WO2016052183A1 - 半導体モジュール - Google Patents
半導体モジュール Download PDFInfo
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- WO2016052183A1 WO2016052183A1 PCT/JP2015/076226 JP2015076226W WO2016052183A1 WO 2016052183 A1 WO2016052183 A1 WO 2016052183A1 JP 2015076226 W JP2015076226 W JP 2015076226W WO 2016052183 A1 WO2016052183 A1 WO 2016052183A1
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- case
- terminal
- semiconductor module
- external terminal
- vertical piece
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- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/043—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body
- H01L23/049—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body the other leads being perpendicular to the base
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- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
- H01L23/24—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device solid or gel at the normal operating temperature of the device
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
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- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
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Definitions
- the present invention relates to a semiconductor module in which a substrate on which a power semiconductor chip such as a thyristor or a transistor is mounted is housed in a resin case and the case is sealed with a gel agent or an epoxy resin.
- the manufacturing process of a semiconductor module in which a substrate on which a power semiconductor chip is mounted is housed in a resin case and the case is sealed with a gel or epoxy resin includes the following steps.
- a process of mounting a semiconductor chip etc. on a substrate placed on the base and soldering by solder reflow a process of bonding and fixing the aligned case and the base plate, silicon gel or epoxy resin in the case It includes a step of injecting and thermosetting, a step of inserting an external terminal into the case, and a step of bending. And visual inspection is performed after completion
- Patent Document 1 proposes a configuration including a case main body with an entire upper portion opened and a lid to which an external terminal covering the upper opening of the case main body is attached.
- an internal circuit is soldered in a solder reflow process in a state where the case main body and the lid are combined in place on the substrate, and at the same time, the case main body and the lid are bonded.
- Patent Document 2 includes a case main body having an upper surface opened, and a lid that covers the opening of the case main body and has a hole formed to insert an external terminal extending upward from the substrate. Has been proposed.
- the internal circuit is soldered in a solder reflow process with the case main body and external terminals fixed with a jig, and then silicon gel or epoxy resin is injected into the case main body. Then, the external terminal is inserted into the hole of the lid to fix the lid, and finally the external terminal is bent.
- the substrate can be sealed with silicon gel or epoxy resin after solder reflow, but the sealing material itself is caused by thermal stress applied to the sealing material when the module is used. It is not a structure that misses the expansion. For this reason, in the process in which the sealing material itself repeats expansion and contraction, the interface between the sealing material and the substrate may be peeled off, or a crack may occur in the epoxy resin on the sealing material.
- An object of the present invention is to provide a semiconductor module in which soldering can be easily observed and a solder reflow process can be performed with an external terminal attached to a case.
- a further object of the present invention is to provide a semiconductor module with high mounting accuracy when soldering external terminals.
- a further object of the present invention is to provide a semiconductor module capable of absorbing physical changes even when the sealing material for sealing the substrate repeatedly expands and contracts due to thermal stress. It is another object of the present invention to provide a semiconductor module that prevents the sealing material from being inhibited from being cured, which may be caused by a cleaning agent remaining during cleaning after solder reflow.
- the semiconductor module of the present invention is A rectangular base plate, a terminal for driving a semiconductor chip on the base plate, for example, a substrate such as a ceramic substrate on which a circuit including a gate terminal and a semiconductor chip is formed, and the base plate are attached to the base plate.
- a rectangular parallelepiped resin case to be stored, and a plurality of external terminals whose lower ends are fixed to the substrate so that the upper ends are exposed on the upper surface of the case are provided.
- the semiconductor chip is, for example, a power control thyristor, diode, or transistor chip.
- the case is made of a resin material such as PPS (polyphenylene sulfide).
- the case is A first case opening cut out from the upper side of the front of the case along the longitudinal direction; A second case opening cut out from the upper side of the back of the case along the longitudinal direction; provided on the upper surface of the case between the first case opening and the second case opening; And an external terminal holding part that holds the plurality of external terminals with their upper ends exposed.
- the plurality of external terminals are held by the external terminal holding portion. Thereby, when attaching the case to the base plate, the external terminals can be attached to the substrate on the base at the same time. Further, since there are the first case opening and the second case opening, the soldering state on the substrate inside the case can be easily visually confirmed after the solder reflow process. Since the first case opening is disposed on the front surface of the case and the second case opening is disposed on the back surface of the case, when visual inspection is performed, the front and back surfaces of the case are placed on the substrate in the case. Enough light enters. For this reason, visual inspection of the soldered state is easy.
- the case includes a central chamber in which a substrate on which a semiconductor chip, which is an important component related to module performance, is mounted, a stress absorption chamber, and a drive terminal in which a drive terminal for driving the semiconductor chip is routed
- the room is divided into three rooms. Since the case is partitioned into each room, even if dust or the like enters the stress absorption chamber or the drive terminal chamber, the influence on the central chamber can be prevented.
- the first case opening, the second case opening, and the external terminal holding portion in the central chamber only the portion that requires visual inspection in the manufacturing process is provided from the outside. Since the inside is opened, the stress absorption chamber and the drive terminal chamber that do not require visual inspection can be manufactured in a state of being covered with a case.
- a sealing material for example, a gel such as silicon gel and a resin are respectively injected from the case opening to the upper surface of the substrate.
- a sealing material for example, a gel such as silicon gel and a resin are respectively injected from the case opening to the upper surface of the substrate.
- the sealing material either one of gel or resin, or both of them can be used.
- a lid is further provided.
- the lid includes an upper surface formed with a terminal lead portion where the plurality of external terminals are exposed on the upper surface, and covers the case openings on the front surface and the rear surface from the upper surface downward.
- the external terminal holding portion can be reinforced to prevent dust and dust from entering the case through the case opening. Even when the substrate is sealed with a sealing material, the strength of the external terminal holding portion, and thus the semiconductor module, can be increased by covering the case opening with this lid.
- the lid body can be provided with a leg portion that reaches the sealing material at a lower portion of the cover. By providing such a leg portion, the leg body is fixed in a step of curing the sealing material. Can be fixed to the case.
- the external terminal includes a first vertical piece provided between the upper end and the lower end.
- the external terminal holding portion regulates movement of the first vertical piece of the external terminal in a horizontal direction. It has a first vertical piece holding part that slides and guides in the vertical direction, The external terminal is movable in the vertical direction and restricted in the horizontal direction via the external terminal holding portion before the case is attached to the base plate.
- the external terminal is held by the external terminal holding part before the soldering process.
- the external terminal is movable in the vertical direction via the external terminal holding portion and is restricted from moving in the horizontal direction. Therefore, before soldering, the soldered portion at the lower end of the external terminal is in contact with the circuit of the substrate via the solder paste, and the external terminal is in a state of being lifted upward by the thickness of the solder paste. At this time, no external force is applied in the vertical direction of the external terminal. Further, the movement of the external terminal is restricted in the horizontal direction so that the position of the external terminal does not shift. Next, when the soldering process is started (solder reflow), the solder paste is melted, so that the external terminal descends by its own weight, and the soldering portion at the lower end is soldered onto the circuit.
- the external terminal is made free in the vertical direction and soldering is performed by using the lowering due to its own weight, unnecessary external force is not applied to the external terminal during soldering. Further, since the external terminal can be bent before soldering, no internal stress is generated in the external terminal during soldering, and the bending process itself can be easily performed by the external terminal alone. By soldering using the free fall of the external terminal, soldering between the soldered part at the lower end of the external terminal and the circuit on the board is ensured, and at the connecting part between the lower end and the circuit (semiconductor chip, etc.) Large stress does not cause damage or contact failure.
- the external terminal has a narrow width portion narrower than the width of the vertical piece formed continuously with the first vertical piece
- the first vertical piece holding portion has an insertion port formed by opening one surface of a through hole, and a plurality of first guide grooves formed on both right and left sides of the insertion port,
- the width between the plurality of first guide grooves is such that the first vertical piece of the external terminal can slide and be guided, and the width of the insertion slot is narrower than the width of the first vertical piece.
- a width equal to or greater than the narrow width portion is provided.
- the first vertical piece When attaching the external terminal, the first vertical piece is moved downward while passing through the first guide groove. At this time, since the narrow width portion is narrower than the width of the insertion slot, even if the narrow width portion is bent from the vertical piece, the entire external terminal can move downward. Therefore, the external terminal can be bent in advance.
- the external terminal comprises a rectangular hole in a horizontal piece obtained by bending the first vertical piece
- the external terminal holding part comprises a rectangular protrusion inside the case
- the external terminal is securely fixed to the case by engaging the rectangular hole of the external terminal with the rectangular protrusion inside the case.
- the case is A first partition wall formed vertically in the case; A central chamber and a stress absorption chamber partitioned by the first partition wall; The substrate is disposed in the central chamber,
- the stress absorption chamber includes a space portion having a size equal to or larger than a volume expansion due to thermal stress of the sealing material, and a small hole communicating with the outside provided above.
- the reason why the stress absorbing chamber is provided is as follows.
- Sealing material for example, gel such as silicon gel, repeats expansion and contraction due to thermal stress received from a semiconductor chip or substrate during normal use, and therefore it is necessary to provide a space for absorbing the volume change in advance.
- the stress absorbing chamber performs its function.
- the reason why the stress absorbing chamber has a small hole communicating with the outside is as follows.
- the small hole completely discharges the gas generated when the sealing material is thermally cured. Since there is no residual gas, there is no deterioration in characteristics over time of the wall surface of the stress absorption chamber. Further, since the cleaning liquid can flow through the small holes at the time of cleaning after the solder reflow, the circulation in the case at the time of cleaning is improved, and the cleaning liquid does not remain in the stress absorption chamber. For this reason, it is possible to prevent a curing inhibition phenomenon in which the cleaning liquid remains and the sealing material is hardly thermally cured. Further, since the circulation in the case during cleaning is improved, the cleaning performance of the substrate is improved.
- the external terminal by attaching the external terminal to the external terminal holding portion before bonding the case to the base plate, the external terminal can be attached to the substrate on the base plate at the same time when the case is attached to the base plate. it can. Further, since there are the first case opening and the second case opening, the soldering state on the substrate inside the case can be easily visually confirmed after the solder reflow process. Since these case openings are on the front and back surfaces, sufficient light enters the substrate from the front and back surfaces during visual inspection. For this reason, light can be sufficiently taken into the case, and visual inspection of the soldered state is possible.
- a sealing material for example, one or both of a gel such as silicon gel and a resin is injected from the case opening to the upper surface of the substrate.
- a gel such as silicon gel
- a resin is injected from the case opening to the upper surface of the substrate.
- each injection is easy. Workability is very good.
- soldering can be performed using the lowering due to its own weight, no internal stress is generated in the external terminal. Also, soldering between the soldered portion at the lower end of the external terminal and the circuit on the substrate is ensured, and a large stress is not generated at the connecting portion between the lower end and the circuit to cause peeling or poor contact.
- the stress absorption chamber having a space portion larger than the volume expansion due to the thermal stress of the sealing material since the stress absorption chamber having a space portion larger than the volume expansion due to the thermal stress of the sealing material is provided, the volume change due to the thermal stress of the sealing material is absorbed by the stress absorption chamber. . Further, since a small hole communicating with the outside is formed above the stress absorption chamber, the gas generated when the sealing material is cured is completely discharged to the outside. Thereby, the interface between the substrate and the sealing material in the central chamber is maintained in a physically stable state, and there is no adverse effect of physical change of the wall surface of the stress absorption chamber due to the residual gas. Further, since the cleaning liquid used at the time of cleaning after the solder reflow is discharged to the outside from the small holes, it is possible to prevent the inhibition of the curing of the sealing material due to the remaining cleaning liquid.
- the perspective view of the semiconductor module of embodiment of this invention Disassembled perspective view of semiconductor module
- the perspective view which shows a mode when attaching an external terminal to a case Cross section of the semiconductor module before the solder reflow process
- Cross section of semiconductor module after solder reflow process Perspective view of case with external terminals attached
- the figure which shows typically the injection amount of the silicon gel 10, and the injection amount of the epoxy resin 11
- FIG. 1 is a perspective view of a semiconductor module according to an embodiment of the present invention
- FIG. 2 is an exploded perspective view thereof
- FIG. 3 is a perspective view showing a state when external terminals are attached to a case
- FIG. 4 is a semiconductor before a solder reflow process.
- a cross-sectional view of the module is shown.
- FIG. 5 shows a cross-sectional view of the semiconductor module after the solder reflow process.
- FIG. 6 is a perspective view of the case to which the external terminal is attached.
- FIG. 7 is a diagram schematically showing the injection amount of the silicon gel 10 and the injection amount of the epoxy resin 11.
- the semiconductor module 1 has a rectangular parallelepiped shape as a whole, and terminal portions 30a to 30c which are upper ends of three external terminals are exposed at an upper portion.
- the module 1 includes a metal base plate 2 (see FIG. 2) located in the lower part thereof and a top surface, a front surface, a back surface, a left side surface, and a right side surface that cover the entire inside of the module including the base plate 2. 4 and a lid 5 that covers the case 4 from above.
- the semiconductor module 1 is partitioned into three rooms, a central chamber 9a, a stress absorbing chamber 9b, and a gate terminal chamber 9c.
- a gate terminal as a driving terminal, a semiconductor chip, a circuit pattern, and the like are arranged. These are important parts related to product quality.
- a stress absorption chamber 9b is disposed on the left side of the central chamber 9a.
- a gate terminal chamber 9c around which the gate terminal 7 is routed is disposed on the right side of the central chamber 9a.
- the lid 5 covers the central chamber 9a.
- a partition wall 15a is provided between the central chamber 9a and the stress absorption chamber 9b.
- a silicon gel inflow hole 12a is provided at the lower portion of the partition wall 15a.
- a partition wall 15b is provided between the central chamber 9a and the gate terminal chamber 9c.
- a gate terminal hole 12b through which the gate terminal 7 is wired is provided at the lower part of the partition wall 15b. Details of the silicon gel inflow hole 12a and the gate terminal hole 12b will be described later.
- the lid 5 is provided with legs 50 that are bonded in the step of curing the epoxy resin, as will be described in detail in the manufacturing process described later.
- the case 4 and the lid 5 are made of a resin material such as PPS (polyphenylene sulfide) that is thermoplastic, environmentally friendly, can be cured at high temperature, and has high thermal conductivity.
- PPS polyphenylene sulfide
- a copper circuit pattern is formed on a ceramic substrate 6 for electrical insulation from a base plate 2 on a metal base plate 2. Since the ceramic substrate 6 is very thin, the heat of the ceramic substrate 6 is easily diffused through the base plate 2.
- a circuit element including a semiconductor chip for power control, a circuit pattern, an internal terminal 60 and the like are mounted on the ceramic substrate 6.
- the semiconductor chip is, for example, a power control thyristor, diode, or transistor chip.
- the ceramic substrate 6 is soldered with soldered portions 32a to 32c which are lower ends of the three external terminals 3a to 3c held by the case 4.
- the upper ends of the external terminals 3a to 3c are bent to form terminal portions 30a to 30c.
- the left and right external terminals 3a and 3c and the central external terminal 3b are differently attached to the case 4, and therefore, these terminals have different shapes.
- the external terminals 3a and 3c are formed by vertically folding the vertical pieces 31a and 31c, terminal portions 30a and 33c obtained by horizontally bending the upper portions of the vertical pieces 31b, and horizontally below the center of the vertical pieces 31a and 31c. Bending horizontal pieces 33a and 33c, lower vertical pieces 34a and 34c obtained by bending these horizontal pieces 33a and 33c downward, and solders obtained by bending the lowermost ends of these lower vertical pieces 34a and 34c Soldering portions 32a and 32c used for attaching. In addition, rectangular fitting holes 36a and 36c are provided at the center of the horizontal pieces 33a and 33c.
- At least the lower surfaces of the horizontal pieces 33a and 33c are formed to be equal to or less than the height of the case opening lower side portion 40L (see FIGS. 4 and 5) when the soldering portions 32a and 32c are soldered to the ceramic substrate 6. ing.
- the central external terminal 3b includes a vertical piece 31b, a terminal portion 30b horizontally bent above the vertical piece 31b, a horizontal piece 33b horizontally bent below the center of the vertical piece 31b, The lower vertical piece 34b which bent this horizontal piece 33b below, and the soldering part 32b used for soldering which bent the lowermost end of this lower vertical piece 34b are provided.
- the second vertical piece 36 is provided so that the back side of the terminal portion 30b is bent downward and is opposed to the vertical piece 31b.
- the lower vertical piece 34b is formed by once bending the vertical piece 31b to the front side and then bending it downward. For this reason, the surface of the lower vertical piece 34b is disposed on the front side of the surface of the vertical piece 31b.
- a narrow portion 35 (see FIG. 3) narrower than the vertical piece 31b is formed at the lower end of the vertical piece 31b between the vertical piece 31b and the horizontal piece 33b.
- the case 4 has left and right first and second partition walls 15a and 15b, and the partition wall 15a and 15b allows the case 4 to be placed in a central chamber 9a, a stress absorption chamber 9b, and a gate terminal chamber.
- (Drive terminal chamber) 9c is partitioned.
- a silicon gel inflow hole 12a is formed in the lower part of the first partition wall 15a, and the central chamber 9a and the stress absorption chamber 9b communicate with each other through the silicon gel inflow hole 12a.
- a gate terminal hole 12b for routing the gate terminal 7 from the central chamber 9a to the gate terminal chamber 9c is formed below the second partition wall 15b.
- the central chamber 9a and the gate terminal chamber 9c are separated from the gate terminal hole 12b. Communicate through.
- the gate terminal hole 12b includes a plurality of protrusions in a comb-teeth shape when viewed from the side so that the plurality of gate terminals 7 can be separated and routed.
- the height of the silicon gel inflow hole 12a and the gate terminal hole 12b will be described later.
- a stress absorption chamber 9b is provided at one end of the case 4, in this example, the left side. Small holes 90 and 91 are formed from the upper surface or side surface of the stress absorption chamber 9b or from the upper surface to the side surface. Further, a gate terminal chamber 9c (drive terminal chamber) is provided at the other end of the case 4, in this example, the right side. A gate opening 41 is formed on the upper surface of the gate terminal chamber 9c. The gate terminal 7 routed from the central chamber 9a through the gate terminal hole 12b is exposed to the outside through the gate opening 41.
- the central chamber 9a is formed between the stress absorption chamber 9b and the gate terminal chamber 9c, and is surrounded by the first and second partition walls 15a and 15b and the front, back and top surfaces of the case 4.
- the case 4 has a first case opening 40a in which the front surface of the case 4 is cut out from the upper side along the longitudinal direction, and a second case opening portion in which the back surface of the case 4 is cut out from the upper side along the longitudinal direction. 40b (see FIGS. 2 and 6).
- the first case opening 40a and the second case opening 40b are set to a length between the partition walls 15a and 15b in the longitudinal direction. Further, in the vertical direction, the height of the case opening lower side 40L is set from the upper surface of the case 4.
- the external terminal holding part 42 is located between the first case opening 40a and the second case opening 40b.
- a stress absorbing chamber 9b and a gate terminal chamber 9c on the left and right, and a central chamber 9a in the middle between them.
- a first case opening 40a and a second case opening 40b on the front side and back side thereof, and between the first case opening 40a and the second case opening 40b.
- I-shaped external terminal holding portion 42 From the first case opening 40a and the second case opening 40b, the case opening lower side 40L can be seen.
- the front surface of the central chamber 9a is located between the stress absorbing chamber 9b and the front surface of the gate terminal chamber 9c.
- the inside of the central chamber 9a can be seen from the first case opening 40a and the second case opening 40b.
- the external terminal holding portion 42 is provided with terminal surfaces 48a to 48c on the upper surface. Terminal portions 30a to 30c of external terminals are arranged on the terminal surfaces 48a to 48c. A concave recess is formed between the terminal surfaces 48a and 48b and between the terminal surfaces 48b and 48c to increase the linear distance for insulation. Small holes 47 (see FIGS. 4 and 5) are formed in these recesses. A small hole 92 (see FIGS. 4 and 5) is also formed on the upper surface between the terminal surface 48a and the first partition wall 15a (stress absorption chamber 9a).
- rectangular through holes 44a to 44c are formed in which the vertical pieces 31a and 31c of the external terminals 3a and 3c can slide in the vertical direction. Further, rectangular projections 42a and 42c projecting downward are formed on the opposite surfaces of the terminal surfaces 48a and 48c of the external terminal holding portion 42 (see FIG. 4). The heights of the lower ends of the rectangular protrusions 42a and 42c are set to be equal to or lower than the height of the case opening lower side portion 40L.
- These through holes 44a and 44c and the rectangular protrusions 42a and 42c constitute left and right vertical piece holding portions 43a and 43c.
- An insertion port 45 is formed in the central vertical piece holding portion 43b.
- the insertion port 45 is formed to have a width and thickness such that the front side of the rectangular through hole is opened and the vertical piece 31b of the external terminal 3b is slidable in the vertical direction.
- Guide grooves 44 b are formed at the left and right ends of the insertion port 45.
- the vertical piece holding part 43b whose back surface is opened is similarly formed on the back side of the case 4.
- the guide groove 44b is formed from the upper surface of the external terminal holding portion 42 to a height equal to or lower than the height of the case opening lower side portion 40L.
- the width of the guide groove 44b is set such that the vertical piece 31b of the external terminal 3b is slidable in the vertical direction, and the width of the insertion port 45 is set narrower than the vertical piece 31b and wider than the narrow width portion 35. .
- the horizontal piece 33b cannot pass through the insertion port 45. For this reason, the vertical piece 31b cannot be inserted and attached to the vertical piece holding portion 43b.
- the vertical piece 31b can be attached to the vertical piece holding portion 43b even in a state of being bent into the final form. That is, when the narrow portion 35 is positioned at the upper end of the vertical piece holding portion 43 b, the portion below the narrow portion 35 protrudes to the front side of the insertion port 45. In this state, when the narrow portion 35 is inserted from above the insertion port 45, the vertical piece 31b is inserted into the guide groove 44b. At this time, the portion below the narrow width portion 35 protrudes to the front side of the insertion port 45, so that the vertical movement of the vertical piece 31b is not hindered. Further, since the width of the vertical piece 31b is wider than that of the insertion port 45, the vertical piece 31b is held without being removed from the front surface of the guide groove 44b, and can be moved up and down along the guide groove 44b.
- the central external terminal 3b is attached and held to the vertical piece holding portion 43b in a state where the terminal portion 30b is bent at the central external terminal 3b, that is, in a state where the external terminal 3b is completed in the final shape. be able to.
- the vertical piece 31b is pushed down from above along the guide groove 44b, the second vertical piece 36 is inserted into the guide groove 44b on the back side in the vicinity of the upper portion of the external terminal 3b. Thereafter, when the vertical piece 31b is further pushed down, the terminal portion 30b comes into contact with the terminal surface 48b of the external terminal holding portion 42 and cannot move further down.
- the vertical piece 31b is held by the vertical piece holding portion 43b as described above, the vertical piece 31b is restricted by the guide groove 44b so that it cannot move in the front-rear and left-right directions.
- the narrow portion 35 is formed below the vertical piece 31b.
- the horizontal piece 33b itself may be the narrow portion 35.
- the second vertical piece 36 and the guide groove 44b on the rear side are provided to hold the external terminal 3b firmly and stably by the vertical piece holding portion 43b. However, they can be omitted.
- the horizontal piece 33b and the lower vertical piece 34b were formed in the external terminal 3b, the lower vertical piece 34b is abbreviate
- the external terminals 3a and 3c are formed by bending the vertical pieces 31a and 31c to form horizontal pieces 33a and 33c, bending them downward to form the lower vertical pieces 34a and 34c, and then bending the bottom end. Thus, soldered portions 32a and 32c are formed.
- the fitting holes 33a and 33c of the horizontal pieces 33a and 33c of the external terminals 3a and 3c are fitted into the rectangular protrusions 42a and 42c provided so as to protrude downward on the opposite surfaces of the terminal surfaces 48a and 48c. (See FIG. 4).
- the external terminals 3a and 3c are held by the vertical piece holding portions 43a and 43c.
- the external terminals 3a and 3c are positioned on the vertical piece holding portions 43a and 43c by the rectangular protrusions 42a and 42c and the fitting holes 33a and 33c, but are not fixed. Therefore, after the external terminals 3a and 3c are held by the vertical piece holding portions 43a and 43c, the terminal portions 30a and 30c are bent.
- the external terminals 3a and 3c are restricted from moving in the horizontal direction of the front, rear, left and right.
- the external terminals 3a and 3c form horizontal pieces 33a and 33c and lower vertical pieces 34a and 34c, but the lower vertical pieces 34a and 34c are also used as the soldering portions 32a and 32c, and the horizontal pieces 33a and 33c are omitted. It is also possible to do.
- the external terminals 3a and 3c are restricted from moving in the horizontal direction by the fitting holes 36a and 36c and the rectangular protrusions 42a and 42c, and the external terminal 3b is restricted from moving in the horizontal direction by the guide groove 44b.
- these external terminals 3a to 3c are positioned without being completely fixed, and the vertical pieces 31a to 31c are movable up and down by a few millimeters along the vertical piece holding portions 43a to 43c. It has become.
- the soldering portions 32a to 32c of the external terminals 3a to 3c are moved upward by a weak force that comes into contact with the ceramic substrate of the base plate 2. Even if there is a slight error in the height direction, the error can be absorbed. Therefore, it is possible to prevent problems such as the external terminals 3a to 3c strongly damaging the semiconductor chip or the like, and the external terminals 3a to 3c are inclined or bent.
- FIG. 3 shows how the three external terminals 3a to 3c are attached to the case 4 in this way.
- the external terminals 3a and 3c are as follows.
- the external terminals 3a and 3c are inserted into the through holes 44a and 44c from below, and the rectangular protrusions 42a and 42c are fitted into the fitting holes 36a and 36c.
- the external terminals 3a and 3c are not completely fixed.
- the external terminals 3a and 3c are positioned and held by the vertical piece holding parts 43a and 43c, and the terminal parts 30a and 30c are bent. In this state, the external terminals 3a and 3c can move in the vertical direction with a slight force.
- the external terminal 3b is as follows.
- the narrow portion 35 of the vertical piece 31b is inserted from the upper end of the guide groove 44b of the vertical piece holding portion 43b with the horizontal piece 33b as the front side.
- the portion below the narrow portion 35 of the external terminal 3b protrudes from the insertion port 45 to the front side, and the vertical piece 31b can move in the guide groove 44b.
- the second vertical piece 36 is also inserted into the guide groove 44b on the back side near the top of the external terminal 3b. Further, when the vertical piece 31b is pushed down, the terminal portion 30b comes into contact with the terminal surface 48b and the descent stops.
- both sides of the front-side vertical piece 31b and the back-side second vertical piece 36 are held in the guide groove 44b. That is, when the external terminal 3b is held by the vertical piece holding portion 43b, the movement of the external terminal 3b in the front-rear and left-right directions is restricted. In this state, the external terminal 3b is not completely fixed and can move in the vertical direction with a little force.
- the external terminal 3a is in a state before being inserted into the vertical piece holding portion 43a
- the external terminal 3b is in a state before being inserted into the vertical piece holding portion 43b
- the external terminal 3c is inserted into the vertical piece holding portion 43c.
- the state which bent the terminal part 30c is shown.
- FIG. 4 shows a state in which the three external terminals 3a to 3c are attached to the case 4 as described above.
- the semiconductor module 1 can also be provided with a lid 5 that covers the case 4.
- the lid 5 covers the case opening 40 formed in the central chamber 9 a of the case 4.
- Creep portions 53a to 53d are provided on the upper surface of the lid 5 in order to ensure an electrical creepage distance between the terminals.
- the creeping portions 53a to 53d are U-shaped protruding downward.
- the creeping portion 53b has a shape that fits into a recess between the terminal surfaces 48a-48b of the external terminal holding portion.
- the creeping portion 53c has a shape that fits into a recess between the terminal surfaces 48b-48c of the external terminal holding portion.
- the creeping portions 53a and 53d at the left and right ends are disposed on both outer sides of the terminal surfaces 48a and 48c.
- terminal lead-out portions 54 a to 54 c that expose the terminal portions 30 a to 30 c when the lid 5 is put on the case 4 are formed. Further, numbers representing the respective terminals are engraved on the upper surface of the lid 5, and the direction in which the lid 5 is covered with the case 4 is determined. Therefore, it is preferable to form a concave portion and a convex portion that fit together in the external terminal holding portion 42 and the lid body 5 of the case so as not to make a mistake in the direction of covering the lid body 5. As shown in FIG.
- a convex portion 46 is provided on the right side portion of the right terminal surface 48 c of the external terminal holding portion 42, and a concave portion 52 is provided on the right side surface portion 53 d of the terminal lead portion 54 c of the lid 5.
- the concave portion 52 of the lid 5 fits into the convex portion 46 of the external terminal holding portion 42.
- the concave portion 52 of the lid 5 does not fit into the convex portion 46 of the external terminal holding portion 42.
- the lid body 5 since the lid body 5 is disposed in the reverse direction at 180 ° C., the reverse surface portion 53 a of the lid body 5 is disposed oppositely on the convex portion 46 of the external terminal holding portion 42. For this reason, the creeping portion 53a of the lid body 5 rides on the convex portion 46, and the right side thereof rises.
- a rectangular cover 51 is formed on the front surface and the back surface of the lid 5, and the leg portions 50 are directed downward at a slightly inner position so that they can enter inside the front surface and the back surface of the case 4 at the four corners of the cover. Is formed.
- the creeping portions 53 a and 54 d of the lid 5 are arranged on the outer upper surfaces of the terminal surfaces 48 a and 48 c of the external terminal holding portion 42. Further, the creeping portions 52b and 52c fit into the recesses between the terminal surfaces 48b-48c of the external terminal holding portion 42. Further, the external terminals 3a to 3c are drawn from the terminal lead portions 54a to 54c of the lid 5. As a result, the case opening 40 is covered and sealed.
- leg part 50 of the cover body 5 is located below the case opening lower side part 40L in a state where the cover body 5 is covered with the case 4.
- the leg portion 50 is formed to have a length that is the same as the position of the lower end of the rectangular protrusions 42a and 42c.
- the lid of the conventional semiconductor module has a thin flat shape, and the thin side surface is lifted with a finger and assembled on the case.
- the cover 5 since the cover 5 has the cover 51 that covers the case opening 40, the cover 5 can have the front surface and the back surface of the cover 51 having a wide area from the lateral direction. For this reason, the lid 5 can be easily grasped with one hand and can be easily put on the case 4.
- the lid body 5 since the lid body 5 is put on the case 4 after the leg portion 50 is inserted inside the central chamber 9a of the case 4, the positioning of the lid body 5 is easy.
- the leg 50 may be provided with a claw for fitting the leg 50 and the case 4, and the case 4 may be provided with a recess for fitting with the claw.
- the case 4 may be provided with a guide groove along the leg so that the leg can be guided to a fixed position of the case. If it does in this way, position alignment with lid 5 and case 4 will become easier, and work efficiency will improve.
- the case opening 40 is filled with a gel such as a silicone gel 10 as a sealing material or a resin such as an epoxy resin 11 before being covered with the lid 5 and cured.
- a gel such as a silicone gel 10 as a sealing material or a resin such as an epoxy resin 11
- the lid 5 does not affect the function of the semiconductor module and is not necessarily required.
- the external terminal holding portion 42 in the state sealed with the sealing material, the external terminal holding portion 42 is bridged in a state where the left and right and the bottom are hollow, and thus the strength is not sufficient.
- the external terminal holding part 42 can be reinforced by the lid 5.
- the lid 5 prevents dust and dust from entering the gap on the sealing material.
- the ceramic substrate 6, the semiconductor chip, and the internal terminals 60 are placed on the base plate 2 with a predetermined alignment.
- a solder paste or a conductive adhesive that is used for soldering by melting in a later solder reflow process is applied.
- solder pastes 8a to 8c (see FIG. 4) for soldering the soldered portions 32a to 32c of the external terminals 3a to 3c are also applied to the upper surface of the internal terminal 60.
- each of the three external terminals 3a to 3c is not completely fixed, and is slightly movable in the vertical direction. That is, the vertical pieces 31a to 31c are restricted from moving back and forth and left and right by the vertical piece holding portions 43a to 43c, but are slightly movable in the vertical direction.
- thermosetting adhesive is applied to the base 2 to cover the case 4.
- the lower side of the vertical piece 31b of the external terminal 3b is omitted.
- the soldering portions 32a to 32c are arranged on the solder pastes 8a to 8c and the case 4 is covered, the soldering portions 32a to 32c are pushed up by the solder pastes 8a to 8c, and the external terminals 3a ⁇ 3c moves up by length t.
- the vertical position of the external terminals 3a to 3c is adjusted by this length t, and the error is absorbed.
- the thickness of the solder pastes 8a to 8c is about 300 ⁇ m to 500 ⁇ m.
- the external weights of the external terminals 3a to 3c are applied to the solder pastes 8a to 8c.
- the positions of the external terminals 3a to 3c are determined by the self weight.
- the external terminals 3a to 3c are completely fixed to the case 4, and then the base plate 2 is covered with the case 4.
- this conventional structure has a problem if there is an error in the height of the external terminals 3a to 3c. That is, the soldered portions 32a to 32c do not reach the solder pastes 8a to 8c, causing a connection failure.
- the semiconductor chip is strongly pressed by the external terminals 3a to 3c through the solder pastes 8a to 8c, and is broken. Also, the external terminals 3a to 3c themselves are tilted or distorted.
- the external terminals 3a to 3c are attached to the case 4 so as to be movable up and down.
- the external terminals 3a to 3c that have moved downward due to their own weight rise by the length t.
- the soldered portions 32a to 32c of the external terminals 3a to 3c are surely in contact with the solder pastes 8a to 8c. That is, the vertical alignment of the external terminals 3a to 3c can be automatically performed. Also, the external terminals 3a to 3c can prevent problems such as damage to the semiconductor chip and bending of the external terminals.
- the entire semiconductor module is moved to the solder reflow process and soldered.
- the solder paste is melted to solder each element, and at the same time, the case 4 is bonded and fixed to the base 2.
- the solder pastes 8a to 8c are melted, and as a result, the external terminals 3a to 3c are lowered by their own weight.
- the external terminals 3a to 3c are lowered by t ⁇ , where ⁇ is the height of the solder joint layer.
- the external terminals 3a to 3c are not displaced in the horizontal direction since the movement in the horizontal direction is restricted by the vertical piece holding portions 43a to 43c.
- the soldering portions 32a to 32c are soldered onto the ceramic substrate 6, and the external terminals 3a to 3c are fixed at predetermined positions as shown in FIG. As described above, the external terminals 3a to 3c are attached to predetermined positions with high accuracy.
- the soldered portions 30a to 30c are previously attached to the case 4 and bent before soldering, the soldered portions can be bent at the time of bending by bending after soldering as in the prior art. There is no problem of peeling due to stress or causing poor contact.
- the external terminals 3a to 3c are attached to the base plate 2 with high accuracy.
- the external terminal holding portion 42 has the holes 47 formed between the terminal surfaces 48a and 48b and between the terminal surfaces 48b and 48c, and a small hole is formed on the upper surface between the terminal surface 48a and the stress absorbing chamber 9b. 92 is formed.
- a gate opening 41 is opened on the upper surface of the gate terminal chamber 9c.
- most of the cleaning liquid is taken in and out from the case opening 40 (first case opening 40a, second case opening 40b) of the central chamber 9a, and is stressed through the silicon gel inflow hole 12a and the gate terminal hole 12b.
- the cleaning liquid also circulates in the absorption chamber 9b and the gate terminal chamber 9c.
- the cleaning liquid enters the inside of the case 4 from the holes 47, the small holes 92, and the gate opening 41, and the cleaning liquid is convected in every corner, so that the cleaning liquid in the case is smoothly circulated.
- the case 4 is provided with a stress absorption chamber 9b on one side (left side in the figure).
- the stress absorption chamber 9b has a sufficiently large space portion as described later, which is the volume expansion due to the thermal stress of the silicon gel.
- the stress absorption chamber 9b has small holes 90 and 91 (see FIG. 2) on the upper surface as described above.
- the cleaning liquid inside the case 4 is discharged from the case opening 40 and the small hole 92.
- the cleaning liquid in the gate terminal chamber 9b is discharged from the gate opening 41 having a large upper surface, and is also discharged from the case opening 40 of the central chamber 9a through the gate terminal hole 12b.
- the cleaning liquid in the stress absorption chamber 9b is discharged from the small holes 90 and 91 formed on the upper surface, and is discharged from the case opening 40 through the central chamber 9a through the silicon gel inflow hole 12a.
- the small holes 90 and 91 of the stress absorbing chamber 9b may be formed on a surface other than the upper surface, for example, a side surface, or a hole having a shape that makes the case opening 40 smaller from the upper surface to the side surface.
- the small holes 90 and 91 can be dried most efficiently if they are formed at a position where the case 4 faces downward in the drying process. If the cleaning liquid remains in the stress absorbing chamber 9b, a phenomenon (curing inhibition) that the silicon gel injected thereafter is not completely cured during the curing process occurs. When the cleaning process is finished, the semiconductor module enters an inspection process for visual inspection and electrical characteristic inspection.
- the operator visually checks whether the soldering is complete and the soldering, such as confirmation of the terminal position, is complete.
- Visual inspection is performed by looking through the case opening 40 in FIG.
- the case opening 40 (the first case opening 40a and the second case opening 40b) is opened in the vertical direction from the upper side of the case 4 downward to the height of the case opening lower side 40L.
- the front surface and the rear surface of the case 4 are cut out so as to open between the first and second partition walls 15a-15b.
- the case opening 40 has a sufficient opening area for visual observation. Therefore, the inside can be confirmed from the case opening 40 in a normal posture, and a soldering failure or the like can be easily determined by visual confirmation.
- the hole 47 is formed in the upper surface of the external terminal holding part 42, the area into which external light enters when visually observed can be increased. For this reason, the light reaches the inside sufficiently from both the front and back sides of the case 4, and the soldering state on the substrate can be easily checked.
- visual inspection after the soldering is completed is possible, it is not necessary to judge the defect after inspecting the electrical characteristics as in the prior art. In other words, defective products such as solder familiarity and terminal position deviation can be identified at an early stage before electrical inspection, and the defective products can be reliably removed.
- silicon gel 10 and epoxy resin 11 are used as the sealing material.
- Silicon gel 10 has a lower viscosity than epoxy resin 11. For this reason, the wrapping into the case 4 during the injection of the silicon gel 10 is good, and the silicon gel 10 is difficult to peel off from the substrate during the thermal cycle. For this reason, the silicon gel 10 is injected and cured, and then sealing with the epoxy resin 11 is performed.
- the first case is formed on the ceramic substrate 6 disposed in the central chamber 9a from the case opening 40 (first case opening 40a, second case opening 40b) of the semiconductor module 1 of FIG.
- Silicon gel 10 is injected into this, and the silicon gel 10 flows from the central chamber 9a through the silicon gel inflow hole 12a and the gate terminal hole 12b into the stress absorption chamber 9b and the gate terminal chamber 9c. Thereafter, the silicon gel 10 is cured by heating. Next, as will be described later, an epoxy resin 11 is injected and cured by heating.
- FIG. 7 schematically shows the injection amount of the silicon gel 10 and the injection amount of the epoxy resin 11.
- the height of the silicon gel inflow hole 12a provided in the lower part of the first partition wall 15a between the central chamber 9a and the stress absorption chamber 9b is set lower.
- the gate terminal hole 12b provided in the lower part of the second partition wall 15b between the central chamber 9a and the gate terminal chamber 9c is for pulling out the gate terminal 7 from the central chamber 9a.
- the height of the gate terminal hole 12b is silicon gel. It is set at a position higher than the inflow hole 12a and at the same height as the horizontal pieces 33a and 33b of the external terminals 3a and 3c.
- the injection amount of the silicon gel 10 is set so as to fill up the upper surfaces of the soldered portions 32a to 32c of the external terminals 3a to 3b, and the height of the silicon gel inflow hole 12a is higher than that of the upper surface of the silicon gel 10. Is set to a lower position. Therefore, as shown in FIG. 7, when the silicon gel 10 is injected, the silicon gel inflow hole 12 a is filled with the silicon gel 10. The height of the upper surface of the silicon gel 10 is located above the silicon gel inflow hole 12a and is higher than the upper surfaces of the soldered portions 32a to 32c of the external terminals 3a to 3b. At this time, since the height of the gate terminal hole 12b is higher than the silicon gel 10, the gate terminal hole 12b is not buried.
- the silicon gel 10 is injected, the silicon gel 10 is cured by heating.
- the gas generated during the curing is discharged from the case opening 40 and the small hole 92 in the central portion 9a.
- the gas is discharged from the gate opening 41 in the gate terminal chamber 9b. Since the central chamber 9a and the gate terminal chamber 9b communicate with each other on the silicon gel 10 in the gate terminal hole 12b, the central chamber 9a and the gate terminal chamber 9b are also discharged from the case opening 40 (first case opening 40a, second case opening 40b).
- the central chamber 9a and the stress absorbing chamber 9b are isolated by the first partition plate 15a and the silicon gel 10, and the stress absorbing chamber 9b becomes an independent room. Yes.
- the gas generated in the stress absorption chamber when the silicon gel 10 is cured is discharged from the small holes 90 and 91 and does not remain in the case 4.
- the small holes 90 and 91 formed in the stress absorption chamber 9b are used for the cleaning and drying process and also for the sealing process.
- the epoxy resin 11 becomes the silicon gel 10. It spreads upward and flows into the gate terminal chamber 9c from the central chamber 9a through the gate terminal hole 12b.
- the silicon gel inflow hole 12a is filled with the silicon gel 10 as described above, the epoxy resin 11 does not flow into the stress absorbing chamber 9b.
- the injection amount of the epoxy resin 11 is such an amount that the epoxy resin 11 does not spill out of the case opening 40 and becomes a height below the lower side 40L of the case opening.
- the injection amount of the epoxy resin 11 may be set to a height for filling the horizontal pieces 33a and 33c.
- the case 4 is covered with the lid 5 before it is cured.
- the leg portion 50 of the lid 5 is lowered along the inner surface of the case opening 40 (first case opening 40a, second case opening 40b) of the case 4 and the terminal surface 48a of the external terminal holding portion 42 is lowered.
- the creeping portions 53b and 53c of the convex convex cover 5 are fitted into the recess between ⁇ 48b and 48b and 48c, and the hole 47 formed in the recess of the external terminal holding portion 42 is closed by the creeping portions 53 and 53c.
- the creeping portions 53a and 53d at the left and right ends of the lid cover the outer sides of the terminal surfaces 48a and 48c of the external terminal holding portion 42, and the hole 92 is closed by the creeping portion 53a.
- the lid 5 is placed flat on the upper surface of the case 4.
- the terminal portions 30a to 30c of the external terminals 3a to 3c are exposed from the terminal lead portions 54a to 54c of the lid 5.
- the case opening 40 is completely covered with the cover 51, and the central chamber 9 a is sealed.
- the lower ends of the leg portions 50 are positioned at the same height as the horizontal pieces 33a and 33c of the external terminals 3a and 3c. Further, as described above, the lower ends of the rectangular protrusions 42 a and 42 c inserted into the fitting holes 36 a and 36 c of the horizontal pieces 33 a and 33 c are also at the same height as the lower ends of the leg portions 50.
- the guide groove 44b of the vertical piece holding portion 43b is formed to a height below the lower side portion 40L of the case opening, and the lower end thereof is at a height below the horizontal pieces 33a and 33c. Therefore, the lower end of the leg portion 50 of the lid 5, the lower ends of the rectangular protrusions 42 a and 42 c of the external terminal holding portion 42 in the state inserted into the fitting holes 36 a and 37 a of the external terminals 3 a and 3 c, and the guide groove 44 b The lower part of is immersed in the epoxy resin 11.
- the epoxy resin 11 is cured by heating after covering the case 5 with the lid 5 (see FIG. 2). By curing the epoxy resin 11, the central chamber 9a and the gate terminal chamber 9c are sealed. At this time, since the epoxy resin 11 is injected to the lower end of the leg portion 50 provided at the four corners of the lower portion of the lid body 5, the leg portion 50 is bonded to the case 4 when the epoxy resin 11 is cured. Since the lower ends of the rectangular protrusions 42a and 42c are also integrated with the cured epoxy resin 11, the external terminals 3a and 3c are fixed, and the lower portion of the guide groove 44b is also integrated with the cured epoxy resin 11 and the lower portion of the insertion port 45. Is buried and the external terminal 3b is fixed. Since the external terminals 3a to 3c are completely fixed in this way, it is possible to prevent problems such as looseness of the external terminals and peeling of the solder.
- the gate terminal 7 is also fixed. According to this example, since the lid 5 can be bonded to the case 4 in the process of sealing the inside of the case 4, the number of processes can be reduced and other parts such as an adhesive can be reduced.
- the circuit body such as the semiconductor chip in the central chamber 9a inside the semiconductor module 1 and the gate terminal are filled with the epoxy resin 11, and interference from the outside can be prevented.
- the stress absorption chamber 9b is filled with the silicon gel 10, and similarly, interference from the outside can be prevented.
- the stress absorbing chamber 9b, the central chamber 9a, and the gate terminal chamber 9c are sealed by the silicon gel 10 and the epoxy resin 11 which are sealing materials, and the three chambers are isolated from each other by the sealing material. Can be divided into separate rooms. Therefore, for example, even if dust or dust enters the stress absorbing chamber 9b from the holes 90 and 91, it does not move to the adjacent central chamber 9a, and the stress absorbing chamber 9b itself is also a silicon gel as a sealing material. 10, the surface of the base plate 2 is sealed, so that it is not affected by dust and dirt. Similarly, the surface of the gate terminal chamber 9c is sealed with an epoxy resin, which is a sealing material, so that it is not affected by dust and dust and does not adversely affect the adjacent central chamber 9a.
- the silicon gel 10 and the epoxy resin 11 are used as the sealing material, but either one of the sealing materials may be used, or another sealing material may be used. Since the sealing material can prevent a failure such as an electrical short of the semiconductor module 1 due to dust or dust, it can be used as a product without the lid 5.
- the external terminal holding part 42 is exposed on the upper surface portion of the central chamber 9a with the left and right and the bottom being hollow, so the strength of the external terminal holding part 42 is not so strong. Therefore, by covering the case 4 with the lid 5 as in this example, the central chamber 9a of the semiconductor module 1 is sealed, and the left and right sides of the external terminal holding portion 42 are reinforced, thereby improving the safety of the semiconductor module 1. You can increase it. In addition, dust and dust can be prevented from entering the epoxy resin 11 in the semiconductor module 1 from the outside. Therefore, the external terminal holding part 42 with a small amount of resin can be reinforced and the appearance can be maintained.
- the final inspection process including final visual inspection and electrical characteristic inspection is completed, and the semiconductor module shown in FIG. 1 is completed.
- the vertical piece holding portion 43b at the center of the case 4 is configured by an insertion port 45 that opens the front side of the through hole and a guide groove 44b that is formed by leaving the left and right sides.
- a vertical piece inserted into the guide groove 44b and a narrow width portion 35 protruding from the insertion port 45 are formed in the central external terminal 3b. For this reason, the central external terminal 3b can be inserted into the vertical piece holding portion 43b from above even after the terminal portion 30b is bent. Since the terminal portion 30b can be bent in advance as described above, the workability is good.
- the vertical piece holding portions 43a and 43c may have the same structure as the vertical piece holding portion 43b, and the external terminals 3a and 3c may have the same shape as the external terminal 3b.
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Abstract
Description
矩形状のベース板と、このベース板上に半導体チップを駆動させる端子、例えばゲート端子と半導体チップを含む回路を形成したセラミック基板等の基板と、前記ベース板に取り付けられ、前記基板を内部に収納する直方体形状の樹脂製のケースと、上端を前記ケースの上面に露出するようにして下端が前記基板に固定された複数の外部端子と、を備えている。
長手方向に沿って前記ケースの前面を上辺から切り抜いた第1のケース開口部と、
長手方向に沿って前記ケースの背面を上辺から切り抜いた第2のケース開口部と
前記第1のケース開口部と前記第2のケース開口部の間の前記ケースの上面に設けられ、長手方向に沿って前記複数の外部端子を、その上端を露出させて保持する外部端子保持部と、をさらに備えている。
前記外部端子は、前記上端と前記下端の間に設けられた第1の垂直片を備え
前記外部端子保持部は、前記外部端子の前記第1の垂直片を水平方向への移動を規制して垂直方向に摺動案内する第1の垂直片保持部を備え、
前記外部端子は、前記ケースが前記ベース板に取り付けられる前の状態で、前記外部端子保持部を介して垂直方向に移動可能で且つ水平方向に移動規制されている。
前記第1の垂直片保持部は、貫通孔の一面を開口して形成された挿入口と、前記挿入口の左右両側部に形成された複数の第1の案内溝とを有し、
前記複数の第1の案内溝間の幅は、前記外部端子の前記第1の垂直片が摺動案内可能な幅を備え、前記挿入口の幅は、前記第1の垂直片の幅より狭く前記狭幅部以上の幅を備えている。
前記外部端子の前記第1の垂直片を前記垂直片案内部に挿入したとき、前記矩形孔に前記矩形突起が係合することで、前記外部端子を前記外部端子保持部に保持する。
前記ケースは、
前記ケース内に上下方向に形成された第1の仕切り壁と、
前記第1の仕切り壁によって仕切られた中央室と応力吸収室とを備え、
前記中央室には、前記基板が配置され、
前記応力吸収室は、前記封止材の熱応力による体積膨張分以上の大きさの空間部と、上方に設けられた外部と連通する小孔とを備える。
外部端子3a,3cは、垂直片31a,31cを折曲して水平片33a,33cを形成し、これを下方に折曲して下部垂直片34a,34cを形成し、次いで最下端を折曲して半田付部32a,32cを形成している。
2-ベース板
3(3a、3b、3c)-外部端子
4-ケース
5-蓋体
6-セラミック基板
7-ゲート端子
9a-中央室
9b-応力吸収室
9c-ゲート端子室
40-ケース開口部
Claims (21)
- 矩形状のベース板と、
このベース板上に半導体チップを駆動する駆動端子と前記半導体チップを含む回路を形成した基板と、
前記ベース板に取り付けられ、前記基板を内部に収納する直方体形状の樹脂製のケースと、
上端を前記ケースの上面に露出するようにして下端が前記基板に固定された複数の外部端子と、を備え、
前記ケースは、
長手方向に沿って前記ケースの前面を上辺から切り抜いた第1のケース開口部と、
長手方向に沿って前記ケースの背面を上辺から切り抜いた第2のケース開口部と
前記第1のケース開口部と前記第2のケース開口部の間の前記ケースの上面に設けられ、長手方向に沿って前記複数の外部端子を、その上端を露出させて保持する外部端子保持部と、
前記第1のケース開口部又は前記第2のケース開口部から前記基板上面に注入された封止材と、
を備える半導体モジュール。 - 前記封止材は、ゲル及び樹脂の何れか一方又は両方を含む、請求項1記載の半導体モジュール
- 前記ケースは、
前記基板が備えられる中央室と、
前記中央室の右側又は左側の一方に位置する第1の側部に、前記封止材の熱応力による体積膨張分以上の大きさの空間部を有する応力吸収室を備え、
前記中央室の右側又は左側の他方に位置する第2の側部に、前記駆動端子が引き回される駆動端子室を備える、請求項1に記載の半導体モジュール。 - 前記応力吸収室は上面又は側面、又は上面から側面にかけて形成された小孔を備え、前記駆動端子室は前記駆動端子を前記ケースの外部に引き出す端子開口を備える、請求項3に記載の半導体モジュール。
- 前記第1のケース開口部と前記第2のケース開口部と前記外部端子保持部は、前記ケースの前記中央室に備えられる、請求項3に記載の半導体モジュール。
- 前記ケースを覆う蓋体をさらに備え、
前記蓋体は、
前記複数の外部端子が露出する端子引出部を形成した上面と、
前記上面から下方に向けて前記第1のケース開口部と前記第2のケース開口部を覆うカバーとを備える、請求項1に記載の半導体モジュール。 - 前記蓋体は、前記カバーの下部に前記封止材に届く脚部を備えた請求項6記載の半導体モジュール。
- 前記外部端子保持部の一部に凹部又は凸部を備え、前記蓋体の一部に前記凹部又は凸部と組み合わせられる凸部又は凹部を備える、請求項6に記載の半導体モジュール。
- 前記外部端子は、前記上端と前記下端の間に設けられた第1の垂直片を備え
前記外部端子保持部は、前記外部端子の前記第1の垂直片を水平方向への移動を規制して垂直方向に摺動案内する第1の垂直片保持部を備え、
前記外部端子は、前記ケースが前記ベース板に取り付けられる前の状態で、前記外部端子保持部を介して垂直方向に移動可能で且つ水平方向に移動規制されている、請求項1記載の半導体モジュール。 - 前記外部端子は、前記第1の垂直片に連続して形成された前記第1の垂直片の幅より狭い幅の狭幅部を有し、
前記第1の垂直片保持部は、貫通孔の一面を開口して形成された挿入口と、前記挿入口の左右両側部に形成された第1の案内溝とを有し、
前記第1の案内溝間の幅は、前記外部端子の前記第1の垂直片が摺動案内可能な幅を備え、前記挿入口の幅は、前記第1の垂直片の幅より狭く前記狭幅部以上の幅を備えている、請求項9記載の半導体モジュール。 - 前記狭幅部は、前記外部端子の前記第1の垂直片と前記下端との間に形成されている、請求項10記載の半導体モジュール。
- 前記外部端子保持部は、前記外部端子の前記上端が露出される端子面を有し、
前記外部端子は、前記第1の垂直片の前記上端が折曲されて形成される端子部を有し、該端子部は前記端子面に沿って配置される請求項10記載の半導体モジュール。 - 前記外部端子は、前記第1の垂直片に対向するように前記端子部が垂直方向に折り曲げられて形成された第2の垂直片を有し、
前記外部端子保持部は、前記第2の垂直片を水平方向への移動を規制して垂直方向に摺動案内する第2の垂直片保持部を備え、
前記第2の垂直片保持部は、前記第2の垂直片が摺動案内可能な幅の第2の案内溝を備えている、請求項12記載の半導体モジュール。 - 前記外部端子は、前記第1の垂直片を折曲させた水平片に矩形孔を備え、前記外部端子保持部は、前記ケース内部に矩形突起を備え、
前記外部端子の前記第1の垂直片を前記垂直片案内部に挿入したとき、前記矩形孔に前記矩形突起が係合することで、前記外部端子を前記外部端子保持部に保持する、請求項9記載の半導体モジュール。 - 前記ケースは、
前記ケース内に上下方向に形成された第1の仕切り壁と、
前記第1の仕切り壁によって仕切られた中央室と応力吸収室とを備え、
前記中央室には、前記基板が配置され、
前記応力吸収室は、前記封止材の熱応力による体積膨張分以上の大きさの空間部と、上方に設けられた外部と連通する小孔とを備える、請求項1記載の半導体モジュール。 - 前記ケースは、前記第1の仕切り壁の下部に形成された封止材流入孔を備え、
前記封止材流入孔の高さは、前記封止材で形成される層の高さよりも低い、請求項15記載の半導体モジュール。 - 前記複数の外部端子の各外部端子の前記上端には端子部が形成され、
前記外部端子保持部は、前記各外部端子の前記端子部が配置される複数の端子面と、前記複数の端子面のうち隣接する端子面間に形成された複数の領域とを備え、前記複数の領域の少なくとも1つの領域に小孔を備えた、請求項1記載の半導体モジュール。 - 前記ケースは、
前記ケース内に上下方向に形成された第2の仕切り壁と、
前記第2の仕切り壁によって前記中央室と仕切られた駆動端子室とを備え、
前記駆動端子室は、駆動端子が引き回され、さらに前記駆動端子を外部に露出させる駆動端子開口を備えた、請求項15記載の半導体モジュール。 - 前記ケースは、前記第2の仕切り壁の下部に形成され、前記駆動端子が引き回される駆動端子孔を備え、
前記駆動端子孔の高さは、前記封止材で形成される層よりも高い、請求項18記載の半導体モジュール。 - 前記封止材の上方を覆う絶縁封止層を備える、請求項15記載の半導体モジュール。
- 前記絶縁樹脂層は樹脂を熱硬化させて形成された樹脂層である、請求項20記載の半導体モジュール。
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EP3203515A1 (en) | 2017-08-09 |
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