EP3789266A4 - Carrier system - Google Patents

Carrier system Download PDF

Info

Publication number
EP3789266A4
EP3789266A4 EP19796612.0A EP19796612A EP3789266A4 EP 3789266 A4 EP3789266 A4 EP 3789266A4 EP 19796612 A EP19796612 A EP 19796612A EP 3789266 A4 EP3789266 A4 EP 3789266A4
Authority
EP
European Patent Office
Prior art keywords
carrier system
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19796612.0A
Other languages
German (de)
French (fr)
Other versions
EP3789266A1 (en
EP3789266B1 (en
Inventor
Naohisa Ito
Eijiro Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of EP3789266A1 publication Critical patent/EP3789266A1/en
Publication of EP3789266A4 publication Critical patent/EP3789266A4/en
Application granted granted Critical
Publication of EP3789266B1 publication Critical patent/EP3789266B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0212—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory
    • G05D1/0225—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory involving docking at a fixed facility, e.g. base station or loading bay
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0227—Control of position or course in two dimensions specially adapted to land vehicles using mechanical sensing means, e.g. for sensing treated area
    • G05D1/0229—Control of position or course in two dimensions specially adapted to land vehicles using mechanical sensing means, e.g. for sensing treated area in combination with fixed guiding means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
    • G05D1/0289—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling with means for avoiding collisions between vehicles
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
    • G05D1/0291—Fleet control
    • G05D1/0297—Fleet control by controlling means in a control room
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61L—GUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
    • B61L27/00—Central railway traffic control systems; Trackside control; Communication systems specially adapted therefor
    • B61L27/20—Trackside control of safe travel of vehicle or train, e.g. braking curve calculation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/60—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type
    • B65G47/61—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type for articles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Train Traffic Observation, Control, And Security (AREA)
  • Centrifugal Separators (AREA)
EP19796612.0A 2018-05-01 2019-01-30 Carrier system Active EP3789266B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018088283 2018-05-01
PCT/JP2019/003247 WO2019211933A1 (en) 2018-05-01 2019-01-30 Carrier system

Publications (3)

Publication Number Publication Date
EP3789266A1 EP3789266A1 (en) 2021-03-10
EP3789266A4 true EP3789266A4 (en) 2022-01-26
EP3789266B1 EP3789266B1 (en) 2023-03-01

Family

ID=68386016

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19796612.0A Active EP3789266B1 (en) 2018-05-01 2019-01-30 Carrier system

Country Status (8)

Country Link
US (1) US20210155406A1 (en)
EP (1) EP3789266B1 (en)
JP (1) JP6935846B2 (en)
KR (1) KR102389724B1 (en)
CN (1) CN111788106B (en)
SG (1) SG11202010020PA (en)
TW (1) TWI801571B (en)
WO (1) WO2019211933A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109017885B (en) * 2018-08-17 2023-06-06 湖南大学 Dynamic automatic train reorganization method and system
JP7283456B2 (en) * 2020-09-09 2023-05-30 株式会社ダイフク Goods transport equipment
WO2022130758A1 (en) * 2020-12-16 2022-06-23 村田機械株式会社 Transport system
WO2023238533A1 (en) * 2022-06-06 2023-12-14 村田機械株式会社 Transport system
WO2023238484A1 (en) * 2022-06-06 2023-12-14 村田機械株式会社 Conveyance system

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3715025A1 (en) * 1986-05-09 1987-11-12 Daifuku Kk DRIVE CONTROL SYSTEM FOR TRANSPORT CARS
US5893208A (en) * 1995-12-25 1999-04-13 Nishikawa Kasei Co., Ltd. Assembly line system
EP2280327A1 (en) * 2008-05-22 2011-02-02 Murata Machinery, Ltd. Traveling vehicle system and method for controlling traveling by traveling vehicle system
US20170137219A1 (en) * 2014-06-04 2017-05-18 Murata Machinery, Ltd. Transport vehicle system and transport method
US9758308B1 (en) * 2016-04-11 2017-09-12 Daifuku Co., Ltd. Article transport facility
CN107748950A (en) * 2017-09-25 2018-03-02 河南森源电气股份有限公司 A kind of AGV dispatching methods of single major trunk roads
JP2018041410A (en) * 2016-09-09 2018-03-15 株式会社ダイフク Article delivery facility

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329813A (en) * 1986-07-23 1988-02-08 Hitachi Ltd Traffic control system for carrier car at confluence point
JPH05181527A (en) * 1991-12-27 1993-07-23 Mitsubishi Electric Corp Automatic conveyer
JP3206314B2 (en) * 1994-08-04 2001-09-10 株式会社明電舎 Autonomous driving method for automatic guided vehicles
JP3461711B2 (en) * 1998-02-24 2003-10-27 日産ディーゼル工業株式会社 Operation control system for automatic guided vehicles
JP3864556B2 (en) * 1998-05-14 2007-01-10 株式会社豊田自動織機 Delivery management device
JP2000276230A (en) * 1999-03-29 2000-10-06 Hitachi Kiden Kogyo Ltd Carrier system
US6516239B1 (en) * 1999-08-03 2003-02-04 Honda Of Canada Incorporated Assembly line control system
JP4483055B2 (en) * 2000-09-14 2010-06-16 株式会社ダイフク Transport equipment
JP4048029B2 (en) * 2001-02-02 2008-02-13 株式会社ダイフク Method for controlling merging of articles
JP2007257154A (en) * 2006-03-22 2007-10-04 Asyst Shinko Inc Apparatus, system, method and program for managing truck
JP4487321B2 (en) * 2008-03-10 2010-06-23 村田機械株式会社 Traveling vehicle system
KR101463250B1 (en) * 2008-05-26 2014-11-18 주식회사 포스코 Method for platooning of vehicles in an automated vehicle system
KR101246280B1 (en) * 2008-09-26 2013-03-22 무라다기카이가부시끼가이샤 Guided vehicle system
JP5830282B2 (en) * 2011-06-30 2015-12-09 株式会社岡村製作所 Article conveying device
JP2013035670A (en) 2011-08-09 2013-02-21 Murata Machinery Ltd Guided vehicle system
JP5454554B2 (en) 2011-11-11 2014-03-26 株式会社デンソー Transport system and control method thereof
US8761989B1 (en) * 2012-12-18 2014-06-24 Jervis B. Webb Company Method of material handling with automatic guided vehicles
US10196214B2 (en) * 2015-08-14 2019-02-05 Murata Machinery, Ltd. Conveyor car system
KR102394712B1 (en) * 2015-09-09 2022-05-04 삼성전자주식회사 Transporting system, transporting unit included therein
JP6690497B2 (en) * 2016-10-28 2020-04-28 株式会社ダイフク Goods transport facility
WO2018178876A1 (en) * 2017-03-27 2018-10-04 Clearpath Robotics, Inc. Systems and methods for flexible manufacturing using self-driving vehicles

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3715025A1 (en) * 1986-05-09 1987-11-12 Daifuku Kk DRIVE CONTROL SYSTEM FOR TRANSPORT CARS
US5893208A (en) * 1995-12-25 1999-04-13 Nishikawa Kasei Co., Ltd. Assembly line system
EP2280327A1 (en) * 2008-05-22 2011-02-02 Murata Machinery, Ltd. Traveling vehicle system and method for controlling traveling by traveling vehicle system
US20170137219A1 (en) * 2014-06-04 2017-05-18 Murata Machinery, Ltd. Transport vehicle system and transport method
US9758308B1 (en) * 2016-04-11 2017-09-12 Daifuku Co., Ltd. Article transport facility
JP2018041410A (en) * 2016-09-09 2018-03-15 株式会社ダイフク Article delivery facility
CN107748950A (en) * 2017-09-25 2018-03-02 河南森源电气股份有限公司 A kind of AGV dispatching methods of single major trunk roads

Also Published As

Publication number Publication date
TWI801571B (en) 2023-05-11
EP3789266A1 (en) 2021-03-10
CN111788106A (en) 2020-10-16
JPWO2019211933A1 (en) 2021-02-12
WO2019211933A1 (en) 2019-11-07
SG11202010020PA (en) 2020-11-27
KR20200116999A (en) 2020-10-13
KR102389724B1 (en) 2022-04-21
JP6935846B2 (en) 2021-09-15
CN111788106B (en) 2022-07-26
EP3789266B1 (en) 2023-03-01
TW201945267A (en) 2019-12-01
US20210155406A1 (en) 2021-05-27

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