TWI580880B - 閘閥 - Google Patents

閘閥 Download PDF

Info

Publication number
TWI580880B
TWI580880B TW104112183A TW104112183A TWI580880B TW I580880 B TWI580880 B TW I580880B TW 104112183 A TW104112183 A TW 104112183A TW 104112183 A TW104112183 A TW 104112183A TW I580880 B TWI580880 B TW I580880B
Authority
TW
Taiwan
Prior art keywords
valve
chamber
passage
balance
disc
Prior art date
Application number
TW104112183A
Other languages
English (en)
Chinese (zh)
Other versions
TW201604457A (zh
Inventor
石垣恒雄
下田洋己
長尾格
Original Assignee
Ｓｍｃ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ｓｍｃ股份有限公司 filed Critical Ｓｍｃ股份有限公司
Publication of TW201604457A publication Critical patent/TW201604457A/zh
Application granted granted Critical
Publication of TWI580880B publication Critical patent/TWI580880B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
TW104112183A 2014-04-30 2015-04-16 閘閥 TWI580880B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014093750A JP6160923B2 (ja) 2014-04-30 2014-04-30 ゲートバルブ

Publications (2)

Publication Number Publication Date
TW201604457A TW201604457A (zh) 2016-02-01
TWI580880B true TWI580880B (zh) 2017-05-01

Family

ID=54326134

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104112183A TWI580880B (zh) 2014-04-30 2015-04-16 閘閥

Country Status (7)

Country Link
US (1) US9599233B2 (enExample)
JP (1) JP6160923B2 (enExample)
KR (2) KR20150125610A (enExample)
CN (1) CN105020423B (enExample)
CH (1) CH709581B8 (enExample)
DE (1) DE102015105899B4 (enExample)
TW (1) TWI580880B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102396227B1 (ko) * 2014-12-19 2022-05-09 배트 홀딩 아게 진공챔버의 챔버벽 안의 챔버 개구부를 폐쇄하기 위한 도어
JP6356645B2 (ja) * 2015-09-04 2018-07-11 株式会社鷺宮製作所 絞り装置及び冷凍サイクル
JP6774302B2 (ja) * 2016-10-28 2020-10-21 株式会社キッツエスシーティー 真空用ゲートバルブ
KR102145830B1 (ko) * 2017-10-13 2020-08-19 주식회사 라온티엠디 밸브 조립체
CN107940096B (zh) * 2018-01-12 2023-11-21 眉山中车制动科技股份有限公司 一种双向机构
CN110242758B (zh) * 2018-03-09 2021-02-26 (株）Np控股 密封构件更换型闸阀系统、密封板及密封板用料盒
CN110959085B (zh) * 2018-06-12 2021-02-12 株式会社爱发科 闸阀装置
DE102019001115A1 (de) * 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
JP6745953B1 (ja) * 2019-07-23 2020-08-26 株式会社アルバック 仕切りバルブ
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
CN110993550B (zh) * 2019-12-25 2022-12-09 北京北方华创微电子装备有限公司 半导体热处理设备
JP7479587B2 (ja) * 2020-02-28 2024-05-09 Smc株式会社 ゲートバルブ
WO2021251521A1 (ko) * 2020-06-10 2021-12-16 엘지전자 주식회사 게이트 밸브 모듈 및 밀폐 챔버
JP7537329B2 (ja) * 2021-03-19 2024-08-21 Smc株式会社 ぶれ防止機構付きゲートバルブ
CN115306947A (zh) * 2022-07-29 2022-11-08 成都中科唯实仪器有限责任公司 一种低振动真空阀门
JP2024033169A (ja) * 2022-08-30 2024-03-13 株式会社キッツエスシーティー ゲートバルブ及び基板処理装置並びに基板処理方法
CN118728985A (zh) * 2024-06-21 2024-10-01 浙江先导精密机械有限公司 一种半导体真空传输阀结构及加工方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201305471A (zh) * 2011-03-18 2013-02-01 Tokyo Electron Ltd 閘閥裝置及基板處理裝置以及基板處理方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2660397A (en) 1951-08-27 1953-11-24 Alexander S Volpin Quick sealing automatic sealing gate valve
US2971527A (en) 1955-08-29 1961-02-14 Mcevoy Co Automatic plastic sealed valves
JPH05196150A (ja) * 1991-09-30 1993-08-06 Tokyo Electron Yamanashi Kk ゲートバルブ
JPH05272662A (ja) * 1992-03-25 1993-10-19 Fujitsu Ltd ゲートバルブ
JPH11351419A (ja) 1998-06-08 1999-12-24 Irie Koken Kk 無摺動ゲート弁
US6095741A (en) * 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
JP2001330172A (ja) * 2000-05-22 2001-11-30 Nec Kansai Ltd ゲートバルブ
US6602346B1 (en) 2000-08-22 2003-08-05 Novellus Systems, Inc. Gas-purged vacuum valve
JP5005512B2 (ja) * 2007-11-07 2012-08-22 東京エレクトロン株式会社 ゲートバルブ装置および真空処理装置およびゲートバルブ装置における弁体の開放方法。
JP5545152B2 (ja) * 2010-09-22 2014-07-09 Ｓｍｃ株式会社 ゲートバルブ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201305471A (zh) * 2011-03-18 2013-02-01 Tokyo Electron Ltd 閘閥裝置及基板處理裝置以及基板處理方法

Also Published As

Publication number Publication date
KR20150125610A (ko) 2015-11-09
KR20170067170A (ko) 2017-06-15
JP2015209955A (ja) 2015-11-24
CH709581B1 (de) 2019-04-30
DE102015105899A1 (de) 2015-11-05
CN105020423A (zh) 2015-11-04
CH709581A2 (de) 2015-10-30
DE102015105899B4 (de) 2022-05-12
CH709581B8 (de) 2019-08-15
US9599233B2 (en) 2017-03-21
CN105020423B (zh) 2018-10-26
TW201604457A (zh) 2016-02-01
US20150316155A1 (en) 2015-11-05
KR101814045B1 (ko) 2018-01-02
JP6160923B2 (ja) 2017-07-12

Similar Documents

Publication Publication Date Title
TWI580880B (zh) 閘閥
CN104279345B (zh) 闸阀
TWI391591B (zh) 閘閥
CN102410378B (zh) 闸阀
TWI512222B (zh) 無滑動型閘閥
JP6103318B2 (ja) ロックブロックを用いたロッド部材ロッキング装置
CN110630757B (zh) 真空阀
KR20070029558A (ko) 유로의 본질적인 기밀 폐쇄를 위한 밸브
TWI682120B (zh) 在真空室之室壁上關閉一室開口之門
JP2015215009A (ja) ゲートバルブ
WO2013161357A1 (ja) ３ポートバルブ
JPWO2016056066A1 (ja) 多段ピストンアクチュエータ
TWI467095B (zh) 線型致動器
KR20130079916A (ko) 진공 차단 장치
JP7537329B2 (ja) ぶれ防止機構付きゲートバルブ
JP6244089B2 (ja) クランプ装置
KR20190111933A (ko) 밸브용 액추에이터와 이것을 구비한 다이아프램 밸브
JP2003148635A (ja) ゲートバルブ
JP7262559B2 (ja) バルブ用アクチュエータとこれを備えたダイヤフラムバルブ
JP2016031083A (ja) ゲートバルブ
KR20250077947A (ko) 피스톤 실린더 장치
IT201800000538A1 (it) Dispositivo di presa-pezzi per macchine utensili e centri di lavoro, munito di sistema di rilevamento della posizione delle griffe