WO2015025636A1 - Tête de filière et procédé d'application d'un liquide de revêtement - Google Patents

Tête de filière et procédé d'application d'un liquide de revêtement Download PDF

Info

Publication number
WO2015025636A1
WO2015025636A1 PCT/JP2014/068550 JP2014068550W WO2015025636A1 WO 2015025636 A1 WO2015025636 A1 WO 2015025636A1 JP 2014068550 W JP2014068550 W JP 2014068550W WO 2015025636 A1 WO2015025636 A1 WO 2015025636A1
Authority
WO
WIPO (PCT)
Prior art keywords
die head
coating
coating liquid
stage
slit
Prior art date
Application number
PCT/JP2014/068550
Other languages
English (en)
Japanese (ja)
Inventor
雅樹 坂本
Original Assignee
オリジン電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オリジン電気株式会社 filed Critical オリジン電気株式会社
Priority to KR1020167004609A priority Critical patent/KR101927595B1/ko
Priority to CN201480046289.9A priority patent/CN105473238B/zh
Publication of WO2015025636A1 publication Critical patent/WO2015025636A1/fr
Priority to HK16106284.4A priority patent/HK1218275A1/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B05C11/1018—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target responsive to distance of target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B05C5/0266—Coating heads with slot-shaped outlet adjustable in length, e.g. for coating webs of different width

Definitions

  • the present invention relates to a die head and a coating liquid coating method for coating a coating liquid on a member placed on a coating stage of a coating liquid coating apparatus.
  • the coating liquid coating apparatus applies a coating liquid to a member placed on a coating stage, and applies, for example, a UV curable adhesive for bonding two members together as a coating liquid.
  • the UV curable adhesive is an adhesive that cures when irradiated with ultraviolet rays UV.
  • UV curing is performed with a coating liquid application device on both members or a part of the bonding surface of one member. Apply mold adhesive. Then, the bonding surfaces of the two members are opposed to each other, the two members are pressurized, and the UV curable adhesive is spread and bonded.
  • a coating apparatus using a die head method in which a coating film is formed while discharging a coating liquid onto a surface of a member to be coated in a non-contact manner using a die head.
  • Application of the coating solution by this die coating method can be performed only once, and the die head is not in contact with the member to be coated, so the quality can be improved without any unevenness on the coated surface. If the coating film is not positioned at an appropriate position, the thickness of the coating film on the coated member will not be uniform. Therefore, there is one in which the member to be coated is positioned at an appropriate position with respect to the die head (see, for example, Japanese Patent Application Laid-Open No. 2003-171146).
  • the die head has a manifold for primary storage of the coating liquid.
  • the amount of air bubbles in the manifold exceeds a certain amount, the shrinkage of the air bubbles increases due to the discharge pressure of the coating liquid. The response of becomes worse. Therefore, there is one in which bubbles accumulated in the die head are removed (see, for example, Japanese Patent No. 4752492).
  • the coated member to be loaded on the coating stage is positioned appropriately with respect to the die head, that is, the coated member can be loaded horizontally with respect to the horizontal coating stage. Since the member to be coated is positioned and the die head and the coating stage are not kept in parallel, the coating film thickness may not be uniform when the coating stage is not horizontal.
  • An object of the present invention is to provide a die head and a coating liquid coating method capable of maintaining the die head and the coating stage in parallel, maintaining a uniform coating film thickness and maintaining the responsiveness of the coating liquid discharge. It is to be.
  • a die head includes a shim plate for adjusting a width of a slit for applying a coating liquid from above a member placed on a coating stage of a coating liquid coating apparatus, and a pair of the shim plates.
  • a die head body formed by being sandwiched by a die head member and having a manifold for temporarily storing a coating liquid for supplying the coating liquid inside the die head, and the die head body has the same height as the tip position of the slit.
  • a leg provided, a coating liquid injection part for supplying a coating liquid to the manifold provided in the die head body, and an air vent part for releasing air staying in the manifold provided in the die head body; And a plurality of sensors provided on the die head body for measuring the distance to the surface of the coating stage.
  • a coating liquid coating method comprising: a front end portion of the slit in which the insertion groove of the mounting jig having an insertion groove for inserting the front end portion of the slit of the die head according to the first aspect is closed with an elastic sheet
  • the mounting jig is screwed to the leg portion of the die head, the die head to which the mounting jig is attached is attached to a coating liquid application apparatus, and the die head is applied from the coating liquid injection section of the die head.
  • the manifold is filled with the coating liquid, the air staying in the manifold is drawn from the air vent, and then the air vent is closed, and the distance from the mounting jig is measured by the sensor of the die head, and the tip position of the slit
  • the attachment jig is removed from the die head and the elastic sheet is removed, and the die head sensor is used to apply the coating step of the coating liquid coating apparatus.
  • a distance between the coating stage and the die head based on the distance to the coating stage surface measured by the sensor and the tip position of the slit, and then the coating head is measured.
  • the coating liquid is applied from above the member placed on the work stage.
  • the coating stage and the die head can be aligned in parallel based on the measured distance. Thereby, the thickness of the coating film can be kept uniform.
  • the die head since the die head has an air vent for venting air from the manifold, the air staying in the manifold can be eliminated and the responsiveness of discharging the coating liquid can be maintained.
  • FIG. 5 is a side view of the coating liquid coating apparatus showing a state where the die head to which the mounting jig is mounted in step S2 of FIG. 4 is mounted on the coating liquid coating apparatus.
  • FIG. 5 is a side view of the coating liquid coating apparatus showing a state where the mounting jig is removed from the die head in step S5 of FIG. 4.
  • FIG. 5 is a side view of the coating liquid coating apparatus showing a state in which the coating stage and the die head are aligned in parallel based on the distance to the surface of the coating stage in steps S6 and S7 in FIG.
  • FIG. 1 is a perspective view showing an example of a die head 10 according to an embodiment of the present invention.
  • the die head body 11 is formed by sandwiching a shim plate 13 between a pair of die head members 12a and 12b.
  • the shim plate 13 adjusts the width of the slit 14 for applying the coating liquid from above the member placed on the coating stage of the coating liquid coating apparatus (not shown).
  • the die head main body 11 has a manifold for primarily storing the coating liquid, and supplies the coating liquid stored in the manifold to the slit 14.
  • the die head body 11 is provided with a coating liquid injection part 15 and air vent parts 16a and 16b.
  • the coating liquid injection section 15 is connected to a coating liquid supply section (not shown) and supplies the coating liquid to the manifold, and the air vent sections 16a and 16b are used to drain the air staying in the manifold. For example, when filling the manifold with the coating liquid from the coating liquid injection part 15, the air vents 16a and 16b are opened, and the air staying in the manifold and the air vent pipe connected to the manifold is discharged.
  • the die head body 11 is provided with a plurality of sensors 17a and 17b.
  • Sensors 17a and 17b are sensors for measuring the distance to the surface of the coating stage (not shown).
  • the distances measured by the sensors 17a and 17b are parallel alignments between the coating stage and the die head 10 by an automatic gonio stage described later. Used for adjustment.
  • leg portions 18 provided at the same height as the tip position of the slit 14 are provided.
  • FIG. 2 is an explanatory diagram of the inside of the die head body 11 as viewed from the longitudinal direction.
  • FIG. 2 (a) is a diagram viewed from the left side of FIG. 1
  • FIG. 2 (b) is a diagram viewed from the right side of FIG. .
  • illustration of the sensors 17a and 17b is omitted
  • illustration of the air vents 16a and 16b is omitted.
  • the die head main body 11 has a manifold 19 for primary storage of the coating liquid.
  • the manifold 19 is connected to a coating liquid supply section (not shown) via a coating liquid injection section 15.
  • a coating solution is supplied.
  • the air vents 16 a and 16 b are provided in the air retaining portions 20 a and 20 b in the manifold 19 where air easily collects.
  • it is provided at the upper end of the manifold 19 away from the coating liquid injection part 15. This is because the coating liquid injected from the coating liquid injection part 15 pushes air away and fills the inside of the manifold 19. That is, the air pushed away by the coating liquid tends to gather at the upper end of the manifold 19 away from the coating liquid injection part 15.
  • the die head main body 11 is provided through the die head main body 11 at a position outside the positions of the manifold 19 and the slit 14 inside the leg portion 18.
  • tip part (measurement part) of several sensor 17a, 17b measures the distance to the coating stage surface in which a to-be-coated member is mounted.
  • FIG. 3 is an explanatory diagram of the inside of the die head body 11 viewed from the short side.
  • FIG. 3A is a view of the air vents 16a and 16b omitted from the front side of FIG.
  • FIG. 2B is a view of the coating liquid injection unit 15 that is omitted from the front side of FIG.
  • the coating liquid from the coating liquid injection unit 15 is supplied to the manifold 19 through the coating liquid supply pipe 21 inside the die head main body 11.
  • the coating liquid stored in the manifold 19 is emitted from the width of the slit 14 adjusted by the shim plate 13.
  • the coating liquid is emitted from the slit 14 from a coating liquid supply unit (not shown). The light is emitted at the discharge pressure of the coating liquid supplied via the coating liquid injection unit 15.
  • the air vent pipe 22 is provided so as to be inclined from the manifold 19, and air (bubbles) staying in the manifold 19 is discharged from the air vents 16 a and 16 b through the air vent pipe 22.
  • the air vent pipe 22 is provided so as to be inclined from the manifold 19 so that the air inside the manifold 19 is not retained in the air vent pipe 22 when the air inside the manifold 19 is pushed away by the coating liquid filled in the manifold 19.
  • FIG. 4 is a flowchart showing an example of a coating liquid coating method according to the embodiment of the present invention.
  • FIG. 5 is a side view of the die head 10 showing a state in which the attachment jig 24 is attached to the die head 10 according to the embodiment of the present invention in step S1.
  • an attachment jig 24 having an insertion groove 23 for inserting the tip of the slit 14 of the die head 10 is prepared, and the tip of the slit 14 of the die head 10 is closed with an elastic sheet 25.
  • the elastic sheet 25 is made of a material that can prevent the coating liquid from being discharged and has elasticity that does not damage the tip of the slit 14. For example, rubber is used.
  • the tip of the slit 14 closed with the elastic sheet 25 is inserted into the insertion groove 23 of the mounting jig 24.
  • the attachment jig 24 is screwed to the leg portion 18 of the die head 10 with screws 26, and the attachment jig 24 is attached to the die head 10.
  • FIG. 6 is a side view of the coating liquid coating apparatus 27 showing a state in which the die head 10 to which the mounting jig 24 is mounted in step S2 is mounted on the coating liquid coating apparatus 27.
  • the coating liquid coating device 27 has a die head mounting portion 29 of a gantry 28, and the die head 10 is attached to the die head mounting portion 29.
  • a travel path 31 for traveling a coating stage 30 on which a member to be coated is placed is provided on the gantry 28 of the coating liquid coating apparatus 27.
  • the coating stage 30 is mounted on the automatic gonio stage 32, and the automatic gonio stage 32 is further mounted on the slide table 33.
  • the coating stage 30 moves and coating is performed.
  • the member to be coated loaded on the stage 30 is moved.
  • the coating liquid radiate
  • the die head 10 is attached to the coating liquid coating device 27, and the coating stage 30 is waiting in the right direction in the figure.
  • the coating liquid is filled into the manifold 19 of the die head 10 from the coating liquid injection part 15 of the die head 10 and the air staying in the manifold 19 is removed from the air vent parts 16a and 16b, and then the air vent parts 16a and 16b are closed. (S3).
  • the coating liquid is not emitted from the slit 14 even when the discharge pressure from the coating liquid supply unit 15 is applied to the slit 14.
  • the manifold 19 the coating liquid supply pipe 21, and the air vent pipe 22 are filled with the coating liquid, the air vents 16a and 16b are closed, and the supply of the coating liquid from the coating liquid supply section is also temporarily stopped. As a result, air is discharged from the manifold 19.
  • FIG. 7 is a side view of the coating liquid coating apparatus 27 showing a state where the mounting jig 24 is removed from the die head 10 in step S5. In this state, since the supply of the coating liquid from the coating liquid supply unit is temporarily stopped, the coating liquid is not emitted from the slit 14.
  • the distance to the surface of the coating stage 30 of the coating liquid coating device 27 is measured by the sensors 17a and 17b of the die head 10 (S6), and the distance to the surface of the coating stage 30 measured by the sensors 17a and 17b is measured. Then, the coating stage 30 and the die head 10 are aligned in parallel based on the tip position of the slit 14 (S7).
  • FIG. 8 is a side view of the coating liquid coating apparatus 27 showing a state in which the coating stage 30 and the die head 10 are aligned in parallel based on the distance to the surface of the coating stage 30 in steps S6 and S7.
  • FIG. 8A is a side view of the coating liquid coating apparatus 27 showing a state in which the coating stage 30 is moved to an intermediate position of the die head 10 and the distance to the surface of the coating stage 30 is measured
  • FIG. FIG. 3 is a side view of the coating liquid coating apparatus 27 showing a state in which the coating stage 30 has passed under the die head 10 and the distance to the surface of the coating stage 30 has been measured.
  • the coating stage 30 is driven in the direction of the arrow to move it below the die head 10 and move in a predetermined manner. For each distance (predetermined position of the coating stage), the distance to the surface of the coating stage 30 of the coating liquid coating device 27 is measured by the sensors 17a and 17b of the die head 10. When the coating stage 30 and the die head 10 are parallel, the distances detected by the plurality of sensors 17a and 17b have the same value at any position. On the other hand, when the coating stage 30 and the die head 10 are not parallel, the distances detected by the plurality of sensors 17a and 17b have different values.
  • the coating stage 30 was passed under the die head 10 to measure the distance from the die head 10 to the surface of the coating stage 30 in all areas of the coating stage 30. Based on the distance to the surface of the coating stage 30 and the tip position of the slit 14, the coating stage 30 and the die head 10 are aligned in parallel.
  • the parallel alignment of the coating stage 30 and the die head 10 is performed by an automatic gonio stage.
  • the automatic gonio stage drives the stage upper surface so that the stage upper surface is parallel to the die head 10 based on the measured distance to the surface of the coating stage 30 and the tip position of the slit 14. That is, the automatic gonio stage drives the upper surface of the stage so that the distances to the coating stage 30 detected by the plurality of sensors 17a and 17b have the same value. Thereby, parallel alignment with the coating stage 30 and the die head 10 can be performed.
  • a coating liquid is applied from above the member placed on the coating stage 30 (S8). That is, after performing the parallel alignment of the coating stage 30 and the die head 10, the member to be coated is placed on the coating stage 30, the coating stage 30 is moved under the die head 10, and one of the members to be coated is placed. When the end reaches the slit position of the die head 10, supply of the coating liquid from the coating liquid supply unit is started and the coating liquid is emitted from the slit 14.
  • the supply of the coating liquid from the coating liquid supply unit is temporarily stopped, and the emission of the coating liquid from the slit 14 is stopped. Thereby, application
  • a new member to be coated is placed on the coating stage 30, the coating stage 30 is moved under the die head 10, and the coating liquid is emitted from the slit 14. To do.
  • the air is removed from the manifold, so that the responsiveness of the application of the coating liquid is not adversely affected.
  • the inclination of the coating stage 30 can be adjusted by the distance to the coating stage 30 measured by the sensors 17a and 17b, and the parallel alignment between the coating stage 30 and the die head 10 can be easily performed. The parallelism with the die head 10 can be easily reproduced. Furthermore, since the angle of the coating stage 30 can be automatically changed, even when the thickness of the coated member varies, the coating film thickness of the coated member is kept uniform during application of the coating liquid to the coated member. This makes it possible to expand the width of the member to be applied.

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)

Abstract

Cette invention concerne un corps (11) de tête de filière formé par prise en sandwich, entre une paire d'éléments (12a, 12b) de tête de filière, d'une plaque de calage (13) qui ajuste la largeur d'une fente (14) à travers laquelle un liquide de revêtement est appliqué d'en haut d'un élément qui se trouve à l'étage de revêtement (30) d'un dispositif d'application (27) de liquide de revêtement. Le corps (11) de tête de filière comprend : un distributeur (19) pour stocker en interne, à titre de réservoir primaire, le liquide de revêtement afin d'approvisionner la fente (14) ; une unité d'injection (15) de liquide de revêtement pour injecter le liquide de revêtement dans le distributeur (19) ; et une unité de purge d'air (16a, 16b) pour chasser l'air qui est retenu dans le distributeur (19). Le corps de tête de filière comporte en outre une unité de jambe (18) située à la même hauteur que la hauteur de la position d'extrémité distale de la fente (14), et une pluralité de capteurs (17a, 17b) qui mesurent la distance jusqu'à la surface de l'étage de revêtement (30). Grâce à cette configuration, une tête de filière (10) et l'étage de revêtement (30) peuvent être gardés parallèles.
PCT/JP2014/068550 2013-08-23 2014-07-11 Tête de filière et procédé d'application d'un liquide de revêtement WO2015025636A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020167004609A KR101927595B1 (ko) 2013-08-23 2014-07-11 다이 헤드 및 도공액 도포 방법
CN201480046289.9A CN105473238B (zh) 2013-08-23 2014-07-11 口模头及涂敷液涂布方法
HK16106284.4A HK1218275A1 (zh) 2013-08-23 2016-06-02 口模頭及塗敷液塗布方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-173151 2013-08-23
JP2013173151A JP6046573B2 (ja) 2013-08-23 2013-08-23 ダイヘッド、塗工液塗布装置、塗工液塗布部材の製造方法及び塗工液塗布方法

Publications (1)

Publication Number Publication Date
WO2015025636A1 true WO2015025636A1 (fr) 2015-02-26

Family

ID=52483419

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/068550 WO2015025636A1 (fr) 2013-08-23 2014-07-11 Tête de filière et procédé d'application d'un liquide de revêtement

Country Status (6)

Country Link
JP (1) JP6046573B2 (fr)
KR (1) KR101927595B1 (fr)
CN (1) CN105473238B (fr)
HK (1) HK1218275A1 (fr)
TW (1) TWI598156B (fr)
WO (1) WO2015025636A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108698071A (zh) * 2016-02-19 2018-10-23 欧利生电气株式会社 接合部件制造装置、接合部件的制造方法及涂覆物质已涂覆部件的制造方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101790120B1 (ko) * 2015-05-29 2017-10-25 강욱원 기능성 볼트 가공을 위한 전조장치
CN108202009B (zh) * 2016-12-19 2020-06-23 神讯电脑(昆山)有限公司 定位灌胶装置
JP6986934B2 (ja) * 2017-11-10 2021-12-22 東京応化工業株式会社 ノズルおよび塗布装置
CN109261438B (zh) * 2018-09-26 2020-08-11 深圳市曼恩斯特科技有限公司 涂布模头及涂布机
JP7316717B2 (ja) * 2019-05-14 2023-07-28 Ａｉメカテック株式会社 シム、ノズルおよび塗布装置
KR102368359B1 (ko) 2019-05-14 2022-02-25 주식회사 엘지에너지솔루션 에어 벤트를 포함하는 슬롯 다이 코팅 장치
JP6580807B1 (ja) * 2019-06-06 2019-09-25 株式会社オリジン 接合部材の製造装置及び製造方法
KR102633516B1 (ko) 2020-07-14 2024-02-06 주식회사 엘지에너지솔루션 다이 코터 검사 장치 및 방법

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09206652A (ja) * 1996-01-30 1997-08-12 Toray Ind Inc 塗布装置および塗布方法並びにカラーフィルタの製造装置および製造方法
JP2000033313A (ja) * 1998-07-15 2000-02-02 Dainippon Printing Co Ltd ダイヘッドの洗浄方法及びそれに使用する着脱式ブロック並びに該洗浄方法を行うためのダイヘッド
JP2005144373A (ja) * 2003-11-18 2005-06-09 Dainippon Screen Mfg Co Ltd 基板処理装置およびスリットノズルへの処理液の充填方法
JP2007105623A (ja) * 2005-10-13 2007-04-26 Tokyo Electron Ltd 塗布装置及び塗布方法
WO2011083518A1 (fr) * 2010-01-08 2011-07-14 フォイト パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング Tête pour coucheuse df
JP4752492B2 (ja) * 2005-12-22 2011-08-17 凸版印刷株式会社 ダイ塗工ヘッド
JP2012016675A (ja) * 2010-07-09 2012-01-26 Tokyo Electron Ltd 塗布装置およびノズルのメンテナンス方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3879497B2 (ja) 2001-12-04 2007-02-14 凸版印刷株式会社 ガラス基板位置決め装置
JP5074076B2 (ja) * 2007-04-03 2012-11-14 中外炉工業株式会社 基板の塗装装置および塗装方法
JP5007168B2 (ja) * 2007-07-10 2012-08-22 日東電工株式会社 ダイコーター調整方法及び光学フィルムの製造方法
JP5587531B2 (ja) * 2007-07-19 2014-09-10 ノードソン コーポレーション スロットノズル組立体、スロットコートガン、及び幅広の帯状に発泡性溶融体を押し出す方法
CN102397829B (zh) * 2010-09-19 2013-09-25 广汽本田汽车有限公司 涂装专用门夹具

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09206652A (ja) * 1996-01-30 1997-08-12 Toray Ind Inc 塗布装置および塗布方法並びにカラーフィルタの製造装置および製造方法
JP2000033313A (ja) * 1998-07-15 2000-02-02 Dainippon Printing Co Ltd ダイヘッドの洗浄方法及びそれに使用する着脱式ブロック並びに該洗浄方法を行うためのダイヘッド
JP2005144373A (ja) * 2003-11-18 2005-06-09 Dainippon Screen Mfg Co Ltd 基板処理装置およびスリットノズルへの処理液の充填方法
JP2007105623A (ja) * 2005-10-13 2007-04-26 Tokyo Electron Ltd 塗布装置及び塗布方法
JP4752492B2 (ja) * 2005-12-22 2011-08-17 凸版印刷株式会社 ダイ塗工ヘッド
WO2011083518A1 (fr) * 2010-01-08 2011-07-14 フォイト パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング Tête pour coucheuse df
JP2012016675A (ja) * 2010-07-09 2012-01-26 Tokyo Electron Ltd 塗布装置およびノズルのメンテナンス方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108698071A (zh) * 2016-02-19 2018-10-23 欧利生电气株式会社 接合部件制造装置、接合部件的制造方法及涂覆物质已涂覆部件的制造方法
CN108698071B (zh) * 2016-02-19 2019-12-31 株式会社欧利生 接合部件制造装置、接合部件的制造方法及涂覆物质已涂覆部件的制造方法

Also Published As

Publication number Publication date
TWI598156B (zh) 2017-09-11
TW201529181A (zh) 2015-08-01
JP6046573B2 (ja) 2016-12-21
HK1218275A1 (zh) 2017-02-10
JP2015039683A (ja) 2015-03-02
CN105473238A (zh) 2016-04-06
CN105473238B (zh) 2018-02-13
KR101927595B1 (ko) 2018-12-10
KR20160045720A (ko) 2016-04-27

Similar Documents

Publication Publication Date Title
JP6046573B2 (ja) ダイヘッド、塗工液塗布装置、塗工液塗布部材の製造方法及び塗工液塗布方法
KR20120085796A (ko) 접착 장치, 판상 접착체의 제조 방법
US20160297116A1 (en) Imprint apparatus, imprint method, and method of manufacturing article
KR101633577B1 (ko) 부재 접합 시스템
KR101423848B1 (ko) 충전 장치
JP5902525B2 (ja) 基板の貼り合わせ方法及び貼り合わせ装置
KR101229844B1 (ko) 액상넘침방지장치
KR100949126B1 (ko) 액정 디스플레이 패널의 액정 도포 방법 및 액정 도포 장치
JP2013200430A (ja) 基板の貼り合わせ方法及び貼り合わせ装置
TWI531417B (zh) Paste method of paste
KR101442932B1 (ko) 충전 장치
US20140084520A1 (en) Manufacturing apparatus of display device, and manufacturing method of display device
KR102357462B1 (ko) 경화형 접착제 도포 장치
US11415734B2 (en) Method of deriving appropriate cutting conditions for cutting polarizing plate
JP5902524B2 (ja) 基板の貼り合わせ方法及び貼り合わせ装置
KR102267473B1 (ko) 실시간 장력제어를 이용한 미세패턴 롤 제작시스템, 및 이를 이용한 미세패턴 롤 제작방법
US11364518B2 (en) Joined member manufacturing apparatus, method for manufacturing joined member, and method for manufacturing member on which applied material has been applied
JP7212507B2 (ja) 紫外線照度評価方法、紫外線照度評価装置及び紫外線照射装置
JP2000035588A (ja) 液晶セルの封止方法及びその装置
US20140150951A1 (en) Method and apparatus for manufacturing bonded member
US20220203400A1 (en) Planar layered material manufacturing method and apparatus
KR102126986B1 (ko) 지문센서 부착장치
JP2022087915A (ja) インプリント方法、インプリント装置、及び物品の製造方法
KR101616198B1 (ko) 접착제 도포 장치, 접착제 도포 방법, 표시 장치용 부재의 제조 장치 및 표시 장치용 부재의 제조방법
CN117310919A (zh) 一种光学镜片气动胶合装置及胶合方法

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 201480046289.9

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14837145

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20167004609

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14837145

Country of ref document: EP

Kind code of ref document: A1