WO2001045138A3 - Piezoelektrisches bauelement - Google Patents

Piezoelektrisches bauelement Download PDF

Info

Publication number
WO2001045138A3
WO2001045138A3 PCT/DE2000/004484 DE0004484W WO0145138A3 WO 2001045138 A3 WO2001045138 A3 WO 2001045138A3 DE 0004484 W DE0004484 W DE 0004484W WO 0145138 A3 WO0145138 A3 WO 0145138A3
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric component
component
electrode layers
copper
enabled
Prior art date
Application number
PCT/DE2000/004484
Other languages
English (en)
French (fr)
Other versions
WO2001045138A2 (de
Inventor
Adalbert Feltz
Sigrid Gansberger
Heinz Florian
Harald Kastl
Original Assignee
Epcos Ag
Adalbert Feltz
Sigrid Gansberger
Heinz Florian
Harald Kastl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos Ag, Adalbert Feltz, Sigrid Gansberger, Heinz Florian, Harald Kastl filed Critical Epcos Ag
Priority to AT00993455T priority Critical patent/ATE481743T1/de
Priority to JP2001545341A priority patent/JP4744052B2/ja
Priority to AU28307/01A priority patent/AU2830701A/en
Priority to DE50015994T priority patent/DE50015994D1/de
Priority to BR0016390-2A priority patent/BR0016390A/pt
Priority to EP00993455A priority patent/EP1240675B1/de
Publication of WO2001045138A2 publication Critical patent/WO2001045138A2/de
Publication of WO2001045138A3 publication Critical patent/WO2001045138A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
    • C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/638—Removal thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead based oxides
    • H10N30/8554—Lead zirconium titanate based
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3281—Copper oxides, cuprates or oxide-forming salts thereof, e.g. CuO or Cu2O
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6562—Heating rate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567—Treatment time
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6582—Hydrogen containing atmosphere
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6583—Oxygen containing atmosphere, e.g. with changing oxygen pressures
    • C04B2235/6584—Oxygen containing atmosphere, e.g. with changing oxygen pressures at an oxygen percentage below that of air
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6586—Processes characterised by the flow of gas
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6588—Water vapor containing atmospheres
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
    • C04B2235/721—Carbon content
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/76—Crystal structural characteristics, e.g. symmetry
    • C04B2235/768—Perovskite structure ABO3
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/785—Submicron sized grains, i.e. from 0,1 to 1 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/346—Titania or titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/348—Zirconia, hafnia, zirconates or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/407—Copper
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/125—Deflectable by temperature change [e.g., thermostat element]
    • Y10T428/12507—More than two components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Abstract

Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung. Die Erfindung betrifft ein piezoelektrisches Vielschicht-Bauelement, dessen Innen Elektrodenschichten Kupfer enthalten. Die Verwendung von Kupfer in den Elektrodenschichten wird ermöglicht durch einen Entbinderungsprozeß, der mittels Inentgas und Wasserdampf durchgeführt wird.
PCT/DE2000/004484 1999-12-16 2000-12-15 Piezoelektrisches bauelement WO2001045138A2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AT00993455T ATE481743T1 (de) 1999-12-16 2000-12-15 Zwischenprodukt für ein piezoelektrisches bauelement
JP2001545341A JP4744052B2 (ja) 1999-12-16 2000-12-15 圧電構造素子
AU28307/01A AU2830701A (en) 1999-12-16 2000-12-15 Piezoelectric component
DE50015994T DE50015994D1 (en) 1999-12-16 2000-12-15 Nt
BR0016390-2A BR0016390A (pt) 1999-12-16 2000-12-15 Componente piezelétrico
EP00993455A EP1240675B1 (de) 1999-12-16 2000-12-15 Zwischenprodukt für ein piezoelektrisches bauelement

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19960849.0 1999-12-16
DE19960849 1999-12-16

Publications (2)

Publication Number Publication Date
WO2001045138A2 WO2001045138A2 (de) 2001-06-21
WO2001045138A3 true WO2001045138A3 (de) 2002-03-14

Family

ID=7932991

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/004484 WO2001045138A2 (de) 1999-12-16 2000-12-15 Piezoelektrisches bauelement

Country Status (9)

Country Link
US (3) US20020098333A1 (de)
EP (2) EP2278634A3 (de)
JP (2) JP4744052B2 (de)
CN (1) CN1246914C (de)
AT (1) ATE481743T1 (de)
AU (1) AU2830701A (de)
BR (1) BR0016390A (de)
DE (3) DE20023051U1 (de)
WO (1) WO2001045138A2 (de)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2278634A3 (de) * 1999-12-16 2012-09-05 Epcos Ag Piezoelektrisches Bauelement
DE10033588C2 (de) * 2000-07-11 2002-05-16 Bosch Gmbh Robert Keramisches Mehrlagenbauteil und Verfahren zu dessen Herstellung
JP2002261345A (ja) * 2000-12-28 2002-09-13 Denso Corp 積層一体焼成型の電気機械変換素子
JP2002260951A (ja) * 2000-12-28 2002-09-13 Denso Corp 積層型誘電素子及びその製造方法，並びに電極用ペースト材料
DE10227509A1 (de) * 2002-04-22 2003-11-06 Elliptec Resonant Actuator Ag Piezomotor
DE10141820A1 (de) * 2001-08-27 2003-03-20 Elliptec Resonant Actuator Ag Piezomotor mit Kupferelektroden
DE10146704A1 (de) * 2001-09-21 2003-04-10 Elliptec Resonant Actuator Ag Piezomotoren mit Piezoelementen, hergestellt nach dem Keramikkondensatorverfahren
JP4225033B2 (ja) * 2001-12-14 2009-02-18 株式会社日本自動車部品総合研究所 セラミック積層体とその製造方法
DE10205877A1 (de) * 2002-02-13 2003-09-04 Epcos Ag Keramisches Vielschichtbauelement, Verfahren zu dessen Herstellung und Haltevorrichtung
JP3884669B2 (ja) * 2002-04-05 2007-02-21 株式会社デンソー セラミック積層体の製造方法
US6936301B2 (en) * 2002-05-06 2005-08-30 North Carolina State University Methods of controlling oxygen partial pressure during annealing of a perovskite dielectric layer
JP3678234B2 (ja) * 2002-07-25 2005-08-03 株式会社村田製作所 積層型圧電部品の製造方法、及び積層型電子部品
DE10245130A1 (de) * 2002-09-27 2004-04-08 Epcos Ag Piezoelektrischer Transformator mit Cu-Innenelektroden
DE10249900A1 (de) * 2002-10-25 2004-05-06 Epcos Ag Piezoelektrisches Bauelement
JP4590868B2 (ja) * 2003-02-12 2010-12-01 株式会社デンソー 積層型圧電体素子及びその製造方法
JP4698161B2 (ja) * 2003-05-13 2011-06-08 独立行政法人科学技術振興機構 圧電材料とその製造方法
DE10326040A1 (de) 2003-06-10 2004-12-30 Robert Bosch Gmbh Verfahren zur Herstellung von keramischen Grünfolien für keramische Bauteile
DE10345499A1 (de) 2003-09-30 2005-04-28 Epcos Ag Piezoelektrisches Keramikmaterial, Vielschichtbauelement und Verfahren zur Herstellung des Keramikmaterials
DE10345500B4 (de) * 2003-09-30 2015-02-12 Epcos Ag Keramisches Vielschicht-Bauelement
JP4028508B2 (ja) * 2004-03-26 2007-12-26 Ｔｄｋ株式会社 積層セラミック素子の製造方法
US7713896B2 (en) 2004-04-14 2010-05-11 Robert Bosch Gmbh Method for producing ceramic green compacts for ceramic components
DE102004020329A1 (de) * 2004-04-26 2005-11-10 Epcos Ag Elektrische Funktionseinheit und Verfahren zu deren Herstellung
JP2006196717A (ja) * 2005-01-14 2006-07-27 Nec Tokin Corp 積層型圧電セラミックス素子およびその製造方法
DE102005017108A1 (de) * 2005-01-26 2006-07-27 Epcos Ag Piezoelektrisches Bauelement
JP3923064B2 (ja) * 2005-03-25 2007-05-30 Ｔｄｋ株式会社 積層型圧電素子及びその製造方法
JP4873327B2 (ja) * 2005-06-03 2012-02-08 株式会社村田製作所 圧電素子
JP2007230839A (ja) * 2006-03-02 2007-09-13 Tdk Corp 圧電磁器組成物、積層型圧電素子及びその製造方法
CA2561615A1 (en) * 2005-10-04 2007-04-04 Tdk Corporation Piezoelectric ceramic composition and laminated piezoelectric element
JP4877232B2 (ja) * 2005-12-08 2012-02-15 株式会社村田製作所 積層型圧電素子およびその製造方法
DE102005061529B4 (de) 2005-12-22 2008-04-17 Siemens Ag Bleizirkonattitanat mit Nickel-Molybdän-Dotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils unter Verwendung des Bleizirkonattitanats und Verwendung des piezokeramischen Bauteils
JP2007258280A (ja) * 2006-03-20 2007-10-04 Tdk Corp 積層型圧電素子
JPWO2008068975A1 (ja) * 2006-12-06 2010-03-18 株式会社村田製作所 積層型圧電素子及びその製造方法
JP4711083B2 (ja) * 2006-12-27 2011-06-29 Ｔｄｋ株式会社 積層型圧電素子
DE102007029600A1 (de) * 2007-06-27 2009-01-02 Siemens Ag Bleizirkonattitanat mit Scandium-Wolfram-Dotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils unter Verwendung des Bleizirkonattitanats und Verwendung des piezokeramischen Bauteils
DE102007029613A1 (de) * 2007-06-27 2009-01-02 Siemens Ag Bleizirkonattitanat mit Nickel-Wolfram-Dotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils unter Verwendung des Bleizirkonattitanats und Verwendung des piezokeramischen Bauteils
DE102007029601A1 (de) * 2007-06-27 2009-01-02 Siemens Ag Bleizirkonattitanat mit Eisen-Niob-Wolfram-Dotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils unter Verwendung des Bleizirkonattitanats und Verwendung des piezokeramischen Bauteils
DE102007037554A1 (de) 2007-08-09 2009-02-12 Robert Bosch Gmbh Piezoelektrischer Aktor
DE102009047512A1 (de) 2009-04-09 2010-10-14 Robert Bosch Gmbh Aktormodul und Brennstoffeinspritzventil
DE102009002304A1 (de) 2009-04-09 2010-10-14 Robert Bosch Gmbh Piezoelektrischer Aktor und Verfahren zur Herstellung eines piezoelektrischen Aktors
DE102010027845A1 (de) 2010-04-16 2011-10-20 Robert Bosch Gmbh Piezoelektrischer Aktor
DE102010062112A1 (de) 2010-04-16 2011-10-20 Robert Bosch Gmbh Verfahren zum Heißpolarisieren eines piezokeramischen Bauelements
DE102010030206A1 (de) 2010-06-17 2011-12-22 Robert Bosch Gmbh Messverfahren für einen thermischen Prozess
DE102011003079B4 (de) 2011-01-25 2021-01-07 Robert Bosch Gmbh Verfahren zum Sintern von Bauteilen
DE102011003078A1 (de) 2011-01-25 2012-07-26 Robert Bosch Gmbh Sinterhilfsmittel zum Aufnehmen von Bauteilen und Verfahren zum Sintern von Bauteilen
DE102011077263A1 (de) 2011-06-09 2012-12-13 Robert Bosch Gmbh Piezoelektrischer Aktor und Verfahren zur Herstellung eines piezoelektrischen Aktors
DE102011112008B4 (de) * 2011-08-30 2018-01-11 Epcos Ag Piezoelektrisches Bauelement und Verfahren zur Herstellung eines piezoelektrischen Bauelements
DE102011117709A1 (de) 2011-11-04 2013-05-08 Epcos Ag Keramikmaterial, Verfahren zur Herstellung desselben und elektrokeramisches Bauelement umfassend das Keramikmaterial
JP6144753B2 (ja) * 2012-04-10 2017-06-07 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ セラミック材料およびこのセラミック材料を備えるコンデンサ
DE102012104033A1 (de) 2012-05-08 2013-11-14 Epcos Ag Keramischer Vielschichtkondensator
US9511393B2 (en) * 2012-08-17 2016-12-06 The Boeing Company Flexible ultrasound inspection system
US9324931B2 (en) 2013-05-14 2016-04-26 Tdk Corporation Piezoelectric device
US20140339458A1 (en) * 2013-05-14 2014-11-20 Tdk Corporation Piezoelectric ceramic and piezoelectric device containing the same
JP6428345B2 (ja) * 2015-02-16 2018-11-28 三菱マテリアル株式会社 Ｐｔｚｔ圧電体膜及びその圧電体膜形成用液組成物の製造方法
CN111302798B (zh) * 2020-02-25 2022-02-22 西安工业大学 一种氧化镧掺杂改性的铌酸钾钠基透明陶瓷及其制备方法
JP2021158247A (ja) * 2020-03-27 2021-10-07 Tdk株式会社 圧電素子、圧電アクチュエータ、および圧電トランス
DE102020116805A1 (de) * 2020-06-25 2021-12-30 Heraeus Deutschland GmbH & Co. KG Sinterverfahren für elektrische Durchführungen
JP2024504904A (ja) 2021-01-28 2024-02-02 ケメット エレクトロニクス コーポレーション 誘電体セラミック組成物及び同誘電体セラミック組成物を使用したセラミックコンデンサ

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4353958A (en) * 1979-02-22 1982-10-12 Narumi China Corporation Green ceramic tapes and method of producing them
US4755493A (en) * 1985-10-11 1988-07-05 Ngk Insulators, Ltd. Ceramic composition for dielectric ceramic bodies
JPH04171990A (ja) * 1990-11-06 1992-06-19 Toto Ltd 圧電セラミック焼結体
JPH04324687A (ja) * 1991-04-24 1992-11-13 Onoda Cement Co Ltd 卑金属電極材料
US5433917A (en) * 1993-09-16 1995-07-18 The Penn State Research Foundation PZT ceramic compositions having reduced sintering temperatures and process for producing same
US5648012A (en) * 1994-12-22 1997-07-15 Kyocera Corporation Piezoelectric ceramic composition
DE19916380A1 (de) * 1998-04-13 1999-10-14 Murata Manufacturing Co Piezoelektrische Keramik und Verfahren zur Herstellung eines piezoelektrischen keramischen Elementes
WO2001024287A2 (de) * 1999-09-30 2001-04-05 Robert Bosch Gmbh Innenelektroden für einen piezostapelaktor und zugehöriges herstellung-verfahren

Family Cites Families (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4189760A (en) * 1973-05-13 1980-02-19 Erie Technological Products, Inc. Monolithic capacitor with non-noble metal electrodes and method of making the same
US3809973A (en) * 1973-07-06 1974-05-07 Sprague Electric Co Multilayer ceramic capacitor and method of terminating
US4063341A (en) * 1975-07-09 1977-12-20 E. I. Du Pont De Nemours And Company Process for making multilayer capacitors
JPS5946112B2 (ja) * 1975-12-29 1984-11-10 三菱油化株式会社 アツデンザイリヨウ
US4078284A (en) * 1977-04-04 1978-03-14 Zenith Radio Corporation Piezoelectric substrate fabrication process
JPS6047753B2 (ja) * 1978-06-01 1985-10-23 日本特殊陶業株式会社 圧電性高分子複合材料
US4347167A (en) * 1980-10-01 1982-08-31 University Of Illinois Foundation Fine-grain semiconducting ceramic compositions
US5112433A (en) * 1988-12-09 1992-05-12 Battelle Memorial Institute Process for producing sub-micron ceramic powders of perovskite compounds with controlled stoichiometry and particle size
US4988909A (en) * 1989-01-20 1991-01-29 Mitsui Toatsu Chemicals, Inc. Piezoelectric element with giant electrostrictive effect and ceramic composition for preparing same
JPH0666219B2 (ja) * 1989-02-22 1994-08-24 株式会社村田製作所 積層セラミックスコンデンサ
JP2615977B2 (ja) * 1989-02-23 1997-06-04 松下電器産業株式会社 誘電体磁器組成物およびこれを用いた積層セラミックコンデンサとその製造方法
US5014158A (en) * 1989-04-11 1991-05-07 Matsushita Electric Industrial Co., Ltd. Laminated ceramic capacitor
US5163209A (en) 1989-04-26 1992-11-17 Hitachi, Ltd. Method of manufacturing a stack-type piezoelectric element
JPH02303078A (ja) * 1989-05-17 1990-12-17 Murata Mfg Co Ltd 圧電性磁器組成物
JP2881424B2 (ja) 1989-07-25 1999-04-12 京セラ株式会社 圧電磁器
JP2536671B2 (ja) * 1990-07-09 1996-09-18 株式会社村田製作所 圧電性磁器の製造方法
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
JPH05190376A (ja) * 1991-07-19 1993-07-30 Toshiba Corp セラミックコンデンサ
US5335139A (en) * 1992-07-13 1994-08-02 Tdk Corporation Multilayer ceramic chip capacitor
JP3151644B2 (ja) * 1993-03-08 2001-04-03 日本碍子株式会社 圧電／電歪膜型素子
US5390949A (en) * 1993-03-08 1995-02-21 The University Of Toledo Active suspension systems and components using piezoelectric sensing and actuation devices
US5340510A (en) * 1993-04-05 1994-08-23 Materials Systems Incorporated Method for making piezoelectric ceramic/polymer composite transducers
DE4332831C1 (de) * 1993-09-27 1994-10-06 Fraunhofer Ges Forschung Formkörper auf der Basis von PZT (Pb(Zr,Ti)O¶3¶, Bleizirkonat-Bleititanat), Verfahren und Zwischenprodukt zu deren Herstellung
JPH07277822A (ja) 1994-04-11 1995-10-24 Matsushita Electric Ind Co Ltd 圧電素子材料及びその製造方法
JPH0826824A (ja) * 1994-07-08 1996-01-30 Matsushita Electric Ind Co Ltd 圧電磁器組成物およびその製造方法
JPH08167536A (ja) * 1994-12-14 1996-06-25 Tdk Corp 銅内部電極積層セラミックコンデンサの製造方法
JP3266483B2 (ja) * 1995-11-30 2002-03-18 京セラ株式会社 圧電磁器組成物
JP2570644B2 (ja) * 1994-12-26 1997-01-08 日本電気株式会社 圧電セラミックス
JPH08301654A (ja) * 1995-05-10 1996-11-19 Matsushita Electric Ind Co Ltd 圧電磁器組成物及びその製造方法
DE19615694C1 (de) * 1996-04-19 1997-07-03 Siemens Ag Monolithischer Vielschicht-Piezoaktor und Verfahren zur Herstellung
DE19615695C1 (de) * 1996-04-19 1997-07-03 Siemens Ag Verfahren zur Herstellung eines Piezoaktors monolithischer Vielschichtbauweise
DE19716356A1 (de) * 1996-04-26 1997-10-30 Murata Manufacturing Co Verfahren zur Herstellung von monolithischen elektronischen Teilen
JPH1017364A (ja) * 1996-06-28 1998-01-20 Kyocera Corp 圧電磁器組成物
DE19646676C1 (de) * 1996-11-12 1998-04-23 Siemens Ag Piezoaktor mit neuartiger Kontaktierung und Herstellverfahren
DE19700463A1 (de) 1997-01-09 1998-07-16 Robel Georg Gmbh & Co Schienenverfahrbarer Wagen zum Abziehen langverschweißter Schienen von Transportwagen
JPH1149572A (ja) * 1997-08-01 1999-02-23 Honda Motor Co Ltd セラミックス複合粒子及びその製造方法
JP3831537B2 (ja) 1997-10-27 2006-10-11 Ｔｄｋ株式会社 電子デバイスおよびその製造方法
DE19749858C1 (de) * 1997-11-11 1999-04-22 Siemens Matsushita Components Reduktionsstabile Keramikmassen, Verfahren zur Herstellung und Verwendung
JP3538700B2 (ja) 1998-02-23 2004-06-14 株式会社村田製作所 抵抗材料、これを用いた抵抗ペーストおよび抵抗体、ならびにセラミック多層基板
JP3955389B2 (ja) 1998-05-12 2007-08-08 松下電器産業株式会社 コンデンサ内蔵基板およびその製造方法
US6266230B1 (en) * 1998-06-29 2001-07-24 Matsushita Electric Industrial Co., Ltd. Multilayer ceramic capacitor
DE19841487C2 (de) * 1998-09-10 2002-03-14 Epcos Ag Reduktionsstabile Keramikmasse und ihre Verwendung
US6182340B1 (en) * 1998-10-23 2001-02-06 Face International Corp. Method of manufacturing a co-fired flextensional piezoelectric transformer
DE19860001C2 (de) * 1998-12-23 2001-10-04 Epcos Ag Piezoelektrisches Bauelement, Verfahren zu dessen Herstellung und Verwendung eines derartigen Bauelements
JP3596743B2 (ja) * 1999-08-19 2004-12-02 株式会社村田製作所 積層セラミック電子部品の製造方法及び積層セラミック電子部品
US6692598B1 (en) * 1999-10-18 2004-02-17 Murata Manufacturing Co. Ltd Method of producing ceramic green sheet and method of manufacturing multilayer ceramic electronic part
JP2001126946A (ja) * 1999-10-28 2001-05-11 Murata Mfg Co Ltd 積層セラミック電子部品及びその製造方法
EP2278634A3 (de) * 1999-12-16 2012-09-05 Epcos Ag Piezoelektrisches Bauelement
DE10035172B4 (de) * 2000-07-19 2004-09-16 Epcos Ag Keramikmasse und Kondensator mit der Keramikmasse
DE10201641A1 (de) * 2002-01-17 2003-08-07 Epcos Ag Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung
DE10249900A1 (de) * 2002-10-25 2004-05-06 Epcos Ag Piezoelektrisches Bauelement
US7272876B2 (en) * 2002-11-05 2007-09-25 Nippon Soken, Inc. Method for fabricating laminate-type dielectric element
DE10307825A1 (de) * 2003-02-24 2004-09-09 Epcos Ag Elektrisches Vielschichtbauelement und Schichtstapel
US7713896B2 (en) * 2004-04-14 2010-05-11 Robert Bosch Gmbh Method for producing ceramic green compacts for ceramic components
DE502006005359D1 (de) * 2005-07-26 2009-12-24 Siemens Ag Verfahren zum herstellen eines monolithischen piezoaktors mit teilstapeln, monolithischer piezoaktor mit teilstapeln und verwendung des piezoaktors
DE102005061529B4 (de) * 2005-12-22 2008-04-17 Siemens Ag Bleizirkonattitanat mit Nickel-Molybdän-Dotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils unter Verwendung des Bleizirkonattitanats und Verwendung des piezokeramischen Bauteils
DE102005061528B8 (de) * 2005-12-22 2010-06-10 Siemens Ag Piezokeramisches Bauteil mit Bleizirkonattitanat mit Eisen-Wolfram-Dotierung, Verfahren zum Herstellen des piezokeramischen Bauteils und seine Verwendung

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4353958A (en) * 1979-02-22 1982-10-12 Narumi China Corporation Green ceramic tapes and method of producing them
US4755493A (en) * 1985-10-11 1988-07-05 Ngk Insulators, Ltd. Ceramic composition for dielectric ceramic bodies
JPH04171990A (ja) * 1990-11-06 1992-06-19 Toto Ltd 圧電セラミック焼結体
JPH04324687A (ja) * 1991-04-24 1992-11-13 Onoda Cement Co Ltd 卑金属電極材料
US5433917A (en) * 1993-09-16 1995-07-18 The Penn State Research Foundation PZT ceramic compositions having reduced sintering temperatures and process for producing same
US5648012A (en) * 1994-12-22 1997-07-15 Kyocera Corporation Piezoelectric ceramic composition
DE19916380A1 (de) * 1998-04-13 1999-10-14 Murata Manufacturing Co Piezoelektrische Keramik und Verfahren zur Herstellung eines piezoelektrischen keramischen Elementes
WO2001024287A2 (de) * 1999-09-30 2001-04-05 Robert Bosch Gmbh Innenelektroden für einen piezostapelaktor und zugehöriges herstellung-verfahren

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
HIRAKATA K ET AL: "Multilayer capacitors with copper inner electrodes", FERROELECTRICS, vol. 133, no. 1-4, 1992, pages 139 - 144, XP001010835, ISSN: 0015-0193 *
NAGATA K: "Properties of piezoelectric ceramics sintered in reducing atmosphere", JAPANESE JOURNAL OF APPLIED PHYSICS, PART 1 (REGULAR PAPERS & SHORT NOTES), vol. 30, no. 9B, September 1991 (1991-09-01), pages 2224 - 2227, XP000269860, ISSN: 0021-4922 *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 478 (E - 1274) 5 October 1992 (1992-10-05) *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 165 (E - 1343) 30 March 1993 (1993-03-30) *

Also Published As

Publication number Publication date
DE50015994D1 (en) 2010-10-28
WO2001045138A2 (de) 2001-06-21
DE10062672B4 (de) 2010-01-21
BR0016390A (pt) 2002-08-20
JP2003529917A (ja) 2003-10-07
DE20023051U1 (de) 2003-01-09
DE10062672B9 (de) 2012-07-12
US7855488B2 (en) 2010-12-21
EP1240675A2 (de) 2002-09-18
US8209828B2 (en) 2012-07-03
CN1409876A (zh) 2003-04-09
EP2278634A3 (de) 2012-09-05
US20060251911A1 (en) 2006-11-09
CN1246914C (zh) 2006-03-22
ATE481743T1 (de) 2010-10-15
JP2007150350A (ja) 2007-06-14
JP4744052B2 (ja) 2011-08-10
US20100294419A1 (en) 2010-11-25
AU2830701A (en) 2001-06-25
JP4248581B2 (ja) 2009-04-02
EP2278634A2 (de) 2011-01-26
EP1240675B1 (de) 2010-09-15
US20020098333A1 (en) 2002-07-25
DE10062672A1 (de) 2001-08-02

Similar Documents

Publication Publication Date Title
WO2001045138A3 (de) Piezoelektrisches bauelement
AU2003232469A1 (en) Method for the production of structured layers on substrates
AU2001297832A1 (en) Methods and apparatus for using large inertial body forces to identify, process and manufacture multicomponent bulk metallic glass forming alloys, and components fabricated therefrom
AU2003298051A1 (en) Method for the production of a sandwich structure for a sandwich composite
EP1533274B8 (de) Verfahren zur herstellung eines mischoxids vom perowskit-typ
AU5628196A (en) Process for the removal of highly concentrated carbon dioxide from high-pressure natural gas
NO995445D0 (no) Fremgangsmåte for fremstilling av et dekorativt laminat, et dekorativt laminat fremstilt ved hjelp av fremgangsmÕten og anvendelse derav
AU2002310868A1 (en) Method for the production of biologically-degradable packagings made from biaxially-drawn films
AU7845498A (en) A method for the removal of carbon dioxide from a process gas
AU568233B2 (en) Non-condensible gas process for the enhanced recovery of hydrocarbons
AU2003242146A1 (en) Method of storing hydrogen, hydrogen inclusion compound and process for producing the same
WO2003095701A8 (en) Volatile copper(ii) complexes for deposition of copper films by atomic layer deposition
AU2003242164A1 (en) Method for producing porous metal by composite physical vapour deposition and the equipment thereof
WO2005025714A3 (en) High capacity adsorption media for separating or removing constituents and methods of producing and using the adsorption media
WO2003085174A3 (de) Vorrichtung und verfahren zur entfernung von oberflächenbereichen eines bauteils
AU2002364333A1 (en) Method for monitoring the course of a process using a reactive gas containing one or several hydrocarbons
WO2004051729A3 (de) Verfahren und vorrichtung zur vorbehandlung der oberflächen von zu bondenden substraten
ZA9811527B (en) Process for gas separation by adsorption with variable production rate
AU2002367050A1 (en) Process for the production of diglycerides
FR2771332B1 (fr) Procede pour la realisation de pieces de grandes dimensions, notamment de coques de bateaux en stratifie
AU5330590A (en) Process for the continuous recovery of hydrogen fluoride gas
AU3322489A (en) Method for the production of metals, particularly ferroalloys, by direct reduction and a column for treating particulate materials with gas
AU8027500A (en) Process and apparatus for the manufacture of high peel-strength copper foil
AU5035499A (en) Improved apparatus and method for the production of multi-layer preforms
AU2001253895A1 (en) Process for the production of gasoline stocks

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
WD Withdrawal of designations after international publication

Free format text: DE

AK Designated states

Kind code of ref document: A3

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

WWE Wipo information: entry into national phase

Ref document number: 008172218

Country of ref document: CN

ENP Entry into the national phase

Ref country code: JP

Ref document number: 2001 545341

Kind code of ref document: A

Format of ref document f/p: F

WWE Wipo information: entry into national phase

Ref document number: 2000993455

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 2000993455

Country of ref document: EP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642