WO2013015086A1 - 処理設備(processing facility) - Google Patents
処理設備(processing facility) Download PDFInfo
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- WO2013015086A1 WO2013015086A1 PCT/JP2012/067109 JP2012067109W WO2013015086A1 WO 2013015086 A1 WO2013015086 A1 WO 2013015086A1 JP 2012067109 W JP2012067109 W JP 2012067109W WO 2013015086 A1 WO2013015086 A1 WO 2013015086A1
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- Prior art keywords
- processing
- transport
- information
- management means
- conveyance
- Prior art date
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- 238000012545 processing Methods 0.000 title claims abstract description 662
- 238000000034 method Methods 0.000 claims abstract description 61
- 230000008569 process Effects 0.000 claims abstract description 57
- 230000032258 transport Effects 0.000 claims description 255
- 238000012546 transfer Methods 0.000 claims description 48
- 238000007726 management method Methods 0.000 description 103
- 239000004065 semiconductor Substances 0.000 description 34
- 239000000758 substrate Substances 0.000 description 32
- 238000004891 communication Methods 0.000 description 23
- 239000000284 extract Substances 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 11
- 238000000605 extraction Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 125000004122 cyclic group Chemical group 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
- G05B19/41895—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system using automatic guided vehicles [AGV]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
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- H—ELECTRICITY
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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- G05B2219/31—From computer integrated manufacturing till monitoring
- G05B2219/31013—Second AGV with wafers already underway before processing first finished
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/60—Electric or hybrid propulsion means for production processes
Definitions
- the present invention travels along a transport line that passes through a plurality of processing devices that perform different processes on a processing target and a storage device that stores the processing target, and transports the processing target.
- a vehicle is provided, and each of the plurality of processing devices includes, as main management means, processing progress information including loading request information for requesting loading of the processing object and unloading request information for requesting unloading of the processing object.
- the main management means when the carry-in request information and the carry-out request information are transmitted, creates conveyance command information indicating a conveyance source and a conveyance destination of the processing object,
- the processing instruction is configured to transmit the transport command information to the transport management means, and the transport management means is configured to control the traveling of the transport vehicle based on the transport command information. about .
- the processing facility as described above is a facility for sequentially performing, for example, a plurality of different processes such as a cleaning process, a drying process, and an etching process on a semiconductor substrate.
- a plurality of processing apparatuses generally, a plurality of types of processing apparatuses that perform processing of different processes on a processing target are provided.
- the processing facility is a facility for processing a semiconductor substrate
- a semiconductor storage container that stores a plurality of semiconductor substrates corresponds to the processing object. That is, a processing apparatus for processing semiconductor substrates sequentially takes out the semiconductor substrates from the semiconductor storage container and processes them, and sequentially stores the processed semiconductor substrates in the semiconductor storage container.
- the processing object is sequentially transported to a plurality of processing devices that perform different processes by the transport vehicle. That is, the processing device transmits the processing object carry-in request information as processing progress information to the main management means when the operation is started or when the processing object does not exist immediately after the processing object is carried out.
- the main management means receives the carry-in request information
- the main management means extracts a processing object to be carried into the processing apparatus that has transmitted the carry-in request information. This extraction of the processing object is often extracted from among the processing objects stored in the storage device, and when extracting the processing object stored in the storage device, the main management means, The storage apparatus is instructed to issue the corresponding processing object.
- the main management means When the main management means extracts the processing object, the main management means creates transport command information using the processing device that has transmitted the processing object carry-in request information as the transport destination, with the location that receives the processing target as the transport source, The conveyance command information is transmitted to the conveyance management means.
- the conveyance management unit controls the traveling of the conveyance vehicle so as to convey the conveyance target processing object to the conveyance destination processing apparatus.
- the transport vehicle travels to a location that receives the processing target, receives the processing target, and then travels the transport vehicle to the processing device as the transport destination, and places the processing target in the processing device as the transport destination. hand over.
- a plurality of transport vehicles are equipped, and a transport vehicle that can be transported during non-working is selected as a transport vehicle for transporting the object to be processed.
- the processing apparatus generally transmits processing progress information for the processing target object being processed to the main management means as processing progress information, and when the processing for the processing target object ends, the processing target carry-out request information Is transmitted as processing progress information to the main management means.
- the main management means When the main management means receives the carry-out request information, the main management means creates transfer command information with the processing apparatus that transmitted the carry-out request information as the transfer source, and the location where the processing object from the processing apparatus should be transferred as the transfer destination. And transmitted to the transport management means. When setting the transport destination as the location where the processing object from the processing apparatus is to be transported, the main management means determines what process is the next process for the processing object to be transported.
- an appropriate location is set as a location where the processing object is to be transported.
- the location set as the location where the processing object is to be transported is often determined in the storage device, but the location other than the storage device is determined as the location to be transported There is also.
- carry-in request information is transmitted from the other processing device to the main management means, and the processing device performs the next process for the processing object.
- the processing apparatus may be determined as a location where the processing object is to be transported.
- a location other than the storage device is determined as a location to be transported
- a temporary storage unit for a processing object is equipped corresponding to the processing device, processing of the next step to be performed Even if the processing device that performs the processing is currently being processed, the temporary placement section of the processing device may be determined as a location to be transported.
- the fact that another processing apparatus is determined as a position where the processing object is to be transported means that the processing object is carried into the processing apparatus that transmits the above-described carry-in request information. Equivalent to. Further, in the case where a temporary placement unit is provided corresponding to the processing apparatus, when extracting the processing object to be carried into the processing apparatus that transmits the above-described carry-in request information, the temporary placement corresponding to the processing apparatus is performed. When a processing object exists in the placement unit, the processing object is extracted with priority. In other words, as described above, the processing object stored in the storage device is often carried into the processing apparatus that transmits the carry-in request information. However, the processing object from another processing apparatus or temporary storage unit is included in the processing apparatus. It may be carried in.
- the main management means determines the transport destination as the location where the processing target is to be transported, the transport command information with the processing device receiving the processing target as the transport source and the location where the processing target is transported as the transport destination , And the conveyance command information is transmitted to the conveyance management means.
- the transfer management means transmits the carry-out request information.
- traveling control of the transport vehicle is started.
- the conveyance management unit receives the conveyance command information from the main management unit, the conveyance management unit starts the traveling control of the conveyance vehicle and causes the conveyance vehicle to travel to the processing apparatus that is to receive the processing target. Then, the processing object is received, and then the transport vehicle is moved to a place where the processing object is to be transported, and the processing object is delivered (see, for example, Patent Document 1).
- the host computer corresponds to the main management means
- the stocker corresponds to the storage device
- the transport device corresponds to the transport management means and the transport vehicle.
- the process start ready signal corresponds to carry-in request information
- the process end report signal corresponds to carry-out request information.
- the transport management means starts the traveling control of the transport vehicle when the transport command information created based on the transport request information is transmitted from the main management means. After the processing apparatus that has transmitted the processing of the processing object ends, there is a possibility that the time for waiting for the arrival of the transport vehicle may become longer.
- the main management means uses the processing device that transmits the carry-out request information as the transfer source, and performs processing from the processing device.
- Conveyance command information is created with the location where the object is to be conveyed as the conveyance destination, and is transmitted to the conveyance management means.
- the main management means determines what process is the next process for the processing object to be transported.
- the time required for the transport vehicle to arrive at the processing device that has transmitted the unloading request information is the time for the main management means to create the transport command information and the processing device to which the transport vehicle has transmitted the unloading request information from the current position. It will be the time added to the running time. For this reason, there is a possibility that the processing apparatus that has transmitted the carry-out request information waits for the arrival of the transport vehicle after the processing of the processing object ends, and it is difficult to improve the processing efficiency of the equipment. .
- an end notice signal indicating when the processing is to be ended Some are configured to transmit to an in-process computer as a main management means.
- the processing apparatus that has transmitted the end notice signal is used as the transfer source, and the transfer destination is the place where the processing target existing in the processing apparatus is to be transferred.
- Command information is created, and the transport command information is transmitted to an automatic guided vehicle controller as transport management means (see, for example, Patent Document 2).
- the processing device transmits a completion notice signal indicating when the processing is to be completed to the in-process computer as the main management means. Then, there is a disadvantage that the control load of the processing device increases.
- the processing apparatus is equipped with a controller that controls the operation of the equipment provided for executing the processing of the processing object, and the controller controls the operation of the equipment and controls communication with the main management means. Is executed. That is, since the controller communicates with the main management means while managing the control operation of the equipment, the workload is large, and when such a controller is to transmit an end notice signal. The control load of the processing device increases. Therefore, there is a disadvantage that an expensive controller having a large capacity is required as a controller provided in the processing apparatus, and it is desired to avoid an increase in the control load of the processing apparatus.
- the present invention has been made in view of the above circumstances, and its object is to provide a processing facility capable of improving the processing work efficiency while avoiding an increase in the control load of the processing apparatus. It is in.
- the processing facility of the present invention travels along a plurality of processing devices that perform processing of different processes on the processing target and a storage line that stores the processing target, and moves the processing target.
- There is a transport vehicle to transport Each of the plurality of processing devices transmits processing progress information including loading request information for requesting loading of the processing object and unloading request information for requesting unloading of the processing object to the main management unit.
- the main management means When the main management means transmits the carry-in request information and the carry-out request information, the main management means creates transport command information indicating a transport source and a transport destination of the processing object, and transfers the transport command information to the transport management means.
- the transport management means is configured to control the travel of the transport vehicle based on the transport command information, and the first characteristic configuration thereof is:
- the conveyance management unit monitors the processing progress information transmitted from the processing device to the main management unit, and among the plurality of processing devices, the processing of the processing object has been completed or is nearing completion.
- the processing apparatus is extracted as a preliminary transport source, and the transport vehicle is caused to travel with respect to the processing apparatus extracted as the preliminary transport source. It is in the point comprised so that a prior conveyance control may be performed.
- the conveyance management means monitors the processing progress information transmitted from the processing apparatus to the main management means, and among the plurality of processing apparatuses, the processing apparatus for which processing of the processing object has been completed or is about to end Before the conveyance command information is transmitted from the main management means, the pre-conveyance control is performed so that the processing vehicle extracted as the pre-conveyance source travels the conveyance vehicle with respect to the processing device extracted as the pre-conveyance source.
- the processing device that transmits the unloading request information is regarded as a processing device that has finished processing the processing object.
- the conveyance command information Before the conveyance command information is transmitted from the main management means, it can be extracted as a processing apparatus that is a previous conveyance source.
- the processing device when the processing device is configured to transmit the processing progress information to the main management unit as the processing progress information, the processing progress status in the processing device can be recognized based on the processing progress information. Therefore, the processing apparatus that is about to finish processing the processing object can be extracted as the processing apparatus that is the pre-conveyance source before the conveyance command information is transmitted from the main management means.
- the transport management means starts running the transport vehicle with respect to the processing device extracted as the pre-conveyance source in order to carry out the processing object from the processing device. To do.
- the transport management unit sets the transport destination based on the transport command information created and transmitted by the main management unit, and receives the processing received from the processing device.
- the traveling of the transport vehicle is controlled so that the object is transported to the transport destination.
- the conveyance management means receives the conveyance command information created by the main management means while the conveyance vehicle travels toward the processing device.
- the transport command information is received while the transport vehicle is waiting.
- the transport management means causes the transport vehicle to travel with respect to the processing device extracted as the prior transport source in order to carry out the processing object from the processing device. To start. Therefore, after the processing apparatus finishes processing the processing object, it is possible to reduce the time for waiting for the arrival of the transport vehicle, and as a result, the processing work efficiency of the processing equipment can be improved.
- the main management means uses the processing device that transmits the carry-out request information as a transport source, and the processing device Is generated and transmitted to the conveyance management means. At this time, it takes a long time (for example, to create the conveyance command information based on the conveyance request information) due to the time required to set an appropriate position as the position where the processing target should be conveyed. 30 to 60 seconds).
- the conveyance management means executes the advance conveyance control. Then, before receiving the conveyance command information from the main management means, the conveyance vehicle is caused to travel toward the processing apparatus serving as the conveyance source.
- the time required for the main management means to create the transport command information can be used to drive the transport vehicle toward the processing device that is the transport source, and the processing device can process the processing object. After completion, the time waiting for the arrival of the transport vehicle can be reduced. As a result, the processing work efficiency of the processing facility can be improved.
- the control load of the processing apparatus increases due to the advance transport control executed by the transport management means. There is no.
- the control load of the transport management unit increases by executing the pre-transport control while monitoring the processing progress information transmitted from the processing device to the main management unit, but the control load of the transport management unit is large.
- the load is inherently small. For this reason, the controller constituting the transport management means can be an inexpensive controller having a small capacity even if the prior transport control is executed.
- the first characteristic configuration of the present invention it is possible to provide a processing facility capable of improving the processing work efficiency while avoiding an increase in the control load of the processing apparatus.
- the conveyance management means is configured to extract, as the preliminary conveyance source, a processing apparatus that has completed processing of the processing object based on the carry-out request information as the processing progress information. .
- the transfer management means extracts, as a pre-transfer source, the processing apparatus that has finished processing the processing target based on the carry-out request information transmitted as processing progress information from the processing apparatus to the main management means.
- the carry-out request information transmitted as processing progress information from the processing device to the main management means is information that the processing device directly requests to carry out the processing object. In this case, it is possible to immediately extract the processing apparatus that will carry out the processing object as the advance transport source. Therefore, the conveyance management unit may simply monitor the presence / absence of the carry-out request information, and can suppress an increase in the control load on the conveyance management unit by executing the pre-conveyance control.
- the second feature configuration of the present invention it is possible to provide a processing facility capable of suppressing an increase in the control load of the transport management means due to the execution of the prior transport control, in addition to the operational effects of the first feature configuration.
- the third feature configuration of the treatment facility of the present invention includes:
- the plurality of processing devices are configured to transmit processing progress information of the processing object as the processing progress information to the main management unit,
- the conveyance management means is configured to extract, as the preliminary conveyance source, a processing device whose processing of the processing object is nearing an end based on the processing progress information as the processing progress information. It is in.
- the transport management unit uses a processing device in a state where processing of the processing object is nearing the end as a prior transport source. Extract.
- the process progress information is information indicating the progress of the process for the processing object in the processing apparatus, and therefore whether or not the process for the processing object in the processing apparatus is nearing the end based on the process progress information. Can be extracted, and a processing apparatus that is nearing the end can be extracted as a pre-conveyance source.
- the time from the time close to the end to the time when the processing device completes processing, and the main management can be used as the time for the conveyance vehicle to travel to the pre-conveyance processing apparatus. Therefore, after the processing apparatus finishes processing the processing object, it is possible to accurately reduce the time for waiting for the arrival of the transport vehicle.
- the fourth feature configuration of the treatment facility of the present invention includes:
- the transfer management means uses a processing device in which the progress status of the processing target object is a predetermined progress status before the completion time of the processing, and a processing in which the processing target status is nearing the end.
- the apparatus is configured so as to extract the processing apparatus as the advance transport source.
- the traveling rail 2 is installed in the ceiling side in the state which passes through the some processing apparatus 1 and the storage apparatus Q (a several storage apparatus Q in this example).
- a ceiling transport type transport vehicle 3 (in this example, a plurality of transport vehicles 3) that travels along a transport line S formed along the travel rail 2 is equipped, and a plurality of semiconductor substrates are provided in the storage container.
- the processing equipment which processes the processing target object 4 which accommodated is conveyed by the conveyance vehicle 3 is comprised.
- the traveling line 2 is installed in a fixed state on the ceiling by a suspension support bracket 5, and the transportation vehicle 3 is suspended and supported by the traveling rail 2. It is comprised so that it may drive
- the plurality of processing apparatuses 1 include a plurality of types that perform processing of a plurality of different processes such as a semiconductor substrate cleaning process, a drying process, an etching process, and the like. There are a plurality of processing apparatuses that perform the same process.
- Each of the plurality of processing apparatuses 1 is provided with a transfer station 1A as shown in FIGS.
- the transfer station 1A receives the processing object 4 to be processed by the processing apparatus 1 from the transport vehicle 3, and passes the processing object 4 processed by the processing apparatus 1 to the transport vehicle 3 (transfer). It is a mounting part for performing.
- the processing apparatus 1 is equipped with a substrate transfer apparatus that takes out the semiconductor substrate from the storage container in the processing object 4 placed on the transfer station 1A and stores the processed semiconductor substrate in the storage container. Has been.
- the storage device Q is a device that is used to temporarily store the processing object 4. Similar to the processing device 1, the storage device Q is provided with a transfer station Qa as shown in FIG. 1. ing.
- the storage device Q is configured to include a plurality of storage units for the processing object 4 in the vertical and horizontal directions.
- the storage device Q is equipped with transport means for transporting the processing object 4 between the transfer station Qa and the storage unit.
- the transport vehicle 3 includes a travel drive unit 3 ⁇ / b> A that travels on the travel rail 2, and a support unit 3 ⁇ / b> B that is suspended and supported by the travel drive unit 3 ⁇ / b> A so as to be positioned below the travel rail 2.
- the support part 3B is provided with a gripping part 6 for gripping the processing object 4 in a suspended state so as to be movable up and down.
- the gripping portion 6 is supported by being suspended from the support portion 3B by a cord-like body 7 composed of a wire, a belt, or the like, and is lifted by winding the cord-like body 7, It is configured to be lowered by feeding.
- the gripping part 6 is configured to be switchable between a gripping action state and a gripping release state.
- the transporting vehicle 3 is moved up and down in the state where it is stopped at the transfer position with respect to the processing device 1 and the storage device Q, and the gripping unit 6 is switched between the gripping action state and the gripping release state.
- the processing object 4 is transferred to the transfer station 1A of the processing apparatus 1 and the transfer station Qa of the storage apparatus Q, and the processing object 4 is received from the transfer stations 1A and Qa. It is configured.
- a conveyance line S connects the main route 10 to the sub route 11 by connecting the main route 10 to the sub route 11 by connecting the main route 10 to the sub route 11 by connecting the main route 10 to the sub route 11. It is formed in a state provided with a connecting route 12 for performing a merging travel from the route 11 to the main route 10.
- processing apparatus 1 is provided in the state arranged along the path
- the storage apparatus Q is provided in the state located in the connection location of the cyclic
- the processing target 4 in order to sequentially perform a plurality of different processing steps on the semiconductor substrate in the processing target 4, the processing target 4 is processed into a plurality of types of processing apparatuses 1 that perform processing of different steps. Conveys sequentially. And when the processing apparatus 1 which processes the process following the process target object 4 is performing the process with respect to the other process target object 4, the process target object 4 is once stored in the storage apparatus Q.
- a host controller JC serving as a main management unit that manages the entire processing facility and a transport controller HC serving as a transport management unit that manages the transport vehicle 3 are provided.
- the transport controller HC is configured to manage a plurality of storage devices Q in addition to the transport vehicle 3.
- the host controller JC, the transport controller HC, and the plurality of processing devices 1 are connected to be communicable with each other using a communication LAN or the like.
- the conveyance controller HC and the conveyance vehicle 3 are configured to be able to communicate with each other by wireless communication or the like, and the conveyance controller HC and the storage device Q are connected to each other via a communication cable or the like.
- the plurality of processing devices 1 are equipped with a controller that controls the operation of the devices and performs communication with the host controller JC. Therefore, the processing device 1 communicating means that this controller executes communication control. That is, transmission of information (for example, processing progress information) from the processing device 1 to the host controller JC is executed by this controller controlled by the processing device 1.
- the plurality of storage devices Q are equipped with a controller that controls the operation of the transfer means described above and performs communication with the transfer controller HC. Therefore, when the storage device Q communicates, this controller executes communication control, and when the storage device Q enters and exits the processing object 4, this controller controls the operation of the conveying means. .
- the plurality of transport vehicles 3 are controlled for a traveling operation, a lifting / lowering operation of the gripping portion 6, and a gripping state switching operation for switching the gripping portion 6 between a gripping action state and a gripping release state.
- a controller to perform communication with. Therefore, the conveyance vehicle 3 communicates when this controller executes communication control, and the conveyance vehicle 3 travels when this controller executes travel control.
- the transfer of the processing object 4 by the transport vehicle 3 means that the controller executes the lifting / lowering operation of the gripping unit 6 and the gripping state switching operation of the gripping unit 6.
- Each of the plurality of processing apparatuses 1 includes processing request information that requests the processing object 4 to be carried in and processing information that includes the request to carry out the processing object 4 based on the processing progress status of the processing object 4.
- the information is configured to be transmitted to the host controller JC. That is, when the processing object 1 does not exist immediately after the operation is started or immediately after the processing object 4 is carried out, the processing device 1 sends the import request information of the processing object 4 to the host controller JC as processing progress information. Send.
- each of the plurality of processing devices 1 sends processing progress information (processing progress information) for the processing target object 4 being processed to the host controller JC as processing progress information based on the processing progress status for the processing target object 4. It is comprised so that it may transmit. Further, each of the plurality of processing devices 1 is configured to transmit the unloading request information of the processing object 4 to the host controller JC as processing progress information when the processing on the processing object 4 is completed.
- the processing progress information transmitted by the processing apparatus 1 includes the opening of the storage container of the processing object 4, the start of taking out the semiconductor substrate from the storage container, the completion of the removal of the semiconductor substrate, The completed first semiconductor substrate is stored in the storage container, the processed n-th semiconductor substrate (n is an integer of 2 or more) is stored in the storage container, and the last semiconductor substrate is processed.
- the information is stored in the container, the lid of the storage container is closed, and the like.
- the processing period from the start time of processing (overall processing) in the processing device 1 to the completion time (end time) of the processing is managed in a plurality of stages (progress stages), and the current progress status Information on the progress stage corresponding to is included in the processing progress information.
- Each of the plurality of progress stages is set based on, for example, the configuration of the processing object 4 and the contents of processing in the processing apparatus 1.
- the process of opening the lid of the storage container in the processing object 4 the process of starting to take out the semiconductor substrate from the storage container, the process of completing the removal of the semiconductor substrate, and the first semiconductor substrate that has been processed Storing the nth semiconductor substrate in the storage container, storing the nth semiconductor substrate in the storage container, storing the last semiconductor substrate in the processing in the storage container, and closing the lid of the storage container
- Each step is executed at a plurality of (seven in this example) progress stages.
- the first progress stage including the start time of the entire process in the processing device 1 is referred to as a “start stage”, and the last progress stage including the completion time of the entire process in the processing apparatus 1 is referred to as a “completion stage”.
- “And the completion stage” is the progress stage.
- the start stage is a progress stage in which the process of opening the lid of the storage container in the processing object 4 is executed
- the completion stage is a progress stage in which the process of closing the lid of the storage container is executed.
- the host controller JC manages the progress information of a plurality of processing steps for the processing object 4, the processing status of the processing devices 1, and the storage status of the processing target 4 in the storage device Q. Then, when the carry-in request information and the carry-out request information are transmitted from the plurality of processing devices 1 (that is, when the carry-in request information and the carry-out request information are received), the host controller JC performs a plurality of processes on the processing object 4. Based on the process progress information, the processing status of the plurality of processing devices 1, the storage status of the processing target 4 in the storage device Q, and the like, the transport command information indicating the transport source and the transport destination of the processing target 4 is created. The transport command information is transmitted to the transport controller HC.
- the host controller JC when receiving the carry-in request information, extracts the processing object 4 to be carried into the processing device 1 that has transmitted the carry-in request information.
- the extraction of the processing object 4 is often extracted from the processing object 4 stored in the storage device Q.
- the host controller JC instructs the storage device Q to issue the corresponding processing object 4. That is, the host controller JC transmits the leaving command information to the storage device Q.
- the transport controller HC since the transport controller HC is configured to manage the storage device Q, when the host controller JC instructs the storage device Q to issue the processing object 4, Then, the delivery controller HC is instructed to issue the processing object 4 from the storage device Q. That is, the host controller JC transmits the delivery command information to the transport controller HC. Based on the command, the transport controller HC commands the storage device Q to leave.
- the host controller JC extracts the processing object 4 to be transported, a transport command that uses the processing apparatus 1 that has transmitted the import request information of the processing object 4 as a transport source, and a transport destination as a transport source. Information is created and the conveyance command information is transmitted to the conveyance controller HC.
- the conveyance controller HC controls the traveling of the conveyance vehicle 3 so as to convey the conveyance target processing object 4 to the conveyance destination processing apparatus 1. That is, the transport vehicle 3 is caused to travel to a location where the processing object 4 is received, the processing object 4 is received, and then the transport vehicle 3 is traveled to the processing device 1 as the transport destination, so that the processing device as the transport destination is obtained.
- the processing object 4 is passed to 1.
- a plurality of transport vehicles 3 are equipped, and a transport vehicle 3 that can be transported during non-operation or the like is selected as the transport vehicle 3 for transporting the processing object 4.
- the host controller JC uses the processing device 1 that transmitted the carry-out request information as a transport source, and sends the transport command information to the transport destination where the processing object 4 from the processing device 1 is to be transported. Create and send to the transport controller HC.
- the host controller JC determines in what process the next process is performed on the processing object 4 to be transported.
- an appropriate location is set as a location where the processing object 4 is to be transported in consideration of conditions such as improving the operating rate of the plurality of processing apparatuses 1.
- the location where the processing object 4 is to be transported is often determined in the storage device Q, but locations other than the storage device Q may be defined as locations to be transported.
- the carry-in request information is transmitted from the other processing device 1 to the host controller JC, and the processing device 1 next performs the processing object 4.
- the processing apparatus 1 may be determined as a place where the processing object 4 is to be transported.
- the processing apparatus 1 that receives the processing object 4 is the transport source, and the transport destination is the location where the processing object 4 is to be transported.
- Command information is created and the conveyance command information is transmitted to the conveyance controller HC.
- the transport controller HC is configured to monitor the processing progress information transmitted from the processing device 1 to the host controller JC and to perform pre-transport control.
- pre-conveyance control is a pre-conveyance of the processing apparatus 1 that has finished processing the processing object 4 among the plurality of processing apparatuses 1 before the conveyance command information is transmitted from the host controller JC. It is control which makes the conveyance vehicle 3 drive
- the transport controller HC sends the processing device 1 that transmits the carry-out request information to the processing object 4. Is processed (in other words, it is determined that the processing object 1 has been processed), before the conveyance command information is transmitted from the host controller JC, Extracted as the processing apparatus 1.
- Communication between the host controller JC and each processing device 1 is performed in such a manner that communication information including a transmission destination, a transmission source, and transmission information is transmitted from the transmission source.
- the transport controller HC monitors communication information communicated between the host controller JC and each processing device 1, and the transmission source is the processing device 1, the transmission destination is the host controller JC, and the transmission information is a carry-out request. By extracting communication information that is information, the processing apparatus 1 that transmits the carry-out request information is extracted.
- the transfer controller 3 moves the transport vehicle 3 to the process apparatus 1 extracted as the advance transfer source in order to carry out the processing object 4 from the process apparatus 1. Start running. Regarding which one of the plurality of transport vehicles 3 is caused to travel to the processing apparatus 1 extracted as the advance transport source, among the plurality of transport vehicles 3, the transport vehicle 3 to which the transport work is not assigned. Therefore, the transport vehicle 3 close to the processing apparatus 1 extracted as the pre-transport source (for example, the closest transport vehicle 3) is selected.
- the pre-transport source for example, the closest transport vehicle 3
- the transport controller HC confirms whether or not the transport vehicle 3 has arrived at the processing device 1 after starting the traveling of the transport vehicle 3 with respect to the processing device 1 extracted as the prior transport source, and the processing device. 1 confirms that the transport vehicle 3 arriving at 1 has finished receiving the processing object 4 from the processing device 1.
- the transport controller HC specifies the transport destination based on the transport command information transmitted from the host controller JC, and receives the processing received from the processing device 1.
- the travel of the transport vehicle 3 is controlled so as to transport the object 4 to the transport destination.
- the transport controller HC receives the transport command information created by the host controller JC while the transport vehicle 3 travels toward the processing device 1.
- the transport command information is received while the transport vehicle 3 is on standby.
- the transfer controller HC when the transfer controller HC extracts the processing apparatus 1 as the advance transfer source, the transfer controller HC transports the processing object 1 extracted as the advance transfer source to the processing apparatus 1 in order to carry out the processing object 4 from the process apparatus 1. Start running 3. Therefore, after the processing apparatus 1 finishes the processing of the processing object 4, the time for waiting for the arrival of the transport vehicle 3 can be reduced, and as a result, the processing work efficiency of the processing equipment can be improved.
- the host controller JC determines the transport source of the processing object 4 transported to the processing device 1 that transmitted the carry-in request information as described above. Extract. And the conveyance command information which makes the location which receives the extracted processing target object 4 the conveyance origin, the processing apparatus 1 which transmitted the carrying-in request information of the processing target object 4 as a conveyance destination is created, and the conveyance instruction information is conveyed Transmit to the controller HC.
- the transport source is the storage device Q
- the host controller JC transmits the exit command information to the transport controller HC as described above.
- the transport controller HC causes the selected transport vehicle 3 to travel to the transport source, receives the processing object 4 at the transport source, and then travels the transport vehicle 3 to the transport destination.
- the processing object 4 is transferred to the transport destination.
- the conveyance controller HC transmits conveyance completion information indicating that the conveyance is completed to the host controller JC.
- the host controller JC When the host controller JC receives the transfer completion information, the host controller JC transmits processing start instruction information to the processing device 1.
- the processing device 1 that has received the process start information starts the process, and transmits the above-described process progress information to the host controller JC.
- the host controller JC performs management processing for managing the processing status of the processing device 1 based on the processing progress information transmitted from the processing device 1.
- the processing device 1 transmits unloading request information as processing progress information to the host controller JC.
- the host controller JC sets a transport destination as a location where the processing object 4 from the processing device 1 that transmits the carry-out request information is to be transported.
- the host controller JC uses the processing device 1 that transmits the carry-out request information as the transport source, and transport command information that uses the location where the processing target 4 from the processing device 1 is to be transported as the transport destination. And the conveyance command information is transmitted to the conveyance controller HC.
- the transport controller HC that monitors communication information communicated between the host controller JC and each processing device 1 sends the carry-out request information.
- the processing apparatus 1 to be transmitted is extracted as a pre-conveyance source.
- the transfer controller HC extracts the processing apparatus 1 as the advance transfer source
- the transfer controller 3 moves the transport vehicle 3 to the process apparatus 1 extracted as the advance transfer source in order to carry out the processing object 4 from the process apparatus 1. Start running.
- the transport controller HC is transmitted from the host controller JC. Based on the coming conveyance command information, the conveyance destination is specified, and the traveling of the conveyance vehicle 3 is controlled so that the processing object 4 received from the processing apparatus 1 is conveyed to the conveyance destination.
- the transport controller HC receives the transport command information created by the host controller JC while the transport vehicle 3 travels toward the processing device 1.
- the transport command information is received while the transport vehicle 3 is on standby.
- the processing apparatus 1 from which the processing object 4 has been unloaded transmits the carry-in request information to the host controller JC, and the transport controller HC indicates that the transport has been completed when the transport of the processing object 4 is completed. Transfer completion information is transmitted to the host controller JC.
- the host controller JC that has received the carry-in request information and the transfer completion information extracts the transfer source of the processing object 4 to be transferred to the processing apparatus 1 that has transmitted the carry-in request information, and the extracted processing object 4 Is generated as a conveyance source, and conveyance command information is generated with the processing apparatus 1 that has transmitted the carry-in request information of the processing object 4 as a conveyance destination, and the conveyance command information is transmitted to the conveyance controller HC.
- the transport controller HC communicates with the upper controller JC, and the transport controller that communicates with the transport controller 15 and manages the operation of the transport vehicle 3. 16 and a storage controller 17 that communicates with the physical distribution controller 15 and manages the operation of the storage device Q.
- the distribution controller 15 transmits the conveyance command information transmitted from the host controller JC to the conveyance control controller 16, and stores the information related to the storage device Q such as the delivery command information transmitted from the host controller JC. Send to.
- the distribution controller 15 monitors the processing progress information transmitted from the processing device 1 to the host controller JC, and selects the processing device 1 that has finished processing the processing object 4 among the plurality of processing devices 1.
- the transport controller 16 outputs a pre-travel command for extracting the pre-transport source and causing the processing apparatus 1 extracted as the pre-transport source to travel the transport vehicle 3.
- the conveyance control controller 16 starts to move the conveyance vehicle 3 toward the instructed processing device 1 when the advance traveling instruction is instructed from the physical distribution controller 15.
- the transport controller 16 sends the processing object 4 received from the processing device 1 that has traveled according to the advance travel command to the transport destination specified by the transport command information.
- the travel of the transport vehicle 3 is controlled so as to be transported.
- This 2nd Embodiment is a structure suitable when comprising the large sized installation which increased the number of installation of the processing apparatus 1, the storage apparatus Q, and the conveyance vehicle 3.
- FIG. when comprising such a large sized facility, it equips with the relay controller which communicates with each of the some processing apparatus 1, and communicates with the high-order controller JC, and this high-order controller is connected via this relay controller. Communication between the controller JC and each of the plurality of processing devices 1 may be performed.
- the processing device 1 to be the pre-conveyance source is extracted based on the carry-out request information is illustrated.
- the processing device 1 uses the processing progress information as the processing progress information.
- the transport management means transport controller HC
- the processing apparatus 1 instructs the processing apparatus 1 that is about to finish processing the processing object 4 from the main management means (upper controller JC) to the transport command.
- the information may be extracted as the pre-conveying source processing apparatus 1.
- the lid of the storage container in the processing object 4 is opened, and the semiconductor substrate extraction from the storage container is started.
- the first semiconductor substrate that has been processed is stored in the storage container
- the nth semiconductor substrate that has been processed is stored in the storage container
- the last semiconductor substrate that has been processed is stored in the storage container
- Information such as closing of the lid of the storage container is transmitted from the processing apparatus 1.
- the transfer management means monitors information that the last semiconductor substrate that has been processed has been stored in the storage container, and the processing apparatus 1 that transmits this information can process the processing object 4.
- the extraction may be performed as the pre-conveying source processing apparatus 1.
- the processing period of the processing apparatus 1 is managed in a plurality of progress stages.
- the processing device 1 that transmits information that the last semiconductor substrate that has been processed is stored in the storage container is determined to be the processing device 1 that is about to finish processing the processing object 4.
- the processing apparatus 1 in the progress stage in which the process of storing the last semiconductor substrate that has been processed is stored in the storage container is the processing apparatus 1 that is about to end the processing of the processing object 4.
- the progress stage (hereinafter, referred to as “specific progress stage”) for determining that the processing of the processing object 4 is in a near-end state is an intermediate stage immediately before the completion stage.
- the progress status corresponding to the specific progress stage is a predetermined progress status before the processing completion time of the processing object 4. Therefore, in this case, the processing management unit 1 in which the conveyance management means has a predetermined progress status (hereinafter, referred to as “specific progress status”) before the completion time of the processing. Is determined to be the processing apparatus 1 in a state where the processing of the processing object 4 is nearing the end. In other words, the transport management means determines that the processing device 1 whose processing target 4 is in the specific progress stage is the processing device 1 in which the processing of the processing target 4 is nearing completion. Become.
- the intermediate stage two or more before the completion stage is set as the specific progress stage, not the intermediate stage immediately before the completion stage.
- the specific progress situation is set to a progress situation corresponding to a specific time point in the specific progress stage (for example, a start time point or an end time point of the specific progress stage).
- the completion stage can be set to the specific progress stage.
- the progress corresponding to the start time of the completion stage can be set to the specific progress.
- the suspension-type transport vehicle 3 that travels along the traveling rail 2 installed on the ceiling side is illustrated.
- the transport vehicle 3 the floor traveling on the floor surface is exemplified.
- Various forms of transport vehicles such as a surface traveling type carriage can be applied.
- the transport line S includes the annular main path 10, the plurality of annular sub paths 11, and the plurality of connection paths 12 that connect the main path 10 and the sub paths 11.
- the specific configuration of the transport line S can be variously changed.
- the processing object 4 is limited to the storage container that stores the semiconductor substrate.
- the present invention can be applied to conveying various processed objects as processing objects.
- the temporary storage unit for the processing object 4 may be provided corresponding to the processing apparatus 1.
- the temporary placement unit of the processing device 1 can be defined as a location to be transported.
- the processing target 4 is transferred from the transport source.
- the present invention is preferably used in a processing facility provided with a transport vehicle that travels along a transport line that passes through a plurality of processing devices and a storage device that stores the processing target, and transports the processing target. Can do.
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Abstract
Description
例えば、処理設備が半導体基板に対して処理する設備の場合には、複数枚の半導体基板を収納する半導体収納容器が、処理対象物に相当する。つまり、半導体基板を処理する処理装置は、半導体収納容器から半導体基板を順次取り出して処理し、処理済みの半導体基板を順次半導体収納容器に収納する。
すなわち、処理装置は、運転開始時や処理対象物が搬出された直後で処理対象物が存在しないときには、処理対象物の搬入要求情報を、処理進行情報として主管理手段に対して送信する。
主管理手段は、搬入要求情報を受信すると、搬入要求情報を送信した処理装置に搬入するための処理対象物を抽出する。この処理対象物の抽出は、貯留装置に貯留されている処理対象物のうちから抽出されることが多く、貯留装置に貯留されている処理対象物を抽出する場合には、主管理手段は、貯留装置に対して、該当する処理対象物の出庫を指令する。
一般には、複数台の搬送車が装備されて、非作業中等の搬送可能な搬送車が処理対象物を搬送するための搬送車として選択される。
処理装置からの処理対象物を搬送すべき箇所としての搬送先を設定する際には、主管理手段は、搬送する処理対象物に対して次に処理する工程がどのような工程であるかを、その処理対象物についての複数の処理工程の進行情報に基づいて確認し、複数の処理装置の現在の処理状況を確認し、加えて、貯留装置の処理対象物の貯留状況を確認した上で、複数の処理装置の稼動率を向上する等の条件を鑑みながら、処理対象物を搬送すべき箇所として適正な箇所を設定する。
例えば、搬送指令情報の作成中やその直前において、他の処理装置から主管理手段に対して搬入要求情報が送信され、しかも、その処理装置が、処理対象物に対して次に行う工程の処理を行う処理装置である場合には、その処理装置が、処理対象物を搬送すべき箇所として定められる場合もある。
また、処理装置に対応して仮置き部が装備される場合においては、上述した搬入要求情報を送信する処理装置に対して搬入する処理対象物を抽出する際に、その処理装置に対応する仮置き部に処理対象物が存在するときには、その処理対象物が優先して抽出される。
つまり、搬入要求情報を送信する処理装置には、上述の如く、貯留装置に貯留されている処理対象物が搬入されることが多いが、他の処理装置や仮置き部からの処理対象物が搬入される場合もある。
つまり、従来では、搬送管理手段は、主管理手段から搬送指令情報を受信すると、搬送車の走行制御を開始して、処理対象物を受け取ることになる搬送元の処理装置に搬送車を走行させて、処理対象物を受け取り、次に、処理対象物を搬送すべき箇所に搬送車を走行させて、処理対象物を渡すように構成されていた(例えば、特許文献1参照。)。
前記複数の処理装置の夫々が、前記処理対象物の搬入を要求する搬入要求情報及び前記処理対象物の搬出を要求する搬出要求情報を含む処理進行情報を、主管理手段に対して送信するように構成され、
前記主管理手段が、前記搬入要求情報及び前記搬出要求情報が送信されると、前記処理対象物の搬送元及び搬送先を示す搬送指令情報を作成して、その搬送指令情報を、搬送管理手段に対して送信するように構成され、
前記搬送管理手段が、前記搬送指令情報に基づいて、前記搬送車の走行を制御するように構成されているものであって、その第1特徴構成は、
前記搬送管理手段が、前記処理装置から前記主管理手段に対して送信される前記処理進行情報を監視して、複数の前記処理装置のうちで、前記処理対象物の処理が終了した又は終了間近である処理装置を、前記主管理手段から前記搬送指令情報が送信されてくる以前に、事前搬送元として抽出し、前記事前搬送元として抽出した前記処理装置に対して前記搬送車を走行させる事前搬送制御を実行するように構成されている点にある。
また、処理装置が、処理進行情報として処理進捗情報を主管理手段に対して送信するように構成される場合においては、その処理進捗情報に基づいて、その処理装置における処理の進捗状況を認識できるため、処理対象物の処理が終了間近である処理装置を、主管理手段から搬送指令情報が送信されてくる以前に、事前搬送元の処理装置として抽出することができる。
そして、搬送管理手段は、事前搬送元とする処理装置を抽出すると、その処理装置から処理対象物を搬出するために、事前搬送元として抽出した処理装置に対して搬送車を走行させることを開始する。
搬送管理手段は、主管理手段にて作成される搬送指令情報を、搬送車が処理装置に向けて走行する途中で受信する。或いは、搬送指令情報の受信前に、搬送車が処理装置に到着した場合には、搬送車を待機させながら、搬送指令情報を受信する。
一方、搬送管理手段の制御負荷は、処理装置から主管理手段に対して送信される処理進行情報を監視しながら事前搬送制御を実行することにより増加するが、搬送管理手段の制御負荷は、多量の情報を管理する必要がある主管理手段や処理装置に比べて、本来的に小さな負荷である。そのため、搬送管理手段を構成するコントローラとしては、事前搬送制御を実行させるようにしても、容量の小さな安価なもので済ませることができる。
前記搬送管理手段が、前記処理進行情報としての前記搬出要求情報に基づいて、前記処理対象物の処理が終了した処理装置を、前記事前搬送元として抽出するように構成されている点にある。
前記複数の処理装置が、前記処理対象物の処理進捗情報を、前記処理進行情報として前記主管理手段に対して送信するように構成され、
前記搬送管理手段が、前記処理進行情報としての前記処理進捗情報に基づいて、前記処理対象物の処理が終了間近である処理装置を、前記事前搬送元として抽出するように構成されている点にある。
前記搬送管理手段は、前記処理対象物の処理の進捗状況が当該処理の完了時点より前の予め定められた進捗状況である処理装置を、前記処理対象物の処理が終了間近の状態である処理装置とし、当該処理装置を前記事前搬送元として抽出するように構成されている点にある。
本発明の第1実施形態を図面に基づいて説明する。
図1及び図2に示すように、複数の処理装置1及び貯留装置Q(本例では複数の貯留装置Q)を経由する状態で走行レール2が天井側に設置されている。この走行レール2に沿って形成される搬送ラインSに沿って走行する天井搬送式の搬送車3(本例では複数台の搬送車3)が装備されて、収納容器内に複数枚の半導体基板を収納した処理対象物4を、搬送車3によって搬送しながら処理する処理設備が構成されている。
また、複数の処理装置1の夫々には、図1及び図2に示すように移載ステーション1Aが設けられている。
この移載ステーション1Aは、処理装置1にて処理を行う処理対象物4を搬送車3から受け取ることや、処理装置1にて処理を行った処理対象物4を搬送車3に渡す(移載する)ことを行うための載置部である。例示はしないが、処理装置1には、移載ステーション1Aに載置された処理対象物4における収納容器から半導体基板を取り出し、処理後の半導体基板を収納容器に収納する基板移載装置が装備されている。
例えば、貯留装置Qは、処理対象物4の収納部を縦横に複数備えて構成される。例示はしないが、貯留装置Qには、移載ステーションQaと収納部との間で処理対象物4を搬送する搬送手段が装備されている。
把持部6は、ワイヤやベルト等にて構成される索状体7にて、支持部3Bに対して吊下げ支持されており、索状体7の巻き取りにより上昇され、索状体7の繰り出しにより下降されるように構成されている。また、把持部6は、把持作用状態と把持解除状態とに切換え自在に構成されている。
図3に示すように、処理設備全体を管理する主管理手段としての、上位コントローラJC、及び、搬送車3を管理する搬送管理手段としての、搬送コントローラHCが設けられている。
本実施形態においては、搬送コントローラHCが、搬送車3に加えて、複数の貯留装置Qをも管理するように構成されている。
したがって、処理装置1が通信するとは、このコントローラが通信制御を実行することである。すなわち、処理装置1から上位コントローラJCに対する情報(例えば、処理進行情報)の送信は、処理装置1により制御されたこのコントローラにより実行される。
したがって、貯留装置Qが通信するとは、このコントローラが通信制御を実行することであり、貯留装置Qが処理対象物4を入庫及び出庫するとは、このコントローラが搬送手段の作動を制御することである。
したがって、搬送車3が通信するとは、このコントローラが通信制御を実行することであり、搬送車3が走行するとは、このコントローラが、走行制御を実行することである。さらに、搬送車3が処理対象物4を移載するとは、このコントローラが、把持部6の昇降作動、及び、把持部6の把持状態切換え作動を実行することである。
すなわち、処理装置1は、運転開始時や処理対象物4が搬出された直後で処理対象物4が存在しないときには、処理対象物4の搬入要求情報を、処理進行情報として上位コントローラJCに対して送信する。
例えば、処理装置1が送信する処理の進捗情報とは、処理対象物4における収納容器の蓋を開いた、収納容器から半導体基板を取り出すことを開始した、半導体基板の取り出しが終了した、処理が終了した一枚目の半導体基板を収納容器に収納した、処理が終了したn枚目(nは2以上の整数)の半導体基板を収納容器に収納した、処理が終了した最後の半導体基板を収納容器に収納した、収納容器の蓋を閉じた等の情報である。
尚、本実施形態においては、搬送コントローラHCが、貯留装置Qを管理するように構成されているため、上位コントローラJCは、貯留装置Qに対して処理対象物4の出庫を指令する場合には、搬送コントローラHCに対して、貯留装置Qからの処理対象物4の出庫を指令する。すなわち、上位コントローラJCは、搬送コントローラHCに対して出庫指令情報を送信する。その指令に基づいて、搬送コントローラHCが貯留装置Qに対して出庫を指令する。
一般には、複数台の搬送車3が装備されて、非作業中等の搬送可能な搬送車3が処理対象物4を搬送するための搬送車3として選択される。
処理装置1からの処理対象物4を搬送すべき箇所としての搬送先を設定する際には、上位コントローラJCは、搬送する処理対象物4に対して次に処理する工程がどのような工程であるかを、その処理対象物4についての複数の処理工程の進行情報に基づいて確認し、複数の処理装置1の現在の処理状況を確認し、加えて、貯留装置Qの処理対象物4の貯留状況を確認した上で、複数の処理装置1の稼動率を向上する等の条件を鑑みながら、処理対象物4を搬送すべき箇所として適正な箇所を設定する。
例えば、搬送指令情報の作成中やその直前において、他の処理装置1から上位コントローラJCに対して搬入要求情報が送信され、しかも、その処理装置1が、処理対象物4に対して次に行う工程の処理を行う処理装置1である場合には、その処理装置1が、処理対象物4を搬送すべき箇所として定められる場合もある。
複数の搬送車3のうちのいずれの搬送車3を、事前搬送元として抽出した処理装置1に走行させるかについては、複数の搬送車3のうちの、搬送作業を割り当てていない搬送車3であって、事前搬送元として抽出した処理装置1に近い搬送車3(例えば、最も近い搬送車3)が選択される。
搬送コントローラHCは、上位コントローラJCにて作成される搬送指令情報を、搬送車3が処理装置1に向けて走行する途中で受信する。或いは、搬送指令情報の受信前に、搬送車3が処理装置1に到着した場合には、搬送車3を待機させながら、搬送指令情報を受信する。
なお、以下の説明においては、通信内容の概要のみを説明して、通信内容の詳細については省略する。
また、上位コントローラJC、処理装置1、及び、搬送コントローラHCの間の通信においては、送信された通信情報を受信すると、受信したことを示す応答情報を送信元に対して送信することにより、送信された通信情報が適正通り受信されたことを確認し、応答情報が送信されてこない場合には、通信情報を再度送信することが行われるが、以下の説明においては、応答情報の送信についての記載は省略する。
そして、その抽出した処理対象物4を受け取る箇所を搬送元とし、処理対象物4の搬入要求情報を送信した処理装置1を搬送先とする搬送指令情報を作成して、その搬送指令情報を搬送コントローラHCに対して送信する。
搬送元が貯留装置Qである場合には、上位コントローラJCは、上述の如く、搬送コントローラHCに対して出庫指令情報を送信する。
そして、処理対象物4の搬送が完了すると、搬送コントローラHCは、搬送が完了したことを示す搬送完了情報を上位コントローラJCに対して送信する。
上位コントローラJCは、処理装置1から送信されてくる処理の進捗情報に基づいて、処理装置1の処理状況を管理する管理処理を行う。
上位コントローラJCは、処理装置1から搬出要求情報が送信されてくると、搬出要求情報を送信する処理装置1からの処理対象物4を搬送すべき箇所としての搬送先を設定する。
そして、搬送先を設定すると、上位コントローラJCは、搬出要求情報を送信する処理装置1を搬送元とし、その処理装置1からの処理対象物4を搬送すべき箇所を搬送先とする搬送指令情報を作成して、その搬送指令情報を、搬送コントローラHCに対して送信する。
そして、搬送コントローラHCは、事前搬送元とする処理装置1を抽出すると、その処理装置1から処理対象物4を搬出するために、事前搬送元として抽出した処理装置1に対して搬送車3を走行させることを開始する。
搬送コントローラHCは、上位コントローラJCにて作成される搬送指令情報を、搬送車3が処理装置1に向けて走行する途中で受信する。或いは、搬送指令情報の受信前に、搬送車3が処理装置1に到着した場合には、搬送車3を待機させながら、搬送指令情報を受信する。
次に、第2実施形態について説明する。この第2実施形態は、搬送コントローラHCの構成が第1実施形態と異なるが、その他の構成は、第1実施形態と同様である。そのため、以下の説明においては、第1実施形態と異なる部分のみについて説明する。
また、物流コントローラ15は、処理装置1から上位コントローラJCに対して送信される処理進行情報を監視して、複数の処理装置1のうちで、処理対象物4の処理が終了した処理装置1を、上位コントローラJCから搬送指令情報が送信されてくる以前に、事前搬送元として抽出し、事前搬送元として抽出した処理装置1に対して搬送車3を走行させる事前走行指令を、搬送制御コントローラ16に指令する。
そして、このように大型の設備を構成する場合には、上位コントローラJCと通信し、且つ、複数の処理装置1の夫々と通信する中継コントローラを装備して、この中継コントローラを経由して、上位コントローラJCと複数の処理装置1の夫々との間での通信を行わせるようにしてもよい。
次に、別実施形態を列記する。
(1)上記第1及び第2実施形態では、搬出要求情報に基づいて、事前搬送元とする処理装置1を抽出する場合を例示したが、処理装置1が、処理進行情報として処理進捗情報を送信する場合においては、その処理進捗情報に基づいて、その処理装置1における処理の進捗状況を認識できる。そのため、搬送管理手段(搬送コントローラHC)が、処理進行情報としての処理進捗情報に基づき、処理対象物4の処理が終了間近である処理装置1を、主管理手段(上位コントローラJC)から搬送指令情報が送信されてくる以前に、事前搬送元の処理装置1として抽出する形態で実施してもよい。
この場合、仮置き部を装備する処理装置1が搬入要求情報を送信した際に、その処理装置1に対応する仮置き部に処理対象物4が存在するときには、その処理対象物4が搬送元の処理対象物として優先して抽出される。
3 搬送車
4 処理対象物
HC 搬送コントローラ(搬送管理手段)
JC 上位コントローラ(主管理手段)
Q 貯留装置
S 搬送ライン
Claims (4)
- 処理対象物に対して異なる工程の処理を行う複数の処理装置及び前記処理対象物を貯留する貯留装置を経由する搬送ラインに沿って走行して、前記処理対象物を搬送する搬送車が設けられ、
前記複数の処理装置の夫々が、前記処理対象物の搬入を要求する搬入要求情報及び前記処理対象物の搬出を要求する搬出要求情報を含む処理進行情報を、主管理手段に対して送信するように構成され、
前記主管理手段が、前記搬入要求情報及び前記搬出要求情報が送信されると、前記処理対象物の搬送元及び搬送先を示す搬送指令情報を作成して、その搬送指令情報を、搬送管理手段に対して送信するように構成され、
前記搬送管理手段が、前記搬送指令情報に基づいて、前記搬送車の走行を制御するように構成されている処理設備であって、
前記搬送管理手段が、前記処理装置から前記主管理手段に対して送信される前記処理進行情報を監視して、複数の前記処理装置のうちで、前記処理対象物の処理が終了した又は終了間近である処理装置を、前記主管理手段から前記搬送指令情報が送信されてくる以前に、事前搬送元として抽出し、前記事前搬送元として抽出した前記処理装置に対して前記搬送車を走行させる事前搬送制御を実行するように構成されている処理設備。 - 前記搬送管理手段が、前記処理進行情報としての前記搬出要求情報に基づいて、前記処理対象物の処理が終了状態である処理装置を、前記事前搬送元として抽出するように構成されている請求項1記載の処理設備。
- 前記複数の処理装置が、前記処理対象物の処理進捗情報を、前記処理進行情報として前記主管理手段に対して送信するように構成され、
前記搬送管理手段が、前記処理進行情報としての前記処理進捗情報に基づいて、前記処理対象物の処理が終了間近の状態である処理装置を、前記事前搬送元として抽出するように構成されている請求項1記載の処理設備。 - 前記搬送管理手段は、前記処理対象物の処理の進捗状況が当該処理の完了時点より前の予め定められた進捗状況である処理装置を、前記処理対象物の処理が終了間近の状態である処理装置とし、当該処理装置を前記事前搬送元として抽出するように構成されている請求項3記載の処理設備。
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- 2012-07-04 WO PCT/JP2012/067109 patent/WO2013015086A1/ja active Application Filing
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CN103703424B (zh) | 2016-06-29 |
TWI544298B (zh) | 2016-08-01 |
CN103703424A (zh) | 2014-04-02 |
KR101887149B1 (ko) | 2018-08-09 |
TW201313586A (zh) | 2013-04-01 |
US20140249667A1 (en) | 2014-09-04 |
US9086697B2 (en) | 2015-07-21 |
JP5773200B2 (ja) | 2015-09-02 |
JP2013030003A (ja) | 2013-02-07 |
KR20140049542A (ko) | 2014-04-25 |
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