US20020043683A1 - Semiconductor device and its manufacturing method - Google Patents

Semiconductor device and its manufacturing method Download PDF

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Publication number
US20020043683A1
US20020043683A1 US09/964,592 US96459201A US2002043683A1 US 20020043683 A1 US20020043683 A1 US 20020043683A1 US 96459201 A US96459201 A US 96459201A US 2002043683 A1 US2002043683 A1 US 2002043683A1
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Prior art keywords
film
gate
insulating film
memory cell
layer
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Abandoned
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US09/964,592
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English (en)
Inventor
Shin-ichi Nakagawa
Mitsuteru Iijima
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Fujitsu Ltd
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Fujitsu Ltd
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Assigned to FUJITSU LIMITED reassignment FUJITSU LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: IIJIMA, MITSUTERU, NAKAGAWA, SHIN-ICHI
Publication of US20020043683A1 publication Critical patent/US20020043683A1/en
Priority to US10/423,963 priority Critical patent/US20040075133A1/en
Priority to US11/602,246 priority patent/US7476582B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
    • H01L21/823842—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823857—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
    • H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H10B41/42—Simultaneous manufacture of periphery and memory cells
    • H10B41/43—Simultaneous manufacture of periphery and memory cells comprising only one type of peripheral transistor
    • H10B41/48—Simultaneous manufacture of periphery and memory cells comprising only one type of peripheral transistor with a tunnel dielectric layer also being used as part of the peripheral transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H10B41/42—Simultaneous manufacture of periphery and memory cells
    • H10B41/49—Simultaneous manufacture of periphery and memory cells comprising different types of peripheral transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
US09/964,592 2000-09-29 2001-09-28 Semiconductor device and its manufacturing method Abandoned US20020043683A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US10/423,963 US20040075133A1 (en) 2000-09-29 2003-04-28 Semiconductor device and its manufacturing method
US11/602,246 US7476582B2 (en) 2000-09-29 2006-11-21 Semiconductor device and its manufacturing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000-301298 2000-09-29
JP2000301298A JP4096507B2 (ja) 2000-09-29 2000-09-29 半導体装置の製造方法

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US10/423,963 Continuation US20040075133A1 (en) 2000-09-29 2003-04-28 Semiconductor device and its manufacturing method

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US20020043683A1 true US20020043683A1 (en) 2002-04-18

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US09/964,592 Abandoned US20020043683A1 (en) 2000-09-29 2001-09-28 Semiconductor device and its manufacturing method
US10/423,963 Abandoned US20040075133A1 (en) 2000-09-29 2003-04-28 Semiconductor device and its manufacturing method
US11/602,246 Expired - Fee Related US7476582B2 (en) 2000-09-29 2006-11-21 Semiconductor device and its manufacturing method

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US11/602,246 Expired - Fee Related US7476582B2 (en) 2000-09-29 2006-11-21 Semiconductor device and its manufacturing method

Country Status (5)

Country Link
US (3) US20020043683A1 (fr)
EP (1) EP1193762A3 (fr)
JP (1) JP4096507B2 (fr)
KR (1) KR100805868B1 (fr)
TW (1) TW531898B (fr)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050001267A1 (en) * 2003-07-04 2005-01-06 Semiconductor Leading Edge Technologies, Inc. Semiconductor device having a damascene-type gate or a replacing-type gate and method of manufacturing the same
US20050095727A1 (en) * 2003-11-05 2005-05-05 Weng Chang Test region layout for shallow trench isolation
US20060151811A1 (en) * 2002-11-07 2006-07-13 Samsung Electronics Co., Ltd. Floating gate memory device and method of manufacturing the same
US20070066004A1 (en) * 2000-09-29 2007-03-22 Fujitsu Limited Semiconductor device and its manufacture method
US20080054339A1 (en) * 2006-09-06 2008-03-06 Yong-Keon Choi Flash memory device with single-poly structure and method for manufacturing the same
US20080105918A1 (en) * 2006-11-06 2008-05-08 Sang-Hun Jeon Nonvolatile memory devices and methods of fabricating the same
US20080315314A1 (en) * 2007-05-21 2008-12-25 Dongbu Hitek Co., Ltd. Semiconductor device having a dual gate electrode and methods of making the same
US20100068876A1 (en) * 2008-09-12 2010-03-18 Taiwan Semiconductor Manufacturing Company, Ltd. Methods of fabricating high-k metal gate devices
US20100087038A1 (en) * 2008-10-06 2010-04-08 Taiwan Semiconductor Manufacturing Company, Ltd. Method for n/p patterning in a gate last process
DE10326771B4 (de) * 2002-06-14 2010-08-19 Qimonda Flash Gmbh Integrierte Speicherschaltung und Verfahren zum Bilden einer integrierten Speicherschaltung
US20100237401A1 (en) * 2009-03-18 2010-09-23 Samsung Electronics Co., Ltd. Gate structures of semiconductor devices
US20130154020A1 (en) * 2011-12-16 2013-06-20 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for seedless electroplated structure on a semiconductor substrate
CN103854985A (zh) * 2012-12-03 2014-06-11 中国科学院微电子研究所 一种后栅工艺假栅的制造方法和后栅工艺假栅
CN104425508A (zh) * 2013-08-21 2015-03-18 飞思卡尔半导体公司 集成的分裂栅非易失性存储器单元和逻辑结构
US20180006048A1 (en) * 2013-02-12 2018-01-04 Renesas Electronics Corporation Method of manufacturing a semiconductor device
US20190371396A1 (en) * 2008-12-19 2019-12-05 Unity Semiconductor Corporation Conductive metal oxide structures in non-volatile re-writable memory devices

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4774568B2 (ja) * 1999-10-01 2011-09-14 ソニー株式会社 半導体装置の製造方法
JP4439142B2 (ja) 2001-06-26 2010-03-24 株式会社東芝 不揮発性半導体メモリの製造方法
US6770932B2 (en) * 2002-07-10 2004-08-03 Kabushiki Kaisha Toshiba Semiconductor memory device having a memory region and a peripheral region, and a manufacturing method thereof
KR100798268B1 (ko) * 2002-12-28 2008-01-24 동부일렉트로닉스 주식회사 플래시 메모리 소자 및 그 제조 방법
KR100937651B1 (ko) * 2002-12-31 2010-01-19 동부일렉트로닉스 주식회사 반도체 장치 및 이의 제조 방법
KR100511043B1 (ko) * 2003-03-07 2005-08-30 삼성전자주식회사 반도체 장치의 금속 실리사이드 층의 형성 방법
US7091130B1 (en) * 2004-06-25 2006-08-15 Freescale Semiconductor, Inc. Method of forming a nanocluster charge storage device
KR100688575B1 (ko) * 2004-10-08 2007-03-02 삼성전자주식회사 비휘발성 반도체 메모리 소자
TWI252512B (en) * 2004-10-20 2006-04-01 Hynix Semiconductor Inc Semiconductor device and method of manufacturing the same
US7361543B2 (en) * 2004-11-12 2008-04-22 Freescale Semiconductor, Inc. Method of forming a nanocluster charge storage device
KR100641993B1 (ko) * 2004-12-15 2006-11-02 동부일렉트로닉스 주식회사 고유전율의 절연막을 갖는 씨모스 이미지 센서의 제조 방법
KR100603694B1 (ko) * 2005-04-26 2006-07-20 매그나칩 반도체 유한회사 반도체 소자의 제조방법
JP2007157854A (ja) * 2005-12-01 2007-06-21 Toshiba Corp 不揮発性半導体記憶装置及びその製造方法
KR100809328B1 (ko) 2006-07-19 2008-03-05 삼성전자주식회사 비휘발성 메모리 집적 회로 장치의 제조 방법 및 이를통해서 제조된 비휘발성 메모리 집적 회로 장치
US7563675B2 (en) * 2007-07-24 2009-07-21 Taiwan Semiconductor Manufacturing Co., Ltd. Ladder poly etching back process for word line poly planarization
US7745344B2 (en) * 2007-10-29 2010-06-29 Freescale Semiconductor, Inc. Method for integrating NVM circuitry with logic circuitry
US7482217B1 (en) * 2007-12-03 2009-01-27 Spansion Llc Forming metal-semiconductor films having different thicknesses within different regions of an electronic device
US20100163952A1 (en) * 2008-12-31 2010-07-01 Chia-Hong Jan Flash Cell with Integrated High-K Dielectric and Metal-Based Control Gate
US8399310B2 (en) 2010-10-29 2013-03-19 Freescale Semiconductor, Inc. Non-volatile memory and logic circuit process integration
US8564044B2 (en) 2011-03-31 2013-10-22 Freescale Semiconductor, Inc. Non-volatile memory and logic circuit process integration
US8389365B2 (en) 2011-03-31 2013-03-05 Freescale Semiconductor, Inc. Non-volatile memory and logic circuit process integration
US20130049123A1 (en) * 2011-08-23 2013-02-28 Globalfoundries Inc. Semiconductor Device with DRAM Word Lines and Gate Electrodes in Non-Memory Regions of the Device Comprised of a Metal, and Methods of Making Same
US8658497B2 (en) 2012-01-04 2014-02-25 Freescale Semiconductor, Inc. Non-volatile memory (NVM) and logic integration
US8669158B2 (en) 2012-01-04 2014-03-11 Mark D. Hall Non-volatile memory (NVM) and logic integration
US8906764B2 (en) 2012-01-04 2014-12-09 Freescale Semiconductor, Inc. Non-volatile memory (NVM) and logic integration
US8951863B2 (en) 2012-04-06 2015-02-10 Freescale Semiconductor, Inc. Non-volatile memory (NVM) and logic integration
US9087913B2 (en) 2012-04-09 2015-07-21 Freescale Semiconductor, Inc. Integration technique using thermal oxide select gate dielectric for select gate and apartial replacement gate for logic
US8722493B2 (en) 2012-04-09 2014-05-13 Freescale Semiconductor, Inc. Logic transistor and non-volatile memory cell integration
US8574987B1 (en) 2012-06-08 2013-11-05 Freescale Semiconductor, Inc. Integrating formation of a replacement gate transistor and a non-volatile memory cell using an interlayer dielectric
US8728886B2 (en) * 2012-06-08 2014-05-20 Freescale Semiconductor, Inc. Integrating formation of a replacement gate transistor and a non-volatile memory cell using a high-k dielectric
US9111865B2 (en) 2012-10-26 2015-08-18 Freescale Semiconductor, Inc. Method of making a logic transistor and a non-volatile memory (NVM) cell
JP2014165457A (ja) * 2013-02-27 2014-09-08 Toshiba Corp 不揮発性半導体記憶装置の製造方法
US8741719B1 (en) 2013-03-08 2014-06-03 Freescale Semiconductor, Inc. Integrating formation of a logic transistor and a non-volatile memory cell using a partial replacement gate technique
US8716089B1 (en) 2013-03-08 2014-05-06 Freescale Semiconductor, Inc. Integrating formation of a replacement gate transistor and a non-volatile memory cell having thin film storage
US9006093B2 (en) 2013-06-27 2015-04-14 Freescale Semiconductor, Inc. Non-volatile memory (NVM) and high voltage transistor integration
US8877585B1 (en) 2013-08-16 2014-11-04 Freescale Semiconductor, Inc. Non-volatile memory (NVM) cell, high voltage transistor, and high-K and metal gate transistor integration
US8871598B1 (en) 2013-07-31 2014-10-28 Freescale Semiconductor, Inc. Non-volatile memory (NVM) and high-k and metal gate integration using gate-first methodology
US9129996B2 (en) 2013-07-31 2015-09-08 Freescale Semiconductor, Inc. Non-volatile memory (NVM) cell and high-K and metal gate transistor integration
US9082837B2 (en) 2013-08-08 2015-07-14 Freescale Semiconductor, Inc. Nonvolatile memory bitcell with inlaid high k metal select gate
US9252246B2 (en) 2013-08-21 2016-02-02 Freescale Semiconductor, Inc. Integrated split gate non-volatile memory cell and logic device
US9275864B2 (en) 2013-08-22 2016-03-01 Freescale Semiconductor,Inc. Method to form a polysilicon nanocrystal thin film storage bitcell within a high k metal gate platform technology using a gate last process to form transistor gates
US8932925B1 (en) 2013-08-22 2015-01-13 Freescale Semiconductor, Inc. Split-gate non-volatile memory (NVM) cell and device structure integration
US8883624B1 (en) * 2013-09-27 2014-11-11 Cypress Semiconductor Corporation Integration of a memory transistor into high-K, metal gate CMOS process flow
US8901632B1 (en) 2013-09-30 2014-12-02 Freescale Semiconductor, Inc. Non-volatile memory (NVM) and high-K and metal gate integration using gate-last methodology
US9129855B2 (en) 2013-09-30 2015-09-08 Freescale Semiconductor, Inc. Non-volatile memory (NVM) and high-k and metal gate integration using gate-first methodology
US9136129B2 (en) 2013-09-30 2015-09-15 Freescale Semiconductor, Inc. Non-volatile memory (NVM) and high-k and metal gate integration using gate-last methodology
US9231077B2 (en) 2014-03-03 2016-01-05 Freescale Semiconductor, Inc. Method of making a logic transistor and non-volatile memory (NVM) cell
US9112056B1 (en) 2014-03-28 2015-08-18 Freescale Semiconductor, Inc. Method for forming a split-gate device
US9472418B2 (en) 2014-03-28 2016-10-18 Freescale Semiconductor, Inc. Method for forming a split-gate device
US9252152B2 (en) 2014-03-28 2016-02-02 Freescale Semiconductor, Inc. Method for forming a split-gate device
US9343314B2 (en) 2014-05-30 2016-05-17 Freescale Semiconductor, Inc. Split gate nanocrystal memory integration
US9379222B2 (en) 2014-05-30 2016-06-28 Freescale Semiconductor, Inc. Method of making a split gate non-volatile memory (NVM) cell
US9257445B2 (en) 2014-05-30 2016-02-09 Freescale Semiconductor, Inc. Method of making a split gate non-volatile memory (NVM) cell and a logic transistor
JP2019091799A (ja) * 2017-11-14 2019-06-13 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
DE102018102685A1 (de) * 2017-11-30 2019-06-06 Taiwan Semiconductor Manufacturing Co., Ltd. Kontaktbildungsverfahren und zugehörige Struktur

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2664685B2 (ja) * 1987-07-31 1997-10-15 株式会社東芝 半導体装置の製造方法
EP0595250B1 (fr) * 1992-10-27 1999-01-07 Nec Corporation Procédé de fabrication d'un dispositif à mémoire semiconducteur de type non-volatile
JPH09205154A (ja) * 1996-01-25 1997-08-05 Mitsubishi Electric Corp 半導体装置及びその製造方法
KR980012447A (ko) * 1996-07-19 1998-04-30 김광호 불휘발성 반도체 장치의 게이트 전극형성 방법
JP3107199B2 (ja) * 1996-08-29 2000-11-06 日本電気株式会社 不揮発性半導体記憶装置の製造方法
JPH10189966A (ja) * 1996-12-26 1998-07-21 Toshiba Corp 半導体装置及びその製造方法
JPH10303401A (ja) * 1997-02-25 1998-11-13 Mitsubishi Electric Corp 半導体装置及びその製造方法
JPH1117035A (ja) * 1997-06-24 1999-01-22 Mitsubishi Electric Corp 不揮発性半導体記憶装置およびその製造方法
JP3264241B2 (ja) * 1998-02-10 2002-03-11 日本電気株式会社 半導体装置の製造方法
JP2000022008A (ja) * 1998-07-01 2000-01-21 Mitsubishi Electric Corp 不揮発性半導体記憶装置およびその製造方法
EP0975022A1 (fr) * 1998-07-22 2000-01-26 STMicroelectronics S.r.l. Procédé de fabrication de dispositifs électroniques comprenant des cellules mémoire non-volatiles et des transistors à basse tension avec des jonctions en siliciure auto-alignées
TW449919B (en) * 1998-12-18 2001-08-11 Koninkl Philips Electronics Nv A method of manufacturing a semiconductor device
US6259126B1 (en) * 1999-11-23 2001-07-10 International Business Machines Corporation Low cost mixed memory integration with FERAM
KR100350056B1 (ko) * 2000-03-09 2002-08-24 삼성전자 주식회사 다마신 게이트 공정에서 자기정렬콘택패드 형성 방법
TW466606B (en) * 2000-04-20 2001-12-01 United Microelectronics Corp Manufacturing method for dual metal gate electrode
JP4096507B2 (ja) * 2000-09-29 2008-06-04 富士通株式会社 半導体装置の製造方法
JP2003243618A (ja) * 2002-02-20 2003-08-29 Seiko Epson Corp 半導体装置の製造方法
KR100481863B1 (ko) * 2002-10-11 2005-04-11 삼성전자주식회사 반도체 소자 및 그 형성 방법
JP2005026589A (ja) * 2003-07-04 2005-01-27 Toshiba Corp 半導体記憶装置及びその製造方法
US7271083B2 (en) * 2004-07-22 2007-09-18 Taiwan Semiconductor Manufacturing Company, Ltd. One-transistor random access memory technology compatible with metal gate process

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070066004A1 (en) * 2000-09-29 2007-03-22 Fujitsu Limited Semiconductor device and its manufacture method
US7476582B2 (en) * 2000-09-29 2009-01-13 Fujitsu Limited Semiconductor device and its manufacturing method
DE10326771B4 (de) * 2002-06-14 2010-08-19 Qimonda Flash Gmbh Integrierte Speicherschaltung und Verfahren zum Bilden einer integrierten Speicherschaltung
US20060151811A1 (en) * 2002-11-07 2006-07-13 Samsung Electronics Co., Ltd. Floating gate memory device and method of manufacturing the same
US7524747B2 (en) * 2002-11-07 2009-04-28 Samsung Electronics Co., Ltd. Floating gate memory device and method of manufacturing the same
US7071529B2 (en) 2003-07-04 2006-07-04 Sanyo Electric Co., Ltd. Semiconductor device having a Damascene gate or a replacing gate
US20050001267A1 (en) * 2003-07-04 2005-01-06 Semiconductor Leading Edge Technologies, Inc. Semiconductor device having a damascene-type gate or a replacing-type gate and method of manufacturing the same
US20050095727A1 (en) * 2003-11-05 2005-05-05 Weng Chang Test region layout for shallow trench isolation
US7002177B2 (en) 2003-11-05 2006-02-21 Taiwan Semiconductor Manufacturing Co. Ltd. Test region layout for shallow trench isolation
CN100350586C (zh) * 2003-11-05 2007-11-21 台湾积体电路制造股份有限公司 浅沟槽填洞的测试图案层
US7713795B2 (en) * 2006-09-06 2010-05-11 Dongbu Hitek Co., Ltd. Flash memory device with single-poly structure and method for manufacturing the same
US20080054339A1 (en) * 2006-09-06 2008-03-06 Yong-Keon Choi Flash memory device with single-poly structure and method for manufacturing the same
US20080105918A1 (en) * 2006-11-06 2008-05-08 Sang-Hun Jeon Nonvolatile memory devices and methods of fabricating the same
US7547942B2 (en) 2006-11-06 2009-06-16 Samsung Electronics Co., Ltd. Nonvolatile memory devices and methods of fabricating the same
US20080315314A1 (en) * 2007-05-21 2008-12-25 Dongbu Hitek Co., Ltd. Semiconductor device having a dual gate electrode and methods of making the same
US8076729B2 (en) * 2007-05-21 2011-12-13 Dongbu Hitek Co., Ltd Semiconductor device having a dual gate electrode and methods of making the same
US8551837B2 (en) 2008-09-12 2013-10-08 Taiwan Semiconductor Manufacturing Company, Ltd. Methods of fabricating high-K metal gate devices
US8148249B2 (en) * 2008-09-12 2012-04-03 Taiwan Semiconductor Manufacturing Company, Ltd. Methods of fabricating high-k metal gate devices
US20100068876A1 (en) * 2008-09-12 2010-03-18 Taiwan Semiconductor Manufacturing Company, Ltd. Methods of fabricating high-k metal gate devices
US20100087038A1 (en) * 2008-10-06 2010-04-08 Taiwan Semiconductor Manufacturing Company, Ltd. Method for n/p patterning in a gate last process
US8093116B2 (en) * 2008-10-06 2012-01-10 Taiwan Semiconductor Manufacturing Company, Ltd. Method for N/P patterning in a gate last process
TWI382498B (zh) * 2008-10-06 2013-01-11 Taiwan Semiconductor Mfg 半導體元件的製造方法
US10803935B2 (en) * 2008-12-19 2020-10-13 Unity Semiconductor Corporation Conductive metal oxide structures in non-volatile re-writable memory devices
US20190371396A1 (en) * 2008-12-19 2019-12-05 Unity Semiconductor Corporation Conductive metal oxide structures in non-volatile re-writable memory devices
US20100237401A1 (en) * 2009-03-18 2010-09-23 Samsung Electronics Co., Ltd. Gate structures of semiconductor devices
US9236260B2 (en) * 2011-12-16 2016-01-12 HGST Netherlands B.V. System, method and apparatus for seedless electroplated structure on a semiconductor substrate
US20130154020A1 (en) * 2011-12-16 2013-06-20 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for seedless electroplated structure on a semiconductor substrate
US20140332958A1 (en) * 2012-12-03 2014-11-13 Chunlong Li Method for Manufacturing Dummy Gate in Gate-Last Process and Dummy Gate in Gate-Last Process
US9202890B2 (en) * 2012-12-03 2015-12-01 Institute of Microelectronics, Chinese Academy of Sciences Method for manufacturing dummy gate in gate-last process and dummy gate in gate-last process
CN103854985A (zh) * 2012-12-03 2014-06-11 中国科学院微电子研究所 一种后栅工艺假栅的制造方法和后栅工艺假栅
US20180006048A1 (en) * 2013-02-12 2018-01-04 Renesas Electronics Corporation Method of manufacturing a semiconductor device
US10263005B2 (en) * 2013-02-12 2019-04-16 Renesas Electronics Corporation Method of manufacturing a semiconductor device
CN104425508A (zh) * 2013-08-21 2015-03-18 飞思卡尔半导体公司 集成的分裂栅非易失性存储器单元和逻辑结构

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KR100805868B1 (ko) 2008-02-20
US20040075133A1 (en) 2004-04-22
TW531898B (en) 2003-05-11
US20070066004A1 (en) 2007-03-22
KR20020025839A (ko) 2002-04-04
EP1193762A3 (fr) 2003-02-12

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