WO2019203353A1 - ポリイミド、積層体およびそれらを含む電子デバイス - Google Patents
ポリイミド、積層体およびそれらを含む電子デバイス Download PDFInfo
- Publication number
- WO2019203353A1 WO2019203353A1 PCT/JP2019/016858 JP2019016858W WO2019203353A1 WO 2019203353 A1 WO2019203353 A1 WO 2019203353A1 JP 2019016858 W JP2019016858 W JP 2019016858W WO 2019203353 A1 WO2019203353 A1 WO 2019203353A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polyimide
- diamine
- voltage
- monomer
- polyimide film
- Prior art date
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- 229920001721 polyimide Polymers 0.000 title claims abstract description 296
- 239000004642 Polyimide Substances 0.000 title claims abstract description 199
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 22
- 239000010703 silicon Substances 0.000 claims abstract description 22
- 150000004985 diamines Chemical class 0.000 claims description 107
- 239000002243 precursor Substances 0.000 claims description 85
- -1 9H-fluorene-9,9-diyl Chemical group 0.000 claims description 67
- 239000000203 mixture Substances 0.000 claims description 57
- 239000000758 substrate Substances 0.000 claims description 56
- 150000000000 tetracarboxylic acids Chemical class 0.000 claims description 32
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 23
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 claims description 17
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 12
- 125000005462 imide group Chemical group 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 12
- QBSMHWVGUPQNJJ-UHFFFAOYSA-N 4-[4-(4-aminophenyl)phenyl]aniline Chemical compound C1=CC(N)=CC=C1C1=CC=C(C=2C=CC(N)=CC=2)C=C1 QBSMHWVGUPQNJJ-UHFFFAOYSA-N 0.000 claims description 8
- ZDZHCHYQNPQSGG-UHFFFAOYSA-N 1-naphthalen-1-ylnaphthalene Chemical compound C1=CC=C2C(C=3C4=CC=CC=C4C=CC=3)=CC=CC2=C1 ZDZHCHYQNPQSGG-UHFFFAOYSA-N 0.000 claims description 7
- KIFDSGGWDIVQGN-UHFFFAOYSA-N 4-[9-(4-aminophenyl)fluoren-9-yl]aniline Chemical compound C1=CC(N)=CC=C1C1(C=2C=CC(N)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 KIFDSGGWDIVQGN-UHFFFAOYSA-N 0.000 claims description 7
- 150000001412 amines Chemical group 0.000 claims description 4
- UKJLNMAFNRKWGR-UHFFFAOYSA-N cyclohexatrienamine Chemical group NC1=CC=C=C[CH]1 UKJLNMAFNRKWGR-UHFFFAOYSA-N 0.000 claims description 4
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000178 monomer Substances 0.000 description 139
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 52
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 44
- 229920005575 poly(amic acid) Polymers 0.000 description 42
- 125000000524 functional group Chemical group 0.000 description 37
- 239000010408 film Substances 0.000 description 31
- 235000010290 biphenyl Nutrition 0.000 description 27
- 239000004305 biphenyl Substances 0.000 description 27
- 239000007788 liquid Substances 0.000 description 26
- 125000003118 aryl group Chemical group 0.000 description 25
- 150000001875 compounds Chemical class 0.000 description 25
- 239000011342 resin composition Substances 0.000 description 25
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 24
- 230000000052 comparative effect Effects 0.000 description 22
- 238000000034 method Methods 0.000 description 21
- 125000004432 carbon atom Chemical group C* 0.000 description 19
- 238000006243 chemical reaction Methods 0.000 description 19
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 19
- 238000010438 heat treatment Methods 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 14
- 125000001931 aliphatic group Chemical group 0.000 description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 229910001873 dinitrogen Inorganic materials 0.000 description 12
- 125000000962 organic group Chemical group 0.000 description 12
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 12
- 239000000843 powder Substances 0.000 description 12
- 125000002723 alicyclic group Chemical group 0.000 description 11
- 239000010419 fine particle Substances 0.000 description 11
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 10
- 239000002904 solvent Substances 0.000 description 10
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- 125000000217 alkyl group Chemical group 0.000 description 8
- 125000003277 amino group Chemical group 0.000 description 8
- 239000003054 catalyst Substances 0.000 description 8
- 239000003960 organic solvent Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 8
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 7
- 239000000654 additive Substances 0.000 description 7
- 239000003795 chemical substances by application Substances 0.000 description 7
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 7
- 229910052753 mercury Inorganic materials 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000007865 diluting Methods 0.000 description 6
- 238000006116 polymerization reaction Methods 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
- 239000006087 Silane Coupling Agent Substances 0.000 description 5
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 5
- 238000002484 cyclic voltammetry Methods 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 4
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 4
- VKIRRGRTJUUZHS-UHFFFAOYSA-N cyclohexane-1,4-diamine Chemical compound NC1CCC(N)CC1 VKIRRGRTJUUZHS-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000012024 dehydrating agents Substances 0.000 description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 4
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N phosphoric acid Substances OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000007363 ring formation reaction Methods 0.000 description 4
- 150000003457 sulfones Chemical class 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 3
- HESXPOICBNWMPI-UHFFFAOYSA-N 4-[2-[4-[2-(4-aminophenyl)propan-2-yl]phenyl]propan-2-yl]aniline Chemical compound C=1C=C(C(C)(C)C=2C=CC(N)=CC=2)C=CC=1C(C)(C)C1=CC=C(N)C=C1 HESXPOICBNWMPI-UHFFFAOYSA-N 0.000 description 3
- PJWQLRKRVISYPL-UHFFFAOYSA-N 4-[4-amino-3-(trifluoromethyl)phenyl]-2-(trifluoromethyl)aniline Chemical compound C1=C(C(F)(F)F)C(N)=CC=C1C1=CC=C(N)C(C(F)(F)F)=C1 PJWQLRKRVISYPL-UHFFFAOYSA-N 0.000 description 3
- UPGRRPUXXWPEMV-UHFFFAOYSA-N 5-(2-phenylethynyl)-2-benzofuran-1,3-dione Chemical compound C=1C=C2C(=O)OC(=O)C2=CC=1C#CC1=CC=CC=C1 UPGRRPUXXWPEMV-UHFFFAOYSA-N 0.000 description 3
- QQGYZOYWNCKGEK-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)oxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 QQGYZOYWNCKGEK-UHFFFAOYSA-N 0.000 description 3
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- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- 0 C(C(C1)C1C1CC1)C1C*CC1 Chemical compound C(C(C1)C1C1CC1)C1C*CC1 0.000 description 3
- OVASAEXSPYGGES-UHFFFAOYSA-N C1C2C(C(OC3=O)=O)C3C1CC2(C1=O)CCC21CC1CC2C2C(=O)OC(=O)C12 Chemical compound C1C2C(C(OC3=O)=O)C3C1CC2(C1=O)CCC21CC1CC2C2C(=O)OC(=O)C12 OVASAEXSPYGGES-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 125000004018 acid anhydride group Chemical group 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 125000005843 halogen group Chemical group 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 3
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 2
- UIZIZIPEEWDBCL-UHFFFAOYSA-N (4-aminophenyl) 4-[4-(4-aminophenoxy)carbonylphenyl]benzoate Chemical compound C1=CC(N)=CC=C1OC(=O)C1=CC=C(C=2C=CC(=CC=2)C(=O)OC=2C=CC(N)=CC=2)C=C1 UIZIZIPEEWDBCL-UHFFFAOYSA-N 0.000 description 2
- DHKHKXVYLBGOIT-UHFFFAOYSA-N 1,1-Diethoxyethane Chemical compound CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 2
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- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- BEKFRNOZJSYWKZ-UHFFFAOYSA-N 4-[2-(4-aminophenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]aniline Chemical compound C1=CC(N)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(N)C=C1 BEKFRNOZJSYWKZ-UHFFFAOYSA-N 0.000 description 2
- HHLMWQDRYZAENA-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=C(C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)(C(F)(F)F)C(F)(F)F)C=C1 HHLMWQDRYZAENA-UHFFFAOYSA-N 0.000 description 2
- NVKGJHAQGWCWDI-UHFFFAOYSA-N 4-[4-amino-2-(trifluoromethyl)phenyl]-3-(trifluoromethyl)aniline Chemical compound FC(F)(F)C1=CC(N)=CC=C1C1=CC=C(N)C=C1C(F)(F)F NVKGJHAQGWCWDI-UHFFFAOYSA-N 0.000 description 2
- QHHKLPCQTTWFSS-UHFFFAOYSA-N 5-[2-(1,3-dioxo-2-benzofuran-5-yl)-1,1,1,3,3,3-hexafluoropropan-2-yl]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)(C(F)(F)F)C(F)(F)F)=C1 QHHKLPCQTTWFSS-UHFFFAOYSA-N 0.000 description 2
- XGZRRDYHYZLYIJ-UHFFFAOYSA-N 5-[2-(1,3-dioxo-2-benzofuran-5-yl)ethynyl]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C#CC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 XGZRRDYHYZLYIJ-UHFFFAOYSA-N 0.000 description 2
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- 229910019142 PO4 Inorganic materials 0.000 description 2
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- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
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- 150000001408 amides Chemical group 0.000 description 2
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- KZTYYGOKRVBIMI-UHFFFAOYSA-N diphenyl sulfone Chemical compound C=1C=CC=CC=1S(=O)(=O)C1=CC=CC=C1 KZTYYGOKRVBIMI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
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- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 2
- JBFHTYHTHYHCDJ-UHFFFAOYSA-N gamma-caprolactone Chemical compound CCC1CCC(=O)O1 JBFHTYHTHYHCDJ-UHFFFAOYSA-N 0.000 description 2
- 238000004050 hot filament vapor deposition Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
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Images
Classifications
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- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
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- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1218—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or structure of the substrate
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
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Definitions
- the present invention relates to a polyimide suitably used for an electronic device such as a substrate of a flexible device, for example, and further relates to a polyimide film, a laminate including the polyimide film, and an electronic device including the polyimide or the laminate.
- glass has been used as a substrate for a display such as a liquid crystal display or an organic EL display.
- a display such as a liquid crystal display or an organic EL display
- a semiconductor element such as a TFT is formed on a substrate in order to drive each pixel.
- the substrate is required to have heat resistance and dimensional stability.
- a polyimide film is expected as a substrate for a display because it is excellent in heat resistance, chemical resistance, mechanical strength, electrical characteristics, dimensional stability, and the like.
- Non-Patent Documents 1 and 2 report that positive carriers are induced by the negative charge existing at the polyimide substrate interface, which affects the TFT characteristics.
- Non-Patent Documents 1 and 2 report the influence of the polyimide interface on the TFT characteristics, but the evaluation of the interface state density at which a negative charge can specifically exist has not been performed. Moreover, there is no description about the detail of a polyimide, and since there is no data which changed the polyimide substrate and evaluated the TFT characteristic, the information of the polyimide suitable as a board
- CV characteristics capacitance-voltage characteristics
- the CV curve obtained by evaluating the voltage dependence of the capacitance of a semiconductor-insulating film-metal (electrode) capacitor may change in shape due to the presence of a level density existing at the semiconductor-insulating film interface.
- An object of the present invention is to provide a polyimide having excellent CV characteristics, particularly a film-form polyimide, a laminated substrate using the polyimide, and an electronic device such as a flexible display including them.
- the present invention relates to the following matters.
- Capacitance is measured while scanning in the negative direction from V2 to the minimum voltage V1, and means the maximum absolute value of the gradient in the normalized capacitance-voltage curve during the third positive scan, where the minimum voltage V1 is a voltage at which the capacity of only the polyimide film is observed, and the normalized capacity-voltage curve is normalized with the capacity at the lowest voltage V1 being 1.
- Item 3 The polyimide film for flexible electronic devices according to Item 1 or 2, wherein the amine end group concentration in the whole polyimide calculated from the charging ratio is 29 ⁇ mol / g or less.
- a flexible electronic device comprising the polyimide film according to claims 1 to 3. 10. The flexible electronic device according to claim 9, wherein the polyimide film is the polyimide film according to claim 8.
- a manufacturing method comprising a step of applying a polyimide precursor solution or a polyimide precursor solution composition on a carrier substrate and imidizing to form a laminate having the carrier substrate and a polyimide film.
- the maximum gradient is 0.005 / V or more.
- the maximum gradient is the maximum DC voltage applied to the polyimide film with respect to the silicon wafer between the minimum voltage V1 and the maximum voltage V2, the forward scan from the minimum voltage V1 to the maximum voltage V2, and the maximum Capacitance measurement is performed while scanning in the negative direction from the voltage V2 to the lowest voltage V1, and means the maximum absolute value of the gradient in the normalized capacitance-voltage curve during the third positive scan,
- the minimum voltage V1 is a voltage at which the capacity of only the polyimide film is observed, and the normalized capacity-voltage curve is normalized with the capacity at the minimum voltage V1 being 1.
- a polyimide precursor comprising a repeating
- Item 5 The polyimide precursor according to Item 4, wherein the diamine component (B) contains the diamine (B-1) and the diamine (B-2) in a proportion of 40 mol% or more.
- a method for producing a polyimide solution comprising imidizing the polyimide precursor solution according to item 8 above.
- a laminate having a substrate and the polyimide film of Item 11 above.
- An electronic device comprising the polyimide film of item 11 above, the laminate of item 12 above or the substrate of item 13 above.
- An electronic device including a semiconductor layer formed on the polyimide film of item 11 above, the laminate of item 12 above or the substrate of item 13 above.
- a polyimide having excellent CV characteristics particularly a polyimide in a film form, a laminated substrate using the polyimide, and an electronic device such as a flexible display including the polyimide, particularly a flexible electronic device. it can.
- the polyimide film of the present invention has excellent CV characteristics, even if it is used as a substrate for a semiconductor element such as a TFT, for example, there is little fear of affecting the performance of the semiconductor element. There is little concern about changes or deterioration of device characteristics such as switching of switching characteristics due to.
- FIG. 1 shows a schematic diagram of a CV measurement system.
- a polyimide film 2 is formed on the surface of the silicon wafer 1 to obtain a measurement sample.
- Mercury electrode 3 is formed by bringing mercury into contact with a predetermined area of the surface of polyimide film 2.
- a DC voltage is applied between the silicon wafer 1 (ground potential) and the mercury electrode 3 by a DC power supply 4, and a capacitance (capacitance) at the DC voltage is applied by an AC power supply 5 with an AC voltage having a predetermined frequency and amplitude. taking measurement.
- the DC voltage is scanned between the minimum voltage V1 and the maximum voltage V2 in the positive direction scanning (increasing the DC voltage) and negative direction scanning (decreasing the DC voltage), and during that time, the capacitance is measured.
- a “maximum gradient” to be described later is obtained based on the CV measurement data at the time of the first forward scanning.
- the voltage is set to -40V.
- a lower voltage voltage having a large negative absolute value
- the maximum voltage V2 in the DC voltage range is sufficiently higher than a voltage at which a maximum gradient, which will be described later, is observed, and is sufficiently high so that the maximum gradient is observed even in scanning in the negative direction.
- both the absolute value of the minimum voltage V1 and the maximum voltage V2 are set broadly within the range that is equal to or lower than the dielectric breakdown voltage of the polyimide film and the capability of the apparatus.
- the scanning range is ⁇ 40V to 40V.
- the DC voltage scanning speed is, for example, in the range of 10 mV / sec to 100 V / sec, and can be selected in consideration of the purpose of measurement. In practice, reproducibility is good when the scanning speed is adopted from a range of 0.05 V / sec to 2 V / sec, for example, a range of 0.1 V / sec to 0.5 V / sec. In the examples of the present invention, 0.25 V / sec and 0.18 V / sec were employed. As will be described later, it has been confirmed that there is no difference due to the difference between the two scanning speeds.
- the AC voltage (sinusoidal wave) for measuring the capacitance (capacitance) can be changed depending on the use of the polyimide film (that is, according to the frequency range of interest), but for display applications, for example, 100 Hz to 1 MHz, particularly 500 Hz to 10 kHz. Measurements can be made at a range of frequencies. In the embodiment of the present invention, 2.5 kHz was used.
- the amplitude may be any voltage as long as it is sufficiently smaller than the DC voltage, and can be selected as appropriate. In the embodiment of the present invention, the amplitude is set to 0.1V.
- the capacitance value at the lowest voltage V1 is set to 1, and the standardized capacity-voltage curve (standardized CV curve) obtained by standardizing the measured CV curve is used to calculate polyimide.
- Evaluate the nature of This is to evaluate factors that affect the semiconductor, such as interface states, except for differences in capacitance values due to differences in film thickness errors and dielectric constants of polyimide films.
- the film thickness of the polyimide film to be measured in order to minimize the evaluation error, it is preferable to target a thickness of 0.65 to 0.85 ⁇ m, particularly 0.75 ⁇ m in the evaluation of the present application.
- first decreasing region is understood as a process in which the vicinity of the interface in the silicon wafer changes from the majority carrier accumulation layer to the depletion layer and the depletion layer expands.
- maximum gradient negative and maximum absolute value
- the “maximum slope” can be obtained as the absolute value of the apex of the negative peak appearing in the differential curve of the normalized CV curve.
- the polyimide of the present invention has a “maximum gradient” of 0.005 / V or more obtained from the above CV measurement on a film having a film thickness of 0.75 ⁇ m formed on a silicon wafer having a resistivity of 4 ⁇ cm. Yes, preferably over 0.007 / V.
- the maximum gradient shows a larger value (absolute value is larger) as the interface state density is smaller.
- the surface state density of the polyimide for example, composition, functional groups (particularly surface functional groups), presence of impurities or additives, etc.
- the polyimide surface at the interface with the semiconductor is considered.
- the state is in a very favorable state, it can be estimated that it has a large “maximum slope”.
- the polyimide of the present invention is used in an electronic device such as a display, the adverse effect on the operation and durability of the electronic device is small.
- polyimide precursor The chemical structure of the polyimide of the present invention or its precursor (polyimide precursor) is not particularly limited as long as it satisfies the CV characteristics, and the chemical structure may be appropriately selected according to the function to be imparted.
- the polyimide precursor has the following general formula I:
- X 1 is a tetravalent aliphatic group or aromatic group
- Y 1 is a divalent aliphatic group or aromatic group
- R 1 and R 2 are each independently hydrogen.
- R 1 and R 2 are hydrogen atoms.
- a polymer in which imidization has partially progressed that is, a polymer containing a repeating unit in which at least one of the two amide structures in Formula I is imidized is also referred to as “polyimide precursor” and “polyamic acid” (residual R 1 and R 2 are hydrogen atoms).
- polyimide has the following general formula II:
- X 1 is a tetravalent aliphatic group or an aromatic group
- Y 1 is a divalent aliphatic group or an aromatic group. It has the repeating unit represented by these.
- the tetracarboxylic acid component is a tetracarboxylic acid, tetracarboxylic dianhydride, tetracarboxylic acid silyl ester, tetracarboxylic acid ester, tetracarboxylic acid chloride, or the like used as a raw material for producing polyimide.
- it is easy to use tetracarboxylic dianhydride in production and in the following description, an example using tetracarboxylic dianhydride as a tetracarboxylic acid component will be described.
- the diamine component is a diamine compound having two amino groups (—NH 2 ) used as a raw material for producing polyimide.
- the polyimide film means both a film formed on a substrate and in a laminated state, and a film that does not have a substrate that supports the film (including a self-supporting film).
- the polyimide of the present invention is preferably in the form of a film when used as a substrate.
- the polyimide of the present invention may be in the form of a layer that exists discretely on a support substrate or a layer formed of a different material.
- the tetravalent group having an aromatic ring of X 1 is preferably a tetravalent group having an aromatic ring having 6 to 40 carbon atoms.
- Examples of the tetravalent group having an aromatic ring include the following.
- Z 1 is a direct bond or the following divalent group:
- Z2 is a divalent organic group
- Z3 and Z4 are each independently an amide bond, an ester bond and a carbonyl bond
- Z5 is an organic group containing an aromatic ring.
- Z 2 include an aliphatic hydrocarbon group having 2 to 24 carbon atoms and an aromatic hydrocarbon group having 6 to 24 carbon atoms.
- Z 5 include aromatic hydrocarbon groups having 6 to 24 carbon atoms.
- the polyimide material obtained can have both high heat resistance and high transparency.
- Z 1 is a direct bond or a hexafluoroisopropylidene bond.
- Z 1 is more preferably a direct bond.
- Z 1 is represented by the following formula (3A):
- Z 11 and Z 12 are each independently preferably the same, a single bond or a divalent organic group.
- Z 11 and Z 12 an organic group containing an aromatic ring is preferable.
- Z 13 and Z 14 are each independently a single bond, —COO—, —OCO— or —O—, and when Z 14 is bonded to a fluorenyl group, Z 13 is —COO—, —OCO— Or —O— and Z 14 is preferably a single bond;
- R 91 is an alkyl or phenyl group having 1 to 4 carbon atoms, preferably methyl, and n is an integer of 0 to 4, preferably 1)
- n is an integer of 0 to 4, preferably 1
- Examples of the tetracarboxylic acid component giving a repeating unit of the general formula (II) in which X 1 is a tetravalent group having an aromatic ring include 2,2-bis (3,4-dicarboxyphenyl) hexafluoropropane.
- tetracarboxylic acid component that gives a repeating unit of the general formula (II) in which X 1 is a tetravalent group having an aromatic ring containing a fluorine atom
- X 1 is a tetravalent group having an aromatic ring containing a fluorine atom
- Phenyl) hexafluoropropane dianhydride 2,2-bis (3,4-dicarboxy).
- Phenyl) hexafluoropropane dianhydride as a preferred compound, (9H-fluorene-9,9-diyl) bis (2-methyl-4,1-phenylene) bis (1,3-dioxo-1,3-dihydroisobenzofuran-5-carboxylate) Is mentioned.
- a tetracarboxylic acid component may be used independently and can also be used in combination of multiple types.
- the tetravalent group having an alicyclic structure of X 1 is preferably a tetravalent group having an alicyclic structure having 4 to 40 carbon atoms, more preferably at least one aliphatic 4- to 12-membered ring, more preferably an aliphatic group. More preferably, it has a 4-membered ring or an aliphatic 6-membered ring. The following are mentioned as a tetravalent group which has a preferable aliphatic 4-membered ring or an aliphatic 6-membered ring.
- R 31 to R 38 are each independently a direct bond or a divalent organic group.
- R 41 to R 47 are each independently represented by the formula: —CH 2 —, —CH ⁇ CH—, This represents one selected from the group consisting of groups represented by —CH 2 CH 2 —, —O—, and —S—, and R 48 is an organic group containing an aromatic ring or an alicyclic structure.
- R 31 , R 32 , R 33 , R 34 , R 35 , R 36 , R 37 , R 38 are specifically a direct bond, an aliphatic hydrocarbon group having 1 to 6 carbon atoms, or Examples include an oxygen atom (—O—), a sulfur atom (—S—), a carbonyl bond, an ester bond, and an amide bond.
- Examples of the organic group containing an aromatic ring as R 48 include the following.
- W 1 is a direct bond or a divalent organic group
- n 11 to n 13 each independently represents an integer of 0 to 4
- R 51 , R 52 and R 53 are each independently And an alkyl group having 1 to 6 carbon atoms, a halogen group, a hydroxyl group, a carboxyl group, or a trifluoromethyl group.
- W 1 examples include a direct bond, a divalent group represented by the following formula (5), and a divalent group represented by the following formula (6).
- R 61 to R 68 in the formula (6) each independently represent a direct bond or a divalent group represented by the formula (5).
- the polyimide obtained can have both high heat resistance, high transparency, and a low linear thermal expansion coefficient.
- Examples of the tetracarboxylic acid component that gives the repeating unit of the formula (II) in which X 1 is a tetravalent group having an alicyclic structure include 1,2,3,4-cyclobutanetetracarboxylic acid, isopropylidenediphenoxybis Phthalic acid, cyclohexane-1,2,4,5-tetracarboxylic acid, [1,1'-bi (cyclohexane)]-3,3 ', 4,4'-tetracarboxylic acid, [1,1'-bi (Cyclohexane)]-2,3,3 ′, 4′-tetracarboxylic acid, [1,1′-bi (cyclohexane)]-2,2 ′, 3,3′-tetracarboxylic acid, 4,4′- Methylenebis (cyclohexane-1,2-dicarboxylic acid), 4,4 '-(propane-2,2-diyl) bis (cyclohe
- the divalent group having an aromatic ring of Y 1 is preferably a divalent group having an aromatic ring having 6 to 40 carbon atoms, more preferably 6 to 20 carbon atoms.
- Examples of the divalent group having an aromatic ring include the following.
- W 1 is a direct bond or a divalent organic group
- n 11 to n 13 each independently represents an integer of 0 to 4
- R 51 , R 52 and R 53 are each independently And an alkyl group having 1 to 6 carbon atoms, a halogen group, a hydroxyl group, a carboxyl group, or a trifluoromethyl group.
- W 1 examples include a direct bond, a divalent group represented by the following formula (5), and a divalent group represented by the following formula (6).
- R 61 to R 68 in the formula (6) each independently represent a direct bond or a divalent group represented by the formula (5).
- W 1 is a direct bond or a formula: —NHCO—, —CONH—, —COO—, —OCO—. It is especially preferable that it is 1 type selected from the group which consists of group represented by these. W 1 is a group in which R 61 to R 68 are a direct bond, or one selected from the group consisting of groups represented by the formula: —NHCO—, —CONH—, —COO—, —OCO—. It is also particularly preferable that it is any of the divalent groups represented by the formula (6).
- W 1 represents the following formula (3B):
- Z 11 and Z 12 are each independently preferably the same, a single bond or a divalent organic group.
- Z 11 and Z 12 an organic group containing an aromatic ring is preferable.
- Z 13 and Z 14 are each independently a single bond, —COO—, —OCO— or —O—, and when Z 14 is bonded to a fluorenyl group, Z 13 is —COO—, —OCO— Or —O— and Z 14 is preferably a single bond;
- R 91 is an alkyl group having 1 to 4 carbon atoms or a phenyl group, preferably phenyl, and n is an integer of 0 to 4, preferably 1)
- n is an integer of 0 to 4, preferably 1
- a compound in which W 1 is a phenylene group in the above formula (4), that is, a terphenyldiamine compound is particularly preferable.
- Another preferred group is a compound in which, in the above formula (4), W 1 is the structure of one initial phenyl ring in formula (6), and R 61 and R 62 are 2,2-propylidene groups.
- W 1 represents the following formula (3B2):
- Examples of the diamine component that gives the repeating unit of the general formula (II) in which Y 1 is a divalent group having an aromatic ring include, for example, p-phenylenediamine, m-phenylenediamine, benzidine, 3,3′-diamino- Biphenyl, 2,2′-bis (trifluoromethyl) benzidine, 3,3′-bis (trifluoromethyl) benzidine, m-tolidine, 4,4′-diaminobenzanilide, 3,4′-diaminobenzanilide, N, N′-bis (4-aminophenyl) terephthalamide, N, N′-p-phenylenebis (p-aminobenzamide), 4-aminophenoxy-4-diaminobenzoate, bis (4-aminophenyl) terephthalate, Biphenyl-4,4′-dicarboxylic acid bis (4-aminophenyl) ester, p-pheny
- Examples of the diamine component that gives the repeating unit of the general formula (II) in which Y 1 is a divalent group having an aromatic ring containing a fluorine atom include 2,2′-bis (trifluoromethyl) benzidine, 3 , 3′-bis (trifluoromethyl) benzidine, 2,2-bis [4- (4-aminophenoxy) phenyl] hexafluoropropane, 2,2-bis (4-aminophenyl) hexafluoropropane, 2,2 And '-bis (3-amino-4-hydroxyphenyl) hexafluoropropane.
- diamine compound 4,4 ′-(((9H-fluorene-9,9-diyl) bis ([1,1′-biphenyl] -5,2-diyl)) bis (oxy)) diamine, [1,1 ′: 4 ′, 1 ′′ -terphenyl] -4,4 ′′ -diamine, 4,4 ′-([1,1′-binaphthalene] -2,2′-diylbis (oxy)) diamine
- a diamine component may be used independently and can also be used in combination of multiple types.
- the divalent group having an alicyclic structure of Y 1 is preferably a divalent group having an alicyclic structure having 4 to 40 carbon atoms, more preferably at least one aliphatic 4- to 12-membered ring, more preferably an aliphatic group. More preferably, it has a 6-membered ring.
- divalent group having an alicyclic structure examples include the following.
- V 1 and V 2 are each independently a direct bond or a divalent organic group
- n 21 to n 26 each independently represents an integer of 0 to 4
- R 81 to R 86 Are each independently an alkyl group having 1 to 6 carbon atoms, a halogen group, a hydroxyl group, a carboxyl group, or a trifluoromethyl group
- R 91 , R 92 , and R 93 are each independently represented by the formula: —CH 2 —, (This is one selected from the group consisting of groups represented by —CH ⁇ CH—, —CH 2 CH 2 —, —O—, and —S—.)
- V 1 and V 2 include a direct bond and a divalent group represented by the above formula (5).
- the divalent group having an alicyclic structure the following are particularly preferable because the polyimide obtained can have both high heat resistance and low linear thermal expansion coefficient.
- divalent groups having an alicyclic structure the following are preferable.
- Examples of the diamine component that gives the repeating unit of the general formula (II) in which Y 1 is a divalent group having an alicyclic structure include 1,4-diaminocyclohexane, 1,4-diamino-2-methylcyclohexane, and the like.
- the carboxylic acid monoanhydride is particularly preferably a dicarboxylic acid monoanhydride, which may be an aromatic carboxylic acid monoanhydride or an aliphatic carboxylic acid monoanhydride.
- Aromatic carboxylic acid monoanhydrides are particularly preferred.
- the aromatic carboxylic acid monoanhydride preferably has an aromatic ring having 6 to 30 carbon atoms, more preferably has an aromatic ring having 6 to 15 carbon atoms, and has an aromatic ring having 6 to 10 carbon atoms. Further preferred.
- carboxylic acid monoanhydrides examples include phthalic anhydride, 2,3-benzophenone dicarboxylic acid anhydride, 3,4-benzophenone dicarboxylic acid anhydride, 1,2-naphthalenedicarboxylic acid anhydride, and 2,3-naphthalenedicarboxylic acid.
- Aromatic carboxylic acid monoester such as acid anhydride, 1,8-naphthalenedicarboxylic acid anhydride, 1,2-anthracene dicarboxylic acid anhydride, 2,3-anthracene dicarboxylic acid anhydride, 1,9-anthracene dicarboxylic acid anhydride Mention may be made of anhydrides and alicyclic carboxylic acid monoanhydrides such as maleic anhydride, succinic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, itaconic anhydride, trimellitic anhydride. Of these, phthalic anhydride is preferred.
- Formula (2) 0.5 ⁇ (Z / 2) / (Y ⁇ X) ⁇ 1.05
- X represents the number of moles of the tetracarboxylic acid component
- Y represents the number of moles of the diamine component
- Z represents the number of moles of the carboxylic acid monoanhydride.
- X / Y When X / Y is 0.97 or more, the molecular weight of the polyimide precursor (especially polyamic acid) is increased, and the strength and heat resistance of the resulting polyimide film are improved.
- X / Y is preferably 0.98 or more.
- X / Y is less than 1.00, the diamine component is excessive with respect to the tetracarboxylic acid component.
- the amino group which can be end-capped with carboxylic acid monoanhydride can be formed.
- X / Y is preferably 0.99 or less.
- (Z / 2) / (YX) represents a molar ratio between the carboxylic acid monoanhydride and the end-capping amino group.
- (Z / 2) / (YX) is preferably closer to 1.
- (Z / 2) / (YX) is preferably 0.6 or more, more preferably 0.7 or more.
- (Z / 2) / (YX) is 1.05 or less, the amount of free carboxylic monoanhydride can be reduced, and the strength and CV characteristics of the resulting polyimide film can be improved.
- (Z / 2) / (YX) is preferably 1.03 or less, more preferably 1.01 or less.
- the weight fraction of the imide group (—C (O) NC (O) —) in the polyimide repeating unit is preferably less than 38.3 wt%. . In a specific embodiment, it is more preferably 30% by weight or less.
- the polyimide may be a copolymer, that is, at least one of the tetracarboxylic acid component and the diamine component that give the polyimide may contain two or more kinds of compounds.
- the weight fraction of imide groups is calculated by a weighted average based on the monomer charge ratio. It calculates similarly about the weight fraction of groups other than an imide group.
- the polyimide when referring to the weight fraction of a specific group, the polyimide includes both the case of being a homopolymer and the case of being a copolymer.
- the functional group weight fraction in the polyimide repeating unit is small.
- the “functional group in the repeating unit” defined herein is a part other than the aromatic ring and the saturated alkyl chain in the polyimide repeating unit, and includes —O— (ether bond), —CO— (carbonyl group), —COO. -(Ester), -SO 2- and the like. F and Cl replacing hydrogen in the aromatic ring and saturated alkyl chain are not included in the “functional group in the repeating unit”.
- the combined imide group and “functional group in the repeating unit” are also preferably less than 38.3 wt% in the polyimide repeating unit, more preferably 30 wt% or less, and even more preferably 25 wt% or less.
- the content of the functional group other than the above is small, regardless of whether it is present in the polyimide repeating unit, is present at the terminal, or is a different compound. Is also very preferable.
- undesirable functional groups include Si-containing groups (siloxane bonds, silyl groups, etc.).
- the tetracarboxylic acid component forming the repeating unit contains a tetracarboxylic dianhydride having a fluorene structure in the molecule and a functional group other than the two acid anhydride groups (the above “in the repeating unit”). It is preferable to include a compound selected from tetracarboxylic dianhydrides having three or more benzene rings per group) corresponding to “functional group of”. In addition to the two acid anhydride groups, a compound having no functional group corresponding to “functional group in repeating unit” is also included in the preferable compound. In this case, the number of benzene rings is preferably 2 or more. Yes, more preferably 3 or more.
- the diamine component forming the repeating unit includes a diamine having a fluorene structure in the molecule, and a functional group other than two amine groups (a group corresponding to the above “functional group in the repeating unit”). It is preferable to include a compound selected from diamines having three or more benzene rings per one. In addition to the two amine groups, a compound having no functional group corresponding to the “functional group in the repeating unit” is also included in the preferred compound. In this case, the number of benzene rings is preferably 2 or more, More preferably, it is 3 or more.
- each of the tetracarboxylic acid component and the diamine component forming the repeating unit is a compound having the above-described conditions, that is, a compound having a fluorene structure in the molecule, and one “functional group in the repeating unit”.
- terminal functional group amount refers to the ratio of the tetracarboxylic acid component and the diamine component used in the production of polyimide (when producing polyamic acid), the purity of each component, the added amount of the end-capping agent, and the reactive additive It is calculated based on the amount of addition.
- the terminal functional group amount is calculated from the charged ratio of the tetracarboxylic acid component and the diamine component as follows.
- the formula weight of the repeating unit is a and the molecular weight of one terminal diamine is a b
- the formula weight of the polyimide having a polymerization degree n is (a * n + a b ). 2 / (a * n + a b ) [unit: mol / g] Is required. In the examples of the present application, it is expressed in ⁇ mol / g.
- the amount of terminal amine groups is preferably 30 ⁇ mol / g or less, more preferably 20 ⁇ mol / g or less, and even more preferably 10.5 ⁇ mol / g or less.
- the total amount of functional groups at the terminal is preferably 30 ⁇ mol / g or less, more preferably 20 ⁇ mol / g or less, and further preferably 10.5 ⁇ mol / g or less.
- the combined weight fraction of the imide group and the “functional group in the repeating unit” is preferably 30% by weight or less and the “terminal functional group amount” is preferably 20 ⁇ mol / g or less.
- the combined weight fraction of the imide group and the “functional group in the repeating unit” is preferably 40% by weight or less and the “terminal functional group amount” is preferably 10.5 ⁇ mol / g or less.
- it is very preferable that the weight fraction of the imide group and the “functional group in the repeating unit” is 30% by weight or less and the “terminal functional group amount” is 10.5 ⁇ mol / g or less.
- Control of the functional groups (imido group, functional group in repeating unit, terminal functional group) in polyimide as described above is an element to be considered in order to obtain a polyimide having the CV characteristics of the present invention.
- New polyimide precursor and polyimide A tetracarboxylic acid component (A) containing at least 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride (s-BPDA); (B-1) 1,4-diaminobenzene, [1,1 ′: 4 ′, 1 ′′ -terphenyl] -4,4 ′′ -diamine, and 1,4-bis [2- (4-aminophenyl) At least one diamine selected from -2-propyl] benzene, and (B-2) 9,9-bis (4-aminophenyl) fluorene, 4,4 ′-(((9H-fluorene-9,9-diyl ) Bis ([1,1′-biphenyl] -5,2-diyl)) bis (oxy)) diamine, and 4,4
- the tetracarboxylic acid component (A) preferably contains 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride (s-BPDA) in a proportion of 40 mol% or more.
- s-BPDA 4,4′-biphenyltetracarboxylic dianhydride
- 9H-fluorene-9,9-diyl) bis (2-methyl-4,1-phenylene) bis (1,3-dioxo-1, 3-dihydroisobenzofuran-5-carboxylate) is also preferred.
- the tetracarboxylic dianhydrides listed above can be contained.
- a tetracarboxylic dianhydride having a fluorene structure in the molecule and three functional groups other than two acid anhydride groups have three benzene rings.
- the compound chosen from the tetracarboxylic dianhydride which has one or more can be included.
- tetracarboxylic dianhydride is preferably 30 mol% or less, more preferably 20 mol% or less, and may be 0 mol%.
- the diamine component (B) preferably contains the diamine (B-1) and the diamine (B-2) in a proportion of 40 mol% or more.
- the diamine compounds listed above can be contained as the diamine component (B).
- a diamine having a fluorene structure in the molecule and a diamine having three or more benzene rings for one functional group other than two amine groups (a group corresponding to a “functional group in a repeating unit”) are selected.
- Compounds can be included, and preferred compounds include 1,1 ′: 4 ′, 1 ′′: 4 ′′, 1 ′′ ′-quarterphenyl-4,4 ′′ ′-diamine and the like.
- the amount of the diamine compound other than (B-1) diamine and (B-2) diamine is preferably 30 mol% or less, more preferably 20 mol% or less, and may be 0 mol%.
- the total of the proportions of the repeating unit derived from the diamine of s-BPDA and (B-1) and the repeating unit derived from the diamine of s-BPDA and (B-2) in the repeating unit of the polyimide precursor or polyimide is 40 mol% or more is preferable.
- This new polyimide has excellent CV characteristics.
- the weight fraction of the imide group in the polyimide repeating unit, the weight fraction of the imide group combined with the “functional group in the repeating unit”, and the “terminal functional group amount” It is preferable to select the combination compound, the charged tetracarboxylic dianhydride / diamine ratio, and the like so that at least one, preferably two, and more preferably three are in the above-described range (particularly, a preferable range).
- a method for producing polyimide particularly a method for producing a polyimide film via a laminate in which a polyimide film is formed on a carrier substrate, will be described below.
- a polyimide precursor (especially polyamic acid) solution, or a polyimide precursor solution composition in which an imidization catalyst, a dehydrating agent, inorganic fine particles, and the like are selected and added to a polyimide precursor solution as necessary is provided on a carrier substrate.
- a method of chemically dehydrating and cyclizing and removing the solvent by heating to form a polyimide film by imidization (chemical imidization); (3) When the polyimide is soluble in an organic solvent, the polyimide solution composition added by selecting additives such as inorganic fine particles as necessary is cast on a carrier substrate, and the solvent is removed by heating to a predetermined temperature.
- the method of forming a polyimide film by heating, etc. are mentioned.
- a polyimide precursor solution or a polyimide solution is obtained by polymerizing approximately equimolar tetracarboxylic acid components and diamine components in an organic solvent. Alternatively, it combines the two or more polyimide precursors in which either component is excessive, after combining each polyimide precursor solution may be mixed under reaction conditions.
- the organic solvent is not particularly limited.
- alcohol solvents such as methanol and ethanol, phenol, o-cresol, butyl acetate, ethyl acetate, isobutyl acetate, propylene glycol methyl acetate, ethyl cellosolve, butyl cellosolve, 2-methyl Cellosolve acetate, ethyl cellosolve acetate, butyl cellosolve acetate, tetrahydrofuran, dimethoxyethane, diethoxyethane, dibutyl ether, diethylene glycol dimethyl ether, methyl isobutyl ketone, diisobutyl ketone, cyclopentanone, cyclohexanone, methyl ethyl ketone, acetone, butanol, ethanol, xylene, Toluene, chlorobenzene, N-methylcaprolactam, hexamethylphosphorotriamide, bis
- the concentration of all monomers (substantially equal to the solid content concentration of the polyimide precursor solution or the polyimide solution) in the organic solvent depends on the purpose of use and production What is necessary is just to select suitably according to the objective to do.
- the solid content concentration of the obtained polyimide precursor solution or polyimide solution is not particularly limited, but is preferably 5% by mass to 45% by mass with respect to the total amount of the polyimide precursor or polyimide and the solvent.
- the amount is preferably 7% by mass to 40% by mass, more preferably 9% by mass to 30% by mass.
- the solution viscosity at 30 ° C. of the polyimide precursor solution or polyimide solution is not particularly limited, but is preferably 1000 Pa ⁇ s or less, more preferably 0.1 to 500 Pa ⁇ s, and still more preferably 0.1 to 300 Pa ⁇ s. Particularly preferred is 0.1 to 200 Pa ⁇ s for handling.
- the solution viscosity exceeds 1000 Pa ⁇ s, fluidity is lost, and uniform application to a carrier substrate such as metal or glass may be difficult, and when it is lower than 0.1 Pa ⁇ s, metal or glass Such as dripping or repelling may occur during application to a carrier substrate, and it may be difficult to obtain a polyimide film having high characteristics.
- the polymerization reaction of the tetracarboxylic acid component and the diamine component is carried out by, for example, substantially equimolar or a little of either component (acid component or diamine component).
- the polyimide precursor solution can be obtained by mixing in an excess and reacting at a reaction temperature of 100 ° C. or lower, preferably 80 ° C. or lower for about 0.2 to 60 hours.
- the polymerization reaction of the tetracarboxylic acid component and the diamine component described above is carried out by, for example, substantially equimolar or each component (acid component or diamine component) being slightly excessive.
- the polyimide solution can be obtained by a known method, for example, by reacting at a reaction temperature of 140 ° C. or higher, preferably 160 ° C. or higher (preferably 250 ° C. or lower, more preferably 230 ° C. or lower) for about 1 to 60 hours. It can implement by and can obtain a polyimide solution.
- a carboxylic acid monoanhydride particularly a dicarboxylic acid monoanhydride
- a tetracarboxylic acid component and a diamine component are preferably used in a molar ratio that satisfies the above-described formula (1).
- the method including the second step of sealing the terminal of the polyimide precursor (especially polyamic acid) by adding and reacting with is preferable.
- the first step is performed at a relatively low temperature of, for example, 100 ° C. or less, preferably 80 ° C. or less in order to suppress the imidization reaction.
- the reaction temperature is usually 25 ° C. to 100 ° C., preferably 40 ° C. to 80 ° C., more preferably 50 ° C. to 80 ° C.
- the reaction time is usually about 0.1 to 24 hours. It is preferably about 2 to 12 hours.
- the reaction can be performed in an air atmosphere, but is usually performed in an inert gas atmosphere, preferably in a nitrogen gas atmosphere.
- the reaction temperature may be appropriately set, but from the viewpoint of reliably sealing the end of the polyimide precursor, it is preferably 25 ° C. to 70 ° C., more preferably 25 ° C. to 60 ° C., and still more preferably 25 ° C to 50 ° C.
- the reaction time is usually about 0.1 to 24 hours.
- the polyimide precursor solution or polyimide solution thus obtained can be used for the production of a polyimide film as it is, or if necessary, by removing the organic solvent or newly adding an organic solvent.
- an imidization catalyst In the polyimide precursor solution, an imidization catalyst, an organic phosphorus-containing compound, inorganic fine particles, and the like may be added as necessary if thermal imidization.
- a cyclization catalyst, a dehydrating agent, inorganic fine particles, and the like may be added to the polyimide precursor solution as necessary if chemical imidization. If necessary, inorganic fine particles and the like may be added to the polyimide solution.
- the imidization catalyst examples include a substituted or unsubstituted nitrogen-containing heterocyclic compound, an N-oxide compound of the nitrogen-containing heterocyclic compound, a substituted or unsubstituted amino acid compound, an aromatic hydrocarbon compound having a hydroxyl group, or an aromatic heterocyclic compound.
- Cyclic compounds such as 1,2-dimethylimidazole, N-methylimidazole, N-benzyl-2-methylimidazole, 2-methylimidazole, 2-ethyl-4-methylimidazole, 5-methylbenzimidazole, etc.
- Alkylimidazole such as N-benzyl-2-methylimidazole, phenylimidazole such as 2-phenylimidazole, isoquinoline, 3,5-dimethylpyridine, 3,4-dimethylpyridine, 2,5-dimethylpyridine, 2, 4-dimethylpyridine
- 4-n-propyl-substituted pyridines such as pyridine can be preferably used.
- the amount of the imidization catalyst used is preferably about 0.01 to 2 times equivalent, particularly about 0.02 to 1 time equivalent to the amic acid unit of the polyamic acid.
- organic phosphorus-containing compounds examples include monocaproyl phosphate, monooctyl phosphate, monolauryl phosphate, monomyristyl phosphate, monocetyl phosphate, monostearyl phosphate, triethylene glycol monotridecyl Phosphoric monoester of ether, phosphoric monoester of tetraethylene glycol monolauryl ether, phosphoric monoester of diethylene glycol monostearyl ether, dicaproyl phosphate, dioctyl phosphate, dicapryl phosphate, dilauryl phosphate, dimyristyl phosphate Acid esters, dicetyl phosphates, distearyl phosphates, tetraethylene glycol mononeopentyl ether phosphate diesters, Phosphoric acid diester of lenglycol monotridecyl ether, phosphoric acid diester of tetraethylene glycol monolauryl ether, phosphoric
- esters and amine salts of these phosphate esters examples include esters and amine salts of these phosphate esters.
- amine ammonia, monomethylamine, monoethylamine, monopropylamine, monobutylamine, dimethylamine, diethylamine, dipropylamine, dibutylamine, trimethylamine, triethylamine, tripropylamine, tributylamine, monoethanolamine, diethanolamine, triethanolamine Etc.
- Cyclization catalysts include aliphatic tertiary amines such as trimethylamine and triethylenediamine, aromatic tertiary amines such as dimethylaniline, and heterocyclic tertiary amines such as isoquinoline, pyridine, ⁇ -picoline and ⁇ -picoline. Etc.
- dehydrating agent examples include aliphatic carboxylic acid anhydrides such as acetic anhydride, propionic anhydride, and butyric anhydride, and aromatic carboxylic acid anhydrides such as benzoic anhydride.
- Inorganic fine particles include fine particle titanium dioxide powder, silicon dioxide (silica) powder, magnesium oxide powder, aluminum oxide (alumina) powder, inorganic oxide powder such as zinc oxide powder, fine particle silicon nitride powder, and titanium nitride powder.
- Inorganic nitride powder such as silicon carbide powder, inorganic carbide powder such as silicon carbide powder, and inorganic salt powder such as particulate calcium carbonate powder, calcium sulfate powder, and barium sulfate powder.
- These inorganic fine particles may be used in combination of two or more. In order to uniformly disperse these inorganic fine particles, a means known per se can be applied.
- the polyimide precursor solution or the polyimide solution preferably does not contain a silane coupling agent such as alkoxysilane.
- a silane coupling agent such as alkoxysilane.
- the silane coupling agent may bleed out. This causes problems such as a decrease in the CV characteristics of the polyimide film, a further decrease in adhesive strength, and swelling of the laminate.
- a silane coupling agent is added to or reacted with the polyimide precursor solution, there is a problem that the viscosity stability of the polyimide precursor solution is lowered. In order to avoid such a problem, it is preferable not to use a silane coupling agent.
- a polyimide precursor solution or a polyimide solution (including a composition solution containing an additive if necessary) is cast on a carrier substrate, and imidization and desolvation by heat treatment (
- a polyimide solution a polyimide film is formed by mainly removing the solvent, and a laminate of the carrier substrate and the polyimide film is obtained.
- metal substrates such as glass substrates, such as soda-lime glass, borosilicate glass, an alkali free glass, and iron, stainless steel, and copper, are used.
- the method for casting the polyimide precursor solution and the polyimide solution onto the carrier substrate is not particularly limited, and examples thereof include conventionally known methods such as a spin coating method, a screen printing method, a bar coater method, and an electrodeposition method.
- the heat treatment conditions in the case of using the polyimide precursor solution are not particularly limited. For example, after drying in a temperature range of 50 ° C. to 150 ° C., the maximum heating temperature is, for example, 150 ° C. to 600 ° C., preferably 200 ° C. It is preferable to perform the treatment at ⁇ 550 ° C., more preferably at 250 ° C. to 500 ° C.
- the heat treatment conditions when the polyimide solution is used are not particularly limited, but the maximum heating temperature is, for example, 100 ° C. to 600 ° C., preferably 150 ° C. or higher, more preferably 200 ° C. or higher, and preferably 500 ° C. Below, it is 450 degrees C or less more preferably.
- the thickness of the polyimide film is preferably 1 ⁇ m or more. When the thickness is less than 1 ⁇ m, the polyimide film cannot maintain sufficient mechanical strength. For example, when used as a flexible device substrate, the polyimide film cannot withstand stress and may be destroyed. Moreover, it is preferable that the thickness of a polyimide film is 20 micrometers or less. If the thickness of the polyimide film exceeds 20 ⁇ m, it may be difficult to reduce the thickness of the flexible device. In order to make the film thinner while maintaining sufficient resistance as a flexible device, the thickness of the polyimide film is more preferably 2 to 10 ⁇ m.
- the obtained polyimide film is firmly laminated on a carrier substrate such as a glass substrate.
- the peel strength between a carrier substrate such as a glass substrate and a polyimide film is generally 50 mN / mm or more, preferably 100 mN / mm or more, more preferably 200 mN / mm or more. More preferably, it is 300 mN / mm or more.
- a flexible device substrate may be formed by laminating a second layer such as a resin film or an inorganic film on the obtained polyimide film.
- the inorganic film can be used as a water vapor barrier layer and is suitable.
- the water vapor barrier layer include silicon nitride (SiN x ), silicon oxide (SiO x ), silicon oxynitride (SiO x N y ), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), and zirconium oxide.
- examples thereof include an inorganic film containing an inorganic material selected from the group consisting of metal oxides such as (ZrO 2 ), metal nitrides, and metal oxynitrides.
- these thin films are formed by physical vapor deposition such as vacuum vapor deposition, sputtering, ion plating, and chemical vapor deposition such as plasma CVD or catalytic chemical vapor deposition (Cat-CVD).
- physical vapor deposition such as vacuum vapor deposition, sputtering, ion plating, and chemical vapor deposition such as plasma CVD or catalytic chemical vapor deposition (Cat-CVD).
- the method chemical vapor deposition method
- the second layer may be a plurality of layers. Even in the case of a device having a second layer on a polyimide film, the influence of the polyimide film may reach the semiconductor layer via the second layer, so that device characteristics and durability are improved.
- the polyimide having good CV characteristics of the present invention is preferably used.
- a flexible device substrate may be formed by laminating a polyimide film on a resin film or an inorganic film.
- a polyimide film can be laminated on a resin film or an inorganic film using a polyimide precursor solution or a polyimide solution in the same manner as in the case of a carrier substrate.
- the polyimide film obtained in the present invention is firmly laminated even when the inorganic film is the substrate.
- the peel strength between the polyimide film and the inorganic film is generally 20 mN / mm or more, preferably 30 mN / mm or more, more preferably 40 mN, when measured according to JIS K6854-1. / Mm or more, more preferably 50 mN / mm or more.
- elements and circuits necessary for the device are formed on the formed laminate (particularly polyimide film).
- the elements and circuits to be formed and the manufacturing process thereof vary depending on the type of device.
- an amorphous silicon TFT is formed on a polyimide film.
- the TFT includes, for example, a gate metal layer, a semiconductor layer such as an amorphous silicon film, a silicon nitride gate dielectric layer, and an ITO pixel electrode.
- a structure necessary for a liquid crystal display can be formed by a known method. Since the polyimide film obtained in the present invention is excellent in various properties such as heat resistance and toughness, the method for forming a circuit or the like is not particularly limited.
- a device substrate (particularly a polyimide film) on which a circuit or the like is formed is peeled from the carrier substrate.
- the peeling method there is no particular limitation on the peeling method, and for example, laser peeling which is performed by irradiating a laser or the like from the carrier substrate side and mechanical peeling which is mechanically peeled off can be performed.
- the polyimide and polyimide film of the present invention are particularly suitable as substrates for electronic devices that are desired to be thin and flexible.
- the term “flexible (electronic) device” as used herein means that the device itself is flexible.
- a semiconductor layer a transistor, a diode, etc.
- COF Chip On Film
- FPC flexible printed wiring board
- Examples of the flexible (electronic) device in which the polyimide and polyimide film of the present invention described above and below are preferably used include display devices such as liquid crystal displays, organic EL displays, and electronic paper, and light receiving devices such as solar cells and CMOS. I can do it.
- the polyimide of the present invention can be used for various applications. However, in order to achieve the effect of excellent CV characteristics, the polyimide and the semiconductor are in direct contact with each other, or a thin film (for example, 200 nm or less, preferably 100 nm). It is preferably used in a device laminated via the following thin film, such as the second layer described above.
- a thin film for example, 200 nm or less, preferably 100 nm.
- examples of the semiconductor include silicon such as single crystal silicon, amorphous silicon, and polysilicon (which may be p-type or n-type impurity-doped), and gallium nitride and other compound semiconductors.
- Monomer A 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride (formula weight 294.22), purity (%) 99.9
- Monomer A2 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride (formula weight 294.22), purity (%) 99.0 (low purity)
- Monomer B (9H-Fluorene-9,9-diyl) bis (2-methyl-4,1-phenylene) bis (1,3-dioxo-1,3-dihydroisobenzofuran-5-carboxylate) (formula weight) 726.66), purity (%) 98.2
- Monomer C 1,4-diaminobenzene (formula weight 108.14), purity (%) 100.0
- Monomer D 4,4 ′-(((9H-fluorene-9,9-diyl) bis ([1,1′-biphenyl] -5,2-di
- liquid polyimide precursor resin composition (polyamic acid solution) having a viscosity of 3.11 Pa ⁇ s (25 ° C.).
- Examples 1 to 3 A 6-inch silicon wafer (625 ⁇ m thick, resistivity 4 ⁇ cm, p-type (impurity boron)) is spin-coated with a solution obtained by further diluting the polyamic acid solution produced in Reference Examples 1 to 3, and is heated to 120 ° C., 150 ° C., 200 ° C. A polyimide film having a thickness of 0.75 ⁇ m was formed by heat treatment at 10 ° C. and 250 ° C. for 10 minutes each and 330 ° C. for 5 minutes. Table 1 shows the results of CV measurement using the obtained polyimide film and the composition of the reference example used.
- Example 4 In the same manner as in Example 1, a solution obtained by further diluting the polyamic acid solution prepared in Reference Example 4 was spin-coated on a 6-inch silicon wafer, and each of them was subjected to 360 minutes at 120 ° C., 150 ° C., 200 ° C., and 250 ° C. for 360 minutes. A heat treatment was performed at 5 ° C. for 5 minutes to form a polyimide film having a thickness of 0.75 ⁇ m. The results are shown in Table 1.
- Example 5 In the same manner as in Example 1, a solution obtained by further diluting the polyimide solution produced in Reference Example 5 was spin-coated on a 6-inch silicon wafer, and each of these was 300 minutes at 120 ° C., 150 ° C., 200 ° C. and 250 ° C. A heat treatment was performed at 5 ° C. for 5 minutes to form a polyimide film having a thickness of 0.75 ⁇ m. The results are shown in Table 1.
- Example 6 and 7, Comparative Examples 1, 2, and 3> Similarly to Example 1, a solution obtained by further diluting the polyamic acid solution produced in Reference Examples 6, 7, 8, 9, and 10 was spin-coated on a 6-inch silicon wafer, and 120 ° C., 150 ° C., 200 ° C., Heat treatment was performed at 250 ° C. for 10 minutes each and at 450 ° C. for 5 minutes to form a polyimide film having a thickness of 0.75 ⁇ m. The results are shown in Table 1.
- Examples 8 to 15 and Comparative Examples 5 to 9> Using the polyamic acid solutions produced in Reference Examples 11 to 18 and Reference Examples 20 to 24, the same conditions as in Example 4, ie, a solution obtained by further diluting the polyamic acid solution on a 6-inch silicon wafer, was spin-coated, and 120 C., 150.degree. C., 200.degree. C. and 250.degree. C. for 10 minutes each and 360.degree. C. for 5 minutes to form a 0.75 .mu.m thick polyimide film. The results are shown in Table 2.
- Example 16 and Comparative Example 10 In Example 16 and Comparative Example 10, exactly the same samples as in Example 6 and Comparative Example 1 were prepared, respectively, and the influence of the scanning speed of the DC voltage when measuring the CV characteristics was confirmed.
- the maximum slopes of Example 16 and Comparative Example 10 in which the scanning speed of the DC voltage at the time of measuring the CV characteristics was changed to 0.18 V / sec were 0.007 / V and 0.004 / V, respectively. This coincided with the results of Example 6 and Comparative Example 1 measured at a scanning speed of 0.25 V / sec.
- the polyimide of the present invention is suitably used for electronic device applications such as flexible device substrates.
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Abstract
Description
(B-1)1,4―ジアミノベンゼン、[1,1’:4’,1”-ターフェニル]-4,4”-ジアミン、および1,4-ビス[2-(4-アミノフェニル)-2-プロピル]ベンゼンから選ばれる少なくとも一つのジアミン、および
(B-2)9,9-ビス(4-アミノフェニル)フルオレン、4,4’-(((9H-フルオレン-9,9-ジイル)ビス([1,1’-ビフェニル]-5,2-ジイル))ビス(オキシ))ジアミン、および4,4’-([1,1’-ビナフタレン]-2,2’-ジイルビス(オキシ))ジアミンから選ばれる少なくとも一つのジアミン
を含有するジアミン成分(B)と
を反応して得られる繰り返し単位を含むポリイミド前駆体(但し、ジアミン成分(B)が1,4―ジアミノベンゼンおよび9,9-ビス(4-アミノフェニル)フルオレン)を含有するとき、(B-1)のジアミンおよび(B-2)のジアミン以外のジアミン化合物の量は20モル%以下である。)。
10. 前記ポリイミドフィルムが請求項8に記載のポリイミドフィルムである上記項9に記載のフレキシブル電子デバイス。
キャリア基板上にポリイミド前駆体溶液またはポリイミド前駆体溶液組成物を塗布し、イミド化して前記キャリア基板とポリイミドフィルムとを有する積層体を形成する工程を有すること
を特徴とする製造方法。
(B-1)1,4―ジアミノベンゼン、[1,1’:4’,1”-ターフェニル]-4,4”-ジアミン、および1,4-ビス[2-(4-アミノフェニル)-2-プロピル]ベンゼンから選ばれる少なくとも一つのジアミン、および
(B-2)9,9-ビス(4-アミノフェニル)フルオレン、4,4’-(((9H-フルオレン-9,9-ジイル)ビス([1,1’-ビフェニル]-5,2-ジイル))ビス(オキシ))ジアミン、および4,4’-([1,1’-ビナフタレン]-2,2’-ジイルビス(オキシ))ジアミンから選ばれる少なくとも一つのジアミン
を含有するジアミン成分(B)と
を反応して得られる繰り返し単位を含むポリイミド前駆体。
まず、ポリイミドに関わるC-V特性の測定方法と定義を説明する。図1にC-V測定システムの模式図を示す。シリコンウェハ1の表面にポリイミドフィルム2を形成し測定サンプルとする。ポリイミドフィルム2の表面の所定面積に水銀を接触させて水銀電極3を形成する。シリコンウェハ1(接地電位)と水銀電極3の間に、直流電源4により直流電圧を印加し、その直流電圧における容量(キャパシタンス)を交流電源5により所定の周波数および振幅の交流電圧を印加して測定する。本願では、直流電圧を最低電圧V1から最高電圧V2の間で、正方向走査(直流電圧を上昇させる)と負方向走査(直流電圧を下降させる)を行い、その間に容量を測定し、第3回目の正方向走査時のC-V測定のデータに基づいて後述する「最大勾配」を求める。
本発明のポリイミドもしくはその前駆体(ポリイミド前駆体)は、C-V特性を満足すれば、その化学構造は特に制限されず、付与したい機能に応じて適宜化学構造を選択すればよい。ポリイミド前駆体は、下記一般式I:
で表される繰り返し単位を有する。特に好ましくは、R1およびR2が水素原子であるポリアミック酸である。また、部分的にイミド化が進行したもの、即ち式I中の2つのアミド構造の少なくとも1つがイミド化した繰り返し単位を含有するポリマーも、「ポリイミド前駆体」および、「ポリアミック酸」(残存するR1およびR2が水素原子の場合)に包含される。
<X1およびテトラカルボン酸成分>
で表され構造が好ましい。
Y1の芳香族環を有する2価の基としては、炭素数が6~40、更に好ましくは炭素数が6~20の芳香族環を有する2価の基が好ましい。
で表され構造が好ましい。
式(2) 0.5≦(Z/2)/(Y-X)≦1.05
(式中、Xはテトラカルボン酸成分のモル数、Yはジアミン成分のモル数、Zはカルボン酸モノ無水物のモル数を表す。)
(式) テトラカルボン酸二無水物/ジアミン比=n/(n+1)
を満たすnを求めることで得られる。繰り返し単位の式量をaとし、末端ジアミン1個分の分子量をabとすると、重合度nのポリイミドの式量は、(a*n+ab)となるから、末端アミン量は、
2/(a*n+ab) [単位 mol/g]
で求められる。本願の実施例ではμmol/gで表記した。
本出願は、新規な構造を含有するポリイミド前駆体およびポリイミドも開示する。新規ポリイミド前駆体およびポリイミドは、
少なくとも3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(s-BPDA)を含有するテトラカルボン酸成分(A)と、
(B-1)1,4―ジアミノベンゼン、[1,1’:4’,1”-ターフェニル]-4,4”-ジアミン、および1,4-ビス[2-(4-アミノフェニル)-2-プロピル]ベンゼンから選ばれる少なくとも一つのジアミン、および
(B-2)9,9-ビス(4-アミノフェニル)フルオレン、4,4’-(((9H-フルオレン-9,9-ジイル)ビス([1,1’-ビフェニル]-5,2-ジイル))ビス(オキシ))ジアミン、および4,4’-([1,1’-ビナフタレン]-2,2’-ジイルビス(オキシ))ジアミンから選ばれる少なくとも一つのジアミン
を含有するジアミン成分(B)を反応して得られる繰り返し単位を含む。即ち、前記一般式Iおよび一般式IIにおいて、X1が上記テトラカルボン酸成分(A)に由来し、Y1が上記ジアミン成分(B)に由来する繰り返し単位を含む。
ポリイミドの製造、特にキャリア基板上にポリイミドフィルムを形成した積層体を経由するポリイミドフィルムの製造方法を以下に説明する。
(1)ポリイミド前駆体(特にポリアミック酸)溶液、またはポリイミド前駆体溶液に必要に応じてイミド化触媒、脱水剤、無機微粒子などを選択して加えたポリイミド前駆体溶液組成物をキャリア基板上にキャストし、加熱により脱水環化、脱溶媒することによりポリイミドフィルムを形成する方法(熱イミド化);
(2)ポリイミド前駆体(特にポリアミック酸)溶液に環化触媒および脱水剤を加え、さらに必要に応じて無機微粒子などを選択して加えたポリイミド前駆体溶液組成物をキャリア基板上にキャストし、化学的に脱水環化させて、これを加熱により脱溶媒、イミド化することによりポリイミドフィルムを形成する方法(化学イミド化);
(3)ポリイミドが有機溶媒に可溶の場合、必要により無機微粒子などの添加剤を選択して加えたポリイミド溶液組成物をキャリア基板上にキャストし、加熱により溶媒を除去しながら、所定温度まで加熱することによりポリイミドフィルムを形成する方法
などが挙げられる。
まず、ポリイミド前駆体溶液およびポリイミド溶液の製造について説明する。ポリイミド前駆体溶液またはポリイミド溶液は、略等モルのテトラカルボン酸成分とジアミン成分を、有機溶媒中で重合することにより得られる。また、予めどちらかの成分が過剰である2種類以上のポリイミド前駆体を合成しておき、各ポリイミド前駆体溶液を一緒にした後、反応条件下で混合してもよい。
電子デバイスの製造では、まず、ポリイミド前駆体溶液またはポリイミド溶液(これらに、必要により添加剤を含有する組成物溶液も含む)をキャリア基板上に流延し、加熱処理によりイミド化および脱溶媒(ポリイミド溶液のときは主として脱溶媒)することによってポリイミドフィルムを形成し、キャリア基板とポリイミドフィルムとの積層体を得る。キャリア基板に制限はないが、一般に、ソーダライムガラス、ホウ珪酸ガラス、無アルカリガラス等のガラス基板や鉄、ステンレス、銅等の金属基板が使用される。ポリイミド前駆体溶液およびポリイミド溶液のキャリア基板上への流延方法は特に限定されないが、例えばスピンコート法、スクリーン印刷法、バーコーター法、電着法などの従来公知の方法が挙げられる。ポリイミド前駆体溶液を用いた場合の加熱処理条件は、特に限定されないが、例えば50℃~150℃の温度範囲で乾燥した後、最高加熱温度として例えば150℃~600℃であり、好ましくは200℃~550℃、より好ましくは250℃~500℃で処理することが好ましい。ポリイミド溶液を用いた場合の加熱処理条件は、特に限定されないが、最高加熱温度として例えば100℃~600℃であり、好ましくは150℃以上、より好ましくは200℃以上であり、また好ましくは500℃以下、より好ましくは450℃以下である。
C-V特性は、図1の模式図に示すシステムにより、以下の条件で実施した。
測定装置:堀場ジョバンイボン社製水銀プローブ式CV測定装置(水銀プローブModel 802-150(Materials Development Corporation)
水銀電極面積:0.00475 cm2
直流電圧走査条件:+40Vで30s間保持した後、+40Vから-40Vまで負方向走査を行い、-40Vで30s間保持し、その後、+40Vまで正方向走査を行う。これを3サイクル繰り返した。直流電圧の走査速度は、実施例1~7および比較例1~3では0.25V/secとし、実施例8~16、比較例4~10では0.18V/secとした。尚、後半の実施例・比較例で0.18V/secとしたのは測定ノイズ低減のためであるが、0.25V/secによる測定データと、最大勾配の値に差異はない(実施例16、比較例10参照)。
交流電圧条件:周波数約2.5kHz、振幅0.1Vの交流正弦波
測定温度:室温
規格化C-V曲線の微分関数の近似値として、ある電圧Vn1の時の規格化容量Cn1と、Vn1+1.5[V]であるVn2の時の規格化容量Cn2から、絶対値「|(Cn2-Cn1)/(Vn2-Vn1)|」を、規格化C-V曲線全体についてこの値を計算し、|(Cn2-Cn1)/(Vn2-Vn1)|の最大値をその組成の勾配として採用した。
モノマーA2:3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(式量294.22)、純度(%)99.0(低純度)
モノマーB:(9H-フルオレン-9,9-ジイル)ビス(2-メチル-4,1-フェニレン)ビス(1,3-ジオキソ-1,3-ジヒドロイソベンゾフラン-5-カルボキシレート)(式量726.66)、純度(%)98.2
モノマーC:1,4-ジアミノベンゼン(式量108.14)、純度(%)100.0
モノマーD:4,4’-(((9H-フルオレン-9,9-ジイル)ビス([1,1’-ビフェニル]-5,2-ジイル))ビス(オキシ))ジアミン(式量684.78)、純度(%)99.0
モノマーE:[1,1’:4’,1”-ターフェニル]-4,4”-ジアミン(式量260.31)、純度(%)99.1
モノマーF:4,4’-([1,1’-ビナフタレン]-2,2’-ジイルビス(オキシ))ジアミン(式量468.51)、純度(%)99.1
モノマーG:1,4-ビス[2-(4-アミノフェニル)-2-プロピル]ベンゼン(式量344.48)、純度(%)99.7
モノマーH:9,9-ビス(4-アミノフェニル)フルオレン(式量348.43)、純度(%)99.2
モノマーI:フタル酸無水物(式量148.11)、純度(%)100.0
添加剤:3-アミノプロピルトリエトキシシラン(式量218.32)、純度(%)99.7
モノマーJ:5-(フェニルエチニル)イソベンゾフラン-1,3-ジオン(式量248.22)、純度:98.4%
モノマーK:5-(3-オキソ-3-フェニルプロプ-1-イン-1-イル)イソベンゾフラン-1,3-ジオン(式量276.23)、純度:99.8%
モノマーL:5,5’-(エチン-1,2-ジイル)ビス(イソベンゾフラン-1,3-ジオン)(式量318.23)、純度:99.0%
モノマーM:5,5’-(パーフルオロプロパン-2,2-ジイル)ビス(イソベンゾフラン-1,3-ジオン)(式量444.24)、純度:99.1%
モノマーN:5,5’-オキシビス(イソベンゾフラン-1,3-ジオン)(式量310.21)、純度:99.73%
モノマーO:オクタハイドロ-3H,3”H-ジスピロ[[4,7]メタノイソベンゾフラン]-1,1”,3,3”,4’(4H,4”H)-ペンタオン(CpODA)(式量384.37)、純度:99.3%
モノマーP:シクロヘキサン-1,4-ジアミン(式量114.19)、純度:99.98 %
モノマーQ:4,4’-オキシジアニリン(式量200.24)、純度:99.98 %
モノマーR:1H,3H-ベンゾ[1,2-c:4,5-c:4,5c’]ジフラン-1,3,5,7-テトラオン(式量218.12)、純度:99.73%
(モノマーA 50/モノマーB 50//モノマーC 50/モノマーD 50)
窒素ガスで置換した反応容器中に、1,4-ジアミノベンゼン(50モル%)および4,4’-(((9H-フルオレン-9,9-ジイル)ビス([1,1’-ビフェニル]-5,2-ジイル))ビス(オキシ))ジアミン(50モル%)、NMPを仕込み、15分間40℃で加熱撹拌し、モノマーを溶解させた。その後、3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(50モル%)および(9H-フルオレン-9,9-ジイル)ビス(2-メチル-4,1-フェニレン)ビス(1,3-ジオキソ-1,3-ジヒドロイソベンゾフラン-5-カルボキシレート)(50モル%)を加え、さらに30分間撹拌し、粘度1.82Pa・s(25℃)の液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)を得た。
(モノマーA 50/モノマーB 50//モノマーD 50/モノマーE 50)
窒素ガスで置換した反応容器中に、[1,1’:4’,1”-ターフェニル]-4,4”-ジアミン(50モル%)(50モル%)および4,4’-(((9H-フルオレン-9,9-ジイル)ビス([1,1’-ビフェニル]-5,2-ジイル))ビス(オキシ))ジアミン(50モル%)、NMPを仕込み、15分間40℃で加熱撹拌し、モノマーを溶解させた。その後、3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(50モル%)および(9H-フルオレン-9,9-ジイル)ビス(2-メチル-4,1-フェニレン)ビス(1,3-ジオキソ-1,3-ジヒドロイソベンゾフラン-5-カルボキシレート)(50モル%)を加え、さらに30分間撹拌し、粘度0.742Pa・s(25℃)の液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)を得た。
(モノマーA 50/モノマーB 50//モノマーE 50/モノマーF 50)
窒素ガスで置換した反応容器中に、[1,1’:4’,1”-ターフェニル]-4,4”-ジアミン(50モル%)および4,4’-([1,1’-ビナフタレン]-2,2’-ジイルビス(オキシ))ジアミン(50モル%)、NMPを仕込み、15分間40℃で加熱撹拌し、モノマーを溶解させた。その後、3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(50モル%)および(9H-フルオレン-9,9-ジイル)ビス(2-メチル-4,1-フェニレン)ビス(1,3-ジオキソ-1,3-ジヒドロイソベンゾフラン-5-カルボキシレート)(50モル%)を加え、さらに30分間撹拌し、粘度0.886Pa・s(25℃)の液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)を得た。
(モノマーA 100//モノマーG 50/モノマーH 50)
窒素ガスで置換した反応容器中に、1,4-ビス[2-(4-アミノフェニル)-2-プロピル]ベンゼン(50モル%)および9,9-ビス(4-アミノフェニル)フルオレン(50モル%)、NMPを仕込み、15分間40℃で加熱撹拌し、モノマーを溶解させた。その後、3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(100モル%)を加え、さらに30分間撹拌し、粘度3.249Pa・s(25℃)の液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)を得た。
(モノマーA 100//モノマーG 50/モノマーH 50)
窒素ガスで置換した反応容器中に、1,4-ビス[2-(4-アミノフェニル)-2-プロピル]ベンゼン(50モル%)および9,9-ビス(4-アミノフェニル)フルオレン(50モル%)、NMPを仕込み、15分間40℃で加熱撹拌し、モノマーを溶解させた。その後、3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(100モル%)を加え、さらに30分間撹拌し、ポリアミック酸溶液を得た。その後190℃まで昇温した後、3時間保持してイミド化を行い、粘度4.03Pa・s(25℃)の液状ポリイミド樹脂組成物(ポリイミド溶液)を得た。
(モノマーA 100//モノマーC 100)
窒素ガスで置換した反応容器中に、1,4-ジアミノベンゼン(100モル%)、NMPを仕込み、15分間40℃で加熱撹拌し、モノマーを溶解させた。その後、3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(100モル%)を加え、さらに30分間撹拌し、粘度6.6Pa・s(25℃)の液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)を得た。
(モノマーA 98//モノマーC 100//モノマーI 4)
窒素ガスで置換した反応容器中に、1,4-ジアミノベンゼン(100モル%)、NMPを仕込み、15分間40℃で加熱撹拌し、モノマーを溶解させた。その後、3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(98モル%)およびを加え、さらに30分間撹拌した。その後フタル酸無水物(4モル%)を加え、更に30分間攪拌し、粘度3.11Pa・s(25℃)の液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)を得た。
(モノマーA 99.5//モノマーC 100//添加剤)
窒素ガスで置換した反応容器中に、1,4-ジアミノベンゼン(100モル%)、NMPを仕込み、15分間40℃で加熱撹拌し、モノマーを溶解させた。その後、3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(99.5モル%)および3-アミノプロピルトリエトキシシラン(モノマー総量に対して0.05部)を加え、さらに30分間撹拌し、粘度28.75Pa・s(25℃)の液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)を得た。
(モノマーA 98//モノマーC 100)
窒素ガスで置換した反応容器中に、1,4-ジアミノベンゼン(100モル%)、NMPを仕込み、15分間40℃で加熱撹拌し、モノマーを溶解させた。その後、3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(98モル%)を加え、さらに30分間撹拌し、粘度3.11Pa・s(25℃)の液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)を得た。
(モノマーA2 100//モノマーC 100)
窒素ガスで置換した反応容器中に、1,4-ジアミノベンゼン(100モル%)、NMPを仕込み、15分間40℃で加熱撹拌し、モノマーを溶解させた。その後、3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA2;低純度)(100モル%)を加え、さらに30分間撹拌し、粘度480Pa・s(25℃)の液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)を得た。
6インチシリコンウェハ(625μm厚、抵抗率4Ωcm、p型(不純物ボロン))上に、参考例1~3で製造したポリアミック酸溶液をさらに希釈した溶液をスピンコートし、120℃、150℃、200℃、250℃にて各10分、330℃にて5分間加熱処理し、厚さ0.75μmのポリイミドフィルムを形成した。得られたポリイミドフィルムを用いて、C-V測定を行った結果および使用した参考例の組成を表1に示す。
実施例1と同様に、6インチシリコンウェハ上に参考例4で製造したポリアミック酸溶液をさらに希釈した溶液をスピンコートし、120℃、150℃、200℃、250℃にて各10分、360℃にて5分間加熱処理し、厚さ0.75μmのポリイミドフィルムを形成した。結果を表1に示す。
実施例1と同様に、6インチシリコンウェハ上に、参考例5で製造したポリイミド溶液をさらに希釈した溶液をスピンコートし、120℃、150℃、200℃、250℃にて各10分、300℃にて5分間加熱処理し、厚さ0.75μmのポリイミドフィルムを形成した。結果を表1に示す。
実施例1と同様に、6インチシリコンウェハ上に、参考例6、7、8、9、10で製造したポリアミック酸溶液をさらに希釈した溶液をスピンコートし、120℃、150℃、200℃、250℃にて各10分、450℃にて5分間加熱処理し、厚さ0.75μmのポリイミドフィルムを形成した。結果を表1に示す。
(モノマーA 70/モノマーM 30 // モノマーC 100)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(70モル%)+5,5’-(パーフルオロプロパン-2,2-ジイル)ビス(イソベンゾフラン-1,3-ジオン)(モノマーM)(30モル%)
ジアミン成分:1,4-ジアミノベンゼン(100モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:1.160Pa・s(25℃)
(モノマーA 70/モノマーN 30 // モノマーC 100)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(70モル%)+5,5’-オキシビス(イソベンゾフラン-1,3-ジオン)(モノマーN)(30モル%)
ジアミン成分:1,4-ジアミノベンゼン(100モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:1.250Pa・s(25℃)
(モノマーA 70/モノマーO 30 // モノマーC 100)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(70モル%)+CpODA(モノマーO)(30モル%)
ジアミン成分:1,4-ジアミノベンゼン(100モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:1.303Pa・s(25℃)
(モノマーA 100// モノマーC 70/モノマーP 30)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(100モル%)
ジアミン成分:1,4-ジアミノベンゼン(70モル%)+シクロヘキサン-1,4-ジアミン(モノマーP)(30モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:1.811Pa・s(25℃)
(モノマーA 100// モノマーC 70/モノマーQ 30)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(100モル%)
ジアミン成分:1,4-ジアミノベンゼン(70モル%)+4,4’-オキシジアニリン(モノマーQ)(30モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:1.562Pa・s(25℃)
(モノマーA 98 // モノマーC 100 // モノマーJ 4)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(98モル%)
ジアミン成分:1,4-ジアミノベンゼン(100モル%)
末端封止剤:5-(フェニルエチニル)イソベンゾフラン-1,3-ジオン(モノマーJ)(4モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:3.11Pa・s(25℃)
(モノマーA 98 // モノマーC 100 // モノマーK 4)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(98モル%)
ジアミン成分:1,4-ジアミノベンゼン(100モル%)
末端封止剤:5-(3-オキソ-3-フェニルプロプ-1-イン-1-イル)イソベンゾフラン-1,3-ジオン(モノマーK)(4モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:3.11Pa・s(25℃)
(モノマーA 98 // モノマーC 100 // モノマーL 2)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(98モル%)
ジアミン成分:1,4-ジアミノベンゼン(100モル%)
末端封止剤:5,5’-(エチン-1,2-ジイル)ビス(イソベンゾフラン-1,3-ジオン)(モノマーL)(2モル%)(注:モノマーLはテトラカルボン酸二無水物であるが、末端封止剤と同様に一番最後に添加した。)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:3.11Pa・s(25℃)
(モノマーA 30/モノマーR 70 // モノマーC 100)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(30モル%)+1H,3H-ベンゾ[1,2-c:4,5-c:4,5c’]ジフラン-1,3,5,7-テトラオン(モノマーR)(70モル%)
ジアミン成分:1,4-ジアミノベンゼン(100モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:1.23Pa・s(25℃)
(モノマーA 68.6/モノマーM 29.4 // モノマーC 100)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(68.6モル%)+5,5’-(パーフルオロプロパン-2,2-ジイル)ビス(イソベンゾフラン-1,3-ジオン)(モノマーM)(29.4モル%)
ジアミン成分:1,4-ジアミノベンゼン(100モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:0.130Pa・s(25℃)
(モノマーA 68.6/モノマーN 29.4 // モノマーC 100)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(68.6モル%)+5,5’-オキシビス(イソベンゾフラン-1,3-ジオン)(モノマーN)(29.4モル%)
ジアミン成分:1,4-ジアミノベンゼン(100モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:0.144Pa・s(25℃)
(モノマーA 68.6/モノマーO 29.4 // モノマーC 100)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(68.6モル%)+CpODA(モノマーO)(29.4モル%)
ジアミン成分:1,4-ジアミノベンゼン(100モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:0.102Pa・s(25℃)
(モノマーA 98// モノマーC 70/モノマーP 30)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(98モル%)
ジアミン成分:1,4-ジアミノベンゼン(70モル%)+シクロヘキサン-1,4-ジアミン(モノマーP)(30モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:0.281Pa・s(25℃)
(モノマーA 98// モノマーC 70/モノマーQ 30)
テトラカルボン酸二無水物:3,3’,4,4’-テトラカルボン酸ビフェニル二無水物(モノマーA)(98モル%)
ジアミン成分:1,4-ジアミノベンゼン(70モル%)+4,4’-オキシジアニリン(モノマーQ)(30モル%)
得られた液状ポリイミド前駆体樹脂組成物(ポリアミック酸溶液)の粘度:0.062Pa・s(25℃)
参考例11~18、参考例20~24で製造したポリアミック酸溶液を用いて、実施例4と同じ条件、即ち、6インチシリコンウェハ上にポリアミック酸溶液をさらに希釈した溶液をスピンコートし、120℃、150℃、200℃、250℃にて各10分、360℃にて5分間加熱処理し、厚さ0.75μmのポリイミドフィルムを形成した。結果を表2に示す。
参考例19で製造したポリアミック酸溶液を用いて、実施例6と同じ条件、即ち、6インチシリコンウェハ上にポリアミック酸溶液をさらに希釈した溶液をスピンコートし、120℃、150℃、200℃、250℃にて各10分、450℃にて5分間加熱処理し、厚さ0.75μmのポリイミドフィルムを形成した。結果を表2に示す。
実施例16および比較例10では、それぞれ実施例6および比較例1と全く同一のサンプルを作製し、C-V特性の測定の際の直流電圧の走査速度の影響を確認した。C-V特性の測定の際の直流電圧の走査速度が0.18V/secと変更した実施例16および比較例10の最大勾配は、それぞれ0.007/V、0.004/Vであり、走査速度を0.25V/secとして測定した実施例6および比較例1の結果と一致した。
2 ポリイミドフィルム
3 水銀電極
4 直流電源
5 交流電源
Claims (11)
- 抵抗値が4Ωcmのシリコンウェハ上に、ポリイミドフィルムを0.75μmの膜厚で形成した積層体の容量-電圧測定を行ったとき、0.005/V以上の最大勾配を示すポリイミドで形成されたフレキシブル電子デバイス用ポリイミドフィルム。(但し、前記最大勾配は、前記シリコンウェハに対して前記ポリイミドフィルムに印加する直流電圧を最低電圧V1と最高電圧V2の間で、最低電圧V1から最高電圧V2までの正方向走査と、最高電圧V2から最低電圧V1までの負方向走査を行いながら容量測定を行い、第3回目の正方向走査時の規格化容量-電圧曲線における勾配の絶対値の最大値を意味し、ここで前記最低電圧V1は、前記ポリイミドフィルムのみの容量が観察される電圧であり、前記規格化容量-電圧曲線は、最低電圧V1における容量を1として規格化されている。)。
- ポリイミドの繰り返し単位におけるイミド基(-CONCO-)の重量分率が38.3wt%未満であることを特徴とする請求項1に記載のフレキシブル電子デバイス用ポリイミドフィルム。
- 仕込み比から計算されるポリイミド全体におけるアミン末端基濃度が29μmol/g以下であることを特徴とする請求項1または2に記載のフレキシブル電子デバイス用ポリイミドフィルム。
- 少なくとも3,3’,4,4’-ビフェニルテトラカルボン酸二無水物を含有するテトラカルボン酸成分(A)と、
(B-1)1,4―ジアミノベンゼン、[1,1’:4’,1”-ターフェニル]-4,4”-ジアミン、および1,4-ビス[2-(4-アミノフェニル)-2-プロピル]ベンゼンから選ばれる少なくとも一つのジアミン、および
(B-2)9,9-ビス(4-アミノフェニル)フルオレン、4,4’-(((9H-フルオレン-9,9-ジイル)ビス([1,1’-ビフェニル]-5,2-ジイル))ビス(オキシ))ジアミン、および4,4’-([1,1’-ビナフタレン]-2,2’-ジイルビス(オキシ))ジアミンから選ばれる少なくとも一つのジアミン
を含有するジアミン成分(B)と
を反応して得られる繰り返し単位を含むポリイミド前駆体(但し、ジアミン成分(B)が1,4―ジアミノベンゼンおよび9,9-ビス(4-アミノフェニル)フルオレン)を含有するとき、(B-1)のジアミンおよび(B-2)のジアミン以外のジアミン化合物の量は20モル%以下である。)。 - 前記ジアミン成分(B)が、前記(B-1)のジアミンおよび(B-2)のジアミンを合わせて、40モル%以上の割合で含む請求項4に記載のポリイミド前駆体。
- 3,3’,4,4’-ビフェニルテトラカルボン酸二無水物と前記(B-1)のジアミンに由来する繰り返し単位、および3,3’,4,4’-ビフェニルテトラカルボン酸二無水物と前記(B-2)のジアミンに由来する繰り返し単位の割合の合計が、40モル%以上であることを特徴とする請求項4に記載のポリイミド前駆体。
- 請求項4~6のいずれか1項に記載のポリイミド前駆体をイミド化して得られるポリイミド。
- 請求項7に記載のポリイミドのフィルム形態であるポリイミドフィルム。
- 請求項1~3に記載のポリイミドフィルムを含むフレキシブル電子デバイス。
- 前記ポリイミドフィルムが請求項8に記載のポリイミドフィルムである請求項9に記載のフレキシブル電子デバイス。
- 請求項9または10に記載のフレキシブル電子デバイスの製造方法であって、
キャリア基板上にポリイミド前駆体溶液またはポリイミド前駆体溶液組成物を塗布し、イミド化して前記キャリア基板とポリイミドフィルムとを有する積層体を形成する工程を有すること
を特徴とする製造方法。
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