JP4877232B2 - 積層型圧電素子およびその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000000919 ceramic Substances 0.000 claims description 88
- 238000010304 firing Methods 0.000 claims description 54
- 229910044991 metal oxide Inorganic materials 0.000 claims description 46
- 150000004706 metal oxides Chemical class 0.000 claims description 46
- 230000007423 decrease Effects 0.000 claims description 33
- 239000000843 powder Substances 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 19
- 229910052758 niobium Inorganic materials 0.000 claims description 11
- 229910052787 antimony Inorganic materials 0.000 claims description 8
- 229910052715 tantalum Inorganic materials 0.000 claims description 8
- 239000002131 composite material Substances 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 229910052726 zirconium Inorganic materials 0.000 claims description 7
- 238000010030 laminating Methods 0.000 claims description 3
- 238000003475 lamination Methods 0.000 claims description 2
- 239000000203 mixture Substances 0.000 description 23
- 239000000523 sample Substances 0.000 description 23
- 238000009792 diffusion process Methods 0.000 description 20
- 150000001768 cations Chemical class 0.000 description 16
- 239000007787 solid Substances 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 229910001252 Pd alloy Inorganic materials 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 3
- -1 Nb 2 O 5 Chemical class 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910017489 Cu I Inorganic materials 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 239000012856 weighed raw material Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
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Description
11 圧電セラミックス層
21、22 内部電極層
図1は、本発明の積層型圧電素子の一実施の形態を示す断面図である。
秤量した素原料を混合して16時間の粉砕後、880℃で仮焼することによって圧電セラミックスの仮焼粉を得た。この仮焼粉をバインダや可塑剤と混練し、ドクターブレード法によって厚さ120μmの圧電セラミックグリーンシートを得た。
Claims (6)
- 内部電極層と圧電セラミックス層とが交互に積層されてなる素体を有する積層型圧電素子であって、
前記内部電極層が、Cuを主成分とすると共に、前記圧電セラミックス層が、Pb(Ti,Zr)O3で表される複合酸化物を主成分とし、
5価および6価のうちの少なくともいずれか一方の金属元素を含有した金属酸化物が、前記内部電極層から離間するにつれて濃度が小さくなるように、前記圧電セラミックス層に含有されていることを特徴とする積層型圧電素子。 - 前記金属元素は、Nb、Sb、Ta、及びWの中から選択された少なくとも一種であることを特徴とする請求項1記載の積層型圧電素子。
- 内部電極パターンと圧電セラミックグリーンシートとが交互に積層された積層体を作製する積層工程と、前記積層体を焼成して内部電極層と圧電セラミックス層とが交互に積層された素体を作製する焼成工程とを含む積層型圧電素子の製造方法であって、
前記圧電セラミックグリーンシートは、Pb(Ti,Zr)O3で表される複合酸化物が主成分とし、
前記内部電極パターンは、Cuを含有した導電性粉末と、5価および6価のうちの少なくともいずれか一方の価数を有する金属元素を含み、
前記焼成工程において、前記金属元素を金属酸化物の形態で、前記内部電極層から前記圧電セラミックス層中に、前記内部電極層から離間するにつれて濃度が小さくなるように拡散させることを特徴とする積層型圧電素子の製造方法。 - 前記金属元素は、Nb、Sb、Ta、及びWの中から選択された少なくとも一種であることを特徴とする請求項3記載の積層型圧電素子の製造方法。
- 前記金属酸化物は、Nb2O5、Sb2O5、Ta2O5、及びWO3のうちのいずれかで表わされることを特徴とする請求項3または請求項4記載の積層型圧電素子の製造方法。
- 前記金属酸化物の含有量は、前記導電性粉末と前記金属酸化物との含有量総計に対して40.0重量%未満であることを特徴とする請求項3ないし請求項5のいずれかに記載の積層型圧電素子の製造方法。
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EP1840105B1 (en) * | 2004-12-22 | 2011-08-24 | Murata Manufacturing Co., Ltd. | Piezoelectric porcelain composition and piezoelectric actuator |
JP2007188963A (ja) * | 2006-01-11 | 2007-07-26 | Tdk Corp | 導電ペースト及びそれを用いた積層型セラミック素子の製造方法 |
EP2042851A4 (en) * | 2006-07-04 | 2012-10-24 | Ngk Insulators Ltd | PIEZOELECTRIC FILMSENSOR |
JP5183986B2 (ja) * | 2006-07-26 | 2013-04-17 | 日本碍子株式会社 | 圧電/電歪素子、圧電/電歪セラミックス組成物及び圧電モータ |
WO2008068975A1 (ja) * | 2006-12-06 | 2008-06-12 | Murata Manufacturing Co., Ltd. | 積層型圧電素子及びその製造方法 |
WO2009050299A1 (de) * | 2007-10-18 | 2009-04-23 | Ceramtec Ag | Piezokeramisches vielschichtelement |
US8456066B2 (en) * | 2009-07-10 | 2013-06-04 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive material, piezoelectric / electrostrictive ceramic composition, piezoelectric / electrostrictive element, and piezoelectric motor |
JP5556880B2 (ja) * | 2010-03-05 | 2014-07-23 | 株式会社村田製作所 | セラミック電子部品、及びセラミック電子部品の製造方法 |
JP5791370B2 (ja) * | 2010-06-10 | 2015-10-07 | キヤノン株式会社 | 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置 |
DE102011112008B4 (de) * | 2011-08-30 | 2018-01-11 | Epcos Ag | Piezoelektrisches Bauelement und Verfahren zur Herstellung eines piezoelektrischen Bauelements |
US9099897B2 (en) | 2011-09-13 | 2015-08-04 | L.H. Carbide Corporation | Method for connecting end sections of an annular laminated article and articles made therefrom |
KR101454341B1 (ko) * | 2013-10-14 | 2014-10-27 | 한국교통대학교산학협력단 | Pzt계 압전 세라믹 및 그 제조 방법 |
TWI624969B (zh) * | 2015-10-09 | 2018-05-21 | Ngk Spark Plug Co Ltd | Piezoelectric element, piezoelectric actuator and piezoelectric transformer |
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US20100107390A1 (en) | 2010-05-06 |
KR100984447B1 (ko) | 2010-09-29 |
WO2007066453A1 (ja) | 2007-06-14 |
EP1959510A1 (en) | 2008-08-20 |
EP1959510A4 (en) | 2012-07-11 |
CN101326651B (zh) | 2010-07-14 |
US20080231147A1 (en) | 2008-09-25 |
KR20080074962A (ko) | 2008-08-13 |
JPWO2007066453A1 (ja) | 2009-05-14 |
US7667377B2 (en) | 2010-02-23 |
CN101326651A (zh) | 2008-12-17 |
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