WO2011055627A1 - 切削工具、金型の製造方法及びアレイレンズ用金型 - Google Patents
切削工具、金型の製造方法及びアレイレンズ用金型 Download PDFInfo
- Publication number
- WO2011055627A1 WO2011055627A1 PCT/JP2010/068256 JP2010068256W WO2011055627A1 WO 2011055627 A1 WO2011055627 A1 WO 2011055627A1 JP 2010068256 W JP2010068256 W JP 2010068256W WO 2011055627 A1 WO2011055627 A1 WO 2011055627A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- cutting
- cutting blade
- region
- end mill
- ball end
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C5/00—Milling-cutters
- B23C5/02—Milling-cutters characterised by the shape of the cutter
- B23C5/10—Shank-type cutters, i.e. with an integral shaft
- B23C5/1009—Ball nose end mills
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
- B23C3/16—Working surfaces curved in two directions
- B23C3/20—Working surfaces curved in two directions for shaping dies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C5/00—Milling-cutters
- B23C5/02—Milling-cutters characterised by the shape of the cutter
- B23C5/10—Shank-type cutters, i.e. with an integral shaft
- B23C5/1081—Shank-type cutters, i.e. with an integral shaft with permanently fixed cutting inserts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/18—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by milling, e.g. channelling by means of milling tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/0048—Moulds for lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2226/00—Materials of tools or workpieces not comprising a metal
- B23B2226/31—Diamond
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2226/00—Materials of tools or workpieces not comprising a metal
- B23C2226/31—Diamond
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2240/00—Details of connections of tools or workpieces
- B23C2240/08—Brazed connections
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2250/00—Compensating adverse effects during milling
- B23C2250/16—Damping vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2270/00—Details of milling machines, milling processes or milling tools not otherwise provided for
- B23C2270/10—Use of ultrasound
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D2277/00—Reaming tools
- B23D2277/24—Materials of the tool or the intended workpiece, methods of applying these materials
- B23D2277/2442—Diamond
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
- B23G2225/00—Materials of threading tools, workpieces or other structural elements
- B23G2225/16—Diamond
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0025—Machining, e.g. grinding, polishing, diamond turning, manufacturing of mould parts
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/19—Rotary cutting tool
- Y10T407/1906—Rotary cutting tool including holder [i.e., head] having seat for inserted tool
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/22—Cutters, for shaping including holder having seat for inserted tool
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T409/00—Gear cutting, milling, or planing
- Y10T409/30—Milling
- Y10T409/303752—Process
- Y10T409/303808—Process including infeeding
Definitions
- the present invention relates to a cutting tool, a mold manufacturing method, and an array lens mold.
- a metal mold When manufacturing a resin lens part of a wafer lens or its resin transfer mold, a metal mold (mold) is generally used.
- a ball end mill is rotated while rotating with respect to an object to be cut (mold base) to form circular unevenness.
- the cutting object is directly brought into contact with the cutting object while rotating the cutting blade provided at the tip of the shank portion of the ball end mill to cut the cutting object.
- the cutting blade provided at the tip of the ball end mill basically contacts the object to be cut while rotating.
- the center of rotation is in contact with the object to be cut without substantially rotating.
- a processing flaw is formed in the portion on the cutting object, through which the rotation center portion of the cutting blade has passed, as if dragged along with the movement of the ball end mill (see FIG. 9B).
- the present inventors examined the problem that minute irregularities close to a scale pattern are formed. Due to the configuration of the ball end mill, a cutting blade is attached to the tip of the shank, but the cutting blade supports this. Since the support member is brazed to the fixing support member and the support member is coupled to the shank portion (the cutting blade is attached to the shank portion via the support member), the shank portion and the support member / cutting blade It was found that a gap was formed between the two and the cutting blade vibrated due to this gap. In other words, although the cutting blade is arranged on the rotation axis of the ball end mill, during the operation of the ball end mill, it receives its own rotational force and swings between a position on the rotation axis and a position deviated from it. It was found that irregularities were formed.
- the present inventors examined the problem that a processing flaw is formed according to the trajectory of the ball end mill, and the cutting blade provided at the tip of the ball end mill cuts in a state where the rotation center portion does not substantially rotate. Since the rotation center portion is in contact with the object and the rotation center portion is bent, the rotation center portion is dragged on the cutting object as the ball end mill turns, and a processing flaw is formed on the uneven surface of the cutting object. I found out.
- the main object of the present invention is to prevent a processing flaw from being formed on a cutting object and form a smooth uneven surface, a cutting tool, a mold manufacturing method, and an array lens mold. To provide a mold.
- a cutting tool is provided in which a space between the shank portion and the cutting blade and the support member is filled with a filler.
- the center of rotation presents a part of an arc;
- a cutting tool is provided in which the radius r of the arc of the rotation center portion satisfies a condition of 0.05 ⁇ r ⁇ 5 ⁇ m.
- a cutting blade of the cutting tool is disposed on a rotating shaft, and the cutting tool is rotated while the rotating tool is rotated around the rotating shaft so that the cutting tool contacts the rotating portion to process the uneven portion.
- a method for manufacturing a mold is provided.
- a step of roughing the object to be cut to form an uneven portion Rotating the ball end mill with respect to the concavo-convex portion and finishing the concavo-convex portion, In the step of finishing the uneven part, Cutting is performed by tilting the rotation axis of the ball end mill with respect to the optical axis in a first region including a region orthogonal to the optical axis of the concavo-convex portion, and the ball in a second region adjacent to the first region.
- a method for producing a mold characterized in that cutting is performed with the rotation axis of an end mill parallel to the optical axis.
- the space between the shank part and the cutting blade and the support member is filled with a filler,
- the center of rotation presents a part of an arc;
- a cutting tool is provided in which the radius r of the arc of the rotation center portion satisfies a condition of 0.05 ⁇ r ⁇ 5 ⁇ m.
- a method for producing a mold characterized in that cutting is performed with the rotation axis of an end mill parallel to the optical axis.
- the gap between the shank portion and the cutting blade / support member is filled with the filler, the vibration of the cutting blade due to the rotational force of the cutting tool can be suppressed, and as a result, the object to be cut can be cut.
- a smooth uneven surface can be formed.
- the cutting blade is disposed on the rotation axis and the rotation center portion of the cutting blade is curved, the trajectory of the turning is drawn while the rotation center portion smoothly contacts the object. Therefore, it can prevent that a rotation center part is dragged by turning operation
- the rotation center of the ball end mill has no rotational speed and no cutting force.
- the rotation axis of the ball end mill is inclined with respect to the optical axis in the region orthogonal to the optical axis of the uneven portion of the object to be cut, so that the center of rotation is prevented from contacting the uneven portion and being dragged by the turning operation.
- FIG. 1 It is a perspective view which shows schematic structure of a concave mold. It is sectional drawing which follows the II line
- the mold 100 has a substantially rectangular parallelepiped shape, and a plurality of recesses 102 (cavities) are formed in an array on the surface.
- the mold 100 is an example of an array lens mold, and is particularly preferably used for molding a resin lens portion of a wafer lens, or can be used for manufacturing the resin transfer mold.
- a flat portion 104, a slope portion 106, a flat portion 108, a slope portion 110, and a flat portion 112 are formed around the concave portion 102. These parts are formed concentrically around the recess 102 in order.
- the optical axis (the optical axis of the optical system molded from the mold 100) is orthogonal to the center of the recess 102.
- the shape of the mold 100 is not limited to a substantially rectangular parallelepiped, but may be a substantially cylindrical shape or a divided circle shape.
- the cutting device 120 ⁇ / b> A has a surface plate 122.
- a stage 124 having an orthogonal axis and a turning axis is provided.
- the stage 124 can move along the X-axis direction and the Z-axis direction, and can rotate along the B-axis direction.
- a spindle 126 is installed on the stage 124.
- the surface plate 122 is provided with a fixture 128 for fixing an object to be cut (work material).
- the spindle 126 and the fixture 128 are disposed to face each other.
- the fixing tool 128 can move in the Y-axis direction, and the spindle 126 and the object to be cut can move relatively.
- Spindle 126 has a built-in spindle motor. As shown in FIG. 3B, a ball end mill 132 is installed on the spindle 130 of the spindle motor. The ball end mill 132 is an example of a cutting tool.
- the spindle 126 provided with the ball end mill 132 is preferably a spindle having an air bearing in order to process the optical surface with high accuracy.
- the power for rotating the spindle 126 includes a spindle motor system that incorporates a spindle motor and an air turbine system that supplies high-pressure air. As the power, it is desirable to adopt a spindle motor system for high rigidity.
- a cutting blade 134 is fixed to the tip of the ball end mill 132.
- the cutting blade 134 is a diamond tip made of single crystal diamond.
- the cutting blade 134 When the cutting blade 134 is viewed in plan, the cutting blade 134 has an arc portion 134a and a straight portion 134b as shown in FIG. When the cutting blade 134 is viewed from the side, the cutting blade 134 has straight portions 134c, 134d, and 134e as shown in FIG. The arc portion 134a and the straight portions 134b to 134e correspond to ridge lines where the planes constituting the cutting blade 134 intersect.
- the cutting blade 134 rotates while drawing a hemispherical locus in conjunction with the rotation (see the two-dot chain line in FIGS. 5A and 5B).
- the contact points of the arc portion 134a and the straight portions 134b, 134c, and 134d are the rotation center portion 134f of the spindle 126, and the rotation center portion 134f does not substantially rotate.
- the cutting blade 134 is disposed on the rotation axis 250 (rotation center axis) of the ball end mill 132.
- the rotation center portion 134 f is disposed on the rotation shaft 250.
- the rotation center part 134f exhibits a part of an arc (consists of a part of the arc), and the radius r of the arc satisfies the condition of 0.05 ⁇ r ⁇ 5 ⁇ m.
- the reason why the radius r is 0.05 ⁇ m or more is that it is difficult to make the radius r smaller than this, and the reason that the radius r is 5 ⁇ m or less is superior to a practical level when a cutting object is cut. This is because the mold 100 can be manufactured.
- the rotation center part 134f is accommodated in a square region 260 whose width in the vertical and horizontal directions is within 10 ⁇ m. Also in this case, if the rotation center part 134f is within the square region 260, the excellent mold 100 exceeding the practical level can be manufactured when the cutting object is cut.
- the rotation center part 134f may exhibit, for example, a part of an elliptical arc or a part of a simple curved line when viewed in plan.
- a simple curve line is a curve that does not constitute an arc, and the curve line may partially include a straight line.
- the tip of the ball end mill 132 will be described in more detail.
- the tip portion is mainly composed of a cemented carbide shank portion 200.
- a through hole 202 for screw insertion is formed in the shank portion 200.
- a support member 210 for supporting and fixing the cutting blade 134 is attached to the shank portion 200.
- the support member 210 is also formed with a through hole 212 for screw insertion.
- a cutting blade 134 is brazed and fixed to the tip of the support member 210. As described above, the cutting blade 134 is disposed at a position where the rotation center portion 134f coincides with the rotation shaft 250 of the ball end mill 132.
- a void portion 230 (gap) is formed in a region surrounded by the shank portion 200, the support member 210, and the cutting blade 134.
- the gap 230 is filled with a filler 240.
- the adhesive may be either a photocurable resin or a thermosetting resin.
- the filler 240 is basically applied and injected into the gap 230 before the support member 210 (with the cutting blade 314) is attached to the shank part 200, and then the support member 210 is attached to the shank part 200.
- a fluid material such as an adhesive
- the material may be injected into the gap 230 after the support member 210 is attached to the shank part 200.
- the spindle 126 in the cutting device 120B, the spindle 126 (ball end mill 132) can be rotated in the A-axis direction and the C-axis direction.
- the rotation axes A, B, and C are orthogonal to each other.
- the other configuration of the cutting device 120B is the same as that of the cutting device 120A (see FIG. 4B).
- the attitude of the ball end mill 132 is such that the normal to the edge contour at an arbitrary point of the tip edge (cutting edge 134) of the ball end mill 132 and the normal to the machining surface are always parallel. Can be controlled. As a result, machining can be performed at one point of the tool edge (cutting edge 134), and the influence of the tool edge edge error on the machining shape can be reduced.
- Method of manufacturing concave mold As shown in FIG. 7, the mold 100 is generally manufactured through steps (a) to (g). (A) A cutting object 140 is prepared and blank processing is performed on a predetermined region.
- (E) The recess 102 is finished using a diamond cutting blade.
- the surface of the cutting object 140 is planarized to form a reference surface, and an alignment mark 144 is formed on the reference surface.
- the reference plane is a reference plane when adjusting the height position with other members.
- Alignment mark 144 is used for alignment with other members.
- polishing for smoothing the surface is performed after the steps (e) and (f).
- the cutting object 140 is washed to remove machining wastes, and a SiO 2 film is formed on the surface of the cutting object 140 to apply a release agent.
- the SiO 2 film functions as a base when applying the release agent.
- the SiO 2 film is formed by any of vapor deposition, CVD, and sputtering. In order to form a SiO 2 film with a uniform thickness on the surface of the cutting object 140, it is desirable to perform a CVD process.
- the mold release agent facilitates mold release from the mold 100.
- the step (c) includes the step of roughing the mold base material with a machining center to form the concavo-convex portion.
- the roughing is not necessarily limited to this method, and other methods are used. It may be formed. Therefore, the present invention is not necessarily limited to a processing method or a cutting tool which is premised on roughing with a cutting tool.
- the cutting device 120A is basically used.
- the spindle motor of the spindle 126 is operated to rotate the ball end mill 132 at a high speed.
- the movement of the stage 124 in the X-axis direction and the Z-axis direction and the movement of the fixture 128 in the Y-axis direction are cooperated to rotate the ball end mill 132 with respect to the workpiece 140. That is, the ball end mill 132 is swirled while rotating to finish the surface of the recess 102.
- the ball end mill 132 is swirled in a spiral shape while being rotated while being held in a state parallel to the optical axis. A part or the whole of the concave portion 102 and the flat portion 104 is processed by contact.
- the region 150 is a central portion of the recess 102 and includes a region orthogonal to the optical axis.
- the region 152 is a peripheral portion of the recess 102 and is adjacent to the region 150.
- the region 154 is a part or the whole of the flat portion 104 and is adjacent to the region 152.
- the rotation center portion 134f is curved and smoothly contacts the recess 102. Therefore, an operation of moving the spindle 126 in the B-axis direction to tilt the rotation center portion 134f with respect to the recess 102 is also possible. It becomes unnecessary.
- the gap portion 230 of the ball end mill 132 is filled with the filler 240, the rotational force of the ball end mill 132 is suppressed from being transmitted to the cutting blade 134 and the cutting blade 134 Vibration is also suppressed, and a smooth curved surface can be formed in the recess 102 as shown in FIG.
- the optical system when the optical system is manufactured (molded) by transferring the shape of the concave portion 102 of the mold 100, the quality of the optical surface of the optical system can be improved, and when the optical system is used as an imaging lens. The occurrence of ghost can also be reduced.
- the cutting device 120B may be used.
- the spindle motor of the spindle 126 is operated and the ball end mill 132 is rotated at a high speed as shown in FIG. 4B, similarly to the case where the cutting device 120A is used.
- the movement of the stage 124 in the X-axis direction and the Z-axis direction and the movement of the fixture 128 in the Y-axis direction are cooperated to rotate the ball end mill 132 with respect to the workpiece 140.
- the ball end mill 132 is swirled so as to be always processed at one point of the tool edge (cutting blade 134), and the surface of the recess 102 is finished. .
- the cutting devices 120A and 120B are used.
- the ball end mill 132 is replaced with a square end mill, and the square end mill is rotated while rotating to planarize the surfaces of the plane portions 104 (the remaining areas excluding the finished area), 108, and 112.
- the planar portions 104, 108 and 112 can be processed efficiently.
- the square end mill is a tool whose trajectory drawn by the edge contour when the end mill rotates is a cylinder or a truncated cone.
- a radius end mill having a partially R-shaped cutting edge may be used instead of the square end mill.
- the ball end mill 132 may be used as it is in the plane processing.
- a cross-shaped alignment mark 144 (groove) having a fixed line width is formed on the flat surface portion 112.
- the alignment mark 144 is formed by linear relative movement using a square end mill, a ball end mill, or a flat and sharp cutting blade.
- the intersection of the center lines of the vertical line width and the horizontal line width can be used for alignment with other members.
- an alignment mark 146 shown in FIG. 11B may be formed.
- the alignment mark 146 is formed by overlapping cross-shaped grooves 146a and 146b.
- the arrangement of the groove 146a and the groove 146b is slightly shifted, and the depth of the groove 146a is shallower than the depth of the groove 146b.
- a step is formed between the groove 146a and the groove 146b, and the width of the step can be used for alignment with other members.
- the alignment mark 146 may have a circular shape, a square shape, or the like in addition to the cross shape. Any shape can be used as long as the desired position of the alignment mark 146 can be calculated.
- the mold 180 has a substantially rectangular parallelepiped shape, and a plurality of convex portions 182 (cores) are formed on the surface.
- the mold 180 is an example of an array lens mold.
- a flat portion 184 is formed around the convex portion 182, and the flat portion 184 is formed concentrically around the convex portion 182. Is formed.
- the optical axis is orthogonal to the central portion of the convex portion 182.
- the shape of the mold 180 is not limited to a substantially rectangular parallelepiped, and may be a substantially cylindrical shape or a divided circle shape. [Producing method of convex mold]
- the manufacturing method of the mold 180 is substantially the same as the manufacturing method of the mold 100, and the following points are different.
- step (e) as shown in FIG. 13, from the outermost region 194 through the region 192 to the central region 190, the ball end mill 132 is swirled while rotating while being held in a state parallel to the optical axis.
- the convex portion 182 and a part or all of the flat surface portion 184 are processed.
- the region 190 is a central portion of the convex portion 182 and includes a region orthogonal to the optical axis.
- the region 192 is a peripheral portion of the convex portion 182 and is adjacent to the region 190.
- the region 194 is a part or all of the flat portion 184 and is a region adjacent to the region 192.
- the posture of the ball end mill 132 may be changed for each of the regions 150, 152, and 154 as shown in FIG. Conceivable.
- a region including a region orthogonal to the optical axis means that when the rotation axis of the ball end mill 132 is tilted by a predetermined angle with respect to the optical axis as described later, the shifted rotation axis interferes with the formation surface of the recess 102.
- a region that disappears, and at least from the optical axis of the recess 102, a line perpendicular to the rotation axis obtained by inclining the ball end mill 132 from the optical axis, and a tangent at the intersection of the inclined rotation axis and the surface forming the recess 102 Is a region within a range up to a point where the angle formed by the angle is no longer 0 degrees (because 0 degrees is the relationship in which the rotation axis center of the tilted ball end mill 132 is still in contact with the formation surface of the recess 102).
- the ball end mill 132 is processed while being swirled in a spiral shape (see FIG. 3B), but in the region 154, the rotation axis of the ball end mill 132 is slightly inclined with respect to the optical axis ( 14 (1)), in region 152, the rotational axis of the ball end mill 132 is kept parallel to the optical axis ((2) in FIG. 14), and in region 150, the rotational axis of the ball end mill 132 is again slightly relative to the optical axis. Tilt ((3) in FIG. 14).
- the change of the posture is completed in one turn (by one turn of the ball end mill 132).
- the ball end mill 132 is turned at an expected angle of 10 to 90% of the ball end mill tilt angle that is the tilt angle when the ball end mill 132 is attached.
- the change of the posture of the ball end mill 132 is based on the following principle (see FIG. 15).
- the rotation center 134f comes into contact with a certain region 164 of the recess 102 that is offset from the optical axis and is dragged by the turning motion of the spindle 162. At 168, the rotation center 134f is not in contact.
- the rotation center 134f can be prevented from being dragged between the region 160 and the region 164.
- the posture of the ball end mill 132 is changed for each of the regions 190, 192, and 194 as shown in FIG.
- the ball end mill 132 is swirled in a spiral shape from the region 194 through the region 192 to the region 190 (see FIG. 3B).
- the ball end mill 132 is used as the optical axis.
- the ball end mill 132 is kept parallel to the optical axis ((2) in FIG. 16), and in the region 190, the ball end mill 132 is again slightly inclined with respect to the optical axis ((1) in FIG. 16).
- FIG. 16 (3) ).
- Mold 102 Recess (cavity) 104 Plane part 106 Slope part 108 Plane part 110 Slope part 112 Plane part 120A, 120B Cutting device 122 Surface plate 124 Stage 126 Spindle 128 Fixing tool 130 (Spindle motor) Spindle 132 Ball end mill 134 Cutting blade 134a Arc part 134b Linear part 134c , 134d, 134e Straight portion 134f Center of rotation 140 Object to be cut 142 Plating layer 144, 146 Alignment mark 146a, 146b Groove 150, 152, 154 Region 180 Mold 182 Convex (core) 184 Plane portion 190, 192, 194 Region 200 Shank portion 202 Through hole 210 Support member 212 Through hole 220 Screw 230 Gap (gap) 240 Filler 250 Rotating shaft 260 Square area
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Mining & Mineral Resources (AREA)
- Milling Processes (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
Description
切削刃と、
シャンク部と、
前記切削刃を支持・固定する支持部材であって、一方の端部には前記切削刃が固定され、他方の端部が前記シャンク部に固定されている前記支持部材とを備え、
前記シャンク部と前記切削刃及び前記支持部材との間の空隙には、充填剤が充填されていることを特徴とする切削工具が提供される。
切削対象物に対し、切削刃の一部を回転中心部を回転中心として回転させながら旋回させて当該切削対象物を切削する切削工具であって、
前記回転中心部が円弧の一部を呈しており、
前記回転中心部の円弧の半径rが0.05≦r≦5μmの条件を満たしていることを特徴とする切削工具が提供される。
前記切削工具の切削刃を回転軸上に配置し、当該回転軸を中心に回転させながら凹凸部に対し前記切削工具を旋回させながら当接させ、前記凹凸部を加工する工程を有することを特徴とする金型の製造方法が提供される。
切削対象物に粗加工を施して凹凸部を形成する工程と、
前記凹凸部に対しボールエンドミルを回転させながら旋回させ、前記凹凸部を仕上げ加工する工程と、を有し、
前記凹凸部を仕上げ加工する工程では、
前記凹凸部の光軸と直交する領域を含む第1の領域において前記ボールエンドミルの回転軸を光軸に対し傾けて切削加工を行い、前記第1の領域に隣接する第2の領域において前記ボールエンドミルの回転軸を光軸に対し平行にして切削加工を行うことを特徴とする金型の製造方法が提供される。
切削対象物に対し、切削刃の一部を回転中心部を回転中心として回転させながら旋回させて当該切削対象物を切削する切削工具であって、
シャンク部と、
前記切削刃を支持・固定し、一方の端部には前記切削刃が固定され、他方の端部が前記シャンク部に固定されている支持部材と、を備え、
前記シャンク部と前記切削刃及び前記支持部材との間の空隙には、充填剤が充填されており、
前記回転中心部が円弧の一部を呈しており、
前記回転中心部の円弧の半径rが0.05≦r≦5μmの条件を満たしていることを特徴とする切削工具が提供される。
切削刃と、シャンク部と、前記切削刃を支持・固定し、一方の端部には前記切削刃が固定され、他方の端部が前記シャンク部に固定されている支持部材と、を備え、且つ、前記シャンク部と前記切削刃及び前記支持部材との間の空隙に充填剤を充填させた切削工具により切削加工を行い、
切削対象物に粗加工を施して凹凸部を形成する工程と、
前記凹凸部に対しボールエンドミルを回転させながら旋回させ、前記凹凸部を仕上げ加工する工程と、を有し、
前記凹凸部を仕上げ加工する工程では、
前記凹凸部の光軸と直交する領域を含む第1の領域において前記ボールエンドミルの回転軸を光軸に対し傾けて切削加工を行い、前記第1の領域に隣接する第2の領域において前記ボールエンドミルの回転軸を光軸に対し平行にして切削加工を行うことを特徴とする金型の製造方法が提供される。
[凹状金型(母型)]
図1に示す通り、金型100は略直方体状を呈しており、表面に複数の凹部102(キャビティ)がアレイ状に形成されている。金型100はアレイレンズ用金型の一例であり、特にウエハレンズの樹脂製レンズ部を成形するのに好適に使用され、又はその樹脂製転写型を製造する場合にも使用可能である。
[切削装置]
図3(a)に示す通り、切削装置120Aは定盤122を有している。定盤122上には、直交軸及び旋回軸を有するステージ124が設けられている。ステージ124はX軸方向,Z軸方向に沿って移動可能であるとともに、B軸方向に沿って回動可能となっている。ステージ124上にはスピンドル126が設置されている。定盤122には切削対象物(ワーク材)を固定するための固定具128が設けられている。定盤122上では、スピンドル126と固定具128とが対向配置されている。固定具128はY軸方向に移動可能となっており、スピンドル126と切削対象物とが相対的に移動できるようになっている。
[凹状金型の製造方法]
図7に示す通り、金型100は大きくは(a)~(g)の工程を経て製造される。
(a)切削対象物140を準備して所定領域にブランク加工を施す。
(b)切削対象物140の所定領域に無電解ニッケルリンメッキ処理を施し、メッキ層142を形成する。
(c)汎用のマシニングセンタを用いて切削対象物140の表面(メッキ層142)を粗加工し、凹部102などの原形(凹凸形状)を形成する。
(d)粗加工後の切削対象物140の表面を研磨して滑らかにする。
(e)ダイヤモンド切削刃を用いて凹部102を仕上げ加工する。
(f)切削対象物140の表面を平面加工して基準面を形成し、その基準面に対しアライメントマーク144を形成する。
(g)切削対象物140を洗浄して加工屑などを除去し、切削対象物140の表面にSiO2膜を形成して離型剤を塗布する。
[変形例(凸状金型)]
図12に示す通り、金型180は略直方体状を呈しており、表面に複数の凸部182(コア)が形成されている。金型180はアレイレンズ用金型の一例である。
[凸状金型の製造方法]
金型180の製造方法は金型100の製造方法とほぼ同様であり、下記の点が異なる。
[変形例]
前述した(e)の工程(ダイヤモンド切削刃を用いて凹部102を仕上げ加工する)の変形例として、図14に示す通り、領域150,152,154ごとにボールエンドミル132の姿勢を変化させることも考えられる。
102 凹部(キャビティ)
104 平面部
106 斜面部
108 平面部
110 斜面部
112 平面部
120A,120B 切削装置
122 定盤
124 ステージ
126 スピンドル
128 固定具
130 (スピンドルモータの)主軸
132 ボールエンドミル
134 切削刃
134a 円弧部
134b 直線部
134c,134d,134e 直線部
134f 回転中心部
140 切削対象物
142 メッキ層
144,146 アライメントマーク
146a,146b 溝部
150,152,154 領域
180 金型
182 凸部(コア)
184 平面部
190,192,194 領域
200 シャンク部
202 貫通孔
210 支持部材
212 貫通孔
220 ネジ
230 空隙部(隙間)
240 充填剤
250 回転軸
260 スクエア領域
Claims (12)
- 切削刃と、
シャンク部と、
前記切削刃を支持・固定し、一方の端部には前記切削刃が固定され、他方の端部が前記シャンク部に固定されている支持部材と、を備え、
前記シャンク部と前記切削刃及び前記支持部材との間の空隙には、充填剤が充填されていることを特徴とする切削工具。 - 前記充填剤がロウ、半田又は樹脂であることを特徴とする請求項1に記載の切削工具。
- 切削対象物に対し、切削刃の一部を回転中心部を回転中心として回転させながら旋回させて当該切削対象物を切削する切削工具であって、
前記回転中心部が円弧の一部を呈しており、
前記回転中心部の円弧の半径rが0.05≦r≦5μmの条件を満たしていることを特徴とする切削工具。 - 前記回転中心部が、幅10μmの領域に収まっていることを特徴とする請求項3に記載の切削工具。
- 請求項3又は4に記載の切削工具の切削刃を回転軸上に配置し、当該回転軸を中心に回転させながら凹凸部に対し前記切削工具を旋回させながら当接させ、前記凹凸部を加工する工程を有することを特徴とする金型の製造方法。
- 前記凹凸部を加工する工程では、複数の前記凹凸部をアレイ状に加工することを特徴とする請求項5に記載の金型の製造方法。
- 切削対象物に粗加工を施して凹凸部を形成する工程と、
前記凹凸部に対しボールエンドミルを回転させながら旋回させ、前記凹凸部を仕上げ加工する工程と、を有し、
前記凹凸部を仕上げ加工する工程では、
前記凹凸部の光軸と直交する領域を含む第1の領域において前記ボールエンドミルの回転軸を光軸に対し傾けて切削加工を行い、前記第1の領域に隣接する第2の領域において前記ボールエンドミルの回転軸を光軸に対し平行にして切削加工を行うことを特徴とする金型の製造方法。 - 前記第1の領域と前記第2の領域とで前記ボールエンドミルの姿勢を変化させる際、旋回1周で姿勢変化を完了することを特徴とする請求項7に記載の金型の製造方法。
- 前記ボールエンドミルを、前記第1の領域でのボールエンドミル傾斜角の10~90%の見込み角で、旋回させることを特徴とする請求項8に記載の金型の製造方法。
- 請求項7~9のいずれか一項に記載の金型の製造方法で製造されたアレイレンズ用金型。
- 切削対象物に対し、切削刃の一部を回転中心部を回転中心として回転させながら旋回させて当該切削対象物を切削する切削工具であって、
シャンク部と、
前記切削刃を支持・固定し、一方の端部には前記切削刃が固定され、他方の端部が前記シャンク部に固定されている支持部材と、を備え、
前記シャンク部と前記切削刃及び前記支持部材との間の空隙には、充填剤が充填されており、
前記回転中心部が円弧の一部を呈しており、
前記回転中心部の円弧の半径rが0.05≦r≦5μmの条件を満たしていることを特徴とする切削工具。 - 切削刃と、シャンク部と、前記切削刃を支持・固定し、一方の端部には前記切削刃が固定され、他方の端部が前記シャンク部に固定されている支持部材と、を備え、且つ前記シャンク部と前記切削刃及び前記支持部材との間の空隙に充填剤を充填させた切削工具により切削加工を行い、
切削対象物に粗加工を施して凹凸部を形成する工程と、
前記凹凸部に対しボールエンドミルを回転させながら旋回させ、前記凹凸部を仕上げ加工する工程と、を有し、
前記凹凸部を仕上げ加工する工程では、
前記凹凸部の光軸と直交する領域を含む第1の領域において前記ボールエンドミルの回転軸を光軸に対し傾けて切削加工を行い、前記第1の領域に隣接する第2の領域において前記ボールエンドミルの回転軸を光軸に対し平行にして切削加工を行うことを特徴とする金型の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010800485816A CN102712053A (zh) | 2009-11-05 | 2010-10-18 | 切削工具、模具的制造方法及阵列透镜用模具 |
EP10828187.4A EP2497592B1 (en) | 2009-11-05 | 2010-10-18 | Cutting tool, method for manufacturing molding die |
DK10828187.4T DK2497592T3 (da) | 2009-11-05 | 2010-10-18 | Skærende værktøj, fremgangsmåde til fremstilling af et formværktøj |
JP2011539328A JPWO2011055627A1 (ja) | 2009-11-05 | 2010-10-18 | 切削工具、金型の製造方法及びアレイレンズ用金型 |
US13/503,830 US20120207869A1 (en) | 2009-11-05 | 2010-10-18 | Cutting Tool, Method for Manufacturing Molding Die, and Molding Die for Array Lens |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009-254303 | 2009-11-05 | ||
JP2009254303 | 2009-11-05 | ||
JP2009-296598 | 2009-12-28 | ||
JP2009296598 | 2009-12-28 | ||
JP2010006580 | 2010-01-15 | ||
JP2010-006580 | 2010-01-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2011055627A1 true WO2011055627A1 (ja) | 2011-05-12 |
Family
ID=43969867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2010/068256 WO2011055627A1 (ja) | 2009-11-05 | 2010-10-18 | 切削工具、金型の製造方法及びアレイレンズ用金型 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20120207869A1 (ja) |
EP (1) | EP2497592B1 (ja) |
JP (1) | JPWO2011055627A1 (ja) |
CN (1) | CN102712053A (ja) |
DK (1) | DK2497592T3 (ja) |
WO (1) | WO2011055627A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5156990B1 (ja) * | 2011-11-22 | 2013-03-06 | ナルックス株式会社 | 金型加工方法 |
JP2017222161A (ja) * | 2016-04-28 | 2017-12-21 | アンテルヨン ウエハー オプティクス ビー.ブイ. | 複製ツール |
JP6278170B1 (ja) * | 2016-08-26 | 2018-02-14 | 三菱日立ツール株式会社 | 切削インサート及び刃先交換式回転切削工具 |
WO2018037804A1 (ja) * | 2016-08-26 | 2018-03-01 | 三菱日立ツール株式会社 | 切削インサート及び刃先交換式回転切削工具 |
JP2020508886A (ja) * | 2017-02-14 | 2020-03-26 | スリーエム イノベイティブ プロパティズ カンパニー | 微細構造を製造するためのエンドミル加工法、微細構造を含むツール、及び微細構造 |
WO2024018895A1 (ja) * | 2022-07-21 | 2024-01-25 | デクセリアルズ株式会社 | エンドミル、マイクロレンズ作製用金型の製造方法、及びマイクロレンズ作製用金型の製造装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2915614B1 (en) * | 2012-10-31 | 2020-09-02 | Makino Milling Machine Co., Ltd. | Machine tool control device and machine tool |
FR3003490B1 (fr) * | 2013-03-25 | 2015-05-22 | Palumbo Ind | Outil et procede de fraisage de piece metallique |
CN104117832B (zh) * | 2014-07-15 | 2016-08-24 | 厦门理工学院 | 一种半球透镜模具的制作方法 |
CN104654781A (zh) * | 2015-01-29 | 2015-05-27 | 吴传涛 | 一种推板炉炉温控制调节器 |
US10857602B2 (en) * | 2015-06-29 | 2020-12-08 | Kanefusa Kabushiki Kaisha | Dimples processing method by means of end milling and end mill |
JP2017094467A (ja) * | 2015-11-26 | 2017-06-01 | 住友電工ハードメタル株式会社 | 回転工具 |
CN109153086B (zh) * | 2016-05-19 | 2020-12-22 | 兼房株式会社 | 使用了旋转切削工具的凹坑加工方法 |
CN108296493A (zh) * | 2018-01-16 | 2018-07-20 | 广东工业大学 | 一种精密车床加工菲涅尔微结构阵列的加工轨迹生成方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62292309A (ja) * | 1986-06-09 | 1987-12-19 | Fanuc Ltd | ポケツト加工方法 |
JPH068028A (ja) * | 1991-10-04 | 1994-01-18 | Eisuke Yokoyama | 綾目立体加工機構造 |
JPH11197902A (ja) * | 1997-12-29 | 1999-07-27 | Canon Inc | 回折面形状の製造方法 |
JP2001121337A (ja) * | 1999-10-19 | 2001-05-08 | Kanefusa Corp | 付刃回転切削工具 |
JP2005212015A (ja) * | 2004-01-28 | 2005-08-11 | Fuji Photo Film Co Ltd | 切削工具 |
JP2005342805A (ja) * | 2004-05-31 | 2005-12-15 | Ricoh Co Ltd | ラジアスエンドミル及びそれを用いた切削加工方法 |
JP2007075944A (ja) * | 2005-09-14 | 2007-03-29 | Tungaloy Corp | ボールエンドミル |
JP2007090517A (ja) * | 2005-09-05 | 2007-04-12 | Sanwa Kenma Kogyo Kk | 回転工具および塗膜除去方法 |
JP3926380B1 (ja) | 2006-12-07 | 2007-06-06 | マイルストーン株式会社 | 撮像レンズ |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2378094A (en) * | 1943-06-18 | 1945-06-12 | Dominion Diamond Cutting Compa | Metal boring or cutting tool |
US3025726A (en) * | 1960-07-11 | 1962-03-20 | Super Cut | Method of mounting diamonds in tool shanks and other holders |
CN201316833Y (zh) * | 2008-11-12 | 2009-09-30 | 郑黄铮 | 环状包覆式铣刀 |
JP4896117B2 (ja) * | 2008-12-01 | 2012-03-14 | 京セラ株式会社 | 切削工具 |
-
2010
- 2010-10-18 WO PCT/JP2010/068256 patent/WO2011055627A1/ja active Application Filing
- 2010-10-18 JP JP2011539328A patent/JPWO2011055627A1/ja active Pending
- 2010-10-18 DK DK10828187.4T patent/DK2497592T3/da active
- 2010-10-18 US US13/503,830 patent/US20120207869A1/en not_active Abandoned
- 2010-10-18 CN CN2010800485816A patent/CN102712053A/zh active Pending
- 2010-10-18 EP EP10828187.4A patent/EP2497592B1/en not_active Not-in-force
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62292309A (ja) * | 1986-06-09 | 1987-12-19 | Fanuc Ltd | ポケツト加工方法 |
JPH068028A (ja) * | 1991-10-04 | 1994-01-18 | Eisuke Yokoyama | 綾目立体加工機構造 |
JPH11197902A (ja) * | 1997-12-29 | 1999-07-27 | Canon Inc | 回折面形状の製造方法 |
JP2001121337A (ja) * | 1999-10-19 | 2001-05-08 | Kanefusa Corp | 付刃回転切削工具 |
JP2005212015A (ja) * | 2004-01-28 | 2005-08-11 | Fuji Photo Film Co Ltd | 切削工具 |
JP2005342805A (ja) * | 2004-05-31 | 2005-12-15 | Ricoh Co Ltd | ラジアスエンドミル及びそれを用いた切削加工方法 |
JP2007090517A (ja) * | 2005-09-05 | 2007-04-12 | Sanwa Kenma Kogyo Kk | 回転工具および塗膜除去方法 |
JP2007075944A (ja) * | 2005-09-14 | 2007-03-29 | Tungaloy Corp | ボールエンドミル |
JP3926380B1 (ja) | 2006-12-07 | 2007-06-06 | マイルストーン株式会社 | 撮像レンズ |
Non-Patent Citations (1)
Title |
---|
See also references of EP2497592A4 * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5156990B1 (ja) * | 2011-11-22 | 2013-03-06 | ナルックス株式会社 | 金型加工方法 |
WO2013076809A1 (ja) * | 2011-11-22 | 2013-05-30 | ナルックス株式会社 | 金型加工方法、金型及び光学素子 |
JP2017222161A (ja) * | 2016-04-28 | 2017-12-21 | アンテルヨン ウエハー オプティクス ビー.ブイ. | 複製ツール |
JP6278170B1 (ja) * | 2016-08-26 | 2018-02-14 | 三菱日立ツール株式会社 | 切削インサート及び刃先交換式回転切削工具 |
WO2018037804A1 (ja) * | 2016-08-26 | 2018-03-01 | 三菱日立ツール株式会社 | 切削インサート及び刃先交換式回転切削工具 |
US10507535B2 (en) | 2016-08-26 | 2019-12-17 | Mitsubishi Hitachi Tool Engineering, Ltd. | Cutting insert and indexable rotary cutting tool |
JP2020508886A (ja) * | 2017-02-14 | 2020-03-26 | スリーエム イノベイティブ プロパティズ カンパニー | 微細構造を製造するためのエンドミル加工法、微細構造を含むツール、及び微細構造 |
WO2024018895A1 (ja) * | 2022-07-21 | 2024-01-25 | デクセリアルズ株式会社 | エンドミル、マイクロレンズ作製用金型の製造方法、及びマイクロレンズ作製用金型の製造装置 |
Also Published As
Publication number | Publication date |
---|---|
DK2497592T3 (da) | 2014-02-03 |
US20120207869A1 (en) | 2012-08-16 |
JPWO2011055627A1 (ja) | 2013-03-28 |
EP2497592A4 (en) | 2013-03-20 |
CN102712053A (zh) | 2012-10-03 |
EP2497592A1 (en) | 2012-09-12 |
EP2497592B1 (en) | 2013-11-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2011055627A1 (ja) | 切削工具、金型の製造方法及びアレイレンズ用金型 | |
TWI359711B (en) | Raster cutting technology for ophthalmic lenses | |
US20060292969A1 (en) | Dressing tool, dressing device, dressing method, processing device and semiconductor device producing method | |
CN110126106B (zh) | 晶圆加工方法 | |
US20100280650A1 (en) | Machining apparatus and machining method | |
CN103809371A (zh) | 矩形形成模具用基板 | |
JP2007181882A (ja) | 転写光学面の加工方法、光学素子用成形金型及び光学素子 | |
JP3652182B2 (ja) | 回折格子の加工方法及び加工装置 | |
WO2011145494A1 (ja) | 切削工具 | |
JP6913295B2 (ja) | ガラス板、及びガラス板の製造方法 | |
JP2010142890A (ja) | 切削部材の外周形状の修正方法、ドレッサーボード及び切削装置 | |
CN105792988B (zh) | 磨削或研磨处理用载体、磨削或研磨处理用载体的制造方法及磁盘用基板的制造方法 | |
JP2015104771A (ja) | 磁気ディスク用ガラス基板の製造方法及び研磨処理用キャリア | |
US7793403B2 (en) | Manufacturing method of optical component or molding die therefor | |
WO2011142372A1 (ja) | 金型の切削加工方法 | |
JP2024013853A (ja) | エンドミル、マイクロレンズ作製用金型の製造方法、及びマイクロレンズ作製用金型の製造装置 | |
JP4670249B2 (ja) | 加工装置、加工方法及びダイヤモンド工具 | |
JP2012030414A (ja) | 金型の製造方法及び金型の製造装置 | |
WO2006132126A1 (ja) | 光学素子の製造方法および光学素子 | |
JP2000052217A (ja) | 工具と加工方法 | |
JP2004344957A (ja) | レーザー複合加工機および精密加工製品の製造方法 | |
JP2005342805A (ja) | ラジアスエンドミル及びそれを用いた切削加工方法 | |
WO2022030475A1 (ja) | 再帰反射光学素子用金型の製造方法及び再帰反射光学素子の製造方法 | |
JP2009160714A (ja) | 金型の製造方法 | |
JP2009018381A (ja) | 表面加工機 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201080048581.6 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 10828187 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2011539328 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13503830 Country of ref document: US Ref document number: 2010828187 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |