CN100429141C - 微振动部件、光偏转器和成像设备 - Google Patents

微振动部件、光偏转器和成像设备 Download PDF

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Publication number
CN100429141C
CN100429141C CNB2004800112340A CN200480011234A CN100429141C CN 100429141 C CN100429141 C CN 100429141C CN B2004800112340 A CNB2004800112340 A CN B2004800112340A CN 200480011234 A CN200480011234 A CN 200480011234A CN 100429141 C CN100429141 C CN 100429141C
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CN
China
Prior art keywords
vibration
micro
movable elements
torsion springs
mode
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Expired - Fee Related
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CNB2004800112340A
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English (en)
Chinese (zh)
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CN1780786A (zh
Inventor
安田进
岛田康弘
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Canon Inc
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Canon Inc
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Publication of CN1780786A publication Critical patent/CN1780786A/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CNB2004800112340A 2003-12-25 2004-12-10 微振动部件、光偏转器和成像设备 Expired - Fee Related CN100429141C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP430425/2003 2003-12-25
JP2003430425 2003-12-25
JP323758/2004 2004-11-08
JP2004323758A JP4027359B2 (ja) 2003-12-25 2004-11-08 マイクロ揺動体、光偏向器、画像形成装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2008100956575A Division CN101276054B (zh) 2003-12-25 2004-12-10 微振动部件、光偏转器和成像设备

Publications (2)

Publication Number Publication Date
CN1780786A CN1780786A (zh) 2006-05-31
CN100429141C true CN100429141C (zh) 2008-10-29

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CNB2004800112340A Expired - Fee Related CN100429141C (zh) 2003-12-25 2004-12-10 微振动部件、光偏转器和成像设备
CN2008100956575A Expired - Fee Related CN101276054B (zh) 2003-12-25 2004-12-10 微振动部件、光偏转器和成像设备

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CN2008100956575A Expired - Fee Related CN101276054B (zh) 2003-12-25 2004-12-10 微振动部件、光偏转器和成像设备

Country Status (7)

Country Link
US (4) US7271943B2 (cg-RX-API-DMAC7.html)
EP (1) EP1697254B1 (cg-RX-API-DMAC7.html)
JP (2) JP4027359B2 (cg-RX-API-DMAC7.html)
KR (1) KR100806015B1 (cg-RX-API-DMAC7.html)
CN (2) CN100429141C (cg-RX-API-DMAC7.html)
DE (1) DE602004015328D1 (cg-RX-API-DMAC7.html)
WO (1) WO2005063613A1 (cg-RX-API-DMAC7.html)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
TWI416168B (zh) * 2010-02-05 2013-11-21 Ind Tech Res Inst 光學多環掃描元件

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JP5554895B2 (ja) * 2008-02-20 2014-07-23 キヤノン株式会社 揺動構造体、及び揺動構造体を用いた揺動体装置
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CN110095858B (zh) * 2018-12-12 2021-06-08 中国科学院紫金山天文台 自适应光学变形镜弹性模态像差表征方法
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Publication number Publication date
US20080013140A1 (en) 2008-01-17
US7388702B2 (en) 2008-06-17
JP4027359B2 (ja) 2007-12-26
WO2005063613A1 (en) 2005-07-14
US7643198B2 (en) 2010-01-05
US7271943B2 (en) 2007-09-18
CN1780786A (zh) 2006-05-31
CN101276054B (zh) 2010-12-08
EP1697254B1 (en) 2008-07-23
JP2005208578A (ja) 2005-08-04
JP4533407B2 (ja) 2010-09-01
CN101276054A (zh) 2008-10-01
KR20060103927A (ko) 2006-10-04
KR100806015B1 (ko) 2008-02-26
US7474452B2 (en) 2009-01-06
DE602004015328D1 (de) 2008-09-04
EP1697254A4 (en) 2007-03-28
US20090080044A1 (en) 2009-03-26
US20060152785A1 (en) 2006-07-13
US20080204843A1 (en) 2008-08-28
JP2008009446A (ja) 2008-01-17
EP1697254A1 (en) 2006-09-06

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