JP5074076B2 - 基板の塗装装置および塗装方法 - Google Patents
基板の塗装装置および塗装方法 Download PDFInfo
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- JP5074076B2 JP5074076B2 JP2007097780A JP2007097780A JP5074076B2 JP 5074076 B2 JP5074076 B2 JP 5074076B2 JP 2007097780 A JP2007097780 A JP 2007097780A JP 2007097780 A JP2007097780 A JP 2007097780A JP 5074076 B2 JP5074076 B2 JP 5074076B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
- B05C11/1018—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target responsive to distance of target
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
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- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Description
X1=G3+(G1−G3)・Wm/Ws
X2=G3+(G2−G3)・Wm/Ws
2 基板
3 塗装ノズル
4 吐出口
5a〜5e ノズル位置調整手段
6a〜6e 距離センサ
7 制御部
17 高さセンサ
Claims (5)
- 定盤に設置された基板上方にその横方向に沿って長尺に形成され、基板の縦方向へ移動されて該基板を塗装する塗装ノズルを有する基板の塗装装置において、
上記塗装ノズルにその横方向の長さに沿って適宜間隔を隔てて複数設けられ、該塗装ノズルに形成された吐出口の高さ位置を調整するノズル位置調整手段と、
上記塗装ノズルに、上記各ノズル位置調整手段とは設置位置を異ならせて複数設けられ、上記基板の表面うねりを碁盤の目状に測定するために、該塗装ノズルの移動に従って基板の縦方向に複数の測定点でこれら塗装ノズルと基板との隙間量を計測して出力する距離センサと、
上記各距離センサそれぞれから入力された複数の隙間量から、各距離センサ毎に基板の縦方向に沿う平均隙間量を複数算出し、さらに、基板の横方向に沿う少なくとも2つの測定点の平均隙間量から、上記各ノズル位置調整手段の設置位置における仮想の隙間寸法を算出し、この仮想の隙間寸法で該各ノズル位置調整手段それぞれを制御する制御部とを備えたことを特徴とする基板の塗装装置。 - 前記定盤に対する前記塗装ノズルの高さを検出して検出値を出力する高さセンサを、該塗装ノズルの長さ方向に適宜間隔を隔てて備え、前記制御部は、上記定盤に対して上記塗装ノズルの姿勢を水平に調整するために、上記高さセンサからの検出値で上記ノズル位置調整手段を制御することを特徴とする請求項1に記載の基板の塗装装置。
- 前記制御部は、前記平均隙間量に代えて、複数の測定点で計測された前記各隙間量と、基板の縦方向に隣接する2つの測定点間で算定される隙間量の各増減量とを用い、各測定点では各隙間量で、2つの測定点間では各増減量に基づいて、前記各ノズル位置調整手段を制御することを特徴とする請求項1または2に記載の基板の塗装装置。
- 請求項1または2に記載の基板の塗装装置を用い、まず、前記塗装ノズルを基板の縦方向に前進移動させて、前記距離センサで隙間量を計測し、次いで、上記塗装ノズルを停止させた状態で前記制御部により前記ノズル位置調整手段を制御し、その後、上記塗装ノズルを基板の縦方向に後進移動させて、前記基板を塗装することを特徴とする基板の塗装方法。
- 請求項3に記載の基板の塗装装置を用い、まず、前記塗装ノズルを基板の縦方向に前進移動させて、前記距離センサで隙間量を計測し、その後、前記制御部により前記ノズル位置調整手段を制御しながら、上記塗装ノズルを基板の縦方向に後進移動させて、前記基板を塗装することを特徴とする基板の塗装方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007097780A JP5074076B2 (ja) | 2007-04-03 | 2007-04-03 | 基板の塗装装置および塗装方法 |
TW096142791A TWI327489B (en) | 2007-04-03 | 2007-11-13 | Substrate coating apparatus and coating method thereof |
KR1020070121670A KR100928117B1 (ko) | 2007-04-03 | 2007-11-27 | 기판의 도장 장치 및 도장 방법 |
CN2007101964786A CN101279310B (zh) | 2007-04-03 | 2007-12-05 | 基板涂敷设备和所述基板涂敷设备的涂敷方法 |
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JP2007097780A JP5074076B2 (ja) | 2007-04-03 | 2007-04-03 | 基板の塗装装置および塗装方法 |
Publications (2)
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JP2008253908A JP2008253908A (ja) | 2008-10-23 |
JP5074076B2 true JP5074076B2 (ja) | 2012-11-14 |
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JP2007097780A Active JP5074076B2 (ja) | 2007-04-03 | 2007-04-03 | 基板の塗装装置および塗装方法 |
Country Status (4)
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JP (1) | JP5074076B2 (ja) |
KR (1) | KR100928117B1 (ja) |
CN (1) | CN101279310B (ja) |
TW (1) | TWI327489B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9111562B2 (en) | 2012-02-17 | 2015-08-18 | Marvell International Ltd. | Recording medium and a method of writing servo information on the same |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101767079B (zh) * | 2009-01-05 | 2011-11-16 | 富葵精密组件(深圳)有限公司 | 放板机、电路板生产系统以及制作基板的方法 |
US8931431B2 (en) * | 2009-03-25 | 2015-01-13 | The Regents Of The University Of Michigan | Nozzle geometry for organic vapor jet printing |
KR101110018B1 (ko) * | 2009-12-07 | 2012-02-29 | 주식회사 탑 엔지니어링 | 페이스트 디스펜서의 제어방법 |
CN101961700A (zh) * | 2010-10-13 | 2011-02-02 | 刘宝龙 | 喷涂机器人 |
KR101897827B1 (ko) * | 2012-02-28 | 2018-09-12 | 삼성에스디아이 주식회사 | 코팅 폭의 조절이 가능한 슬롯 다이 |
US9304415B2 (en) | 2013-04-26 | 2016-04-05 | Hewlett-Packard Development Company, L.P. | Coating liquid dispensers |
JP6046573B2 (ja) * | 2013-08-23 | 2016-12-21 | オリジン電気株式会社 | ダイヘッド、塗工液塗布装置、塗工液塗布部材の製造方法及び塗工液塗布方法 |
CN104511388B (zh) * | 2014-12-29 | 2017-08-04 | 深圳市华星光电技术有限公司 | 光阻涂布设备及光阻涂布方法 |
CN104950549B (zh) * | 2015-07-06 | 2017-10-13 | 中山联合光电科技股份有限公司 | 一种快门与导向筒的连接装置 |
JP6465141B2 (ja) * | 2017-03-30 | 2019-02-06 | マツダ株式会社 | 塗布方法及び塗布装置 |
CN108731728A (zh) * | 2017-04-24 | 2018-11-02 | 台湾积体电路制造股份有限公司 | 喷嘴孔检查系统及方法 |
CN109107806A (zh) * | 2018-08-31 | 2019-01-01 | 贵州华旭光电技术有限公司 | 基板镀膜装置 |
JP7344533B2 (ja) * | 2019-05-14 | 2023-09-14 | Aiメカテック株式会社 | 塗布装置及び塗布方法 |
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JP3113212B2 (ja) * | 1996-05-09 | 2000-11-27 | 富士通株式会社 | プラズマディスプレイパネルの蛍光体層形成装置および蛍光体塗布方法 |
DE19711948C2 (de) * | 1997-03-21 | 1999-05-20 | Roland Man Druckmasch | Vorrichtung in einer Druckmaschine zum Aufbringen von Leim |
JP4073990B2 (ja) * | 1997-12-01 | 2008-04-09 | 大日本印刷株式会社 | 塗布膜形成方法および塗布装置 |
JPH11333348A (ja) | 1998-05-27 | 1999-12-07 | Three Bond Co Ltd | 材料塗布装置 |
ES2312312T3 (es) * | 2000-03-20 | 2009-03-01 | Solipat Ag | Dispositivo y procedimiento para aplicar material de revestimiento. |
JP2002153792A (ja) * | 2000-11-16 | 2002-05-28 | Hitachi Industries Co Ltd | ペースト塗布機 |
JP2004298697A (ja) * | 2003-03-28 | 2004-10-28 | Dainippon Printing Co Ltd | 塗布方法及び塗布装置 |
US7092855B2 (en) * | 2003-05-30 | 2006-08-15 | Avery Dennison Corporation | Thermo-stable coating die design method and apparatus |
JP4524580B2 (ja) * | 2004-05-26 | 2010-08-18 | 三菱化学株式会社 | 枚葉塗布装置、およびダイ位置決め方法 |
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2007
- 2007-04-03 JP JP2007097780A patent/JP5074076B2/ja active Active
- 2007-11-13 TW TW096142791A patent/TWI327489B/zh active
- 2007-11-27 KR KR1020070121670A patent/KR100928117B1/ko active IP Right Grant
- 2007-12-05 CN CN2007101964786A patent/CN101279310B/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9111562B2 (en) | 2012-02-17 | 2015-08-18 | Marvell International Ltd. | Recording medium and a method of writing servo information on the same |
US9275654B2 (en) | 2012-02-17 | 2016-03-01 | Marvell International Ltd. | Method and apparatus for writing servo information on a recording medium |
Also Published As
Publication number | Publication date |
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KR20080090256A (ko) | 2008-10-08 |
TWI327489B (en) | 2010-07-21 |
KR100928117B1 (ko) | 2009-11-24 |
CN101279310A (zh) | 2008-10-08 |
JP2008253908A (ja) | 2008-10-23 |
CN101279310B (zh) | 2013-05-08 |
TW200902162A (en) | 2009-01-16 |
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