 (en) * 2018-05-07 2020-02-18 Lam Research Corporation Selective deposition of etch-stop layer for enhanced patterning

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4033026A (en) * 1975-12-16 1977-07-05 Intel Corporation High density/high speed MOS process and device
US5930634A (en) * 1997-04-21 1999-07-27 Advanced Micro Devices, Inc. Method of making an IGFET with a multilevel gate
US6300208B1 (en) * 2000-02-16 2001-10-09 Ultratech Stepper, Inc. Methods for annealing an integrated device using a radiant energy absorber layer
CN1391258A (zh) * 2001-06-12 2003-01-15 三菱电机株式会社 半导体装置的制造方法
CN1470947A (zh) * 2002-06-27 2004-01-28 ��ʽ���綫֥ 电子束曝光的邻近效应修正方法及其应用

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Publication number Priority date Publication date Assignee Title
JP2685149B2 (ja) * 1988-04-11 1997-12-03 住友電気工業株式会社 電界効果トランジスタの製造方法
JPH08335554A (ja) * 1995-06-07 1996-12-17 Oki Electric Ind Co Ltd 半導体素子の製造方法
US5656518A (en) * 1996-09-13 1997-08-12 Advanced Micro Devices, Inc. Method for fabrication of a non-symmetrical transistor
JP3530692B2 (ja) * 1996-11-06 2004-05-24 キヤノン株式会社 走査型露光装置及びそれを用いたデバイスの製造方法
JP3598693B2 (ja) * 1996-12-03 2004-12-08 ソニー株式会社 半導体装置およびその製造方法
JPH10242460A (ja) * 1997-02-25 1998-09-11 Hitachi Ltd 半導体集積回路装置およびその製造方法
JP2000012844A (ja) * 1998-06-19 2000-01-14 Sony Corp 高耐圧半導体装置及びその製造方法
KR100284905B1 (ko) * 1998-10-16 2001-04-02 윤종용 반도체 장치의 콘택 형성 방법
JP2000260701A (ja) * 1999-03-10 2000-09-22 Toshiba Corp パターン形成方法及びそれを用いた半導体装置の製造方法
JP3381147B2 (ja) * 1999-04-16 2003-02-24 日本電気株式会社 半導体装置及びその製造方法
JP2001250756A (ja) * 2000-03-03 2001-09-14 Hitachi Ltd 半導体集積回路装置の製造方法
TW540102B (en) * 2001-12-31 2003-07-01 Silicon Integrated Sys Corp Formation method of oxide film
JP2004165218A (ja) * 2002-11-08 2004-06-10 Canon Inc 露光装置
TWI222227B (en) * 2003-05-15 2004-10-11 Au Optronics Corp Method for forming LDD of semiconductor devices
JP2005012038A (ja) * 2003-06-20 2005-01-13 Renesas Technology Corp 半導体装置の製造方法
US6893967B1 (en) * 2004-01-13 2005-05-17 Advanced Micro Devices, Inc. L-shaped spacer incorporating or patterned using amorphous carbon or CVD organic materials
US7279386B2 (en) 2004-12-03 2007-10-09 Advanced Micro Devices, Inc. Method for forming a semiconductor arrangement with gate sidewall spacers of specific dimensions

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4033026A (en) * 1975-12-16 1977-07-05 Intel Corporation High density/high speed MOS process and device
US5930634A (en) * 1997-04-21 1999-07-27 Advanced Micro Devices, Inc. Method of making an IGFET with a multilevel gate
US6300208B1 (en) * 2000-02-16 2001-10-09 Ultratech Stepper, Inc. Methods for annealing an integrated device using a radiant energy absorber layer
CN1391258A (zh) * 2001-06-12 2003-01-15 三菱电机株式会社 半导体装置的制造方法
CN1470947A (zh) * 2002-06-27 2004-01-28 ��ʽ���綫֥ 电子束曝光的邻近效应修正方法及其应用

Also Published As

Publication number Publication date
TWI397107B (zh) 2013-05-21
EP1829092A2 (en) 2007-09-05
EP1829092B1 (en) 2008-12-03
KR101142992B1 (ko) 2012-05-15
TW200623235A (en) 2006-07-01
DE602005011483D1 (de) 2009-01-15
US7279386B2 (en) 2007-10-09
US20060121711A1 (en) 2006-06-08
KR20070085551A (ko) 2007-08-27
CN101073143A (zh) 2007-11-14
WO2006060528A3 (en) 2006-10-26
JP2008522441A (ja) 2008-06-26
WO2006060528A2 (en) 2006-06-08

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Granted publication date: 20090204

Termination date: 20161129