WO2009118952A1 - ガラス基板検査装置およびガラス基板検査方法 - Google Patents
ガラス基板検査装置およびガラス基板検査方法 Download PDFInfo
- Publication number
- WO2009118952A1 WO2009118952A1 PCT/JP2008/071454 JP2008071454W WO2009118952A1 WO 2009118952 A1 WO2009118952 A1 WO 2009118952A1 JP 2008071454 W JP2008071454 W JP 2008071454W WO 2009118952 A1 WO2009118952 A1 WO 2009118952A1
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- WIPO (PCT)
- Prior art keywords
- glass substrate
- defect detection
- detection means
- gripping
- holding means
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Definitions
- the present invention relates to a glass substrate inspection apparatus and a glass substrate inspection method for inspecting the presence or absence of defects contained in a glass substrate.
- various glass plates such as glass substrates for flat panel displays (FPD) such as liquid crystal displays, plasma displays, electroluminescence displays, field emission displays, etc. are made of a molten glass melted in a melting furnace. In many cases, it is manufactured by forming into a glass ribbon, and sufficiently cooling the glass ribbon and then cutting it into a predetermined dimension.
- a down draw method such as an overflow down draw method (fusion method) or a slot down draw method is generally used.
- the glass substrate manufactured through such a process (including a mother glass substrate on which a small glass substrate is multi-faced) is sent to an inspection process, and it is inspected for the presence of defects such as micro-scratches and foreign matter. It is customary.
- a glass substrate is placed horizontally on a conveyance roller, and the glass substrate is held in a horizontal posture by the conveyance roller.
- a device that is configured to detect a defect of a glass substrate by a light source and a camera such as a CCD sensor while being moved is known.
- Patent Document 2 all the four sides of the glass substrate in a vertical posture are gripped by the clamping means, and the glass substrate is pulled by each clamping means so that the glass substrate is extended in the vertical direction and the horizontal direction.
- An apparatus is disclosed that is fixed at a fixed position and inspects the glass substrate for defects by integrally moving an illumination device and a camera with respect to the fixed glass substrate. JP 2006-266933 A JP 2005-172882 A
- Patent Document 1 in the inspection of a glass substrate, it is often the case that it is requested to inspect the defect while moving the glass substrate.
- the glass substrate is fixed at a fixed position, and only the lighting device and the camera are moved.
- the clamping means is also located in the moving direction. Since the apparatus for realizing the movement becomes complicated and large, it is not practical.
- the present invention responds to a request for inspecting a defect while moving a glass substrate with a simple apparatus configuration, and without causing excessive stress concentration on the side of the glass substrate,
- the technical problem is to improve the detection accuracy of defects by correcting the defects.
- the apparatus according to the present invention which was created to solve the above-mentioned problems, scans the defect detection means relative to the glass substrate by moving the glass substrate in a vertical posture relative to the defect detection means, and
- the glass substrate inspection apparatus includes upper gripping means for gripping the upper side of the glass substrate, and lower gripping means for gripping the lower side of the glass substrate, While holding the glass substrate only by the gripping by the lower gripping means, the upper gripping means and the lower gripping means are separated from each other, and the glass substrate is tensioned in the vertical direction. Is characterized in that it is configured to move in the width direction toward the defect detection means.
- the defect detection means since it is not necessary to move the defect detection means having a heavy camera or the like, the frequency of maintenance is reduced as compared with the case where the defect detection means is moved. Therefore, the defect detection means can be used in a stable state for a long period of time, which is very advantageous economically.
- the method according to the present invention which was created to solve the above-mentioned problems, is a method in which the glass substrate in a vertical posture is moved relative to the defect detection means in the width direction, thereby causing the defect to the glass substrate.
- a glass substrate inspection method that scans a detection means and inspects for the presence or absence of defects contained in the glass substrate, the glass substrate is held in a state in which only the upper and lower sides of the glass substrate are gripped and tension is applied in the vertical direction. It is characterized by moving in the width direction toward the defect detection means.
- the defect detection means is fixed at a fixed position and only the glass substrate is moved.
- the deflection of the glass substrate is corrected without causing excessive stress concentration on the side of the glass substrate while accurately responding to a request for inspecting defects while moving the glass substrate.
- the defect detection accuracy can be improved.
- FIG. 1 is a side view showing the overall configuration of the glass substrate inspection apparatus according to the present embodiment.
- the glass substrate inspection apparatus 1 includes a moving unit 2 that moves the glass substrate G in a vertical posture (substantially vertical posture in the figure), and a glass substrate G that is moved by the moving unit 2.
- Defect detection means 3 that is arranged on the movement path and detects a defect of the glass substrate G.
- the glass substrate G include a glass substrate for liquid crystal display having a thickness of 0.05 to 1.8 mm and a side dimension of 1 m or more.
- the moving means 2 includes an upper holding means 4 for holding the upper side of the glass substrate G, a lower holding means 5 for holding the lower side of the glass substrate G, and the upper holding means 4 in the width direction of the glass substrate G (in the drawing).
- An upper guide rail 6 that guides in the direction of the arrow A) and a lower guide rail 7 that guides the lower gripping means 5 in the width direction of the glass substrate G (the direction of arrow A in the figure).
- the upper guide rail 6 is disposed at an upper position on the upper side of the glass substrate G
- the lower guide rail 7 is disposed at a lower position on the lower side of the glass substrate G.
- Both guide rails 6 and 7 have a width of the glass substrate G. Extends parallel to the direction.
- the upper grip means 4 includes a center portion of the upper side of the glass substrate G, three grip portions 4a for gripping both sides thereof, and a base portion 4b to which the three grip portions 4a are attached.
- the base portion 4b Is slidably attached to the upper guide rail 6.
- the number of the gripping portions 4a of the upper gripping means 4 is not particularly limited, and may be appropriately adjusted according to the size and thickness of the glass substrate G, or the entire upper side of the glass substrate G may be gripped by one. You may make it hold
- the lower gripping means 5 is provided with three gripping portions 5a for gripping the central portion of the lower side of the glass substrate G and both sides thereof, and these three gripping portions 5a are attached and extendable in the vertical direction (the direction of arrow B in the figure).
- the air cylinder 5b is provided with a base portion 5c to which the air cylinder 5b is attached.
- the base portion 5c is slidably attached along the lower guide rail 7.
- the number of the gripping portions 5a of the lower gripping means 5 is not particularly limited, and may be appropriately adjusted according to the size and thickness of the glass substrate G, or the entire lower side of the glass substrate G may be gripped by one. You may make it hold
- the defect detection means 3 includes a light source 8 that emits line light that is long in the vertical direction, and a line sensor 9 in which a plurality of cameras 9 a are arranged in the vertical direction, and irradiates the glass substrate G from the light source 8. The received light is received by the line sensor 9 on the opposite side of the glass substrate G, and the presence or absence of a defect is detected based on the change in the received light quantity.
- the defect detection means 3 is fixed at a fixed position on the movement path of the glass substrate G, and the glass substrate G is directed toward the defect detection means 3 by the upper grip means 4 and the lower grip means 5. By moving in the width direction, the camera 9a of the defect detection means 3 is scanned over the entire glass substrate G.
- the upper side of the glass substrate G sequentially conveyed from the upstream side of the glass substrate inspection apparatus 1 is gripped by the grip portion 4a of the upper grip means 4, and the glass substrate G is suspended and supported.
- the lower gripping means 5 is raised toward the lower side of the glass substrate G by the air cylinder 5b, and the lower side of the glass substrate G is gripped by the gripping part 5a of the lower gripping means 5.
- the lower gripping means 5 is lowered again by the air cylinder 5b, and the lower side of the glass substrate G is pulled downward by the gripping portion 5a attached to the air cylinder 5b.
- the base rail 4b of the upper gripping means 4 and the base portion 5c of the lower gripping means 5 are synchronized with each other while the upper and lower sides of the glass substrate G are gripped and tension is applied in the vertical direction. 6 and 7, the glass substrate G is passed between the light source 8 and the line sensor 9 of the defect detection means 3.
- the glass substrate G passed between the light source 8 and the line sensor 9 of the defect detection means 3 is in a state in which tension is applied in the vertical direction by the upper gripping means 4 and the lower gripping means 5. Therefore, the bending of the glass substrate G is corrected. Therefore, it is possible to reliably reduce a situation in which the focus position of the camera 9a of the line sensor 9 is shifted due to the bending of the glass substrate G and the defect detection accuracy is lowered. Furthermore, since there is no gripping means in the width direction that is the moving direction of the glass substrate G, the glass substrate G can be moved with a simple apparatus configuration.
- the upper side of the glass substrate G is gripped by another gripping means (not shown).
- the upper gripping means 4 and the lower gripping means 5 are moved away from the upper and lower sides of the glass substrate G, moved upstream along the guide rails 6 and 7, and returned to their original positions.
- the glass substrate G that has been inspected is transferred to a subsequent processing step when a defect is not detected, and is discarded as a defective product when a defect is detected, or is normal without defects.
- a new glass substrate G is taken from the portion.
- the glass substrate inspection apparatus 1 According to the glass substrate inspection apparatus 1 as described above, it is possible to cope with a request for inspecting a defect while moving the glass substrate G with a simple apparatus configuration. Without causing excessive stress concentration on the sides, it is possible to accurately correct the deflection of the glass substrate G and improve the detection accuracy of defects.
- this invention is not limited to said embodiment, It can implement with a various form.
- the tension of the glass substrate G is applied by being pulled by the air cylinder 5b has been described.
- the tension is applied to the glass substrate G by the weight of the grip portion 5a of the lower grip means 5.
- the air cylinder 5b lifts the grip portion 5a upward, and when the weight of the grip portion 5a is too light, the air cylinder 5b moves the grip portion 5a downward. It is preferable to adjust the tension acting on the glass substrate G by pulling it down.
Abstract
Description
2 移動手段
3 欠陥検知手段
4 上部把持手段
4a 把持部
4b ベース部
5 下部把持手段
5a 把持部
5b エアシリンダ
5c ベース部
6 上部ガイドレール
7 下部ガイドレール
8 光源
9 ラインセンサー
9a カメラ
Claims (4)
- 縦姿勢のガラス基板を欠陥検知手段に対して前記ガラス基板の幅方向に相対移動させることにより、前記ガラス基板に対して前記欠陥検知手段を走査して前記ガラス基板に含まれる欠陥の有無を検査するガラス基板検査装置において、
前記ガラス基板の上辺を把持する上部把持手段と、前記ガラス基板の下辺を把持する下部把持手段とを備え、
前記上部把持手段と前記下部把持手段による把持のみで前記ガラス基板を保持するとともに、前記上部把持手段と前記下部把持手段とを離反させて、前記ガラス基板に対して上下方向に張力を付与した状態で、前記ガラス基板が前記欠陥検知手段に向けて幅方向に移動するように構成されていることを特徴とするガラス基板検査装置。 - 前記ガラス基板と前記欠陥検知手段のうち、前記ガラス基板のみが移動するように構成されている請求項1に記載のガラス基板検査装置。
- 縦姿勢のガラス基板を欠陥検知手段に対して前記ガラス基板の幅方向に相対移動させることにより、前記ガラス基板に対して前記欠陥検知手段を走査して前記ガラス基板に含まれる欠陥の有無を検査するガラス基板検査方法において、
前記ガラス基板の上辺と下辺のみを把持して上下方向に張力を付与した状態で、前記ガラス基板を前記欠陥検知手段に向けて幅方向に移動させることを特徴とするガラス基板検査方法。 - 前記ガラス基板と前記欠陥検知手段のうち、前記ガラス基板のみが移動する請求項3に記載のガラス基板検査方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN200880119235.5A CN101889199B (zh) | 2008-03-27 | 2008-11-26 | 玻璃基板检查装置及玻璃基板检查方法 |
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JP2008-084794 | 2008-03-27 | ||
JP2008084794A JP5403389B2 (ja) | 2008-03-27 | 2008-03-27 | ガラス基板検査装置およびガラス基板検査方法 |
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Publication Number | Publication Date |
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WO2009118952A1 true WO2009118952A1 (ja) | 2009-10-01 |
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PCT/JP2008/071454 WO2009118952A1 (ja) | 2008-03-27 | 2008-11-26 | ガラス基板検査装置およびガラス基板検査方法 |
Country Status (5)
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JP (1) | JP5403389B2 (ja) |
KR (1) | KR101471899B1 (ja) |
CN (1) | CN101889199B (ja) |
TW (1) | TWI447381B (ja) |
WO (1) | WO2009118952A1 (ja) |
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EP2698625A1 (en) * | 2012-08-16 | 2014-02-19 | Boe Technology Group Co. Ltd. | A device and a method for detecting a transmittivity spectrum of a light guiding plate |
US10101281B2 (en) | 2013-08-08 | 2018-10-16 | Nippon Electric Glass Co., Ltd. | Sheet member conveyance device, sheet member support device, sheet member inspection device, and sheet member conveyance method |
GB2599776A (en) * | 2020-08-11 | 2022-04-13 | Gs Mr Glass And Stone Machinery And Robotics Uk & Ireland Ltd | Sheet handling process |
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CN103777383B (zh) * | 2013-12-31 | 2016-06-08 | 深圳市华星光电技术有限公司 | 液晶基板配向检查系统 |
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CN104310032A (zh) * | 2014-11-03 | 2015-01-28 | 苏州精创光学仪器有限公司 | 玻璃测量系统的输送装置 |
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CN106698022B (zh) * | 2017-01-18 | 2019-03-22 | 武汉华星光电技术有限公司 | 一种基板传送装置及方法 |
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2008
- 2008-03-27 JP JP2008084794A patent/JP5403389B2/ja active Active
- 2008-11-26 KR KR1020107011729A patent/KR101471899B1/ko active IP Right Grant
- 2008-11-26 WO PCT/JP2008/071454 patent/WO2009118952A1/ja active Application Filing
- 2008-11-26 CN CN200880119235.5A patent/CN101889199B/zh active Active
- 2008-12-29 TW TW097151220A patent/TWI447381B/zh not_active IP Right Cessation
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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EP2698625A1 (en) * | 2012-08-16 | 2014-02-19 | Boe Technology Group Co. Ltd. | A device and a method for detecting a transmittivity spectrum of a light guiding plate |
US9442068B2 (en) | 2012-08-16 | 2016-09-13 | Boe Technology Group Co., Ltd. | Device and a method for detecting a transmittivity spectrum of a light guiding plate |
US10101281B2 (en) | 2013-08-08 | 2018-10-16 | Nippon Electric Glass Co., Ltd. | Sheet member conveyance device, sheet member support device, sheet member inspection device, and sheet member conveyance method |
GB2599776A (en) * | 2020-08-11 | 2022-04-13 | Gs Mr Glass And Stone Machinery And Robotics Uk & Ireland Ltd | Sheet handling process |
GB2599776B (en) * | 2020-08-11 | 2023-02-01 | Gs Mr Glass And Stone Machinery And Robotics Uk & Ireland Ltd | Sheet handling process |
Also Published As
Publication number | Publication date |
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TW200940978A (en) | 2009-10-01 |
KR20110000542A (ko) | 2011-01-03 |
JP2009236771A (ja) | 2009-10-15 |
KR101471899B1 (ko) | 2014-12-11 |
CN101889199A (zh) | 2010-11-17 |
CN101889199B (zh) | 2014-04-16 |
TWI447381B (zh) | 2014-08-01 |
JP5403389B2 (ja) | 2014-01-29 |
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