JPS6425984A - Formation of deposited film - Google Patents

Formation of deposited film

Info

Publication number
JPS6425984A
JPS6425984A JP62073614A JP7361487A JPS6425984A JP S6425984 A JPS6425984 A JP S6425984A JP 62073614 A JP62073614 A JP 62073614A JP 7361487 A JP7361487 A JP 7361487A JP S6425984 A JPS6425984 A JP S6425984A
Authority
JP
Japan
Prior art keywords
compd
film forming
contg
film
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62073614A
Other languages
Japanese (ja)
Inventor
Shunichi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62073614A priority Critical patent/JPS6425984A/en
Publication of JPS6425984A publication Critical patent/JPS6425984A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Abstract

PURPOSE:To efficiently form a high purity deposited film contg. carbon such as a thin diamond film by separately introducing a compd. contg. carbon and halogen and active seed of film forming starting material into a film forming space and by brining them into a reaction by the action of a red-hot catalytic metal set in the space. CONSTITUTION:A compd. contg. carbon and halogen (from 111) and active seed (from 110) produced from film forming starting material causing chemical interaction with the compd. through an activating energy source 109 are separately introduced into a film forming space 101 for forming a deposited film on a substrate 103. They are brought into a reaction by the action of a heated catalyst 112. The catalyst is a group IV, V or VI metal of the periodic table or a compd. thereof, e.g., Mo.
JP62073614A 1987-03-23 1987-03-27 Formation of deposited film Pending JPS6425984A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62073614A JPS6425984A (en) 1987-03-23 1987-03-27 Formation of deposited film

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6582887 1987-03-23
JP62073614A JPS6425984A (en) 1987-03-23 1987-03-27 Formation of deposited film

Publications (1)

Publication Number Publication Date
JPS6425984A true JPS6425984A (en) 1989-01-27

Family

ID=26406976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62073614A Pending JPS6425984A (en) 1987-03-23 1987-03-27 Formation of deposited film

Country Status (1)

Country Link
JP (1) JPS6425984A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02217469A (en) * 1989-02-17 1990-08-30 Hitachi Ltd Formation of thin film and forming device
JPH077174A (en) * 1993-01-28 1995-01-10 Gold Star Electron Co Ltd Photodiode and preparation thereof
WO2021090793A1 (en) * 2019-11-06 2021-05-14 株式会社クリエイティブコーティングス Film forming apparatus and film forming method for dlc film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02217469A (en) * 1989-02-17 1990-08-30 Hitachi Ltd Formation of thin film and forming device
JPH077174A (en) * 1993-01-28 1995-01-10 Gold Star Electron Co Ltd Photodiode and preparation thereof
WO2021090793A1 (en) * 2019-11-06 2021-05-14 株式会社クリエイティブコーティングス Film forming apparatus and film forming method for dlc film

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