WO2006120872A1 - 無アルカリガラスおよびその製造方法 - Google Patents
無アルカリガラスおよびその製造方法 Download PDFInfo
- Publication number
- WO2006120872A1 WO2006120872A1 PCT/JP2006/308457 JP2006308457W WO2006120872A1 WO 2006120872 A1 WO2006120872 A1 WO 2006120872A1 JP 2006308457 W JP2006308457 W JP 2006308457W WO 2006120872 A1 WO2006120872 A1 WO 2006120872A1
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- WO
- WIPO (PCT)
- Prior art keywords
- alkali
- cao
- glass
- sro
- free glass
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/225—Refining
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/11—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen
- C03C3/112—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine
- C03C3/115—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine containing boron
- C03C3/118—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine containing boron containing aluminium
Definitions
- the present invention relates to a non-alkali glass suitable as a base glass for flat panel displays, and a method for producing the same, without defects such as bubbles and undissolved raw materials.
- Substrate glass for flat panel displays is broadly classified into an alkali glass containing an alkali metal oxide and an alkali-free glass containing substantially no alkali metal oxide.
- Alkali glass substrates are used for plasma 'display (PDP), inorganic-elect' luminescence 'display, field'emission' display (FED), etc. Used for 'Luminescence' display (OLED) etc.
- LCD glass substrates and the like are required to have the following characteristics because a thin film of metal or metal oxide is formed on the surface.
- Alkali metal ions substantially free of alkali metal ions may diffuse into the thin film as alkali metal ions and deteriorate the film characteristics. Because there is to prevent its deterioration).
- buffered hydrofluoric acid hydrofluoric acid + ammonium fluoride (BHF)
- BHF ammonium fluoride
- ITO indium oxide doped with tin
- metal Durable against various acids nitric acid, sulfuric acid, etc.
- sulfate as a refining agent is more environmentally friendly than ants for ants.
- Patent Document 1 The power of remarkably low load is excellent for alkali-free glass, and the effect of reducing bubbles was not as expected. Therefore, a method using both sulfate and chloride (Patent Document 1) and a method using both sulfate and tin oxide (Patent Document 2) have been proposed. However, in both cases, the clarification effect is not perfect, and there remains a problem that undissolved substances remain in the glass.
- Patent Document 1 Japanese Patent Laid-Open No. 10-25132
- Patent Document 2 Japanese Patent Application Laid-Open No. 2004-299947
- An object of the present invention is to provide a non-alkali glass suitable as a glass substrate for a display with few defects of bubbles and undissolved raw materials and a method for producing the same.
- the specified raw material consisting of O, B 2 O, MgO, CaO, SrO and BaO as the base yarn and sulfate,
- the glass of the present invention is a glass in which the raw material is easily dissolved by controlling the temperature at which the viscosity becomes 10 2 dPa's to 1600 ° C or lower while suppressing the decrease in strain point and acid resistance, and the SO Dissolution
- the salty soot decomposes at 1400-1500 ° C and generates clarified gas (HC or C1). As it rises, the clarification effect improves
- the tin compound is reduced to SnO at 1450-1600 ° C, generating a clarified gas (O), which floats with the bubbles in the glass.
- the solubility of the raw material is further improved, and the clarification effect is further improved.
- the conventional alkali-free glass has a low clarification effect, which is higher than the viscosity force foam floating at 1200-1600 ° C, but the glass of the present invention has a viscosity corresponding to the bubble floating. By doing so, the rising of the bubbles is promoted and the clarification effect is increased.
- the glass of the present invention promotes the melting of the raw material by the stirring action of the clarified gas at 1200 to 1600 ° C, suppresses the foam generated from the undissolved raw material as a core, and also as an undissolved material Residual defects are also suppressed.
- the present invention substantially does not contain an alkali metal oxide, and SiO, Al 2 O,
- a glass composed of BO, MgO, CaO, SrO, and BaO and having a viscosity of 10 2 dP
- the temperature at which a ⁇ s is 1600 ° C or lower, and an alkali-free glass containing 0.001 to 0.1% of sulfur in terms of SO in terms of mass percentage with respect to 100% of the total amount of the matrix composition.
- the matrix composition is expressed by mass percentage, and SiO is 49 to 69.
- the alkali-free glass of the present invention preferably further contains 0.001 to 1% of C1 in terms of mass percentage with respect to 100% of the total amount of the matrix composition.
- the alkali-free glass of the present invention preferably further contains 0.01 to 1% of SnO in terms of mass percentage with respect to 100% of the total amount of the matrix composition.
- the alkali-free glass of the present invention preferably further contains 0.001 to 1% of F in terms of mass percentage with respect to 100% of the total amount of the matrix composition.
- the matrix composition is expressed by mass percentage, and SiO is 49.
- the present invention is a method for preparing an alkali-free glass by preparing a raw material and melting the alkali metal so that the temperature at which the viscosity becomes 10 2 dPa's is 1600 ° C or lower. It does not contain oxides substantially, and its parent composition is SiO, AlO, BO, MgO, CaO, SrO and BaO.
- the matrix composition is expressed by mass percentage, and SiO 2
- chloride is added to the raw material at a ratio of 0.01 to 5% in terms of C1 in terms of mass percentage with respect to 100% of the total amount of the matrix composition Preferable to be prepared to include.
- the total amount of the matrix composition is 100%, and the tin compound is 0.01% to 1% in terms of SnO in terms of mass percentage.
- fluoride is further added to the raw material at a rate of 0.01 to 5% in terms of F in terms of mass percentage Preferable to be prepared to include.
- the matrix composition is expressed by mass percentage, and the SiO force is 5 to 63.5%, the Al O force is 5 to 18.5%, and the BO force is 7 to 9. 5%, MgO force 0.5
- the present invention is a method for producing an alkali-free glass substantially free of alkali metal oxides
- the alkali-free glass of the present invention is suitable for LCD substrate glass and the like because it can suppress a decrease in strain point and a decrease in acid resistance as much as possible and has few bubble defects and raw material undissolved defects. .
- the method for producing an alkali-free glass of the present invention can produce a V-alkali-free glass with relatively few bubble defects and undissolved raw material defects relatively easily.
- the alkali-free glass production method of the present invention does not require the melting temperature during glass production to be as high as that of the conventional method, which is advantageous in terms of saving energy and extending the life of glass production equipment. It is convenient.
- mass percentage display may be omitted, and only the quantity may be displayed.
- the alkali-free glass of the present invention does not substantially contain an alkali metal oxide, and SiO
- the alkali-free glass has a temperature of 0 2 dPa ⁇ s at 1600 ° C or lower and contains 0.001 to 0.1% of sulfur in terms of SO with respect to 100% of the total amount of the matrix composition.
- the temperature at which the viscosity is 10 2 dPa's is preferably 1580 ° C or lower. If the temperature exceeds 1600 ° C, clarification cannot be performed effectively, bubbles do not easily float, and the action of stirring the glass raw material cannot be obtained sufficiently, resulting in bubble defects and raw material undissolved. It becomes easy to leave behind the shortcomings.
- the alkali-free glass of the present invention has a strain point of 600 ° C or higher, preferably 610 ° C or higher, more preferably 620 ° C or higher, and a low thermal shrinkage rate.
- the alkali-free glass of the present invention has excellent durability against hydrochloric acid-containing chemicals used for etching ITO with high acid resistance.
- the acid resistance is evaluated by a decrease in hydrochloric acid by a measurement method described later, and the decrease is 1 mgZcm 2 or less, preferably 0.5 mgZcm 2 or less, more preferably 0.3 mgZcm 2 or less.
- the content of 2 3 2 3 in the glass is less than 0.1% with respect to the total amount of the matrix composition.
- the sulfate is at least one of the cations of various oxides that are the glass raw material components of the present invention. More preferably, it is a sulfate of an alkaline earth metal, preferably a sulfate of at least one element selected from Al, Mg, Ca, Sr and Ba. Among them, CaSO ⁇ 2 ⁇ 0, SrSO, and BaSO force
- Sulfate in the raw material is 0.01% or more in terms of SO with respect to 100% of the total amount of the mother composition
- It is preferably prepared so as to contain 0.1% or more, more preferably 0.2% or more, more preferably 0.3% or more.
- the content is preferably 5% or less, more preferably 1.0% or less, in order to avoid saturation of the action effect and reboiling during final finishing such as stirring.
- the amount of residual sulfur in the alkali-free glass is calculated in terms of SO relative to the total amount of 100% of the matrix composition.
- Chloride decomposes in glass melt at 1400-1500 ° C, generates a large amount of HC1 and / or C1 gas, and acts to grow bubbles greatly. Chloride in the raw material is the parent group
- the total amount of the composition is adjusted to be 0.01% or more, preferably 0.1% or more, more preferably 0.5% or more, more preferably 0.8% or more in terms of C1. . Saturation of the effect and C1 remaining in the glass are released during the flat panel display manufacturing process.
- the content is preferably 5% or less, more preferably 2% or less.
- the residual amount of salty soot in the alkali-free glass is 0.001 to 1%, preferably 0.1 to 1%, more preferably 0.2 in terms of C1 with respect to 100% of the total amount of the mother composition. ⁇ 0.5%.
- the chloride is at least one chloride of various oxide cations that are the glass raw material component of the present invention, that is, a salt of at least one element selected from Al, Mg, Ca, Sr and Ba. SrCl ⁇ 6 ⁇ 0 and BaCl ⁇ 2 ⁇ Repulsive effect of enlarging foam is remarkable even though it is more preferable to be an alkaline earth metal salt.
- Chloride greatly increases the clarification effect when it coexists with sulfate or water.
- a salty salt is contained in a glass raw material with a sulfate and water.
- it may be contained as a sulfate or salt containing water of crystallization, or at least one kind of catholyte of the glass raw material.
- the atmospheric power can be included as water vapor when the glass raw material is melted.
- burning fuels such as city gas and heavy oil with the oxyfuel combustion method is preferable because the water vapor concentration in the combustion atmosphere increases.
- the tin compound generates O gas in the glass melt. 1450 ° C or higher in glass melt
- the tin compound in the raw material is 0.01% in terms of SnO with respect to 100% of the total amount of the mother composition.
- the residual amount of tin compounds in the alkali-free glass was 0.01 to 1% in terms of SnO, preferably 100% of the total amount of the mother composition.
- the ratio is more preferably 0.2 or more, particularly preferably 0.25 or more.
- the value of the ratio is less than 0.1, bubbles are not sufficiently generated due to the tin compound.
- the molten glass is 1450 to 1600 ° C, preferably 1500 to 1600 ° C.
- Tin compounds are Sn oxides, sulfates, chlorides, fluorides, etc.
- the ability to significantly increase 2 is particularly preferred. If the SnO particle size is too large, the SnO particles
- the average particle size (D50) of SnO is 200 because it may not be completely dissolved in the glass material and may remain.
- ⁇ m or less preferably 150 ⁇ m or less, more preferably 100 ⁇ m or less.
- it is preferably 5 ⁇ m or more, more preferably 10 ⁇ m or more.
- Metal oxides such as Fe 2 O, TiO, CeO, MnO, Nb 2 O and metal salts thereof, preferably
- Nitrate preferably nitrates of alkaline earth metals such as Mg, Ca, Sr, Ba
- Mg, Ca, Sr, Ba alkaline earth metals
- Fluoride has the effect of reducing the viscosity and surface tension of the glass melt and improving the solubility of the glass raw material.
- the fluoride is at least one fluoride selected from the cations of various oxides that are the glass raw material component of the present invention, that is, at least one selected from Al, Mg, Ca, Sr and Ba.
- Alkaline earths that are preferred to be fluorides of these elements Among the more preferred to be fluorides of metals, CaF increases the solubility of glass raw materials.
- the raw material fluoride is prepared so as to contain 0.01% or more, preferably 0.05% or more in terms of F with respect to 100% of the total amount of the matrix composition. Since there is a risk of lowering the strain point of alkali-free glass and F remaining in the glass may be detached in the TFT formation process, F
- the amount of fluoride remaining in the alkali-free glass is 0.001 to 1%, preferably 0.01 to 1%, more preferably 0.01 to 1% in terms of F with respect to 100% of the total amount of the matrix composition. 0.5%, more preferably 0.01-0.2%.
- the raw material for alkali-free glass of the present invention is a network former and is an essential component.
- SiO increases the strain point, increases acid resistance, and reduces the density of glass.
- the content thereof is 69.5% or less, preferably 63.5% or less, more preferably 60% or less, and still more preferably 58% or less, considering that the viscosity of the glass becomes too high. Conversely, it can cause deterioration of acid resistance, increase in density, decrease in strain point, increase in linear expansion coefficient, decrease in Young's modulus, so its content is 49% or more, preferably 49.5% or more. It is.
- Al O increases the strain point and suppresses the phase separation of the glass.
- Its content is 5% or more, preferably 7% or more, more preferably 7.5% or more, and further preferably 8% or more. However, in order to avoid a decrease in strain point, a decrease in Young's modulus, and a decrease in acid resistance, the content is not more than 10.5%, preferably not more than 9.5%, more preferably not more than 9%.
- MgO is a component that lowers the viscosity of the glass and is contained in an amount of 0 to 12.5%.
- Its content is 0.5% or more, preferably 1% or more, more preferably 2% or more, and further preferably 3% or more.
- the content is 12.5% or less, preferably 10% or less, more preferably 7.5% or less, and even more preferably 5% or less.
- CaO is a component that lowers the viscosity of the glass and contains 0 to 16.5%.
- CaO after MgO, does not increase the density, does not increase the linear expansion coefficient, and improves the solubility without excessively reducing the strain point, It is a component that may be contained because it does not necessarily have an adverse effect on the durability against acid-resistant and alkaline resist stripping solutions.
- its content is 16.5% or less, preferably Is 15.5% or less, more preferably 14.5% or less.
- SrO is a component that lowers the viscosity of the glass and contains 0 to 24%. It is preferable to contain it for improving devitrification properties and acid resistance. SrO, like CaO, does not increase the density, does not increase the linear expansion coefficient, improves the solubility without excessively reducing the strain point, and resists acid and alkali. Does not necessarily adversely affect the durability against the stripping solution. Its content is 0.1% or more, preferably 1% or more, more preferably 2% or more, and further preferably 4% or more. In particular, when the alkali-free glass contains BaO, it is preferable to contain 2% or more of SrO in order to improve problems derived from BaO described later.
- its content is 24% or less, preferably 23. It is 5% or less, more preferably 22% or less, and still more preferably 21% or less.
- the SiO content is 69.5% or less.
- the sum of CaO and SrO content (CaO + SrO) is 8% or more, preferably 9.5% or more, in order to improve the resistance to devitrification characteristics, acid resistance and alkali resist stripping solution. More preferably, it is 11% or more, and further preferably 12.5% or more. Similar reason
- the force (CaO + SrO) is 24% or less, preferably 23.5% or less, particularly 22% or less, more preferably 21% or less, and even more preferably 20% or less.
- BaO is a component that lowers the viscosity of the glass and contains 0 to 13.5%. It is an effective component for improving the phase separation, devitrification properties and acid resistance of glass. However, in order to lower the strain point, increase the density of the glass, lower the Young's modulus and solubility, and deteriorate the BHF resistance, it is better to determine the presence or absence and content depending on the purpose and application. . In general, when a glass substrate for liquid crystal is used, it is preferable to stop at an inevitable content. The content when BaO is positively contained is 13.5% or less, preferably 12% or less, more preferably 10% or less, and further preferably 8%, for the purpose of reducing the density or linear expansion coefficient. It is as follows.
- (CaO + SrO) is 8 to 24%, and (MgO + CaO + SrO + BaO) is necessarily increased.
- (MgO + CaO + SrO + BaO) is small, the viscosity of the glass increases and the solubility deteriorates. Therefore, in the alkali-free glass of the present invention, (MgO + CaO + SrO + BaO) is 16% or more, preferably 16.5% or more, more preferably 17% or more, and further preferably 17.5% or more. .
- (MgO + CaO + SrO + BaO) is 28.5% or less, preferably 28% or less, more preferably 27% or less, and even more preferably. Is less than 26%.
- the glass has a specific composition, specifically, a composition satisfying at least one of the following (1) to (3), the devitrification property is inferior.
- composition is such that the temperature at which the viscosity of the melt is 10 2 dPa's is less than 1500 ° C.
- the alkali-free glass of the present invention is a method for producing a glass by preparing raw materials and melting the alkali metal oxide so that the temperature at which the viscosity becomes 10 2 dPa's is 1600 ° C or lower. Substantially free of SiO, AlO, BO, MgO, CaO, SrO and BaO
- Each raw material is prepared so that it may become a glass mother composition.
- it is adjusted so that sulfate is contained in the raw material at a ratio of 0.01 to 5% in terms of SO with respect to 100% of the total amount of the mother composition.
- the float method is a method of forming glass on molten tin, and is a widely used forming method.
- the alkali-free glass of the present invention may be molded using other known methods. Examples of other forming methods include the well-known press method, dundraw method, fusion method and the like.
- the float method is suitable for the stable production of thin plates and large glass plates for substrates (for example, plate thicknesses of 0.5 to 1.5 mm and dimensions of 1700 X 1400 mm or more).
- (1) SiO, Al 2 O, BO, MgO, CaO, SrO, and BaO are predetermined so that the temperature at which the viscosity is 10 2 dPa's is 1600 ° C or lower.
- the sulfate was converted to SO in terms of SO with respect to 100% of the total amount of the mother composition.
- Table 1 shows components prepared as industrial glass raw materials, and Table 2 shows the total amount of SiO, Al 2 O, B 2 O, MgO, CaO, SrO, and BaO based on the composition of the obtained glass 1
- Examples 1 to 5 are examples of the present invention, and examples 6 to 8 are comparative examples.
- the glass of Table 2 was obtained.
- the remaining amount of sulfate, chloride, tin compound and food added to the raw materials in the glass is 0.01% for SO, 0.3% for C1, 0.2% for SnO and 0.2% for F.
- the number of bubbles in the glass was visually observed using a microscope.
- “A” is indicated, “10” or more, “B” when 30 or less, and “C” when 30 or more.
- the temperature at which the viscosity of the glass reaches 10 2 dPa's was calculated from the high-temperature viscosity measured by the cylindrical rotation method using the Fulcher equation below.
- the strain point (actual value) of the glass was measured according to the fiber stretching method specified in JIS R3103.
- the amount of mass loss due to hydrochloric acid in the glass was determined from the amount of mass reduction per unit surface area of the glass after immersing the sample glass in a 1Z10 normal aqueous hydrochloric acid solution maintained at 90 ° C for 20 hours.
- the temperature when the viscosity is 10 2 dPa's is 1600 ° C or lower, and SO and
- Example 6 since the glass of Example 6 does not contain force SO having a temperature of 1600 ° C. or lower when the viscosity is 10 2 dPa's, the number of bubbles is larger than that of the Examples.
- the temperature is 1600 when the viscosity is 10 2 dPa's. Higher than C SO and others
- the alkali-free glass of the present invention is suitable as a substrate glass for flat panel displays having few defects such as bubbles and undissolved raw materials. It should be noted that the entire contents of the specification, claims, drawings and abstract of Japanese Patent Application No. 2005-134579 filed on May 2, 2005 are cited here as disclosure of the specification of the present invention. Incorporate.
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Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06732215A EP1878709A4 (en) | 2005-05-02 | 2006-04-21 | GLASS WITHOUT ALKALI AND PROCESS FOR PRODUCTION THEREOF |
CN200680014690XA CN101166697B (zh) | 2005-05-02 | 2006-04-21 | 无碱玻璃及其制造方法 |
US11/934,138 US7670975B2 (en) | 2005-05-02 | 2007-11-02 | Alkali free glass and process for its production |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005-134579 | 2005-05-02 | ||
JP2005134579A JP4977965B2 (ja) | 2005-05-02 | 2005-05-02 | 無アルカリガラスおよびその製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/934,138 Continuation US7670975B2 (en) | 2005-05-02 | 2007-11-02 | Alkali free glass and process for its production |
Publications (1)
Publication Number | Publication Date |
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WO2006120872A1 true WO2006120872A1 (ja) | 2006-11-16 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2006/308457 WO2006120872A1 (ja) | 2005-05-02 | 2006-04-21 | 無アルカリガラスおよびその製造方法 |
Country Status (7)
Country | Link |
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US (1) | US7670975B2 (ja) |
EP (1) | EP1878709A4 (ja) |
JP (1) | JP4977965B2 (ja) |
KR (1) | KR100935562B1 (ja) |
CN (1) | CN101166697B (ja) |
TW (1) | TWI409238B (ja) |
WO (1) | WO2006120872A1 (ja) |
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Also Published As
Publication number | Publication date |
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CN101166697B (zh) | 2011-08-03 |
JP4977965B2 (ja) | 2012-07-18 |
TWI409238B (zh) | 2013-09-21 |
US7670975B2 (en) | 2010-03-02 |
CN101166697A (zh) | 2008-04-23 |
KR20080003373A (ko) | 2008-01-07 |
KR100935562B1 (ko) | 2010-01-07 |
EP1878709A1 (en) | 2008-01-16 |
EP1878709A4 (en) | 2010-11-17 |
TW200710057A (en) | 2007-03-16 |
JP2006306690A (ja) | 2006-11-09 |
US20080076656A1 (en) | 2008-03-27 |
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