JP6428953B2 - 搬送システム及び搬送方法 - Google Patents
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- 238000000034 method Methods 0.000 title claims description 23
- 230000032258 transport Effects 0.000 claims description 363
- 238000011144 upstream manufacturing Methods 0.000 claims description 89
- 238000012546 transfer Methods 0.000 claims description 58
- 238000011084 recovery Methods 0.000 claims description 55
- 230000007246 mechanism Effects 0.000 claims description 20
- 238000012545 processing Methods 0.000 description 49
- 239000004065 semiconductor Substances 0.000 description 41
- 230000006866 deterioration Effects 0.000 description 17
- 230000008569 process Effects 0.000 description 11
- 230000001965 increasing effect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 230000003111 delayed effect Effects 0.000 description 5
- 230000007717 exclusion Effects 0.000 description 4
- 230000002035 prolonged effect Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/10—Sequence control of conveyors operating in combination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Description
Claims (7)
- 軌道と、
前記軌道に沿って走行し、被搬送物を搬送する複数の搬送車と、
前記搬送車に対する前記被搬送物の搬送指令を出力するコントローラと、を備え、
前記コントローラは、前記被搬送物を載置可能な場所である下流側ポートに載置された第1の被搬送物が回収待ちの状態であり、且つ、前記搬送車の走行方向において前記下流側ポートよりも上流側に配置され、前記被搬送物を載置可能な場所である上流側ポートに前記被搬送物が載置されていない場合に、
前記第1の被搬送物が回収待ちの状態となってから予め定められた待機時間が経過するまでは、前記上流側ポートに第2の被搬送物を搬送する前記搬送車が把握されるまで前記第1の被搬送物の回収を指示する搬送指令の出力を待機し、
前記第1の被搬送物が回収待ちの状態となった時点から前記待機時間が経過した場合には、前記第1の被搬送物の回収を指示する搬送指令を出力する、
搬送システム。 - 前記コントローラは、上位コントローラから受け付けた前記被搬送物の搬送要求に基づいて前記被搬送物の搬送指令を出力するように構成されており、
前記コントローラは、前記第1の被搬送物が回収待ちの状態となってから予め定められた第1の待機時間が経過するまでに、前記上流側ポートへの前記第2の被搬送物の搬送を指示する搬送要求を前記上位コントローラから受け付けなかった場合に、前記第1の被搬送物の回収を指示する搬送指令を出力する、
請求項1に記載の搬送システム。 - 前記コントローラは、前記上流側ポートへの前記第2の被搬送物の搬送を指示する搬送要求を前記上位コントローラから受け付けてから予め定められた第2の待機時間が経過するまでに、前記第2の被搬送物が前記搬送車によって搬送される搬送状態とならなかった場合に、前記第1の被搬送物の回収を指示する搬送指令を出力する、
請求項2に記載の搬送システム。 - 前記搬送車が前記被搬送物を受け渡し可能な保管部、及び前記搬送車が前記被搬送物を受け渡し可能な装置ポートと前記保管部との間で前記被搬送物を移載可能な移載機構、を有する保管装置を更に備え、
前記保管部は、前記搬送車の走行方向において前記装置ポートよりも上流側に設けられる第1保管部と、前記搬送車の走行方向において前記装置ポートよりも下流側に設けられる第2保管部とを含み、
前記下流側ポートは、前記装置ポート又は前記第2保管部であり、
前記上流側ポートは、前記下流側ポートが前記装置ポートである場合には、前記第1保管部であり、前記下流側ポートが前記第2保管部である場合には、前記第1保管部又は前記装置ポートであり、
前記コントローラは、前記移載機構に対する前記被搬送物の搬送指令を更に出力するように構成され、前記下流側ポートが空であり且つ前記上流側ポートに前記第1の被搬送物が載置されている場合、前記第1の被搬送物の前記下流側ポートへの移載を指示する搬送指令を前記移載機構に対して出力する、
請求項1〜3のいずれか一項に記載の搬送システム。 - 前記コントローラは、前記第1の被搬送物の搬送に関する優先度が予め定められた基準より高い場合、前記第1の被搬送物が回収待ちの状態となった時点で、前記第1の被搬送物の回収を指示する搬送指令を出力する、
請求項1〜4のいずれか一項に記載の搬送システム。 - 前記コントローラは、前記第1の被搬送物の次の搬送先が予め定められた特定の搬送先である場合、前記第1の被搬送物が回収待ちの状態となった時点で、前記第1の被搬送物の回収を指示する搬送指令を出力する、
請求項1〜5のいずれか一項に記載の搬送システム。 - 請求項1〜6のいずれか一項記載の搬送システムにおいて、前記コントローラによって実施される搬送方法であって、
前記下流側ポートに載置された第1の被搬送物が回収待ちの状態となったことを検知する第1ステップと、
前記第1ステップにおいて前記第1の被搬送物が回収待ちの状態となったことが検知された場合に、前記上流側ポートに前記被搬送物が載置されているか否かを判定する第2ステップと、
前記第2ステップにおいて、前記上流側ポートに前記被搬送物が載置されていないと判定された場合に、前記第1の被搬送物が回収待ちの状態となってから予め定められた待機時間が経過するまでは、前記上流側ポートに第2の被搬送物を搬送する前記搬送車が把握されるまで前記第1の被搬送物の回収を指示する搬送指令の出力を待機し、前記第1の被搬送物が回収待ちの状態となった時点から前記待機時間が経過した場合には、前記第1の被搬送物の回収を指示する搬送指令を出力する第3ステップと、
を含む搬送方法。
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JP2015239616 | 2015-12-08 | ||
JP2015239616 | 2015-12-08 | ||
PCT/JP2016/080414 WO2017098805A1 (ja) | 2015-12-08 | 2016-10-13 | 搬送システム及び搬送方法 |
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JPWO2017098805A1 JPWO2017098805A1 (ja) | 2018-06-07 |
JP6428953B2 true JP6428953B2 (ja) | 2018-11-28 |
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US (1) | US10446427B2 (ja) |
EP (1) | EP3389084B1 (ja) |
JP (1) | JP6428953B2 (ja) |
KR (1) | KR102062548B1 (ja) |
CN (1) | CN108352348B (ja) |
IL (1) | IL259707B (ja) |
SG (1) | SG11201804593PA (ja) |
TW (1) | TWI683772B (ja) |
WO (1) | WO2017098805A1 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3999994B1 (en) * | 2019-07-15 | 2024-03-27 | Avery Dennison Retail Information Services LLC | Method for missed item recovery in rfid tunnel environments |
JP7229644B2 (ja) * | 2019-07-26 | 2023-02-28 | 株式会社ディスコ | 搬送システム |
JP7423142B2 (ja) | 2019-11-20 | 2024-01-29 | 株式会社ディスコ | 搬送装置 |
JP7471742B2 (ja) | 2019-11-20 | 2024-04-22 | 株式会社ディスコ | 搬送車及び昇降ユニット |
JP7358017B2 (ja) * | 2019-11-20 | 2023-10-10 | 株式会社ディスコ | 搬送車及び搬送システム |
KR20220126717A (ko) * | 2020-01-14 | 2022-09-16 | 로제 가부시키가이샤 | Foup 이송 장치 |
JP2021114055A (ja) * | 2020-01-16 | 2021-08-05 | 株式会社小松製作所 | 作業現場の管理システム及び作業現場の管理方法 |
CN113998403B (zh) * | 2020-07-28 | 2022-09-23 | 长鑫存储技术有限公司 | 转运系统及转运方法 |
KR102459084B1 (ko) | 2021-04-09 | 2022-10-26 | 주식회사 에스에프에이 | 반송 시스템을 위한 이송차량 및 그 이송차량의 구동 방법, 그리고 반송 시스템 |
KR102492161B1 (ko) | 2021-06-16 | 2023-01-26 | 주식회사 에스에프에이 | 반송시스템을 위한 이송차량 및 그 이송차량의 구동방법 |
KR20230023301A (ko) | 2021-08-10 | 2023-02-17 | 삼성전자주식회사 | 선반 이동 모듈을 갖는 스토리지 시스템 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4281065B2 (ja) | 2004-10-18 | 2009-06-17 | 村田機械株式会社 | 搬送車システム |
JP4427755B2 (ja) * | 2006-02-03 | 2010-03-10 | 村田機械株式会社 | 搬送システム |
KR101841753B1 (ko) * | 2006-08-18 | 2018-03-23 | 브룩스 오토메이션 인코퍼레이티드 | 용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템 |
JP2008108031A (ja) | 2006-10-25 | 2008-05-08 | Asyst Technologies Japan Inc | 物品搬送システム |
JP2010067146A (ja) * | 2008-09-12 | 2010-03-25 | Muratec Automation Co Ltd | 搬送システム |
JP4811454B2 (ja) * | 2008-12-02 | 2011-11-09 | 村田機械株式会社 | 搬送台車システム及び搬送台車への走行経路の指示方法 |
US8882433B2 (en) * | 2009-05-18 | 2014-11-11 | Brooks Automation, Inc. | Integrated systems for interfacing with substrate container storage systems |
JP5445015B2 (ja) * | 2009-10-14 | 2014-03-19 | シンフォニアテクノロジー株式会社 | キャリア移載促進装置 |
JP5429570B2 (ja) * | 2010-03-08 | 2014-02-26 | 株式会社ダイフク | 物品搬送設備 |
JP5338754B2 (ja) | 2010-06-24 | 2013-11-13 | 株式会社デンソー | 搬送システムおよびその制御方法 |
JP5382470B2 (ja) * | 2010-11-04 | 2014-01-08 | 村田機械株式会社 | 搬送システム及び搬送方法 |
JP5946617B2 (ja) * | 2011-09-26 | 2016-07-06 | 株式会社Screenホールディングス | 基板処理システム |
TWI447058B (zh) * | 2011-11-30 | 2014-08-01 | Inotera Memories Inc | 天車輸送系統及其運轉方法 |
WO2013150859A1 (ja) * | 2012-04-05 | 2013-10-10 | 村田機械株式会社 | 搬送システム |
CN104302562B (zh) * | 2012-06-08 | 2016-09-07 | 村田机械株式会社 | 搬运系统以及搬运系统中的物品的临时保管方法 |
JP5928926B2 (ja) * | 2012-06-08 | 2016-06-01 | 村田機械株式会社 | 搬送システム及び搬送車システムでの排他制御方法 |
WO2014017221A1 (ja) * | 2012-07-26 | 2014-01-30 | 村田機械株式会社 | 天井走行車システム及び天井走行車システムでの移載制御方法 |
JP5713096B2 (ja) | 2013-12-26 | 2015-05-07 | シンフォニアテクノロジー株式会社 | キャリア移載促進装置 |
US9415934B2 (en) * | 2014-05-14 | 2016-08-16 | Murata Machinery, Ltd. | Transport system and transport method |
EP3159921B1 (en) * | 2014-06-19 | 2021-06-16 | Murata Machinery, Ltd. | Carrier buffering device and storage method |
JP6252676B2 (ja) * | 2014-06-19 | 2017-12-27 | 村田機械株式会社 | キャリアの一時保管装置及び一時保管方法 |
JP6260697B2 (ja) * | 2014-06-19 | 2018-01-17 | 村田機械株式会社 | キャリアの一時保管装置と一時保管方法 |
KR102174332B1 (ko) * | 2014-07-30 | 2020-11-04 | 삼성전자주식회사 | 반도체 제조 라인의 스토커 및 상기 스토커를 이용하여 웨이퍼를 이송하는 방법 |
JP6048686B2 (ja) * | 2014-09-25 | 2016-12-21 | 村田機械株式会社 | 一時保管装置と搬送システム及び一時保管方法 |
CN106796908B (zh) * | 2014-09-25 | 2019-11-26 | 村田机械株式会社 | 清洗装置以及清洗方法 |
JP6358143B2 (ja) * | 2015-03-26 | 2018-07-18 | 株式会社ダイフク | 半導体容器保管設備 |
JP6330714B2 (ja) * | 2015-04-09 | 2018-05-30 | 株式会社ダイフク | 物品搬送設備及び物品搬送設備の保守作業方法 |
JP6698399B2 (ja) * | 2016-03-29 | 2020-05-27 | 北陽電機株式会社 | 搬送制御装置及び搬送台車の合流点通過方法 |
US10156794B1 (en) * | 2017-08-31 | 2018-12-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Positioning device for aligning semiconductor tool and overhead hoist transport system |
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2016
- 2016-10-13 EP EP16872705.5A patent/EP3389084B1/en active Active
- 2016-10-13 SG SG11201804593PA patent/SG11201804593PA/en unknown
- 2016-10-13 CN CN201680062776.3A patent/CN108352348B/zh active Active
- 2016-10-13 US US15/780,685 patent/US10446427B2/en active Active
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TWI683772B (zh) | 2020-02-01 |
CN108352348B (zh) | 2022-05-10 |
WO2017098805A1 (ja) | 2017-06-15 |
CN108352348A (zh) | 2018-07-31 |
IL259707A (en) | 2018-07-31 |
KR20180087373A (ko) | 2018-08-01 |
TW201726522A (zh) | 2017-08-01 |
US10446427B2 (en) | 2019-10-15 |
EP3389084A1 (en) | 2018-10-17 |
KR102062548B1 (ko) | 2020-01-06 |
EP3389084A4 (en) | 2019-07-24 |
US20180358252A1 (en) | 2018-12-13 |
SG11201804593PA (en) | 2018-06-28 |
IL259707B (en) | 2021-07-29 |
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