JP7283456B2 - 物品搬送設備 - Google Patents
物品搬送設備 Download PDFInfo
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- JP7283456B2 JP7283456B2 JP2020151437A JP2020151437A JP7283456B2 JP 7283456 B2 JP7283456 B2 JP 7283456B2 JP 2020151437 A JP2020151437 A JP 2020151437A JP 2020151437 A JP2020151437 A JP 2020151437A JP 7283456 B2 JP7283456 B2 JP 7283456B2
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- 238000004891 communication Methods 0.000 claims description 127
- 238000012545 processing Methods 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 14
- VYMDGNCVAMGZFE-UHFFFAOYSA-N phenylbutazonum Chemical compound O=C1C(CCCC)C(=O)N(C=2C=CC=CC=2)N1C1=CC=CC=C1 VYMDGNCVAMGZFE-UHFFFAOYSA-N 0.000 claims 1
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- 239000000969 carrier Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
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- 238000011144 upstream manufacturing Methods 0.000 description 4
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/12—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like
- B65G1/133—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like the circuit being confined in a horizontal plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
- B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Description
以下、その他の実施形態について説明する。尚、以下に説明する各実施形態の構成は、それぞれ単独で適用されるものに限られず、矛盾が生じない限り、他の実施形態の構成と組み合わせて適用することも可能である。
以下、上記において説明した物品搬送設備の概要について簡単に説明する。
3 :物品搬送車
31 :第1物品搬送車
32 :第2物品搬送車
100 :物品搬送設備
E :管理ゾーン
EQ :処理装置
J :接続部
H2 :ゾーン管理装置(制御装置)
K1 :第1経路
K2 :第2経路
K3 :第3経路
S0 :搬送車側通信部
S1 :経路側通信部
S2 :装置側通信部
ST :ステーション
W :物品
Claims (6)
- 物品を搬送する物品搬送車の走行経路として、接続部に端部が接続された第1経路と、前記接続部に端部が接続された第2経路と、前記接続部に端部が接続された第3経路とを備え、前記第1経路の少なくとも一部と、前記第2経路の少なくとも一部と、前記第3経路の少なくとも一部と、前記接続部とを含む領域が前記物品搬送車の通行を管理する管理ゾーンとして設定され、前記管理ゾーンにおける前記物品搬送車の通行を管理する制御を行う制御装置を備えた物品搬送設備であって、
前記管理ゾーン内に、前記物品搬送車が停止するステーションが設けられ、
前記ステーションは、前記管理ゾーン内の前記第1経路において、当該ステーションに停止した前記物品搬送車が、前記第2経路及び前記第3経路を走行する他の前記物品搬送車と干渉しない位置に設けられ、
前記制御装置は、
前記管理ゾーン内に前記物品搬送車が存在していない場合に、前記管理ゾーン内に先に進入する前記物品搬送車である第1物品搬送車の前記管理ゾーン内への進入を許可すると共に、前記管理ゾーン内に前記第1物品搬送車が存在している場合には、他の前記物品搬送車である第2物品搬送車の前記管理ゾーンへの進入を禁止する基本処理と、
前記管理ゾーン内に前記第1物品搬送車が存在している場合であっても、前記第1物品搬送車が前記ステーションに停止する前記物品搬送車であり、前記第2物品搬送車が前記第2経路及び前記第3経路を通り、前記第1経路を通らない場合には、前記第2物品搬送車が前記管理ゾーンへ進入することを許可する第1例外処理と、を実行可能である、物品搬送設備。 - 前記制御装置は、前記第1例外処理によって前記第2物品搬送車が前記管理ゾーン内に進入した後、前記第2物品搬送車が前記管理ゾーンから退出するまで、前記ステーションからの前記第1物品搬送車の発進を禁止する第2例外処理を実行する、請求項1に記載の物品搬送設備。
- 前記制御装置は、
前記走行経路に沿って配置された経路側通信部と、前記物品搬送車に設けられた搬送車側通信部との通信に基づいて、前記管理ゾーンへ進入する前記物品搬送車を検出すると共に、当該物品搬送車を含む複数の前記物品搬送車の前記管理ゾーンにおける通行を管理し、
前記ステーションに設けられた装置側通信部と、前記物品搬送車に設けられた前記搬送車側通信部との通信に基づいて、前記ステーションにおける前記物品搬送車の停止及び発進を検出すると共に、当該物品搬送車を含む複数の前記物品搬送車の前記管理ゾーンにおける通行を管理する、請求項1又は2に記載の物品搬送設備。 - 前記制御装置は、
前記走行経路に沿って配置された経路側通信部と、前記物品搬送車に設けられた搬送車側通信部との通信に基づいて、前記管理ゾーンへ進入する前記物品搬送車を検出すると共に、当該物品搬送車を含む複数の前記物品搬送車の前記管理ゾーンにおける通行を管理し、
前記ステーションに設けられた装置側通信部を経由せずに、前記物品搬送車に設けられた前記搬送車側通信部と通信して、前記ステーションにおける前記物品搬送車の停止及び発進を検出すると共に、当該物品搬送車を含む複数の前記物品搬送車の前記管理ゾーンにおける通行を管理する、請求項1又は2に記載の物品搬送設備。 - 前記ステーションは、前記物品搬送車による搬送対象の前記物品を利用する処理装置との間で前記物品を受け渡す位置に設定され、1つの前記処理装置に複数の前記ステーションが設定され、複数の前記ステーションの内の一部が前記管理ゾーン内に位置するゾーン内ステーションであり、複数の前記ステーションの内の他の一部が前記管理ゾーン外に位置するゾーン外ステーションである場合、前記ゾーン外ステーションに比べて、前記ゾーン内ステーションの利用頻度が低くなるように運用される、請求項1から4の何れか一項に記載の物品搬送設備。
- 前記管理ゾーン内に前記ステーションで停止する前記第1物品搬送車が存在し、前記管理ゾーンへの進入を待機する前記物品搬送車として、前記第1経路を走行して前記ステーションで停止する第1待機搬送車と、前記接続部を経由して前記第2経路及び前記第3経路を通過する第2待機搬送車とが、前記管理ゾーンへの進入を要求した場合、
前記制御装置は、
前記第1物品搬送車が前記ステーションを発進可能となる以前に、前記管理ゾーンへの進入を要求された場合には、前記第2待機搬送車を前記第1待機搬送車よりも先に前記管理ゾーンに進入させ、
前記第1物品搬送車が前記ステーションを発進可能となった後に、前記管理ゾーンへの進入を要求された場合には、前記第1待機搬送車を前記第2待機搬送車よりも先に前記管理ゾーンに進入させる、請求項1から5の何れか一項に記載の物品搬送設備。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020151437A JP7283456B2 (ja) | 2020-09-09 | 2020-09-09 | 物品搬送設備 |
TW110129834A TW202212223A (zh) | 2020-09-09 | 2021-08-12 | 物品搬送設備 |
KR1020210118318A KR20220033438A (ko) | 2020-09-09 | 2021-09-06 | 물품 반송 설비 |
US17/469,002 US20220073277A1 (en) | 2020-09-09 | 2021-09-08 | Article Transport Facility |
CN202111053892.8A CN114229361A (zh) | 2020-09-09 | 2021-09-09 | 物品搬送设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020151437A JP7283456B2 (ja) | 2020-09-09 | 2020-09-09 | 物品搬送設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022045704A JP2022045704A (ja) | 2022-03-22 |
JP7283456B2 true JP7283456B2 (ja) | 2023-05-30 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2020151437A Active JP7283456B2 (ja) | 2020-09-09 | 2020-09-09 | 物品搬送設備 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220073277A1 (ja) |
JP (1) | JP7283456B2 (ja) |
KR (1) | KR20220033438A (ja) |
CN (1) | CN114229361A (ja) |
TW (1) | TW202212223A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP1624564S (ja) * | 2018-06-28 | 2019-02-18 | ||
DE102021211570A1 (de) * | 2021-10-13 | 2023-04-13 | Dürkopp Fördertechnik GmbH | Vorrichtung und Verfahren zum hängenden Fördern von Gegenständen |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006313461A (ja) | 2005-05-09 | 2006-11-16 | Murata Mach Ltd | 搬送台車システム |
WO2019211933A1 (ja) | 2018-05-01 | 2019-11-07 | 村田機械株式会社 | 搬送システム |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002046611A (ja) * | 2000-08-04 | 2002-02-12 | Toshiba Corp | 車両走行制御システムおよびコンピュータ読取可能な記憶媒体 |
JP5263613B2 (ja) * | 2009-05-11 | 2013-08-14 | 株式会社ダイフク | 物品搬送設備 |
JP5440870B2 (ja) * | 2010-08-19 | 2014-03-12 | 株式会社ダイフク | 物品搬送設備 |
JP6652084B2 (ja) * | 2017-02-09 | 2020-02-19 | 株式会社ダイフク | 物品搬送設備 |
JP6652106B2 (ja) * | 2017-05-10 | 2020-02-19 | 株式会社ダイフク | 物品搬送設備 |
WO2020049872A1 (ja) * | 2018-09-04 | 2020-03-12 | 村田機械株式会社 | 搬送車システム |
-
2020
- 2020-09-09 JP JP2020151437A patent/JP7283456B2/ja active Active
-
2021
- 2021-08-12 TW TW110129834A patent/TW202212223A/zh unknown
- 2021-09-06 KR KR1020210118318A patent/KR20220033438A/ko unknown
- 2021-09-08 US US17/469,002 patent/US20220073277A1/en active Pending
- 2021-09-09 CN CN202111053892.8A patent/CN114229361A/zh active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006313461A (ja) | 2005-05-09 | 2006-11-16 | Murata Mach Ltd | 搬送台車システム |
WO2019211933A1 (ja) | 2018-05-01 | 2019-11-07 | 村田機械株式会社 | 搬送システム |
Also Published As
Publication number | Publication date |
---|---|
US20220073277A1 (en) | 2022-03-10 |
JP2022045704A (ja) | 2022-03-22 |
TW202212223A (zh) | 2022-04-01 |
KR20220033438A (ko) | 2022-03-16 |
CN114229361A (zh) | 2022-03-25 |
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