CN100339972C - 半导体器件和其制造方法 - Google Patents
半导体器件和其制造方法 Download PDFInfo
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- CN100339972C CN100339972C CNB03147165XA CN03147165A CN100339972C CN 100339972 C CN100339972 C CN 100339972C CN B03147165X A CNB03147165X A CN B03147165XA CN 03147165 A CN03147165 A CN 03147165A CN 100339972 C CN100339972 C CN 100339972C
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- copper
- metal layer
- layer
- interconnection
- containing metal
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- H01L2924/3011—Impedance
Abstract
Description
互连结构 | 淀积方法 | 含银量重量% | 成品率 |
a1 | 电镀→偏压溅射 | 0.1 | 88~98 |
a2 | 电镀→偏压溅射 | 0 | 78~84 |
a3 | 电镀 | 0.1 | 72~82 |
a4 | 电镀 | 0 | 8~19 |
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP198432/2002 | 2002-07-08 | ||
JP2002198432A JP4555540B2 (ja) | 2002-07-08 | 2002-07-08 | 半導体装置 |
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CN2007100889078A Division CN101030568B (zh) | 2002-07-08 | 2003-07-08 | 半导体器件和金属互连 |
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CN1494129A CN1494129A (zh) | 2004-05-05 |
CN100339972C true CN100339972C (zh) | 2007-09-26 |
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CNB03147165XA Expired - Fee Related CN100339972C (zh) | 2002-07-08 | 2003-07-08 | 半导体器件和其制造方法 |
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US (2) | US6949832B2 (zh) |
JP (1) | JP4555540B2 (zh) |
CN (2) | CN101030568B (zh) |
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- 2003-07-07 US US10/613,069 patent/US6949832B2/en not_active Expired - Lifetime
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- 2003-07-08 CN CNB03147165XA patent/CN100339972C/zh not_active Expired - Fee Related
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CN1494129A (zh) | 2004-05-05 |
US7476611B2 (en) | 2009-01-13 |
JP4555540B2 (ja) | 2010-10-06 |
US6949832B2 (en) | 2005-09-27 |
CN101030568B (zh) | 2010-05-26 |
US20040014312A1 (en) | 2004-01-22 |
US20050095847A1 (en) | 2005-05-05 |
CN101030568A (zh) | 2007-09-05 |
JP2004040022A (ja) | 2004-02-05 |
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