WO2008029680A1 - Rouleau de transfert et appareil de transfert de substrats - Google Patents

Rouleau de transfert et appareil de transfert de substrats Download PDF

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Publication number
WO2008029680A1
WO2008029680A1 PCT/JP2007/066728 JP2007066728W WO2008029680A1 WO 2008029680 A1 WO2008029680 A1 WO 2008029680A1 JP 2007066728 W JP2007066728 W JP 2007066728W WO 2008029680 A1 WO2008029680 A1 WO 2008029680A1
Authority
WO
WIPO (PCT)
Prior art keywords
roller
substrate
transport
shaft
rollers
Prior art date
Application number
PCT/JP2007/066728
Other languages
English (en)
Japanese (ja)
Inventor
Futoshi Shimai
Original Assignee
Tokyo Ohka Kogyo Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co., Ltd. filed Critical Tokyo Ohka Kogyo Co., Ltd.
Publication of WO2008029680A1 publication Critical patent/WO2008029680A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Definitions

  • the present invention relates to a conveyance roller and a substrate conveyance device for conveying various substrates such as a glass substrate.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2004-281991
  • An object of the present invention is to provide a transport roller having stable transport performance even when the transport roller is elongated.
  • an object of the present invention is to provide a substrate transfer device that can stably transfer various substrates. There is to be.
  • Another object of the present invention is to provide a substrate transfer apparatus capable of transferring a plurality of substrates in parallel.
  • a transport roller according to the present invention is a transport roller for transporting various substrates, and is fitted to a cylindrical shaft, a shaft and disposed along the roller axial direction, and contacts the substrate to be transported.
  • Spacers that connect adjacent rollers while maintaining a predetermined distance between two adjacent mouths that are in contact with each other and transmit conveying force to the substrate and two adjacent mouths that are fitted to the shaft.
  • at least one pair of locking members that are fixed to the shaft and connected to the mouth, and that fix the roller and the spacer.
  • a plurality of rollers that transmit the conveyance force to the substrate to be conveyed are held in a free state with respect to the shaft, and are connected to the shaft via a locking member screwed to the shaft. Therefore, the problem that undesired stress distortion due to screwing occurs in the mouth is prevented. As a result, stable conveyance performance with respect to the substrate is achieved.
  • the substrate transport apparatus includes a plurality of transport rollers along the substrate transport direction, a connection frame that connects the plurality of transport rollers to each other at both ends of the shaft of the transport roller, and is connected to the transport rollers.
  • a drive mechanism that transmits a rotational driving force to the transport roller, and a leveling adjustment mechanism that is connected to the connecting frame and adjusts the level of the transport roller.
  • a transport failure such as meandering occurs.
  • a leveling adjustment mechanism for adjusting the level of the transport roller is provided outside the chamber on one end side of the transport roller.
  • each roller of the transport roller is held free with respect to the shaft.
  • a stable transfer force can be obtained for each port that transfers the transfer force directly to the board.
  • a large substrate can be stably transferred and a plurality of substrates can be transferred in parallel.
  • each horizontal roller is provided with a leveling adjustment mechanism outside the chamber, it is possible to prevent a conveyance failure such as meandering.
  • FIG. 1 is a diagram showing an example of a substrate processing system.
  • FIG. 2 Diagram showing an example of a transport roller
  • FIG. 3 is an enlarged cross-sectional view showing a part of the conveyance roller shown in FIG.
  • FIG. 1 is a diagram illustrating an example of an inline-type substrate processing system.
  • a developing unit 1 (only a part of the developing unit is shown) and a cleaning unit 2 are arranged along the substrate transfer line L, and the substrate 3 is developed while passing through the developing unit and the cleaning unit along the transfer line L. And a cleaning process is performed.
  • the substrate transport system has a plurality of transport rollers 4 (only one transport roller is assigned a reference numeral) arranged at a predetermined interval along the transport line L, and each substrate 3 is driven to rotate the transport rollers. It advances along the transfer line L by force.
  • the developing unit 1 has a developing chamber 10, and a developing nozzle 11 (a reference numeral is assigned to only one developing nozzle for the sake of clarity) sandwiching a transport roller in the developing chamber. Then, the substrate 3 is developed by a developer ejected from the developing nozzle during conveyance.
  • the cleaning chamber 20 has transport rollers arranged along the transport line direction. A plurality of cleaning nozzles are arranged above and below the substrate, and the substrate on which the developing solution remains is cleaned with a cleaning solution sprayed from the cleaning nozzle during conveyance.
  • FIG. 2 shows an example of the transport roller.
  • the transport roller has a shaft 30 formed of a cylindrical metal pipe, and rollers 3;! To 38 are fitted and attached to the outer periphery of the shaft at predetermined intervals.
  • These rollers are made of a synthetic resin material having a chemical resistance by contacting the back surface of the substrate to be conveyed and transmitting the conveying force to the substrate.
  • the spacer is also made of the same synthetic resin material.
  • rollers and spacers are attached to the shaft so that they can rotate or move without being screwed to the shaft.
  • the number of mouths and spacers to be attached to the shaft 30 can be set according to the roller length. For example, when transporting a large substrate, Increasing the number of spacers can accommodate an increase in the size of the substrate.
  • the locking members 50a and 50b are mounted so as to be adjacent to the rollers 31 and 34, and the locking members 50c and 50d are mounted so as to be adjacent to the rollers 35 and 38.
  • These locking members are made of a ring-shaped metal material or a synthetic resin material, and are screwed to the shaft 30.
  • the locking member is key-coupled to the adjacent mouth and acts to transmit the rotational driving force of the shaft to the mouth. Therefore, when the shaft rotates, the rotational driving force is transmitted to the locking member, and is transmitted from the locking member to the rollers and the spacers via the key connection to be transmitted to all the mouths. All rollers are not screwed to the shaft and are maintained in a free state, so no unnecessary distortion occurs and stable rotation accuracy and conveyance performance can be obtained.
  • Rotation support member 51 such as a bearing having an outer diameter smaller than the outer diameter of the mouth is mounted at substantially the center of shaft 30, and locking members 50e and 50f are arranged on both sides of the rotation support member 51. Secure 51 to the shaft.
  • the rotation support member 51 is supported on the base 60 of the chamber via the support column 52.
  • a substantially central portion of the transport roller is supported on the base of the chamber via the rotation support member to prevent the occurrence of stagnation.
  • the support by the rotation support member is a plurality of parts in the roller axis direction that can be achieved by only one force point. It is also possible to support it at a certain place.
  • Both end portions of the shaft 30 are supported by side walls 62a and 62b of the chamber via bearings 61a and 61b. Therefore, the conveyance roller of this example is supported by three points at both ends and the central portion of the roller.
  • the side wall 62a is supported so as to be rotatable through a bearing and to be movable up and down in order to adjust the level of horizontality described later.
  • a gear (bevel gear) 70 is fixed to a portion of the shaft 30 that protrudes to the outside of the side wall 62a of the chamber, and the rotational driving force transmitted through the rotational driving mechanism is transmitted to the shaft.
  • a rotational drive mechanism a drive shaft 72 to which a bevel gear 71 is connected is extended in a direction perpendicular to the paper surface to transmit a rotational drive force to each conveyance roller.
  • the shaft 30 is connected with a later-described leveling adjustment mechanism on the outside of the side wall 62a of the chamber.
  • the leveling adjustment mechanism can be provided on both sides of the conveyance roller as well as on one side of the conveyance port roller.
  • FIG. 3 is an enlarged cross-sectional view of a part of the conveyance roller shown in FIG. 2, and the connection state of the shaft, the locking member, the roller, and the spacer will be described with reference to FIG. .
  • the roller and the spacer when the roller and the spacer are attached to the shaft in a free state.
  • the mouth, the locking member, and the spacer are connected by key coupling, and the rotational driving force transmitted to the shaft is transmitted to each mouth through the key coupling. Since the lip is free from the shaft, unnecessary stress and distortion do not occur in the lip, resulting in extremely good roundness as a roller and achieving stable roller rotation accuracy. .
  • each roller 3;! To 34 is formed with a key groove, and the locking members 50a and 50b and the spacer 4;! To 43 are formed with a key to form a key connection.
  • the rotational driving force transmitted to the shaft 30 is transmitted to the locking members 50a and 50b, and is transmitted to the adjacent rollers 31 and 34 by a key connection formed between the locking member and the mouth.
  • the rotational driving force transmitted to these mouths is transmitted to rollers 32 and 33 via spacers 41 and 43.
  • FIG. 4 is a side view as seen in the axial direction of the transport roller from the outside of the chamber.
  • a bevel gear 70 (only one transport roller is provided with a reference numeral for the sake of clarity) is connected to each transport port, and the bevel gear 70 is connected to a bevel gear 71 coupled to a drive shaft 72. Then, the rotational driving force of the drive shaft 72 is transmitted to each conveying roller.
  • the drive shaft 72 is rotatably supported by four vertical frames 80a to 80d, and these four vertical frames are attached to the base frame 81.
  • the base frame 81 is fixed to the base 60 via an elevating mechanism 82, and by adjusting the elevating mechanism 82, the vertical height of the drive shaft 72 is adjusted, and the vertical height of the conveying roller is adjusted. Will be. By adjusting the vertical height, the level of the transport roller is adjusted.
  • This leveling mechanism can be provided on both sides of the transport roller. In this example, the mechanism adjusts the level of the five transport rollers, but the number of transport rollers is only an example.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Abstract

[PROBLÈMES] Proposer un rouleau de transfert ayant une performance de transfert stable et proposer un appareil de transfert de substrats. [MOYENS POUR RÉSOUDRE LES PROBLÈMES] L'invention concerne un appareil de transfert de substrats devant être utilisé dans un système de traitement de substrats en ligne, dans lequel divers types de traitements sont effectués tout en transférant divers types de substrats (3) par des rouleaux de transfert (4). L'appareil de transfert de substrats est doté d'une pluralité de rouleaux de transfert (4) disposés à des intervalles prescrits le long de la direction de transfert de substrats ; des chambres (60, 62a, 62b) entourant partiellement les rouleaux de transfert ; un mécanisme d'entraînement (70) relié aux rouleaux de transfert pour transmettre une puissance d'entraînement en rotation aux rouleaux de transfert de substrats ; et un mécanisme d'ajustement de niveau (71) relié aux rouleaux de transfert pour ajuster le niveau des rouleaux de transfert. Le mécanisme d'ajustement de niveau et le mécanisme d'entraînement en rotation pour les rouleaux de transfert sont positionnés à l'extérieur des chambres, et le niveau des rouleaux de transfert est ajusté à partir de l'extérieur des chambres.
PCT/JP2007/066728 2006-09-04 2007-08-29 Rouleau de transfert et appareil de transfert de substrats WO2008029680A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006238408A JP2008056471A (ja) 2006-09-04 2006-09-04 搬送ローラ及び基板搬送装置
JP2006-238408 2006-09-04

Publications (1)

Publication Number Publication Date
WO2008029680A1 true WO2008029680A1 (fr) 2008-03-13

Family

ID=39157112

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/066728 WO2008029680A1 (fr) 2006-09-04 2007-08-29 Rouleau de transfert et appareil de transfert de substrats

Country Status (3)

Country Link
JP (1) JP2008056471A (fr)
TW (1) TW200824030A (fr)
WO (1) WO2008029680A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015030574A (ja) * 2013-08-01 2015-02-16 トヨタ自動車株式会社 方向変換装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101815095B1 (ko) * 2011-05-03 2018-01-04 엘지디스플레이 주식회사 기판 반송시스템
JP5923281B2 (ja) 2011-11-18 2016-05-24 東京応化工業株式会社 基板搬送装置及び基板処理装置
CN102910430B (zh) * 2012-10-29 2015-06-10 深圳市华星光电技术有限公司 一种用于载送玻璃基板的滚轮结构

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05229626A (ja) * 1992-02-21 1993-09-07 Asahi Eng Co Ltd 樹脂ライニングローラ
JP3010767U (ja) * 1994-11-01 1995-05-09 有限会社二幸商会 ベルトコンベヤのローラ或いはプーリ
JP2004338893A (ja) * 2003-05-16 2004-12-02 Ulvac Japan Ltd 基板搬送装置
JP2005286001A (ja) * 2004-03-29 2005-10-13 Shibaura Mechatronics Corp 基板の搬送装置
JP2006186146A (ja) * 2004-12-28 2006-07-13 Zebiosu:Kk ワーク搬送装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05229626A (ja) * 1992-02-21 1993-09-07 Asahi Eng Co Ltd 樹脂ライニングローラ
JP3010767U (ja) * 1994-11-01 1995-05-09 有限会社二幸商会 ベルトコンベヤのローラ或いはプーリ
JP2004338893A (ja) * 2003-05-16 2004-12-02 Ulvac Japan Ltd 基板搬送装置
JP2005286001A (ja) * 2004-03-29 2005-10-13 Shibaura Mechatronics Corp 基板の搬送装置
JP2006186146A (ja) * 2004-12-28 2006-07-13 Zebiosu:Kk ワーク搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015030574A (ja) * 2013-08-01 2015-02-16 トヨタ自動車株式会社 方向変換装置

Also Published As

Publication number Publication date
JP2008056471A (ja) 2008-03-13
TW200824030A (en) 2008-06-01

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