WO2006118088A1 - ペースト塗布装置及びペースト塗布方法 - Google Patents
ペースト塗布装置及びペースト塗布方法 Download PDFInfo
- Publication number
- WO2006118088A1 WO2006118088A1 PCT/JP2006/308593 JP2006308593W WO2006118088A1 WO 2006118088 A1 WO2006118088 A1 WO 2006118088A1 JP 2006308593 W JP2006308593 W JP 2006308593W WO 2006118088 A1 WO2006118088 A1 WO 2006118088A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- paste
- substrate
- nozzle
- screw
- motor
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1034—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves specially designed for conducting intermittent application of small quantities, e.g. drops, of coating material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
- B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
- B05C5/0216—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
Definitions
- the present invention relates to a paste coating apparatus and a paste coating method for applying a paste for sealing a liquid substance such as liquid crystal between glass substrates such as a liquid crystal display panel.
- a pattern is drawn by moving one of the substrate and the nozzle in a horizontal plane parallel to the other while discharging nozzle force paste.
- the method is known.
- the conventional paced coating apparatus discharges a paste-like sealant from a nozzle (needle) by applying a gas pressure of a preset pressure in a syringe as disclosed in Patent Document 1. And apply onto the substrate. At this time, the stage holding the substrate on the upper surface is moved in parallel with the nozzle.
- Patent Document 1 Japanese Patent Laid-Open No. 11-119232
- An object of the present invention is to apply a paste in a necessary amount to a target portion on a substrate.
- the present invention relates to a cylinder having a nozzle in a paste coating apparatus that discharges a paste for sealing a liquid substance between two substrates from a nozzle and applies the paste to at least one substrate, and the cylinder
- a pump means having a screw which is rotatably provided in the nozzle and discharges a paste of an amount corresponding to the rotation amount from the nozzle, a motor for rotating the screw, and the nozzle and the substrate on the substrate surface.
- a moving device that relatively moves along the motor, a motor of the pump means, and a control device that controls the moving device.
- the present invention relates to a paste application method in which a paste for sealing a liquid substance between two substrates is ejected from a nozzle and applied to at least one of the substrates, depending on the amount of rotation of the screw.
- a paste for sealing a liquid substance between two substrates is ejected from a nozzle and applied to at least one of the substrates, depending on the amount of rotation of the screw.
- FIG. 1 is an overall view showing a paced coating apparatus.
- FIG. 2 is an enlarged schematic view of the discharge pump of FIG.
- FIG. 3 is a schematic diagram for explaining a coating operation.
- FIG. 4 is a diagram showing the relationship between the application position and the speed of the motor of the discharge pump.
- FIG. 5 is a schematic diagram for explaining a coating pattern of a sealing agent in a concave portion of a conventional example.
- FIG. 6 is a schematic diagram showing an application pattern of a sealing agent of a conventional example.
- FIG. 7 is a schematic view showing a coating pattern of a conventional sealing agent.
- FIG. 8 is a schematic view showing another example of a cylinder and a screw in the discharge pump.
- a paste coating apparatus 10 according to the present invention shown in FIG. 1 has a square plate-like base 11, and the base 11 is fixed on four legs 12.
- a feed table 13 in the X-axis direction (left-right direction in FIG. 1) is provided on the upper surface of the base 11 so as to be movable in the left-right direction via the feed mechanism 14.
- the Y-axis is placed on the feed table 13 in the X-axis direction.
- a feed table 15 in the direction (front-rear direction in FIG. 1) is provided so as to be movable in the front-rear direction via a feed mechanism 16.
- a gate-shaped column 20 is fixed on the base 11, and two heads 22 are arranged in the left-right direction on a linear guide 21 fixed to the front portion of the horizontal beam portion 20A extending in the X-axis direction of the column 20.
- the two heads 22 are provided so as to be movable in the X-axis direction (left-right direction) via the feed mechanism 23.
- the distance in the X-axis direction between the two heads 22 can be matched to the arrangement distance in the X-axis direction of a plurality of patterns formed on the substrate 31 described later.
- the feed mechanisms 14, 16, and 23 each include a feed screw and a nut (not shown), and servo motors 24, 25, and 26 for driving that rotate the feed screw.
- the feeding mechanism may be a linear stator and a linear motor having a mover force that moves on the stator.
- a square plate-like stage 30 is fixed on the feed table 15 in the Y-axis direction, and a glass substrate 31 of a liquid crystal display panel is held on the stage 30.
- Each of the two heads 22 has a discharge pump 32 (pump means) not shown in the Z-axis direction.
- the moving device Z-axis moving device
- the discharge pump 32 is provided in parallel with a hollow cylinder 34 having a nozzle 33 at the tip and a screw 36 and a cylinder 34 that are rotatably provided in the cylinder 34 via a connecting member 35. 40 storage container.
- the screw 36 has a screw portion 36A on the outer periphery, and is connected to a servo motor 41 for driving fixed to the base end portion of the cylinder 34.
- a liquid sealing agent 44 (paste) is stored in the storage container 40, and a pressure gas chamber 45 is provided above the sealing agent 44.
- the pressure gas chamber 45 is connected to a gas pressure source (not shown) via a hose 46. Connected.
- the supply of the pressure gas from the gas pressure source is started at a timing earlier than the timing at which the rotation of the screw 36 is started, and the rotation of the screw 36 is stopped. It stops at the timing.
- the bottom of the storage container 40 is connected to an opening 43 in the upper part of the cylinder 34 via a noise 42, and the opening 43 in the upper part of the cylinder 34 opens toward the outer periphery of the upper end of the screw part 36A of the screw 36.
- a spiral liquid chamber filled with a sealant is formed between the inner periphery of the cylinder 34 and the upper and lower screw portions 36A.
- the following is performed as a preliminary discharge operation.
- the pressure gas is supplied into the pressure gas chamber 45, and the screw 36 is rotated in this state.
- the screw 36 continues to rotate until the liquid chamber is filled with the sealant and the sealant is discharged from the nozzle 33.
- it is preferable that the screw 36 is continuously rotated for a set time after the sealant is discharged from the nozzle, so that the sealant can be filled in the liquid chamber without leaving air in the liquid chamber.
- the discharge pump 32 has a distance measuring device such as a laser displacement meter (not shown) provided integrally with the nozzle 33.
- the control device described later controls the gap between the nozzle 33 and the surface of the substrate 31 so as to keep a predetermined gap by feedback control based on the measured value of the distance to the surface of the substrate 31 by the distance measuring device (gap Control.
- the screw 36 does not push out the sealing agent by the pressure gas as in the prior art, and the screw part 36A directly mechanically pushes out the liquid sealing agent. A proportional discharge rate is obtained.
- the moving devices 17 and 18 including the feed tables 13 and 15 and the feeding mechanisms 14 and 16 in the X-axis direction and the Y-axis direction of the stage 30 and the moving device 19 including the two heads 22 and the feeding mechanism 23
- the nozzle 33 of the pump 32 and the substrate 31 on the stage 30 are relatively moved in parallel along the substrate 31 surface.
- the paste coating apparatus 10 includes a control device (not shown), and the control device has a relative movement speed in the direction along the substrate surface between the nozzle 33 and the substrate 31, that is, a relative movement speed in the X-axis direction, a Y-axis
- the rotation speed of the motor 41 of the discharge pump 32 is controlled according to the relative movement speed in the direction and the relative movement speed obtained by combining the relative movement speed in the X-axis direction and the relative movement speed in the Y-axis direction.
- the coating apparatus 10 draws a rectangular coating pattern P by coating a sealing agent along the peripheral edge of the rectangular glass substrate 31 in a clockwise direction in FIG.
- the control device moves the nozzle 33 directly above the application start point O.
- the gap between the nozzle 33 and the surface of the substrate 31 becomes a preset gap by feedback control based on the measured value of the distance measuring device while lowering the nozzle 33 by controlling the Z-axis moving device.
- the control device rotates the motor 24 of the X-axis direction moving device 17 composed of the feed table 13, and moves the substrate 31 to the right of the X-axis in FIG. .
- control device rotates the motor 41 of the discharge pump 32 in synchronization with the motor 24 of the moving device 17 in the X-axis direction (hereinafter described as moving the feed table 13 in the X-axis direction), and the nozzle 33 The sealant is discharged from.
- FIG. 4 shows the application position on the substrate in the process of reaching the application start point O force application end point F on the horizontal axis, and the rotational speed of the motor 41 of the discharge pump 32 on the vertical axis.
- the motor 24 of the moving device 17 in the X-axis direction accelerates the stop state force to the rotational speed Vs set corresponding to the straight line portion S, so that the control device moves in the X-axis direction.
- the rotation of the motor 41 of the discharge pump 32 is accelerated from the stop state to the first rotation speed V 1 corresponding to the rotation speed Vs in synchronization with the change in the rotation speed of the motor 24 of the moving device 17.
- the moving speed of the moving device 17 is lower than the moving speed of the linear portion S (shown in FIG. 4) of the coating pattern P. .
- the discharge amount per unit time of the sealant is made smaller than the discharge amount in the high-speed movement area corresponding to the straight line portion S, so that the application amount per unit length is high. It should be the same as the application amount in the moving area. As a result, the application amount is prevented from increasing near the application start point O, and the expansion of the line width and thickness of the application pattern is prevented.
- the control device sets the motor 24 of the X-axis direction moving device 17 corresponding to the low speed moving area near corner C1 (indicated by W2 in FIG. 4). Decelerate to the specified rotation speed Vw. Synchronizing with the deceleration of the motor 24 of the movement device 17 in the X-axis, the control device rotates the rotation of the motor 41 of the discharge pump 32 from the first rotation speed VI to the second rotation speed V2 corresponding to the rotation speed Vw. To slow down.
- the control device decelerates and stops the motor 24 of the moving device 17 in the X-axis direction.
- the controller starts the rotation of the motor 25 of the moving device 18 in the Y-axis direction simultaneously with the start of the deceleration, and the relative movement of the substrate 31 and the nozzle 33 in the direction along the substrate 31 surface during the drawing of the corner C1 portion.
- the rotation speed is controlled so that the speed is constant.
- the control device operates during this period with the motor 41 of the discharge pump 32. Is maintained at the second rotation speed V2.
- the moving speed of the moving device 17 is lower than the moving speed of the linear portion S of the coating pattern P.
- the amount of sealant dispensed per unit time is less than the amount discharged in the high-speed moving area, and the amount applied per unit length is the same as the amount applied in the high-speed moving area.
- the application amount is prevented from increasing in the vicinity of corner C1, W2, and the expansion of the line width and thickness of the application pattern is prevented.
- the relative movement speed between the substrate 31 and the nozzle 33 is lower than the movement speed of the linear part S near the corner C1, the head 22 caused by the acceleration / deceleration of the moving devices 17 and 18 at the corner C1.
- By preventing vertical vibrations it is possible to prevent the occurrence of pattern breakage and variation in coating amount at corner C1 and near W2.
- the control device gradually slows down the rotation of the motor 41 of the discharge pump 32 in synchronism with the deceleration of the motor 24 of the moving device 17 in the X-axis direction, and the sealing agent. Reduce the discharge amount. As a result, the application amount is prevented from increasing in the vicinity of the application end point F, and the expansion of the coating pattern in the line width direction and thickness is prevented.
- the nozzle 33 is moved to the application start point O of the next pattern.
- this pattern is the last pattern to be formed on the substrate 31, it is not necessary to move the application end point F force to the application start point O. Thus, one cycle of applying the sealing agent on the glass substrate 31 is completed.
- the motor 41 for discharging the sealing agent from the nozzle 33 Increase the rotational speed and partially increase the amount of sealant applied from other parts I than the recesses G.
- the sealant When the sealant is applied to the substrate 31A with the rectangular coating pattern P so that the coating amount per unit length is constant, if there is a recess G on the surface of the substrate 31A, the recess G will The application height becomes low. In this case, the rotational speed of the motor 41 is increased so that the discharge amount per unit time of the sealing agent from the nozzle 33 is increased in the recess G. In this way, the height of the applied sealant (not the relative height of the surface force of the substrate 31A but the absolute height) is controlled to be constant.
- the position of the concave portion or the convex portion formed on the surface of the substrate 31A can be obtained by using design data of the substrate 31A or by measuring height data of the surface of the substrate 31A in advance. .
- the discharge pump 32 mechanically pushes out an amount (volume) of the sealant proportional to the amount of rotation of the motor 41 by rotating the screw 36 with the motor 41. Even if the viscosity of the agent changes or the remaining amount of the sealant in the cylinder 34 of the discharge pump 32 decreases, the rotational speed of the motor 41 of the discharge pump 32 is kept constant so that the sealant from the nozzle 33 The discharge amount per unit time can be kept constant.
- the amount of the sealing agent extruded by the mechanical extrusion by the screw portion 36A of the screw 36 accompanying the rotation of the screw 36 is set to the nozzle. Since it is discharged from the nozzle 33, the amount of the sealing agent pushed out by the threaded portion 36A can be discharged from the nozzle 33, and the discharge amount of the sealing agent at the nozzle 33 force of the discharge pump 32 is less susceptible to fluctuations in the gap. Always mechanically extrude a certain amount of sealant.
- the sealing agent can be applied on the substrate 31 in a uniform application amount, and the application accuracy of the sealing agent to the substrate 31 can be improved. Therefore, it is possible to manufacture a high quality liquid crystal display panel in which liquid crystal leakage and air intrusion are prevented.
- control for maintaining a constant gap between the nozzle 33 and the substrate 31, which is essential when the nozzle force is also discharged by the gas pressure, is unnecessary, or the frequency is increased. It is possible to reduce the number and simplify the control. This also eliminates or reduces the time required for the gap control process, thereby reducing the time required for applying the sealant and improving the efficiency.
- the discharge amount of the sealant from the nozzle 33 per unit time is controlled with good responsiveness by mechanical extrusion by the rotation of the screw 36.
- a coating pattern having a uniform coating amount force can be drawn on the substrate 31.
- the timing at which the stage 30 or the head 22 stops and the timing at which the sealing agent is stopped from being discharged from the nozzle 33 can be made the same each time. As a result, it is possible to draw with good reproducibility as the shapes of the sealing agent application start point O and the application end point F are set.
- the rotational speed of the motor 41 that discharges the sealant from the nozzle 33 according to the step or the recess G By changing the gas pressure applied to the cylinder 34 by changing the gas pressure applied to the cylinder 34, it is easier to change the amount of the sealant applied.
- the coating pattern P can be drawn with good reproducibility by the coating amount.
- the sealing agent can be discharged stably from the nozzle cover, preventing problems such as variations in the amount of the sealing agent applied and disconnection of the drawn sealing agent application pattern P. can do. This is particularly effective when the viscosity of the sealant is high or when the rotational speed of the screw 36 is high.
- the application of the pressing force to the sealant by the pressure gas is stopped while the screw 36 is stopped. Prevents the sealant from leaking out of the nozzle 33
- the relative movement speed of the straight line portion S may be left as it is.
- the screw 36 Since the sealing agent extruded by the mechanical extruding by the thread portion 36A is discharged from the nozzle 33, it is possible to prevent the paste discharge amount from the nozzle from changing.
- the paste can be applied to the substrate with the required application amount, and even in the vicinity of the corner C, the paste can be applied linearly with a uniform application amount, with high accuracy.
- a coating pattern can be formed.
- the force gap control described in the example of performing the gap control may be omitted.
- the gap control may not be performed at all, or the gap control may be performed only when the nozzle 33 is positioned at the coating start point O, and the gap control may be omitted during pattern drawing.
- the screw 36 is provided with a nozzle 33 having a cylinder 34 at its lower end.
- the example has been described so as to reach the bottom (tip) formed, but it may be arranged so as to provide a space 47 between its lower end and the bottom of the cylinder 34 as shown in FIG.
- the screw 48 is provided in the cylinder 34, the upper end portion is connected to the rotating shaft of the motor 41 via the connecting member 35, and the lower end portion is a free end.
- the screw 48 has a larger gap between its free end and the bottom of the cylinder 34 where the nozzle 33 is provided, than the distance between the free end of the screw 36 and the cylinder 34 shown in FIG. In the meantime, the sealant can be stored.
- the screw portion 36A of the screw 34 may be a plurality of strips having a force of two or more as described in the example of one strip.
- the number of rotations of the motor 41 required for this is 1 / n.
- the rotational speed of the motor 41 that drives the screw 36 to rotate is only lZn. It is possible to suppress the curing and deterioration of the agent due to heat generation, and it is possible to prevent the loss caused by discarding the expensive sealant.
- the paste can be applied to a target location on the substrate in a necessary amount, and the accuracy of applying the paste to the substrate can be further improved. Therefore, when the two substrates are glass substrates for manufacturing a liquid crystal display panel and the liquid material is liquid crystal, the liquid crystal display panel is manufactured with good quality in which liquid crystal leakage and air intrusion are prevented. It can be done.
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- Physics & Mathematics (AREA)
- Coating Apparatus (AREA)
- Nonlinear Science (AREA)
- Liquid Crystal (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Die Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2006536962A JPWO2006118088A1 (ja) | 2005-04-26 | 2006-04-25 | ペースト塗布装置及びペースト塗布方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2005-128691 | 2005-04-26 | ||
JP2005128691 | 2005-04-26 |
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WO2006118088A1 true WO2006118088A1 (ja) | 2006-11-09 |
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ID=37307888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2006/308593 WO2006118088A1 (ja) | 2005-04-26 | 2006-04-25 | ペースト塗布装置及びペースト塗布方法 |
Country Status (5)
Country | Link |
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JP (1) | JPWO2006118088A1 (zh) |
KR (1) | KR20070061772A (zh) |
CN (1) | CN1976760A (zh) |
TW (1) | TWI291901B (zh) |
WO (1) | WO2006118088A1 (zh) |
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WO2009044524A1 (ja) * | 2007-10-01 | 2009-04-09 | Musashi Engineering, Inc. | 液体材料の塗布装置、塗布方法およびプログラム |
JP2009098273A (ja) * | 2007-10-15 | 2009-05-07 | Shibaura Mechatronics Corp | ペースト塗布装置 |
JP2009148732A (ja) * | 2007-12-21 | 2009-07-09 | Hitachi Plant Technologies Ltd | ペースト塗布機とその塗布方法 |
JP2011125855A (ja) * | 2009-12-17 | 2011-06-30 | Ap Systems Inc | 塗布装置及びその動作方法 |
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- 2006-04-25 CN CNA2006800004133A patent/CN1976760A/zh active Pending
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KR101523294B1 (ko) * | 2007-10-01 | 2015-05-27 | 무사시 엔지니어링 가부시키가이샤 | 액체 재료의 도포 장치, 도포 방법 및 프로그램이 기억된 기억 매체 |
JP2009082859A (ja) * | 2007-10-01 | 2009-04-23 | Musashi Eng Co Ltd | 液体材料の塗布装置、塗布方法およびプログラム |
WO2009044524A1 (ja) * | 2007-10-01 | 2009-04-09 | Musashi Engineering, Inc. | 液体材料の塗布装置、塗布方法およびプログラム |
EP2202005A4 (en) * | 2007-10-01 | 2018-03-07 | Musashi Engineering, Inc. | Liquid material applicator, application method, and program |
JP2009098273A (ja) * | 2007-10-15 | 2009-05-07 | Shibaura Mechatronics Corp | ペースト塗布装置 |
JP2009148732A (ja) * | 2007-12-21 | 2009-07-09 | Hitachi Plant Technologies Ltd | ペースト塗布機とその塗布方法 |
JP2011125855A (ja) * | 2009-12-17 | 2011-06-30 | Ap Systems Inc | 塗布装置及びその動作方法 |
CN103537404A (zh) * | 2012-07-10 | 2014-01-29 | 株式会社日立制作所 | 浆料涂敷装置 |
JP2014108414A (ja) * | 2012-12-04 | 2014-06-12 | Nidec Machinery Corp | 液剤吐出装置および液剤吐出方法 |
WO2014092199A1 (ja) * | 2012-12-14 | 2014-06-19 | デクセリアルズ株式会社 | 画像表示装置の製造方法、樹脂用ディスペンサー |
US9651807B2 (en) | 2012-12-14 | 2017-05-16 | Dexerials Corporation | Method of producing image display device and resin dispenser |
US10703081B2 (en) | 2012-12-14 | 2020-07-07 | Dexerials Corporation | Method of producing image display device and resin dispenser |
US11137630B2 (en) | 2012-12-14 | 2021-10-05 | Dexerials Corporation | Method of producing image display device and resin dispenser |
JP2015139725A (ja) * | 2014-01-27 | 2015-08-03 | 兵神装備株式会社 | 流体塗布システムおよび流体塗布方法 |
WO2019013208A1 (ja) * | 2017-07-11 | 2019-01-17 | シャープ株式会社 | 塗布装置および塗布方法 |
WO2021032521A1 (de) * | 2019-08-19 | 2021-02-25 | Rampf Holding Gmbh & Co. Kg | Dosieranlage |
Also Published As
Publication number | Publication date |
---|---|
CN1976760A (zh) | 2007-06-06 |
TW200706259A (en) | 2007-02-16 |
KR20070061772A (ko) | 2007-06-14 |
TWI291901B (en) | 2008-01-01 |
JPWO2006118088A1 (ja) | 2008-12-18 |
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