JP2015209955A5 - - Google Patents

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Publication number
JP2015209955A5
JP2015209955A5 JP2014093750A JP2014093750A JP2015209955A5 JP 2015209955 A5 JP2015209955 A5 JP 2015209955A5 JP 2014093750 A JP2014093750 A JP 2014093750A JP 2014093750 A JP2014093750 A JP 2014093750A JP 2015209955 A5 JP2015209955 A5 JP 2015209955A5
Authority
JP
Japan
Prior art keywords
base frame
frame
valve
housing
side frames
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014093750A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015209955A (ja
JP6160923B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2014093750A external-priority patent/JP6160923B2/ja
Priority to JP2014093750A priority Critical patent/JP6160923B2/ja
Priority to US14/679,227 priority patent/US9599233B2/en
Priority to TW104112183A priority patent/TWI580880B/zh
Priority to DE102015105899.5A priority patent/DE102015105899B4/de
Priority to CH00555/15A priority patent/CH709581B8/de
Priority to CN201510215805.2A priority patent/CN105020423B/zh
Priority to KR1020150061306A priority patent/KR20150125610A/ko
Publication of JP2015209955A publication Critical patent/JP2015209955A/ja
Publication of JP2015209955A5 publication Critical patent/JP2015209955A5/ja
Priority to KR1020170069469A priority patent/KR101814045B1/ko
Publication of JP6160923B2 publication Critical patent/JP6160923B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014093750A 2014-04-30 2014-04-30 ゲートバルブ Active JP6160923B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2014093750A JP6160923B2 (ja) 2014-04-30 2014-04-30 ゲートバルブ
US14/679,227 US9599233B2 (en) 2014-04-30 2015-04-06 Gate valve
TW104112183A TWI580880B (zh) 2014-04-30 2015-04-16 閘閥
DE102015105899.5A DE102015105899B4 (de) 2014-04-30 2015-04-17 Schieberventil
CH00555/15A CH709581B8 (de) 2014-04-30 2015-04-23 Schieberventil.
CN201510215805.2A CN105020423B (zh) 2014-04-30 2015-04-29 闸阀
KR1020150061306A KR20150125610A (ko) 2014-04-30 2015-04-30 게이트 밸브
KR1020170069469A KR101814045B1 (ko) 2014-04-30 2017-06-05 게이트 밸브

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014093750A JP6160923B2 (ja) 2014-04-30 2014-04-30 ゲートバルブ

Publications (3)

Publication Number Publication Date
JP2015209955A JP2015209955A (ja) 2015-11-24
JP2015209955A5 true JP2015209955A5 (enExample) 2016-03-17
JP6160923B2 JP6160923B2 (ja) 2017-07-12

Family

ID=54326134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014093750A Active JP6160923B2 (ja) 2014-04-30 2014-04-30 ゲートバルブ

Country Status (7)

Country Link
US (1) US9599233B2 (enExample)
JP (1) JP6160923B2 (enExample)
KR (2) KR20150125610A (enExample)
CN (1) CN105020423B (enExample)
CH (1) CH709581B8 (enExample)
DE (1) DE102015105899B4 (enExample)
TW (1) TWI580880B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102396227B1 (ko) * 2014-12-19 2022-05-09 배트 홀딩 아게 진공챔버의 챔버벽 안의 챔버 개구부를 폐쇄하기 위한 도어
JP6356645B2 (ja) * 2015-09-04 2018-07-11 株式会社鷺宮製作所 絞り装置及び冷凍サイクル
JP6774302B2 (ja) * 2016-10-28 2020-10-21 株式会社キッツエスシーティー 真空用ゲートバルブ
KR102145830B1 (ko) * 2017-10-13 2020-08-19 주식회사 라온티엠디 밸브 조립체
CN107940096B (zh) * 2018-01-12 2023-11-21 眉山中车制动科技股份有限公司 一种双向机构
CN110242758B (zh) * 2018-03-09 2021-02-26 (株）Np控股 密封构件更换型闸阀系统、密封板及密封板用料盒
CN110959085B (zh) * 2018-06-12 2021-02-12 株式会社爱发科 闸阀装置
DE102019001115A1 (de) * 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
JP6745953B1 (ja) * 2019-07-23 2020-08-26 株式会社アルバック 仕切りバルブ
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
CN110993550B (zh) * 2019-12-25 2022-12-09 北京北方华创微电子装备有限公司 半导体热处理设备
JP7479587B2 (ja) * 2020-02-28 2024-05-09 Smc株式会社 ゲートバルブ
WO2021251521A1 (ko) * 2020-06-10 2021-12-16 엘지전자 주식회사 게이트 밸브 모듈 및 밀폐 챔버
JP7537329B2 (ja) * 2021-03-19 2024-08-21 Smc株式会社 ぶれ防止機構付きゲートバルブ
CN115306947A (zh) * 2022-07-29 2022-11-08 成都中科唯实仪器有限责任公司 一种低振动真空阀门
JP2024033169A (ja) * 2022-08-30 2024-03-13 株式会社キッツエスシーティー ゲートバルブ及び基板処理装置並びに基板処理方法
CN118728985A (zh) * 2024-06-21 2024-10-01 浙江先导精密机械有限公司 一种半导体真空传输阀结构及加工方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2660397A (en) 1951-08-27 1953-11-24 Alexander S Volpin Quick sealing automatic sealing gate valve
US2971527A (en) 1955-08-29 1961-02-14 Mcevoy Co Automatic plastic sealed valves
JPH05196150A (ja) * 1991-09-30 1993-08-06 Tokyo Electron Yamanashi Kk ゲートバルブ
JPH05272662A (ja) * 1992-03-25 1993-10-19 Fujitsu Ltd ゲートバルブ
JPH11351419A (ja) 1998-06-08 1999-12-24 Irie Koken Kk 無摺動ゲート弁
US6095741A (en) * 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
JP2001330172A (ja) * 2000-05-22 2001-11-30 Nec Kansai Ltd ゲートバルブ
US6602346B1 (en) 2000-08-22 2003-08-05 Novellus Systems, Inc. Gas-purged vacuum valve
JP5005512B2 (ja) * 2007-11-07 2012-08-22 東京エレクトロン株式会社 ゲートバルブ装置および真空処理装置およびゲートバルブ装置における弁体の開放方法。
JP5545152B2 (ja) * 2010-09-22 2014-07-09 Ｓｍｃ株式会社 ゲートバルブ
JP5806827B2 (ja) * 2011-03-18 2015-11-10 東京エレクトロン株式会社 ゲートバルブ装置及び基板処理装置並びにその基板処理方法

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