IT1247110B - Processo per la purificazione di gas fluorurati - Google Patents
Processo per la purificazione di gas fluoruratiInfo
- Publication number
- IT1247110B IT1247110B ITMI910526A ITMI910526A IT1247110B IT 1247110 B IT1247110 B IT 1247110B IT MI910526 A ITMI910526 A IT MI910526A IT MI910526 A ITMI910526 A IT MI910526A IT 1247110 B IT1247110 B IT 1247110B
- Authority
- IT
- Italy
- Prior art keywords
- purification
- fluorinated gases
- impure
- fluorinated
- gases
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B17/00—Sulfur; Compounds thereof
- C01B17/45—Compounds containing sulfur and halogen, with or without oxygen
- C01B17/4507—Compounds containing sulfur and halogen, with or without oxygen containing sulfur and halogen only
- C01B17/4515—Compounds containing sulfur and halogen, with or without oxygen containing sulfur and halogen only containing sulfur and fluorine only
- C01B17/453—Sulfur hexafluoride
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
- C01B21/0835—Nitrogen trifluoride
- C01B21/0837—Purification
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C17/00—Preparation of halogenated hydrocarbons
- C07C17/38—Separation; Purification; Stabilisation; Use of additives
Abstract
Viene fornito un procedimento per la purificazione da impurezze, specialmente H2O e O2, di gas fluorurati impuri, particolarmente utili nella produzione di semiconduttori. La purificazione avviene mediante contatto, a meno di 150°C, del gas impuro con una lega Zr - V - Fe precedentemente attivata ad una temperatura superiore a 300°C per più di 10 minuti.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI910526A IT1247110B (it) | 1991-02-28 | 1991-02-28 | Processo per la purificazione di gas fluorurati |
KR1019920002981A KR100203021B1 (ko) | 1991-02-28 | 1992-02-26 | 불소-포함 가스의 정화방법 |
JP4073017A JPH0592119A (ja) | 1991-02-28 | 1992-02-26 | 弗素含有気体の精製方法 |
EP19920830087 EP0501933A3 (en) | 1991-02-28 | 1992-02-27 | Process for the purification of fluorine-containing gases |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI910526A IT1247110B (it) | 1991-02-28 | 1991-02-28 | Processo per la purificazione di gas fluorurati |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI910526A0 ITMI910526A0 (it) | 1991-02-28 |
ITMI910526A1 ITMI910526A1 (it) | 1992-08-28 |
IT1247110B true IT1247110B (it) | 1994-12-12 |
Family
ID=11358800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI910526A IT1247110B (it) | 1991-02-28 | 1991-02-28 | Processo per la purificazione di gas fluorurati |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0501933A3 (it) |
JP (1) | JPH0592119A (it) |
KR (1) | KR100203021B1 (it) |
IT (1) | IT1247110B (it) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1150143C (zh) * | 1997-05-02 | 2004-05-19 | 纳幕尔杜邦公司 | 用半透膜从不饱和氟化物中分离出二氧化碳 |
EP0980346B1 (en) * | 1997-05-02 | 2004-04-14 | E.I. Du Pont De Nemours And Company | Co 2? removal from fluorocarbons by semipermeable membrane |
JP3727797B2 (ja) | 1998-05-22 | 2005-12-14 | セントラル硝子株式会社 | 三フッ化窒素の製造方法 |
JP4492764B2 (ja) * | 1999-05-24 | 2010-06-30 | 日本ゼオン株式会社 | プラズマ反応用ガス及びその製造方法 |
US6709487B1 (en) | 2002-10-22 | 2004-03-23 | Air Products And Chemicals, Inc. | Adsorbent for moisture removal from fluorine-containing fluids |
DE102006042501B4 (de) * | 2006-09-07 | 2010-11-25 | Eisenmann Anlagenbau Gmbh & Co. Kg | Verfahren und Anlage zum Trocknen von Gegenständen |
DE102020107286A1 (de) | 2019-03-28 | 2020-10-01 | Taiyo Yuden Co., Ltd. | Mehrschichtiger Keramikkondensator und Verfahren zu dessen Herstellung |
CN115650174B (zh) * | 2022-11-01 | 2023-08-25 | 福建德尔科技股份有限公司 | 高纯氟气的纯化装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1110271B (it) * | 1979-02-05 | 1985-12-23 | Getters Spa | Lega ternaria getterante non evaporabile e metodo di suo impiego per l'assorbimento di acqua,vapore d'acqua,di altri gas |
JPS623008A (ja) * | 1985-06-28 | 1987-01-09 | 大陽酸素株式会社 | アルゴンの超精製装置、並びに精製方法 |
IT1227219B (it) * | 1988-09-26 | 1991-03-27 | Getters Spa | Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno |
-
1991
- 1991-02-28 IT ITMI910526A patent/IT1247110B/it active IP Right Grant
-
1992
- 1992-02-26 JP JP4073017A patent/JPH0592119A/ja not_active Withdrawn
- 1992-02-26 KR KR1019920002981A patent/KR100203021B1/ko not_active IP Right Cessation
- 1992-02-27 EP EP19920830087 patent/EP0501933A3/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JPH0592119A (ja) | 1993-04-16 |
EP0501933A3 (en) | 1993-09-15 |
EP0501933A2 (en) | 1992-09-02 |
KR920016128A (ko) | 1992-09-24 |
ITMI910526A1 (it) | 1992-08-28 |
ITMI910526A0 (it) | 1991-02-28 |
KR100203021B1 (ko) | 1999-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970129 |