WO2002093209A3 - Objektiv mit fluorid-kristall-linsen - Google Patents

Objektiv mit fluorid-kristall-linsen Download PDF

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Publication number
WO2002093209A3
WO2002093209A3 PCT/EP2002/005050 EP0205050W WO02093209A3 WO 2002093209 A3 WO2002093209 A3 WO 2002093209A3 EP 0205050 W EP0205050 W EP 0205050W WO 02093209 A3 WO02093209 A3 WO 02093209A3
Authority
WO
WIPO (PCT)
Prior art keywords
lens
lenses
fluoride crystal
crystal
twisted
Prior art date
Application number
PCT/EP2002/005050
Other languages
English (en)
French (fr)
Other versions
WO2002093209A2 (de
Inventor
Daniel Kraehmer
Toralf Gruner
Wilhelm Ulrich
Birgit Enkisch
Michael Gerhard
Martin Brunotte
Christian Wagner
Winfried Kaiser
Manfred Maul
Christoph Zaczek
Original Assignee
Zeiss Carl
Zeiss Carl Smt Ag
Daniel Kraehmer
Toralf Gruner
Wilhelm Ulrich
Birgit Enkisch
Michael Gerhard
Martin Brunotte
Christian Wagner
Winfried Kaiser
Manfred Maul
Christoph Zaczek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2001123727 external-priority patent/DE10123727A1/de
Priority claimed from DE10123725A external-priority patent/DE10123725A1/de
Priority claimed from DE2001125487 external-priority patent/DE10125487A1/de
Priority claimed from DE2001127320 external-priority patent/DE10127320A1/de
Priority claimed from DE2002110782 external-priority patent/DE10210782A1/de
Priority to EP02738037A priority Critical patent/EP1390783A2/de
Priority to KR10-2003-7015260A priority patent/KR20040015251A/ko
Priority to JP2002589833A priority patent/JP2004526331A/ja
Application filed by Zeiss Carl, Zeiss Carl Smt Ag, Daniel Kraehmer, Toralf Gruner, Wilhelm Ulrich, Birgit Enkisch, Michael Gerhard, Martin Brunotte, Christian Wagner, Winfried Kaiser, Manfred Maul, Christoph Zaczek filed Critical Zeiss Carl
Priority to CNB02828920XA priority patent/CN1327294C/zh
Priority to JP2004504053A priority patent/JP2005524985A/ja
Priority to KR10-2004-7017804A priority patent/KR20050003410A/ko
Priority to EP02807393A priority patent/EP1502157A1/de
Priority to AU2002356590A priority patent/AU2002356590A1/en
Priority to PCT/EP2002/012690 priority patent/WO2003096124A1/de
Publication of WO2002093209A2 publication Critical patent/WO2002093209A2/de
Priority to US10/367,989 priority patent/US7145720B2/en
Publication of WO2002093209A3 publication Critical patent/WO2002093209A3/de
Priority to US10/817,527 priority patent/US7180667B2/en
Priority to US10/931,745 priority patent/US7239447B2/en
Priority to US10/983,569 priority patent/US7292388B2/en
Priority to US11/029,788 priority patent/US7126765B2/en
Priority to US11/392,027 priority patent/US7382536B2/en
Priority to US11/765,200 priority patent/US20070242250A1/en
Priority to US11/864,193 priority patent/US7672044B2/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
    • G03F7/70966—Birefringence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/08—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of polarising materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70566—Polarisation control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

Objektiv, insbesondere Projektionsobjektiv für eine Mikrolithographie-Projektionsbelichtungsanlage mit mindestens einer Fluorid-Kristall-Linse. Eine Reduzierung des störenden Einflusses der Doppelbrechung erzielt man, wenn diese Linse eine (100)-Linse mit einer Linsenachse ist, welche annähernd senkrecht auf den{100}-Kristallebenen oder auf den dazu äquivalenten Kristallebenen des Fluorid-Kristalls steht. Bei Objektiven mit mindestens zwei Fluorid-Kristall-Linsen ist es günstig, wenn die Fluorid-Kristall-Linsen gegeneinander verdreht angeordnet sind. Die Linsenachsen der Fluorid-Kristall-Linsen können dabei neben der (100)-Kristallrichtung auch in die (111)-oder in die (110)-Kristallrichtung weisen. Eine weitere Reduzierung des störenden Einflusses der Doppelbrechung erzielt man durch den gleichzeitigen Einsatz von Gruppen mit gegeneinander verdrehten (100)-Linsen und Gruppen mit gegeneinander verdrehten (111)-Linsen oder (110)-Linsen. Eine weitere Reduzierung des störenden Einflusses der Doppelbrechung erzielt man durch die Belegung eines optischen Elements mit einer Kompensations-Beschichtung.
PCT/EP2002/005050 2001-05-15 2002-05-08 Objektiv mit fluorid-kristall-linsen WO2002093209A2 (de)

Priority Applications (17)

Application Number Priority Date Filing Date Title
EP02738037A EP1390783A2 (de) 2001-05-15 2002-05-08 Objektiv mit fluorid-kristall-linsen
KR10-2003-7015260A KR20040015251A (ko) 2001-05-15 2002-05-08 불화물 결정 렌즈들을 포함하는 렌즈 시스템
JP2002589833A JP2004526331A (ja) 2001-05-15 2002-05-08 フッ化物結晶レンズを含む対物レンズ
PCT/EP2002/012690 WO2003096124A1 (de) 2002-05-08 2002-11-13 Linse aus kristallmaterial
AU2002356590A AU2002356590A1 (en) 2002-05-08 2002-11-13 Lens consisting of a crystalline material
CNB02828920XA CN1327294C (zh) 2002-05-08 2002-11-13 用晶体材料制造透镜
EP02807393A EP1502157A1 (de) 2002-05-08 2002-11-13 Linse aus kristallmaterial
KR10-2004-7017804A KR20050003410A (ko) 2002-05-08 2002-11-13 결정물질로 이루어진 렌즈
JP2004504053A JP2005524985A (ja) 2002-05-08 2002-11-13 結晶材料からなるレンズ
US10/367,989 US7145720B2 (en) 2001-05-15 2003-02-12 Objective with fluoride crystal lenses
US10/817,527 US7180667B2 (en) 2001-05-15 2004-04-01 Objective with fluoride crystal lenses
US10/931,745 US7239447B2 (en) 2001-05-15 2004-09-01 Objective with crystal lenses
US10/983,569 US7292388B2 (en) 2002-05-08 2004-11-08 Lens made of a crystalline material
US11/029,788 US7126765B2 (en) 2001-05-15 2005-01-05 Objective with fluoride crystal lenses
US11/392,027 US7382536B2 (en) 2001-05-15 2006-03-29 Objective with fluoride crystal lenses
US11/765,200 US20070242250A1 (en) 2001-05-15 2007-06-19 Objective with crystal lenses
US11/864,193 US7672044B2 (en) 2002-05-08 2007-09-28 Lens made of a crystalline material

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
DE10123727.8 2001-05-15
DE10123725.1 2001-05-15
DE2001123727 DE10123727A1 (de) 2001-05-15 2001-05-15 Optisches Element, Projektionsobjektiv und Mikrolithographie-Projektionsbelichtungsanlage mit Fluoridkristall-Linsen
DE10123725A DE10123725A1 (de) 2001-05-15 2001-05-15 Projektionsbelichtungsanlage der Mikrolithographie, Optisches System und Herstellverfahren
DE10125487.3 2001-05-23
DE2001125487 DE10125487A1 (de) 2001-05-23 2001-05-23 Optisches Element, Projektionsobjektiv und Mikrolithographic-Projektionsbelichtungsanlage mit Fluoridkristall-Linsen
DE10127320.7 2001-06-06
DE2001127320 DE10127320A1 (de) 2001-06-06 2001-06-06 Objektiv mit Fluorid-Kristall-Linsen
DE2002110782 DE10210782A1 (de) 2002-03-12 2002-03-12 Objektiv mit Kristall-Linsen
DE10210782.3 2002-03-12

Related Child Applications (2)

Application Number Title Priority Date Filing Date
PCT/EP2002/012690 Continuation WO2003096124A1 (de) 2002-05-08 2002-11-13 Linse aus kristallmaterial
US10/367,989 Continuation US7145720B2 (en) 2001-05-15 2003-02-12 Objective with fluoride crystal lenses

Publications (2)

Publication Number Publication Date
WO2002093209A2 WO2002093209A2 (de) 2002-11-21
WO2002093209A3 true WO2002093209A3 (de) 2003-10-23

Family

ID=27512416

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/005050 WO2002093209A2 (de) 2001-05-15 2002-05-08 Objektiv mit fluorid-kristall-linsen

Country Status (6)

Country Link
US (4) US7145720B2 (de)
EP (1) EP1390783A2 (de)
JP (1) JP2004526331A (de)
KR (1) KR20040015251A (de)
TW (1) TW591242B (de)
WO (1) WO2002093209A2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
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US8861084B2 (en) 2004-01-16 2014-10-14 Carl Zeiss Smt Ag Polarization-modulating optical element
US9581911B2 (en) 2004-01-16 2017-02-28 Carl Zeiss Smt Gmbh Polarization-modulating optical element

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US20040190151A1 (en) 2004-09-30
US7382536B2 (en) 2008-06-03
US20060171020A1 (en) 2006-08-03
US7180667B2 (en) 2007-02-20
US20050122594A1 (en) 2005-06-09
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US7145720B2 (en) 2006-12-05
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US7126765B2 (en) 2006-10-24
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