WO2012133638A1 - 多層プリント配線板の製造方法及びその製造方法で得られる多層プリント配線板 - Google Patents
多層プリント配線板の製造方法及びその製造方法で得られる多層プリント配線板 Download PDFInfo
- Publication number
- WO2012133638A1 WO2012133638A1 PCT/JP2012/058339 JP2012058339W WO2012133638A1 WO 2012133638 A1 WO2012133638 A1 WO 2012133638A1 JP 2012058339 W JP2012058339 W JP 2012058339W WO 2012133638 A1 WO2012133638 A1 WO 2012133638A1
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- WIPO (PCT)
- Prior art keywords
- layer
- copper foil
- foil
- printed wiring
- multilayer printed
- Prior art date
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/022—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
- H05K3/4658—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern characterized by laminating a prefabricated metal foil pattern, e.g. by transfer
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4682—Manufacture of core-less build-up multilayer circuits on a temporary carrier or on a metal foil
Definitions
- the present invention relates to a method for producing a multilayer printed wiring board and a multilayer printed wiring board obtained by the method.
- the present invention relates to a method of manufacturing a multilayer printed wiring board by a coreless buildup method employed for multilayering of printed wiring boards.
- multilayered printed wiring boards have been widely used.
- Such a multilayer printed wiring board is used for the purpose of weight reduction and size reduction in many portable electronic devices.
- the multilayer printed wiring board is required to further reduce the thickness of the interlayer insulating layer and further reduce the weight as a wiring board.
- a manufacturing method using a coreless build-up method has been adopted as a technology that satisfies such requirements.
- this coreless buildup method it has been performed to use a copper foil with a carrier foil for peeling between the support substrate and the multilayer printed wiring board.
- the core substrate is bonded with copper foil 3 of a copper clad laminate on both sides of the prepreg 2.
- This core substrate is used as the first circuit board 10, and a wiring conductor is formed on the ultrathin copper foil 4 to form the second circuit board 20.
- An insulating resin layer is formed on the wiring conductor.
- the third circuit board 30 is formed, a conformal mask is formed to form the fourth circuit board 40, and the non-through hole is formed to form the fifth circuit board 50.
- the non-through hole is plated with copper to be conductive.
- the wiring is etched to form a sixth circuit board, the support substrate including the carrier copper foil is removed to obtain the seventh circuit board, and the ultrathin copper foil is removed to obtain the eighth circuit board.
- the carrier copper foil is disclosed. Ultra-thin copper foil is used, it is described that forming a buildup layer on the surface of the ultrathin copper foil layer.
- Patent Document 2 for the purpose of providing a composite copper foil in which the change in peel strength due to heating temperature is small, the support copper foil is easily peeled after lamination with the resin base material, and the peel strength is stable.
- a composite copper foil having a release layer for mechanically separating the copper foil is disclosed.
- the paragraph 0007 of the specification of Patent Document 2 states that “when a Ni—P alloy layer is used as the thermal diffusion preventing layer, the preferred thickness is 0.01 to 5 ⁇ m.
- the thickness is less than 0.01 ⁇ m, pinholes are generated, and the peel strength tends to become unstable, and if it exceeds 5 ⁇ m, the productivity tends to deteriorate. ”
- the layer is used.
- the manufacturing method of the multilayer printed wiring board according to the present application is a method of manufacturing a multilayer printed wiring board by a coreless buildup method using a copper foil with a carrier foil, and includes the following steps: It is characterized by including.
- Step of preparing copper foil with carrier foil At least four layers of copper foil layer / peeling layer / heat-resistant metal layer / carrier foil are provided, and the relationship of [thickness of carrier foil]> [thickness of copper foil layer] Prepare copper foil with carrier foil to fill.
- Support substrate manufacturing process An insulating layer constituent material is bonded to the surface of the carrier foil of the copper foil with carrier foil to obtain a support substrate composed of the copper foil with carrier foil and the insulating layer constituent material.
- Build-up wiring layer forming step Build-up wiring layer is formed on the surface of the copper foil layer with carrier foil of the support substrate to obtain a support substrate with build-up wiring layer.
- Support substrate separation step with build-up wiring layer The support substrate with build-up wiring layer is separated with a release layer of the support substrate to obtain a multilayer laminate.
- Multilayer printed wiring board forming step Necessary processing is performed on the multilayer laminated board to obtain a multilayer printed wiring board.
- the method for producing a multilayer printed wiring board it is also preferable to use a method in which at least one of roughening treatment, rust prevention treatment, and coupling agent treatment is applied to at least one surface of the copper foil layer and the carrier foil.
- the heat-resistant metal layer of the copper foil with carrier foil is preferably formed using nickel or a nickel alloy.
- the release layer of the copper foil with carrier foil uses one or more selected from nitrogen-containing organic compounds, sulfur-containing organic compounds, and carboxylic acids. It is preferable that it is the organic peeling layer formed in this way.
- the manufacturing method of the multilayer printed wiring board which concerns on this application is a method of manufacturing a multilayer printed wiring board by the coreless buildup method using copper foil with carrier foil, It is characterized by including the following processes.
- the copper foil with carrier foil 10 used in the method for manufacturing a multilayer printed wiring board according to the present application is at least of copper foil layer 11 / peeling layer 12 / heat-resistant metal layer 13 / carrier foil 14.
- the copper foil with carrier foil basically has a layer structure in which a heat-resistant metal layer is provided on the surface of the carrier foil, a release layer is provided on the surface of the heat-resistant metal layer, and a copper foil layer is provided on the surface of the release layer. .
- the relationship of [thickness of carrier foil]> [thickness of copper foil layer] is satisfied.
- FIG. 1A shows the basic layer structure.
- each component of the copper foil with carrier foil 10 will be described.
- the carrier foil 14 of the copper foil 10 with carrier foil copper foil, copper alloy foil, aluminum foil, aluminum alloy foil, stainless steel foil, or the like can be used. However, in consideration of economy and recyclability as waste, it is preferable to use copper foil.
- the copper foil may be an electrolytic copper foil or a rolled copper foil.
- the thickness of the carrier foil is preferably 7 ⁇ m to 35 ⁇ m. In the case where the thickness of the carrier foil is less than 7 ⁇ m, in the production process of the copper foil with carrier foil, in which the heat-resistant metal layer 13, the release layer 12, and the copper foil layer 11 are sequentially formed on the surface of the carrier foil 14, Occurrence of breakage or the like becomes remarkable, which is not preferable.
- the carrier foil in the present invention is thicker than the copper foil layer, and the relationship of [carrier foil thickness]> [copper foil layer thickness] is established.
- the heat-resistant metal layer 13 of the copper foil 10 with carrier foil prevents the “interdiffusion between the carrier foil 14 and the copper foil layer 11” that occurs when hot press molding is performed at a high temperature or for a long time. This is to prevent seizure between the carrier foil 14 and the copper foil layer 11 by preventing seizure between the copper foil layer 11 and the copper foil layer 11.
- the refractory metal layer 13 is preferably selected from the group of molybdenum, tantalum, tungsten, cobalt, nickel, and various alloys containing these metal components. However, it is more preferable to form the refractory metal layer 13 using nickel or a nickel alloy.
- the nickel or nickel alloy film is formed with a film thickness. This is because it has excellent accuracy and has stable heat resistance.
- the heat-resistant metal layer 13 can be formed by a dry film forming method such as a sputtering vapor deposition method or a chemical vapor deposition method.
- the release layer 12 of the copper foil 10 with carrier foil may be formed using an organic agent or may be formed using an inorganic material.
- the peeling layer 12 is made of an inorganic material, it is preferable to use chromium, nickel, molybdenum, tantalum, vanadium, tungsten, cobalt, or an oxide thereof.
- the peeling layer 12 uses an organic agent. It is preferable that it is the organic peeling layer formed in this way. It is preferable to form this organic peeling layer with the organic agent which mixed the 1 type (s) or 2 or more types selected from a nitrogen containing organic compound, a sulfur containing organic compound, and carboxylic acid.
- the peel strength between the carrier foil and the copper foil is preferably 5 g / cm to 80 g / cm.
- the peel strength is less than 5 g / cm, the carrier foil and the copper foil may be peeled off in the build-up wiring layer forming step described later, which is not preferable.
- the peel strength exceeds 80 g / cm, it becomes difficult to easily separate the support substrate with the buildup wiring layer with the release layer of the support substrate in the support substrate separation process with the buildup wiring layer described later. Therefore, it is not preferable.
- the copper foil layer 11 of the copper foil 10 with carrier foil is formed by a wet film formation method such as an electroless copper plating method and an electrolytic copper plating method, or a dry film formation method such as a sputtering vapor deposition method and a chemical vapor deposition method, or a composition thereof. It is preferable to form by combining two or more of the film methods.
- a thin copper layer may be formed by an electroless copper plating method and then grown to a desired copper plating thickness by an electrolytic copper plating method.
- a solution that can be used as a copper ion supply source such as a copper sulfate-based copper plating solution and a copper pyrophosphate-based copper plating solution can be used, but the specific method and the like are particularly limited. It is not something.
- the surfaces of the copper foil layer 11 and the carrier foil 14 it is also preferable to subject the surfaces of the copper foil layer 11 and the carrier foil 14 to at least one of a roughening treatment, a rust prevention treatment, and a coupling agent treatment depending on the use, if necessary.
- the surface of the carrier foil 14 bonded to the insulating layer constituting material 15 is preferably subjected to at least one of roughening treatment, rust prevention treatment, and silane coupling agent treatment in order to provide sufficient adhesion.
- Support substrate manufacturing process In this process, as shown in FIG. 1B, an insulating layer constituting material 15 is laminated on the surface of the carrier foil 14 of the copper foil 10 with the carrier foil, and the copper foil 10 with the carrier foil and the insulating layer are laminated. A support substrate 16 composed of the constituent material 15 is obtained. Regarding the bonding conditions and method at this time, all conditions and methods used for bonding the copper foil and the insulating layer constituting material used in the normal printed wiring board manufacturing process can be used. And as an insulating-layer constituent material, the use of a generally known insulating resin base material is possible, and there is no particular limitation. In the present specification and drawings, the same reference numeral (15) is used in the drawings without clearly distinguishing between the semi-cured insulating layer constituent material and the insulating layer constituent material after being cured by heating. is doing.
- Build-up wiring layer forming step In this step, a build-up wiring layer 20 is formed on the surface of the copper foil layer 11 of the copper foil 10 with carrier foil of the support substrate 16 as shown in FIG. A support substrate 21 with an up wiring layer is obtained.
- the build-up wiring layer 20 at this time is formed by alternately laminating insulating layers (not shown) and wiring layers including inner layer circuits. There is no particular limitation on the coreless buildup method used in the present invention.
- the first layer of the build-up wiring layer can be formed as follows.
- the insulating resin layer can be formed on the surface of the copper foil layer 11 by a method of laminating a resin film on the surface of the copper foil layer 11 of the support substrate 15 or a method of applying a resin composition.
- a resin film is used when forming this insulating resin layer, a metal foil such as a copper foil is simultaneously bonded to the surface of the resin film by pressing or the like, and subsequently, for interlayer connection as necessary It is also possible to form an inner layer circuit connected to the copper foil layer 11 by etching the metal foil and forming the via.
- the build-up wiring layer forming step it is possible to adopt a method as shown in FIG. From the state of FIG. 1B, a plating resist layer (not shown) is provided on the surface of the copper foil layer 11, and the surface of the copper foil layer 11 at a necessary location is plated up to form the copper plating layer 33. . Thereafter, the plating resist is removed, and the copper foil layer 11 exposed between the copper plating layers 33 at the plating-up locations is removed by flash etching, whereby the circuit 30 is formed. Then, it is also possible to form the build-up wiring layer 20 on the circuit formation surface to obtain the state shown in FIG.
- the build-up wiring layer forming step it is possible to adopt a method as shown in FIGS. From the state of FIG. 1B, an Au—Ni layer 34 is formed on the surface of the copper foil layer 11 as shown in FIG. 9A. Then, as shown in FIG. 9B, a copper plating layer 33 is formed on the surface on which the Au—Ni layer 34 is formed to form bumps 35, and the build-up wiring layer 20 is formed on the bump formation surface. It is also possible to set the state (c).
- Support substrate separation step with build-up wiring layer In this step, as shown in FIGS. 3D, 8C, and 10D, the support substrate with build-up wiring layer 21 is replaced with the support substrate. 16 separation layers 12 are separated, and the separation substrate 2 is peeled and removed to obtain the multilayer laminate 1.
- the multilayer laminated board 1 said here says the laminated body of the state which the buildup wiring board 20 and the copper foil layer 11 of the support substrate 16 contact
- Multilayer printed wiring board forming step In this step, the multilayer laminated board 1 is subjected to necessary processing to obtain a multilayer printed wiring board (not shown). Moreover, there is no special limitation regarding the required process said here, and all the methods which can be used in printed wiring board manufacture, such as various plating, an etching, and resist layer formation, are intended. Since there are a wide variety of processing methods that fall into this category depending on the type of multilayer printed wiring board, it is clear that limited description is difficult, and even if limited description is made, it does not make sense.
- the plating resist is removed, and the copper foil layer 11 exposed between the copper plating layers 33 at the plating-up location is removed by flash etching, and the circuit 30 is formed, resulting in the state shown in FIG. Later, it can be used as a multilayer printed wiring board by applying various necessary processing.
- the manufacturing method of the multilayer printed wiring board according to the present application by using the copper foil with carrier foil in the coreless buildup method, even if the multilayer laminate including the buildup layer is manufactured, The refractory metal layer that is difficult to etch does not remain. Therefore, the multilayer printed wiring board manufacturing method according to the present application does not require a heat-resistant metal layer removing step, and thus the multilayer printed wiring board can be manufactured at low cost.
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- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Parts Printed On Printed Circuit Boards (AREA)
Abstract
Description
支持基板製造工程: 当該キャリア箔付銅箔のキャリア箔表面に絶縁層構成材を張り合わせ、当該キャリア箔付銅箔と絶縁層構成材とで構成される支持基板を得る。
ビルドアップ配線層形成工程: 当該支持基板のキャリア箔付銅箔銅箔層表面に、ビルドアップ配線層を形成してビルドアップ配線層付支持基板を得る。
ビルドアップ配線層付支持基板分離工程: 当該ビルドアップ配線層付支持基板を、前記支持基板の剥離層で分離して、多層積層板を得る。
多層プリント配線板形成工程: 前記多層積層板に必要な加工を施し、多層プリント配線板を得る。
本件出願に係る多層プリント配線板の製造方法は、キャリア箔付銅箔を用いてコアレスビルドアップ法で多層プリント配線板を製造する方法であり、以下の工程を含むことを特徴とする。
2 分離基板
10 キャリア箔付銅箔
11 銅箔層
12 剥離層
13 耐熱金属層
14 キャリア箔
15 絶縁層構成材
16 支持基板
20 ビルドアップ配線層
21 ビルドアップ配線層付支持基板
30 回路
33 銅めっき層
34 Au-Ni層
35 バンプ
Claims (4)
- キャリア箔付銅箔を用いてコアレスビルドアップ法で多層プリント配線板を製造する方法であって、以下の工程を含むことを特徴とする多層プリント配線板の製造方法。
キャリア箔付銅箔の準備工程: 少なくとも銅箔層/剥離層/耐熱金属層/キャリア箔の4層を備え、且つ、[キャリア箔の厚さ]>[銅箔層の厚さ]の関係を満たすキャリア箔付銅箔を準備する。
支持基板製造工程: 当該キャリア箔付銅箔のキャリア箔表面に絶縁層構成材を張り合わせ、当該キャリア箔付銅箔と絶縁層構成材とで構成される支持基板を得る。
ビルドアップ配線層形成工程: 当該支持基板のキャリア箔付銅箔の銅箔層表面に、ビルドアップ配線層を形成してビルドアップ配線層付支持基板を得る。
ビルドアップ配線層付支持基板分離工程: 当該ビルドアップ配線層付支持基板を、前記支持基板の剥離層で分離して、多層積層板を得る。
多層プリント配線板形成工程: 前記多層積層板に必要な加工を施し、多層プリント配線板を得る。 - 前記キャリア箔付銅箔は、当該銅箔層、キャリア箔の少なくとも一面に粗化処理、防錆処理、カップリング剤処理の1種以上を施したものを用いる請求項1に記載の多層プリント配線板の製造方法。
- 前記キャリア箔付銅箔の耐熱金属層は、ニッケル又はニッケル合金を用いて形成したものである請求項1又は請求項2のいずれかに記載の多層プリント配線板の製造方法。
- 前記キャリア箔付銅箔の剥離層は、窒素含有有機化合物、硫黄含有有機化合物、カルボン酸の中から選択される1種又は2種以上の有機剤を用いたものである請求項1~請求項3のいずれかに記載の多層プリント配線板の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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KR1020137024717A KR101510366B1 (ko) | 2011-03-30 | 2012-03-29 | 다층 프린트 배선판의 제조 방법 |
US14/008,038 US9066459B2 (en) | 2011-03-30 | 2012-03-29 | Manufacturing method of multilayer printed wiring board |
CN201280014070.1A CN103430642B (zh) | 2011-03-30 | 2012-03-29 | 多层印刷线路板的制造方法 |
JP2013507719A JP6093694B2 (ja) | 2011-03-30 | 2012-03-29 | 多層プリント配線板の製造方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2011075529 | 2011-03-30 | ||
JP2011-075529 | 2011-03-30 |
Publications (1)
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WO2012133638A1 true WO2012133638A1 (ja) | 2012-10-04 |
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PCT/JP2012/058339 WO2012133638A1 (ja) | 2011-03-30 | 2012-03-29 | 多層プリント配線板の製造方法及びその製造方法で得られる多層プリント配線板 |
Country Status (7)
Country | Link |
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US (1) | US9066459B2 (ja) |
JP (3) | JP6093694B2 (ja) |
KR (1) | KR101510366B1 (ja) |
CN (1) | CN103430642B (ja) |
MY (1) | MY163173A (ja) |
TW (3) | TWI561138B (ja) |
WO (1) | WO2012133638A1 (ja) |
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JP2017114070A (ja) * | 2015-12-25 | 2017-06-29 | 三井金属鉱業株式会社 | キャリア付銅箔及びコアレス支持体用積層板、並びに配線層付コアレス支持体及びプリント配線板の製造方法 |
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JP7449921B2 (ja) | 2019-03-27 | 2024-03-14 | 三井金属鉱業株式会社 | プリント配線板用金属箔、キャリア付金属箔及び金属張積層板、並びにそれらを用いたプリント配線板の製造方法 |
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Also Published As
Publication number | Publication date |
---|---|
CN103430642B (zh) | 2016-04-06 |
TWI511633B (zh) | 2015-12-01 |
MY163173A (en) | 2017-08-15 |
CN103430642A (zh) | 2013-12-04 |
JPWO2012133638A1 (ja) | 2014-07-28 |
TWI569705B (zh) | 2017-02-01 |
US20140054259A1 (en) | 2014-02-27 |
US9066459B2 (en) | 2015-06-23 |
TWI561138B (en) | 2016-12-01 |
KR101510366B1 (ko) | 2015-04-07 |
JP2016167601A (ja) | 2016-09-15 |
JP6377660B2 (ja) | 2018-08-22 |
KR20130119985A (ko) | 2013-11-01 |
JP2016149564A (ja) | 2016-08-18 |
JP6377661B2 (ja) | 2018-08-22 |
JP6093694B2 (ja) | 2017-03-08 |
TW201547345A (zh) | 2015-12-16 |
TW201242471A (en) | 2012-10-16 |
TW201547344A (zh) | 2015-12-16 |
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