WO2016117455A1 - Dispositif et procédé d'application de revêtement, et unité d'application de revêtement - Google Patents

Dispositif et procédé d'application de revêtement, et unité d'application de revêtement Download PDF

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Publication number
WO2016117455A1
WO2016117455A1 PCT/JP2016/051076 JP2016051076W WO2016117455A1 WO 2016117455 A1 WO2016117455 A1 WO 2016117455A1 JP 2016051076 W JP2016051076 W JP 2016051076W WO 2016117455 A1 WO2016117455 A1 WO 2016117455A1
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WIPO (PCT)
Prior art keywords
liquid
pin
coating
application
substrate
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Application number
PCT/JP2016/051076
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English (en)
Japanese (ja)
Inventor
丸野正徳
平田淳
Original Assignee
日本電子精機株式会社
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Application filed by 日本電子精機株式会社 filed Critical 日本電子精機株式会社
Priority to JP2016570599A priority Critical patent/JP6408608B2/ja
Publication of WO2016117455A1 publication Critical patent/WO2016117455A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/02—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers

Definitions

  • the present invention relates to a coating apparatus, a coating method, and a coating unit that apply a liquid.
  • the present invention relates to a coating apparatus, a coating method, and a coating unit that apply a liquid in a dot shape.
  • FIG. 1 shows a perspective view of the coating device 240.
  • This apparatus is an apparatus for applying a liquid from the nozzle 11 to the substrate 13.
  • the nozzle 11 is moved in one direction by the moving mechanism 15.
  • the substrate 13 is moved in another direction by the stage 14.
  • the liquid can be applied from the nozzle 11 to any position of the substrate 13.
  • FIG. 11 shows the state before application
  • FIG. 2B shows the state during application.
  • the liquid 12 attached to the pins 10 is applied by being applied to the substrate 13.
  • the liquid 10 is directly applied to the substrate 13 from the nozzle 11 without the pin 10.
  • the applicator 240 using the pin 10 is superior.
  • an object of the present application is to provide a device that can adjust the amount of liquid applied by a device that applies liquid with pins.
  • a placement step of placing a substrate, a pre-application step of pre-applying a liquid with pins, a first measurement step of measuring the amount of liquid applied by the pre-application step, and measurement A setting process for setting application conditions using liquid pins according to the process and an application method for applying the liquid to the substrate according to the application conditions are used.
  • a coating apparatus including the unit.
  • a stage that holds the substrate, a pin that is positioned above the stage and moves relative to the stage, a nozzle that has a liquid therein, and the liquid that has been applied in advance and the applied liquid A coating device including a measuring unit that measures the above is used.
  • a coating unit including a nozzle that holds the liquid inside, and a pin that moves between the inside and outside of the nozzle and applies the liquid to an object to be coated, and there is a continuous recess on the side surface of the pin.
  • the actual liquid application location and the location to be applied can be accurately aligned.
  • the coating liquid can be applied to a required place on the substrate.
  • FIG. 1 is a perspective view of a conventional coating apparatus.
  • FIG. 2A is a cross-sectional view of a nozzle of a conventional coating apparatus.
  • FIG. 2B is a cross-sectional view of a nozzle of a conventional coating apparatus.
  • 3A is a perspective view of the coating apparatus according to Embodiment 1.
  • FIG. 3B is a flowchart of the coating process of the first embodiment.
  • FIG. 4A is a diagram showing a correlation for determining the coating conditions of the first embodiment.
  • FIG. 4B is a diagram showing a correlation for determining the coating conditions of the first embodiment.
  • FIG. 4C is a diagram showing a correlation for determining the coating conditions of the first embodiment.
  • FIG. 5 is a flowchart of the coating process of the second embodiment.
  • FIG. 5 is a flowchart of the coating process of the second embodiment.
  • FIG. 6A is a cross-sectional view showing the coating process of the second embodiment.
  • FIG. 6B is a cross-sectional view showing the coating process of the second embodiment.
  • FIG. 6C is a cross-sectional view showing the coating process of the second embodiment.
  • FIG. 6D is a cross-sectional view showing the coating process of the second embodiment.
  • FIG. 7A is a plan view showing the coating method of the second embodiment.
  • FIG. 7B is a plan view showing the coating method of the second embodiment.
  • FIG. 7C is a plan view showing the coating method of the second embodiment.
  • FIG. 7D is a plan view showing the coating method of the second embodiment.
  • FIG. 7E is a plan view showing the coating method of the second embodiment.
  • FIG. 8A is a plan view showing the coating method of the second embodiment.
  • FIG. 8B is a plan view showing the coating method of the second embodiment.
  • FIG. 8C is a plan view showing the coating method of the second embodiment.
  • FIG. 9 is a flowchart of the coating process of the third embodiment.
  • FIG. 10A is a plan view showing the coating method of the third embodiment.
  • FIG. 10B is a plan view showing the coating method of the third embodiment.
  • FIG. 10C is a plan view showing the coating method of the third embodiment.
  • FIG. 10D is a plan view showing the coating method of the third embodiment.
  • FIG. 10E is a plan view showing the coating method of the third embodiment.
  • FIG. 11A is a cross-sectional view illustrating the coating method of the fourth embodiment.
  • FIG. 11B is a cross-sectional view illustrating the coating method of the fourth embodiment.
  • FIG. 11A is a cross-sectional view illustrating the coating method of the fourth embodiment.
  • FIG. 11C is a cross-sectional view illustrating the coating method of the fourth embodiment.
  • FIG. 12 is a cross-sectional view of a modified example of the pen tip according to the fourth embodiment.
  • FIG. 13A is a side view of the pin of the fifth embodiment.
  • FIG. 13B is a side view of the pin of the fifth embodiment.
  • FIG. 13C is a side view of the pin of the fifth embodiment.
  • FIG. 13D is a side view of the pin of the comparative example.
  • FIG. 13E is a side view of a pin of a comparative example.
  • FIG. 13F is a side view of a comparative pin.
  • FIG. 14A is a side view of a pin of a comparative example.
  • FIG. 14B is a side view of the pin of the sixth embodiment.
  • FIG. 14C is a side view of the pin of the sixth embodiment.
  • FIG. 14D is a side view of the pin of the sixth embodiment.
  • FIG. 14E is a side view of the pin of the sixth embodiment.
  • FIG. 14F is a side view of the pin of the sixth embodiment.
  • FIG. 15A is a side view of a comparative pin.
  • FIG. 15B is a side view of the pin of the seventh embodiment.
  • FIG. 15C is a side view of the pin of the seventh embodiment.
  • FIG. 15D is a side view of the pin of the seventh embodiment.
  • FIG. 16A is a side view of the pin of the eighth embodiment.
  • FIG. 16B is a side view of the pin of the eighth embodiment.
  • FIG. 17A is a side view of a pin of a comparative example.
  • FIG. 17B is a side view of the pin of the ninth embodiment.
  • FIG. 17C is a side view of the pin of the ninth embodiment.
  • FIG. 17D is a side view of the pin of the ninth embodiment.
  • FIG. 18 is a perspective view of the coating apparatus according to the tenth embodiment.
  • FIG. 3A is a perspective view of the coating apparatus 100 according to the embodiment.
  • FIG. 3B is a diagram illustrating a coating process.
  • the liquid to be applied is a solder paste, an adhesive, a bio-related liquid, or the like.
  • the liquid varies depending on the substrate 13. Below, it demonstrates as a certain one liquid and a certain one board
  • the coating apparatus 100 shown in FIG. 3A includes a nozzle 11, a moving mechanism 15, a stage 14, an imaging unit 21, a measuring unit 20, and a control unit 30.
  • the nozzle 11 is the same as the conventional nozzle 11.
  • the pin 10 is included inside, and the liquid 12 is applied with the pin 10.
  • the moving mechanism 15 is a mechanism that moves the nozzle 11 in one direction.
  • the stage 14 carries the substrate 13 and moves in the direction perpendicular to the one direction.
  • the substrate 13 to which the liquid is applied is fixed thereon with a vacuum hole or the like.
  • a moving mechanism in which the nozzle 11 and the stage 14 move relatively can be used.
  • the imaging unit 21 images the liquid on the measurement unit 20. Image sensors, digital cameras, etc. can be used.
  • the measuring unit 20 measures the weight of the liquid applied thereon.
  • the material where the liquid is applied in the measurement unit 20 is preferably the same material as the substrate 13. This is because the application state is measured by the imaging unit 21 by applying the liquid to the measurement unit 20 in advance, so that the same state as the substrate 13 is good.
  • the spread of the liquid can be handled in the same manner as the substrate 13. For example, it is preferable to arrange a part of the substrate 13 on the surface of the measurement unit 20.
  • the imaging unit 21 images the liquid applied to the measurement unit 20 and recognizes its shape.
  • the video becomes data and is sent to the control unit 30. Analyzed by the control unit 30, the position of the liquid can be identified.
  • the control unit 30 controls the movement and control of the nozzle 11 of the coating apparatus 100 and the movement of the stage 14.
  • the entire coating apparatus 100 is controlled.
  • the following processes can also be controlled. However, it may be controlled separately by a plurality of control devices.
  • a personal comuter can be used. With this configuration, the liquid 12 can be applied to the entire substrate 13 by the nozzle 11. ⁇ Coating process>
  • FIG. 3B shows the coating process.
  • the application process includes the steps of pre-preparation 101, pre-application 102, measurement of applied material 103, change of application conditions 104, and application start 105.
  • the pre-preparation 101 is preparation before application such as attachment of the stage 14 of the substrate 13 and introduction of liquid into the nozzle 11.
  • the pre-application 102 applies the liquid to the measurement unit 20 before applying the liquid to the substrate 13. In the measurement 103 of the applied material, the liquid applied in the pre-application 102 is measured.
  • the application condition change 104 is to obtain an application condition for setting the liquid application amount necessary for the substrate 13 from the relationship between the application condition in the pre-application 102 and the amount of liquid measured in the application measurement 103. .
  • the position of the entire apparatus is calibrated using the position of the applied liquid as a reference position. This will be described in the following coating condition change 104.
  • a liquid is applied to the substrate 13. As a result, an appropriate amount of liquid is accurately applied to the position on the substrate 13 where application is required.
  • the position is calibrated and the coating amount is corrected by the pre-coating 102 and the coating measurement 103. As a result, an accurate position and an accurate application amount can be realized. If necessary, the coating amount can be changed depending on the location.
  • This coating process is preferably performed once a day.
  • the coating process may be performed after a long stop. This coating process can be performed every time the substrate is replaced.
  • This application process may be performed periodically because of a change in viscosity and state of the liquid to be applied. ⁇ Change of coating conditions 104> The application condition change 104 will be described below.
  • the position of the coated material is known.
  • the position is a position where the liquid is applied from the nozzle 11.
  • the positional relationship between the position of the nozzle 11 (the machine coordinates recognized mechanically) and the position of the coated material is known. If this relationship is known, the position where the nozzle 11 should be moved can be known.
  • the position on the substrate 13 where the liquid is to be applied is obtained by observing a mark or the like previously attached to the substrate 13 with the imaging unit 21 and knowing the apparatus coordinates of the substrate 13.
  • the nozzle 11 is moved based on the apparatus coordinates, and the liquid can be applied to the position on the substrate 13 where the liquid is to be applied.
  • the vertical axis represents the coating amount (amount or weight).
  • the horizontal axis represents the moving speed of the pin 10, the waiting time of the pin 10, and the number of coatings, respectively. From FIG. 4A, the faster the moving speed of the pin 10, the smaller the amount of liquid to be applied. Also, from FIG. 4B, the longer the time (standby time) that the pin 10 is stationary on the substrate 13, the greater the coating amount. From FIG. 4C, the larger the number of times of application, the greater the amount of application.
  • the relationship changes depending on the viscosity of the liquid and the ambient temperature.
  • Each curve moves in parallel. Therefore, the result of the pre-application 102 is measured by the measurement 103 of the applied material, and the positions of the curves in FIGS. 4A to 4C are determined from the result. Determine the position of the curve with the dotted line in the figure. Thereafter, the moving speed of the pin 10, the waiting time of the pin 10, and the number of times of application are obtained from the required application amount. The relationship is shown by the solid line in the figure.
  • the spread of the coating solution can be made within the target range.
  • the material of the measurement unit 20 is preferably in the same state as the substrate 13.
  • the spread of the liquid is also in the same state.
  • the application amount may be adjusted by at least one of three of the moving speed of the pin 10, the waiting time of the pin 10, and the number of times of application.
  • Figure 5 shows the process flow.
  • a step of defect inspection 201 In addition to the first embodiment, there is a step of defect inspection 201.
  • the surface of the prepared substrate 13 is inspected in advance preparation 101 to inspect for defects.
  • the defect is repaired by performing the processes from the pre-application 102 to the application start 105 for the detected defect.
  • the process of the defect inspection 201 is separately inspected by an inspection apparatus, the data is transferred to the coating apparatus 100, and the process of the defect inspection 201 can be deleted by using the data.
  • various cameras, line sensors, digital cameras, and the like can be used. It can be attached to the moving mechanism 15 of FIG.
  • the application amount is determined based on the result of application in advance without performing pre-application 102 to change of application conditions 104. You may decide and apply. ⁇ Circular case>
  • FIGS. 6A to 7E are sectional views of the substrate 13 and the liquid 12.
  • 7A to 7E are plan views of the substrate 13 and the liquid 12.
  • FIG. 6D shows a state in which the liquid 12 is normally applied to the substrate 13. 6A and 7A, the liquid 12 to be applied is not applied. It is a complete defect. In this case, a predetermined application amount may be applied to the application position 61.
  • the liquid 12 to be applied is applied in a half amount, and the position of the liquid 12 is shifted.
  • the application position 61 of the liquid 12 is set within the area to be applied and at the center (center of gravity) of the area that is not applied.
  • the coating liquid amount is the volume of the liquid 12 that is insufficient.
  • the previously applied liquid 12 is in a state of being partially displaced from the planned application range 71.
  • the application position 61 is set at the center of the area where the liquid is not applied in the application range 71 and the liquid is applied.
  • 8A to 8C application of the liquid 12 when a part of the line is missing will be described.
  • 8A to 8C are plan views of lines.
  • a part of the liquid line is completely interrupted.
  • the application position 61 is set at the center of the interruption, and the liquid 12 is applied.
  • FIG. 8B the discontinuity is wide, two application positions 61 are set, and the liquid 12 is applied.
  • the difference between the third embodiment and the first and second embodiments is a method of applying a plurality of times instead of a single application.
  • the description will focus on the differences of the third embodiment from the first and second embodiments. Matters not described are the same as those in the first embodiment. ⁇ Process>
  • Figure 9 shows the process flow.
  • a step of coating method determination 301 In addition to the first embodiment, there is a step of coating method determination 301. In this step, it is determined how to apply to the planned application range 71.
  • the application method will be described with reference to FIGS. 10A to 10E. Other steps are the same as those in the first embodiment. However, also in the pre-application 102, the application method determined in the application method determination 301 is applied.
  • FIG. 10A is a plan view showing a planned application range 71 on the substrate 13.
  • FIG. 10B shows an application example of the liquid 12 applied to the planned application range 71. Thereafter, the liquid 12 spreads and the liquid 12 spreads over the planned application range 71.
  • FIG. 10C shows an example in which the liquid 12 is applied in an overlapping manner. Thereafter, the liquid 12 spreads and the liquid 12 spreads over the planned application range 71.
  • FIG. 10D shows a coating method in which the waiting time of the pins is lengthened and the liquid 12 is extended to the planned coating range 71.
  • FIG. 10E shows the liquid 12 applied in the center after FIG. 10B. Thereafter, the liquid 12 spreads and the liquid 12 spreads over the planned application range 71.
  • the application method is selected according to the type of the liquid 12, the size of the planned application range 71, the required application accuracy, and the like. Since the application position and the application shape are accurately known by the process of the pre-application 102, the liquid can be applied to various shapes at various positions. In addition, the said method is applicable as the defect of Embodiment 2 as the application
  • FIG. 11A to 11C are cross-sectional views of the liquid supply portion according to the fourth embodiment. Matters not described are the same as in the first to third embodiments.
  • a liquid reservoir 16 is separately provided for the pin 10.
  • FIG. 11A shows an initial state.
  • the liquid 10 does not adhere to the pin 10 and is separated from the liquid reservoir 16.
  • the tip of the pin 10 has entered one end of the liquid reservoir 16 from the state of FIG. 11A and the pin 10 has been pulled up.
  • the pin 10 is applying the liquid 12 at the tip thereof to the substrate 13 from the state of FIG. 11B. Thereafter, the process returns to the state of FIG. 11A and is repeated.
  • a liquid reservoir 16 may be provided inside the pin 10 to discharge the liquid 12 to the outside.
  • this method can be applied without depending on the type of the nozzle 11.
  • the actual liquid application location and the location to be applied can be accurately aligned.
  • the coating liquid can be applied to a required place on the substrate.
  • the amount of the coating solution can be accurately applied. It is better to combine the following structure and method with the above structure and method. That is, the following pins can be used as pins in the first to fourth embodiments. The following operations can be used as pin operations. (Embodiment 5: screw)
  • 13A to 13C show the tip portion of the pin 62 of the fifth embodiment.
  • 13D to 13F show a pin 52 of a comparative example.
  • the pin is generally cylindrical.
  • a concave portion 56 and a convex portion 57 are provided on the main body 58 of the pin 62.
  • FIG. 13B only the convex portion 57 is provided on the main body 58 of the pin 62.
  • FIG. 13C only the recess 56 is provided in the main body 58 of the pin 62.
  • the unevenness is continuous on the side surface of the pin 62.
  • a screw spiral groove
  • a recess 56 is provided in the main body 58 of the pin 52.
  • a recess 56 is provided in the main body 58 of the pin 52.
  • the side surface of the main body 58 of the pin 52 is not uneven.
  • the level of the unevenness varies depending on the moving speed of the liquid 53 and the pin 62, but is preferably 1 ⁇ m to 500 ⁇ m, and several ⁇ m to several tens ⁇ m.
  • the interval between the recesses depends on the moving speed of the liquid 53 and the pin 62, and is about 50 ⁇ m to 10 mm. However, it is not limited to these.
  • the irregularities are preferably formed at regular intervals like screws. However, the interval may vary to some extent as long as the unevenness is continuous.
  • the liquid 53 and the pin 62 are easily attached and detached because the liquid smoothly moves through the liquid. As a result, it can be stably applied at a constant application amount.
  • FIG. 14A shows a pin 52 of a comparative example.
  • 14B to 14F show the tip portion of the pin 62 of the embodiment.
  • FIG. 14A shows a cylindrical pin 52 of a comparative example.
  • the liquid repellent process 81 is applied to the side surface 55 of the pin 62.
  • the liquid repellent treatment is applied to all the spiral irregularities on the side surface 55 of the pin 62.
  • the liquid repellent treatment 81 is performed on the concave portion 56 on the side surface of the pin 62, and the liquid repellent treatment 81 is not performed on the convex portion 57.
  • the liquid repellent process 81 is applied to the convex part 57 on the side surface of the pin 62, and the liquid repellent process 81 is not applied to the concave part 56.
  • the lyophilic process 82 is performed on the concave part 56 on the side surface of the pin 62, and the liquid repellent process 81 is performed on the convex part 57.
  • the side surface has irregularities and is continuous. This is similar to FIGS. 13A to 13C. ⁇ Evaluation> Using the pins 52 and 62, a liquid discharge experiment was performed. The dispersion of the coating solution was examined. The results are shown in Table 2.
  • ⁇ There is almost no liquid dispersion. X indicates a large variation in liquid, and ⁇ indicates a variation in liquid within 10%. ⁇ is about 10% of the variation, and ⁇ is the measurement error range.
  • the detachability of the liquid is improved by the liquid repellent treatment 81 on the side surface.
  • the side surface 55 is flat, the liquid is not cut well, and the coating amount varies slightly.
  • the attachment / detachment of the liquid 53 is further improved since the side surface 55 has spiral irregularities as compared with FIG. 14B.
  • the liquid can be smoothly attached to and detached from the pin through the portion of the side surface 55 of the pin 62 where the concave portion 56 is not subjected to the liquid repellent treatment 81.
  • the liquid can be smoothly attached to and detached from the pin via the lyophilic treatment 82 portion of the concave portion 56 of the side surface 55 of the pin 52. The result is the best.
  • the liquid repellent treatment is to coat or form a film with a material that repels the liquid 53 to be applied, that is, a material having a large contact angle.
  • a material that repels the liquid 53 to be applied that is, a material having a large contact angle.
  • a material that repels the liquid 53 to be applied that is, a material having a large contact angle.
  • a hydrophobic material is used.
  • a fluorine compound can be used.
  • the liquid is oil-based, use an oleophobic material.
  • Films can be formed by various methods such as vapor deposition and baking.
  • the lyophilic treatment is to form a coat or a film with a material having a small contact angle with respect to the liquid 53 to be applied.
  • a material having a small contact angle with respect to the liquid 53 to be applied For example, when the liquid is aqueous, a hydrophilic material is used. If the liquid is oil-based, use a lipophilic material.
  • liquid repellent treatment and lyophilic treatment are also included.
  • the film thicknesses of the liquid repellent process 81 and the lyophilic process 82 are not limited. (Embodiment 7: tip portion)
  • FIG. 15B to 15D show side surfaces of the tip portion of the pin 62 of the third embodiment.
  • FIG. 15A is a side view of the tip portion of the pin 52 of the comparative example.
  • FIG. 15A shows a cylindrical pin 52 of a comparative example.
  • FIG. 15B is a pin 62 of the embodiment, and the tip is spherical. Its upper side has a spiral groove.
  • FIG. 15C shows the pin 62 of the embodiment.
  • the pin 62 of FIG. 15B further has a recess 85 between the spherical object at the tip and the spiral groove.
  • the recess 45 is a groove and is provided perpendicular to the longitudinal direction of the pin 62.
  • the pin 62 is provided around the circumference of the pin 62.
  • FIG. 15D shows the pin 62 of the embodiment, which has a sphere shape with a small tip. Its upper side has a spiral groove. There is a slope 88 between the sphere and the helix.
  • ⁇ There is almost no liquid dispersion. X indicates a large variation in liquid, and ⁇ indicates a variation in liquid within 10%. ⁇ is about 10% of the variation, and ⁇ is the measurement error range.
  • the bottom surface 73 and the side surface 74 are constant and do not change. That is, there is no discontinuity on each surface. A certain curved surface or plane. For this reason, the position where the liquid 53 stays cannot be determined, and the amount of the coating liquid changes.
  • the example FIGS. 15B to 15D
  • the liquid 53 tends to stop due to a discontinuous portion between the roundness 86 and the side surface 74.
  • the liquid 53 tends to stop at the recess 85.
  • the liquid 53 tends to stop at the slope 88.
  • FIG. 15C is preferable because the liquid 53 tends to stay in the portion due to the recess 85.
  • the tip portion may be a convex shape toward the lower portion such as a triangular cone even if it is not a sphere. (Embodiment 8: temperature, ultrasonic wave)
  • 16A and 16B are cross-sectional views showing examples of the eighth embodiment.
  • a heater 73 (heating means) is provided on the outer periphery of the nozzle 51.
  • the temperature of the liquid 53 is raised by the heater 73 and the viscosity of the liquid 53 is lowered.
  • the detachability is improved.
  • it is not limited to 1000 mPa ⁇ s.
  • variation in coating amount can be reduced by maintaining a constant temperature.
  • an ultrasonic horn 72 (ultrasonic application mechanism) is provided on the outer periphery of the nozzle 51. Ultrasound is applied when the pin 62 leaves or enters the nozzle 51. As a result, the liquid 53 is cut by vibration and does not become as shown in FIGS. 13E and 13F. (Embodiment 9: rotation)
  • FIG. 17A shows the pin 52 of the comparative example
  • FIGS. 17B to 17D show the pin 62 of the embodiment.
  • the arrows at the bottom of FIGS. 17B to 17D indicate the rotation direction 90.
  • FIG. 17A moves in the vertical direction (vertical direction) without rotating by the cylindrical pin 52.
  • FIG. 17B rotates clockwise by a cylindrical pin 62 and moves up and down.
  • FIG. 17A shows a pin 62 having a spiral groove on the side surface, which rotates clockwise and moves up and down. The clockwise rotation is a direction of entering downward when assuming a screw.
  • FIG. 17A shows a pin 62 having a spiral groove on the side surface, and rotates counterclockwise and moves up and down. The left rotation is the direction opposite to the downward direction when assuming a screw.
  • X is large in variation of liquid, and ⁇ is within 10% with small variation in liquid. If there is no groove on the side, even if the pin is rotated, the dispersion of the liquid is not improved. Moreover, even if there is a groove, if the direction is the direction of the groove, it is not improved. By rotating in the direction opposite to the direction of the groove, the dispersion of the liquid can be suppressed. By rotating in the reverse direction, the connection between the liquid and the pin is cut, and the dispersion of the liquid is suppressed.
  • the rotation may be performed when the tip of the pin 62 comes out of the nozzle 51 or enters.
  • rotation is not necessary.
  • the rotation speed is preferably 5 to 500 rpm. Other than this may be used.
  • FIG. 18 shows a coating apparatus 240 according to the tenth embodiment. It has a coating unit 110, a frame 114 that holds and moves the coating unit 110, a stage 113 (driving unit) that holds and moves the coating object 112, and a control device 115 that controls the entire coating apparatus 240.
  • the coating unit 110 is the nozzle 51 (pin 62) of any of the above embodiments.
  • the coating unit 110 can move in one direction along the frame 114, and the coating object 112 can move in another direction by the stage 113. After the application unit 110 and the object to be coated 112 have moved to the target arrangement, the liquid is applied onto the object to be coated 112 by the pins 52 of the coating unit 110. (Note)
  • the above embodiments can be combined. The order of the above steps can be changed if the results of the previous step are not used.
  • the movement between the coating unit 110 and the object 112 may be relatively moved. Only one side may be moved. Although not shown, the nozzle 51 (pin 62) can also be moved in the direction of the stage 113. In addition, various options can be added.
  • the liquid may contain a solid component. The above embodiments can be combined.
  • the pin may be produced by cutting a metal. Moreover, you may produce by winding a wire around a pin. You may produce by another method. The manufacturing method is not limited.
  • the application method of the present application can apply various liquids to various substrates in an accurate amount at an accurate position.

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  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

Cette invention concerne un procédé d'application qui est utilisé pour appliquer un liquide à un substrat selon une certaine condition d'application, le procédé comprenant une étape d'agencement qui consiste à agencer le substrat, une étape d'application préalable qui consiste à appliquer un liquide au préalable à l'aide d'une broche, une première étape de mesure qui consiste à mesurer la quantité appliquée de liquide appliqué par l'étape d'application préalable, et une étape de détermination qui consiste à déterminer une condition d'application du liquide par la broche en fonction de l'étape de mesure. Dans la présente invention, un dispositif d'application est utilisé, ledit dispositif comprenant : un étage pour retenir le substrat ; une buse comportant une broche et renfermant le liquide, la buse se trouvant au-dessus de l'étage, et étant mobile par rapport à celui-ci ; et une partie mesure sur laquelle le liquide est appliqué au préalable et sur laquelle le liquide appliqué est quantifié.
PCT/JP2016/051076 2015-01-21 2016-01-15 Dispositif et procédé d'application de revêtement, et unité d'application de revêtement WO2016117455A1 (fr)

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