WO2021014914A1 - 感光性樹脂組成物、転写フィルム、硬化膜、積層体、及び、タッチパネルの製造方法 - Google Patents

感光性樹脂組成物、転写フィルム、硬化膜、積層体、及び、タッチパネルの製造方法 Download PDF

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Publication number
WO2021014914A1
WO2021014914A1 PCT/JP2020/025883 JP2020025883W WO2021014914A1 WO 2021014914 A1 WO2021014914 A1 WO 2021014914A1 JP 2020025883 W JP2020025883 W JP 2020025883W WO 2021014914 A1 WO2021014914 A1 WO 2021014914A1
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Prior art keywords
compound
resin composition
photosensitive resin
mass
group
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Ceased
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PCT/JP2020/025883
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English (en)
French (fr)
Japanese (ja)
Inventor
陽平 有年
児玉　邦彦
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Fujifilm Corp
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Fujifilm Corp
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Priority to CN202080045202.1A priority Critical patent/CN113994259B/zh
Priority to JP2021533899A priority patent/JPWO2021014914A1/ja
Publication of WO2021014914A1 publication Critical patent/WO2021014914A1/ja
Priority to US17/553,327 priority patent/US20220107562A1/en
Anticipated expiration legal-status Critical
Priority to JP2024160253A priority patent/JP2025000704A/ja
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F12/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
    • C08F12/02—Monomers containing only one unsaturated aliphatic radical
    • C08F12/04—Monomers containing only one unsaturated aliphatic radical containing one ring
    • C08F12/06—Hydrocarbons
    • C08F12/08—Styrene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
    • C08F20/02—Monocarboxylic acids having less than ten carbon atoms, Derivatives thereof
    • C08F20/10—Esters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/085—Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/285—Permanent coating compositions
    • H05K3/287—Photosensitive compositions
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0104—Properties and characteristics in general
    • H05K2201/0108—Transparent

Definitions

  • the present disclosure relates to a method for manufacturing a photosensitive resin composition, a transfer film, a cured film, a laminate, and a touch panel.
  • tablet-type input devices are arranged on the surface of liquid crystal devices and the like.
  • the information corresponding to the instruction image can be input by touching the part where the instruction image is displayed with a finger or a touch pen. It can be carried out.
  • the above-mentioned input device (hereinafter, also referred to as “touch panel”) includes a resistive film type, a capacitance type, and the like.
  • the capacitance type input device has an advantage that a translucent conductive film may simply be formed on a single substrate.
  • the electrode patterns are extended in the directions intersecting each other, and when a finger or the like comes into contact, the change in capacitance between the electrodes is detected to detect the input position.
  • a transparent resin layer is often provided for the purpose of protecting the electrode pattern, the routing wiring (for example, metal wiring such as a copper wire), etc. gathered in the frame portion.
  • a photosensitive resin composition is often used as a material for forming such a transparent resin layer.
  • Patent Document 1 describes a metal material having a corrosion-resistant coating layer in which at least a rust preventive is dispersed in a matrix on at least one side, and is a heterocycle containing at least one element selected from nitrogen, sulfur, and oxygen.
  • a surface-coated metal material characterized by containing the above as the rust preventive agent is described.
  • the problem to be solved by one embodiment of the present invention is to provide a photosensitive resin composition having excellent development residue inhibitory property and excellent rust prevention property of exposed wiring around the film after heat treatment of the obtained film or cured film. It is to be.
  • Another object to be solved by another embodiment of the present invention is to provide a method for manufacturing a transfer film, a cured film, a laminate, and a touch panel using the photosensitive resin composition.
  • Means for solving the above problems include the following aspects. ⁇ 1> Selected from a heterocyclic structure having at least one atom of an oxygen atom, a nitrogen atom and a sulfur atom in the ring structure, and a group consisting of -SH, -OH, -COOH, -NH 2 and -CONH 2.
  • a photosensitive resin composition containing Compound A having at least one functional group, an alkali-soluble binder polymer, an ethylenically unsaturated compound, and a photopolymerization initiator.
  • ⁇ 2> The photosensitivity according to ⁇ 1>, wherein the compound A has a 5-membered heterocycle having a nitrogen atom in the ring structure or a 6-membered heterocycle having a nitrogen atom in the ring structure as the heterocyclic structure. Sex resin composition.
  • ⁇ 3> The photosensitive resin composition according to ⁇ 1> or ⁇ 2>, wherein the compound A has a 6-membered heterocycle having a nitrogen atom in the ring structure as the heterocyclic structure.
  • ⁇ 4> The photosensitivity according to any one of ⁇ 1> to ⁇ 3>, wherein the heterocyclic structure in the compound A is a pyridine ring structure, a pyrimidine ring structure, or a 1,3,5-triazine ring structure.
  • Sex resin composition ⁇ 5> The photosensitive resin composition according to any one of ⁇ 1> to ⁇ 4>, wherein the heterocyclic structure in the compound A is a pyridine ring structure.
  • the compound A is a compound having a total of 1 to 3 functional groups selected from the group consisting of -SH, -OH, -COOH, -NH 2 and -CONH 2 ⁇ 1> to ⁇ 5.
  • the photosensitive resin composition according to one.
  • the above-mentioned compound A is any one of ⁇ 1> to ⁇ 7>, which is a compound having at least one of the above functional groups selected from the group consisting of -OH, -COOH and -CONH 2 .
  • Photosensitive resin composition. ⁇ 9> Described in any one of ⁇ 1> to ⁇ 8>, wherein the compound A is a compound having one or two functional groups selected from the group consisting of -OH, -COOH and -CONH 2.
  • Photosensitive resin composition ⁇ 10> The photosensitive resin composition according to any one of ⁇ 1> to ⁇ 9>, wherein the compound A is a compound having one -COOH or -CONH 2 as the functional group.
  • the content of the compound A is one of ⁇ 1> to ⁇ 11>, which is 0.1% by mass to 2.0% by mass with respect to the total solid content of the photosensitive resin composition.
  • the photosensitive resin composition according to any one of ⁇ 1> to ⁇ 14> which is a photosensitive resin composition for forming a protective film on a touch panel.
  • ⁇ 18> A laminate having a substrate and a cured film obtained by curing the photosensitive resin composition according to any one of ⁇ 1> to ⁇ 15>.
  • ⁇ 19> Prepare a touch panel substrate having a surface on which at least one of the touch panel electrode and the touch panel wiring is arranged, and the above surface on which at least one of the touch panel electrode and the touch panel wiring of the touch panel substrate is arranged.
  • a photosensitive layer composed of the photosensitive resin composition according to any one of ⁇ 1> to ⁇ 15> or a photosensitive layer formed by drying the photosensitive resin composition.
  • a method of manufacturing a touch panel including obtaining a protective film.
  • a photosensitive resin composition having excellent development residue inhibitory property and rust prevention property of exposed wiring around the film after heat treatment of the obtained film or cured film. .. Further, according to another embodiment of the present invention, it is possible to provide a method for manufacturing a transfer film, a cured film, a laminate, and a touch panel using the above-mentioned photosensitive resin composition.
  • the notation that does not describe substitution and non-substitution includes those having no substituent as well as those having a substituent.
  • the "alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
  • “% by mass” and “% by weight” are synonymous, and “parts by mass” and “parts by weight” are synonymous.
  • a combination of two or more preferred embodiments is a more preferred embodiment.
  • the amount of each component in the composition means the total amount of the plurality of substances present in the composition when a plurality of substances corresponding to each component are present in the composition, unless otherwise specified.
  • the term “process” is included in this term not only as an independent process but also as long as the intended purpose of the process is achieved even when it cannot be clearly distinguished from other processes.
  • "(meth) acrylic acid” is a concept that includes both acrylic acid and methacrylic acid
  • (meth) acrylate” is a concept that includes both acrylate and methacrylate
  • (meth) acrylate” is a concept that includes both acrylate and methacrylate.
  • Acryloyl group is a concept that includes both an acryloyl group and a methacrylic acid group. Further, for the weight average molecular weight (Mw) and the number average molecular weight (Mn) in the present disclosure, unless otherwise specified, columns of TSKgel GMHxL, TSKgel G4000HxL, and TSKgel G2000HxL (all trade names manufactured by Toso Co., Ltd.) are used. It is a molecular weight converted by detecting with a solvent THF (tetrahydrofuran) and a differential refractometer by a gel permeation chromatography (GPC) analyzer and using polystyrene as a standard substance.
  • THF tetrahydrofuran
  • the molecular weight of a compound having a molecular weight distribution is the weight average molecular weight.
  • the ratio of the constituent units of the polymer is the molar ratio.
  • the refractive index is a value at a wavelength of 550 nm measured at 25 ° C. with an ellipsometer.
  • the photosensitive resin composition according to the present disclosure has a heterocyclic structure having at least one atom of an oxygen atom, a nitrogen atom and a sulfur atom in the ring structure, and -SH, -OH, -COOH, -NH 2 and-. It contains compound A having at least one functional group selected from the group consisting of CONH 2 , an alkali-soluble binder polymer, an ethylenically unsaturated compound, and a photopolymerization initiator.
  • the photosensitive resin composition according to the present disclosure has a developing residue-suppressing property and a rust-preventive property of exposed wiring around the film after heat treatment of the obtained film or cured film (hereinafter, also simply referred to as “rust-preventive property”. ), So that it can be suitably used as a photosensitive resin composition for a touch panel, more preferably used as a photosensitive resin composition for forming a protective film in a touch panel, and a photosensitive resin for forming an electrode protective film in a touch panel. It can be particularly preferably used as a composition.
  • a heterocyclic structure having at least one atom of an oxygen atom, a nitrogen atom and a sulfur atom in the ring structure, and at least one selected from the group consisting of -SH, -OH, -COOH, -NH 2 and -CONH 2.
  • the compound A volatilizes during the heat treatment (also referred to as “baking”) after the formation of the film or the cured film, and the wiring exposed around the film or the cured film. It is estimated that it prevents corrosion of (for example, copper wiring) and has excellent rust resistance.
  • the compound A is composed of a heterocyclic structure having at least one atom of an oxygen atom, a nitrogen atom and a sulfur atom in the ring structure, and -SH, -OH, -COOH, -NH 2 and -CONH 2.
  • the compound A has at least one functional group selected from the group consisting of -SH, -OH, -COOH, -NH 2 and -CONH 2 , the solubility and dispersibility of the development residue are improved. It is presumed that the agglomeration of the development residue can be suppressed and the generation of the development residue can be suppressed.
  • the photosensitive resin composition according to the present disclosure has a heterocyclic structure having at least one atom of an oxygen atom, a nitrogen atom and a sulfur atom in the ring structure, and -SH, -OH, -COOH, -NH 2 and-. It contains compound A having at least one functional group selected from the group consisting of CONH 2 .
  • the functional group is a group directly bonded to the heterocycle in the heterocyclic structure.
  • the heterocyclic structure of compound A has at least one atom of a nitrogen atom and a sulfur atom in the ring structure from the viewpoint of suppressing development residue and rust prevention (in the present disclosure, "ring". It is also referred to as “having as a member”), more preferably having a nitrogen atom in the ring structure, further preferably having one or two nitrogen atoms in the ring structure, and having only one nitrogen atom in the ring. It is particularly preferred to have it in the structure.
  • the heterocyclic structure of compound A is preferably a 5-membered heterocyclic structure or a 6-membered heterocyclic structure from the viewpoint of developing residue inhibitory property and rust preventive property, and is preferably a 6-membered heterocyclic ring.
  • the compound A has a 5-membered heterocyclic structure having a nitrogen atom in the ring structure or a nitrogen atom in the ring structure from the viewpoint of suppressing development residue and rust prevention. It preferably has a 6-membered heterocyclic structure, and more preferably has a 6-membered heterocyclic structure having a nitrogen atom in the ring structure.
  • the heterocyclic structure of compound A may be an aliphatic heterocyclic structure, an aromatic heterocyclic structure, or a monocyclic heterocyclic structure, at least one of them. It may have a polycyclic structure in which heterocycles are condensed.
  • the heterocyclic structure is preferably an aromatic heterocyclic structure, and more preferably a monocyclic aromatic heterocyclic structure.
  • the compound A may have only one heterocyclic structure or two or more, and only one compound A from the viewpoint of developing residue inhibitory property, volatility, and rust prevention property. It is preferable to have.
  • heterocyclic structure contained in the compound A include a pyridine ring structure, a pyrimidine ring structure, a 1,3,5-triazole ring structure, a pyrrol ring structure, a furan ring structure, a thiophene ring structure, and an imidazole ring structure.
  • a pyridine ring structure, a pyrimidine ring structure, or a 1,3,5-triazine ring structure is preferable, and the pyridine ring structure is preferable. Is more preferable.
  • the functional group contained in the compound A is at least one selected from the group consisting of -SH, -OH, -COOH and -CONH 2 from the viewpoint of suppressing development residue, adsorbability to wiring, and rust prevention. It is preferably a species group, more preferably at least one group selected from the group consisting of -OH, -COOH and -CONH 2 , and at least one selected from the group consisting of -COOH and -CONH 2. It is more preferably the base of the seed, especially -CONH 2 .
  • Compound A contains a total of 1 to 3 of the above functional groups selected from the group consisting of -SH, -OH, -COOH, -NH 2 and -CONH 2 from the viewpoint of suppressing development residue and preventing rust. It is preferably a compound having, and more preferably a compound having a total of one or two of the above functional groups selected from the group consisting of -SH, -OH, -COOH, -NH 2 and -CONH 2. It is particularly preferable that the compound has one functional group selected from the group consisting of SH, -OH, -COOH, -NH 2 and -CONH 2 .
  • the compound A is at least one of the above-mentioned functional groups selected from the group consisting of -OH, -COOH and -CONH 2 from the viewpoints of developing residue inhibitory property, adsorptivity to wiring, volatility, and rust prevention property.
  • a compound having a group is preferable, and a compound having one or two of the above functional groups selected from the group consisting of -OH, -COOH and -CONH 2 is more preferable, and the above-mentioned functional group is -COOH.
  • it is particularly preferable that the compound has one -CONH 2 .
  • the molecular weight of compound A is preferably 500 or less, more preferably 80 or more and 300 or less, further preferably 100 or more and 200 or less, and further preferably 100 or more. It is particularly preferably 150 or less.
  • the compound A is preferably a compound represented by any of the following formulas (A-1) to (A-3) from the viewpoint of developing residue inhibitory property and rust preventive property, and is preferably the compound represented by the following formula (A-1) to the following formula (A-3). It is more preferable that the compound is represented by -1).
  • (A-1) ⁇ formula (A-3), are each R a independently represents -SH, -OH, -COOH, a -NH 2 or -CONH 2, n1 represents an integer of 1 to 5 , N2 represents an integer of 1 to 4, and n3 represents an integer of 1 to 3.
  • Ra is -SH, -OH, -COOH or -CONH from the viewpoint of developing residue inhibitory property, adsorptivity to wiring, and rust prevention property.
  • 2 is, -OH, more preferably -COOH or -CONH 2, still more preferably -COOH or -CONH 2, and particularly preferably -CONH 2.
  • N1 in the formula (A-1) is preferably an integer of 1 to 3 and is preferably 1 or 2 from the viewpoint of developing residue inhibitory property, adsorptivity to wiring, volatility, and rust prevention property. Is more preferable, and 1 is particularly preferable.
  • N2 in the formula (A-2) is preferably an integer of 1 to 3 and is preferably 1 or 2 from the viewpoint of developing residue inhibitory property, adsorptivity to wiring, volatility, and rust prevention property. Is more preferable, and 1 is particularly preferable. From the viewpoint of developing residue inhibitory property and rust preventive property, n3 in the formula (A-3) is preferably 1 or 3, and more preferably 1.
  • the compound A is not particularly limited, but specifically, for example, pyridine-2-carboxylic acid (picolinic acid), pyridine-3-carboxylic acid (nicotinic acid), and pyridine-4-carboxylic acid (isonicotinic acid).
  • Examples thereof include amide, 6-methylnicotin amide, isonicotin amide, 2-aminoisonicotin amide, 6-aminoisonicotin amide and the like.
  • compound A pyridine-2-carboxylic acid, pyridine-3-carboxylic acid, 2-hydroxypyridine, 2-mercaptopyridine, 2-aminopyridine, from the viewpoint of suppressing development residue and rust prevention.
  • 2,3-Dihydroxypyridine Pyridine-2-hydroxy-3-carboxylic acid, 2-aminopyrimidine, 4-hydroxypyrimidine, pyrimidine-4-carboxylic acid, 4,6-dihydroxypyrimidine, pyrazole-4-carboxylic acid, 5 -At least one compound selected from the group consisting of benzotriazole carboxylic acid, 2,6-dihydroxyisonicotinic acid, cyanuric acid, nicotine amide, and isonicotin amide is preferable, and pyridine-2-carboxylic acid, pyridine-3.
  • -Carboxylic acid 2-hydroxypyridine, 2,3-dihydroxypyridine, pyridine-2-hydroxy-3-carboxylic acid, 4-hydroxypyrimidine, pyrimidine-4-carboxylic acid, 4,6-dihydroxypyrimidine, nicotine amide, and , At least one compound selected from the group consisting of isonicotinamide is more preferred, pyridine-2-carboxylic acid, pyridine-3-carboxylic acid, 2-hydroxypyridine, 2,3-dihydroxypyridine, pyridine-2-hydroxy. At least one compound selected from the group consisting of -3-carboxylic acid and isonicotinamide is particularly preferable.
  • nicotine amide, isonicotin amide, and pyridine-3-carboxylic acid are preferable from the viewpoint of versatility, and iso from the viewpoint of the balance of volatileness and adsorptivity to wiring. Nicotinamide, pyridine-2-carboxylic acid, 2-hydroxypyridine, 2,3-dihydroxypyridine, pyridine-2-hydroxy-3-carboxylic acid, 4-hydroxypyrimidine, pyrimidine-4-carboxylic acid, and 4,6 -At least one compound selected from the group consisting of dihydroxypyrimidine is preferred.
  • Compound A may be used alone or in combination of two or more.
  • the content of the compound A is preferably 0.01% by mass to 20% by mass, preferably 0% by mass, based on the total solid content in the photosensitive resin composition from the viewpoint of suppressing development residue and preventing rust. It is more preferably 0.05% by mass to 10% by mass, further preferably 0.1% by mass to 2.0% by mass, and particularly preferably 0.2% by mass to 1.8% by mass. ..
  • the total solid content in the photosensitive resin composition in the present disclosure represents an amount excluding volatile components such as a solvent, and the solid content in the present disclosure does not have to be a solid, but is a liquid. It may be a mixture of a solid and a liquid.
  • the photosensitive resin composition according to the present disclosure has a storage elastic modulus of P ⁇ 10 2 Pa at 100 ° C. of the photosensitive resin composition, and the content of the compound A with respect to the total solid content in the photosensitive resin composition.
  • W a% by weight preferably satisfies the following formula 1
  • more preferably satisfies the following formula 3 it is particularly preferable to satisfy the following formula 4.
  • the storage elastic modulus of the photosensitive resin composition at 100 ° C. shall be measured by the following method.
  • a rheometer (Discovery HR-2) manufactured by TA Instruments Co., Ltd. is used for measuring the storage elastic modulus.
  • a 20 mm ⁇ parallel plate is used as the sample fixing jig.
  • a coating liquid for a photosensitive layer is applied on a polyethylene terephthalate film (temporary support, 16QS62 (16KS40) (manufactured by Toray Industries, Inc.)) having a thickness of 16 ⁇ m using a slit-shaped nozzle, and the thickness after drying becomes 10 ⁇ m.
  • the film is adjusted and applied in such a manner, and dried in a hot air convection dryer having a temperature gradient of 75 ° C. to 120 ° C. to remove the solvent to form a photosensitive layer. This is repeated 50 times and laminated to obtain a sample having a film thickness of about 500 ⁇ m. Place the prepared sample between the plates and bring the sample into close contact with the plate. Dynamic viscoelasticity is measured at a heating rate of 5 ° C./min in a temperature range of 20 to 125 ° C. in a shear mode, frequency of 1.0 Hz, and strain of 0.5%, and has a storage elastic modulus of G'(at 100 ° C.). Pa) is calculated.
  • the photosensitive resin composition according to the present disclosure contains an alkali-soluble binder polymer (hereinafter, also simply referred to as “binder polymer”).
  • alkali-soluble means that the solubility of sodium carbonate in 100 g of a 1% by mass aqueous solution at 22 ° C. is 0.1 g or more.
  • the binder polymer is preferably, for example, a binder polymer having an acid value of 60 mgKOH / g or more from the viewpoint of developability.
  • the binder polymer is, for example, a resin having a carboxy group having an acid value of 60 mgKOH / g or more (so-called carboxy group-containing resin) from the viewpoint that it is easily crosslinked with a crosslinked component by heating to form a strong film. It is more preferable that the acrylic resin has a carboxy group having an acid value of 60 mgKOH / g or more (so-called carboxy group-containing acrylic resin).
  • the acrylic resin refers to a resin having a structural unit derived from a (meth) acrylic compound, and the content of the structural unit is preferably 30% by mass or more with respect to the total mass of the resin. , 50% by mass or more is more preferable.
  • the binder polymer is a resin having a carboxy group
  • the three-dimensional crosslink density can be increased by, for example, adding a thermally crosslinkable compound such as a blocked isocyanate compound to thermally crosslink.
  • a thermally crosslinkable compound such as a blocked isocyanate compound
  • the carboxy group of the resin having a carboxy group is anhydrous and hydrophobized, the wet heat resistance can be improved.
  • the carboxy group-containing acrylic resin having an acid value of 60 mgKOH / g or more is not particularly limited as long as the above acid value conditions are satisfied, and can be appropriately selected from known acrylic resins and used.
  • carboxy group-containing acrylic resins having an acid value of 60 mgKOH / g or more among the polymers described in paragraphs 0025 of JP2011-95716A, carboxy group-containing acrylic resins having an acid value of 60 mgKOH / g or more, and the polymers described in paragraphs 0033 to 0052 of JP2010-237589A.
  • Acrylic resin containing a carboxy group having an acid value of 60 mgKOH / g or more can be preferably used.
  • the binder polymer is preferably an acrylic resin or a styrene-acrylic copolymer from the viewpoint of suppressing development residue, moisture permeability of the obtained cured film, and adhesiveness of the obtained uncured film, and is preferably styrene-. It is more preferably an acrylic copolymer.
  • the styrene-acrylic copolymer refers to a resin having a structural unit derived from a styrene compound and a structural unit derived from a (meth) acrylic compound, and the structural unit derived from the styrene compound and the (meth) compound.
  • the total content of the constituent units derived from the acrylic compound is preferably 30% by mass or more, more preferably 50% by mass or more, based on the total mass of the copolymer.
  • the content of the structural unit derived from the styrene compound is preferably 1% by mass or more, more preferably 5% by mass or more, and 5% by mass or more and 80% by mass with respect to the total mass of the copolymer. It is particularly preferable that it is% or less.
  • the content of the structural unit derived from the (meth) acrylic compound is preferably 5% by mass or more, more preferably 10% by mass or more, and 20% by mass, based on the total mass of the copolymer. It is particularly preferable that it is% or more and 95% by mass or less.
  • examples of the (meth) acrylic compound include (meth) acrylate compound, (meth) acrylic acid, (meth) acrylamide compound, and (meth) acrylonitrile. Among them, at least one compound selected from the group consisting of (meth) acrylate compound and (meth) acrylic acid is preferable.
  • the binder polymer preferably has a structural unit having an aromatic ring from the viewpoints of suppressive development residue, moisture permeability of the obtained cured film, and strength.
  • the monomer forming the structural unit having an aromatic ring include styrene compounds such as styrene, tert-butoxystyrene, methylstyrene and ⁇ -methylstyrene, and benzyl (meth) acrylate. Of these, styrene compounds are preferable, and styrene is particularly preferable.
  • the binder polymer more preferably has a structural unit (constituent unit derived from styrene) represented by the following formula (S) from the viewpoint of moisture permeability and strength of the obtained cured film.
  • the content of the structural unit having an aromatic ring is 5% by mass to 90% by mass with respect to the total mass of the binder polymer from the viewpoint of moisture permeability and strength of the obtained cured film. It is preferably by mass%, more preferably 10% by mass to 70% by mass, and particularly preferably 20% by mass to 50% by mass. Further, the content of the structural unit having an aromatic ring in the binder polymer is preferably 5 mol% to 70 mol% with respect to the total amount of the binder polymer from the viewpoint of the moisture permeability and strength of the obtained cured film. It is more preferably mol% to 60 mol%, and particularly preferably 20 mol% to 50 mol%.
  • the content of the structural unit represented by the above formula (S) in the binder polymer is 5 mol% to 70 mol% with respect to the total amount of the binder polymer from the viewpoint of the moisture permeability and strength of the obtained cured film. It is preferable, it is more preferably 10 mol% to 60 mol%, and particularly preferably 20 mol% to 50 mol%.
  • the above “constituent unit” is synonymous with the "monomer unit”.
  • the above-mentioned "monomer unit” may be modified after polymerization by a polymer reaction or the like. The same applies to the following.
  • the binder polymer preferably has a structural unit having an aliphatic hydrocarbon ring from the viewpoints of suppressing development residue, strength of the obtained cured film, and adhesiveness of the obtained uncured film.
  • the aliphatic hydrocarbon ring in the constituent unit having an aliphatic hydrocarbon ring include a tricyclodecane ring, a cyclohexane ring, a cyclopentane ring, a norbornane ring, and an isoborone ring.
  • the ring is a fused ring of two or more aliphatic hydrocarbon rings, and a tetrahydrodicyclopentadiene ring.
  • Tricyclo [5.2.1.0 2,6 ] decane ring is particularly preferable.
  • the monomer forming a structural unit having an aliphatic hydrocarbon ring include dicyclopentanyl (meth) acrylate, cyclohexyl (meth) acrylate, and isobornyl (meth) acrylate.
  • the binder polymer more preferably has a structural unit represented by the following formula (Cy) from the viewpoint of the strength of the obtained cured film and the adhesiveness of the obtained uncured film, and the above formula (S). It is particularly preferable to have a structural unit represented by and a structural unit represented by the following formula (Cy).
  • R M represents a hydrogen atom or a methyl group
  • R Cy represents a monovalent group having an aliphatic hydrocarbon ring structure
  • R M in the formula (Cy) is preferably a methyl group.
  • R Cy in the formula (Cy) is a monovalent group having an aliphatic hydrocarbon ring structure having 5 to 20 carbon atoms from the viewpoint of the strength of the obtained cured film and the adhesiveness of the obtained uncured film. It is preferable that it is a monovalent group having an aliphatic hydrocarbon ring structure having 6 to 16 carbon atoms, and more preferably it is a monovalent group having an aliphatic hydrocarbon ring structure having 8 to 14 carbon atoms. Is particularly preferable.
  • R Cy in the formula (Cy), the strength of the cured film obtained, and, from the viewpoint of the tackiness of the uncured film obtained, and -C ( O) O- oxygen atom in the formula (Cy)
  • the binder polymer may have one type of structural unit having an aliphatic hydrocarbon ring alone, or may have two or more types.
  • the content of the structural unit having an aliphatic hydrocarbon ring is based on the total mass of the binder polymer from the viewpoint of the moisture permeability and strength of the obtained cured film. It is preferably 5% by mass to 90% by mass, more preferably 10% by mass to 80% by mass, and particularly preferably 20% by mass to 70% by mass.
  • the content of the structural unit having an aliphatic hydrocarbon ring in the binder polymer is 5 mol% to 70 mol% with respect to the total amount of the binder polymer from the viewpoint of the moisture permeability and strength of the obtained cured film. It is preferably 10 mol% to 60 mol%, more preferably 20 mol% to 50 mol%. Further, the content of the structural unit represented by the above formula (Cy) in the binder polymer is 5 mol% to 70 mol% with respect to the total amount of the binder polymer from the viewpoint of the moisture permeability and strength of the obtained cured film. It is preferable, it is more preferably 10 mol% to 60 mol%, and particularly preferably 20 mol% to 50 mol%.
  • the total content of the structural unit having an aromatic ring and the structural unit having an aliphatic hydrocarbon ring is the total content of the obtained cured film.
  • it is preferably 10% by mass to 90% by mass, more preferably 20% by mass to 80% by mass, and 40% by mass to 75% by mass, based on the total mass of the binder polymer. It is particularly preferably by mass%.
  • the total content of the structural unit having an aromatic ring and the structural unit having an aliphatic hydrocarbon ring in the binder polymer is 10 with respect to the total amount of the binder polymer from the viewpoint of the moisture permeability and strength of the obtained cured film. It is preferably mol% to 80 mol%, more preferably 20 mol% to 70 mol%, and particularly preferably 40 mol% to 60 mol%. Further, the total content of the structural unit represented by the above formula (S) and the structural unit represented by the above formula (Cy) in the binder polymer is determined from the viewpoint of moisture permeability and strength of the obtained cured film.
  • the molar amount nS of the structural unit represented by the above formula (S) and the molar amount nCy of the structural unit represented by the above formula (Cy) in the binder polymer are the moisture permeability and strength of the obtained cured film. From the viewpoint, it is preferable to satisfy the relationship shown in the following formula (SCy), more preferably to satisfy the following formula (SCy-1), and particularly preferably to satisfy the following formula (SCy-2).
  • the binder polymer preferably has a structural unit having an acid group from the viewpoints of suppressive development residue, strength of the obtained cured film, and developability.
  • the acid group include a carboxy group, a sulfo group, a phosphonic acid group, a phosphoric acid group and the like, but a carboxy group is preferable.
  • the structural unit having the acid group the structural unit derived from (meth) acrylic acid shown below is preferably mentioned, and the structural unit derived from methacrylic acid is more preferably mentioned.
  • the binder polymer may have one type of structural unit having an acid group alone or two or more types.
  • the content of the structural unit having an acid group is 5% by mass with respect to the total mass of the binder polymer from the viewpoint of the strength of the obtained cured film and the developability. It is preferably ⁇ 50% by mass, more preferably 5% by mass to 40% by mass, and particularly preferably 10% by mass to 30% by mass.
  • the content of the constituent unit having an acid group in the binder polymer is preferably 5 mol% to 70 mol% with respect to the total amount of the binder polymer from the viewpoint of the strength of the obtained cured film and the developability.
  • the content of the (meth) acrylic acid-derived structural unit in the binder polymer is 5 mol% to 70 mol% with respect to the total amount of the binder polymer from the viewpoint of the strength of the obtained cured film and the developability. It is preferable, it is more preferably 10 mol% to 50 mol%, and particularly preferably 20 mol% to 40 mol%.
  • the binder polymer preferably has a reactive group, and more preferably has a structural unit having a reactive group, from the viewpoint of the strength of the obtained cured film and the adhesiveness of the obtained uncured film. ..
  • a reactive group a radically polymerizable group is preferable, and an ethylenically unsaturated group is more preferable.
  • the binder polymer preferably has a structural unit having an ethylenically unsaturated group in the side chain.
  • the "main chain” represents a relatively longest binding chain among the molecules of the polymer compound constituting the resin, and the “side chain” represents an atomic group branched from the main chain. ..
  • the ethylenically unsaturated group a (meth) acrylic group is preferable, and a (meth) acryloyl group is more preferable.
  • the structural unit having a reactive group include those shown below, but it goes without saying that the unit is not limited thereto.
  • the binder polymer may have one type of structural unit having a reactive group alone or two or more types.
  • the content of the structural unit having a reactive group of the binder polymer is determined from the viewpoint of the strength of the obtained cured film and the adhesiveness of the obtained uncured film. It is preferably 5% by mass to 70% by mass, more preferably 10% by mass to 50% by mass, and particularly preferably 20% by mass to 40% by mass with respect to the total mass.
  • the content of the structural unit having a reactive group in the binder polymer is 5 mol% to 70 with respect to the total amount of the binder polymer from the viewpoint of the strength of the obtained cured film and the adhesiveness of the obtained uncured film. It is preferably mol%, more preferably 10 mol% to 60 mol%, and particularly preferably 20 mol% to 50 mol%.
  • a reactive group into a binder polymer a hydroxy group, a carboxy group, a primary amino group, a secondary amino group, an acetoacetyl group, a sulfo group, etc., an epoxy compound, a blocked isocyanate compound, an isocyanate compound, etc.
  • examples thereof include a method of reacting a vinyl sulfone compound, an aldehyde compound, a methylol compound, a carboxylic acid anhydride and the like.
  • a preferred example of a means for introducing a reactive group into a binder polymer is that a polymer having a carboxy group is synthesized by a polymerization reaction and then glycidyl (meth) acrylate is added to a part of the carboxy groups of the obtained polymer by the polymer reaction.
  • a binder polymer having a (meth) acryloxy group in the side chain can be obtained.
  • the polymerization reaction is preferably carried out under a temperature condition of 70 ° C. to 100 ° C., and more preferably carried out under a temperature condition of 80 ° C. to 90 ° C.
  • an azo-based initiator is preferable, and for example, V-601 (trade name) or V-65 (trade name) manufactured by Wako Pure Chemical Industries, Ltd. is more preferable.
  • the polymer reaction is preferably carried out under temperature conditions of 80 ° C. to 110 ° C. In the above polymer reaction, it is preferable to use a catalyst such as an ammonium salt.
  • the binder polymer the following polymers are preferably mentioned from the viewpoint of suppressing development residue.
  • the content ratios (a to d) and the weight average molecular weight Mw of each structural unit shown below can be appropriately changed according to the purpose.
  • the binder polymer may contain a polymer containing a structural unit having a carboxylic acid anhydride structure (hereinafter, also referred to as “polymer B”).
  • polymer B a polymer containing a structural unit having a carboxylic acid anhydride structure
  • the carboxylic acid anhydride structure may be either a chain carboxylic acid anhydride structure or a cyclic carboxylic acid anhydride structure, but a cyclic carboxylic acid anhydride structure is preferable.
  • a 5- to 7-membered ring is preferable, a 5-membered ring or a 6-membered ring is more preferable, and a 5-membered ring is particularly preferable.
  • the structural unit having a carboxylic acid anhydride structure is a structural unit containing a divalent group obtained by removing two hydrogen atoms from the compound represented by the following formula P-1 in the main chain, or a structural unit represented by the following formula P-1. It is preferable that the monovalent group obtained by removing one hydrogen atom from the compound is a structural unit in which the monovalent group is bonded to the main chain directly or via a divalent linking group.
  • R A1a represents a substituent
  • n 1a R A1a may be the same or different
  • Examples of the substituent represented by RA1a include an alkyl group.
  • Z 1a an alkylene group having 2 to 4 carbon atoms is preferable, an alkylene group having 2 or 3 carbon atoms is more preferable, and an alkylene group having 2 carbon atoms is particularly preferable.
  • n 1a represents an integer of 0 or more.
  • Z 1a represents an alkylene group having 2 to 4 carbon atoms
  • n 1a is preferably an integer of 0 to 4, more preferably an integer of 0 to 2, and particularly preferably 0.
  • a plurality of RA1a may be the same or different. Further, the plurality of RA1a may be bonded to each other to form a ring, but it is preferable that they are not bonded to each other to form a ring.
  • the structural unit having a carboxylic acid anhydride structure is preferably a structural unit derived from an unsaturated carboxylic acid anhydride, more preferably a structural unit derived from an unsaturated cyclic carboxylic acid anhydride, and is unsaturated. It is more preferably a structural unit derived from an aliphatic cyclic carboxylic acid anhydride, particularly preferably a structural unit derived from maleic anhydride or itaconic anhydride, and a structural unit derived from maleic anhydride. Is the most preferable.
  • Rx represents a hydrogen atom, a methyl group, a CH 2 OH group, or CF 3 groups
  • Me represents a methyl group.
  • the structural unit having the carboxylic acid anhydride structure in the polymer B may be one kind alone or two or more kinds.
  • the total content of the structural unit having a carboxylic acid anhydride structure is preferably 0 mol% to 60 mol%, more preferably 5 mol% to 40 mol%, based on the total amount of the polymer B. It is particularly preferably 10 mol% to 35 mol%.
  • the photosensitive resin composition according to the present disclosure may contain only one type of polymer B, or may contain two or more types of polymer B.
  • the content of the polymer B is the photosensitive resin composition from the viewpoint of photocurability, developability, and the strength of the obtained cured film. It is preferably 0.1% by mass to 30% by mass, more preferably 0.2% by mass to 20% by mass, and 0.5% by mass to 20% by mass with respect to the total solid content of the above. Is more preferable, and 1% by mass to 20% by mass is particularly preferable.
  • the weight average molecular weight (Mw) of the binder polymer is preferably 5,000 or more, and preferably 10,000 or more, from the viewpoint of the strength of the obtained cured film and the adhesiveness of the obtained uncured film. More preferably, it is more preferably 10,000 to 50,000, further preferably 15,000 to 30,000, and particularly preferably 20,000 to 30,000.
  • the acid value of the binder polymer is preferably 10 mgKOH / g to 200 mgKOH / g, more preferably 60 mgKOH / g to 200 mgKOH / g, still more preferably 60 mgKOH / g to 150 mgKOH / g, and 60 mgKOH / g. It is particularly preferably g to 110 mgKOH / g.
  • the acid value of the binder polymer is a value measured according to the method described in JIS K0070: 1992.
  • the photosensitive resin composition according to the present disclosure may contain only one kind of binder polymer, or may contain two or more kinds of binder polymers.
  • the content of the binder polymer is preferably 10% by mass to 90% by mass with respect to the total solid content of the photosensitive resin composition, for example, from the viewpoint of the strength of the cured film and the handleability in the transfer film. It is more preferably 20% by mass to 80% by mass, and further preferably 30% by mass to 70% by mass.
  • the content of the residual monomer of each structural unit is preferably 5,000 mass ppm or less with respect to the total mass of the binder polymer having the structural unit from the viewpoint of patterning property and reliability.
  • the lower limit is not particularly limited, but is preferably 1 mass ppm or more, and more preferably 10 mass ppm or more.
  • the residual monomer of each structural unit of the binder polymer is preferably 3,000 mass ppm or less, more preferably 600 mass ppm or less, and 100 mass by mass, with respect to the photosensitive layer described later, from the viewpoint of patterning property and reliability. It is more preferably ppm or less.
  • the lower limit is not particularly limited, but is preferably 0.1 mass ppm or more, and more preferably 1 mass ppm or more.
  • the amount of residual monomer of the monomer when synthesizing the binder polymer by the polymer reaction is also preferably in the above range.
  • the content of glycidyl acrylate is preferably in the above range.
  • the photosensitive resin composition according to the present disclosure contains an ethylenically unsaturated compound.
  • the ethylenically unsaturated compound contributes to the photosensitivity (that is, photocurability) and the strength of the cured film.
  • the ethylenically unsaturated compound in the present disclosure is a compound other than the above binder polymer, and preferably has a molecular weight of less than 5,000.
  • the photosensitive resin composition according to the present disclosure is represented as the above-mentioned ethylenically unsaturated compound by the formula (M) described later from the viewpoint of substrate adhesion, development residue suppressing property, and rust prevention property.
  • an ethylenically unsaturated compound having an acid group preferably 1,9-nonanediol diacrylate, tricyclodecanedimethanol diacrylate, and a polyfunctional ethylenically unsaturated compound having a carboxylic acid group.
  • the photosensitive resin composition according to the present disclosure is a formula described later from the viewpoints of the strength of the cured film obtained as the ethylenically unsaturated compound, substrate adhesion, development residue inhibitory property, and rust prevention property.
  • a compound represented by M it is preferable to contain a compound represented by M), an ethylenically unsaturated compound having an acid group, and a thermally crosslinkable compound described later, and having a compound represented by the formula (M) described later and an acid group. It is more preferable to contain an ethylenically unsaturated compound and a blocked isocyanate compound described later.
  • the ethylenically unsaturated compound is a compound represented by the following formula (M) (simply also referred to as "Compound M”) from the viewpoint of developing residue inhibitory property, rust preventive property, and bending resistance of the obtained cured film. It is preferable to include it.
  • Q 2 -R 1 -Q 1 formula (M) In formula (M), Q 1 and Q 2 each independently represent a (meth) acryloyloxy group, and R 1 represents a divalent linking group having a chain structure.
  • Q 1 and Q 2 in the formula (M) have the same group as Q 1 and Q 2 from the viewpoint of ease of synthesis. Further, Q 1 and Q 2 in the formula (M) are preferably acryloyloxy groups from the viewpoint of reactivity.
  • R 1 in the formula (M) from the viewpoint of bending resistance of the obtained cured film, an alkylene group, an alkylene oxyalkylene group (-L 1 -O-L 1 - ), or, polyalkylene oxyalkylene group (- (L 1- O) p- L 1- ) is preferable, and a hydrocarbon group having 2 to 20 carbon atoms or a polyalkyleneoxyalkylene group is more preferable, and an alkylene group having 4 to 20 carbon atoms. More preferably, it is a linear alkylene group having 6 to 18 carbon atoms.
  • the hydrocarbon group may have a chain structure at least in part, and the portion other than the chain structure is not particularly limited, and is, for example, branched chain, cyclic, or having 1 to 5 carbon atoms. It may be any of a linear alkylene group, an arylene group, an ether bond, and a combination thereof, and from the viewpoint of bending resistance of the obtained cured film, an alkylene group or two or more alkylene groups and one or more. It is preferably a group in combination with an arylene group, more preferably an alkylene group, and particularly preferably a linear alkylene group.
  • the L 1 independently represents an alkylene group, preferably an ethylene group, a propylene group, or a butylene group, and more preferably an ethylene group or a 1,2-propylene group.
  • p represents an integer of 2 or more, and is preferably an integer of 2 to 10.
  • the atomic number of the connecting chain of the shortest for connecting the Q 1, Q 2 in the compound M, from the viewpoints of moisture permeability and bending resistance of the obtained cured film is preferably from 3 to 50, The number is more preferably 4 to 40, further preferably 6 to 20, and particularly preferably 8 to 12.
  • the term "Q 1, Q atoms linking chain shortest connecting between two" shortest connecting the atom in R 1 be linked to Q 1 to atom in R 1 be linked to Q 2 Is the number of atoms in.
  • the compound M examples include 1,3-butanediol di (meth) acrylate, tetramethylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, and 1,6-hexanediol di (meth) acrylate.
  • the ester monomer can also be used as a mixture.
  • 1,6-hexanediol di (meth) acrylate, 1,9-nonanediol di (meth) acrylate, and 1,10-decanediol di (meth) acrylate from the viewpoint of bending resistance of the obtained cured film. It is preferably at least one compound selected from the group consisting of acrylates and neopentyl glycol di (meth) acrylates, preferably 1,6-hexanediol di (meth) acrylates and 1,9-nonanediol di ().
  • it is at least one compound selected from the group consisting of meta) acrylates and 1,10-decanediol di (meth) acrylates, with 1,9-nonanediol di (meth) acrylates and Particularly preferred is at least one compound selected from the group consisting of 1,10-decanediol di (meth) acrylates.
  • Compound M may be used alone or in combination of two or more.
  • the content of the compound M is 10% by mass to 90% by mass with respect to the total mass of the ethylenically unsaturated compound in the photosensitive resin composition from the viewpoint of moisture permeability and bending resistance of the obtained cured film. It is more preferably 15% by mass to 70% by mass, further preferably 20% by mass to 50% by mass, and particularly preferably 25% by mass to 35% by mass.
  • the ethylenically unsaturated compound in the present disclosure refers to a compound having an ethylenically unsaturated group having a (weight average) molecular weight of 10,000 or less.
  • the content of the compound M is preferably 1% by mass to 30% by mass with respect to the total solid content in the photosensitive resin composition from the viewpoint of moisture permeability and bending resistance of the obtained cured film. It is more preferably from mass% to 25% by mass, further preferably from 5% by mass to 20% by mass, and particularly preferably from 6% by mass to 14.5% by mass.
  • the total solid content in the photosensitive resin composition in the present disclosure represents an amount excluding volatile components such as a solvent.
  • the ethylenically unsaturated compound preferably contains a bifunctional or higher functional ethylenically unsaturated compound.
  • the "bifunctional or higher functional ethylenically unsaturated compound” means a compound having two or more ethylenically unsaturated groups in one molecule.
  • a (meth) acryloyl group is preferable.
  • a (meth) acrylate compound is preferable.
  • the ethylenically unsaturated compound examples include a bifunctional ethylenically unsaturated compound (preferably a bifunctional (meth) acrylate compound) and a trifunctional or higher functional ethylenic compound from the viewpoint of the strength of the cured film after curing. It is particularly preferred to include unsaturated compounds (preferably trifunctional or higher functional (meth) acrylate compounds).
  • the bifunctional ethylenically unsaturated compound is not particularly limited and may be appropriately selected from known compounds.
  • Examples of the bifunctional ethylenically unsaturated compound other than the compound M include tricyclodecanedimethanol di (meth) acrylate and tricyclodecanedimenanol di (meth) acrylate.
  • NK ester A-DCP tricyclodecanedimethanol diacrylate
  • NK ester A-DCP tricyclodecanedimenanol dimethacrylate
  • NK ester DCP manufactured by Shin-Nakamura Chemical Industry Co., Ltd.
  • 1,9-nonanediol diacrylate (trade name: NK ester A-NOD-N, manufactured by Shin-Nakamura Chemical Industry Co., Ltd.)
  • 1,6 -Hexanediol diacrylate (trade name: NK ester A-HD-N, manufactured by Shin-Nakamura Chemical Industry Co., Ltd.) and the like can be mentioned.
  • the trifunctional or higher functional ethylenically unsaturated compound is not particularly limited and may be appropriately selected from known compounds.
  • Examples of the trifunctional or higher functional ethylenically unsaturated compound include dipentaerythritol (tri / tetra / penta / hexa) (meth) acrylate, pentaerythritol (tri / tetra) (meth) acrylate, and trimethylolpropane tri (meth) acrylate.
  • Examples thereof include ditrimethylolpropane tetra (meth) acrylate, isocyanuric acid (meth) acrylate, and (meth) acrylate compound having a glycerintri (meth) acrylate skeleton.
  • (tri / tetra / penta / hexa) (meth) acrylate) is a concept including tri (meth) acrylate, tetra (meth) acrylate, penta (meth) acrylate, and hexa (meth) acrylate.
  • (Tri / tetra) (meth) acrylate” is a concept that includes tri (meth) acrylate and tetra (meth) acrylate.
  • ethylenically unsaturated compounds include caprolactone-modified compounds of (meth) acrylate compounds (KAYARAD (registered trademark) DPCA-20 manufactured by Nippon Kayaku Co., Ltd., A-9300-1CL manufactured by Shin-Nakamura Chemical Industry Co., Ltd., etc.).
  • (Meta) acrylate compound alkylene oxide-modified compound (KAYARAD (registered trademark) RP-1040 manufactured by Nippon Kayaku Co., Ltd., ATM-35E, A-9300 manufactured by Shin-Nakamura Chemical Industry Co., Ltd., EBECRYL manufactured by Daicel Ornex Co., Ltd. Registered trademarks) 135, etc.), ethoxylated glycerin triacrylate (NK ester A-GLY-9E, etc. manufactured by Shin-Nakamura Chemical Industry Co., Ltd.) and the like.
  • the ethylenically unsaturated compound examples include urethane (meth) acrylate compounds [preferably trifunctional or higher functional urethane (meth) acrylate compounds].
  • urethane (meth) acrylate compounds preferably trifunctional or higher functional urethane (meth) acrylate compounds.
  • propylene oxide-modified urethane di (meth) acrylate, and ethylene oxide and propylene oxide-modified urethane di (meth) acrylate can be mentioned.
  • the trifunctional or higher functional urethane (meth) acrylate compound the number of functional groups is more preferably 6 functional or higher, further preferably 8 functional or higher. The upper limit of the number of functional groups can be, for example, 20 functional or less.
  • Examples of commercially available products include 8UX-015A (manufactured by Taisei Fine Chemical Co., Ltd.), NK ester UA-32P (manufactured by Shin Nakamura Chemical Industry Co., Ltd.), U-15HA (manufactured by Shin Nakamura Chemical Industry Co., Ltd.), and NK.
  • Esters UA-1100H (manufactured by Shin Nakamura Chemical Industry Co., Ltd.), UA-306H, UA-306T, UA-306I, UA-510H, UX-5000 (manufactured by Nippon Kayaku Co., Ltd.) and the like can be mentioned.
  • the ethylenically unsaturated compound preferably contains an ethylenically unsaturated compound having an acid group from the viewpoint of developability and suppressability of developing residue.
  • the acid group include a phosphoric acid group, a sulfo group, a carboxy group and the like.
  • the carboxy group is preferable as the acid group.
  • ethylenically unsaturated compound having an acid group a trifunctional to tetrafunctional ethylenically unsaturated compound having an acid group [pentaerythritol tri and tetraacrylate (PETA) having a carboxy group introduced into the skeleton (acid value: 80 mgKOH) / G to 120 mgKOH / g)], a pentafunctional to hexafunctional ethylenically unsaturated compound having an acid group (dipentaerythritol penta and hexaacrylate (DPHA)) with a carboxy group introduced into the skeleton [acid value: 25 mgKOH / g] ⁇ 70 mgKOH / g)] and the like.
  • PETA pentafunctional to hexafunctional ethylenically unsaturated compound having an acid group
  • DPHA dipentaerythritol penta and hexaacrylate
  • the ethylenically unsaturated compound having an acid group at least one selected from the group consisting of a bifunctional or higher functional ethylenically unsaturated compound having a carboxy group and a carboxylic acid anhydride thereof is preferable.
  • the ethylenically unsaturated compound having an acid group is at least one selected from the group consisting of a bifunctional or higher functional ethylenically unsaturated compound having a carboxy group and a carboxylic acid anhydride thereof, the developability and film strength are higher. Increase.
  • the bifunctional or higher functional ethylenically unsaturated compound having a carboxy group is not particularly limited and can be appropriately selected from known compounds.
  • Examples of the bifunctional or higher functional ethylenically unsaturated compound having a carboxy group include Aronix (registered trademark) TO-2349 (manufactured by Toa Synthetic Co., Ltd.), Aronix (registered trademark) M-520 (manufactured by Toa Synthetic Co., Ltd.). Aronix (registered trademark) M-510 (manufactured by Toa Synthetic Co., Ltd.) and the like can be preferably used.
  • the polymerizable compound having an acid group described in paragraphs 0025 to 0030 of JP-A-2004-239942 can be preferably used, and the contents described in this publication are described in this publication. Incorporated into disclosure.
  • the photosensitive resin composition according to the present disclosure may contain one kind of ethylenically unsaturated compound having an acid group alone or two or more kinds.
  • the content of the ethylenically unsaturated compound having an acid group is 0.1% by mass to 30% by mass with respect to the total solid content of the photosensitive resin composition from the viewpoint of developability and the adhesiveness of the obtained uncured film. It is preferably mass%, more preferably 0.5% by mass to 20% by mass, further preferably 1% by mass to 10% by mass, and particularly preferably 1% by mass to 5% by mass. preferable.
  • the ethylenically unsaturated compound is a bifunctional ethylenically unsaturated compound having an aliphatic hydrocarbon ring structure from the viewpoints of moisture permeability and bending resistance of the obtained cured film and the adhesiveness of the obtained uncured film. It is preferable to contain a bifunctional ethylenically unsaturated compound having a ring structure in which two or more aliphatic hydrocarbon rings are fused, and it is more preferable to contain a tricyclodecanedimethanol di (meth) acrylate. Is particularly preferable.
  • the above aliphatic hydrocarbon ring structure has a cyclopentane ring structure, a cyclohexane ring structure, a tricyclodecane ring structure, and norbornane from the viewpoints of moisture permeability and bending resistance of the obtained cured film and the adhesiveness of the obtained uncured film. It preferably has a ring structure or an isoborone ring structure, more preferably a cyclohexane ring structure or a tricyclodecane ring structure, and particularly preferably a tricyclodecane ring structure.
  • the photosensitive resin composition according to the present disclosure is a bifunctional ethylenic compound having an aliphatic hydrocarbon ring structure from the viewpoints of moisture permeability and bending resistance of the obtained cured film and adhesiveness of the obtained uncured film. It preferably contains an unsaturated compound and a binder polymer having a structural unit having an aliphatic hydrocarbon ring.
  • the photosensitive resin composition according to the present disclosure may contain one type of bifunctional ethylenically unsaturated compound having an aliphatic hydrocarbon ring structure alone, or may contain two or more types.
  • the content of the bifunctional ethylenically unsaturated compound having an aliphatic hydrocarbon ring structure is a photosensitive resin composition from the viewpoint of the moisture permeability and bending resistance of the obtained cured film and the adhesiveness of the obtained uncured film. It is preferably 1% by mass to 50% by mass, more preferably 5% by mass to 40% by mass, further preferably 10% by mass to 30% by mass, and 15% by mass with respect to the total solid content of the above. It is particularly preferably% to 25% by mass.
  • the ethylenically unsaturated compound preferably contains compound M and a bifunctional ethylenically unsaturated compound having an aliphatic hydrocarbon ring structure.
  • the ethylenically unsaturated compound preferably contains compound M and an ethylenically unsaturated compound having an acid group from the viewpoints of substrate adhesion, development residue inhibitory property, and rust prevention property. It is more preferable to contain M, a bifunctional ethylenically unsaturated compound having an aliphatic hydrocarbon ring structure, and an ethylenically unsaturated compound having an acid group, and compound M, a bifunctional ethylene having an aliphatic hydrocarbon ring structure.
  • compound M is a bifunctional ethylenically unsaturated compound having an aliphatic hydrocarbon ring structure. It is particularly preferable to contain a compound, a trifunctional or higher functional ethylenically unsaturated compound, an ethylenically unsaturated compound having an acid group, and a urethane (meth) acrylate compound.
  • the ethylenically unsaturated compound includes 1,9-nonanediol diacrylate and a polyfunctional ethylenically non-functional compound having a carboxylic acid group from the viewpoints of substrate adhesion, development residue inhibitory property, and rust prevention property. It preferably contains a saturated compound, and preferably contains 1,9-nonanediol diacrylate, tricyclodecanedimethanol diacrylate, and a polyfunctional ethylenically unsaturated compound having a carboxylic acid group, preferably 1,9-nonane.
  • the photosensitive resin composition according to the present disclosure may contain a monofunctional ethylenically unsaturated compound as the ethylenically unsaturated compound.
  • the content of the bifunctional or higher functional ethylenically unsaturated compound in the ethylenically unsaturated compound is 60% by mass to 100% by mass with respect to the total content of all the ethylenically unsaturated compounds contained in the photosensitive resin composition. Is more preferable, 80% by mass to 100% by mass is more preferable, and 90% by mass to 100% by mass is particularly preferable.
  • the molecular weight of the ethylenically unsaturated compound is preferably 200 to 3,000, more preferably 250 to 2,600, further preferably 280 to 2,200, and 300 to 2,200. It is particularly preferable to have.
  • the proportion of the content of the ethylenically unsaturated compound having a molecular weight of 300 or less among the ethylenically unsaturated compounds contained in the photosensitive resin composition according to the present disclosure is all ethylenically unsaturated compounds contained in the photosensitive resin composition. It is preferably 30% by mass or less, more preferably 25% by mass or less, and further preferably 20% by mass or less with respect to the content of the compound.
  • the photosensitive resin composition according to the present disclosure may contain only one type of ethylenically unsaturated compound, or may contain two or more types.
  • the content of the ethylenically unsaturated compound in the photosensitive resin composition according to the present disclosure is preferably 1% by mass to 70% by mass, and 10% by mass to 70% by mass, based on the total solid content of the photosensitive resin composition. It is more preferably mass%, more preferably 20% by mass to 60% by mass, and particularly preferably 20% by mass to 50% by mass.
  • the photosensitive resin composition according to the present disclosure contains a photopolymerization initiator.
  • the photopolymerization initiator is not particularly limited, and a known photopolymerization initiator can be used.
  • Examples of the photopolymerization initiator include a photopolymerization initiator having an oxime ester structure (hereinafter, also referred to as “oxym-based photopolymerization initiator”) and a photopolymerization initiator having an ⁇ -aminoalkylphenone structure (hereinafter, “ ⁇ -”).
  • Photopolymerization initiator hereinafter, also referred to as “acylphosphine oxide-based photopolymerization initiator”
  • photopolymerization initiator having an N-phenylglycine structure hereinafter, “N-phenylglycine-based photopolymerization initiator” Also called.
  • Etc. can be mentioned.
  • the photopolymerization initiator is selected from the group consisting of an oxime-based photopolymerization initiator, an ⁇ -aminoalkylphenone-based photopolymerization initiator, an ⁇ -hydroxyalkylphenone-based polymerization initiator, and an N-phenylglycine-based photopolymerization initiator. It preferably contains at least one, and may include at least one selected from the group consisting of an oxime-based photopolymerization initiator, an ⁇ -aminoalkylphenone-based photopolymerization initiator, and an N-phenylglycine-based photopolymerization initiator. More preferred.
  • photopolymerization initiators in combination, and an oxime-based photopolymerization initiator and ⁇ -aminoalkylphenone-based light. More preferably, it contains a polymerization initiator, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazole-3-yl] etanone-1- (O-acetyloxime) and 2-methyl-1. -(4-Methylthiophenyl) -2-morpholinopropane-1-one is particularly preferably contained.
  • the photopolymerization initiator for example, the polymerization initiators described in paragraphs 0031 to 0042 of JP2011-95716A and paragraphs 0064 to 0081 of JP2015-014783 may be used. ..
  • photopolymerization initiators include 1- [4- (phenylthio) phenyl] -1,2-octanedione-2- (O-benzoyloxime) [trade name: IRGACURE (registered trademark) OXE-01, BASF.
  • the photosensitive resin composition according to the present disclosure may contain only one type of photopolymerization initiator, or may contain two or more types of photopolymerization initiators.
  • the content of the photopolymerization initiator in the photosensitive resin composition according to the present disclosure is not particularly limited, but is preferably 0.1% by mass or more with respect to the total solid content of the photosensitive resin composition. It is more preferably 5% by mass or more, and further preferably 1.0% by mass or more.
  • the content of the photopolymerization initiator in the photosensitive resin composition according to the present disclosure is preferably 10% by mass or less, preferably 5% by mass or less, based on the total solid content of the photosensitive resin composition. Is more preferable.
  • the photosensitive resin composition according to the present disclosure preferably contains a heat-crosslinkable compound from the viewpoint of the strength of the obtained cured film and the adhesiveness of the obtained uncured film.
  • the thermally crosslinkable compound having an ethylenically unsaturated group described later is not treated as an ethylenically unsaturated compound, but is treated as a thermally crosslinkable compound.
  • the heat-crosslinkable compound include epoxy compounds, oxetane compounds, methylol compounds, blocked isocyanate compounds and the like. Of these, a blocked isocyanate compound is preferable from the viewpoint of the strength of the obtained cured film and the adhesiveness of the obtained uncured film.
  • the blocked isocyanate compound reacts with a hydroxy group and a carboxy group, for example, when at least one of the binder polymer and the radically polymerizable compound having an ethylenically unsaturated group has at least one of the hydroxy group and the carboxy group, The hydrophilicity of the formed film tends to decrease, and the function as a protective film tends to be strengthened.
  • the blocked isocyanate compound refers to "a compound having a structure in which the isocyanate group of isocyanate is protected by a blocking agent (so-called mask)".
  • the dissociation temperature of the blocked isocyanate compound is not particularly limited, but is preferably 100 ° C. to 160 ° C., more preferably 130 ° C. to 150 ° C.
  • the dissociation temperature of blocked isocyanate in the present disclosure means "the temperature of the endothermic peak associated with the deprotection reaction of blocked isocyanate when measured by DSC (Differential scanning calorimetry) analysis using a differential scanning calorimeter". ..
  • a differential scanning calorimeter for example, a differential scanning calorimeter (model: DSC6200) manufactured by Seiko Instruments, Inc. can be preferably used. However, the differential scanning calorimeter is not limited to this.
  • the blocking agent having a dissociation temperature of 100 ° C. to 160 ° C. for example, at least one selected from oxime compounds is preferable from the viewpoint of storage stability.
  • the blocked isocyanate compound preferably has an isocyanurate structure, for example, from the viewpoint of improving the brittleness of the membrane and improving the adhesion to the transferred material.
  • the blocked isocyanate compound having an isocyanurate structure can be obtained, for example, by isocyanurate-forming and protecting hexamethylene diisocyanate.
  • a compound having an oxime structure using an oxime compound as a blocking agent is easier to set the dissociation temperature in a preferable range than a compound having no oxime structure, and reduces the development residue. It is preferable from the viewpoint of ease.
  • the blocked isocyanate compound may have a polymerizable group.
  • the polymerizable group is not particularly limited, and a known polymerizable group can be used, and a radical polymerizable group is preferable.
  • examples of the polymerizable group include an ethylenically unsaturated group such as a (meth) acryloxy group, a (meth) acrylamide group and a styryl group, and a group having an epoxy group such as a glycidyl group.
  • an ethylenically unsaturated group is preferable, a (meth) acryloxy group is more preferable, and an acryloxy group is particularly preferable, from the viewpoint of surface surface condition, development speed and reactivity of the obtained cured film. preferable.
  • blocked isocyanate compound a commercially available product can be used.
  • examples of commercially available blocked isocyanate compounds include Karenz (registered trademark) AOI-BM, Karenz (registered trademark) MOI-BM, Karenz (registered trademark) MOI-BP (all manufactured by Showa Denko KK), and block.
  • Examples include the Duranate series of types (for example, Duranate (registered trademark) TPA-B80E, Duranate (registered trademark) WT32-B75P, etc., manufactured by Asahi Kasei Chemicals Co., Ltd.).
  • the photosensitive resin composition according to the present disclosure may contain only one type of heat-crosslinkable compound, or may contain two or more types.
  • the content of the heat-crosslinkable compound may be 1% by mass to 50% by mass with respect to the total solid content of the photosensitive resin composition. It is preferably 5% by mass to 30% by mass, more preferably.
  • the photosensitive resin composition according to the present disclosure preferably contains an aliphatic thiol compound other than the above compound A.
  • the photosensitive resin composition according to the present disclosure contains an aliphatic thiol compound
  • the aliphatic thiol compound undergoes an en-thiol reaction to suppress curing shrinkage of the formed film and relieve stress.
  • the adhesion of the cured film to the substrate tends to be improved.
  • the photosensitive resin composition contains an aliphatic thiol compound
  • the metal (particularly copper) is more easily corroded.
  • the photosensitive resin composition according to the present disclosure has an advantage that a cured film having excellent corrosion inhibitory properties of a metal (particularly copper) can be formed even when it contains an aliphatic thiol compound.
  • aliphatic thiol compound a monofunctional aliphatic thiol compound or a polyfunctional aliphatic thiol compound (that is, a bifunctional or higher functional aliphatic thiol compound) is preferably used.
  • the aliphatic thiol compound for example, it is preferable to include a polyfunctional aliphatic thiol compound from the viewpoint of adhesion of the formed cured film to the substrate (particularly, adhesion after exposure). More preferably, it is a functional aliphatic thiol compound.
  • the "polyfunctional aliphatic thiol compound” means an aliphatic compound having two or more thiol groups (also referred to as "mercapto groups") in the molecule.
  • the polyfunctional aliphatic thiol compound is preferably a low molecular weight compound having a molecular weight of 100 or more. Specifically, the molecular weight of the polyfunctional aliphatic thiol compound is more preferably 100 to 1,500, and even more preferably 150 to 1,000.
  • the number of functional groups of the polyfunctional aliphatic thiol compound is preferably bifunctional to 10-functional, and more preferably bifunctional to 8-functional, for example, from the viewpoint of adhesion of the formed cured film to the substrate. It is more preferably bifunctional to hexafunctional.
  • Polyfunctional aliphatic thiol compounds include trimethylolpropanthris (3-mercaptobutylate), 1,4-bis (3-mercaptobutylyloxy) butane, pentaerythritol tetrakis (3-mercaptobutyrate), and trimethylol.
  • the polyfunctional aliphatic thiol compound at least one selected from the group consisting of trimethylolpropane tris (3-mercaptobutyrate) and 1,4-bis (3-mercaptobutylyloxy) butane. Seeds are preferred.
  • Examples of the monofunctional aliphatic thiol compound include 1-octanethiol, 1-dodecanethiol, ⁇ -mercaptopropionic acid, methyl-3-mercaptopropionate, 2-ethylhexyl-3-mercaptopropionate, and n-octyl-. Examples thereof include 3-mercaptopropionate, methoxybutyl-3-mercaptopropionate, stearyl-3-mercaptopropionate and the like.
  • the photosensitive resin composition according to the present disclosure may contain only one type of aliphatic thiol compound, or may contain two or more types.
  • the content of the aliphatic thiol compound is preferably 5% by mass or more based on the total solid content of the photosensitive resin composition. It is more preferably from mass% to 50% by mass, further preferably from 5% by mass to 30% by mass, and particularly preferably from 8% by mass to 20% by mass.
  • the adhesion to the substrate is excellent. It tends to form a cured film.
  • the photosensitive resin composition according to the present disclosure may contain a surfactant.
  • the surfactant is not particularly limited, and a known surfactant can be used. Examples of the surfactant include the surfactants described in paragraphs 0017 of Japanese Patent No. 4502784 and paragraphs 0060 to 0071 of JP2009-237362A.
  • a fluorine-based surfactant or a silicon-based surfactant (also referred to as "silicone-based surfactant”) is preferable.
  • Commercially available products of fluorine-based surfactants include, for example, Megafuck F-171, F-172, F-173, F-176, F-177, F-141, F-142, F-143, F-144.
  • fluorine-based surfactants also have an acrylic compound that has a molecular structure having a functional group containing a fluorine atom, and when heat is applied, the portion of the functional group containing a fluorine atom is cut off and the fluorine atom volatilizes.
  • fluorine-based surfactants include the Megafuck DS series manufactured by DIC Corporation (The Chemical Daily (February 22, 2016), Nikkei Sangyo Shimbun (February 23, 2016)), for example, Megafuck. DS-21 can be mentioned.
  • the fluorine-based surfactant it is also preferable to use a polymer of a fluorine atom-containing vinyl ether compound having a fluorinated alkyl group or a fluorinated alkylene ether group and a hydrophilic vinyl ether compound.
  • a block polymer can also be used.
  • the fluorine-based surfactant has a repeating unit derived from a (meth) acrylate compound having a fluorine atom and 2 or more (preferably 5 or more) alkyleneoxy groups (preferably ethyleneoxy groups and propyleneoxy groups) (meth).
  • a fluorine-containing polymer compound containing a repeating unit derived from an acrylate compound can also be preferably used.
  • a fluorine-based surfactant a fluorine-containing polymer having an ethylenically unsaturated bond-containing group in the side chain can also be used. Megafvck RS-101, RS-102, RS-718K, RS-72-K (all manufactured by DIC Corporation) and the like can be mentioned.
  • Nonionic surfactants include glycerol, trimethylolpropane, trimethylolethane and their ethoxylates and propoxylates (eg, glycerol propoxylate, glycerol ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, etc.
  • Polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester, Pluronic L10, L31, L61, L62, 10R5, 17R2, 25R2 (or more) , BASF), Tetronic 304, 701, 704, 901, 904, 150R1 (above, BASF), Solsparse 20000 (above, Nippon Lubrizol Co., Ltd.), NCW-101, NCW-1001, NCW -1002 (above, manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.), Pionin D-6112, D-6112-W, D-6315 (above, manufactured by Takemoto Yushi Co., Ltd.), Orphine E1010, Surfinol 104, 400, 440 (above, manufactured by Nissin Chemical Industry Co., Ltd.) and the like can
  • silicon-based surfactants examples include linear polymers composed of siloxane bonds and modified siloxane polymers in which organic groups are introduced into the side chains and terminals.
  • Specific examples of the surfactant include DOWNSIL 8032 ADDITIVE, Torre Silicone DC3PA, Torre Silicone SH7PA, Torre Silicone DC11PA, Torre Silicone SH21PA, Torre Silicone SH28PA, Torre Silicone SH29PA, Torre Silicone SH30PA, Torre Silicone SH8400 (above, Toray Dow).
  • the photosensitive resin composition according to the present disclosure may contain only one type of surfactant, or may contain two or more types of surfactants.
  • the content of the surfactant is 0.01% by mass to 3.0% by mass with respect to the total solid content of the photosensitive resin composition. It is more preferable, it is more preferably 0.05% by mass to 1% by mass, and further preferably 0.1% by mass to 0.8% by mass.
  • the photosensitive resin composition according to the present disclosure preferably contains a hydrogen donating compound.
  • the hydrogen donating compound has actions such as further improving the sensitivity of the photopolymerization initiator to active light and suppressing the polymerization inhibition of the polymerizable compound by oxygen.
  • the hydrogen donating compound include amines, for example, M.I. R. "Journal of Polymer Society” by Sander et al., Vol. 10, p. 3173 (1972), JP-A-44-20189, JP-A-51-82102, JP-A-52-134692, JP-A-59-138205.
  • Examples thereof include compounds described in Japanese Patent Application Laid-Open No. 60-84305, Japanese Patent Application Laid-Open No. 62-18537, Japanese Patent Application Laid-Open No. 64-33104, Research Disclosure No. 33825, and the like.
  • Specific examples of the hydrogen donating compound include triethanolamine, p-dimethylaminobenzoic acid ethyl ester, p-formyldimethylaniline, p-methylthiodimethylaniline and the like.
  • Examples of the hydrogen donating compound include an amino acid compound (N-phenylglycine, etc.), an organometallic compound (tributyltin acetate, etc.) described in Japanese Patent Publication No. 48-42965, and hydrogen described in Japanese Patent Publication No. 55-344414. Donors, sulfur compounds (Tritian, etc.) described in JP-A-6-308727, and the like can also be mentioned.
  • the photosensitive resin composition according to the present disclosure may contain only one type of hydrogen donating compound, or may contain two or more types.
  • the content of the hydrogen donating compound is determined from the viewpoint of improving the curing rate by, for example, the balance between the polymerization growth rate and the chain transfer. It is preferably 0.01% by mass to 10% by mass, more preferably 0.03% by mass to 5% by mass, and 0.05% by mass to 3% by mass with respect to the total solid content of the composition. It is more preferable to have.
  • the photosensitive resin composition according to the present disclosure preferably contains a solvent.
  • the photosensitive resin composition according to the present disclosure contains a solvent, the formation of a photosensitive layer by coating tends to be easier.
  • the solvent a commonly used solvent can be used without particular limitation.
  • an organic solvent is preferable.
  • the organic solvent include methyl ethyl ketone, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate (also known as 1-methoxy-2-propyl acetate), diethylene glycol ethyl methyl ether, cyclohexanone, methyl isobutyl ketone, ethyl lactate, methyl lactate, caprolactam, n. -Propanol, 2-propanol and the like can be mentioned.
  • a mixed solvent of methyl ethyl ketone and propylene glycol monomethyl ether acetate or a mixed solvent of diethylene glycol ethyl methyl ether and propylene glycol monomethyl ether acetate is preferable.
  • solvent Solvent described in paragraphs 0054 and 0055 of US Patent Application Publication No. 2005/282073 can also be used, the contents of which are incorporated herein by reference. Further, as the solvent, an organic solvent (high boiling point solvent) having a boiling point of 180 ° C. to 250 ° C. can be used, if necessary.
  • organic solvent high boiling point solvent
  • the photosensitive resin composition according to the present disclosure may contain only one type of solvent, or may contain two or more types of solvent.
  • the solid content of the photosensitive resin composition according to the present disclosure shall be 5% by mass to 80% by mass with respect to the total mass of the photosensitive resin composition. Is preferable, 5% by mass to 40% by mass is more preferable, and 5% by mass to 30% by mass is particularly preferable.
  • the viscosity of the photosensitive resin composition at 25 ° C. is preferably 1 mPa ⁇ s to 50 mPa ⁇ s, for example, from the viewpoint of coatability. It is more preferably s to 40 mPa ⁇ s, and even more preferably 3 mPa ⁇ s to 30 mPa ⁇ s. Viscosity is measured using a viscometer.
  • a viscometer (trade name: VISCOMETER TV-22) manufactured by Toki Sangyo Co., Ltd. can be preferably used. However, the viscometer is not limited to this.
  • the surface tension of the photosensitive resin composition at 25 ° C. is preferably 5 mN / m to 100 mN / m, for example, from the viewpoint of coatability, and is preferably 10 mN. It is more preferably / m to 80 mN / m, and further preferably 15 mN / m to 40 mN / m.
  • Surface tension is measured using a surface tension meter.
  • a surface tension meter (trade name: Automatic Surface Tensiometer CBVP-Z) manufactured by Kyowa Interface Science Co., Ltd. can be preferably used.
  • the surface tension meter is not limited thereto.
  • the photosensitive resin composition according to the present disclosure may contain components (so-called other components) other than the components described above.
  • other components include particles (for example, metal oxide particles), a colorant, and the like.
  • examples of other components include the thermal polymerization inhibitor described in paragraph 0018 of Japanese Patent No. 4502784, and other additives described in paragraphs 0058 to 0071 of Japanese Patent Application Laid-Open No. 2000-310706.
  • the photosensitive resin composition according to the present disclosure may contain particles (for example, metal oxide particles; hereinafter the same) for the purpose of adjusting the refractive index, light transmission and the like.
  • the metal in the metal oxide particles also includes metalloids such as B, Si, Ge, As, Sb, and Te.
  • the average primary particle size of the particles is, for example, preferably 1 nm to 200 nm, more preferably 3 nm to 80 nm, from the viewpoint of transparency of the cured film.
  • the average primary particle size of the particles is calculated by measuring the particle size of 200 arbitrary particles using an electron microscope and arithmetically averaging the measurement results. When the shape of the particle is not spherical, the longest side is the particle diameter.
  • the photosensitive resin composition according to the present disclosure may contain only one type of particles having different metal species, sizes, etc., or may contain two or more types of particles.
  • the photosensitive resin composition according to the present disclosure preferably does not contain particles, or the content of the particles is more than 0% by mass and 35% by mass or less with respect to the total solid content of the photosensitive resin composition.
  • Particles are not contained, or the content of particles is more preferably more than 0% by mass and 10% by mass or less with respect to the total solid content of the photosensitive resin composition, and it is not contained or contains particles.
  • the content of the particles is more than 0% by mass and 5% by mass or less with respect to the total solid content of the photosensitive resin composition, and either the particles are not contained or the content of the particles is the photosensitive resin composition. It is more preferably more than 0% by mass and 1% by mass or less with respect to the total solid content of the substance, and it is particularly preferable that it does not contain particles.
  • the photosensitive resin composition according to the present disclosure may contain a trace amount of a colorant (pigment, dye, etc.), but for example, from the viewpoint of transparency, it is preferable that the photosensitive resin composition contains substantially no colorant.
  • the content of the colorant is preferably less than 1% by mass, more preferably less than 0.1% by mass, based on the total solid content of the photosensitive resin composition. preferable.
  • the application of the photosensitive resin composition according to the present disclosure is not particularly limited, but it can be suitably used as a photosensitive resin composition for a touch panel because the obtained cured film has low moisture permeability and excellent bending resistance. , It can be more preferably used as a photosensitive resin composition for forming a protective film in a touch panel, and can be particularly preferably used as a photosensitive resin composition for forming an electrode protective film in a touch panel.
  • the cured film according to the present disclosure is a film obtained by curing the photosensitive resin composition according to the present disclosure.
  • the cured film according to the present disclosure is a cured film obtained by curing the solid content of the photosensitive resin composition according to the present disclosure.
  • a known method such as heat-drying, air-drying, vacuum-drying or the like is performed after the photosensitive resin composition according to the present disclosure is applied to a substrate in a film form. It is preferable to remove at least a part of the solvent and then perform curing to form a cured film. Further, the cured film may have a desired pattern shape.
  • the cured film according to the present disclosure can be suitably used as an interlayer insulating film (so-called insulating film), an overcoat film (so-called protective film), and the like. Further, since the cured film according to the present disclosure has excellent film physical characteristics, it is suitably used for an organic EL display device, a liquid crystal display device, and the like. Further, the cured film according to the present disclosure can be suitably used as a protective film for a touch panel, and can be particularly preferably used as an electrode protective film for a touch panel.
  • the thickness of the cured film according to the present disclosure is not particularly limited, but is preferably 1 ⁇ m to 20 ⁇ m, more preferably 2 ⁇ m to 15 ⁇ m, and even more preferably 3 ⁇ m to 12 ⁇ m.
  • the transfer film according to the present disclosure has a temporary support and a photosensitive layer containing at least the solid content of the photosensitive resin composition according to the present disclosure, and the temporary support and the photosensitive resin composition according to the present disclosure. It is preferable to have a photosensitive layer made of a material or obtained by drying the photosensitive resin composition.
  • the transfer film according to the present disclosure has a temporary support.
  • the temporary support is preferably a film, more preferably a resin film.
  • a film that is flexible and does not cause significant deformation, shrinkage, or elongation under pressure, or under pressure and heating can be used.
  • Examples of such a film include a polyethylene terephthalate film (for example, a biaxially stretched polyethylene terephthalate film), a cellulose triacetate film, a polystyrene film, a polyimide film, and a polycarbonate film.
  • a biaxially stretched polyethylene terephthalate film is particularly preferable as the temporary support.
  • the film used as the temporary support has no deformation such as wrinkles or scratches.
  • the temporary support is preferably highly transparent, and the transmittance at 365 nm is preferably 60% or more, more preferably 70% or more.
  • the haze of the temporary support is small. Specifically, the haze value of the temporary support is preferably 2% or less, more preferably 0.5% or less, and particularly preferably 0.1% or less.
  • the number of fine particles, foreign substances, and defects contained in the temporary support is small.
  • the number of the above fine particles and foreign matter and defect diameter 1 ⁇ m is preferably 50/10 mm 2 or less, more preferably 10/10 mm 2 or less, further preferably 3/10 mm 2 or less , 0 pieces / 10 mm 2 is particularly preferable.
  • a layer (lubricant layer) containing fine particles may be provided on the surface of the temporary support in order to further improve the handleability.
  • the lubricant layer may be provided on one side of the temporary support or on both sides.
  • the diameter of the particles contained in the lubricant layer can be 0.05 ⁇ m to 0.8 ⁇ m.
  • the film thickness of the lubricant layer can be 0.05 ⁇ m to 1.0 ⁇ m.
  • the thickness of the temporary support is not particularly limited, but is preferably 5 ⁇ m to 200 ⁇ m, more preferably 10 ⁇ m to 150 ⁇ m, and further preferably 10 to 50 ⁇ m from the viewpoint of ease of handling and versatility. preferable.
  • Examples of the temporary support include a biaxially stretched polyethylene terephthalate film having a film thickness of 16 ⁇ m, a biaxially stretched polyethylene terephthalate film having a film thickness of 12 ⁇ m, and a biaxially stretched polyethylene terephthalate film having a film thickness of 9 ⁇ m.
  • Preferred embodiments of the provisional support include, for example, paragraphs 0017 to 0018 of JP2014-85643, paragraphs 0019 to 0026 of JP2016-27363, and paragraphs 0041 to 0057 of International Publication No. 2012/081680. It is described in paragraphs 0029-0040 of WO 2018/179370, and the contents of these publications are incorporated herein by reference.
  • the temporary support is, for example, Toray Industries, Inc.'s Lumirer (registered trademark) 16FB40, Toray Industries, Inc.'s Lumirer (registered trademark) 16QS62 (16KS40), Cosmoshine (registered trademark) A4100, Cosmoshine (registered).
  • A4300 trademark
  • A8300 registered trademark
  • A8300 all manufactured by Toray Industries, Inc.
  • a biaxially stretched polyethylene terephthalate film having a thickness of 16 ⁇ m a biaxially stretched polyethylene terephthalate film having a thickness of 12 ⁇ m
  • a biaxially stretched polyethylene terephthalate film having a thickness of 10 ⁇ m can be mentioned. it can.
  • the transfer film according to the present disclosure has a photosensitive layer containing at least the solid content of the photosensitive resin composition according to the present disclosure, and is composed of the photosensitive resin composition according to the present disclosure or the above-mentioned photosensitive resin composition is dried. It is preferable to have a photosensitive layer made of plastic.
  • the photosensitive resin composition according to the present disclosure contains a solvent, it is preferable to remove at least a part of the solvent by a known method to form a photosensitive layer.
  • the solvent does not have to be completely removed.
  • the content of the solvent in the photosensitive layer is preferably 5% by mass or less, more preferably 1% by mass or less, and 0.5% by mass or less, based on the total mass of the photosensitive layer. Is particularly preferred.
  • the thickness of the photosensitive layer is not particularly limited, but is preferably 20 ⁇ m or less, more preferably 15 ⁇ m or less, and further preferably 12 ⁇ m or less. When the thickness of the photosensitive layer is 20 ⁇ m or less, the entire transfer film is thinned, the transmittance of the photosensitive layer or the obtained cured film is improved, and the yellow coloring of the photosensitive layer or the obtained cured film is suppressed. Is advantageous.
  • the thickness of the photosensitive layer is preferably 1 ⁇ m or more, more preferably 2 ⁇ m or more, and particularly preferably 3 ⁇ m or more, for example, from the viewpoint of manufacturing suitability.
  • the thickness of the photosensitive layer is calculated as an average value of 5 arbitrary points measured by cross-sectional observation with a scanning electron microscope (SEM).
  • the refractive index of the photosensitive layer is not particularly limited, but is preferably 1.47 to 1.56, more preferably 1.50 to 1.53, and more preferably 1.50 to 1.52. Is more preferable, and 1.51 to 1.52 is particularly preferable.
  • the method for forming the photosensitive layer is not particularly limited, and a known method can be used.
  • An example of a method for forming a photosensitive layer is a method in which a photosensitive resin composition containing a solvent is applied onto a temporary support and, if necessary, dried to form the photosensitive layer.
  • a known method can be used as the coating method.
  • the coating method include a printing method, a spray method, a roll coating method, a bar coating method, a curtain coating method, a spin coating method, a die coating method (that is, a slit coating method) and the like.
  • the die coating method is preferable as the coating method.
  • a drying method known methods such as natural drying, heat drying, and vacuum drying can be used, and these methods can be applied alone or in combination of two or more. In the present disclosure, "drying" means removing at least a portion of the solvent contained in the composition.
  • the transfer film according to the present disclosure may further include a second resin layer on the side opposite to the side where the temporary support exists when viewed from the photosensitive layer.
  • a second resin layer a refractive index adjusting layer is preferably mentioned.
  • the second resin layer may contain compound A.
  • the preferred embodiment and the preferred content of the compound A are the same as those in the preferred embodiment of the photosensitive layer.
  • the second resin layer is preferably arranged adjacent to the photosensitive layer.
  • the refractive index of the second resin layer is preferably higher than that of the photosensitive layer from the viewpoint of suppressing the visibility of wiring.
  • the refractive index of the second resin layer is preferably 1.50 or more, more preferably 1.55 or more, further preferably 1.60 or more, and preferably 1.70 or more. Especially preferable.
  • the upper limit of the refractive index of the second resin layer is not particularly limited, but is preferably 2.10 or less, more preferably 1.85 or less, and further preferably 1.78 or less. It is particularly preferably .74 or less.
  • the second resin layer may have photocurability (that is, photosensitive), may have thermosetting property, or may have both photocurability and thermosetting property. However, from the viewpoint of forming a cured film having excellent strength, the second resin layer preferably has photocurability.
  • the second resin layer preferably has alkali solubility (for example, solubility in a weak alkaline aqueous solution).
  • the thickness of the second resin layer is not particularly limited.
  • the thickness of the second resin layer is preferably 50 nm or more and 500 nm or less, more preferably 55 nm or more and 110 nm or less, and further preferably 60 nm or more and 100 nm or less.
  • the thickness of the second resin layer is calculated as an average value of any five points measured by cross-sectional observation with a scanning electron microscope (SEM).
  • the method of controlling the refractive index of the second resin layer is not particularly limited, and for example, a method of using a resin having a predetermined refractive index alone, a method of using a resin and metal oxide particles or metal particles, and a metal salt. Examples thereof include a method using a composite with a resin.
  • the type of the metal oxide particles is not particularly limited, and known metal oxide particles can be used.
  • the metal in the metal oxide particles also includes metalloids such as B, Si, Ge, As, Sb, and Te.
  • the average primary particle diameter of the particles is preferably 1 nm to 200 nm, more preferably 3 nm to 80 nm, from the viewpoint of transparency.
  • the average primary particle size of the particles is calculated by measuring the particle size of 200 arbitrary particles using an electron microscope and arithmetically averaging the measurement results. When the shape of the particle is not spherical, the longest side is the particle diameter.
  • the metal oxide particles are specifically selected from the group consisting of zirconium oxide particles (ZrO 2 particles), Nb 2 O 5 particles, titanium oxide particles (TiO 2 particles), and silicon dioxide particles (SiO 2 particles). At least one of these and composite particles thereof are preferable.
  • the metal oxide particles for example, at least one selected from the group consisting of zirconium oxide particles and titanium oxide particles from the viewpoint that the refractive index of the second resin layer can be easily adjusted to 1.6 or more. Is more preferable.
  • metal oxide particles include calcined zirconium oxide particles (manufactured by CIK Nanotech Co., Ltd., product name: ZRPGM15WT% -F04), calcined zirconium oxide particles (manufactured by CIK Nanotech Co., Ltd., product name: ZRPGM15WT% -F74).
  • Fired zirconium oxide particles (manufactured by CIK Nanotech Co., Ltd., product name: ZRPGM15WT% -F75), calcined zirconium oxide particles (manufactured by CIK Nanotech Co., Ltd., product name: ZRPGM15WT% -F76), zirconium oxide particles (Nano Teen OZ-S30M, Nissan) Zirconium oxide particles (manufactured by Nanouse OZ-S30K, manufactured by Nissan Chemical Industry Co., Ltd.) can be mentioned.
  • the second resin layer may contain only one type of metal oxide particles, or may contain two or more types of metal oxide particles.
  • the content of the metal oxide particles improves the concealing property of the concealed object such as the electrode pattern, and the visibility of the concealed object can be effectively improved. It is preferably 1% by mass to 95% by mass, more preferably 20% by mass to 90% by mass, and further preferably 40% by mass to 85% by mass with respect to the mass.
  • the content of the titanium oxide particles is preferably 1% by mass to 95% by mass, preferably 20% by mass to 90% by mass, based on the total mass of the second resin layer. Is more preferable, and 40% by mass to 85% by mass is further preferable.
  • the second resin layer preferably contains a binder polymer and an ethylenically unsaturated compound.
  • the components of the second resin layer described in paragraphs 0019 to 0040 and 0144 to 0150 of JP-A-2014-108541, paragraphs of JP-A-2014-10814. You can refer to the components of the transparent layer described in 0024 to 0035 and 0110 to 0112, the components of the composition having an ammonium salt, and the like described in paragraphs 0034 to 0056 of International Publication No. 2016/099980. ..
  • the binder polymer contained in the second resin layer the same binder polymer as that contained in the photosensitive layer can be used, and the preferred range is also the same.
  • the ethylenically unsaturated compound contained in the second resin layer a compound similar to the radically polymerizable compound having an ethylenically unsaturated group contained in the photosensitive layer can be used, and the preferred range is also the same. ..
  • the second resin layer may contain a metal oxidation inhibitor other than compound A from the viewpoint of the oxidation inhibitory property of the metal in contact with the second resin layer.
  • a metal oxidation inhibitor other than the compound A for example, a compound having an aromatic ring containing a nitrogen atom in the molecule is preferably mentioned.
  • metal oxidation inhibitors other than compound A include imidazole, triazole, benzimidazole, tetrazole, mercaptothiadiazole, benzotriazole, purine and the like.
  • the second resin layer preferably contains adenine as the compound A from the viewpoint of suppressing the oxidation of the metal in contact with the second resin layer.
  • the second resin layer may contain an amine compound having a chain group having 3 or more atoms from the viewpoint of manufacturing suitability.
  • examples of the amine compound having a chain group having 3 or more atoms include (3- (diethylamino) -1,2-propanediol and N-methyldiethanolamine.
  • the second resin layer may contain other components other than the above-mentioned components. Examples of other components that can be contained in the second resin layer include the same components as those contained in the photosensitive layer described above.
  • the second resin layer preferably contains a surfactant as another component.
  • the method for forming the second resin layer is not particularly limited.
  • the composition for forming the second resin layer in the embodiment containing an aqueous solvent is applied onto the above-mentioned photosensitive layer formed on the temporary support, and is required.
  • a method of forming the second resin layer by drying accordingly can be mentioned.
  • Specific examples of the coating and drying methods in the second resin layer forming method are the same as the specific examples of coating and drying in the photosensitive layer forming method, respectively.
  • the transfer film according to the present disclosure may further have a protective film on the side opposite to the temporary support when viewed from the photosensitive layer.
  • the protective film is opposite to the temporary support when viewed from the second resin layer. It is preferable to have it on the side.
  • the protective film is preferably the outermost layer on the surface opposite to the temporary support in the transfer film according to the present disclosure. Examples of the protective film include polyethylene terephthalate film, polypropylene film, polyethylene film, polystyrene film, polycarbonate film and the like.
  • the films described in paragraphs 0083 to 0087 and 093 of JP-A-2006-259138 may be used.
  • the protective film is, for example, Alfan (registered trademark) FG-201 manufactured by Oji F-Tex Co., Ltd., Alfan (registered trademark) E-201F manufactured by Oji F-Tex Co., Ltd., and Toray Film Processing Co., Ltd. It can also be obtained as Therapy (registered trademark) 25WZ or Lumirror (registered trademark) 16QS62 (16KS40) manufactured by Toray Industries, Inc.
  • the protective film preferably contains 5 fish eyes / m 2 or less having a diameter of 80 ⁇ m or more.
  • fisheye means that when a film is produced by heat-melting a material, kneading, extruding, biaxial stretching, casting method, etc., foreign substances, undissolved substances, oxidative deterioration substances, etc. of the material are contained in the film. It was taken in.
  • the number of diameter 3 ⁇ m or more of the particles contained in the protective film is 30 / mm 2 or less, more preferably 10 pieces / mm 2 or less, and more preferably 5 / mm 2 or less ..
  • the number of diameter 3 ⁇ m or more of the particles contained in the protective film is 30 / mm 2 or less, more preferably 10 pieces / mm 2 or less, and more preferably 5 / mm 2 or less .
  • the protective film preferably has an arithmetic average roughness Ra of 0.01 ⁇ m or more, preferably 0.02 ⁇ m or more, on the surface opposite to the surface in contact with the photosensitive layer. More preferably, it is more preferably 0.03 ⁇ m or more.
  • Ra is preferably less than 0.50 ⁇ m, more preferably 0.40 ⁇ m or less, and even more preferably 0.30 ⁇ m or less.
  • the protective film preferably has a surface roughness Ra of the surface in contact with the photosensitive layer of 0.01 ⁇ m or more, more preferably 0.02 ⁇ m or more, and more preferably 0.03 ⁇ m.
  • the above is more preferable.
  • it is preferably less than 0.50 ⁇ m, more preferably 0.40 ⁇ m or less, and further preferably 0.30 ⁇ m or less.
  • the transfer film according to the present disclosure may further have a thermoplastic resin layer between the temporary support and the photosensitive layer.
  • a thermoplastic resin layer when the transfer film further has a thermoplastic resin layer, when the transfer film is transferred to a substrate to form a laminate, bubbles due to the lamination are less likely to be generated.
  • image unevenness and the like are less likely to occur, and excellent display characteristics can be obtained.
  • the thermoplastic resin layer preferably has alkali solubility.
  • the thermoplastic resin layer functions as a cushioning material that absorbs irregularities on the surface of the substrate during transfer. The irregularities on the surface of the substrate include images, electrodes, wiring, and the like that have already been formed.
  • the thermoplastic resin layer preferably has a property of being deformable according to the unevenness.
  • the thermoplastic resin layer preferably contains the organic polymer substance described in JP-A-5-72724, and the polymer softening point according to the Vicat method (specifically, the American material test method ASTMD 1235). It is more preferable to contain an organic polymer substance having a softening point of about 80 ° C. or lower according to the measurement method).
  • the thickness of the thermoplastic resin layer is, for example, preferably 3 ⁇ m to 30 ⁇ m, more preferably 4 ⁇ m to 25 ⁇ m, and even more preferably 5 ⁇ m to 20 ⁇ m.
  • the thickness of the thermoplastic resin layer is 3 ⁇ m or more, the followability to the unevenness of the substrate surface is further improved, so that the unevenness of the substrate surface can be absorbed more effectively.
  • the thickness of the thermoplastic resin layer is 30 ⁇ m or less, the manufacturing aptitude is further improved. The load is further reduced, and the development time of the thermoplastic resin layer after transfer is further shortened.
  • the thickness of the thermoplastic resin layer is calculated as an average value of 5 arbitrary points measured by cross-sectional observation with a scanning electron microscope (SEM).
  • the thermoplastic resin layer can be formed by applying a composition for forming a thermoplastic resin layer containing a solvent and a thermoplastic organic polymer to a temporary support and, if necessary, drying it.
  • Specific examples of the coating and drying methods in the method for forming the thermoplastic resin layer are the same as the specific examples of coating and drying in the method for forming the photosensitive layer, respectively.
  • the solvent is not particularly limited as long as it dissolves the polymer component forming the thermoplastic resin layer.
  • the solvent include organic solvents (for example, methyl ethyl ketone, cyclohexanone, propylene glycol monomethyl ether acetate, n-propanol, and 2-propanol).
  • the thermoplastic resin layer preferably has a viscosity measured at 100 ° C. of 1,000 Pa ⁇ s to 10,000 Pa ⁇ s. Further, it is preferable that the viscosity of the thermoplastic resin layer measured at 100 ° C. is lower than the viscosity of the photosensitive layer measured at 100 ° C.
  • the transfer film according to the present disclosure may further have an intermediate layer between the temporary support and the photosensitive layer.
  • the intermediate layer is preferably arranged between the thermoplastic resin layer and the photosensitive layer.
  • the component contained in the intermediate layer include at least one polymer selected from the group consisting of polyvinyl alcohol, polyvinylpyrrolidone and cellulose.
  • a layer described as a "separation layer" in JP-A-5-72724 can also be used as the intermediate layer.
  • the intermediate layer is, for example, a solvent that does not dissolve the thermoplastic resin layer.
  • it can be formed by applying an intermediate layer forming composition containing the above polymer as a component of the intermediate layer and drying it if necessary. Specifically, first, the composition for forming a thermoplastic resin layer is applied onto the temporary support and, if necessary, dried to form the thermoplastic resin layer. Next, the composition for forming an intermediate layer is applied onto the formed thermoplastic resin layer and dried if necessary to form an intermediate layer.
  • a photosensitive resin composition containing an organic solvent (so-called a composition for forming a photosensitive layer) is applied onto the formed intermediate layer and dried to form a photosensitive layer.
  • the organic solvent contained in the composition for forming a photosensitive layer is preferably an organic solvent that does not dissolve the intermediate layer.
  • Specific examples of the coating and drying methods in the method for forming the intermediate layer are the same as the specific examples of the coating and drying in the method for forming the photosensitive layer, respectively.
  • the content of impurities in the photosensitive layer and the second resin layer is small from the viewpoint of improving reliability and patterning property.
  • impurities include sodium, potassium, magnesium, calcium, iron, manganese, copper, aluminum, titanium, chromium, cobalt, nickel, zinc, tin, these ions, and halide ions (chloride ions, Bromide ion, iodide ion, etc.) and the like.
  • sodium ions, potassium ions, and chloride ions are easily mixed as impurities, so it is particularly preferable to set the content below.
  • the content of impurities in each layer is preferably 1,000 ppm or less, preferably 200 ppm or less, on a mass basis. Is more preferable, 40 ppm or less is further preferable, 10 ppm or less is particularly preferable, and 5 ppm or less is most preferable.
  • the lower limit is not particularly defined, it can be set to 10 ppb or more and 100 ppb or more on a mass basis from the viewpoint of the limit that can be reduced realistically and the measurement limit. Examples of the method for reducing impurities to the above range include selecting a raw material of each layer that does not contain impurities, preventing impurities from being mixed during layer formation, and cleaning and removing impurities.
  • Impurities can be quantified by known methods such as ICP (Inductively Coupled Plasma) emission spectroscopy, atomic absorption spectroscopy, and ion chromatography.
  • ICP Inductively Coupled Plasma
  • the content of compounds such as benzene, formaldehyde, trichlorethylene, 1,3-butadiene, carbon tetrachloride, chloroform, N, N-dimethylformamide, N, N-dimethylacetamide and hexane is low in each layer.
  • the content of these compounds in each layer is preferably 1,000 ppm or less, more preferably 200 ppm or less, further preferably 40 ppm or less, particularly preferably 10 ppm or less, and most preferably 5 ppm or less on a mass basis.
  • the lower limit is not particularly defined, it can be set to 10 ppb or more and 100 ppb or more on a mass basis from the viewpoint of the limit that can be reduced realistically and the measurement limit.
  • the content of impurities in the compound can be suppressed in the same manner as the above-mentioned impurities in the metal. Moreover, it can be quantified by a known measurement method.
  • the water content of the photosensitive layer and the second resin layer is determined by the photosensitive layer or the second resin. 0.01% by mass or more and 1.0% by mass or less is preferable, and 0.1% by mass or more and 0.5% by mass or less is more preferable with respect to the total mass of the layer.
  • the photosensitive layer and the second resin layer are preferably achromatic.
  • the total reflection incident angle 8 °, light source: D-65 (2 ° field of view)
  • the a * value is preferably ⁇ 1.0 to 1.0
  • the b * value is preferably ⁇ 1.0 to 1.0.
  • FIG. 1 is a schematic cross-sectional view of a transfer film 10 which is a specific example of the transfer film according to the present disclosure.
  • the transfer film 10 has a laminated structure of a protective film 16 / second resin layer 20A / photosensitive layer 18A / temporary support 12 (that is, the temporary support 12, the photosensitive layer 18A, and the like. It has a laminated structure in which the second resin layer 20A and the protective film 16 are arranged in this order).
  • the transfer film according to the present disclosure is not limited to the transfer film 10, and for example, the second resin layer 20A and the protective film 16 may be omitted. Further, at least one of the above-mentioned thermoplastic resin layer and intermediate layer may be provided between the temporary support 12 and the photosensitive layer 18A.
  • the second resin layer 20A is a layer arranged on the side opposite to the side where the temporary support 12 exists as viewed from the photosensitive layer 18A, and has a refractive index of 1.50 or more at a wavelength of 550 nm.
  • the transfer film 10 is a negative type material (so-called negative type film).
  • the method for producing the transfer film 10 is not particularly limited.
  • the method for producing the transfer film 10 includes, for example, a step of forming a photosensitive layer 18A on the temporary support 12, a step of forming a second resin layer 20A on the photosensitive layer 18A, and a second resin layer 20A.
  • the steps of forming the protective film 16 on the top are included in this order.
  • the method for producing the transfer film 10 volatilizes ammonia, which is described in paragraph 0056 of International Publication No. 2016/099980, between the step of forming the second resin layer 20A and the step of forming the protective film 16. It may include a step of causing.
  • the transfer film according to the present disclosure is preferably rolled up in a roll and stored in a refrigerator until it is used after being produced. As the refrigerating temperature, for example, 2 ° C. or higher and 10 ° C. or lower can be mentioned.
  • the laminate according to the present disclosure includes a substrate and a cured film obtained by curing the photosensitive resin composition according to the present disclosure.
  • the laminate according to the present disclosure may have the cured film according to the present disclosure, but the substrate, the electrodes, and the like. It is preferable that the cured film according to the present disclosure is laminated in this order.
  • the cured film may have a desired pattern shape.
  • the capacitance type input device according to the present disclosure has a cured film according to the present disclosure or a laminate according to the present disclosure.
  • the substrate is preferably a substrate including the electrodes of the capacitance type input device.
  • the electrode is preferably an electrode of a capacitance type input device.
  • the electrode of the capacitance type input device may be a transparent electrode pattern or may be a routing wiring.
  • the electrodes of the capacitance type input device are preferably an electrode pattern, and more preferably a transparent electrode pattern.
  • the cured film obtained by curing the laminate according to the present disclosure and the photosensitive resin composition according to the present disclosure is preferably achromatic.
  • the total reflection (incident angle 8 °, light source: D-65 (2 ° field of view)) has a pattern L * value of 10 to 90 in the CIE1976 (L *, a *, b *) color space.
  • the a * value of the pattern is preferably ⁇ 1.0 to 1.0
  • the b * value of the pattern is preferably ⁇ 1.0 to 1.0.
  • the substrate, the transparent electrode pattern, the second resin layer arranged adjacent to the transparent electrode pattern, and the photosensitive layer arranged adjacent to the second resin layer And the refractive index of the second resin layer is preferably higher than the refractive index of the photosensitive layer.
  • the refractive index of the second resin layer is preferably 1.6 or more.
  • the substrate a glass substrate or a resin substrate is preferable. Further, the substrate is preferably a transparent substrate, and more preferably a transparent resin substrate.
  • the refractive index of the substrate is preferably 1.50 to 1.52.
  • the glass substrate for example, tempered glass such as Corning's gorilla glass (registered trademark) can be used.
  • the resin substrate it is preferable to use at least one of which is optically free of distortion and which has high transparency.
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • PC polycarbonate
  • TAC triacetyl cellulose
  • PI polyimide
  • PBO polybenzoxazole
  • COP cycloolefin polymer
  • the material of the transparent substrate the materials described in JP-A-2010-86684, JP-A-2010-152809 and JP-A-2010-257492 are preferable.
  • a touch panel is preferably used as the capacitance type input device.
  • the touch panel electrode include a transparent electrode pattern arranged in at least an image display area of the touch panel.
  • the touch panel electrode may extend from the image display area to the frame portion of the touch panel.
  • the wiring for the touch panel include routing wiring (so-called take-out wiring) arranged in the frame portion of the touch panel.
  • the transparent electrode pattern and the routing wiring are electrically connected by laminating a part of the routing wiring on the portion extending to the frame portion of the touch panel of the transparent electrode pattern. Is preferable.
  • a metal oxide film such as ITO (indium tin oxide) or IZO (indium zinc oxide), or a fine metal wire such as a metal mesh or silver nanowire is preferable.
  • the thin metal wire include thin wires such as silver and copper. Of these, silver conductive materials such as silver mesh and silver nanowires are preferable.
  • Metal is preferable as the material of the routing wiring.
  • the metal used as the material of the routing wiring include gold, silver, copper, molybdenum, aluminum, titanium, chromium, zinc and manganese, and alloys composed of two or more of these metal elements.
  • copper, molybdenum, aluminum or titanium is preferable, and copper is particularly preferable.
  • the electrode protective film for a touch panel formed by using the transfer film according to the present disclosure has an electrode or the like directly or another layer for the purpose of protecting the electrode or the like (that is, at least one of the electrode for the touch panel and the wiring for the touch panel). It is provided so as to cover through.
  • the preferable range of the thickness of the electrode protective film for the touch panel is the same as the preferable range of the thickness of the photosensitive layer described above.
  • the electrode protective film (preferably an electrode protective film for a touch panel) may have an opening.
  • the openings can be formed by dissolving the non-exposed portion of the photosensitive layer with a developer.
  • the touch panel may further include a first refractive index adjusting layer between the electrodes and the like and the electrode protective layer for the touch panel (see, for example, the first specific example of the touch panel described later).
  • the preferred embodiment of the first refractive index adjusting layer is the same as the preferred embodiment of the second resin layer that the transfer film can have.
  • the first refractive index adjusting layer is a layer after curing, and a preferred embodiment of the first refractive index adjusting layer is photocurability in the second resin layer.
  • preferred embodiments such as thermosetting and alkali solubility do not apply.
  • the first refractive index adjusting layer may be formed by applying and drying the composition for forming the first refractive index adjusting layer, or by separately transferring the refractive index adjusting layer of the transfer film having the refractive index adjusting layer. It may be formed.
  • the touch panel of the embodiment provided with the first refractive index adjusting layer preferably uses the transfer film according to the present disclosure of the embodiment having the second resin layer, and transfers the photosensitive layer and the second resin layer of the transfer film. It is preferable to form by.
  • the electrode protective layer for the touch panel is formed from the photosensitive layer of the transfer film
  • the first refractive index adjusting layer is formed from the second resin layer of the transfer film.
  • the touch panel or the touch panel substrate may be provided with a second refractive index adjusting layer between the substrate and the electrodes (see, for example, the first specific example of the touch panel described later).
  • the preferred embodiment of the second refractive index adjusting layer is the same as the preferred embodiment of the second resin layer that the transfer film can have.
  • the touch panel includes the first refractive index adjusting layer (more preferably, the first refractive index adjusting layer and the second refractive index adjusting layer are provided), the electrodes and the like are hard to see (so-called bone visibility is suppressed). It has the advantage of.
  • the structure of the capacitance type input device described in JP-A-2014-10814 and JP-A-2014-108541 may be referred to.
  • FIG. 2 is a schematic cross-sectional view of a touch panel 30 which is a first specific example of the touch panel according to the present disclosure. More specifically, FIG. 2 is a schematic cross-sectional view of an image display area of the touch panel 30.
  • the touch panel 30 includes a substrate 32, a second refractive index adjusting layer 36, a transparent electrode pattern 34 as a touch panel electrode, a first refractive index adjusting layer 20, and a touch panel electrode protective film 18. And have a structure arranged in this order.
  • the touch panel electrode protective film 18 and the first refractive index adjusting layer 20 cover the entire transparent electrode pattern 34.
  • the touch panel according to the present disclosure is not limited to this aspect.
  • the electrode protective film 18 for the touch panel and the first refractive index adjusting layer 20 may cover at least a part of the transparent electrode pattern 34.
  • the second refractive index adjusting layer 36 and the first refractive index adjusting layer 20 directly or other layers the first region 40 in which the transparent electrode pattern 34 exists and the second region 42 in which the transparent electrode pattern 34 does not exist, respectively. It is preferable to continuously coat the coating through. According to such an aspect, the transparent electrode pattern 34 becomes less visible. It is preferable that the second refractive index adjusting layer 36 and the first refractive index adjusting layer 20 directly cover both the first region 40 and the second region 42 rather than covering them through other layers. Examples of the "other layer” include an insulating layer, an electrode pattern other than the transparent electrode pattern 34, and the like.
  • the first refractive index adjusting layer 20 is laminated over both the first region 40 and the second region 42.
  • the first refractive index adjusting layer 20 is adjacent to the second refractive index adjusting layer 36, and is also adjacent to the transparent electrode pattern 34.
  • the shape of the end portion of the transparent electrode pattern 34 at the point of contact with the second refractive index adjusting layer 36 is a tapered shape as shown in FIG. 2, the shape is along the tapered shape (that is, the same inclination as the taper angle).
  • the first refractive index adjusting layer 20 is preferably laminated.
  • the ITO transparent electrode pattern is suitable.
  • the transparent electrode pattern 34 can be formed by, for example, the following method.
  • An electrode thin film (for example, an ITO film) is formed by sputtering on the substrate 32 on which the second refractive index adjusting layer 36 is formed.
  • an etching protective layer is formed by applying an etching photosensitive resist on the formed electrode thin film or by transferring an etching photosensitive film.
  • the formed etching protective layer is patterned into a desired pattern shape by exposure and development.
  • the portion of the electrode thin film that is not covered by the patterned etching protective layer is removed by etching, and the electrode thin film is formed into a pattern having a desired shape (that is, a transparent electrode pattern 34).
  • the etching protective layer patterned by the stripping solution is removed.
  • the first refractive index adjusting layer 20 and the electrode protective film 18 for the touch panel are, for example, a substrate 32 (that is, a substrate for a touch panel) in which the second refractive index adjusting layer 36 and the transparent electrode pattern 34 are sequentially provided as follows. Formed on top of. First, the transfer film 10 shown in FIG. 1 (that is, the transfer film 10 having a laminated structure of the protective film 16 / the second resin layer 20A / the photosensitive layer 18A / the temporary support 12) is prepared. Next, the protective film 16 is removed from the transfer film 10.
  • the transfer film 10 from which the protective film 16 has been removed is laminated on a substrate 32 (that is, a touch panel substrate) on which the second refractive index adjusting layer 36 and the transparent electrode pattern 34 are sequentially provided.
  • Lamination is performed in the direction in which the second resin layer 20A of the transfer film 10 from which the protective film 16 has been removed and the transparent electrode pattern 34 are in contact with each other.
  • a laminate having a laminated structure of a temporary support 12 / a photosensitive layer 18A / a second resin layer 20A / a transparent electrode pattern 34 / a second refractive index adjusting layer 36 / a substrate 32 can be obtained.
  • the temporary support 12 is removed from the laminated body.
  • the photosensitive layer 18A and the second resin layer 20A are cured in a pattern by pattern-exposing the laminate from which the temporary support 12 has been removed.
  • the pattern-like curing of the photosensitive layer 18A and the second resin layer 20A may be performed separately by separate pattern exposures, but it is preferably performed simultaneously by one pattern exposure.
  • the non-exposed portion (that is, the non-cured portion) of the photosensitive layer 18A and the second resin layer 20A is removed by development to protect the electrode for the touch panel, which is a patterned cured product of the photosensitive layer 18A.
  • a film 18 (not shown for the pattern shape) and a first refractive index adjusting layer 20 (not shown for the pattern shape), which is a cured product of the pattern of the second resin layer 20A, are obtained.
  • the development of the photosensitive layer 18A and the second resin layer 20A after the pattern exposure may be carried out separately by separate development, but it is preferable that the development is carried out simultaneously by one development.
  • FIG. 3 is a schematic cross-sectional view of the touch panel 90, which is a second specific example of the touch panel according to the present disclosure.
  • the touch panel 90 has an image display area 74 and an image non-display area 75 (that is, a frame portion). Further, the touch panel 90 is provided with touch panel electrodes on both sides of the substrate 32.
  • the touch panel 90 includes a first transparent electrode pattern 70 on one surface of the substrate 32 and a second transparent electrode pattern 72 on the other surface.
  • the routing wiring 56 is connected to each of the first transparent electrode pattern 70 and the second transparent electrode pattern 72.
  • the routing wiring 56 is, for example, a copper wiring.
  • a touch panel electrode protective film 18 is formed on one surface of the substrate 32 so as to cover the first transparent electrode pattern 70 and the routing wiring 56, and the second transparent electrode protective film 18 is formed on the other surface of the substrate 32.
  • a touch panel electrode protective film 18 is formed so as to cover the electrode pattern 72 and the routing wiring 56.
  • the first refractive index adjusting layer and the second refractive index adjusting layer in the first specific example may be formed on one surface and the other surface of the substrate 32, respectively.
  • the method for manufacturing the touch panel according to the present disclosure is not particularly limited, but the following method is preferable.
  • the method for manufacturing the touch panel according to the present disclosure is as follows. To prepare a touch panel substrate having a structure in which electrodes and the like (that is, at least one of the touch panel electrodes and the touch panel wiring) are arranged on the substrate (hereinafter, also referred to as “preparation step”). Forming a photosensitive layer containing the photosensitive resin composition according to the present disclosure on the surface of the touch panel substrate on the side on which the electrodes and the like are arranged (hereinafter, also referred to as “photosensitive layer forming step”).
  • Pattern exposure process By developing the photosensitive layer exposed to the pattern, an electrode protective film for a touch panel that protects at least a part of an electrode or the like is obtained (hereinafter, also referred to as “development process”). Is preferably included.
  • the touch panel according to the present disclosure it is possible to manufacture a touch panel having a cured film having excellent adhesion to a substrate and corrosion suppressing property of a metal.
  • the preparation step is a step for convenience, and is a step of preparing a touch panel substrate having a structure in which electrodes and the like (that is, at least one of a touch panel electrode and a touch panel wiring) are arranged on the substrate.
  • the preparation step may be a step of simply preparing a touch panel substrate manufactured in advance, or may be a step of manufacturing a touch panel substrate.
  • the preferred embodiment of the touch panel substrate is as described above.
  • the photosensitive layer forming step is a step of forming a photosensitive layer containing the photosensitive resin composition according to the present disclosure on the surface of the touch panel substrate on the side where the electrodes and the like are arranged.
  • the transfer film according to the present disclosure is laminated on the surface on the side where the electrodes and the like of the touch panel substrate are arranged, and the photosensitive layer in the transfer film according to the present disclosure is transferred onto the surface.
  • a photosensitive layer is formed on the above surface.
  • Lamination can be performed using a known laminator such as a vacuum laminator or an auto-cut laminator.
  • the laminating temperature is preferably 80 ° C. to 150 ° C., more preferably 90 ° C. to 150 ° C., and even more preferably 100 ° C. to 150 ° C.
  • the laminating temperature refers to the temperature of the rubber rollers.
  • the substrate temperature at the time of laminating is not particularly limited.
  • the substrate temperature at the time of laminating is preferably 10 ° C. to 150 ° C., more preferably 20 ° C. to 150 ° C., and even more preferably 30 ° C. to 150 ° C.
  • the substrate temperature at the time of laminating is preferably 10 ° C to 80 ° C, more preferably 20 ° C to 60 ° C, and even more preferably 30 ° C to 50 ° C.
  • the linear pressure at the time of laminating is preferably 0.5 N / cm to 20 N / cm, more preferably 1 N / cm to 10 N / cm, and even more preferably 1 N / cm to 5 N / cm.
  • the transport speed (lamination speed) at the time of laminating is preferably 0.5 m / min to 5 m / min, more preferably 1.5 m / min to 3 m / min.
  • the protective film is peeled from the transfer film to expose the photosensitive layer, and then the photosensitive layer is exposed.
  • the transfer film and the touch panel substrate are bonded to each other so that the exposed photosensitive layer and the surface on the side where the electrodes of the touch panel substrate are arranged are in contact with each other, and then heating and pressurization are applied.
  • the photosensitive layer of the transfer film is transferred onto the surface of the touch panel substrate on the side where the electrodes and the like are arranged, and the temporary support / thermoplastic resin layer / intermediate layer / photosensitive layer / electrodes and the like are transferred.
  • a laminate having a laminated structure of substrates is formed.
  • the portion of "electrodes and the like / substrate” is a touch panel substrate.
  • the temporary support is peeled off from the laminated body.
  • the pattern exposure described later can be performed while leaving the temporary support.
  • the pattern exposure step is a step of pattern exposure of the photosensitive layer formed on the touch panel substrate.
  • the “pattern exposure” refers to an exposure in which a pattern is exposed, that is, an exposure in which an exposed portion and a non-exposed portion are present.
  • the exposed portion in pattern exposure is cured to finally become a cured film.
  • the non-exposed portion in the pattern exposure is not cured, and is dissolved and removed by the developing solution in the next developing step.
  • the non-exposed portion may form an opening of the cured film after the developing step.
  • the pattern exposure may be an exposure through a mask or a digital exposure using a laser or the like.
  • any light source in a wavelength range capable of curing the photosensitive layer (for example, 365 nm or 405 nm) can be appropriately selected and used.
  • the light source include various lasers, light emitting diodes (LEDs), ultra-high pressure mercury lamps, high pressure mercury lamps, metal halide lamps, and the like.
  • Exposure is preferably 5mJ / cm 2 ⁇ 200mJ / cm 2, more preferably 10mJ / cm 2 ⁇ 200mJ / cm 2.
  • the temporary support When a photosensitive layer is formed on a substrate using a transfer film, the temporary support may be peeled off and then pattern exposure may be performed. The pattern exposure may be performed before the temporary support is peeled off, and then the temporary support may be peeled off. The support may be peeled off. Further, in the exposure step, the photosensitive layer may be heat-treated (so-called PEB (Post Exposure Bake)) after pattern exposure and before development.
  • PEB Post Exposure Bake
  • an electrode protective film for a touch panel that protects at least a part of an electrode or the like is formed by developing a photosensitive layer exposed to a pattern (that is, by dissolving a non-exposed portion in a pattern exposure in a developing solution). This is the process of obtaining.
  • the developer used for development is not particularly limited, and a known developer such as the developer described in JP-A-5-72724 can be used. It is preferable to use an alkaline aqueous solution as the developing solution.
  • the alkaline compound that can be contained in the alkaline aqueous solution include sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, and the like. Examples thereof include tetrabutylammonium hydroxide and choline (2-hydroxyethyltrimethylammonium hydroxide).
  • the pH of the alkaline aqueous solution at 25 ° C. is preferably 8 to 13, more preferably 9 to 12, and particularly preferably 10 to 12.
  • the content of the alkaline compound in the alkaline aqueous solution is preferably 0.1% by mass to 5% by mass, more preferably 0.1% by mass to 3% by mass, based on the total mass of the alkaline aqueous solution.
  • the developer may contain an organic solvent that is miscible with water.
  • Organic solvents include methanol, ethanol, 2-propanol, 1-propanol, butanol, diacetone alcohol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-butyl ether, benzyl alcohol, acetone, methyl ethyl ketone, cyclohexanone. , ⁇ -caprolactone, ⁇ -butyrolactone, dimethylformamide, dimethylacetamide, hexamethylphosphoramide, ethyl lactate, methyl lactate, ⁇ -caprolactam, N-methylpyrrolidone and the like.
  • the concentration of the organic solvent is preferably 0.1% by mass to 30% by mass.
  • the developer may contain a known surfactant.
  • the concentration of the surfactant is preferably 0.01% by mass to 10% by mass.
  • the liquid temperature of the developing solution is preferably 20 ° C to 40 ° C.
  • Examples of the development method include paddle development, shower development, shower and spin development, and dip development.
  • shower development When shower development is performed, the non-exposed portion of the photosensitive layer is removed by spraying the developing solution on the photosensitive layer after pattern exposure in a shower shape.
  • a transfer film including a photosensitive layer, a thermoplastic resin layer, and at least one of an intermediate layer is used, the photosensitive layer is photosensitive after transfer onto the substrate and before the development of the photosensitive layer. At least one (or both, if both) of the thermoplastic resin layer and the intermediate layer may be removed in advance by spraying an alkaline liquid having low solubility of the layer in a shower manner. Further, after the development, it is preferable to remove the development residue by rubbing with a brush or the like while spraying a cleaning agent or the like with a shower.
  • the liquid temperature of the developing solution is preferably 20 ° C to 40 ° C.
  • the developing step may include a step of performing the above-mentioned development and a step of heat-treating the cured film obtained by the above-mentioned development (hereinafter, also referred to as "post-baking").
  • the post-baking temperature is preferably 100 ° C. to 160 ° C., more preferably 130 ° C. to 160 ° C.
  • the resistance value of the transparent electrode pattern can also be adjusted.
  • the photosensitive layer contains a carboxy group-containing (meth) acrylic resin, at least a part of the carboxy group-containing (meth) acrylic resin can be changed to a carboxylic acid anhydride by post-baking. When changed in this way, the developability and the strength of the cured film are excellent.
  • the developing step may include a step of performing the above-mentioned development and a step of exposing the cured film obtained by the above-mentioned development (hereinafter, also referred to as “post-exposure”). If the developing process includes both post-exposure and post-baking steps, it is preferred to perform post-baking after post-exposure.
  • the touch panel manufacturing method according to the present disclosure may include steps (so-called other steps) other than the steps described above.
  • Other steps include known steps (eg, cleaning steps) that may be provided in a normal photolithography step.
  • Example 1 ⁇ Preparation of photosensitive transfer material (transfer film)> ⁇ Formation of photosensitive layer >> On a polyethylene terephthalate film (temporary support, 16QS62 (16KS40) (manufactured by Toray Industries, Inc.)) having a thickness of 16 ⁇ m, a coating liquid for a photosensitive layer consisting of the following formulation 101 is dried using a slit-shaped nozzle. The film was adjusted to have a thickness of 4.5 ⁇ m, and dried with a hot air convection dryer having a temperature gradient of 75 ° C. to 120 ° C. to remove the solvent to form a photosensitive layer.
  • a hot air convection dryer having a temperature gradient of 75 ° C. to 120 ° C.
  • Formulation 101 organic solvent-based resin composition (photosensitive resin composition))- -Ethylene unsaturated compound A-NOD-N (M-1, 1,9-nonanediol diacrylate, manufactured by Shin-Nakamura Chemical Industry Co., Ltd.): 8.41 parts A-DCP (M-3, tricyclode) Candimethanol diacrylate, manufactured by Shin-Nakamura Chemical Industry Co., Ltd.): 16.83 parts Aronix TO-2349 (M-4, polyfunctional ethylenically unsaturated compound having a carboxylic acid group, manufactured by Toa Synthetic Co., Ltd.): 2 .80 parts ⁇ Binder polymer P-1 (resin shown below, structural unit derived from styrene (St) / structural unit derived from dicyclopentanyl methacrylate (DCPMA) / structural unit derived from methacrylic acid (MAA) / derived from methacrylic acid Constituent
  • Second resin layer a coating liquid for a second resin layer composed of the following formulation 201 was adjusted and applied so that the thickness after drying was 70 nm.
  • the solvent was removed by drying with a hot air convection dryer having a temperature gradient of 40 ° C. to 95 ° C. to form a second resin layer arranged in direct contact with the photosensitive layer.
  • the refractive index of the second resin layer was 1.68 at a wavelength of 550 nm at 25 ° C.
  • Formulation 201 is prepared using a resin having an acid group and an aqueous ammonia solution, and the resin having an acid group is neutralized with the aqueous ammonia solution, and an aqueous resin composition containing an ammonium salt of the resin having an acid group.
  • Formulation 201 water-based resin composition
  • aqueous ammonia 4.92 parts, polyfunctional ethylenically unsaturated compound having a carboxylic acid group (Aronix TO-2349, manufactured by Toa Synthetic Co., Ltd.): 0.04 parts, ZrO 2 particles (Nano Teen OZ- S30M, solid content 30.5%, methanol 69.5%, refractive index 2.2, average particle size: about 12 nm, manufactured by Nissan Chemical Industries, Ltd .: 4.34 parts, rust preventive (benzotriazole derivative) , BT-LX, manufactured by Johoku Chemical Industry Co., Ltd.): 0.03 parts ⁇ Surface active agent (fluorine-based surfactant, Megafuck F444, manufactured by DIC Co., Ltd.): 0.01 parts ⁇ Distilled water: 24. 83 parts, methanol: 65.83 parts
  • the obtained photosensitive transfer material was peeled off from the protective film and then laminated on one side of the copper plate.
  • the laminating conditions were a lamirol temperature of 110 ° C., a linear pressure of 3 N / cm, and a transport speed of 2 m / min.
  • an exposure mask (quartz exposure mask having an overcoat forming pattern) was used on the obtained laminate before exposure using a proximity type exposure machine (manufactured by Hitachi High-Tech Electronics Engineering Co., Ltd.) having an ultra-high pressure mercury lamp.
  • the distance between the 1 mm line and space (5 lines) surface and the temporary support was set to 125 ⁇ m, and pattern exposure was performed through the temporary support with an exposure amount of 100 mJ / cm 2 (i-line).
  • the laminate after pattern exposure was washed with a 2% aqueous solution of sodium carbonate at 32 ° C. for 60 seconds.
  • the residue was removed by injecting ultrapure water from an ultrahigh pressure cleaning nozzle onto the copper substrate after the cleaning treatment. Subsequently, air was blown to remove water on the copper substrate, and post-baking treatment was performed at 140 ° C. for 30 minutes. Then, the patterning sample was allowed to stand for 24 hours in an environment of 85 ° C. and 85% RH.
  • A has the best rust resistance and E has the worst. It is preferably any of A, B and C, more preferably A or B, and particularly preferably A.
  • ⁇ Rust prevention area> In the above rust prevention evaluation, the vicinity of the portion on the copper plate 1 mm away from the cured film of the photosensitive resin composition is visually observed, and the range in which the effects of evaluations A to C in the above rust prevention evaluation criteria are recognized is as follows. It was evaluated according to the criteria of. In the following evaluation criteria, A is preferable. A: The rust preventive effect is recognized even in the portion 1 mm or more away from the cured film. B: The rust preventive effect is recognized only in the portion less than 1 mm away from the cured film.
  • the obtained photosensitive transfer material was peeled off from the protective film and then laminated on one side of the copper plate.
  • the laminating conditions were a lamirol temperature of 110 ° C., a linear pressure of 3 N / cm, and a transport speed of 2 m / min.
  • an exposure mask (quartz exposure mask having an overcoat forming pattern) was used on the obtained laminate before exposure using a proximity type exposure machine (manufactured by Hitachi High-Tech Electronics Engineering Co., Ltd.) having an ultra-high pressure mercury lamp.
  • the distance between the 1 mm line and space: 5 lines) surface and the temporary support was set to 125 ⁇ m, and the pattern was exposed through the temporary support with an exposure amount of 100 mJ / cm 2 (i-line).
  • the laminate after pattern exposure was immersed in a 1% aqueous solution of sodium carbonate at 23 ° C. and allowed to stand for 45 seconds for development treatment. Then, it was allowed to stand in pure water at 23 ° C. for 25 seconds for washing treatment. Air was blown onto the copper substrate after the cleaning treatment with a blower to remove water droplets, and the sample was used as an evaluation sample for suppressing development residue. The residue on the copper in the space portion of this pattern was visually confirmed.
  • A has the best development residue inhibitory property and E has the worst. The better the evaluation, the better.
  • a copper substrate is used as a support, the protective film of the transfer film is peeled off on the copper substrate, and the surface of the exposed second resin layer is adhered and laminated to form a temporary support / photosensitive layer / second resin layer /.
  • a laminated body A having a layered structure of a copper substrate was formed.
  • the laminating conditions at this time were a lamirol temperature of 110 ° C., a linear pressure of 3 N / cm, and a transport speed of 2 m / min.
  • the produced laminate A was exposed to an exposure amount of 100 mJ / cm 2 (i-line) via a temporary support using a proximity type exposure machine (manufactured by Hitachi High-Tech Electronics Engineering Co., Ltd.) having an ultra-high pressure mercury lamp. After the exposure, the temporary support was peeled off. After further peeling the temporary support, post-exposure was further performed with an exposure amount of 375 mJ / cm 2 (i-line), and post-baking was further performed at 145 ° C. for 30 minutes to prepare a sample for evaluation. Using the above evaluation sample, a cross-cut test was carried out on a laminate in which 10 ⁇ 10 grid-like cuts were made by a method conforming to JIS standard (K5400).
  • a cutter knife is used to make cuts in a 1 mm ⁇ 1 mm square grid from the surface of the cured film of the photosensitive layer to the second resin layer of the laminated body, and the surface of the cured film of the photosensitive layer is transparent.
  • Adhesive tape # 600 (manufactured by 3M Japan Ltd.) was crimped and bonded. Then, one end of the bonded transparent adhesive tape was grasped and pulled in the direction of 180 ° C. along the surface of the cured film of the photosensitive layer to peel off the transparent adhesive tape.
  • the state of the surface (peeled surface) of the cured film of the photosensitive layer is visually observed, and the area of the peeled portion is calculated to calculate the ratio to the total area of the region in which the cuts are made in a grid pattern.
  • evaluation was performed according to the following evaluation criteria. Of the evaluation criteria, A is the best and E is the worst.
  • B The cured film and the second resin layer of the photosensitive layer, which are 95% or more and less than 100% of the total area, remain in close contact with each other.
  • C The cured film of the photosensitive layer and the second resin layer of 65% or more and less than 95% of the total area remain in close contact with each other.
  • D The cured film of the photosensitive layer and the second resin layer of 35% or more and less than 65% of the total area remain in close contact with each other.
  • E The portion where the cured film of the photosensitive layer and the second resin layer remain in close contact is less than 35% of the total area.
  • the storage elastic modulus of the photosensitive resin composition at 100 ° C. was measured by the following method.
  • a rheometer (Discovery HR-2) manufactured by TA Instruments Co., Ltd. was used for measuring the storage elastic modulus.
  • a 20 mm ⁇ parallel plate was used as the sample fixing jig.
  • a coating liquid for a photosensitive layer is applied on a polyethylene terephthalate film (temporary support, 16QS62 (16KS40) (manufactured by Toray Industries, Inc.)) having a thickness of 16 ⁇ m using a slit-shaped nozzle, and the thickness after drying becomes 10 ⁇ m.
  • the film was adjusted and applied in such a manner, and dried in a hot air convection dryer having a temperature gradient of 75 ° C. to 120 ° C. to remove the solvent to form a photosensitive layer. This was repeated 50 times and laminated to obtain a sample having a film thickness of about 500 ⁇ m. Place the prepared sample between the plates and bring the sample into close contact with the plate. Dynamic viscoelasticity was measured at a heating rate of 5 ° C./min in a temperature range of 20 to 125 ° C. in a shear mode, frequency of 1.0 Hz, and strain of 0.5%, and a storage elastic modulus of G'(at 100 ° C.) Pa) was calculated.
  • Examples 2 to 40 and Comparative Examples 1 to 5 The photosensitive resin composition and the transfer film were prepared in the same manner as in Example 1 except that the types and contents (solid content) of each component other than the solvent were changed as shown in Tables 1 to 4, respectively. Made. Moreover, each evaluation was performed in the same manner as in Example 1 using the obtained photosensitive transfer material.
  • Example 41 to 44 The type and content (solid content) of each component other than the solvent were changed as shown in Table 4, and in Examples 41 and 43, the coating liquid for the second resin layer was prepared according to the following formulation 202.
  • the photosensitive resin composition and the transfer film were prepared in the same manner as in Example 1 except that the coating liquid for the second resin layer was prepared according to the following formulation 203, respectively. Made.
  • each evaluation was performed in the same manner as in Example 1 using the obtained photosensitive transfer material.
  • the formulation 202 and the formulation 203 in the preparation of the coating liquid for the second resin layer are shown below.
  • Formulation 202 water-based resin composition
  • aqueous ammonia 4.92 parts, polyfunctional ethylenically unsaturated compound having a carboxylic acid group (Aronix TO-2349, manufactured by Toa Synthetic Co., Ltd.): 0.04 parts, ZrO 2 particles (Nanouse OZ- S30M, solid content 30.5%, methanol 69.5%, refractive index 2.2, average particle size: about 12 nm, manufactured by Nissan Chemical Industry Co., Ltd .): 4.34 parts ⁇
  • Additives (Adenin, Tokyo Kasei) (Manufactured by Co., Ltd.): 0.03 part, additive (N-methyldiethanolamine, manufactured by Tokyo Kasei Co., Ltd.): 0.03 part, surfactant (fluorine-based surfactant, Megafuck F444, DIC Co., Ltd.) Made): 0.01 parts, distilled water: 24.83 parts, methanol: 65.83 parts
  • Formulation 203 water-based resin composition
  • aqueous ammonia 4.92 parts, polyfunctional ethylenically unsaturated compound having a carboxylic acid group (Aronix TO-2349, manufactured by Toa Synthetic Co., Ltd.): 0.04 parts, ZrO 2 particles (Nano Teen OZ- S30M, solid content 30.5%, methanol 69.5%, refractive index 2.2, average particle size: about 12 nm, manufactured by Nissan Chemical Industry Co., Ltd .): 4.34 parts ⁇
  • Additives pyrimidine, Tokyo Kasei
  • additive N-methyldiethanolamine, manufactured by Tokyo Kasei Co., Ltd.
  • surfactant fluorine-based surfactant, Megafuck F444, DIC Co., Ltd.
  • Manufactured 0.01 parts, distilled water: 24.83 parts, methanol: 65.83 parts (Examples 45 to 48)
  • the type 45 to 48 The type
  • the photosensitive resin composition and the transfer film were prepared in the same manner as in Example 1 except that the coating liquid for the layer was prepared according to the following formulation 204 and the second resin layer was changed to be formed as follows. Were prepared respectively. Moreover, each evaluation was performed in the same manner as in Example 1 using the obtained photosensitive transfer material.
  • Formulation 204 water-based resin composition
  • Alfon UC-3920 (manufactured by Toa Synthetic Co., Ltd.): 0 .47 parts-Polyfunctional ethylenically unsaturated compound having a carboxylic acid group (Aronix TO-2349, manufactured by Toa Synthetic Co., Ltd.): 2.00 parts-ZrO 2 particles (nano-use OZ-S30M, refractive index 2.2) , Average particle size: Approximately 12 nm, manufactured by Nissan Chemical Industry Co., Ltd.): 80.00 parts, additive 1 (N-methyldiethanolamine): 2.00 parts, additive 2 (adenine): 2.00 parts, interface Activator (fluorosurfactant, Megafuck F444, manufactured by
  • Second resin layer Using a slit-shaped nozzle, a coating liquid for a second resin layer composed of formulation 204 is applied onto the photosensitive layer after adjusting the thickness to 73 nm after drying, and the temperature is 40 ° C. to 95 ° C. The solvent was removed by drying with a hot air convection dryer having a gradient, and a second resin layer arranged in direct contact with the photosensitive layer was formed.
  • the refractive index of the second resin layer was 1.68 at a wavelength of 550 nm at 25 ° C.
  • Formulation 204 is prepared by using a resin having an acid group and an aqueous ammonia solution, and the resin having an acid group is neutralized with the aqueous ammonia solution, and an aqueous resin composition containing an ammonium salt of the resin having an acid group.
  • a coating liquid for the second resin layer which is a product, was prepared.
  • the type and content (solid content) of each component other than the solvent were changed as shown in Table 5, and the thickness of the photosensitive layer after drying was changed to 3.5 ⁇ m, and the second resin was also changed.
  • a photosensitive resin composition and a transfer film were prepared in the same manner as in Example 1 except that the coating liquid for layers was prepared according to Formulation 204 and changed to form a second resin layer.
  • Example 50 The type and content (solid content) of each component other than the solvent were changed as shown in Table 5, and the thickness of the photosensitive layer after drying was changed to 6.5 ⁇ m, and the second resin was also changed.
  • a photosensitive resin composition and a transfer film were prepared in the same manner as in Example 1 except that the coating liquid for layers was prepared according to Formulation 204 and changed to form a second resin layer.
  • each evaluation was performed in the same manner as in Example 1 using the obtained photosensitive transfer material.
  • the storage elastic modulus P in Tables 1 to 5 represents the storage elastic modulus (unit: 10 2 Pa) of the obtained photosensitive resin composition at 100 ° C.
  • the compounds used as compound A in the examples are all manufactured by Tokyo Chemical Industry Co., Ltd.
  • the abbreviations shown in Tables 1 to 5 other than those described above are as follows.
  • M-2 Dipentaerythritol hexaacrylate (A-DPH, manufactured by Shin Nakamura Chemical Industry Co., Ltd.)
  • M-5 Urethane acrylate 8UX-015A (manufactured by Taisei Fine Chemical Co., Ltd.)
  • DPHA Dipentaerythritol hexaacrylate (manufactured by Toshin Oil & Fat Co., Ltd.)
  • D-3 1- [4- (Phenylthio) phenyl] -1,2-octanedione-2- (O-benzoyloxime) (IRGACURE OXE-01, manufactured by BASF)
  • D-4 [8- [5- (2,4,6-trimethylphenyl) -11- (2-ethylhexyl) -11H-benzo [a] carbazoyl] [2- (2,2,3,3-tetra) Fluoropropoxy) Phenyl] Metanon- (O-Acetyl Oxime) (IRGACURE OXE-03, manufactured by BASF)
  • D-5 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone (IRGACURE 379EG, manufactured by BASF)
  • D-6 1- (biphenyl-4-yl) -2-methyl-2-morpholinopropan-1-
  • the photosensitive resin compositions of Examples 1 to 50 which are the photosensitive resin compositions according to the present disclosure, are the photosensitive resin compositions of Comparative Examples 1 to 5. It can be seen that the development residue suppressing property and the rust preventive property of the exposed wiring around the film after the heat treatment of the obtained film or the cured film are excellent. Further, from the results shown in Tables 1 to 5, the photosensitive resin compositions of Examples 1 to 50, which are the curable compositions according to the present disclosure, have a wide range in which the above-mentioned rust preventive effect can be obtained. It can be seen that the substrate adhesion is also excellent.
  • Example 101 A photosensitive resin composition and a photosensitive transfer film were prepared in the same manner as in Example 1 except that the second resin layer was not formed in Example 1, and each evaluation was performed. The evaluation result was the same as that of Example 1.
  • Example 102 to 150 The photosensitive resin composition and the photosensitive resin composition and the same as in Example 101, except that the type and content (solid content) of each component were changed as described in Examples 2 to 50 shown in Tables 1 to 5. , Photosensitive transfer films were prepared respectively. The evaluation results were the same as in Examples 2 to 50, respectively.
  • Examples 201A to 201D A transfer film and a laminate were prepared in the same manner as in Example 1 except that the temporary support and the protective film were changed as shown in Table 6 in Example 1, and evaluated in the same manner as in Example 1. All had the same evaluation results as in Example 1.
  • Examples 202 to 250 The temporary support and protective film of Examples 201A to 201D were changed with respect to Example 1 for Examples 2 to 50 to prepare a transfer film and a laminate, which were evaluated in the same manner as in Example 1. In each case, the evaluation results were the same as those in the examples before the change of the temporary support and the protective film.
  • Example 301 to 350 Preparation of transparent laminate> A substrate having a second refractive index adjusting layer, an ITO transparent electrode pattern, and a copper routing wiring formed on a cycloolefin transparent film was prepared. Using the transfer films of Examples 1 to 50 from which the protective film was peeled off (corresponding to Examples 301 to 350, respectively), the second refractive index adjusting layer, the ITO transparent electrode pattern, and the copper routing wiring were transferred to the transfer film. Laminated at the position covered by.
  • Lamination was performed using a vacuum laminator manufactured by MCK under the conditions of a cycloolefin transparent film temperature: 40 ° C., a rubber roller temperature of 100 ° C., a linear pressure of 3 N / cm, and a transport speed of 2 m / min.
  • a proximity type exposure machine manufactured by Hitachi High-Tech Electronics Engineering Co., Ltd.
  • the surface of the exposure mask quartz exposure mask having a pattern for forming an overcoat
  • Pattern exposure was performed with an exposure amount of 100 mJ / cm 2 (i-line) via a temporary support.
  • a liquid crystal display device provided with a touch panel was manufactured by attaching the manufactured touch panel to a liquid crystal display element manufactured by the method described in paragraphs 097 to 0119 of JP2009-47936A. It was confirmed that the liquid crystal display device equipped with a touch panel has excellent display characteristics and operates without problems.
  • Transfer film 12 Temporary support 16: Protective film 18, 18A: Photosensitive layer (electrode protective film for touch panel) 20, 20A: Second resin layer (first refractive index adjustment layer) 30: Touch panel 32: Substrate 34: Transparent electrode pattern 36: Second refractive index adjustment layer 40: First region where transparent electrode pattern exists 42: Second region where transparent electrode pattern does not exist 56: Route wiring 70: First transparent Electrode pattern 72: Second transparent electrode pattern 74: Image display area 75: Image non-display area 90: Touch panel

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PCT/JP2020/025883 2019-07-24 2020-07-01 感光性樹脂組成物、転写フィルム、硬化膜、積層体、及び、タッチパネルの製造方法 Ceased WO2021014914A1 (ja)

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