WO2010058689A1 - 非接触搬送装置 - Google Patents

非接触搬送装置 Download PDF

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Publication number
WO2010058689A1
WO2010058689A1 PCT/JP2009/068577 JP2009068577W WO2010058689A1 WO 2010058689 A1 WO2010058689 A1 WO 2010058689A1 JP 2009068577 W JP2009068577 W JP 2009068577W WO 2010058689 A1 WO2010058689 A1 WO 2010058689A1
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WO
WIPO (PCT)
Prior art keywords
conveyance
fluid
conveying
contact
conveyed
Prior art date
Application number
PCT/JP2009/068577
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
秀夫 小澤
耕一 角田
貴裕 安田
Original Assignee
オイレス工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オイレス工業株式会社 filed Critical オイレス工業株式会社
Priority to JP2010539196A priority Critical patent/JP5406852B2/ja
Priority to CN200980145863.5A priority patent/CN102239093B/zh
Priority to KR1020117008478A priority patent/KR101663257B1/ko
Publication of WO2010058689A1 publication Critical patent/WO2010058689A1/ja

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention relates to a non-contact conveyance device, and more particularly to a device used for floating conveyance of a large FPD panel, a solar cell panel, or the like.
  • an air levitation transport device As an example of an air levitation transport device, a plurality of small-diameter holes are provided to float glass for liquid crystal, and a plurality of plate-like rails through which air is ejected from these small-diameter holes are matched to the size of the glass. It is practiced to form a transport device by connecting them together. There is also a method in which porous carbon is used as a rail material and air is ejected from the pores.
  • the air flow rate per 1000 ⁇ 1000 mm area requires 250 L / min for the multi-hole type and 150 L / min for the carbon porous type, and a very large air flow rate is required.
  • the conventional non-contact transfer device maintains the accuracy of the flying height using the balance principle of vacuum suction and air jet force, but at that time, it is necessary to always operate the pump for vacuum suction. There is also a problem of consuming a great deal of energy.
  • the present applicant has proposed a non-contact conveyance device using a swirling flow in order to reduce the air flow rate and energy consumption while maintaining high flying height accuracy.
  • the non-contact transfer device includes a through hole 61 having a circular cross section penetrating from the front surface to the back surface, a fluid jet port 62 for generating a swirling flow by jetting air into the through hole 61, A swirling flow forming body 64 having an annular air supply groove 63 for supplying air to the fluid ejection port 62 is provided. Then, the above-described swirl flow forming body 64 is arranged on the surface of a base body (conveying rail) 66 provided with an air supply path 65 for supplying air to the air supply groove 63 to constitute a conveying device.
  • the object to be transferred (glass) 67 is levitated by generating an upward swirl flow upward on the surface side of the swirl flow forming body 64, and thereby about 1/2 of the conventional one. Enables conveyance at an air flow rate. On the other hand, an air flow downward due to negative pressure is generated in the vicinity of the opening of the through hole 61, and the same effect as vacuum suction for maintaining the flying height accuracy is exhibited. This eliminates the need for a vacuum suction pump and reduces energy consumption.
  • a plurality of transport rails 66 provided with a large number of swirl flow forming bodies 64 are provided on the surface. It arrange
  • the transport rail 66 is added in the transport direction of the transported object 67 to increase the distance. In this case, as shown in FIG.
  • the transported object 67 cannot get over the joint of the transport rail 66 and is caught in the middle, resulting in a transport failure. There is a possibility that the transported object 67 may be damaged.
  • each of the step 71 and the gap 72 generated at the joint between the rails is within an allowable value (for example, glass of 1000 ⁇ 1000 ⁇ 0.7 (thickness) mm and the flying height is 300 ⁇ m.
  • an allowable value for example, glass of 1000 ⁇ 1000 ⁇ 0.7 (thickness) mm and the flying height is 300 ⁇ m.
  • the step 71 is within 100 ⁇ m and the gap 72 is within 30 mm.
  • the manufacturing cost of the transport device may increase, and depending on the conditions of the installation location, regardless of the processing accuracy of the transport rail 66, In some cases, the level difference of the seam cannot be within the allowable value.
  • the position of the joint is shifted between the transport rails 66a to 66c arranged in parallel, and the transported object 67 is positioned at the joint of the transport rails 66a and 66c on both sides.
  • the transport rail 66 may not be arranged in such a manner due to restrictions on the installation location and the divisional design of the large-sized device. It can not be said.
  • the present invention has been made in view of the above-described problems, and the object to be conveyed is a conveyance rail while avoiding an increase in manufacturing cost and operation cost or being restricted by the installation location of the apparatus. It is an object of the present invention to provide a non-contact conveyance device capable of preventing a conveyance failure caused by being caught at the joint of the sheet, and damage to a conveyed object.
  • the present invention provides a non-contact conveyance device that arranges a plurality of conveyance rails along a conveyance direction of a conveyance object and conveys the conveyance object while floating on the plurality of conveyance rails.
  • a first fluid ejecting means that is provided on a conveying surface other than an end of the conveying rail and causes the ascending swirling flow to float the object to be conveyed; and a conveying surface at an end of the conveying rail.
  • the second fluid ejecting means is provided at the end of the transport rail, the end of the transported object that is transported on the transport rail approaches the joint between the transport rails.
  • the end of the conveyed product can be lifted, and the conveyed product can easily get over the step or gap of the joint between the conveying rails. For this reason, it is possible to relax the allowable values of the seam level difference and gap when installing the conveyance rail, and to avoid increasing the manufacturing cost of the non-contact conveyance device or being restricted by the installation location of the device. Is possible.
  • the amount of air from the pump is not increased to increase the floating amount of the entire transported object, but by applying a floating force only to the part located at the joint of the transport rail to improve overcoming between the transport rails. It is not necessary to increase the operating cost, and the operating cost is not increased.
  • the second fluid ejecting means may be an elongated slot in a top view that ejects fluid upward from the conveying surface of the conveying rail at the end of the conveying rail. it can. According to this, since the fluid supplied to the second fluid ejecting means can be ejected while being compressed, a sufficient levitation force can be applied to the end of the object to be conveyed, and the end of the object to be conveyed It becomes possible to float the part appropriately.
  • the second fluid ejecting means can be disposed so as to cross obliquely with respect to the end surface of the transferred object. According to this, when the fluid from the second fluid ejecting means is sprayed on the end of the object to be transported, it is possible to suppress the generation of a vortex flow above the object to be transported. It is possible to suppress vibrations up and down.
  • an angle formed between the second fluid ejection unit and the end surface of the object to be conveyed can be 10 ° or less. By setting the angle to 10 ° or more, the generated vortex airflow becomes weak and it is possible to suppress the object to be vibrated.
  • an angle formed between the second fluid ejecting means and the end surface of the object to be conveyed can be 10 ° or more and 45 ° or less.
  • the angle is 10 ° or more, as described above, the vibration of the conveyed object can be suppressed, and this effect continues until the angle becomes close to 90 °.
  • the larger this angle is, the larger the amount of protrusion in the longitudinal direction becomes, so that there is a disadvantage that a space for arrangement and mounting is required.
  • the angle formed between the second fluid ejecting means and the end face of the conveyed object is suppressed to 45 ° or less.
  • the first fluid ejection means includes a fluid ejection port on the back surface of a ring-shaped member having a circular cross-sectional through hole penetrating from the front surface to the back surface, and the fluid is ejected from the fluid ejection port.
  • a swirling flow is generated on the surface side of the ring-shaped member in a direction away from the surface, and a fluid flow in the direction of the back surface in the vicinity of the opening of the through hole on the surface side of the ring-shaped member.
  • the fluid is ejected from the fluid ejection port, the fluid flow and the swirling flow in the direction away from the surface are generated on the surface side of the ring-shaped member, and the object to be conveyed is levitated. It is possible to carry at a low fluid flow rate of about 100 L / min, about / 2.
  • a fluid flow in the direction of the back surface is generated in the vicinity of the opening of the through hole on the ring-shaped member surface side, which is equivalent to vacuum suction for maintaining the flying height accuracy.
  • a vacuum suction pump is not required and energy consumption can be kept low.
  • a plurality of the first fluid ejecting means are arranged in each row over two rows on the transport surface of the transport rail, and each swirl flow of the first fluid ejecting means belonging to one row And the direction of each swirl flow of the first fluid ejection means belonging to the other row can be configured to be different from each other.
  • the swirl flow from the adjacent first fluid ejecting means in the adjacent row is enhanced, and the object to be transported can be transported while floating by the fluid ejected from the first fluid ejecting means.
  • the object to be conveyed is caught at the joint of the conveyance rail, resulting in a conveyance failure. It is possible to prevent the object to be conveyed from being damaged.
  • FIG. 1 shows a first embodiment of a non-contact conveyance device according to the present invention.
  • This non-contact conveyance device 1 includes a rectangular column-shaped conveyance rail 2 extending in the conveyance direction of the glass 3, and the conveyance direction of the glass 3. They are arranged side by side in a direction perpendicular to the transport direction.
  • each swirl flow forming body 4 includes a through hole 41 penetrating from the front surface to the back surface, and a concave portion 42 as an air passage on the back surface as shown in FIGS. 2 (c) and 2 (d).
  • a pair of jet outlets 44 are provided in the vicinity of the inner peripheral surface of the through-hole 41 in the vicinity of the inner peripheral surface of the through hole 41 for jetting air from the inner peripheral surface.
  • a through hole 45 to which air is supplied via air supply paths 5 a and 5 b described later, and air from the through hole 45 are swirled.
  • An annular groove 46 having a circular shape in a plan view is provided to be supplied to a recess 42 (see FIG. 2) provided on the back surface of the flow forming bodies 4a and 4b.
  • the inside of the transport rail 2 is arranged along the long axis of the transport rail 2 and is used for transporting air supplied from a pump (not shown). Air supply paths 5a and 5b are provided.
  • a plate-like slot plate 6 is fixed to one end portion 2a of the transport rail 2 through a plurality of mounting screws 6a.
  • a recess (air path) 6b disposed so as to be continuous with the air paths 5a and 5b, and an elongated ejection slot 6c extending from the top of the recess 6b toward the surface of the transport rail 2 are provided.
  • the recess 6b and the ejection slot 6c are provided to generate an upward air flow at the end 2a of the transport rail 2.
  • the length L of the ejection slot 6c is formed larger than the diameter of the air supply paths 5a and 5b.
  • the width D1 of the ejection slot 6c is formed smaller than the width (depth) D2 of the recess 6b in order to compress and blow out (spout) air supplied through the recess 6b. It is preferable to be 1 mm or less.
  • the air supplied from the pump to the air supply paths 5 a and 5 b of the transport rail 2 is supplied to the annular groove 46 through the through hole 45, and the swirl flow forming bodies 4 a and 4 b are supplied from the annular groove 46. And is ejected from the ejection port 44 to the through hole 41. As a result, an upward swirling flow is generated above the swirling flow forming bodies 4a and 4b, and the glass 3 is floated by the swirling flow.
  • the swirl flows of the swirl flow forming bodies 4a and 4b are opposite to each other, and the swirl flow formation bodies 4a and 4b are alternately arranged vertically and horizontally on the paper surface of FIG.
  • the horizontal component force of the swirling flow formed by is canceled out.
  • the force applied to the glass 3 by the swirl flow is only the force of two vertical components of the levitation force and the suction force, and the rotation of the glass 3 can be reliably prevented.
  • the glass 3 that has floated in this manner is supplied with a driving force by a linear motor, a friction roller, a belt or the like (not shown) and is transferred in the direction of the arrow shown in FIG. And when the edge part 3a of the glass 3 approaches the joint of the conveyance rail 2, the air which ejects from the ejection slot 6c of the slot plate 6 is sprayed on the back surface of the glass 3, and a levitation force is given to the edge part 3a of the glass 3.
  • the end portion 3 a of the glass 3 and the vicinity thereof float up, and the glass 3 can easily get over the step 2 c of the joint of the transport rail 2 and the gap 2 d between the transport rails 2. .
  • the allowable value of the step 2c and the gap 2d when installing the transport rail 2 can be relaxed, and it is avoided that the manufacturing cost of the non-contact transport device is increased and that the place where the device is installed is restricted. It becomes possible.
  • the floating amount of the glass 3 as a whole is not increased but a floating force is applied only to the portion located at the joint of the conveyance rail 2, the air from the pump is improved in order to improve overcoming between the conveyance rails 2. There is no need to increase the amount and the operation cost is not increased.
  • process gas such as nitrogen other than air
  • process gas such as nitrogen other than air
  • an elongated slot 6c in the top view is provided, but a through hole having an elliptical shape in the top view is provided, or a plurality of small through holes are provided.
  • the holes may be formed side by side on a straight line.
  • the slot 2 is formed on the end 2a of the transport rail 2 and the ejection slot 6c is formed.
  • the end 2a of the transport rail 2 is not provided with the slot plate 6.
  • a through hole that connects the surface (transport surface) of the transport rail 2 to the internal air supply paths 5a and 5b may be formed.
  • FIG. 7 is a top view showing a second embodiment of the non-contact transport apparatus according to the present invention
  • FIG. 8 is an enlarged view of a region G in FIG.
  • the same components as those in FIGS. 1 to 5 are given the same reference numerals, and the description thereof is omitted.
  • the ejection slot 6c is arranged along the end surface 2b of the conveyance rail 2 (see FIG. 4A), the end surface 3b on the conveyance destination side of the glass 3 (see FIG. 4). 1 and FIG. 5) and the ejection slot 6c are in a parallel positional relationship. In this case, as shown in FIG. 6, an eddy current is likely to be generated above the glass 3, and the glass 3 may be vibrated up and down.
  • a diagonal block 7 having a right triangle in a top view is disposed between the conveyance rail 2 and the slot plate 6, and the ejection slot is formed. 6c is made to cross diagonally with respect to the end surface 3b on the conveyance destination side of the glass 3 (the arrangement surface 7c of the slot plate 6 is arranged obliquely with respect to the end surface 2b of the conveyance rail 2).
  • air supply paths 7a and 7b connecting the air supply paths 5a and 5b in the transport rail 2 and the recess 6b in the slot plate 6 are provided inside the oblique block 7.
  • a plurality of mounting holes (not shown) for screwing the slot plate 6 are provided on the arrangement surface 7 c of the slot plate 6.
  • the installation angle ⁇ (see FIG. 8A) of the ejection slot 6c with respect to the end surface 3b of the glass 3 is preferably 10 ° or more.
  • the angle ⁇ is less than 10 °, the influence of the vortex airflow becomes large, and there is a possibility that vibration is likely to occur.
  • the angle ⁇ is 10 ° or more, there is an advantage that the influence of the vortex airflow is reduced and the occurrence of vibration can be reduced. This advantage continues until the angle ⁇ is close to 90 °.
  • the larger the angle ⁇ the larger the amount of the oblique block 7 that projects in the longitudinal direction.
  • the installation angle ⁇ of the ejection slot 6c with respect to the end surface 3b of the glass 3 is preferably 10 ° or more, and more preferably 10 ° or more and 45 ° or less.
  • a process gas other than air can be used as a fluid, and an elliptical through hole or the like in top view is used instead of the ejection slot 6c.
  • a through hole that connects the surface of the bevel block 7 to the internal air supply paths 7 a and 7 b may be formed in the bevel block 7 without attaching the slot plate 6.
  • FIGS. 2A and 2B are diagrams showing the swirl flow forming body of FIG. 1, in which FIG. 1A is a top view, FIG. 1B is a cross-sectional view taken along the line BB in FIG.
  • FIG. 8C is a cross-sectional view taken along the line CC of FIG. 5B, and is a bottom view showing a case where the back surface of the swirling flow forming body is formed to be different from the back surface of the swirling flow forming body shown in FIG.
  • FIGS. 2A and 2B are diagrams showing a state where the swirl flow forming body of FIG. 1 is installed on a transport rail, where FIG.
  • FIG. 2A is a front cross-sectional view
  • FIG. 2B is a cross-sectional view taken along line EE of FIG.
  • (A) is an enlarged view of region A in FIG. 1
  • (b) is a cross-sectional view taken along line FF in (a).
  • (A) is the enlarged view of the area
  • (b) is a perspective view of (a).

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
PCT/JP2009/068577 2008-11-18 2009-10-29 非接触搬送装置 WO2010058689A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010539196A JP5406852B2 (ja) 2008-11-18 2009-10-29 非接触搬送装置
CN200980145863.5A CN102239093B (zh) 2008-11-18 2009-10-29 非接触式运送装置
KR1020117008478A KR101663257B1 (ko) 2008-11-18 2009-10-29 비접촉 반송 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-293998 2008-11-18
JP2008293998 2008-11-18

Publications (1)

Publication Number Publication Date
WO2010058689A1 true WO2010058689A1 (ja) 2010-05-27

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PCT/JP2009/068577 WO2010058689A1 (ja) 2008-11-18 2009-10-29 非接触搬送装置

Country Status (5)

Country Link
JP (1) JP5406852B2 (zh)
KR (1) KR101663257B1 (zh)
CN (1) CN102239093B (zh)
TW (2) TWI468330B (zh)
WO (1) WO2010058689A1 (zh)

Cited By (7)

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JP2012195403A (ja) * 2011-03-16 2012-10-11 Tokyo Electron Ltd 浮上式塗布装置
JP2013166608A (ja) * 2012-02-14 2013-08-29 Oiles Corp 浮上搬送装置および浮上搬送方法
CN103717517A (zh) * 2011-07-26 2014-04-09 翁令司工业股份有限公司 非接触运送装置
WO2014125686A1 (ja) * 2013-02-14 2014-08-21 オイレス工業株式会社 浮上搬送装置、搬送レール、および浮上搬送方法
JP2015020808A (ja) * 2013-07-16 2015-02-02 オイレス工業株式会社 非接触搬送装置及び非接触搬送方法
WO2015137318A1 (ja) * 2014-03-11 2015-09-17 オイレス工業株式会社 非接触式浮上搬送装置およびその搬送方向切換方法と搬送速度調整方法
CN112173725A (zh) * 2019-07-03 2021-01-05 上海睿范自动化设备有限公司 一种非接触传输装置

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JP5913997B2 (ja) * 2012-01-13 2016-05-11 オイレス工業株式会社 エアスライド装置
JP2013179137A (ja) * 2012-02-28 2013-09-09 Tokyo Institute Of Technology 力発生装置
JP6116629B2 (ja) * 2015-08-11 2017-04-19 株式会社ハーモテック 吸引装置
CN111112190B (zh) * 2019-12-31 2021-10-08 浙江大学 一种桥墩水下表面附着物清洗系统及结构改进的机器人

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