200902162 九、發明說明： 【發明所屬之技術領域】 ^發月關於帛可在基板縱橫方向上依—定厚度施行 /主佈的基板之塗佈裝置及塗佈方法。 【先前技術】 就諸，電漿顯示面板等要求高品質基板的塗佈關聯技 2 ’對絲板上所形成塗佈面的管理屬重要事項。特別近 口 =而求超過寬2m的塗佈，習知的塗佈面管理頗難滿足 口口、要求。相關聯技術的揭示習知有如專利文獻工。專利 文獻1的「狹縫式塗佈機之塗佈方法」係以針對具有「起 2」H、「厚度不均」的玻璃基板，施行均勻厚度的 —阻液塗佈為解決課題’在狹縫式塗佈機中設置非接觸 機與玻璃基板間之二;:塗—==先測定狹縫式塗伟 低U又只丨不間隙，並就該整個塗佈區 基準間隙的偏差之後’於塗佈時再根據 : t狹縫式塗佈機一邊對玻璃基板依 的方式進行升降，-邊進行㈣。 疋基丰間隙 (專利文獻1)曰本專利特開平1〇_421號公報 【發明内容】 (發明所欲解決之問題） 但是’先前技術的構造，雖可對應狭縫式塗佈機移 “玻璃基㈣向）的厚度*均⑽行塗佈， 因應狹縫式塗佈機長度方向（破璃基板横向）之^有^法 係因為使狹縫式塗佈機本身進行升降，因而關於坡壤基: 3 發明說明書(補件)/97-02/96M279】 乙 6 200902162 橫向’充其量亦僅能使該狹缝式塗佈機直線性傾斜，並無 法因應玻璃基板整面形成如波浪般之厚度不均等情況的 塗佈。 本發明係有鑒於上述習知問題而完成，目的在於提供一 種能在基板縱橫方向上，依一定厚度施行塗佈的基板之塗 佈裝置及塗佈方法。 ” (解決問題之手段） 本發明的基板之塗佈裝置’係在設置於平台的基板上 方，具有沿橫向形成長條且在基板縱向移動而對該基板塗 佈之塗佈喷嘴的基板之塗佈裝置；其特徵在於，具備有： 噴嘴位置調整手段、距離感測器、及控制部；而該噴嘴位 f調整手段係在上述塗佈喷嘴沿其橫向長度隔適當間隔 設置複數個，並調整形成於該塗佈喷嘴的喷出口高度位 置；該距離感測器係在上述塗佈喷嘴，與上述各喷嘴位置 调整手段構成一組，並以該等喷嘴位置調整手段的各設置 位置處一致之方式設置複數個，為了棋盤格狀測定上述基 板的表面起伏，而依該塗佈喷嘴之移動，就基板縱向在^ 數測定點測量該等塗佈喷嘴與基板之間隙量並輸出，·該控 制部係從上述各距離感測器所分別輸入的複數間隙量，= 每個距離感測器計算沿基板縱向的複數平均間隙量，並依 各平均間隙量對上述各喷嘴位置調整手段進行控制。 上述控制部係不採用使上述喷嘴位置調整手段盥上述 距離感测器的設置位置一致之方式，而改為當不同時，從 沿基板横向至少2個測定點的間隙量，計算出該喷嘴位置 312XP/發明說明書(補件)/97-02/96142791 η 200902162 T整手段之設置位置的間隙尺寸，並依 嘴位置調整手段進行_。 〖謂5亥喷 檢測上述塗佈噴嘴對 的古疮式：日丨时 上义干口之同度並輸出檢測值 番问u η ’係沿該塗佈噴嘴長度方向相隔適當 置’上述控制部係為τ脾 u … m v ^ ^ A k JL 、' .丨上述平台將上述塗佈噴嘴姿勢 魂整為水平，而由爽白 _ 力 喰喈你Η斂 南度感測器的檢測值，對上述 噴鳥位置调整手段進行控制。 士：控制：係不使用上述平均間隙量，改為使用由複數 :則上述各間隙量、與基板縱向上相鄰接之2 門隙：异的間隙量之各增減量’並就各測定點由各 :=:，2個測定點間的各增減量，對上述各喷嘴位置 5周整手段進行控制。 本發明的基板之塗佈方法’係使用上述基板之塗佈裝 首先使上述塗佈嘴嘴在基板縱向上前進移動，並利用 t述距離感測器測量間隙量’其次，在使上述塗佈喷嘴停 的狀悲下，利用上述控制部對上述喷嘴位置調整手段進 仃控制，然後，使上述塗佈噴嘴在基板縱向上後退移動， 而對上述基板施行塗佈。 或者，使用上述基板之塗佈裝置，首先，使上述塗佈喷 在基板縱向前進移動，並利用上述距離感測器 量1後…邊利用上述控制部對上㈣嘴位置調整手段 進仃控制’-邊使上述塗佈噴嘴在基板縱 對上述基板施行塗佈。 (發明效果） 12ΧΡ/發明說明書(補件)/97-02/96142791 δ 200902162 、及塗佈方法，係即使基板整 仍可在基板縱橫方向上依一定 本發明的基板之塗佈裝置 面出現如波浪之厚度不均， 厚度施行塗佈。 【實施方式】 每^下L針對本發明基板之塗佈裝置及塗佈方法的較佳-貝鉍形悲’參照所附圖式進行詳細說明 板之塗佈裝置，基本係如圖！至圖10所示，在：t = 所設置的基板2上方，具有沿橫向形成長條，且減板2 =行:：!對基板2施行塗佈之塗佈喷嘴3的純塗 : 、觜位置調整手段5。〜5e、距離感測器6c〜6e、 喷；該喷嘴位㈣^ 、 & $向長度（基板橫向）隔適當間隔設置複數 個，並對塗佈喷嘴3上所报# _ 數 整.今距離代、目卜 成勺喷出口 4高度位置進行調 亥距離感測“c〜6e係在塗佈喷嘴3上，與 置調整手段5c〜5e構成一組’且與該等喷 整 ==設置位置一致地設置複數個，並為;= " 之表面起伏，而依塗佈喷嘴3之移動，在美 :2二縱向上’依複數測定點Q測量該等塗佈喷嘴3盘； ===並輸出；該控制部7係從各距離感測； 6c〜6e舛笪卞鉍.是数間隙罝，依母個距離感測器 用各平均間:::的平均間隙量G3〜G5，並利 ，制 隙里以〜G5對各喷嘴位置調整手段5c〜5e進行 5a、5b、與距離感測 控制部7係當噴嘴位置調整手段 312XP/發明說明書(補件)/97〇裏⑷别 200902162 器6a、6b的設置位置，在塗佈噴嘴3長度方向上相显而 不一致的情況時，便從沿基板2橫向至少 = fG1、G2’計算出喷嘴位置調整手段心：: X2對二X1、X2 ’再利用該假設間隙尺寸X1、 L對賀备位置调整手段5a、5b進行控制。 平台1上面係由高平面度的平坦面形 面載置玻璃製等基板2。在基板2上方設有喷二；二上 而對基板2施行塗佈處理的塗佈噴嘴3 塗佈喷嘴3係由:左右一對腳部8、縱壁部實9=竿 ;反=，構成，而該左右一對腳部8 = ;千口 "灵向二侧，而該縱壁部9係懸掛設置於 ㈣間’而將該等腳部8連結；該斥力框架 在各腳部8上所設置的左右一對第1與第2喷嘴 位f调整手段5a、5b支撐，並在縱壁部9上懸掛設置於 方且具高·f曲剛性’·該喷嘴本體11係在斥力框 圍的空間中。，配設於由左右一對腳部8與縱壁部9所包 ^ 基板2橫向形成長條’並在下端處沿 液L的狹縫狀噴;口=長度)「連串形成喷出塗佈 狀贺出口 4。在各腳部8與平台丨上面 嘴3在平台1縱向上進行往‘ η 塗佈噴嘴3便進行從待機位置】 =進移動’當到達返折位置㈣便暫 丁丁止4 <返折位重新啟動並在基板2縱向上 312ΧΡ/^Μ說明書(補件)/97-02/96142791 200902162 進動，待返回待機位置J時便停止的往復移動 塗佈贺嘴3係於噴嘴本體u导 復移動。 喷嘴本體U 1方^…二 b，同時配置於 5c〜5e。筮1 τ °又第〜第5喷嘴位置調整手段 5c 5e弟Ϊ與第2噴嘴位置調整手段 乎奴 伺服馬達13驅動之諸如滾珠螺桿形式等的千今於利用 腳…予斥力的情況下，於==頂，在對 部朝上下方向按押1 8上將斥力框架端 本體11對基板2的车熱七或下押’藉此便調整噴嘴 高度位置 安勢、或調整喷嘴本體η的喷出口 4 斥力框架第/ο:紫t置调整手段5C~5e係在塗佈噴嘴3的 設置，藉由Μ ^基板2橫向的長度方向關適當間隔 本體第5喷嘴位置調整手段㈣，喷嘴 本便由斥力框架10支揮。• 手】 =於斥力框架10中央處，第4與第5噴嘴= 配置。】嘴位置調整手段5c二側等間隔 桿15 Γ 嘴位置調整手段5C〜5“系由套管Η、 = 而該套管14係固定於斥力框㈣ z才干15係對套管14朝卜下^、庇士人 上下方向貫通斥力枢架;：Λ下: :::係設置於套…，並使=動二第 芊10賦予H置料手段5G〜5e_由套管14對斥力框 二二!二喷嘴本體11輸入上拉力或押下力。 、立 又循杯15上升移動而上拉、或依循下降移 312XP/發明說明氧補件)/97-02/96142791 11 200902162 動而押下，並彎曲變形，藉此便就喷出口 4對基板2的高 度位置進行調整。例如藉由將第3喷嘴位置調整手段5c 押下，亚將第4與第5喷嘴位置調整手段5d、5e上拉， 喷嘴本，11便在斥力框架1〇下，朝長度方向彎曲變形呈 波浪，藉此喷出口 4高度位置便調整為基板2橫向。 距離感測器6a〜6e係在塗佈喷嘴3的縱壁部9上，設置 於2嘴本體11相對向側的位置處。距離感測器6a〜6e在 j a施开v態中，係设置第！距離感測器〜第5距離感測 '6e的5台’其中’第3〜第5距離感測器k係一致 於第/〜第5噴嘴位置調整手段5c〜5e的設置位置，並分 另J與《亥等噴嘴位置調整手段5c〜5e設置一組，第1與第2 距離感測s 6a、6b係依等於第3距離感測器〜第5距離感 測器6c〜6e相互間的安裝間隔，設置成位於第i喷嘴位置 調整手段5a與第4喷嘴位置調整手段5d之間、及第5喷 嘴位置調整手段5e與第2喷嘴位置調整手段5b之間。第 ^第5距離感測器6c〜6e分別用於第3〜第5噴嘴位置調 整手段5c〜5e的控制，而第！與第2距離感測器6&、肋 則用：靠近的第i與第2噴嘴位置調整手段控制。 °玄等距離感測器6a〜6e係測定塗佈噴嘴3與基板2間之 間隙量並輸出。該等距離感測器6a〜6e係採用例如測量所 射出雷射光由練2反射而返回為止的時間以測定距離 的雷射感測器。該等距離感測器6a〜6e係構成每隔一定時 間便測定距離’藉由使塗佈噴嘴3在基板2縱向上移動， 便在基板2縱向上，依複數測定點Q(圖示例中為n處）測 312ΧΡ/發明說明書(補件)/97-02/96142791 12 200902162 定間隙量。所以，藉由於塗佈喷嘴3長度方向(基板2橫 向)設置複數的距離感測器6a〜6e，便依棋盤袼狀方式測 定基板2的表面起伏。 在平台1上面，於塗佈噴嘴3的待機位置；處配設有高 ?感測器17。本實施形態中’高度感測器17係在塗佈喷 嘴3長度方向上’設置成一致於距離感測器的安裝 位f處:高度感測器17係為將塗佈喷嘴3對平台i(具體 而言係喷出口 4高度）設為設定值，便檢測該高度並輸出 广/施形態中’各高度感測器、17係具備有例如 二二並依設定值M在平台1上露出的接觸器 19。該接觸器19係當反抗彈簧18而被押下並盥平a 1上 ==時’並設定為輸出行程「零」的檢測值。若㈣ ^本體11下降，而喷出口 4周邊接觸到接觸器19並將 其=下時’接觸器19便將該押下行程作為應檢測高度， 而輸出該檢測值。 7係連接於高度感測器17與距離感測器l U輸入高度的檢測值與間隙量。此外，對控制部7輸 入亚設^為獲得所需膜厚的基板2上面與噴出口 =隙量GS。控制部7尚連接於第卜第5噴嘴位置調二 ^又5e，並分別輸出控制量。控制部7便根據來自高 又感測益17的檢測值，對第卜第5噴嘴位置調整手段 a〜5e進行控制，藉由於塗佈喷嘴3整個長度方向，使喷 的^與設定值M 一致，而將對平台ι的姿勢保持 ▼出口 4的局度位置成為設定值M(例如玻璃基板 312XP/發明說明書(補件)/97-02/96142791 13 200902162 王又（.8随）等）的控制量，係可利用從各高度感 二 檢測值進行計算’所計算得的控制量便 二輪出給第卜第5喷嘴位置調整手段以如此時，距 離感測器6a〜6e測定截至基板2不存在之位置的平台工上 面為止之尺寸（圖1與圖3中的測定點Q(〇))。 口 二ίΓ第？體广會… :對第3〜第5贺嘴位置調整手段5c★的控制量， 因此取好依增加對第j與第2喷嘴位 的控制量’利用該等第丨與第2喷嘴位置調 進心度與姿勢的控制。具體而言，依對應於第i盘 =距離感測器6a、6b設置位置的2個高度感測器17: 成為=定值Μ的方式’使第]與第2噴嘴位置調整手段 a I生動作，職，依對應於第3〜第卩距 個高度感測器17成為設定值m的方 2弟弟5嘴嘴位置調整手段5c〜5e產生動作。於 ::7便依如上述，配合喷出口⑽定值M而成二 便將距離感測器所檢測到的間隙* GC參照圖6)重置為 △ I。依此，便對喷出口 4與距離感測器⑽，以平 σ 1上面為基準施行尺寸控制。 再控制部7係從第卜第5距離感測器6“e分別 ^的^复數測定點Q⑴〜Q(n)之間隙量，依每個距離感測 6“e :計算出沿基板2縱向的間隙量平均值gw。 調整手…置位置的基第3㈣ 傲z之縱向η個間隙量資料， 312ΧΡ/發明說明書(補件)/97-02/96142791 14 200902162 控制部7便計算中兮η/Λτι bb 本實施形態中，^出^切量資料的平均值G3。所以， 便依該等平均間隙量G1 ^平均間隙量㈣5。控制部7 』丨糸置G1〜G5全部等於設定間 式，對第卜第5噴嘴位置調間f里GS的方 制部7便對第3〜笛ςι手'^又5a〜5e進行控制。控 第3〜第5距離感測哭6 :置凋整手段5c〜5e，根據來自 間隙量㈣的控制：的輸入資料’輸出對應平均 5b而丄方^ Q為對於第1與第2噴嘴位置調整手段5a、 5b而言，該等噴嘴位置調 i于奴5a、 距離感測器6a、6b的設置位¥::、、及第1與第2 第1與第2喷嘴位置調整手 ='rG2’計算出該等 妬9彻A , 予奴5a、5b之設置位置處的基 ==二的假設間隙尺寸X1、X2，W^^^ 手段5a、5b里’輸出於第1與第2噴嘴位置調整 ’在平台1上面與的噴出口 =仃狀訂，假設對由第3距離感測器6c(基板2的 測得的平均間隙量G3,由帛1距離感測器6a所 :::均間隙量以的減量、及由第2距離感測器6b所測 付平均間隙量G2的增量絕對值相等時，便對呈水平姿勢 出口 4 ’將基板2表面依一次線性傾斜。此情況，若 字弟1與第2喷嘴位置調整手段5a、％的安裝間隔設為 ^將第1與第2距離感測器6a、讣的安裝間隔設為Ws、 字第1第3距離感測器6a〜6c所測得平均間隙量分別 312XP/發明說明書(補件)/則施⑷別 15 200902162 絲2外側所配置的第1與第2喷嘴位 席° 、51)設置位置處中假設之間隙尺寸XI、X2 可以平台1上面為基準，由下式進行計算。 G3=(Gl+G2)/2 XI=G3 + (G1-G3) · Wm/Ws X2=G3+(G2-G3)-Wm/Ws :喷：口：的上述間隙尺寸χι、χ2，為等於設定間隙 m 柄第1與第2噴嘴位置調整手段5a、5b進 仃扛制的控制量，從控制部7輸出。配入從批^ *的各控制量，第 將斥力框架1G在腳部8上進行上拉或押下，又第 =位置調整手段5e〜5e則相對於對斥力 行上拉或押下’藉此將相對於 ： 之喷出口 4高度位置，調整為設定間隙心： 其次，針對使用上述塗佈襄置 之實施形態進行說明。首先，在基板之塗佈方法 右-S二：期設定。在該初期設定時，利用左 右對弟1與弟2喷嘴位置調整 f框架10 ’使喷嘴本體11朝平台1下降(參照個： :士：1:便經下降動作而接觸到高度感γ卢、 測裔17便將由該接觸所 回度感 控制部7便依照檢測值計;值=控制部7。 喷嘴位置調整手段5a〜5e :制二並輸出於第卜第5 312XP/發明說明書(補件)/97-02/96142791 e此呀’百先’對第1與第2喷 16 200902162 調ί:段卜5'進行控制’設定斥力框架10的高 二ί 第3〜第5喷嘴位置調整手段5…進 仃4工制，為在斥力框羊1 〇 隹4 11織曲..八下進仃微调整，便將喷嘴本體 卜^曲土交形。猎此’塗佈噴嘴3的嘴出口 4便為較平台i 更罪上方的設定值^!，並設定為水平姿勢。此外，第 〜弟5距離感測器6a，測量截至平台i上面為止的距 並將該值重置為「零」。利用在該待機位置；的調整， I以塗佈噴嘴3的位置為基準，精密測定與基板2間之 間隙量。 义其次’塗佈喷嘴3便利用線性馬達12，從待機位置： 别進移動至噴嘴本體n的喷出口 4超出基板2塗佈結束 點位置的返折位置κ，在此期間中，各距離感測器6心 依η個測定點測量基板2與喷嘴本體u的喷出口 4間之 間隙量。塗佈喷嘴3若到達返折位置κ便暫時停止。在返 折，置κ，將根據由距離感測器6a〜6e所測得的間隙量， 冲算出控制部7對第1〜第5嘴嘴位置調整手段5a~5e的 控制里，第1〜第5喷嘴位置調整手段5a〜5e便依照所輸 入的控制量，使噴嘴本體11等產生彎曲變形等，而將塗 佈嘴嘴3的喷出π 4高度位置，調整為基板2表面上的一 定設定間隙量GS。 才工制4 7將计异出從各距離感測器6a〜6e所輸入的η個 間隙量ΐ料之加算平均’並計算出5個平均間隙量 G1〜G5，而計算出與設定間隙量間之差。喷嘴位置調整 手段5a〜5e的控制’具體而言’首先對第1與第2喷嘴位 312XP/發明說明書(補件)/97·〇2/96142791 17 200902162 置凋整手段5a、5b進行控制，秋後 位置調整手俨S ^ …、後，再對第3〜第5喷嘴 置調整手乂:控制。相對於第1與第2喷嘴位 相：因為該等位於基板2外侧，因此便 量之平均門測器4所測得的間隙 寸X1二I…G2 ’依如上述計算出假設之間隙尺 寸xi、X2，再依該等間隙尺寸XI、X2 ；)=目簟H n 隙量GS的方式，胸…：相專且成為設定間 __ 弋利用第1與第2噴嘴位置調整手丨 5b調整塗佈喷嘴3的嘴出口 4高度位置。W又5a、 於==第3:5喷嘴位置調整手段5c〜5e，預估由 ::1與⑴嘴位置調整手段5a、5b_ j動’根據由第3〜第5距離感測器㈣所 間隙量㈣5進行修正，且依成為設定間二 式’由控制部7進行運算，並將運算結果視為控 f ’輸出於第3〜第5喷嘴位置調整手〜5e，依第 ^第5距離感測器6a〜6e位置處的平均間隙量G卜仍均呈 致，且成為設定間隙量GS的高度位置處的方式，對噴 出口 4進行調整（參照圖9)。 、 依此，若結束將各距離感測器6a〜6e位置的平均間隙量 G1〜G5设為一定設定間隙量Gs的調整，然後，塗佈噴嘴3 便=返折位置K朝待機位置j，在基板2縱向後退移動， 亚從噴出口 4喷出塗佈液L而將基板2施行塗佈（夂 10)。 、圆 依如上述所說明的本實施形態基板之塗佈裝置及塗佈 方法’因為具備有：喷嘴位置調整手段5c〜5e(其係在塗佈 312XP/發明說明書(補件)/97-02/96142791 18 200902162 喷嘴3上沿其長唐隔镝舍^ 3上所來Α μ 4山 間隔攻置複數個，並對塗佈喷嘴 6二I: 高度位置進行調整)、距離感測器 盖、:、$佈喷嘴3上，與各喷嘴位置調整手段 =1L置複數個，為了依棋盤格狀方式測定基 ===伏/:依猶塗佈喷嘴3的移動，在基板2的 之;隙旦Hi測疋點Q測量該等塗佈喷嘴3與基板2間 6/6^出）、以及該控制部7(其係從各距離感測器 6c 6e 別輸人的複數間隙量，依每個距離感測器 利用ϋ十异出沿基板2縱向的平均間隙量㈣5，並 均間隙量㈣5對各喷嘴位置調整手段We進 =制)，因此便可使用依棋盤格狀方式測得的間隙量， ^位置調整手段5c~5e，將噴出口 4相對於基板2 置調整為一定的設定間隙量…特別係利用在 =心設置複數的距離感測器6c〜6e、喷嘴位置調 正手奴5C〜5e、以及與該等所連接的控制部7，便可在基 ===上依4厚度施行塗佈。又，因為使用平二 ㈣’因而可將控制簡單化，並能依相當精度且 句勻Μ厚施行塗佈。因為使喷嘴位置調整手段5c〜5e、與 ，離感測器6c〜6e的安裝位置保持一致，因而可將控制簡 早化。 再者，控制部7即便不採用使噴嘴位置調整手段以、 5b、與距離感測n 6a、6b的設置位置保持一致，改為不 同的情況下從沿基板2橫向至少2個測定點Q的間隙量， 31說明書(補件)/97_02細 42791 19 200902162 .十出噴嘴位置调整手段5a、5b設置位置處的假設間隙 尺寸，並利用該假設間隙尺寸對喷嘴位置調整手段h、 5b進仃控制，因而即使嘴嘴位置調整手段、5匕、盘距 離感測器6a、6b的安裝位置不一致情況，亦可適當地以 一定膜厚施行塗佈。 檢測喷出口4相對於平台Μ高度並輪出檢測值 =感測器η，係在塗佈喷嘴3長度方向上隔適當間 ^又置’且控制部7係對平台1將噴出口 4姿勢調整為水 平，因而利用來自高度感測器17的檢測值，對喷 〜56進行控制，所以便可適當地實施基準位置 调整’可提升間隙量的測定精度。 再進H錢塗料嘴3在基板2縱向上前進移 ^用距離感測器H則量間隙量，接著在使塗佈 贺嘴3停止的狀態下’利用控制部7對喷嘴位置調整手， 進行控制，然後，使塗佈嘴嘴3在基 ‘ =並對基板2施行塗佈，因而可依較短的週Si 膜厚塗佈。 U地施仃適當的均勻 二上述實施形態的變化例。該變化例係關於 才工制4 7的控制，控制部7係不採用平均間隙量200902162 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a coating apparatus and a coating method for a substrate which can be applied to a main thickness in a longitudinal direction and a horizontal direction of a substrate. [Prior Art] It is an important matter to apply a coating technique for a high-quality substrate such as a plasma display panel to the management of the coated surface formed on the wire. Especially near the mouth = and the application of coating over 2m wide, the management of the coated surface is quite difficult to meet the mouth and requirements. The disclosure of related technologies is known as the patent literature. The "coating method of the slit coater" of Patent Document 1 is to solve the problem of the liquid-repellent coating with a uniform thickness for a glass substrate having "from 2" H and "thickness unevenness". The gap coater is provided with two between the non-contact machine and the glass substrate;: coating—== firstly, the slit type is coated with a low U and only the gap is not, and after the deviation of the reference gap of the entire coating area' At the time of coating, the t-slit coater lifts and lowers the glass substrate in accordance with the method of (4).疋 丰 间隙 间隙 专利 专利 专利 专利 专利 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 421 The thickness of the glass base (4) is coated in 10 lines, and the length direction of the slit coater (the horizontal direction of the glass substrate) is controlled by the slit coater itself. Soil base: 3 invention manual (supplement) /97-02/96M279] B 6 200902162 Horizontal 'at best, the slit coater can only be linearly inclined, and can not form a wave like the whole surface of the glass substrate. The present invention has been made in view of the above-described conventional problems, and an object of the invention is to provide a coating apparatus and a coating method for a substrate which can be applied in a thickness direction of a substrate in a predetermined thickness. Means for Solving the Problem The coating device for a substrate of the present invention is a coating device having a substrate which is formed on a substrate and has a coating nozzle which is formed in a lateral direction and which is longitudinally moved in the substrate and coated on the substrate. ; The nozzle position adjustment means is provided with a nozzle position adjustment means, and the plurality of coating nozzles are disposed at an appropriate interval along the lateral length of the coating nozzle, and are adjusted and formed on the coating a discharge nozzle height position of the cloth nozzle; the distance sensor is formed in the coating nozzle, and each of the nozzle position adjusting means is formed in a group, and a plurality of the nozzle positions are arranged in a manner corresponding to each of the setting positions of the nozzle position adjusting means Measuring the surface undulation of the substrate in a checkerboard pattern, and measuring the amount of the gap between the coating nozzle and the substrate in the longitudinal direction of the substrate according to the movement of the coating nozzle, and outputting the control portion from the above The amount of complex gap input by each distance sensor, = each distance sensor calculates a complex average gap amount along the longitudinal direction of the substrate, and controls each of the nozzle position adjustment means according to each average gap amount. The control unit does not use the nozzle position adjustment means 盥 the position of the distance sensor is matched, and the nozzle position is calculated from the gap amount of at least two measurement points in the lateral direction of the substrate when not at the same time. 312XP/Invention Manual (Supplement)/97-02/96142791 η 200902162 The gap size of the set position of the T-integrated means, and _ according to the mouth position adjustment means. 〖say 5 hai spray detection of the above-mentioned coated nozzle pair of the ancient sore type: the same degree of the upper right dry mouth of the sundial and output detection value u η ' is along the length of the coating nozzle is appropriately spaced 'the above control part The system is τ spleen u ... mv ^ ^ A k JL , ' . 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨The above-described bird position adjustment means are controlled. Shishi: Control: instead of using the above average gap amount, use the plural: then the amount of each gap, and the 2 gate gaps adjacent to the longitudinal direction of the substrate: the amount of increase and decrease of the gap amount' Each of the above-mentioned nozzle positions is controlled by five increments and reductions from each of the two measurement points. In the coating method of the substrate of the present invention, the coating nozzle is first moved forward in the longitudinal direction of the substrate by using the coating device of the substrate, and the gap amount is measured by using a distance sensor, and the coating is performed. When the nozzle is stopped, the nozzle position adjustment means is controlled by the control unit, and then the coating nozzle is moved backward in the longitudinal direction of the substrate to apply the substrate. Alternatively, by using the above-described substrate coating apparatus, first, the coating spray is moved forward in the longitudinal direction of the substrate, and after the distance sensor amount 1 is used, the control unit is used to control the upper (four) nozzle position adjusting means. The coating nozzle is applied to the substrate in the longitudinal direction of the substrate. (Effect of the Invention) 12ΧΡ/Invention Manual (Supplement)/97-02/96142791 δ 200902162, and a coating method, even if the substrate is completely formed in the longitudinal and lateral directions of the substrate depending on the surface of the coating device of the substrate of the present invention The thickness of the waves is uneven, and the thickness is applied. [Embodiment] The coating apparatus and the coating method of the substrate of the present invention are preferably described in detail with reference to the drawings, and the coating apparatus of the board is basically as shown in the figure! As shown in FIG. 10, above the substrate 2 provided with t = , there is a pure coating of the coating nozzle 3 which forms a strip in the lateral direction and the strip 2 = row::! is applied to the substrate 2: Position adjustment means 5. ~5e, distance sensor 6c~6e, spray; the nozzle position (four) ^, & $ length (substrate lateral direction) is set at a proper interval, and is reported on the coating nozzle 3. The distance between the height and the position of the discharge port 4 is measured by the height adjustment position "c~6e is applied to the coating nozzle 3, and the set adjustment means 5c to 5e constitute a group" and the spray finishing == setting The position is uniformly set, and the surface of the == " is undulated, and according to the movement of the coating nozzle 3, in the longitudinal direction of the US: 2, the measuring nozzles are measured according to the complex measuring point Q; = and output; the control unit 7 senses from each distance; 6c~6e舛笪卞铋. is the number of gaps 罝, according to the average distance between the average distance of the sensor::: G3~G5, and For example, in the gap, the nozzle position adjustment means 5c to 5e are 5a and 5b, and the distance sensing control unit 7 is used as the nozzle position adjustment means 312XP/invention specification (supplement)/97〇里(4)别200902162 When the positions of the devices 6a and 6b are inconsistent in the longitudinal direction of the coating nozzle 3, they are at least laterally along the substrate 2 = fG1, G2' calculate the nozzle position adjustment means: X2 to 2X1, X2' reuse the assumed gap size X1, L to control the position adjustment means 5a, 5b. The top of the platform 1 is made of high flatness The flat surface is placed on a substrate 2 such as a glass substrate. The second nozzle is provided on the substrate 2, and the coating nozzle 3 is applied to the substrate 2. The coating nozzle 3 is composed of a pair of left and right leg portions 8, The vertical wall portion is 9=竿; the inverse=, and the left and right pair of feet 8 =; the thousand mouths " the spirit to the two sides, and the vertical wall portion 9 is suspended from the (four) between the feet The repulsion frame is supported by a pair of right and left first and second nozzle position adjustment means 5a, 5b provided on each leg portion 8, and is suspended from the vertical wall portion 9 and has a height f The rigidity of the nozzle body is formed in a space surrounded by the repulsive force frame. The pair of the left and right leg portions 8 and the vertical wall portion 9 are formed to form a strip in the lateral direction of the substrate 2 and along the liquid at the lower end. Slot-like spray; mouth = length) "Continuously forming a spray coating-like outlet 4. At each leg portion 8 and the platform top mouth 3 is oriented in the longitudinal direction of the platform 1 to η The coating nozzle 3 is moved from the standby position] = inward movement 'when it reaches the retracting position (four), it is temporarily shortened 4 < the folding position is restarted and in the longitudinal direction of the substrate 2 312 Μ / ^ Μ manual (supplement) / 97- 02/96142791 200902162 Precession, the reciprocating movement coating nozzle 3 stopped when returning to the standby position J is guided and moved by the nozzle body u. The nozzle body U 1 is ... b b and is disposed at 5c 5e. 1 τ ° and the fifth to fifth nozzle position adjusting means 5c 5e and the second nozzle position adjusting means are driven by the slave servo motor 13 such as a ball screw type, etc., in the case of using the foot ... repulsive force, at = = top, press the repulsion frame end body 11 to the substrate 2 in the upper and lower direction of the opposite side to press or pull the vehicle 2 to adjust the nozzle height position safety, or adjust the nozzle body η of the discharge port 4 The repulsive frame/o: the purple t-setting means 5C~5e is provided in the coating nozzle 3, and the nozzle is replied by the repulsion of the fifth nozzle position adjusting means (4) of the main body 2 by the lateral direction of the substrate 2 The frame 10 is swayed. • Hand] = at the center of the repulsive frame 10, 4th and 5th nozzle = configuration. 】 mouth position adjustment means 5c two side equal spacing rods 15 Γ mouth position adjusting means 5C 〜 5 "by the casing Η, = and the casing 14 is fixed to the repulsive frame (four) z to dry 15 series to the casing 14 ^, the Pepsi people traverse the repulsion pivot in the up and down direction;: Λ: ::: is set in the sleeve..., and makes the = 二2 芊 10 to give H the means of placement 5G~5e_ by the casing 14 against the repulsion box two Second! The two nozzle body 11 inputs the pulling force or the pressing force. The vertical and the cup 15 rise and move up, or follow the downward movement 312XP / invention description oxygen supplement) /97-02/96142791 11 200902162 The bending deformation is performed, whereby the height position of the substrate 2 is adjusted by the discharge port 4. For example, by pulling down the third nozzle position adjusting means 5c, the fourth and fifth nozzle position adjusting means 5d, 5e are pulled up, and the nozzle is pulled. Then, 11 is bent and deformed in the longitudinal direction under the repulsion frame, and the height position of the discharge port 4 is adjusted to the lateral direction of the substrate 2. The distance sensors 6a to 6e are attached to the vertical wall portion of the coating nozzle 3. 9 is disposed at a position opposite to the opposite side of the nozzle body 11. The distance sensors 6a to 6e are in the open state of the ja The fifth distance sensor 5 to the fifth distance sensing '6e' is set. The third to fifth distance sensors k are aligned with the setting positions of the fifth to fifth nozzle position adjusting means 5c to 5e. And a set of ones and the other nozzle position adjustment means 5c to 5e are set, and the first and second distance sensing s 6a, 6b are equal to the third distance sensor to the fifth distance sensor 6c. The mounting interval between the 6e is set between the i-th nozzle position adjusting means 5a and the fourth nozzle position adjusting means 5d, and between the fifth nozzle position adjusting means 5e and the second nozzle position adjusting means 5b. The distance sensors 6c to 6e are used for the control of the third to fifth nozzle position adjusting means 5c to 5e, respectively, and the second and second distance sensors 6 & ribs are used: the next i and the second The nozzle position adjusting means controls the slanting distance sensors 6a to 6e to measure and output the amount of the gap between the coating nozzle 3 and the substrate 2. The distance sensors 6a to 6e are, for example, measured by the laser light emitted by the measurement. A laser sensor that measures the distance by the time of reflection and returning. The distance sensors 6a to 6e are configured. The distance is measured at regular intervals. By moving the coating nozzle 3 in the longitudinal direction of the substrate 2, in the longitudinal direction of the substrate 2, the measurement point Q (n in the example of the figure) is measured 312 ΧΡ / invention specification (complement) ()) /97-02/96142791 12 200902162 The gap amount is fixed. Therefore, by providing a plurality of distance sensors 6a to 6e in the longitudinal direction of the coating nozzle 3 (the lateral direction of the substrate 2), the substrate 2 is measured in a checkerboard manner. The surface is undulated. Above the platform 1, at the standby position of the coating nozzle 3, a high-sensing sensor 17 is disposed. In the present embodiment, the 'height sensor 17 is disposed in the longitudinal direction of the coating nozzle 3' so as to coincide with the mounting position f of the distance sensor: the height sensor 17 is to apply the coating nozzle 3 to the platform i ( Specifically, when the height of the discharge port 4 is set to a set value, the height is detected and the "height sensor" and the 17-series are provided with, for example, two or two, and are exposed on the platform 1 according to the set value M. Contactor 19. The contactor 19 is set to a detection value of the output stroke "zero" when it is pressed against the spring 18 and is flattened on a 1 ==. If (4) ^ the body 11 is lowered, and the periphery of the discharge port 4 contacts the contactor 19 and the = contactor 19, the contactor 19 takes the depression stroke as the height to be detected, and outputs the detected value. The 7 series is connected to the detection value and the gap amount of the height sensor 17 and the distance sensor U U input height. Further, the control unit 7 receives the upper surface of the substrate 2 to obtain the desired film thickness and the discharge port = gap amount GS. The control unit 7 is further connected to the fifth nozzle position and is adjusted to two and five e, and outputs a control amount. The control unit 7 controls the fifth nozzle position adjusting means a to 5e based on the detected value from the high-sensing benefit 17, so that the spray nozzle is aligned with the set value M by the entire length direction of the coating nozzle 3. And the position of the position of the platform ι is kept at the position of the exit 4 as the set value M (for example, the glass substrate 312XP / invention manual (supplement) / 97-02 / 96142791 13 200902162 Wang (. 8 with), etc.) The amount of control can be calculated by using the detected values from the height sense two detection values. The calculated control amount is output to the fifth nozzle position adjusting means in two rounds. Thus, the distance sensors 6a to 6e are measured as the substrate 2 is not The size of the platform worker at the position where it exists (measurement point Q (〇) in Fig. 1 and Fig. 3).口二ΓΓ第? In the case of the third to fifth hammock position adjustment means 5c, the control amount of the third to fifth nozzle position adjustment means is increased by the increase of the control amount of the jth and the second nozzle position. Heart and posture control. Specifically, according to the two height sensors 17 corresponding to the position where the i-th disk=distance sensors 6a and 6b are provided: the method of making the constant value ', the second and second nozzle position adjusting means a The action, the job, and the mouth-to-mouth position adjustment means 5c to 5e which are set to the set value m corresponding to the third to the third-thickness height sensor 17 are operated. At ::7, as described above, with the outlet M (10) fixed value M, the gap detected by the distance sensor * GC (refer to Figure 6) is reset to △ I. Accordingly, the size control is performed on the discharge port 4 and the distance sensor (10) on the basis of the flat σ 1 as a reference. The re-control unit 7 senses the gap amount of the points Q(1) to Q(n) from the complex number of the fifth distance sensor 6'e, respectively, and senses 6"e for each distance: the longitudinal direction along the substrate 2 is calculated. The average amount of gaps is gw. Adjusting the hand...Setting the position of the base 3(4) Proud z's longitudinal η gap amount data, 312ΧΡ/invention specification (supplement)/97-02/96142791 14 200902162 Control unit 7 calculates the middle 兮/Λτι bb in this embodiment , ^ output ^ the average value of the cut data G3. Therefore, according to the average gap amount G1 ^ the average gap amount (four) 5 . The control unit 7 ′′ sets all of G1 to G5 are equal to the setting mode, and the GS unit 7 of the fifth nozzle position adjustment f controls the third to the flutes and the 5a to 5e. Control 3rd to 5th distance sensing crying 6: Setting means 5c to 5e, according to the control from the gap amount (4): input data 'output corresponding average 5b and square ^Q for the first and second nozzle positions In the adjustment means 5a, 5b, the nozzle positions are adjusted to the slave 5a, the set positions of the distance sensors 6a, 6b, ¥::, and the first and second first and second nozzle position adjustment hands = ' rG2' calculates the 妒9 AA, the base at the set position of the slaves 5a, 5b == 2, the assumed gap size X1, X2, W^^^ means 5a, 5b' output in the first and second The nozzle position adjustment 'the discharge port on the top of the platform 1=仃 shape, assuming that the distance sensor G1 by the third distance sensor 6c (the measured average gap amount G3 of the substrate 2, by the 帛1 distance sensor 6a:: When the amount of decrease in the amount of the gap is equal to the absolute value of the increment of the average amount of gap G2 measured by the second distance sensor 6b, the surface of the substrate 2 is linearly inclined once in the horizontal posture outlet 4'. In the case where the interval between the first and second nozzle position adjusting means 5a and % is set to be "W", the first interval between the first and second distance sensors 6a and 讣 is Ws, and the word is first. 3 The average gap amount measured by the distance sensors 6a to 6c is 312XP/invention description (supplement)/then (4) other 15 200902162 The first and second nozzle seats arranged on the outer side of the wire 2, 51) The gap sizes XI and X2 assumed in the table can be calculated based on the above table 1 and calculated by the following equation. G3=(Gl+G2)/2 XI=G3 + (G1-G3) · Wm/Ws X2=G3+(G2-G3)-Wm/Ws : Spray: Port: The above gap size χι, χ2 is equal to the setting The control amount of the gap m shank first and second nozzle position adjusting means 5a, 5b is output from the control unit 7. Incorporating the respective control amounts from the batch, the repulsion frame 1G is pulled up or down on the foot 8, and the first position adjustment means 5e~5e are pulled up or pressed against the repulsion line. The height position of the discharge port 4 is adjusted to set the gap center: Next, an embodiment in which the above-described coating device is used will be described. First, the coating method on the substrate is set to the right-S two: period. In the initial setting, the nozzle body 11 is lowered toward the platform 1 by the right and left body 1 and the second nozzle position adjustment f frame 10' (refer to one: :: 1:: the height is sensed by the lowering operation, The sensation control unit 7 will follow the detection value by the contact sensation control unit 7; the value = control unit 7. The nozzle position adjustment means 5a to 5e: the second output is outputted in the fifth 312XP/invention manual (supplement) ) /97-02/96142791 eThis is '100 first' to the 1st and 2nd spray 16 200902162 Adjust: paragraph 5' to control 'Set the high force of the repulsive frame 10 ί 3rd to 5th nozzle position adjustment means 5 ...Into the 4 working system, for the repulsion frame sheep 1 〇隹 4 11 weaving.. 八下进仃 micro-adjustment, the nozzle body 卜曲曲土 cross-shaped. Hunt this 'coating nozzle 3 mouth outlet 4 In the case of the platform i, the set value ^! above the sin is set to the horizontal position. In addition, the distance sensor 6a measures the distance up to the top of the platform i and resets the value to "zero". By the adjustment at the standby position, I precisely measures the amount of the gap with the substrate 2 based on the position of the coating nozzle 3. The coating nozzle 3 facilitates the use of the linear motor 12 from the standby position: the ejection position 4 of the nozzle body n is moved beyond the folding position κ of the coating end point of the substrate 2, during which the distance sensors are 6 The amount of the gap between the substrate 2 and the discharge port 4 of the nozzle body u is measured at η measurement points. The coating nozzle 3 is temporarily stopped when it reaches the retracted position κ. At the folding back, κ is set, and the distance is sensed. In the control of the first to fifth nozzle position adjusting means 5a to 5e by the calculation unit 7 in the control of the gap amount measured by the controllers 6a to 6e, the first to fifth nozzle position adjusting means 5a to 5e are input in accordance with the input. The control amount is such that the nozzle body 11 or the like is subjected to bending deformation or the like, and the height of the discharge nozzle 3 of the coating nozzle 3 is adjusted to a certain set gap amount GS on the surface of the substrate 2. The sum average of the n gap amount data input from the distance sensors 6a to 6e is calculated and the five average gap amounts G1 to G5 are calculated to calculate the difference from the set gap amount. 5a~5e control 'specifically' first to the first and second nozzle positions 312XP / hair Ming manual (supplement) /97·〇2/96142791 17 200902162 The control means 5a, 5b are controlled, and the position adjustment S ^ ... is adjusted after the autumn, and then the third to fifth nozzles are adjusted: Control. Relative to the first and second nozzle phases: since these are located outside the substrate 2, the average gap measured by the average gate detector 4 is measured by the distance X1 II I... G2 ' as calculated above. Xi, X2, according to the gap size XI, X2 ;) = the way the target H n gap GS, chest ...: phase and become the setting __ 弋 adjust the handcuff 5b with the first and second nozzle positions The height position of the nozzle outlet 4 of the coating nozzle 3 is adjusted. W again 5a, at == 3:5 nozzle position adjustment means 5c to 5e, estimated by: 1 and (1) mouth position adjustment means 5a, 5b_j move 'according to the third to fifth distance sensors (four) The gap amount (4) 5 is corrected, and the calculation is performed by the control unit 7 in accordance with the setting mode 2, and the calculation result is regarded as the control f' output to the 3rd to 5th nozzle position adjustment hands to 5e, according to the fifth distance The average gap amount G at the position of the sensors 6a to 6e is still present, and the discharge port 4 is adjusted so as to set the height of the gap amount GS (see FIG. 9). In this case, when the average gap amounts G1 to G5 at the positions of the distance sensors 6a to 6e are adjusted to be the fixed gap amount Gs, the application nozzle 3 = the folding position K toward the standby position j. The substrate 2 is moved back in the longitudinal direction, and the coating liquid L is sprayed from the discharge port 4 to apply the substrate 2 (夂10). The coating apparatus and the coating method of the substrate of the present embodiment as described above are provided with the nozzle position adjusting means 5c to 5e (which is applied to the coating 312XP / invention manual (supplement) / 97-02 /96142791 18 200902162 Nozzle 3 along the length of the Tang 镝 镝 ^ ^ ^ Α Α Α μ 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 :, on the cloth nozzle 3, a plurality of nozzle position adjustment means = 1L, in order to measure the base === volts in the checkerboard pattern: the movement of the nozzle 3 is applied to the substrate 2; The Hi measurement point Q measures 6/6 of the coating nozzle 3 and the substrate 2, and the control unit 7 (which is a plurality of gaps from the distance sensors 6c 6e), The distance sensor uses the average gap amount (4) 5 in the longitudinal direction of the substrate 2, and the average gap amount (4) 5 pairs of nozzle position adjustment means We enter = system), so the gap measured by the checkerboard pattern can be used. The quantity, ^ position adjustment means 5c~5e, adjust the discharge port 4 relative to the substrate 2 to a certain set gap amount... Provided in plural = center distance sensor 6c~6e, the nozzle position adjusting forehand slave 5C~5e, and a control unit 7 connected with these, the coating can be performed on the substrate by a thickness of 4 ===. Further, since the flat two (four)' is used, the control can be simplified, and the coating can be performed with a relatively high precision and a uniform sentence. Since the nozzle position adjusting means 5c to 5e and the mounting positions of the sensors 6c to 6e are kept in agreement, the control can be simplified. Further, the control unit 7 does not use the nozzle position adjustment means 5b, and the installation positions of the distance sensing n 6a, 6b are matched, and when they are different from each other, at least two measurement points Q are laterally arranged along the substrate 2. The amount of clearance, 31 specification (supplement) / 97_02 fine 42791 19 200902162 . The assumed gap size at the position where the ten-out nozzle position adjusting means 5a, 5b is set, and the nozzle position adjusting means h, 5b are controlled by the assumed gap size Therefore, even if the nozzle position adjusting means, 5", and the mounting positions of the disk distance sensors 6a, 6b do not match each other, the coating can be suitably performed with a certain film thickness. Detecting the height of the discharge port 4 with respect to the platform 并 and rotating the detected value=sensor η in the longitudinal direction of the coating nozzle 3, and the control unit 7 adjusts the posture of the discharge port 4 to the platform 1 Since it is horizontal, the spray-56 is controlled by the detection value from the height sensor 17, so that the reference position adjustment can be appropriately performed to improve the measurement accuracy of the gap amount. Further, the H-money nozzle 3 is moved forward in the longitudinal direction of the substrate 2, and the amount of the gap is measured by the distance sensor H, and then the control unit 7 adjusts the position of the nozzle by the control unit 7 while the application of the coating nozzle 3 is stopped. Control, and then, the coating nozzle 3 is applied to the substrate 2 at the base '=, and thus can be coated with a short circumferential Si film thickness. U is applied appropriately and uniformly. Two variations of the above embodiment. This variation is related to the control of the labor system 47, and the control unit 7 does not use the average gap amount.
Si::依基板2縱向的複數測定點㈣測得各間隙量， 縱：上相鄰接2個測定點Q間所計算得間隙量的 谷曰減垔，各測定點Q中根據各間隙胥，而9加 間則根據各增減量，對各喷喈而2個測定點Q 衣合θ減量對各噴鳴位置調整手段5a〜5e進行控 3125〇>/^_書(補件)/97-〇2施 4挪 1 2〇 200902162 制。5台距離感測器6a〜6e分別依基板2縱向的 點t測量間隙量^(0〜n)〜G5(〇〜n)(G1〜G5分別係利= 卜第5距離感測态所測得的間隙量，例如⑵⑴係 第3距離感測g 6c所測得在測定點Q(r)處的 “ 因而關於各距離感測器6a★，如圖所示，可從依第里）: 離感測器6c所進行任意第(Ρ-υ測定點Q(p—二Si:: The amount of each gap is measured according to the complex measurement point (4) in the longitudinal direction of the substrate 2, and the vertical direction is the valley loss of the calculated gap between the two adjacent measurement points Q, and each measurement point Q is based on each gap 胥In the case of the 9th addition, the respective sneezing and the two measurement points Q are combined with the θ reduction for each sneeze, and the respective squealing position adjustment means 5a to 5e are controlled to 3125 〇>/^_(supplement)/ 97-〇2 applies 4 to 1 2〇200902162 system. The five distance sensors 6a to 6e measure the gap amount ^(0~n)~G5(〇~n) according to the point t in the longitudinal direction of the substrate 2, respectively (G1 to G5 are respectively measured by the sense of the fifth distance sense state) The amount of gap obtained, for example, (2) (1) is measured by the third distance sensing g 6c at the measuring point Q (r) "thus with respect to each distance sensor 6a ★, as shown, from Eri): Any number of measurements taken by the sensor 6c (Ρ-υ measurement point Q (p-two
測定點Q(p)處的間隙量G3( 1)ik G3( ) P 點間的間隙量之增減量d(p)(=P)基 化：Τ(Ρ)—Τ(ρ-υ)。 坂2厚度變 =例中，、首先使塗佈噴嘴3朝基板2縱向前進移動， 距離感心6a~6e測量間隙量G1(G〜n)〜G5((Nn)， -，用控制部7對嘴嘴位置調整手段㈣進行 =厂邊錢料嘴3在基板2縱向域退 =施:Γ。在施行塗佈的後退移動時，“個各測 —Q’依使所測传的各間隙量G1(()〜n) q 权疋間隙量GS的方式，控制嘴嘴位置調整手⑨5a〜fe為 又’測定點Q間，依藉由對各 于奴5a 5e 計曾出〜,、 ㈣間隙量，加減所 喷嘴位晉二U p ’而成為設定間隙量Gs的方式，對 量成為口 re逐次控制，依基板2整面麵 :為<疋_、篁GS的方式’使喷嘴本體2卜邊起伏一 在基板，2而^1\2施行塗佈。依此，—邊使塗佈喷嘴3 牡巷扳2縱向上後退移動，一 以〜5e進行控制，即你其把〇邊對喷嘴位置調整手段 均，亦 ^ 整面出現如波浪般的厚度不 在基板2縱橫方向上依一定厚度施行塗佈，可在 312XP/發明說明書(補件)/97-02/96142791 2χ 200902162 基板2的縱橫方向上，對基板2整面依極高精度且均勻膜 厚地施行塗佈。 -上述實施形態係針對距離感測器6a〜6e依適當時間間 隔’對η個測定點q測定間隙量的情況進行說明，但是亦 可使用施行連續式測定的距離感測器，利用經輸入測定值 的控制部7在適當時間間隔取樣間隙量。 【圖式簡單說明】 圖1為本發明基板之塗佈裝置較佳一實施形態的立體 不意圖。 圖2為圖1所*塗佈裝£中所設置塗料嘴的腳部及縱 壁部周邊之示意俯視圖。 圖3為圖1所示基板之塗佈裝置的側視圖。 圖4為圖3中的Α方向箭視圖。 圖5為圖3中的B方向箭視圖。 圖6為表示圖1基板之塗佈裝置中所設置塗佈喷嘴，停 止於待機位置狀態下，依圖3中的c方向箭視圖。 圖7為表示圖1基板之塗佈裝置中，第丨與第2噴嘴位 置調整手段的調整狀態圖。 圖8為說明實施圖7所示調整時的調整方法之說明圖。 圖9為說明圖1所示基板之塗佈裝置，在喷出口高度位 置調整狀態下的說明圖。 圖10為表示圖1基板之塗佈裝置的塗佈狀態側視圖。 圖11為說明本發明基板之塗佈裝置的變化例說明圖。 【主要元件符號說明】 312XP/發明說明書(補件)/97-02/96142791 22 200902162 1 平台 2 基板 3 塗佈喷嘴 4 喷出口 5a~5e 第卜第5喷嘴位置調整手段 6 a〜6 e 第1〜第5距離感測器 7 控制部 8 腳部 9 縱壁部 10 斥力框架 11 喷嘴本體 12 線性馬達 13 伺服馬達 14 套管 15 桿 17 南度感測器 18 彈簧 (19 接觸器 G1〜G5 平均間隙量 GS 設定間隙量 J 待機位置 K 返折位置 L 塗佈液 Μ 設定值 Q 測定點 XI、Χ2假設間隙尺寸 312ΧΡ/發明說明書(補件)/97-02/96142791 23The amount of gap G3 (1) ik G3 ( ) in the measurement point Q (p) is increased or decreased by the amount of gap d (p) (= P). Base: Τ (Ρ) - Τ (ρ - υ). In the example, the coating nozzle 3 is moved forward in the longitudinal direction of the substrate 2, and the gaps G1 (G to n) to G5 ((Nn), - are measured by the control unit 7 from the sense cores 6a to 6e. The mouth position adjustment means (4) is carried out = the factory side money nozzle 3 is retracted in the longitudinal direction of the substrate 2 = Shi: Γ. When performing the coating back movement, "each measurement - Q" depends on the amount of each gap measured G1(()~n) q The method of controlling the gap amount GS, controlling the nozzle position adjustment hand 95a~fe to be 'measuring point Q, according to the slaves 5a 5e counted out, and (4) gap The amount of the nozzle is increased or decreased by the nozzle position of the second position, and the amount of gap Gs is set. The amount of the nozzle is controlled successively. According to the whole surface of the substrate 2, the nozzle body 2 is made in the manner of <疋_, 篁GS. When the undulations are on the substrate, 2 and ^1\2 are applied. According to this, while the coating nozzle 3 is moved up and down in the longitudinal direction, the control is performed by ~5e, that is, you put the side to the side The nozzle position adjustment means are also applied, such as the wave-like thickness of the entire surface, which is not applied in a certain thickness in the longitudinal and lateral directions of the substrate 2, and can be applied in the 312XP/invention specification (supplement)/97-02/ 96142791 2χ 200902162 In the longitudinal and lateral directions of the substrate 2, the entire surface of the substrate 2 is applied with extremely high precision and uniform film thickness. - The above embodiment is for the distance sensors 6a to 6e at the appropriate time interval 'n to the measurement points q The case of measuring the amount of the gap will be described. However, it is also possible to use a distance sensor that performs continuous measurement, and the amount of the gap is sampled at an appropriate time interval by the control unit 7 that inputs the measured value. [Simplified Schematic] FIG. Fig. 2 is a schematic plan view showing the periphery of the leg portion and the vertical wall portion of the coating nozzle provided in the coating device of Fig. 1. Fig. 3 is a plan view of Fig. 1 Figure 4 is a view of the arrow direction in the direction of Figure 3, Figure 5 is a view of the arrow in the direction of B in Figure 3. Figure 6 is a view showing the coating provided in the coating device of the substrate of Figure 1. Fig. 7 is a view showing an adjustment state of the second and second nozzle position adjusting means in the coating apparatus of the substrate of Fig. 1. Fig. 7 is a view showing an adjustment state of the second nozzle position adjusting means in the coating apparatus of the substrate of Fig. 1. The adjustment when implementing the adjustment shown in Figure 7 Fig. 9 is an explanatory view showing a state in which the coating apparatus of the substrate shown in Fig. 1 is adjusted in the height position of the discharge port. Fig. 10 is a side view showing the application state of the coating apparatus of the substrate of Fig. 1. Fig. 11 is a view for explaining a modification of the coating apparatus of the substrate of the present invention. [Description of main components] 312XP/Invention manual (supplement)/97-02/96142791 22 200902162 1 Platform 2 Substrate 3 Coating nozzle 4 Discharge port 5a~5e No. 5th nozzle position adjusting means 6a~6e 1st to 5th distance sensor 7 Control part 8 Foot part 9 Vertical wall part 10 Repulsive frame 11 Nozzle body 12 Linear motor 13 Servo motor 14 Casing 15 rod 17 South sensor 18 spring (19 contactor G1~G5 average gap amount GS set gap amount J standby position K return position L coating liquid 设定 set value Q measurement point XI, Χ 2 assumed gap size 312 ΧΡ / invention Instruction manual (supplement) /97-02/96142791 23