JP6642577B2 - 搬送システム - Google Patents
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- JP6642577B2 JP6642577B2 JP2017535271A JP2017535271A JP6642577B2 JP 6642577 B2 JP6642577 B2 JP 6642577B2 JP 2017535271 A JP2017535271 A JP 2017535271A JP 2017535271 A JP2017535271 A JP 2017535271A JP 6642577 B2 JP6642577 B2 JP 6642577B2
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- Microelectronics & Electronic Packaging (AREA)
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Description
図1及び図2に示されるように、搬送システム1は、軌道10A,10Bと、複数の天井搬送車20A,20Bと、複数の保管棚40と、コントローラ50と、を備えている。軌道10A,10Bは、複数の半導体処理装置100を備える半導体製造工場の天井付近に敷設されている。天井搬送車20A,20Bは、OHT(Overhead Hoist Transfer)であり、軌道10A,10Bに吊り下げられた状態で軌道10A,10Bに沿って一方向に走行する。すなわち、天井搬送車20A,20Bは、軌道10A,10B上を、それぞれの延在方向に走行する。なお、以下の説明において、軌道10Aに沿って走行する天井搬送車を天井搬送車(第1の天井搬送車)20Aと呼ぶこととし、軌道10Bに沿って走行する天井搬送車を天井搬送車(第2の天井搬送車)20Bと呼ぶこととする。天井搬送車20A,20Bは、複数の半導体ウェハが収容されたFOUP(Front Opening Unified Pod)を各半導体処理装置100の装置ポート101に対して搬送する。保管棚40は、各半導体処理装置100に対応するように設置されている。例えば、軌道10A,10Bの延在方向に関して、各半導体処理装置100の装置ポート101に対応する位置に、少なくともひとつの保管棚40が設置されている。保管棚40は、軌道10A,10Bの延在方向に関して各半導体処理装置100の装置ポート101と同じ位置に設置されたものである。或いは、各半導体処理装置100に対応する保管棚40が、軌道10A,10Bの延在方向に関して、当該半導体処理装置100の装置ポート101よりも上流側(天井搬送車20A,20Bの走行方向上流側)に設置されたものである。コントローラ50は、天井搬送車20A,20Bの動作を制御する。
以上のように構成された搬送システム1では、例えば、次のような取り置き制御を実行することができる。なお、以下の説明における装置ポート101に対する移載領域Rとは、第1軌道11A上及び第2軌道11B上において、天井搬送車20A,20Bが停止して当該装置ポート101に対してFOUP90を移載することができる領域を意味する。装置ポート101に対する移載領域Rは、第1軌道11A上及び第2軌道11B上であって、第1軌道11A及び第2軌道11Bのそれぞれに沿った方向において装置ポート101及び保管棚40と同位置となる領域である。或いは、当該方向に関して、装置ポート101に対応する保管棚40がその装置ポート101よりも上流側に設けられた態様においては、装置ポート101に対する移載領域Rは、当該方向においてその装置ポート101に対応する保管棚40と同位置となる領域を含む。
また、搬送システム1では、例えば、次のようなインターロック制御を実行することができる。
以上説明したように、搬送システム1では、第1軌道11A上の天井搬送車20A及び第2軌道11B上の天井搬送車20Bの両方の天井搬送車が同一の装置ポート101に対してだけでなく、同一の保管棚40に対しても、FOUP90を移載することができる。これにより、例えば、第1軌道11A上の天井搬送車20A及び第2軌道11B上の天井搬送車20Bの一方の天井搬送車が保管棚40に載置したFOUP90を、他方の天井搬送車が保管棚40から取得して装置ポート101へ載置するような動作を実行することが可能となる。よって、この搬送システム1によれば、装置ポート101に対するFOUP90の搬送効率を向上させることができる。
以上、本発明の一実施形態について説明したが、本発明は、上記一実施形態に限定されるものではない。例えば、第1軌道11A及び第2軌道11Bは、天井搬送車20A,20Bが互いに乗り入れ可能に構成されていてもよい。
Claims (2)
- 一方の側方且つ下方に装置ポートが位置するように設けられた第1軌道と、
一方の側方且つ下方に前記装置ポートが位置するように、前記第1軌道に沿って前記第1軌道に対し下方に且つ鉛直方向に並んで設けられた第2軌道と、
前記第1軌道及び前記第2軌道のそれぞれに沿って走行し、被搬送物を搬送する複数の天井搬送車と、
前記第1軌道及び前記第2軌道に対して前記一方とは他方の側方且つ下方に設けられ、前記被搬送物が載置される保管部と、
前記天井搬送車の動作を制御するコントローラと、を備え、
前記保管部は、前記第1軌道及び前記第2軌道の何れに対しても下方に位置するように設けられており、
前記天井搬送車は、
前記被搬送物を把持可能な把持部と、
前記装置ポート及び前記保管部のそれぞれの上方に前記把持部を移動可能な移動機構と、
前記移動機構によって前記装置ポート及び前記保管部のそれぞれの上方に移動された前記把持部を、前記装置ポート及び前記保管部のそれぞれに対して昇降可能な昇降機構と、を有し、
前記第1軌道上の前記天井搬送車及び前記第2軌道上の前記天井搬送車の両方が、同一の前記保管部に対して前記被搬送物を移載可能であり、
前記コントローラは、
同一の前記装置ポートについて、前記第1軌道上の前記天井搬送車及び前記第2軌道上の前記天井搬送車の一方の前記天井搬送車が、当該装置ポートから回収される側の前記被搬送物を当該装置ポートから取得し、前記第1軌道上の前記天井搬送車及び前記第2軌道上の前記天井搬送車の他方の前記天井搬送車が、当該装置ポートに供給される側の前記被搬送物を当該装置ポートに載置すべき状況にある場合において、他方の前記天井搬送車が、一方の前記天井搬送車よりも前に、当該装置ポートに対する移載領域に到着したときには、
他方の前記天井搬送車が前記移載領域に到着してから所定時間の間、他方の前記天井搬送車が前記移載領域において待機するように、前記天井搬送車の動作を制御し、
他方の前記天井搬送車が前記移載領域において待機している間に一方の前記天井搬送車が前記移載領域に到着した状況においては、
前記移載領域に到着した一方の前記天井搬送車が前記回収される側の被搬送物を当該装置ポートから取得するように、前記天井搬送車の動作を制御し、
一方の前記天井搬送車が前記回収される側の被搬送物を当該装置ポートから取得した後に、他方の前記天井搬送車が前記供給される側の被搬送物を当該装置ポートに載置するように、前記天井搬送車の動作を制御し、
他方の前記天井搬送車が前記移載領域において待機している間に一方の前記天井搬送車が前記移載領域に到着しなかった状況においては、
他方の前記天井搬送車が前記供給される側の被搬送物を前記保管部に載置して前記回収される側の被搬送物を当該装置ポートから取得するように、前記天井搬送車の動作を制御し、
前記移載領域に到着した一方の前記天井搬送車が前記供給される側の被搬送物を前記保管部から取得して前記供給される側の被搬送物を当該装置ポートに載置するように、前記天井搬送車の動作を制御する、搬送システム。 - 前記コントローラは、
前記第1軌道上の前記天井搬送車及び前記第2軌道上の前記天井搬送車の両方の前記天井搬送車が、同一の前記装置ポートに対して前記被搬送物を移載する装置ポート側移載動作を実行すべき状況にある場合には、前記第1軌道上の前記天井搬送車及び前記第2軌道上の前記天井搬送車の一方の前記天井搬送車による前記装置ポート側移載動作の間、他方の前記天井搬送車による前記装置ポート側移載動作の実行を禁止し、
前記第1軌道上の前記天井搬送車及び前記第2軌道上の前記天井搬送車の両方が、同一の前記保管部に対して前記被搬送物を移載する保管部側移載動作を実行すべき状況にある場合には、前記第1軌道上の前記天井搬送車及び前記第2軌道上の前記天井搬送車の一方の前記天井搬送車による前記保管部側移載動作の間、他方の前記天井搬送車による前記保管部側移載動作の実行を禁止する、請求項1記載の搬送システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2015160166 | 2015-08-14 | ||
JP2015160166 | 2015-08-14 | ||
PCT/JP2016/068100 WO2017029871A1 (ja) | 2015-08-14 | 2016-06-17 | 搬送システム |
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JPWO2017029871A1 JPWO2017029871A1 (ja) | 2018-02-22 |
JP6642577B2 true JP6642577B2 (ja) | 2020-02-05 |
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US (1) | US10734267B2 (ja) |
EP (1) | EP3336018B1 (ja) |
JP (1) | JP6642577B2 (ja) |
KR (1) | KR102062179B1 (ja) |
CN (1) | CN107922116B (ja) |
IL (1) | IL257409B (ja) |
SG (1) | SG11201801076VA (ja) |
TW (1) | TWI671250B (ja) |
WO (1) | WO2017029871A1 (ja) |
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EP3476772B1 (en) * | 2016-06-27 | 2022-04-27 | Murata Machinery, Ltd. | Conveyance system |
JP6712036B2 (ja) * | 2017-04-26 | 2020-06-17 | サイレックス・テクノロジー株式会社 | 通信装置、バッファ装置、移載システム、及び、通信装置の制御方法 |
US10532884B2 (en) * | 2017-05-24 | 2020-01-14 | Hall Labs Llc | Mechanical end effector for planar motion mechanism |
WO2019003753A1 (ja) * | 2017-06-30 | 2019-01-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
WO2019003799A1 (ja) * | 2017-06-30 | 2019-01-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
KR102431540B1 (ko) * | 2018-03-22 | 2022-08-11 | 무라다기카이가부시끼가이샤 | 스토커 시스템 |
WO2020049872A1 (ja) * | 2018-09-04 | 2020-03-12 | 村田機械株式会社 | 搬送車システム |
KR102441814B1 (ko) * | 2018-11-06 | 2022-09-08 | 무라다기카이가부시끼가이샤 | 천장 반송차 |
CN113348141B (zh) | 2019-01-25 | 2023-02-17 | 村田机械株式会社 | 搬送系统 |
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CN107922116B (zh) | 2019-11-22 |
US10734267B2 (en) | 2020-08-04 |
US20190006217A1 (en) | 2019-01-03 |
KR20180039129A (ko) | 2018-04-17 |
EP3336018A4 (en) | 2019-04-17 |
KR102062179B1 (ko) | 2020-01-03 |
TWI671250B (zh) | 2019-09-11 |
WO2017029871A1 (ja) | 2017-02-23 |
TW201711936A (zh) | 2017-04-01 |
EP3336018A1 (en) | 2018-06-20 |
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