JP6160923B2 - ゲートバルブ - Google Patents

ゲートバルブ Download PDF

Info

Publication number
JP6160923B2
JP6160923B2 JP2014093750A JP2014093750A JP6160923B2 JP 6160923 B2 JP6160923 B2 JP 6160923B2 JP 2014093750 A JP2014093750 A JP 2014093750A JP 2014093750 A JP2014093750 A JP 2014093750A JP 6160923 B2 JP6160923 B2 JP 6160923B2
Authority
JP
Japan
Prior art keywords
valve
chamber
passage
storage chamber
balance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014093750A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015209955A5 (enExample
JP2015209955A (ja
Inventor
石垣　恒雄
恒雄 石垣
洋己 下田
洋己 下田
格 長尾
格 長尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2014093750A priority Critical patent/JP6160923B2/ja
Priority to US14/679,227 priority patent/US9599233B2/en
Priority to TW104112183A priority patent/TWI580880B/zh
Priority to DE102015105899.5A priority patent/DE102015105899B4/de
Priority to CH00555/15A priority patent/CH709581B8/de
Priority to CN201510215805.2A priority patent/CN105020423B/zh
Priority to KR1020150061306A priority patent/KR20150125610A/ko
Publication of JP2015209955A publication Critical patent/JP2015209955A/ja
Publication of JP2015209955A5 publication Critical patent/JP2015209955A5/ja
Priority to KR1020170069469A priority patent/KR101814045B1/ko
Application granted granted Critical
Publication of JP6160923B2 publication Critical patent/JP6160923B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
JP2014093750A 2014-04-30 2014-04-30 ゲートバルブ Active JP6160923B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2014093750A JP6160923B2 (ja) 2014-04-30 2014-04-30 ゲートバルブ
US14/679,227 US9599233B2 (en) 2014-04-30 2015-04-06 Gate valve
TW104112183A TWI580880B (zh) 2014-04-30 2015-04-16 閘閥
DE102015105899.5A DE102015105899B4 (de) 2014-04-30 2015-04-17 Schieberventil
CH00555/15A CH709581B8 (de) 2014-04-30 2015-04-23 Schieberventil.
CN201510215805.2A CN105020423B (zh) 2014-04-30 2015-04-29 闸阀
KR1020150061306A KR20150125610A (ko) 2014-04-30 2015-04-30 게이트 밸브
KR1020170069469A KR101814045B1 (ko) 2014-04-30 2017-06-05 게이트 밸브

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014093750A JP6160923B2 (ja) 2014-04-30 2014-04-30 ゲートバルブ

Publications (3)

Publication Number Publication Date
JP2015209955A JP2015209955A (ja) 2015-11-24
JP2015209955A5 JP2015209955A5 (enExample) 2016-03-17
JP6160923B2 true JP6160923B2 (ja) 2017-07-12

Family

ID=54326134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014093750A Active JP6160923B2 (ja) 2014-04-30 2014-04-30 ゲートバルブ

Country Status (7)

Country Link
US (1) US9599233B2 (enExample)
JP (1) JP6160923B2 (enExample)
KR (2) KR20150125610A (enExample)
CN (1) CN105020423B (enExample)
CH (1) CH709581B8 (enExample)
DE (1) DE102015105899B4 (enExample)
TW (1) TWI580880B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10184291B2 (en) * 2014-12-19 2019-01-22 Vat Holding Ag Door for closing a chamber opening in a chamber wall of a vacuum chamber
JP6356645B2 (ja) * 2015-09-04 2018-07-11 株式会社鷺宮製作所 絞り装置及び冷凍サイクル
JP6774302B2 (ja) * 2016-10-28 2020-10-21 株式会社キッツエスシーティー 真空用ゲートバルブ
KR102145830B1 (ko) * 2017-10-13 2020-08-19 주식회사 라온티엠디 밸브 조립체
CN107940096B (zh) * 2018-01-12 2023-11-21 眉山中车制动科技股份有限公司 一种双向机构
CN110242758B (zh) * 2018-03-09 2021-02-26 (株）Np控股 密封构件更换型闸阀系统、密封板及密封板用料盒
WO2019239673A1 (ja) * 2018-06-12 2019-12-19 株式会社アルバック 仕切弁装置
DE102019001115A1 (de) * 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
JP6745953B1 (ja) * 2019-07-23 2020-08-26 株式会社アルバック 仕切りバルブ
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
CN110993550B (zh) * 2019-12-25 2022-12-09 北京北方华创微电子装备有限公司 半导体热处理设备
JP7479587B2 (ja) * 2020-02-28 2024-05-09 Smc株式会社 ゲートバルブ
WO2021251521A1 (ko) * 2020-06-10 2021-12-16 엘지전자 주식회사 게이트 밸브 모듈 및 밀폐 챔버
JP7537329B2 (ja) * 2021-03-19 2024-08-21 Smc株式会社 ぶれ防止機構付きゲートバルブ
CN115306947A (zh) * 2022-07-29 2022-11-08 成都中科唯实仪器有限责任公司 一种低振动真空阀门
JP2024033169A (ja) * 2022-08-30 2024-03-13 株式会社キッツエスシーティー ゲートバルブ及び基板処理装置並びに基板処理方法
CN118728985A (zh) * 2024-06-21 2024-10-01 浙江先导精密机械有限公司 一种半导体真空传输阀结构及加工方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2660397A (en) 1951-08-27 1953-11-24 Alexander S Volpin Quick sealing automatic sealing gate valve
US2971527A (en) 1955-08-29 1961-02-14 Mcevoy Co Automatic plastic sealed valves
JPH05196150A (ja) * 1991-09-30 1993-08-06 Tokyo Electron Yamanashi Kk ゲートバルブ
JPH05272662A (ja) * 1992-03-25 1993-10-19 Fujitsu Ltd ゲートバルブ
JPH11351419A (ja) 1998-06-08 1999-12-24 Irie Koken Kk 無摺動ゲート弁
US6095741A (en) * 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
JP2001330172A (ja) * 2000-05-22 2001-11-30 Nec Kansai Ltd ゲートバルブ
US6602346B1 (en) 2000-08-22 2003-08-05 Novellus Systems, Inc. Gas-purged vacuum valve
JP5005512B2 (ja) * 2007-11-07 2012-08-22 東京エレクトロン株式会社 ゲートバルブ装置および真空処理装置およびゲートバルブ装置における弁体の開放方法。
JP5545152B2 (ja) * 2010-09-22 2014-07-09 Ｓｍｃ株式会社 ゲートバルブ
JP5806827B2 (ja) * 2011-03-18 2015-11-10 東京エレクトロン株式会社 ゲートバルブ装置及び基板処理装置並びにその基板処理方法

Also Published As

Publication number Publication date
DE102015105899B4 (de) 2022-05-12
US9599233B2 (en) 2017-03-21
CH709581A2 (de) 2015-10-30
KR20150125610A (ko) 2015-11-09
TWI580880B (zh) 2017-05-01
CN105020423A (zh) 2015-11-04
CH709581B1 (de) 2019-04-30
KR101814045B1 (ko) 2018-01-02
TW201604457A (zh) 2016-02-01
KR20170067170A (ko) 2017-06-15
CN105020423B (zh) 2018-10-26
JP2015209955A (ja) 2015-11-24
CH709581B8 (de) 2019-08-15
DE102015105899A1 (de) 2015-11-05
US20150316155A1 (en) 2015-11-05

Similar Documents

Publication Publication Date Title
JP6160923B2 (ja) ゲートバルブ
KR101363959B1 (ko) 무슬라이딩형 게이트 밸브
KR101814542B1 (ko) 게이트 밸브
JP5963091B2 (ja) 無摺動型ゲートバルブ
JP6115628B2 (ja) ゲートバルブ
CN104781599B (zh) 真空阀
JP6103318B2 (ja) ロックブロックを用いたロッド部材ロッキング装置
KR200487180Y1 (ko) 유체압 실린더
JP2004316916A (ja) 少なくとも一つの開口を有する真空閉塞体の閉塞装置
KR101889342B1 (ko) 유체압 실린더
CN104321569A (zh) 闸阀
JP4474303B2 (ja) ワーク支持装置
JP2015215009A (ja) ゲートバルブ
JP2018132187A (ja) 真空バルブ
KR101520364B1 (ko) 픽커
TW202334567A (zh) 閘閥
JP2018176325A (ja) ワーク吸着システム
JP2022144982A (ja) ぶれ防止機構付きゲートバルブ
JP4817004B2 (ja) パウチ用充填ノズル
JP2016031083A (ja) ゲートバルブ
JP2005264964A (ja) ゲートバルブ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160202

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160202

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20161129

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20161130

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170130

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170502

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170601

R150 Certificate of patent or registration of utility model

Ref document number: 6160923

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R255 Notification that request for automated payment was rejected

Free format text: JAPANESE INTERMEDIATE CODE: R2525

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250