WO2010150882A1 - 弾性表面波フィルタおよびそれを用いた分波器 - Google Patents
弾性表面波フィルタおよびそれを用いた分波器 Download PDFInfo
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- WO2010150882A1 WO2010150882A1 PCT/JP2010/060878 JP2010060878W WO2010150882A1 WO 2010150882 A1 WO2010150882 A1 WO 2010150882A1 JP 2010060878 W JP2010060878 W JP 2010060878W WO 2010150882 A1 WO2010150882 A1 WO 2010150882A1
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- reference potential
- bus bar
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- acoustic wave
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/0023—Balance-unbalance or balance-balance networks
- H03H9/0028—Balance-unbalance or balance-balance networks using surface acoustic wave devices
- H03H9/0033—Balance-unbalance or balance-balance networks using surface acoustic wave devices having one acoustic track only
- H03H9/0038—Balance-unbalance or balance-balance networks using surface acoustic wave devices having one acoustic track only the balanced terminals being on the same side of the track
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/0023—Balance-unbalance or balance-balance networks
- H03H9/0028—Balance-unbalance or balance-balance networks using surface acoustic wave devices
- H03H9/0033—Balance-unbalance or balance-balance networks using surface acoustic wave devices having one acoustic track only
- H03H9/0042—Balance-unbalance or balance-balance networks using surface acoustic wave devices having one acoustic track only the balanced terminals being on opposite sides of the track
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/6436—Coupled resonator filters having one acoustic track only
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/72—Networks using surface acoustic waves
- H03H9/725—Duplexers
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02913—Measures for shielding against electromagnetic fields
Definitions
- the present invention relates to a surface acoustic wave filter and a duplexer used for mobile communication devices and the like.
- SAW filters using surface acoustic waves are used in high-frequency circuits of communication terminals such as mobile phones.
- SAW filters are used for transmission filters, reception filters, duplexers, and the like.
- the SAW filter may be required to have an increased attenuation, a balanced-unbalanced conversion function, etc., and its circuit configuration tends to be complicated.
- a technique is known in which wirings are routed so that wirings of different potentials cross three-dimensionally (see, for example, FIG. 9 of Patent Document 1).
- the SAW element is easily affected by unnecessary external electromagnetic waves, and the electrical characteristics are likely to deteriorate.
- the inductor component due to the ground wiring tends to be large, which is also a factor causing deterioration of electrical characteristics.
- the present invention has been invented to solve the above-described problems, and provides a SAW filter and a duplexer having excellent electrical characteristics.
- Patent Document 1 Japanese Patent Application Laid-Open No. 2007-142491
- the SAW filter includes a piezoelectric substrate, a surface acoustic wave element having a first IDT electrode positioned on the piezoelectric substrate, and a first electrically connected to the first IDT electrode.
- 1 signal wiring, and an annular reference potential wiring having a first intersecting portion intersecting the first signal wiring via a first insulating member and surrounding the surface acoustic wave element, It is to be prepared.
- a SAW filter includes a piezoelectric substrate, a first IDT electrode disposed on the piezoelectric substrate, and having a first signal bus bar conductor and a first reference potential bus bar conductor;
- a surface acoustic wave device comprising: a second IDT electrode which is positioned alongside the first IDT electrode on the piezoelectric substrate and has a second signal bus bar conductor and a second reference potential bus bar conductor; , A first signal wiring electrically connected to the first signal bus bar conductor, a second signal wiring electrically connected to the second signal bus bar conductor, the first and second And an annular reference potential wiring that is connected to each of the two reference potential bus bar conductors and that surrounds the surface acoustic wave element.
- the duplexer in one embodiment of the present invention is a duplexer including a transmission filter and a reception filter, and at least one of the transmission filter and the reception filter is the above-described surface acoustic wave filter. It will be.
- the reference potential wiring is formed in an annular shape so as to surround the surface acoustic wave element, the surface acoustic wave element is not easily affected by unnecessary external electromagnetic waves.
- the inductor component of the reference potential wiring can be reduced. Therefore, a SAW filter having excellent electrical characteristics can be obtained.
- FIG. 1 It is a top view of the SAW filter concerning a 1st embodiment of the present invention. It is a principal part enlarged view of the SAW filter shown in FIG. It is a figure which shows the SAW filter of a comparative example, (a) is a top view, (b) is an equivalent circuit schematic. It is a figure for demonstrating the effect of the SAW filter shown in FIG. 1, (a) is a top view, (b) is an equivalent circuit schematic. It is a figure which shows the SAW filter of a comparative example, (a) is a top view, (b) is an equivalent circuit schematic. It is a figure for demonstrating the effect of the SAW filter shown in FIG. 1, (a) is a top view, (b) is an equivalent circuit schematic.
- FIG. 10 is a plan view showing a duplexer of Comparative Example 1.
- FIG. 6 is a diagram showing common mode isolation characteristics of the duplexers of Example 1 and Comparative Example 1. It is a figure which shows the common mode isolation characteristic of the duplexer of Example 2 and Comparative Example 2. It is a principal part enlarged view of the modification of the SAW filter shown in FIG.
- FIG. 1 is a plan view of a SAW filter 100 according to the first embodiment.
- the SAW filter 100 of this embodiment is used as a reception band filter of Band 1 (transmission band: 1920 to 1980 MHz, reception band: 2110 to 2170 MHz) of UMTS (Universal Mobile Telecommunications System) having a balance-unbalance conversion function. is there.
- Band 1 transmission band: 1920 to 1980 MHz, reception band: 2110 to 2170 MHz
- UMTS Universal Mobile Telecommunications System
- the SAW filter 100 includes a piezoelectric substrate 40, a SAW element 10 disposed on the piezoelectric substrate, and an annular reference formed so as to surround the SAW element 10. It has a potential wiring 9 and SAW resonators 11, 12, and 13.
- the piezoelectric substrate 40 may be, for example, a 36 ° ⁇ 3 ° Y-cut X-propagating lithium tantalate single crystal, a 42 ° ⁇ 3 ° Y-cut X-propagating lithium tantalate single crystal, or a 64 ° ⁇ 3 ° Y-cut X-propagating lithium niobate single crystal. Crystal, 41 ° ⁇ 3 ° Y-cut X-propagating lithium niobate single crystal, 45 ° ⁇ 3 ° X-cut Z-propagating lithium tetraborate single crystal. These single crystals are preferable as the piezoelectric substrate 40 because of their large electromechanical coupling coefficient and small SAW propagation loss.
- the SAW filter when the SAW filter is formed using the piezoelectric substrate 40 whose pyroelectricity is remarkably reduced by solid solution such as oxygen defects or Fe, the reliability becomes excellent.
- the thickness of the piezoelectric substrate 40 is, for example, 0.1 to 0.5 mm, and the shape is a rectangular parallelepiped.
- the main surface of the piezoelectric substrate 40 is provided with IDT (Inter Digital Transducer) electrodes, signal wirings, reference potential wirings, terminals, and the like. These IDT electrodes and the like are formed by patterning a metal film such as Al.
- the SAW element 10 is formed by the five IDT electrodes 1 to 5 and the two reflector electrodes 6 and 7 arranged on the main surface of the piezoelectric substrate 40.
- the IDT electrodes 1 to 5 are arranged side by side along the SAW propagation direction (up and down direction on the paper surface), and reflector electrodes 6 and 7 are arranged on both sides thereof.
- the SAW element 10 is a longitudinally coupled resonator type SAW filter element.
- IDTs 1, 4, and 5 are electrically connected to the unbalanced signal terminal 21.
- the IDT electrode 2 is electrically connected to the first balanced signal terminal 22, and the IDT electrode 3 is electrically connected to the second balanced signal terminal 23.
- the phase of the signal output from the first balanced signal terminal 22 is 180 ° with respect to the phase of the signal output from the second balanced signal terminal 23.
- IDT electrodes 1 to 5 are formed differently. That is, the SAW element 10 has a balanced-unbalanced conversion function.
- the first and second balanced signal terminals 22 and 23 may be input terminals, and the unbalanced signal terminal 21 may be an output terminal.
- FIG. 2 is an enlarged plan view of a portion including the SAW element 10 and its peripheral wiring.
- each of the IDT electrodes 1 to 5 has a plurality of electrode fingers extending in a direction orthogonal to the SAW propagation direction, and the plurality of electrode fingers are connected to the bus bar conductor.
- the number of electrode fingers of the IDT electrodes 1, 2, 3, 4, and 5 is, for example, 37, 42, 57, 42, and 37.
- the number of electrode fingers of the reflector electrodes 6 and 7 is, for example, 100.
- the crossing width of the IDT electrodes 1 to 5 is, for example, 80 ⁇ m, and the electrode film thickness is, for example, 1600 mm.
- bus bar conductors There are two types of bus bar conductors connected to the electrode fingers of the IDT electrode, one is a signal bus bar conductor (1 s to 5 s), and the other is a reference potential bus bar conductor (1 g to 5 g).
- An annular reference potential wiring 9 is formed on the piezoelectric substrate 40 so as to surround the SAW element 10 including the IDT electrodes 1 to 5 and the reflector electrodes 6 and 7.
- the “annular” here includes not only a circular shape but also a polygonal shape having corners as shown in FIG.
- the reference potential wiring 9 is connected to the ground terminal 24 as shown in FIG. 1 and is held at the ground potential when the SAW filter 100 is used.
- One or more ground terminals may be connected to the reference potential wiring 9 as shown in FIG. Note that the ground potential is not necessarily zero volts (0 V).
- the signal bus bar conductor 1 s of the IDT electrode 1 is connected to the signal wiring 31.
- the reference potential bus bar conductor 1 g of the IDT electrode 1 is connected to the reference potential wiring 9.
- the signal wiring 31 connected to the signal bus bar conductor 1s is a first insulating member 41a made of SiO 2 or the like (hereinafter, simply referred to as the insulating member 41 without distinguishing the first to fifth insulating members). And three-dimensionally intersect with the annular reference potential wiring 9.
- the signal wiring 31 is disposed below the first insulating member 41a, and the reference potential wiring 9 is disposed above the first insulating member 41a.
- the signal wiring 31 passing under the first insulating member 41a is indicated by a broken line. That is, a portion where the portion of the signal wiring 31 indicated by a broken line and the reference potential wiring 9 intersect with each other is an intersection portion 43.
- the signal wiring 31 and the reference potential wiring 9 may have an upside down positional relationship at the intersection 43. That is, the reference potential wiring 9 may be disposed below the first insulating member 41a and the signal wiring 31 may be disposed above the first insulating member 41a at the intersection.
- the vertical positional relationship between the reference potential wiring 9 and the signal wiring at the intersection is preferably the same in all the intersections 43 to 47. For example, as shown in FIG. 2, when the signal wiring 31 is disposed below the first insulating member 41 a and the reference potential wiring 9 is disposed above the first insulating member 41 a at the intersection 43.
- the signal wiring is disposed under the insulating member and the reference potential wiring 9 is disposed on the insulating member 41.
- the reference potential wiring 9 is formed so as to surround the entire SAW element 10 as shown in FIGS. 1 and 2, the influence of external electromagnetic noise on the SAW element 10 is affected by the reference potential wiring 9. Is reduced by the electromagnetic shielding effect. As a result, a SAW filter having stable electrical characteristics can be obtained. Even when heat is transmitted to the SAW element 10, since the heat is efficiently radiated by the reference potential wiring 9, fluctuations in filter characteristics due to heat can be suppressed. Furthermore, by improving the heat dissipation, the power durability of the SAW element 10 can be improved, and damage to the electrode fingers can be suppressed.
- the longitudinally coupled multimode surface acoustic wave filter which is often used as a receiving band filter of a duplexer, has a problem that the voltage resistance is low and the electrode fingers are easily damaged. If the SAW filter 100 of the present embodiment is used as a surface acoustic wave filter, the electrode finger can be prevented from being damaged, and a duplexer with high electrical property reliability can be obtained.
- the signal bus bar conductor 2 s of the IDT electrode 2 is connected to the signal wiring 32. Similar to the signal wiring 31, the signal wiring 32 three-dimensionally intersects with the reference potential wiring 9 through the second insulating member 41 b. That is, a portion where the reference potential wiring 9 intersects with the signal wiring 32 is an intersection 44. On the other hand, the reference potential bus bar conductor 2 g of the IDT electrode 2 is connected to the reference potential wiring 9.
- the reference potential bus bar conductors 1g, 2g of the IDT electrode 1 and the IDT electrode 2 are connected to the annular reference potential wiring 9 surrounding the IDT electrode 1 and the IDT electrode 2, respectively.
- the entire inductor up to the ground terminal 24 can be reduced, and the attenuation characteristics of the SAW filter 100 can be improved.
- FIG. 3 is a SAW filter 101 as a comparative example in which the reference potential wiring to which the IDT electrode reference potential bus bar conductor is connected is not circular, (a) is a schematic plan view of the SAW filter 101, (b) ) Is an equivalent circuit diagram of the SAW filter 101.
- FIG. 4 shows the SAW filter 102 in which the reference potential wiring to which the reference potential bus bar conductor of the IDT electrode is connected is annular, (a) is a schematic plan view of the SAW filter 102, and (b) is 3 is an equivalent circuit diagram of the SAW filter 102.
- FIGS. 3 and 4 show an unbalanced-unbalanced SAW filter composed of two IDT electrodes.
- an inductor L1 and an inductor L2 exist from each of the IDT electrodes 1 and 2 to the ground terminal 24 via the reference electric wiring 9.
- the inductor L1 is an inductor by the reference potential wiring 9 from the reference potential bus bar conductor 1g of the IDT electrode 1 to the ground terminal 24, and the inductor L2 is from the reference potential bus bar conductor 2g of the IDT electrode 2 to the ground terminal. This is an inductor with reference potential wiring 9 up to 24.
- the inductor L1 'and the inductor L2' are added in parallel to the above-described inductors L1 and L2, respectively (see FIG. 4B).
- the inductor L1 ′ is an inductor by the reference potential wiring 9 from the reference potential bus bar conductor 1g of the IDT electrode 1 to the ground terminal 24 through the reference potential wiring 9 counterclockwise
- the inductor L2 ′ is IDT.
- This is an inductor formed by the reference potential wiring 9 extending from the reference potential bus bar conductor 2g of the electrode 2 clockwise to the ground terminal 24 through the reference potential wiring 9. Since the reference potential wiring 9 is annular, these inductors L 1 ′ and L 2 ′ are added in parallel to the existing inductors L 1 and L 2, so that the entire inductor is more SAW than the SAW filter 101.
- the filter 102 is smaller.
- the inductor to the ground terminal 24 when the inductor to the ground terminal 24 is reduced, the voltage induced by the inductor is reduced, so that the backflow of current (hereinafter also referred to as ground current) generated in the reference potential wiring 9 is reduced.
- ground current the backflow of current generated in the reference potential wiring 9
- the backflow of the ground current is thus reduced, the attenuation outside the passband can be increased, and the SAW filter having excellent electrical characteristics can be obtained.
- the inductor between the IDT electrode 1 and the IDT electrode 2 is also small, an unnecessary ground current generated based on this inductor can be suppressed, and this also increases the attenuation outside the passband. Can do.
- the signal bus bar conductor 3 s of the IDT electrode 3 is connected to the signal wiring 33.
- the signal wiring 33 intersects the reference potential wiring 9 and the third insulating member 41c in three dimensions. A portion where the reference potential wiring 9 intersects with the signal wiring 33 is an intersection 45.
- the reference potential bus bar conductor 3 g of the IDT electrode 3 is connected to the reference potential wiring 9.
- the IDT electrodes 1 to 3 and the bus bar conductors of the respective IDT electrodes are arranged so as to satisfy a predetermined condition.
- the IDT electrode 1 is first disposed between the IDT electrode 2 and the IDT electrode 3. That is, among the IDT electrodes 1 to 3, the IDT electrode 1 is disposed in the center, the IDT electrode 2 is disposed on one side, and the IDT electrode 3 is disposed on the other side. Further, when the inside of the frame of the reference potential wiring 9 is divided into two along the AA line parallel to the SAW propagation direction, the signal bus bar conductor 1s of the IDT electrode 1 is provided in one region (first region T1).
- the reference potential bus bar conductor 2g of the IDT electrode 2 and the reference potential bus bar conductor 3g of the IDT electrode 3 are located, and the reference potential bus bar conductor 1g of the IDT electrode 1 and the IDT are disposed in the other region (second region T2).
- the IDT electrodes 1 to 3 are arranged so that the signal bus bar conductor 2s of the electrode 2 and the signal bus bar conductor 3s of the IDT electrode 3 are located.
- FIG. 5 is a schematic plan view of a SAW filter 103 as a comparative example in which the reference potential wiring to which the reference potential bus bar conductor of the IDT electrode is connected is not circular.
- FIG. 6 is a schematic plan view of the SAW filter 104 in which the reference potential wiring to which the reference potential bus bar conductor of the IDT electrode is connected is annular.
- the SAW filter 103 and the SAW filter 104 have the same conditions except for the reference potential wiring.
- FIGS. 5 and 6 show an unbalanced-unbalanced SAW filter composed of three IDT electrodes.
- the length of the reference potential wiring 9 from the reference potential bus bar conductor 1g of the IDT electrode 1 to the reference potential bus bar conductor 2g of the IDT electrode 2 along the reference potential wiring 9 is equivalent to d shown in the figure. There are differences. In this case, when a signal flows through the SAW filter 103, an inductor component based on the wiring length difference d is generated, and the potential when the reference potential bus bar conductor 2g is viewed from the reference potential bus bar conductor 1g and the reference potential.
- the reference potential wiring 9 to which the reference potential bus bar conductor is connected is formed in a loop shape, both clockwise and counterclockwise from the reference potential bus bar conductor 1g.
- the potential difference based on the difference d is canceled out, and generation of unnecessary ground current can be suppressed.
- the generation of noise in the reference potential wiring 9 can be suppressed, the attenuation amount outside the band can be increased, and a SAW filter having excellent electrical characteristics can be obtained.
- the SAW filter 100 of this embodiment further includes an IDT electrode 4 and an IDT electrode 5.
- the signal bus bar conductor 4 s of the IDT electrode 4 is connected to the signal wiring 34.
- This signal wiring 34 intersects with the reference potential wiring 9 in three dimensions via the fourth insulating member 41d.
- the reference potential bus bar conductor 4 g of the IDT electrode 4 is connected to the reference potential wiring 9.
- the signal bus bar conductor 5 s of the IDT electrode 5 is connected to the signal wiring 35.
- the signal wiring 35 intersects with the reference potential wiring 9 three-dimensionally via the fifth insulating member 41e.
- the reference potential bus bar conductor 5 g of the IDT electrode 5 is connected to the reference potential wiring 9.
- the reflector electrodes 6 and 7 have one bus bar conductor connected to the reference potential wiring 9.
- the signal wirings 31, 34, 35 connected to the signal bus bar conductors 1 s, 4 s, 5 s of the IDT electrodes 1, 4, 5 are connected to the unbalanced signal terminal 21 via the SAW resonator 11.
- impedance matching can be adjusted, the electrostatic withstand voltage of the SAW element 10 can be improved, or the attenuation outside the passband can be improved by forming an attenuation pole.
- the signal wiring 32 connected to the signal bus bar conductor 2s of the IDT electrode 2 is connected to the balanced signal terminal 22 via the SAW resonator 12, and is connected to the signal bus bar conductor 3s of the IDT electrode 3. 33 is connected to the balanced signal terminal 23 via the SAW resonator 13.
- the SAW resonators 12 and 13 are also used for adjusting impedance matching, improving the electrostatic withstand voltage of the SAW element 10 or improving the attenuation outside the passband by forming an attenuation pole, like the SAW resonator 11. .
- FIG. 16 shows a modified example of the SAW filter 100 of the first embodiment, and is an enlarged plan view of a part including the SAW 10 and its peripheral wiring.
- the SAW filter 100 of this modification is obtained by changing the position of the insulating member 41 for forming a three-dimensional intersection. Specifically, the insulating member 41 is disposed so as to overlap the bus bar conductor connected to the wiring passing under the insulating member 41. For example, paying attention to the IDT electrode 1, a part of the first insulating member 41a for three-dimensionally crossing the signal wiring 31 connected to the signal bus bar conductor 1s of the IDT electrode 1 and the reference potential wiring 9 is a signal. It is laminated on the bus bar conductor 1s. By disposing the insulating member 41 in this way, the reference potential wiring 9 can be brought close to the IDT electrode. Thereby, the dead space formed between the reference potential wiring 9 and the IDT electrode can be reduced, and the SAW filter 100 can be downsized. In addition, you may apply this modification to the SAW filter of other embodiment described below.
- FIG. 7 is a plan view of a SAW filter 200 according to the second embodiment.
- the reference potential wiring 9 has an annular shape via the reflector electrode 6.
- the reflector electrode 6 is inserted into a part of the reference potential wiring 9.
- the reflector electrode 6 has two reference potential bus bar conductors 6g, and a reference potential wiring 9 is connected to each reference potential bus bar conductor 6g. Further, the electrode fingers disposed between the two reference potential bus bar conductors 6g are connected to the respective reference potential bus bar conductors 6g at both ends.
- the reference potential wiring 9 By making the reference potential wiring 9 annular through the reflector electrode 6 in this way, it is not necessary to make the reference potential wiring 9 wrap around to the outside of the reflector electrode 6, so that the SAW filter 200 is reduced in size accordingly. be able to.
- FIG. 7 only one reflector electrode 6 is inserted into the reference potential wiring 9.
- the other reflector electrode 7 may be inserted into the reference potential wiring 9. That is, the reference potential wiring 9 may be annular via the reflector electrode 6 and the reflector electrode 7. Thereby, the SAW filter 200 can be further downsized.
- the reference potential bus bar conductors of the IDT electrodes 2 and 3 and the IDT electrodes 1 and 4 are compared with the case where the reference potential wiring 9 goes around the outside of the reflector electrode 6. , 5 through the reference potential wiring 9 between the reference potential bus bar conductors and the inductor therebetween is reduced. Therefore, an unnecessary ground current generated based on the inductor in the meantime can be suppressed, and this also has the advantage that the amount of attenuation outside the passband can be increased.
- FIG. 8 is a plan view of a SAW filter 300 according to the third embodiment.
- a branch wiring 39 is formed in the SAW filter 300.
- the branch wiring 39 has one end connected to the reference potential wiring 9 and the other end connected to the ground terminal 25.
- the branch wiring 39 is arranged between the signal wiring 32 and the signal wiring 33.
- the branch wiring 39 By providing such a branch wiring 39, the current flowing through the reference potential wiring 9 is shunted, so that the amount of current flowing through the reference potential wiring 9 is reduced accordingly. As a result, since the voltage induced by the inductance of the reference potential wiring 9 becomes small, the backflow of the ground current can be suppressed and the out-of-band attenuation can be greatly improved. Further, the branch wiring 39 is arranged between the signal wiring 32 connected to the output terminal and the signal wiring 33 connected to the output terminal, so that the output signal flowing through the signal line 32 and the signal line 33 can be reduced. Most of the return path of the ground current with respect to the current is the branch wiring 39 in the vicinity of the signal line 32 and the signal line 33.
- FIG. 9 is a plan view of a SAW filter 400 according to the fourth embodiment.
- the SAW filter 400 includes a SAW element 10 ′.
- the SAW element 10 ' is composed of two IDT electrodes 1 and 2 and two reflector electrodes 6 and 7 disposed on both sides thereof.
- the IDT electrode 1 has a signal bus bar conductor 1s and a reference potential bus bar conductor 1g.
- the signal bus bar conductor 1s is connected to the signal wiring 31, and the reference potential bus bar conductor 1g is connected to the reference potential wiring 9.
- the IDT electrode 2 has a signal bus bar conductor 2s and a reference potential bus bar conductor 2g.
- the signal bus bar conductor 2s is connected to the signal wiring 32, and the reference potential bus bar conductor 2g is connected to the reference potential wiring 9.
- the reference potential wiring 9 has an annular shape so as to surround the SAW element 10 '.
- the SAW filter 400 is an unbalanced-unbalanced SAW filter and has an unbalanced signal terminal 21 and an unbalanced signal terminal 21 '.
- the unbalanced signal terminals 21 and 21 ′ are disposed within the frame of the reference potential wiring 9. Accordingly, the SAW filter 400 has a structure that does not have a three-dimensional wiring unlike the SAW filter 100.
- the SAW filter 400 can suppress the entire inductor to be small for the same reason as described with reference to FIGS. 3 and 4, the SAW filter 400 is a SAW filter having a large attenuation outside the passband and having excellent electrical characteristics.
- FIG. 10 is a plan view of a SAW filter 500 according to the fifth embodiment.
- the SAW filter 500 has a structure in which the reference potential bus bar conductor of one IDT electrode and the reference potential bus bar conductor of the other IDT electrode are connected via electrode fingers (in the drawing). , Circled dotted line).
- the electrode fingers connected to the reference potential bus bar conductor 1 g of the IDT electrode 1 are also connected to the reference potential bus bar conductor 3 g of the IDT electrode 3.
- FIG. 11A is a plan view of the SAW filter 105 when the SAW filter 500 is simplified as in FIG. 4, and FIG. 11B is an equivalent circuit diagram of the SAW filter 105.
- the SAW filter 105 is formed by connecting the reference potential bus bar conductor 1g of the IDT electrode 1 and the reference potential bus bar conductor 2g of the IDT electrode 2 via electrode fingers.
- the inductor L3 is added in parallel to the inductors L1, L1 ′, L2 and L2 ′ as shown in FIG. 11B by the electrode fingers connecting the reference potential bus bar conductors 1g and 2g.
- FIG. 12 is a plan view of a duplexer 600 using the SAW filter 100.
- the SAW filter 100 functions as a reception band filter.
- the unbalanced signal terminal 21 functions as an antenna terminal
- the balanced signal terminals 22 and 23 function as reception terminals.
- the duplexer 600 also includes a filter 105 that functions as a transmission band filter.
- the filter 105 is a ladder-type SAW filter, and includes parallel arm resonators 14 and 15 and series arm resonators 16, 17, and 18.
- the parallel arm resonator 14 is connected to the ground terminal 25, and the parallel arm resonator 15 is connected to the ground terminal 26.
- the series arm resonator 16 is connected to a transmission terminal 27, and the series arm resonator 18 is connected to an unbalanced signal terminal 21 that is an antenna terminal.
- the reception band filter of the duplexer 600 is configured using the SAW filter 100, the attenuation amount outside the pass band of the signal output from each of the balanced signal terminals 22 and 23 can be increased.
- a duplexer excellent in the common mode isolation characteristics of the transmission band required for the duplexer 600 can be obtained. Note that common mode isolation is an index representing the degree of separation between the transmission band filter and the reception band filter, and how much the unbalanced signal at the transmission terminal (unbalanced signal terminal) is unbalanced from the reception terminal (balanced signal terminal). It shows whether it is leaking as a signal.
- Example 1 Next, a first embodiment of the duplexer according to the present invention will be described.
- the common mode isolation characteristics of the duplexer 600 according to the first embodiment having the structure shown in FIG. 12 and the duplexer 900 according to the first comparative example having the structure shown in FIG. 13 were calculated by simulation.
- the duplexer 900 of the comparative example 1 is different from the duplexer 600 of the first embodiment in the shape of the reference potential wiring 9. Specifically, the portion of the reference potential wiring 9 that wraps around the outside of the reflector electrode 6 in the duplexer 600 of the first embodiment is formed outside the reflector electrode 6 in the duplexer 600 of the first comparative example. Without going around, one end is connected to the bus bar conductor of the reflector electrode 6 and the other end is connected to the reference potential bus bar conductor of the IDT electrode 2.
- the configuration other than the reference potential wiring 9 is the same as that of the duplexer 600 of the first embodiment.
- FIG. 14 is a diagram showing simulation results of common mode isolation characteristics for Example 1 and Comparative Example 1.
- the common mode isolation characteristic of the duplexer according to the first embodiment is indicated by a solid line
- the common mode isolation characteristic of the duplexer according to the comparative example 1 is indicated by a broken line.
- the duplexer of the first embodiment is improved by about 5 dB in the common mode isolation characteristic in the pass band (1920 MHz to 1980 MHz) as compared with the duplexer of the first comparative example.
- the duplexer of the second embodiment is obtained by replacing the SAW filter 100 in the duplexer 600 shown in FIG. 12 with the SAW filter 500 shown in FIG. A duplexer of Example 2 having such an electrode structure was produced, and common mode isolation characteristics were measured.
- the SAW filter 500 used in the duplexer of the second embodiment has the following specifications.
- the piezoelectric substrate 40 was made of 42 ° Y-cut X-propagating LiTaO 3 .
- the IDT electrodes 1 to 5 and the reflector electrodes 6 and 7 were formed by stacking a layer made of an Al—Cu alloy on a layer made of Ti.
- Example 2 For comparison with Example 2, a duplexer 600 of Example 1 shown in FIG. 12 was produced.
- the SAW filter 100 of the duplexer of Example 1 was also produced based on the above specifications.
- FIG. 15 shows the results of measuring the common mode isolation characteristics of the duplexer of Example 2 and the duplexer of Example 1. The measurement was performed using a network analyzer.
- the result of the duplexer of the second embodiment is indicated by a solid line
- the result of the duplexer of the first embodiment is indicated by a broken line.
- the duplexer of the second embodiment has about 1 dB better common mode isolation characteristics in the passband (1920 MHz to 1980 MHz) than the duplexer of the first embodiment.
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Abstract
Description
(第1の実施形態)
図1は第1の実施形態にかかるSAWフィルタ100の平面図である。本実施形態のSAWフィルタ100は、平衡-不平衡変換機能を有するUMTS(Universal Mobile Telecommunications System)のBand1(送信帯域:1920~1980MHz、受信帯域:2110~2170MHz)の受信帯域フィルタとして用いられるものである。
図7は第2の実施形態にかかるSAWフィルタ200の平面図である。SAWフィルタ200は、基準電位配線9が反射器電極6を介して環状となっている。換言すれば、基準電位配線9の一部に反射器電極6が挿入されている。反射器電極6は、基準電位用バスバー導体6gを2個有し、それぞれの基準電位用バスバー導体6gに基準電位配線9が接続されている。また、2個の基準電位用バスバー導体6gの間に配置された電極指は、その両端が各基準電位用バスバー導体6gに接続されている。
図8は第3の実施形態にかかるSAWフィルタ300の平面図である。SAWフィルタ300には、分岐配線39が形成されている。分岐配線39は、一端が基準電位配線9と接続され、他端がグランド端子25と接続されている。また分岐配線39は、信号配線32と信号配線33の間に配置されている。
図9は第4の実施形態にかかるSAWフィルタ400の平面図である。SAWフィルタ400は、SAW素子10’を備えている。SAW素子10’は、2個のIDT電極1,2とその両側に配置された2個の反射器電極6,7から成る。
図10は第5の実施形態にかかるSAWフィルタ500の平面図である。SAWフィルタ500は、隣接するIDT電極において、一方のIDT電極の基準電位用バスバー導体と他方のIDT電極の基準電位用バスバー導体とが電極指を介して接続された構造となっている(図中、点線の丸で囲った部分)。例えば、IDT電極1とIDT電極3に着目すると、IDT電極1の基準電位用バスバー導体1gに接続されている電極指がIDT電極3の基準電位用バスバー導体3gにも接続されている。
上述した実施形態にかかるSAWフィルタは、分波器を構成するのに好適に用いられる。図12は、SAWフィルタ100を用いた分波器600の平面図である。分波器600において、SAWフィルタ100は受信帯域フィルタとして機能するものである。この場合、不平衡信号端子21がアンテナ端子として機能し、平衡信号端子22,23が受信端子として機能する。
次に、本発明にかかる分波器の実施例1について説明する。図12で示した構造からなる実施例1の分波器600と図13に示す構造からなる比較例1の分波器900について、コモンモードアイソレーション特性をシミュレーションにより計算した。
次に実施例2の分波器について説明する。実施例2の分波器は、図12に示した分波器600におけるSAWフィルタ100を図10に示したSAWフィルタ500で置き換えたものである。このような電極構造からなる実施例2の分波器を作製し、コモンモードアイソレーション特性を測定した。
・電極指の交差幅:80μm
・IDT電極1の電極指本数:30本
・IDT電極2の電極指本数:44本
・IDT電極3の電極指本数:64本
・IDT電極4の電極指本数:42本
・IDT電極5の電極指本数:30本
・反射器電極6,7の電極指本数:50本
・電極膜厚:1600Å
・Duty:0.55
なお圧電基板40の材料には、42°YカットX伝搬LiTaO3を用いた。またIDT電極1~5および反射器電極6,7は、Tiからなる層の上にAl-Cu合金からなる層を重ねることにより形成した。
6,7・・・反射器電極
9・・・・・基準電位配線
10・・・・SAW素子
40・・・・圧電基板
Claims (11)
- 圧電基板と、
前記圧電基板上に位置している第1のIDT電極を有する弾性表面波素子と、
前記第1のIDT電極と電気的に接続された第1の信号配線と、
前記第1の信号配線と第1の絶縁部材を介して交差する第1の交差部を有し、且つ前記弾性表面波素子を囲っている環状の基準電位配線と、
を備える弾性表面波フィルタ。 - 第2の信号配線をさらに備え、
前記弾性表面波素子は、該弾性表面波素子の弾性表面波伝搬方向に沿うように前記第1のIDT電極と並んで位置し、前記第2の信号配線と電気的に接続された第2のIDT電極をさらに有し、
前記基準電位配線は、前記第2の信号配線と第2の絶縁部材を介して交差する第2の交差部をさらに有し、
前記第1のIDT電極は、前記第1の信号配線と接続された第1の信号用バスバー導体および前記基準電位配線と電気的に接続された第1の基準電位用バスバー導体を有し、
前記第2のIDT電極は、前記第2の信号配線と接続された第2の信号用バスバー導体および前記基準電位配線と電気的に接続された第2の基準電位用バスバー導体を有する請求項1に記載の弾性表面波フィルタ。 - 第3の信号配線をさらに備え、
前記弾性表面波素子は、前記弾性表面波伝搬方向に沿って位置し、前記第3の信号配線と電気的に接続された第3のIDT電極をさらに有し、
前記基準電位配線は、前記第3の信号配線と第3の絶縁部材を介して交差する第3の交差部をさらに有し、
前記第3のIDT電極は、前記第3の信号配線と接続された第3の信号用バスバー導体および前記基準電位配線と電気的に接続された第3の基準電位用バスバー導体を有し、
前記第1のIDT電極は、前記第2のIDT電極と前記第3のIDT電極との間に配置され、
前記弾性表面波伝搬方向に沿って、前記基準電位配線の環内を第1の領域と第2の領域とに2分割したときに、
前記第1の信号用バスバー導体、前記第2の基準電位用バスバー導体および前記第3の基準電位用バスバー導体は、前記第1の領域に位置し、
前記第1の基準電位用バスバー導体、前記第2の信号用バスバー導体および前記第3の信号用バスバー導体は、前記第2の領域に位置している、請求項2に記載の弾性表面波フィルタ。 - 前記弾性表面波素子は第1の反射器電極および第2の反射器電極をさらに有し、前記第1および第2の反射器電極は両者間に前記第1、第2および第3のIDT電極を前記弾性表面波伝搬方向に沿うように挟んでおり、
前記基準電位配線は、その環状の一部が前記第1および第2の反射器電極のうち少なくとも一方によって構成されている請求項3に記載の弾性表面波フィルタ。 - 前記第1の信号配線と電気的に接続された不平衡信号端子と、
前記第2の信号配線と電気的に接続された第1の平衡信号端子と、
前記第3の信号配線と電気的に接続された第2の平衡信号端子と、をさらに備える請求項3に記載の弾性表面波フィルタ。 - 前記第2の信号配線と前記第3の信号配線との間に位置し、且つ前記基準電位配線と接続された分岐配線をさらに備える請求項5に記載の弾性表面波フィルタ。
- 前記第1のIDT電極は、前記第1の基準電位用バスバー導体に接続された複数の電極指をさらに有し、前記複数の電極指のうち前記第2のIDT電極側の端部に位置している電極指が、前記第2の基準電位用バスバー導体に接続されている請求項2に記載の弾性表面波フィルタ。
- 前記第1のIDT電極は、前記第1の信号配線と接続された第1の信号用バスバー導体を有し、
前記第1の絶縁部材の一部が前記第1の信号用バスバー導体に積層されている請求項1に記載の弾性表面波フィルタ。 - 圧電基板と、
前記圧電基板上に位置し、且つ第1の信号用バスバー導体および第1の基準電位用バスバー導体を有する第1のIDT電極と、前記圧電基板上に前記第1のIDT電極と並んで位置し、且つ第2の信号用バスバー導体および第2の基準電位用バスバー導体を有する第2のIDT電極と、を有する弾性表面波素子と、
前記第1の信号用バスバー導体と電気的に接続された第1の信号配線と、
前記第2の信号用バスバー導体と電気的に接続された第2の信号配線と、
前記第1および第2の基準電位用バスバー導体のそれぞれと接続され、且つ前記弾性表面波素子を囲っている環状の基準電位配線と、を備える弾性表面波フィルタ。 - 前記基準電位配線は、単一材料からなる請求項1乃至9のいずれか1項に記載の弾性表面波フィルタ。
- 送信用フィルタおよび受信用フィルタを備えた分波器であって、
前記送信用フィルタおよび受信用フィルタのうち少なくとも一方が、請求項1乃至10のいずれか1項に記載の弾性表面波フィルタを有する分波器。
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JPWO2010150882A1 (ja) | 2012-12-10 |
US20120098618A1 (en) | 2012-04-26 |
JP5100890B2 (ja) | 2012-12-19 |
CN102804600A (zh) | 2012-11-28 |
CN102804600B (zh) | 2015-09-02 |
US9041487B2 (en) | 2015-05-26 |
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