CA1300344C - Superpurifier for argon gas and process for purifying argon gas - Google Patents

Superpurifier for argon gas and process for purifying argon gas

Info

Publication number
CA1300344C
CA1300344C CA000512228A CA512228A CA1300344C CA 1300344 C CA1300344 C CA 1300344C CA 000512228 A CA000512228 A CA 000512228A CA 512228 A CA512228 A CA 512228A CA 1300344 C CA1300344 C CA 1300344C
Authority
CA
Canada
Prior art keywords
getter
argon gas
gas
superpurifier
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA000512228A
Other languages
English (en)
French (fr)
Inventor
Marco Succi
Kiyoshi Nagai
Claudio Boffito
Fabrizio Doni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Taiyo Sanso Co Ltd
Original Assignee
SAES Getters SpA
Taiyo Sanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA, Taiyo Sanso Co Ltd filed Critical SAES Getters SpA
Application granted granted Critical
Publication of CA1300344C publication Critical patent/CA1300344C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Gas Separation By Absorption (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Manufacture And Refinement Of Metals (AREA)
CA000512228A 1985-06-28 1986-06-23 Superpurifier for argon gas and process for purifying argon gas Expired - Fee Related CA1300344C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60-140629 1985-06-28
JP60140629A JPS623008A (ja) 1985-06-28 1985-06-28 アルゴンの超精製装置、並びに精製方法

Publications (1)

Publication Number Publication Date
CA1300344C true CA1300344C (en) 1992-05-12

Family

ID=15273137

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000512228A Expired - Fee Related CA1300344C (en) 1985-06-28 1986-06-23 Superpurifier for argon gas and process for purifying argon gas

Country Status (10)

Country Link
JP (1) JPS623008A (ko)
KR (1) KR930006691B1 (ko)
BE (1) BE904997A (ko)
CA (1) CA1300344C (ko)
DE (1) DE3621014C2 (ko)
FR (1) FR2584063B1 (ko)
GB (1) GB2177079A (ko)
IT (1) IT1190142B (ko)
NL (1) NL192260C (ko)
SE (1) SE463511B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104291284A (zh) * 2014-10-09 2015-01-21 昆明物理研究所 一种超纯氩气在线净化系统及方法

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1227219B (it) * 1988-09-26 1991-03-27 Getters Spa Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno
DE3835825C1 (ko) * 1988-10-21 1990-03-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De
DE3926015A1 (de) * 1989-08-05 1991-02-07 Messer Griesheim Gmbh Verfahren zur feinreinigung von gasen
IT1237944B (it) * 1990-01-05 1993-06-19 Getters Spa Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura
IT1246358B (it) * 1990-07-12 1994-11-17 Getters Spa Processo per eliminare impurita' da un gas idruro
IT1247110B (it) * 1991-02-28 1994-12-12 Getters Spa Processo per la purificazione di gas fluorurati
IT1270875B (it) * 1993-04-29 1997-05-13 Getters Spa Procedimento di purificazione dell'idrogeno e purificatore relativo
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
RU2123971C1 (ru) * 1993-04-29 1998-12-27 Саес Геттерс С.П.А. Способ удаления газообразных примесей из потока водорода и устройство для его осуществления
US6436352B1 (en) 1993-04-29 2002-08-20 Saes Getter, S.P.A. Hydrogen purification
CA2117319A1 (en) * 1993-07-12 1995-01-13 John D. Baker Method for the purification of noble gases, nitrogen and hydrogen
JP3462560B2 (ja) * 1994-03-04 2003-11-05 日本パイオニクス株式会社 水素ガスの精製方法
KR970008347B1 (ko) * 1994-04-12 1997-05-23 한국에너지기술연구소 암모니아 퍼지가스에서 아르곤 및 수소를 고농도로 분리하는 흡착분리방법과 그 장치
WO1997003745A1 (en) * 1995-07-21 1997-02-06 Ultrapure Systems, Inc. Single gas purifier vessel and heat exchanger
DE19528784C1 (de) * 1995-08-04 1996-08-29 Inst Neuwertwirtschaft Gmbh Verfahren zur Reinigung von Inertgasen mittels Sorbenzien
US5895519A (en) * 1996-03-28 1999-04-20 Saes Pure Gas, Inc. Method and apparatus for purifying hydrogen gas
US6059859A (en) * 1997-09-19 2000-05-09 Aeronex, Inc. Method, composition and apparatus for water removal from non-corrosive gas streams
CN1112954C (zh) 1997-10-15 2003-07-02 赛斯纯净气体公司 具有安全设备的气体净化系统及净化气体的方法
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
WO1999019049A2 (en) * 1997-10-15 1999-04-22 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
US6733571B1 (en) * 1999-07-12 2004-05-11 Saes Pure Gas, Inc. Gas purification system with an integrated hydrogen sorption and filter assembly
IT1319667B1 (it) 2000-11-17 2003-10-23 Getters Spa Metodo per la misura della concentrazione di azoto in argon mediantespettroscopia di mobilita' ionica.
ITMI20011193A1 (it) 2001-06-06 2002-12-06 Getters Spa Metodo per la misura mediante spettroscopia di mobilita' ionica dellaconcentrazione di acqua in argon, idrogeno, azoto e elio
JP4520372B2 (ja) * 2005-06-21 2010-08-04 シーケーディ株式会社 精製筒及び空気又は不活性ガスの循環精製装置
DE102009024055A1 (de) 2009-06-05 2010-12-09 Netzsch-Gerätebau GmbH Thermoanalysevorrichtung und Thermoanalyseverfahren
US10071336B1 (en) 2017-01-24 2018-09-11 Northrop Grumman Systems Corporation Gas purification getter construction for airborne and space applications
JP2018150246A (ja) * 2017-03-10 2018-09-27 国立大学法人東北大学 有機化合物析出方法
CN114193028A (zh) * 2021-11-26 2022-03-18 中国核工业第五建设有限公司 保护气纯度提高装置、保护气提纯方法、焊接保护方法
CN115231533A (zh) * 2022-08-09 2022-10-25 上海交通大学 低氡放射率高温高纯惰性气体纯化器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB961925A (en) * 1959-04-10 1964-06-24 Western Detail Manufacturers L Improvements relating to the purification of argon and helium gas
FR1539693A (fr) * 1966-06-07 1968-09-20 Japan Pure Hydrogen Company Lt Procédé d'enlèvement des impuretés dans les gaz rares
BE792561A (en) * 1972-12-11 1973-03-30 Getters Spa Gas purifier - esp for rare gases and hydrogen with regeneration system for absorber cartridges
IT1110271B (it) * 1979-02-05 1985-12-23 Getters Spa Lega ternaria getterante non evaporabile e metodo di suo impiego per l'assorbimento di acqua,vapore d'acqua,di altri gas
IT1115156B (it) * 1979-04-06 1986-02-03 Getters Spa Leghe zr-fe per l'assorbimento di idrogeno a basse temperature
IT1198325B (it) * 1980-06-04 1988-12-21 Getters Spa Struttura e composizione getteranti,particolarmente adatti per basse temperature
JPS59107910A (ja) * 1982-12-10 1984-06-22 Toshiba Corp アルゴンガスの精製方法
FR2557810A1 (fr) * 1984-01-05 1985-07-12 Analyseurs Epurateur Sarl Ste Procede non polluant pour eliminer les traces d'impuretes contenues dans les gaz rares portes a haute temperature

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104291284A (zh) * 2014-10-09 2015-01-21 昆明物理研究所 一种超纯氩气在线净化系统及方法
CN104291284B (zh) * 2014-10-09 2016-06-22 昆明物理研究所 一种超纯氩气在线净化系统及方法

Also Published As

Publication number Publication date
SE8602869D0 (sv) 1986-06-27
KR870000239A (ko) 1987-02-17
GB2177079A (en) 1987-01-14
GB8615618D0 (en) 1986-07-30
DE3621014C2 (de) 1995-05-11
SE8602869L (sv) 1986-12-29
KR930006691B1 (ko) 1993-07-22
BE904997A (fr) 1986-10-16
NL192260B (nl) 1996-12-02
IT8620962A1 (it) 1987-12-27
NL8601691A (nl) 1987-01-16
DE3621014A1 (de) 1987-01-08
IT8620962A0 (it) 1986-06-27
JPS623008A (ja) 1987-01-09
IT1190142B (it) 1988-02-10
GB2177079B (ko) 1989-12-20
NL192260C (nl) 1997-04-03
JPH0456771B2 (ko) 1992-09-09
FR2584063A1 (fr) 1987-01-02
SE463511B (sv) 1990-12-03
FR2584063B1 (fr) 1990-12-21

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