DE102015105899B4 - Schieberventil - Google Patents

Schieberventil Download PDF

Info

Publication number
DE102015105899B4
DE102015105899B4 DE102015105899.5A DE102015105899A DE102015105899B4 DE 102015105899 B4 DE102015105899 B4 DE 102015105899B4 DE 102015105899 A DE102015105899 A DE 102015105899A DE 102015105899 B4 DE102015105899 B4 DE 102015105899B4
Authority
DE
Germany
Prior art keywords
valve
passage
space
box
valve box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102015105899.5A
Other languages
German (de)
English (en)
Other versions
DE102015105899A1 (de
Inventor
c/o SMC Corporation Ishigaki Tsuneo
c/o SMC Corporation Shimoda Hiromi
Takashi Nagao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Publication of DE102015105899A1 publication Critical patent/DE102015105899A1/de
Application granted granted Critical
Publication of DE102015105899B4 publication Critical patent/DE102015105899B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
DE102015105899.5A 2014-04-30 2015-04-17 Schieberventil Active DE102015105899B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-093750 2014-04-30
JP2014093750A JP6160923B2 (ja) 2014-04-30 2014-04-30 ゲートバルブ

Publications (2)

Publication Number Publication Date
DE102015105899A1 DE102015105899A1 (de) 2015-11-05
DE102015105899B4 true DE102015105899B4 (de) 2022-05-12

Family

ID=54326134

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102015105899.5A Active DE102015105899B4 (de) 2014-04-30 2015-04-17 Schieberventil

Country Status (7)

Country Link
US (1) US9599233B2 (enExample)
JP (1) JP6160923B2 (enExample)
KR (2) KR20150125610A (enExample)
CN (1) CN105020423B (enExample)
CH (1) CH709581B8 (enExample)
DE (1) DE102015105899B4 (enExample)
TW (1) TWI580880B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102396227B1 (ko) * 2014-12-19 2022-05-09 배트 홀딩 아게 진공챔버의 챔버벽 안의 챔버 개구부를 폐쇄하기 위한 도어
JP6356645B2 (ja) * 2015-09-04 2018-07-11 株式会社鷺宮製作所 絞り装置及び冷凍サイクル
JP6774302B2 (ja) * 2016-10-28 2020-10-21 株式会社キッツエスシーティー 真空用ゲートバルブ
KR102145830B1 (ko) * 2017-10-13 2020-08-19 주식회사 라온티엠디 밸브 조립체
CN107940096B (zh) * 2018-01-12 2023-11-21 眉山中车制动科技股份有限公司 一种双向机构
CN110242758B (zh) * 2018-03-09 2021-02-26 (株）Np控股 密封构件更换型闸阀系统、密封板及密封板用料盒
WO2019239673A1 (ja) * 2018-06-12 2019-12-19 株式会社アルバック 仕切弁装置
DE102019001115A1 (de) * 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
JP6745953B1 (ja) * 2019-07-23 2020-08-26 株式会社アルバック 仕切りバルブ
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
CN110993550B (zh) * 2019-12-25 2022-12-09 北京北方华创微电子装备有限公司 半导体热处理设备
JP7479587B2 (ja) * 2020-02-28 2024-05-09 Smc株式会社 ゲートバルブ
WO2021251521A1 (ko) * 2020-06-10 2021-12-16 엘지전자 주식회사 게이트 밸브 모듈 및 밀폐 챔버
JP7537329B2 (ja) * 2021-03-19 2024-08-21 Smc株式会社 ぶれ防止機構付きゲートバルブ
CN115306947A (zh) * 2022-07-29 2022-11-08 成都中科唯实仪器有限责任公司 一种低振动真空阀门
JP2024033169A (ja) * 2022-08-30 2024-03-13 株式会社キッツエスシーティー ゲートバルブ及び基板処理装置並びに基板処理方法
CN118728985A (zh) * 2024-06-21 2024-10-01 浙江先导精密机械有限公司 一种半导体真空传输阀结构及加工方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2660397A (en) 1951-08-27 1953-11-24 Alexander S Volpin Quick sealing automatic sealing gate valve
US2971527A (en) 1955-08-29 1961-02-14 Mcevoy Co Automatic plastic sealed valves
JPH11351419A (ja) 1998-06-08 1999-12-24 Irie Koken Kk 無摺動ゲート弁
US20040007188A1 (en) 2000-08-22 2004-01-15 Novellus Systems, Inc. Gas-purged vacuum valve
US20140003892A1 (en) 2011-03-18 2014-01-02 Tokyo Electron Limited Gate valve unit, substrate processing device and substrate processing method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05196150A (ja) * 1991-09-30 1993-08-06 Tokyo Electron Yamanashi Kk ゲートバルブ
JPH05272662A (ja) * 1992-03-25 1993-10-19 Fujitsu Ltd ゲートバルブ
US6095741A (en) * 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
JP2001330172A (ja) * 2000-05-22 2001-11-30 Nec Kansai Ltd ゲートバルブ
JP5005512B2 (ja) * 2007-11-07 2012-08-22 東京エレクトロン株式会社 ゲートバルブ装置および真空処理装置およびゲートバルブ装置における弁体の開放方法。
JP5545152B2 (ja) * 2010-09-22 2014-07-09 Ｓｍｃ株式会社 ゲートバルブ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2660397A (en) 1951-08-27 1953-11-24 Alexander S Volpin Quick sealing automatic sealing gate valve
US2971527A (en) 1955-08-29 1961-02-14 Mcevoy Co Automatic plastic sealed valves
JPH11351419A (ja) 1998-06-08 1999-12-24 Irie Koken Kk 無摺動ゲート弁
US20040007188A1 (en) 2000-08-22 2004-01-15 Novellus Systems, Inc. Gas-purged vacuum valve
US20140003892A1 (en) 2011-03-18 2014-01-02 Tokyo Electron Limited Gate valve unit, substrate processing device and substrate processing method thereof

Also Published As

Publication number Publication date
TWI580880B (zh) 2017-05-01
KR20150125610A (ko) 2015-11-09
TW201604457A (zh) 2016-02-01
CH709581B1 (de) 2019-04-30
DE102015105899A1 (de) 2015-11-05
JP6160923B2 (ja) 2017-07-12
JP2015209955A (ja) 2015-11-24
CN105020423B (zh) 2018-10-26
CH709581B8 (de) 2019-08-15
KR101814045B1 (ko) 2018-01-02
US20150316155A1 (en) 2015-11-05
US9599233B2 (en) 2017-03-21
KR20170067170A (ko) 2017-06-15
CH709581A2 (de) 2015-10-30
CN105020423A (zh) 2015-11-04

Similar Documents

Publication Publication Date Title
DE102015105899B4 (de) Schieberventil
DE102011113829B4 (de) Absperrventil
EP2215387B1 (de) Vakuumventil
DE102007054758B4 (de) Linearstellglied
DE4423801C1 (de) Vorrichtung zum Abdichten von in Leitungen für die Förderung von Flüssigkeiten oder Gasen angeordneten Absperrorganen
DE102012021354B4 (de) Nicht gleitendes Schieberventil
CH708350A2 (de) Nicht-schleifendes Schieberventil.
EP0276355B1 (de) Filterpresse mit einer Anzahl Membranfilterplatten
WO2015128169A1 (de) Vakuumventil
DE2204219A1 (de) Durchflußregelsystem
WO2014124624A1 (de) Arbeitszylinder mit druckmediumüberströmung
DE102005031422C5 (de) Systemtrenner
DE102009037290A1 (de) Transporteinrichtung mit einem auslenkbaren Dichtrahmen
DE102016219720A1 (de) Druckventil
EP3332157B1 (de) Ventil, vorzugsweise vakuumventil
WO2021099405A1 (de) Gaseinlassventil für vakuumprozesskammern
DE102015108816A1 (de) Schieberventil
DE1918875A1 (de) Schieberventil fuer Gase,Fluessigkeiten und Gas-Feststoff-Gemische
DE102004023255B3 (de) Druckminderventil
DE102007025048A1 (de) Ventil zur Begrenzung des Tankdrucks eines Kraftfahrzeugs
DE102017131146A1 (de) Regelventilbaugruppe
EP2966331B1 (de) Hubventil mit membran
DE68916946T2 (de) Steuerungsventil.
DE2262727A1 (de) Absperrventil
DE19605895C2 (de) Druckkraftkompensierte Drosseleinrichtung

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final