KR20150125610A - 게이트 밸브 - Google Patents

게이트 밸브 Download PDF

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Publication number
KR20150125610A
KR20150125610A KR1020150061306A KR20150061306A KR20150125610A KR 20150125610 A KR20150125610 A KR 20150125610A KR 1020150061306 A KR1020150061306 A KR 1020150061306A KR 20150061306 A KR20150061306 A KR 20150061306A KR 20150125610 A KR20150125610 A KR 20150125610A
Authority
KR
South Korea
Prior art keywords
valve
balance
passage
chamber
box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020150061306A
Other languages
English (en)
Korean (ko)
Inventor
츠네오 이시가키
히로미 시모다
타카시 나가오
Original Assignee
에스엠시 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스엠시 가부시키가이샤 filed Critical 에스엠시 가부시키가이샤
Publication of KR20150125610A publication Critical patent/KR20150125610A/ko
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
KR1020150061306A 2014-04-30 2015-04-30 게이트 밸브 Ceased KR20150125610A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014093750A JP6160923B2 (ja) 2014-04-30 2014-04-30 ゲートバルブ
JPJP-P-2014-093750 2014-04-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020170069469A Division KR101814045B1 (ko) 2014-04-30 2017-06-05 게이트 밸브

Publications (1)

Publication Number Publication Date
KR20150125610A true KR20150125610A (ko) 2015-11-09

Family

ID=54326134

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020150061306A Ceased KR20150125610A (ko) 2014-04-30 2015-04-30 게이트 밸브
KR1020170069469A Active KR101814045B1 (ko) 2014-04-30 2017-06-05 게이트 밸브

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020170069469A Active KR101814045B1 (ko) 2014-04-30 2017-06-05 게이트 밸브

Country Status (7)

Country Link
US (1) US9599233B2 (enExample)
JP (1) JP6160923B2 (enExample)
KR (2) KR20150125610A (enExample)
CN (1) CN105020423B (enExample)
CH (1) CH709581B8 (enExample)
DE (1) DE102015105899B4 (enExample)
TW (1) TWI580880B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102396227B1 (ko) * 2014-12-19 2022-05-09 배트 홀딩 아게 진공챔버의 챔버벽 안의 챔버 개구부를 폐쇄하기 위한 도어
JP6356645B2 (ja) * 2015-09-04 2018-07-11 株式会社鷺宮製作所 絞り装置及び冷凍サイクル
JP6774302B2 (ja) * 2016-10-28 2020-10-21 株式会社キッツエスシーティー 真空用ゲートバルブ
KR102145830B1 (ko) * 2017-10-13 2020-08-19 주식회사 라온티엠디 밸브 조립체
CN107940096B (zh) * 2018-01-12 2023-11-21 眉山中车制动科技股份有限公司 一种双向机构
CN110242758B (zh) * 2018-03-09 2021-02-26 (株）Np控股 密封构件更换型闸阀系统、密封板及密封板用料盒
CN110959085B (zh) * 2018-06-12 2021-02-12 株式会社爱发科 闸阀装置
DE102019001115A1 (de) * 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
JP6745953B1 (ja) * 2019-07-23 2020-08-26 株式会社アルバック 仕切りバルブ
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
CN110993550B (zh) * 2019-12-25 2022-12-09 北京北方华创微电子装备有限公司 半导体热处理设备
JP7479587B2 (ja) * 2020-02-28 2024-05-09 Smc株式会社 ゲートバルブ
WO2021251521A1 (ko) * 2020-06-10 2021-12-16 엘지전자 주식회사 게이트 밸브 모듈 및 밀폐 챔버
JP7537329B2 (ja) * 2021-03-19 2024-08-21 Smc株式会社 ぶれ防止機構付きゲートバルブ
CN115306947A (zh) * 2022-07-29 2022-11-08 成都中科唯实仪器有限责任公司 一种低振动真空阀门
JP2024033169A (ja) * 2022-08-30 2024-03-13 株式会社キッツエスシーティー ゲートバルブ及び基板処理装置並びに基板処理方法
CN118728985A (zh) * 2024-06-21 2024-10-01 浙江先导精密机械有限公司 一种半导体真空传输阀结构及加工方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2660397A (en) 1951-08-27 1953-11-24 Alexander S Volpin Quick sealing automatic sealing gate valve
US2971527A (en) 1955-08-29 1961-02-14 Mcevoy Co Automatic plastic sealed valves
JPH05196150A (ja) * 1991-09-30 1993-08-06 Tokyo Electron Yamanashi Kk ゲートバルブ
JPH05272662A (ja) * 1992-03-25 1993-10-19 Fujitsu Ltd ゲートバルブ
JPH11351419A (ja) 1998-06-08 1999-12-24 Irie Koken Kk 無摺動ゲート弁
US6095741A (en) * 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
JP2001330172A (ja) * 2000-05-22 2001-11-30 Nec Kansai Ltd ゲートバルブ
US6602346B1 (en) 2000-08-22 2003-08-05 Novellus Systems, Inc. Gas-purged vacuum valve
JP5005512B2 (ja) * 2007-11-07 2012-08-22 東京エレクトロン株式会社 ゲートバルブ装置および真空処理装置およびゲートバルブ装置における弁体の開放方法。
JP5545152B2 (ja) * 2010-09-22 2014-07-09 Ｓｍｃ株式会社 ゲートバルブ
JP5806827B2 (ja) * 2011-03-18 2015-11-10 東京エレクトロン株式会社 ゲートバルブ装置及び基板処理装置並びにその基板処理方法

Also Published As

Publication number Publication date
KR20170067170A (ko) 2017-06-15
JP2015209955A (ja) 2015-11-24
CH709581B1 (de) 2019-04-30
DE102015105899A1 (de) 2015-11-05
CN105020423A (zh) 2015-11-04
CH709581A2 (de) 2015-10-30
DE102015105899B4 (de) 2022-05-12
CH709581B8 (de) 2019-08-15
US9599233B2 (en) 2017-03-21
CN105020423B (zh) 2018-10-26
TW201604457A (zh) 2016-02-01
US20150316155A1 (en) 2015-11-05
KR101814045B1 (ko) 2018-01-02
TWI580880B (zh) 2017-05-01
JP6160923B2 (ja) 2017-07-12

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Patent event date: 20150430

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Patent event code: PE09021S01D

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PE0601 Decision on rejection of patent

Patent event date: 20161227

Comment text: Decision to Refuse Application

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Patent event date: 20161227

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Patent event date: 20160822

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PA0107 Divisional application

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