YU47521B - Postupak za dobijanje parnih reaktanata i hemijsko izdvajanje pare na supstratu - Google Patents

Postupak za dobijanje parnih reaktanata i hemijsko izdvajanje pare na supstratu

Info

Publication number
YU47521B
YU47521B YU194490A YU194490A YU47521B YU 47521 B YU47521 B YU 47521B YU 194490 A YU194490 A YU 194490A YU 194490 A YU194490 A YU 194490A YU 47521 B YU47521 B YU 47521B
Authority
YU
Yugoslavia
Prior art keywords
steam
vapor
reactants
coating precursor
evaporation space
Prior art date
Application number
YU194490A
Other languages
English (en)
Other versions
YU194490A (sh
Inventor
M.J. Soubeyrand
R.J. Mccurdy
Original Assignee
Libbey-Ownes-Ford Co.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey-Ownes-Ford Co. filed Critical Libbey-Ownes-Ford Co.
Publication of YU194490A publication Critical patent/YU194490A/sh
Publication of YU47521B publication Critical patent/YU47521B/sh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/229—Non-specific enumeration
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

Postupak za dobijanje parnih reaktanata, naznačen time, što obuhvata istovremeno i neprekidno uvodjenje tečnog prekursora prevlake u prostor za isparavanje (12) definisan bar jednim delimično perifernim zidom radi gradjenja pare; uvodjenje gasne smeše u količini koja povećava maseni transport pare prekursora prevlake u prostor za isparavanje (12); mešanje tečnog prekursora prevlake, pare prekursora prevlake i gasne smeše duž perifernog zida prostora za isparavanje (12) i izvodjenje reaktanskog gasa iz prostora za isparavanje (12). Prijava sadrži još 15 zavisnih zahteva.
YU194490A 1989-10-17 1990-10-16 Postupak za dobijanje parnih reaktanata i hemijsko izdvajanje pare na supstratu YU47521B (sh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US42263689A 1989-10-17 1989-10-17
US07/591,121 US5090985A (en) 1989-10-17 1990-10-04 Method for preparing vaporized reactants for chemical vapor deposition

Publications (2)

Publication Number Publication Date
YU194490A YU194490A (sh) 1993-10-20
YU47521B true YU47521B (sh) 1995-10-03

Family

ID=27025695

Family Applications (1)

Application Number Title Priority Date Filing Date
YU194490A YU47521B (sh) 1989-10-17 1990-10-16 Postupak za dobijanje parnih reaktanata i hemijsko izdvajanje pare na supstratu

Country Status (26)

Country Link
US (1) US5090985A (sh)
EP (1) EP0450016B1 (sh)
JP (1) JP3078835B2 (sh)
KR (1) KR0147042B1 (sh)
CN (1) CN1025322C (sh)
AT (1) ATE133147T1 (sh)
AU (1) AU632175B2 (sh)
BG (1) BG94619A (sh)
BR (1) BR9005227A (sh)
CA (1) CA2027761A1 (sh)
CZ (1) CZ502090A3 (sh)
DE (1) DE69024938T2 (sh)
ES (1) ES2082007T3 (sh)
HU (1) HU213646B (sh)
IE (1) IE903601A1 (sh)
MX (1) MX173282B (sh)
MY (1) MY107107A (sh)
NO (1) NO304109B1 (sh)
NZ (1) NZ235700A (sh)
PL (1) PL167110B1 (sh)
PT (1) PT95613B (sh)
RO (1) RO111756B1 (sh)
RU (1) RU2062258C1 (sh)
TR (1) TR25795A (sh)
WO (1) WO1991005743A1 (sh)
YU (1) YU47521B (sh)

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Also Published As

Publication number Publication date
IE903601A1 (en) 1991-04-24
DE69024938T2 (de) 1996-08-14
NZ235700A (en) 1992-12-23
MX173282B (es) 1994-02-14
ATE133147T1 (de) 1996-02-15
AU632175B2 (en) 1992-12-17
YU194490A (sh) 1993-10-20
RO111756B1 (ro) 1997-01-30
HUT57682A (en) 1991-12-30
PT95613A (pt) 1991-09-13
MY107107A (en) 1995-09-30
PL167110B1 (pl) 1995-07-31
TR25795A (tr) 1993-09-01
US5090985A (en) 1992-02-25
EP0450016A4 (en) 1993-03-03
EP0450016B1 (en) 1996-01-17
BG94619A (bg) 1993-12-24
EP0450016A1 (en) 1991-10-09
JP3078835B2 (ja) 2000-08-21
CA2027761A1 (en) 1991-04-18
KR920701064A (ko) 1992-08-11
CZ502090A3 (cs) 1998-10-14
ES2082007T3 (es) 1996-03-16
WO1991005743A1 (en) 1991-05-02
DE69024938D1 (de) 1996-02-29
KR0147042B1 (ko) 1998-08-17
HU213646B (en) 1997-09-29
HU907561D0 (en) 1991-10-28
BR9005227A (pt) 1991-09-17
NO912320D0 (no) 1991-06-14
CN1051899A (zh) 1991-06-05
AU6529790A (en) 1991-05-16
JPH04502305A (ja) 1992-04-23
CN1025322C (zh) 1994-07-06
PT95613B (pt) 1997-08-29
RU2062258C1 (ru) 1996-06-20
NO304109B1 (no) 1998-10-26
NO912320L (no) 1991-06-14

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