TWI802648B - 半導體裝置之製造方法 - Google Patents
半導體裝置之製造方法 Download PDFInfo
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- TWI802648B TWI802648B TW108104296A TW108104296A TWI802648B TW I802648 B TWI802648 B TW I802648B TW 108104296 A TW108104296 A TW 108104296A TW 108104296 A TW108104296 A TW 108104296A TW I802648 B TWI802648 B TW I802648B
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- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Bipolar Transistors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Dicing (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-019434 | 2018-02-06 | ||
| JPJP2018-019434 | 2018-02-06 | ||
| JP2018019434A JP6816046B2 (ja) | 2018-02-06 | 2018-02-06 | 半導体装置の製造方法 |
| WOPCT/JP2019/003169 | 2019-01-30 | ||
| PCT/JP2019/003169 WO2019155959A1 (ja) | 2018-02-06 | 2019-01-30 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201935576A TW201935576A (zh) | 2019-09-01 |
| TWI802648B true TWI802648B (zh) | 2023-05-21 |
Family
ID=67547988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW108104296A TWI802648B (zh) | 2018-02-06 | 2019-02-01 | 半導體裝置之製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11521948B2 (enExample) |
| JP (1) | JP6816046B2 (enExample) |
| KR (1) | KR102407800B1 (enExample) |
| CN (1) | CN111684585A (enExample) |
| TW (1) | TWI802648B (enExample) |
| WO (1) | WO2019155959A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020131552A (ja) * | 2019-02-20 | 2020-08-31 | 株式会社東芝 | キャリアおよび半導体装置の製造方法 |
| JP7362378B2 (ja) * | 2019-09-12 | 2023-10-17 | 株式会社東芝 | キャリア及び半導体装置の製造方法 |
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| CN112786513B (zh) * | 2019-11-11 | 2023-06-09 | 上海新微技术研发中心有限公司 | 一种薄膜器件的加工方法及薄膜器件 |
| JP7474608B2 (ja) * | 2020-03-09 | 2024-04-25 | アオイ電子株式会社 | 半導体装置の製造方法、および半導体封止体 |
| JP7521258B2 (ja) * | 2020-05-26 | 2024-07-24 | Toppanホールディングス株式会社 | 基板ユニット、基板ユニットの製造方法及び半導体装置の製造方法 |
| JP6985477B1 (ja) * | 2020-09-25 | 2021-12-22 | アオイ電子株式会社 | 半導体装置および半導体装置の製造方法 |
| KR102684002B1 (ko) * | 2020-12-14 | 2024-07-11 | 주식회사 네패스 | 반도체 패키지 제조방법 및 이에 이용되는 가이드 프레임 |
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- 2019-01-30 WO PCT/JP2019/003169 patent/WO2019155959A1/ja not_active Ceased
- 2019-01-30 KR KR1020207019198A patent/KR102407800B1/ko active Active
- 2019-01-30 US US16/967,480 patent/US11521948B2/en active Active
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| US20210217719A1 (en) | 2021-07-15 |
| KR102407800B1 (ko) | 2022-06-10 |
| CN111684585A (zh) | 2020-09-18 |
| KR20200094780A (ko) | 2020-08-07 |
| TW201935576A (zh) | 2019-09-01 |
| WO2019155959A1 (ja) | 2019-08-15 |
| JP2019140150A (ja) | 2019-08-22 |
| JP6816046B2 (ja) | 2021-01-20 |
| US11521948B2 (en) | 2022-12-06 |
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