WO2015025636A1

WO2015025636A1 - Die head and coating liquid application method

Info

Publication number: WO2015025636A1
Application number: PCT/JP2014/068550
Authority: WO
Inventors: 雅樹坂本
Original assignee: オリジン電気株式会社
Priority date: 2013-08-23
Filing date: 2014-07-11
Publication date: 2015-02-26
Also published as: KR20160045720A; TWI598156B; HK1218275A1; JP6046573B2; KR101927595B1; JP2015039683A; TW201529181A; CN105473238B; CN105473238A

Abstract

A die head body (11) is formed by sandwiching, between a pair of die head members (12a, 12b), a shim plate (13) that adjusts the width of a slit (14) through which a coating liquid is applied from above a member that is placed on a coating stage (30) of a coating liquid applying device (27). The die head body (11) has: a manifold (19) for internally storing, as a primary reservoir, the coating liquid in order to supply the same to the slit (14); a coating liquid injecting unit (15) for supplying the coating liquid to the manifold (19); and an air venting unit (16a, 16b) for removing air that is retained in the manifold (19). The die head body further has a leg unit (18) provided at the same height as the height of the distal end position of the slit (14), and a plurality of sensors (17a, 17b) that measure the distance to the surface of the coating stage (30). By virtue of this configuration, a die head (10) and the coating stage (30) can be kept in parallel.

Description

Die head and coating liquid application method

The present invention relates to a die head and a coating liquid coating method for coating a coating liquid on a member placed on a coating stage of a coating liquid coating apparatus.

The coating liquid coating apparatus applies a coating liquid to a member placed on a coating stage, and applies, for example, a UV curable adhesive for bonding two members together as a coating liquid. There is. The UV curable adhesive is an adhesive that cures when irradiated with ultraviolet rays UV.

For example, when a bonding member is manufactured by bonding a liquid crystal panel and a protective glass with a UV curable adhesive, UV curing is performed with a coating liquid application device on both members or a part of the bonding surface of one member. Apply mold adhesive. Then, the bonding surfaces of the two members are opposed to each other, the two members are pressurized, and the UV curable adhesive is spread and bonded.

As such a coating liquid coating apparatus, there is a coating apparatus using a die head method in which a coating film is formed while discharging a coating liquid onto a surface of a member to be coated in a non-contact manner using a die head. Application of the coating solution by this die coating method can be performed only once, and the die head is not in contact with the member to be coated, so the quality can be improved without any unevenness on the coated surface. If the coating film is not positioned at an appropriate position, the thickness of the coating film on the coated member will not be uniform. Therefore, there is one in which the member to be coated is positioned at an appropriate position with respect to the die head (see, for example, Japanese Patent Application Laid-Open No. 2003-171146).

In addition, the die head has a manifold for primary storage of the coating liquid. When the amount of air bubbles in the manifold exceeds a certain amount, the shrinkage of the air bubbles increases due to the discharge pressure of the coating liquid. The response of becomes worse. Therefore, there is one in which bubbles accumulated in the die head are removed (see, for example, Japanese Patent No. 4752492).

JP 2003-171146 A Japanese Patent No. 4752492

However, in Patent Document 1, the coated member to be loaded on the coating stage is positioned appropriately with respect to the die head, that is, the coated member can be loaded horizontally with respect to the horizontal coating stage. Since the member to be coated is positioned and the die head and the coating stage are not kept in parallel, the coating film thickness may not be uniform when the coating stage is not horizontal.

An object of the present invention is to provide a die head and a coating liquid coating method capable of maintaining the die head and the coating stage in parallel, maintaining a uniform coating film thickness and maintaining the responsiveness of the coating liquid discharge. It is to be.

A die head according to a first aspect of the invention includes a shim plate for adjusting a width of a slit for applying a coating liquid from above a member placed on a coating stage of a coating liquid coating apparatus, and a pair of the shim plates. A die head body formed by being sandwiched by a die head member and having a manifold for temporarily storing a coating liquid for supplying the coating liquid inside the die head, and the die head body has the same height as the tip position of the slit. A leg provided, a coating liquid injection part for supplying a coating liquid to the manifold provided in the die head body, and an air vent part for releasing air staying in the manifold provided in the die head body; And a plurality of sensors provided on the die head body for measuring the distance to the surface of the coating stage.

According to a second aspect of the present invention, there is provided a coating liquid coating method comprising: a front end portion of the slit in which the insertion groove of the mounting jig having an insertion groove for inserting the front end portion of the slit of the die head according to the first aspect is closed with an elastic sheet The mounting jig is screwed to the leg portion of the die head, the die head to which the mounting jig is attached is attached to a coating liquid application apparatus, and the die head is applied from the coating liquid injection section of the die head. The manifold is filled with the coating liquid, the air staying in the manifold is drawn from the air vent, and then the air vent is closed, and the distance from the mounting jig is measured by the sensor of the die head, and the tip position of the slit The attachment jig is removed from the die head and the elastic sheet is removed, and the die head sensor is used to apply the coating step of the coating liquid coating apparatus. A distance between the coating stage and the die head based on the distance to the coating stage surface measured by the sensor and the tip position of the slit, and then the coating head is measured. The coating liquid is applied from above the member placed on the work stage.

According to the present invention, since the die head has a plurality of sensors for measuring the distance to the surface of the coating stage, the coating stage and the die head can be aligned in parallel based on the measured distance. Thereby, the thickness of the coating film can be kept uniform. In addition, since the die head has an air vent for venting air from the manifold, the air staying in the manifold can be eliminated and the responsiveness of discharging the coating liquid can be maintained.

The perspective view which shows an example of the die head which concerns on embodiment of this invention. Explanatory drawing of the inside seen from the longitudinal direction of the die head main body of embodiment of this invention. Explanatory drawing inside seen from the transversal direction of the die head main body of embodiment of this invention. The flowchart which shows an example of the coating liquid coating method which concerns on embodiment of this invention. The side view of the die head which shows the state which attached the attachment jig to the die head of embodiment of this invention by step S1 of FIG. FIG. 5 is a side view of the coating liquid coating apparatus showing a state where the die head to which the mounting jig is mounted in step S2 of FIG. 4 is mounted on the coating liquid coating apparatus. FIG. 5 is a side view of the coating liquid coating apparatus showing a state where the mounting jig is removed from the die head in step S5 of FIG. 4. FIG. 5 is a side view of the coating liquid coating apparatus showing a state in which the coating stage and the die head are aligned in parallel based on the distance to the surface of the coating stage in steps S6 and S7 in FIG.

Hereinafter, embodiments according to the die head of the present invention will be described. FIG. 1 is a perspective view showing an example of a die head 10 according to an embodiment of the present invention. As shown in FIG. 1, the die head body 11 is formed by sandwiching a shim plate 13 between a pair of die

head members

12a and 12b. The shim plate 13 adjusts the width of the slit 14 for applying the coating liquid from above the member placed on the coating stage of the coating liquid coating apparatus (not shown). As will be described later, the die head main body 11 has a manifold for primarily storing the coating liquid, and supplies the coating liquid stored in the manifold to the slit 14.

The die head body 11 is provided with a coating liquid injection part 15 and

air vent parts

16a and 16b. The coating liquid injection section 15 is connected to a coating liquid supply section (not shown) and supplies the coating liquid to the manifold, and the

air vent sections

16a and 16b are used to drain the air staying in the manifold. For example, when filling the manifold with the coating liquid from the coating liquid injection part 15, the

air vents

16a and 16b are opened, and the air staying in the manifold and the air vent pipe connected to the manifold is discharged.

The die head body 11 is provided with a plurality of

sensors

17a and 17b.

Sensors

17a and 17b are sensors for measuring the distance to the surface of the coating stage (not shown). The distances measured by the

sensors

17a and 17b are parallel alignments between the coating stage and the die head 10 by an automatic gonio stage described later. Used for adjustment. Further, at the four corners of the die head main body 11, leg portions 18 provided at the same height as the tip position of the slit 14 are provided.

2 is an explanatory diagram of the inside of the die head body 11 as viewed from the longitudinal direction. FIG. 2 (a) is a diagram viewed from the left side of FIG. 1, and FIG. 2 (b) is a diagram viewed from the right side of FIG. . In FIG. 2A, illustration of the

sensors

17a and 17b is omitted, and in FIG. 2B, illustration of the

air vents

16a and 16b is omitted.

In FIG. 2A, the die head main body 11 has a manifold 19 for primary storage of the coating liquid. The manifold 19 is connected to a coating liquid supply section (not shown) via a coating liquid injection section 15. A coating solution is supplied. In addition, the

air vents

16 a and 16 b are provided in the

air retaining portions

20 a and 20 b in the manifold 19 where air easily collects. For example, it is provided at the upper end of the manifold 19 away from the coating liquid injection part 15. This is because the coating liquid injected from the coating liquid injection part 15 pushes air away and fills the inside of the manifold 19. That is, the air pushed away by the coating liquid tends to gather at the upper end of the manifold 19 away from the coating liquid injection part 15.

In FIG. 2B, the die head main body 11 is provided through the die head main body 11 at a position outside the positions of the manifold 19 and the slit 14 inside the leg portion 18. And the front-end | tip part (measurement part) of

several sensor

17a, 17b measures the distance to the coating stage surface in which a to-be-coated member is mounted.

FIG. 3 is an explanatory diagram of the inside of the die head body 11 viewed from the short side. FIG. 3A is a view of the

air vents

16a and 16b omitted from the front side of FIG. FIG. 2B is a view of the coating liquid injection unit 15 that is omitted from the front side of FIG.

3A, the coating liquid from the coating liquid injection unit 15 is supplied to the manifold 19 through the coating liquid supply pipe 21 inside the die head main body 11. The coating liquid stored in the manifold 19 is emitted from the width of the slit 14 adjusted by the shim plate 13. The coating liquid is emitted from the slit 14 from a coating liquid supply unit (not shown). The light is emitted at the discharge pressure of the coating liquid supplied via the coating liquid injection unit 15.

3B, the air vent pipe 22 is provided so as to be inclined from the manifold 19, and air (bubbles) staying in the manifold 19 is discharged from the air vents 16 a and 16 b through the air vent pipe 22. The air vent pipe 22 is provided so as to be inclined from the manifold 19 so that the air inside the manifold 19 is not retained in the air vent pipe 22 when the air inside the manifold 19 is pushed away by the coating liquid filled in the manifold 19.

Next, an embodiment according to the coating liquid coating method of the present invention will be described. FIG. 4 is a flowchart showing an example of a coating liquid coating method according to the embodiment of the present invention. First, the tip of the slit of the die head according to the embodiment of the present invention is closed with an elastic sheet, and a mounting jig is attached to the die head (S1).

FIG. 5 is a side view of the die head 10 showing a state in which the attachment jig 24 is attached to the die head 10 according to the embodiment of the present invention in step S1. As shown in FIG. 5, an attachment jig 24 having an insertion groove 23 for inserting the tip of the slit 14 of the die head 10 is prepared, and the tip of the slit 14 of the die head 10 is closed with an elastic sheet 25. The elastic sheet 25 is made of a material that can prevent the coating liquid from being discharged and has elasticity that does not damage the tip of the slit 14. For example, rubber is used. Then, the tip of the slit 14 closed with the elastic sheet 25 is inserted into the insertion groove 23 of the mounting jig 24. In this state, the attachment jig 24 is screwed to the leg portion 18 of the die head 10 with screws 26, and the attachment jig 24 is attached to the die head 10.

Next, the die head 10 to which the attachment jig 24 is attached is attached to the coating liquid application device (S2). FIG. 6 is a side view of the coating liquid coating apparatus 27 showing a state in which the die head 10 to which the mounting jig 24 is mounted in step S2 is mounted on the coating liquid coating apparatus 27. The coating liquid coating device 27 has a die head mounting portion 29 of a gantry 28, and the die head 10 is attached to the die head mounting portion 29.

A travel path 31 for traveling a coating stage 30 on which a member to be coated is placed is provided on the gantry 28 of the coating liquid coating apparatus 27. The coating stage 30 is mounted on the automatic gonio stage 32, and the automatic gonio stage 32 is further mounted on the slide table 33. When the slide table 33 travels on the travel path 31, the coating stage 30 moves and coating is performed. The member to be coated loaded on the stage 30 is moved. Thereby, the coating liquid radiate | emitted from the slit 14 of the die head 10 is apply | coated to a to-be-coated member. In FIG. 6, the die head 10 is attached to the coating liquid coating device 27, and the coating stage 30 is waiting in the right direction in the figure.

In this state, the coating liquid is filled into the manifold 19 of the die head 10 from the coating liquid injection part 15 of the die head 10 and the air staying in the manifold 19 is removed from the

air vent parts

16a and 16b, and then the

air vent parts

16a and 16b are closed. (S3). In this case, since the slit 14 is blocked by the elastic sheet 25, the coating liquid is not emitted from the slit 14 even when the discharge pressure from the coating liquid supply unit 15 is applied to the slit 14. When the manifold 19, the coating liquid supply pipe 21, and the air vent pipe 22 are filled with the coating liquid, the

air vents

16a and 16b are closed, and the supply of the coating liquid from the coating liquid supply section is also temporarily stopped. As a result, air is discharged from the manifold 19.

Next, the distance from the mounting jig 24 is measured by the

sensors

17a and 17b of the die head 10 to recognize the tip position of the slit 14 (S4), and the mounting jig 24 is removed from the die head 10 and the elastic sheet 25 is removed (S5). ). FIG. 7 is a side view of the coating liquid coating apparatus 27 showing a state where the mounting jig 24 is removed from the die head 10 in step S5. In this state, since the supply of the coating liquid from the coating liquid supply unit is temporarily stopped, the coating liquid is not emitted from the slit 14.

Next, the distance to the surface of the coating stage 30 of the coating liquid coating device 27 is measured by the

sensors

17a and 17b of the die head 10 (S6), and the distance to the surface of the coating stage 30 measured by the

sensors

17a and 17b is measured. Then, the coating stage 30 and the die head 10 are aligned in parallel based on the tip position of the slit 14 (S7).

FIG. 8 is a side view of the coating liquid coating apparatus 27 showing a state in which the coating stage 30 and the die head 10 are aligned in parallel based on the distance to the surface of the coating stage 30 in steps S6 and S7. FIG. 8A is a side view of the coating liquid coating apparatus 27 showing a state in which the coating stage 30 is moved to an intermediate position of the die head 10 and the distance to the surface of the coating stage 30 is measured, FIG. FIG. 3 is a side view of the coating liquid coating apparatus 27 showing a state in which the coating stage 30 has passed under the die head 10 and the distance to the surface of the coating stage 30 has been measured.

After the die head 10 is evacuated and filled with the coating liquid, as shown in FIG. 8 (a), the coating stage 30 is driven in the direction of the arrow to move it below the die head 10 and move in a predetermined manner. For each distance (predetermined position of the coating stage), the distance to the surface of the coating stage 30 of the coating liquid coating device 27 is measured by the

sensors

17a and 17b of the die head 10. When the coating stage 30 and the die head 10 are parallel, the distances detected by the plurality of

sensors

17a and 17b have the same value at any position. On the other hand, when the coating stage 30 and the die head 10 are not parallel, the distances detected by the plurality of

sensors

17a and 17b have different values.

As shown in FIG. 8 (b), the coating stage 30 was passed under the die head 10 to measure the distance from the die head 10 to the surface of the coating stage 30 in all areas of the coating stage 30. Based on the distance to the surface of the coating stage 30 and the tip position of the slit 14, the coating stage 30 and the die head 10 are aligned in parallel.

The parallel alignment of the coating stage 30 and the die head 10 is performed by an automatic gonio stage. The automatic gonio stage drives the stage upper surface so that the stage upper surface is parallel to the die head 10 based on the measured distance to the surface of the coating stage 30 and the tip position of the slit 14. That is, the automatic gonio stage drives the upper surface of the stage so that the distances to the coating stage 30 detected by the plurality of

sensors

17a and 17b have the same value. Thereby, parallel alignment with the coating stage 30 and the die head 10 can be performed.

Then, after performing parallel alignment between the coating stage 30 and the die head 10, a coating liquid is applied from above the member placed on the coating stage 30 (S8). That is, after performing the parallel alignment of the coating stage 30 and the die head 10, the member to be coated is placed on the coating stage 30, the coating stage 30 is moved under the die head 10, and one of the members to be coated is placed. When the end reaches the slit position of the die head 10, supply of the coating liquid from the coating liquid supply unit is started and the coating liquid is emitted from the slit 14.

When the other end of the member to be coated reaches the slit position of the die head 10, the supply of the coating liquid from the coating liquid supply unit is temporarily stopped, and the emission of the coating liquid from the slit 14 is stopped. Thereby, application | coating of the coating liquid of a to-be-coated member is completed. In the next coating of the member to be coated, similarly, a new member to be coated is placed on the coating stage 30, the coating stage 30 is moved under the die head 10, and the coating liquid is emitted from the slit 14. To do.

As described above, in the embodiment of the present invention, when the coating liquid is supplied to the manifold for the first time, the air is removed from the manifold, so that the responsiveness of the application of the coating liquid is not adversely affected.

Further, the inclination of the coating stage 30 can be adjusted by the distance to the coating stage 30 measured by the

sensors

17a and 17b, and the parallel alignment between the coating stage 30 and the die head 10 can be easily performed. The parallelism with the die head 10 can be easily reproduced. Furthermore, since the angle of the coating stage 30 can be automatically changed, even when the thickness of the coated member varies, the coating film thickness of the coated member is kept uniform during application of the coating liquid to the coated member. This makes it possible to expand the width of the member to be applied.

Although several embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 11 ... Die head main body, 12 ... Die head member, 13 ... Shim plate, 14 ... Slit, 15 ... Coating liquid injection part, 16 ... Air vent part, 17 ... Sensor, 18 ... Leg part, 19 ... Manifold, 20 ... Air retention part , 21 ... Coating liquid supply pipe, 22 ... Air vent pipe, 23 ... Insertion groove, 24 ... Mounting jig, 25 ... Elastic sheet, 26 ... Screw, 27 ... Coating liquid coating device, 28 ... Mounting stand, 29 ... Die head mounting 30: coating stage, 31 ... travel path, 32 ... automatic gonio stage, 33 ... slide table

Claims

A shim plate for adjusting the width of the slit for applying the coating liquid from above the member placed on the coating stage of the coating liquid coating apparatus;
A die head main body having a manifold for temporarily storing a coating liquid that is formed by sandwiching the shim plate between a pair of die head members and is supplied to the slit;
Legs provided at the same height as the tip position of the slit in the die head body,
A coating liquid injection part for supplying a coating liquid to the manifold provided in the die head body;
An air vent for venting air that is provided in the die head body and stays in the manifold;
A die head comprising: a plurality of sensors provided on the die head main body and measuring a distance to the surface of the coating stage.
2. The die head of the die head according to claim 1 is inserted into the insertion groove of the attachment jig having an insertion groove for inserting the tip of the slit of the die head. Screw to the
Attach the die head to which the mounting jig is attached to the coating liquid application device,
Filling the manifold of the die head with the coating liquid from the coating liquid injection part of the die head and removing the air staying in the manifold from the air venting part, and then closing the air venting part,
Recognize the tip position of the slit by measuring the distance to the mounting jig with the sensor of the die head,
Remove the mounting jig from the die head and remove the elastic sheet,
Measure the distance to the coating stage surface of the coating liquid coating apparatus with the sensor of the die head,
Based on the distance to the coating stage surface measured by the sensor and the tip position of the slit, the coating stage and the die head are aligned in parallel,
Thereafter, a coating liquid is applied from above the member placed on the coating stage.