JPWO2019211933A1 - 搬送システム - Google Patents
搬送システム Download PDFInfo
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- JPWO2019211933A1 JPWO2019211933A1 JP2020517019A JP2020517019A JPWO2019211933A1 JP WO2019211933 A1 JPWO2019211933 A1 JP WO2019211933A1 JP 2020517019 A JP2020517019 A JP 2020517019A JP 2020517019 A JP2020517019 A JP 2020517019A JP WO2019211933 A1 JPWO2019211933 A1 JP WO2019211933A1
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- 238000012384 transportation and delivery Methods 0.000 claims abstract description 41
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 32
- 238000013459 approach Methods 0.000 claims description 23
- 230000032258 transport Effects 0.000 description 289
- 230000003028 elevating effect Effects 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000002452 interceptive effect Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0212—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory
- G05D1/0225—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory involving docking at a fixed facility, e.g. base station or loading bay
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0227—Control of position or course in two dimensions specially adapted to land vehicles using mechanical sensing means, e.g. for sensing treated area
- G05D1/0229—Control of position or course in two dimensions specially adapted to land vehicles using mechanical sensing means, e.g. for sensing treated area in combination with fixed guiding means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
- G05D1/0289—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling with means for avoiding collisions between vehicles
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
- G05D1/0291—Fleet control
- G05D1/0297—Fleet control by controlling means in a control room
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61L—GUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
- B61L27/00—Central railway traffic control systems; Trackside control; Communication systems specially adapted therefor
- B61L27/20—Trackside control of safe travel of vehicle or vehicle train, e.g. braking curve calculation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/60—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type
- B65G47/61—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type for articles
Abstract
Description
Claims (7)
- 軌道に沿って走行し、荷を搬送する複数の搬送車と、
複数の前記搬送車の走行を制御するコントローラと、を備えた搬送システムであって、
前記軌道は、第1主軌道と、この第1主軌道上に互いに離れて配置される複数の合流点と、それぞれが、互いに異なる前記合流点を介して前記第1主軌道に繋がる複数の支線軌道と、を有し、
各合流点は、前記第1主軌道において互いに離れており、
複数の前記支線軌道のそれぞれには、前記搬送車が前記荷を受け渡しするための受渡しポートに対応した停止位置があり、
前記コントローラは、
複数の前記支線軌道のそれぞれの前記受渡しポートに対応した停止位置に停止している各搬送車について、下流側の前記支線軌道の前記搬送車を、上流側の前記支線軌道の前記搬送車と同時又はそれよりも先に発進させる、搬送システム。 - 前記コントローラは、
複数の前記支線軌道のそれぞれの前記受渡しポートに対応した停止位置に異なるタイミングで到着する各搬送車について、先に到着する前記搬送車の発進を、後に到着する前記搬送車が到着するまで待機させる、請求項1に記載の搬送システム。 - 前記軌道は、第2主軌道と、この第2主軌道上に互いに離れて配置される複数の分岐点と、を更に有し、
複数の前記支線軌道のそれぞれは、互いに異なる前記分岐点を介して前記第2主軌道に繋がっており、
前記コントローラは、
前記第2主軌道を走行する複数の前記搬送車のそれぞれを、複数の前記支線軌道のそれぞれへ下流側から上流側の順で順次進入させる進入制御を実行する、請求項1又は2に記載の搬送システム。 - 前記コントローラは、複数の前記支線軌道の数に対応する数の前記搬送車を含む搬送車群ごとに、前記進入制御を実行する、請求項3に記載の搬送システム。
- 前記コントローラは、前記第2主軌道における各分岐点よりも上流の特定区間を走行する前記搬送車について、搬送先の前記受渡しポートを決定する、請求項3又は4に記載の搬送システム。
- 前記コントローラは、複数の前記支線軌道のそれぞれの前記受渡しポートに対応した停止位置に停止した各搬送車について、複数の前記支線軌道ごとに一定周期で繰り返されるタイミングで発進させる、請求項1〜5の何れか一項に記載の搬送システム。
- 前記軌道は、複数の前記搬送車を周回走行させる周回軌道を含み、
前記コントローラは、複数の前記搬送車を、周回距離又は周回時間が同じになるように前記周回軌道に沿って走行させる、請求項1〜6の何れか一項に記載の搬送システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018088283 | 2018-05-01 | ||
JP2018088283 | 2018-05-01 | ||
PCT/JP2019/003247 WO2019211933A1 (ja) | 2018-05-01 | 2019-01-30 | 搬送システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019211933A1 true JPWO2019211933A1 (ja) | 2021-02-12 |
JP6935846B2 JP6935846B2 (ja) | 2021-09-15 |
Family
ID=68386016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020517019A Active JP6935846B2 (ja) | 2018-05-01 | 2019-01-30 | 搬送システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US20210155406A1 (ja) |
EP (1) | EP3789266B1 (ja) |
JP (1) | JP6935846B2 (ja) |
KR (1) | KR102389724B1 (ja) |
CN (1) | CN111788106B (ja) |
SG (1) | SG11202010020PA (ja) |
TW (1) | TWI801571B (ja) |
WO (1) | WO2019211933A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109017885B (zh) * | 2018-08-17 | 2023-06-06 | 湖南大学 | 一种动态自动重组车列方法和系统 |
JP7283456B2 (ja) * | 2020-09-09 | 2023-05-30 | 株式会社ダイフク | 物品搬送設備 |
EP4245695A1 (en) * | 2020-12-16 | 2023-09-20 | Murata Machinery, Ltd. | Transport system |
WO2023238533A1 (ja) * | 2022-06-06 | 2023-12-14 | 村田機械株式会社 | 搬送システム |
WO2023238484A1 (ja) * | 2022-06-06 | 2023-12-14 | 村田機械株式会社 | 搬送システム |
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2019
- 2019-01-30 SG SG11202010020PA patent/SG11202010020PA/en unknown
- 2019-01-30 EP EP19796612.0A patent/EP3789266B1/en active Active
- 2019-01-30 CN CN201980016432.2A patent/CN111788106B/zh active Active
- 2019-01-30 KR KR1020207025659A patent/KR102389724B1/ko active IP Right Grant
- 2019-01-30 US US17/045,787 patent/US20210155406A1/en active Pending
- 2019-01-30 WO PCT/JP2019/003247 patent/WO2019211933A1/ja unknown
- 2019-01-30 JP JP2020517019A patent/JP6935846B2/ja active Active
- 2019-04-29 TW TW108114866A patent/TWI801571B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH09174386A (ja) * | 1995-12-25 | 1997-07-08 | Nishikawa Kasei Co Ltd | 組立ラインシステム |
JP2000276230A (ja) * | 1999-03-29 | 2000-10-06 | Hitachi Kiden Kogyo Ltd | 搬送システム |
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Also Published As
Publication number | Publication date |
---|---|
EP3789266B1 (en) | 2023-03-01 |
TW201945267A (zh) | 2019-12-01 |
SG11202010020PA (en) | 2020-11-27 |
JP6935846B2 (ja) | 2021-09-15 |
EP3789266A1 (en) | 2021-03-10 |
WO2019211933A1 (ja) | 2019-11-07 |
US20210155406A1 (en) | 2021-05-27 |
KR20200116999A (ko) | 2020-10-13 |
CN111788106A (zh) | 2020-10-16 |
CN111788106B (zh) | 2022-07-26 |
KR102389724B1 (ko) | 2022-04-21 |
EP3789266A4 (en) | 2022-01-26 |
TWI801571B (zh) | 2023-05-11 |
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