TWI801571B - 搬運系統 - Google Patents

搬運系統 Download PDF

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Publication number
TWI801571B
TWI801571B TW108114866A TW108114866A TWI801571B TW I801571 B TWI801571 B TW I801571B TW 108114866 A TW108114866 A TW 108114866A TW 108114866 A TW108114866 A TW 108114866A TW I801571 B TWI801571 B TW I801571B
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TW
Taiwan
Prior art keywords
track
branch
aforementioned
transport
vehicles
Prior art date
Application number
TW108114866A
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English (en)
Chinese (zh)
Other versions
TW201945267A (zh
Inventor
伊藤尚央
青木栄二郎
Original Assignee
日商村田機械股份有限公司
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Application filed by 日商村田機械股份有限公司 filed Critical 日商村田機械股份有限公司
Publication of TW201945267A publication Critical patent/TW201945267A/zh
Application granted granted Critical
Publication of TWI801571B publication Critical patent/TWI801571B/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0212—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory
    • G05D1/0225—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory involving docking at a fixed facility, e.g. base station or loading bay
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0227—Control of position or course in two dimensions specially adapted to land vehicles using mechanical sensing means, e.g. for sensing treated area
    • G05D1/0229—Control of position or course in two dimensions specially adapted to land vehicles using mechanical sensing means, e.g. for sensing treated area in combination with fixed guiding means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
    • G05D1/0289—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling with means for avoiding collisions between vehicles
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
    • G05D1/0291—Fleet control
    • G05D1/0297—Fleet control by controlling means in a control room
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/60—Intended control result
    • G05D1/69—Coordinated control of the position or course of two or more vehicles
    • G05D1/693—Coordinated control of the position or course of two or more vehicles for avoiding collisions between vehicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61L—GUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
    • B61L27/00—Central railway traffic control systems; Trackside control; Communication systems specially adapted therefor
    • B61L27/20—Trackside control of safe travel of vehicle or train, e.g. braking curve calculation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/60—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type
    • B65G47/61—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type for articles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Train Traffic Observation, Control, And Security (AREA)
  • Centrifugal Separators (AREA)
TW108114866A 2018-05-01 2019-04-29 搬運系統 TWI801571B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-088283 2018-05-01
JP2018088283 2018-05-01

Publications (2)

Publication Number Publication Date
TW201945267A TW201945267A (zh) 2019-12-01
TWI801571B true TWI801571B (zh) 2023-05-11

Family

ID=68386016

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108114866A TWI801571B (zh) 2018-05-01 2019-04-29 搬運系統

Country Status (8)

Country Link
US (1) US12110177B2 (de)
EP (1) EP3789266B1 (de)
JP (1) JP6935846B2 (de)
KR (1) KR102389724B1 (de)
CN (1) CN111788106B (de)
SG (1) SG11202010020PA (de)
TW (1) TWI801571B (de)
WO (1) WO2019211933A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109017885B (zh) * 2018-08-17 2023-06-06 湖南大学 一种动态自动重组车列方法和系统
JP7283456B2 (ja) * 2020-09-09 2023-05-30 株式会社ダイフク 物品搬送設備
US20240025637A1 (en) * 2020-12-16 2024-01-25 Murata Machinery, Ltd. Transport system
WO2023238533A1 (ja) * 2022-06-06 2023-12-14 村田機械株式会社 搬送システム
WO2023238484A1 (ja) * 2022-06-06 2023-12-14 村田機械株式会社 搬送システム

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000276230A (ja) * 1999-03-29 2000-10-06 Hitachi Kiden Kogyo Ltd 搬送システム
CN1369419A (zh) * 2001-02-02 2002-09-18 株式会社戴福库 物品的合流控制方法
US6516239B1 (en) * 1999-08-03 2003-02-04 Honda Of Canada Incorporated Assembly line control system
TW200817864A (en) * 2006-03-22 2008-04-16 Asyst Shinko Inc Apparatus, system, method and program for managing truck
TW200940428A (en) * 2008-03-10 2009-10-01 Murata Machinery Ltd Traveling vehicle system
EP2280327A1 (de) * 2008-05-22 2011-02-02 Murata Machinery, Ltd. Fahrtensystem für ein fahrzeug und verfahren zur fahrtensteuerung anhand eines fahrtensystems für ein fahrzeug
EP2343616A1 (de) * 2008-09-26 2011-07-13 Murata Machinery, Ltd. Geführtes navigationssystem
WO2017029873A1 (ja) * 2015-08-14 2017-02-23 村田機械株式会社 搬送車システム

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JPS6329813A (ja) * 1986-07-23 1988-02-08 Hitachi Ltd 搬送車の合流点進行制御方式
JPH01133801A (ja) 1987-11-16 1989-05-25 Murata Mach Ltd 物品収納設備
JPH05181527A (ja) * 1991-12-27 1993-07-23 Mitsubishi Electric Corp 自動搬送装置
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JP3461711B2 (ja) * 1998-02-24 2003-10-27 日産ディーゼル工業株式会社 無人搬送車の運行制御システム
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KR101463250B1 (ko) * 2008-05-26 2014-11-18 주식회사 포스코 자동운전차량시스템에서의 차량의 군집주행방법
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JP6520797B2 (ja) * 2016-04-11 2019-05-29 株式会社ダイフク 物品搬送設備
JP6620707B2 (ja) * 2016-09-09 2019-12-18 株式会社ダイフク 物品搬送設備
JP6690497B2 (ja) * 2016-10-28 2020-04-28 株式会社ダイフク 物品搬送設備
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Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000276230A (ja) * 1999-03-29 2000-10-06 Hitachi Kiden Kogyo Ltd 搬送システム
US6516239B1 (en) * 1999-08-03 2003-02-04 Honda Of Canada Incorporated Assembly line control system
CN1369419A (zh) * 2001-02-02 2002-09-18 株式会社戴福库 物品的合流控制方法
TW200817864A (en) * 2006-03-22 2008-04-16 Asyst Shinko Inc Apparatus, system, method and program for managing truck
TW200940428A (en) * 2008-03-10 2009-10-01 Murata Machinery Ltd Traveling vehicle system
EP2280327A1 (de) * 2008-05-22 2011-02-02 Murata Machinery, Ltd. Fahrtensystem für ein fahrzeug und verfahren zur fahrtensteuerung anhand eines fahrtensystems für ein fahrzeug
EP2343616A1 (de) * 2008-09-26 2011-07-13 Murata Machinery, Ltd. Geführtes navigationssystem
WO2017029873A1 (ja) * 2015-08-14 2017-02-23 村田機械株式会社 搬送車システム

Also Published As

Publication number Publication date
EP3789266B1 (de) 2023-03-01
TW201945267A (zh) 2019-12-01
US20210155406A1 (en) 2021-05-27
SG11202010020PA (en) 2020-11-27
EP3789266A1 (de) 2021-03-10
KR20200116999A (ko) 2020-10-13
JPWO2019211933A1 (ja) 2021-02-12
US12110177B2 (en) 2024-10-08
WO2019211933A1 (ja) 2019-11-07
CN111788106B (zh) 2022-07-26
CN111788106A (zh) 2020-10-16
KR102389724B1 (ko) 2022-04-21
EP3789266A4 (de) 2022-01-26
JP6935846B2 (ja) 2021-09-15

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