WO2016096471A1 - Tür zum verschliessen einer kammeröffnung in einer kammerwand einer vakuumkammer - Google Patents
Tür zum verschliessen einer kammeröffnung in einer kammerwand einer vakuumkammer Download PDFInfo
- Publication number
- WO2016096471A1 WO2016096471A1 PCT/EP2015/078616 EP2015078616W WO2016096471A1 WO 2016096471 A1 WO2016096471 A1 WO 2016096471A1 EP 2015078616 W EP2015078616 W EP 2015078616W WO 2016096471 A1 WO2016096471 A1 WO 2016096471A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- rod
- door
- housing
- door housing
- movement
- Prior art date
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 18
- 238000007789 sealing Methods 0.000 claims description 10
- 230000007613 environmental effect Effects 0.000 claims description 2
- 239000002245 particle Substances 0.000 abstract description 15
- 230000008859 change Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012549 training Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B5/00—Doors, windows, or like closures for special purposes; Border constructions therefor
- E06B5/10—Doors, windows, or like closures for special purposes; Border constructions therefor for protection against air-raid or other war-like action; for other protective purposes
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05D—HINGES OR SUSPENSION DEVICES FOR DOORS, WINDOWS OR WINGS
- E05D15/00—Suspension arrangements for wings
- E05D15/06—Suspension arrangements for wings for wings sliding horizontally more or less in their own plane
- E05D15/0604—Suspension arrangements for wings for wings sliding horizontally more or less in their own plane allowing an additional movement
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05D—HINGES OR SUSPENSION DEVICES FOR DOORS, WINDOWS OR WINGS
- E05D15/00—Suspension arrangements for wings
- E05D15/56—Suspension arrangements for wings with successive different movements
- E05D15/58—Suspension arrangements for wings with successive different movements with both swinging and sliding movements
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05F—DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
- E05F15/00—Power-operated mechanisms for wings
- E05F15/50—Power-operated mechanisms for wings using fluid-pressure actuators
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B7/00—Special arrangements or measures in connection with doors or windows
- E06B7/16—Sealing arrangements on wings or parts co-operating with the wings
- E06B7/22—Sealing arrangements on wings or parts co-operating with the wings by means of elastic edgings, e.g. elastic rubber tubes; by means of resilient edgings, e.g. felt or plush strips, resilient metal strips
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B7/00—Special arrangements or measures in connection with doors or windows
- E06B7/28—Other arrangements on doors or windows, e.g. door-plates, windows adapted to carry plants, hooks for window cleaners
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/04—Construction of housing; Use of materials therefor of sliding valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
- E05Y2900/00—Application of doors, windows, wings or fittings thereof
- E05Y2900/10—Application of doors, windows, wings or fittings thereof for buildings or parts thereof
- E05Y2900/13—Type of wing
- E05Y2900/132—Doors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
Definitions
- Chamber opening is adjustable in a closed position for closing the chamber opening, and a longitudinal axis having a rod with which the
- closure members In valves which serve to seal between two vacuum chambers or a vacuum chamber and a pipeline, L-shaped movements of closure members are known in different ways.
- the closure members are each arranged inside a valve housing and seal in its closed position from a valve opening of the valve housing.
- the interior of the closure members is arranged inside a valve housing and seal in its closed position from a valve opening of the valve housing.
- Is sealed in an ambient space in which the door housing is sealed may be provided in a possible embodiment that the interior of the door housing is sealed
- Fig. 3 is a view of the door attached to the chamber wall
- Figures 4 and 5 are sections taken along lines AA and BB of Figure 3;
- Figures 10, 11 and 12 are sections taken along lines EE, FF and GG;
- Fig. 31 is an oblique view of the door according to the second embodiment, wherein a housing part is removed;
- Fig. 32 to 35 are schematic representations of further embodiments.
- Closed position of the closure member 5 is a circumferentially closed elastic seal 7, which is attached to the closure member 5, to a sealing surface 8 of Chamber wall 2 pressed.
- the sealing surface 8 surrounds the chamber opening 4.
- the seal 7 and the sealing surface 8 are thus annular, in the embodiment but not circular, formed. However, annular formations are, irisbesondere in circular contours of the chamber opening 4 and the
- the Ubertragungs Culture 17 has recesses 19 in which guide rods 20 are arranged.
- the recesses 19 are in the embodiment
- Passage opening 32 of the housing part 22 extends to the end of the rod 10, to which the rod 10 is connected to the closure member 5,
- the yoke 47 has laterally projecting pins 48, which are guided in link tracks 49, which are arranged on the inner sides of the housing walls 50, 51.
- Coil spring 57 could be eliminated.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Sliding Valves (AREA)
- Refrigerator Housings (AREA)
- Details Of Valves (AREA)
- Accommodation For Nursing Or Treatment Tables (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020177016313A KR102396227B1 (ko) | 2014-12-19 | 2015-12-04 | 진공챔버의 챔버벽 안의 챔버 개구부를 폐쇄하기 위한 도어 |
US15/536,501 US10184291B2 (en) | 2014-12-19 | 2015-12-04 | Door for closing a chamber opening in a chamber wall of a vacuum chamber |
MYPI2017702085A MY190405A (en) | 2014-12-19 | 2015-12-04 | Door for closing a chamber opening in a chamber wall of a vacuum chamber |
CN201580069473.XA CN107110402B (zh) | 2014-12-19 | 2015-12-04 | 用于对真空室的室壁中的室开口进行封闭的门 |
JP2017532981A JP6679594B2 (ja) | 2014-12-19 | 2015-12-04 | 真空チャンバのチャンバ壁内のチャンバ開口を閉鎖するドア |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT9202014 | 2014-12-19 | ||
ATA920/2014 | 2014-12-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2016096471A1 true WO2016096471A1 (de) | 2016-06-23 |
Family
ID=54780336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2015/078616 WO2016096471A1 (de) | 2014-12-19 | 2015-12-04 | Tür zum verschliessen einer kammeröffnung in einer kammerwand einer vakuumkammer |
Country Status (7)
Country | Link |
---|---|
US (1) | US10184291B2 (de) |
JP (1) | JP6679594B2 (de) |
KR (1) | KR102396227B1 (de) |
CN (1) | CN107110402B (de) |
MY (1) | MY190405A (de) |
TW (1) | TWI682120B (de) |
WO (1) | WO2016096471A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113464009A (zh) * | 2021-08-06 | 2021-10-01 | 佛山市博顿光电科技有限公司 | 镀膜机开关门装置、系统,开关门控制方法以及镀膜机 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102504622B1 (ko) * | 2015-03-27 | 2023-02-27 | 배트 홀딩 아게 | 진공밸브 |
CN107575641B (zh) * | 2017-10-10 | 2023-12-29 | 深圳市大成精密设备股份有限公司 | 一种先导式真空阀门 |
CN109972943B (zh) * | 2019-04-26 | 2024-01-23 | 爱发科真空技术(苏州)有限公司 | 一种门开闭位置锁住机构 |
CN110364467A (zh) * | 2019-06-13 | 2019-10-22 | 上海提牛机电设备有限公司 | 空气阻隔装置、晶圆上料设备与空气阻隔控制方法 |
DE102019133555A1 (de) * | 2019-12-09 | 2021-06-10 | Vat Holding Ag | Vakuumventil oder Vakuumtür |
KR20230059635A (ko) * | 2021-10-26 | 2023-05-03 | 삼성전자주식회사 | 밸브 구조체 및 이를 포함하는 기판 처리 장치 |
KR102574233B1 (ko) * | 2023-03-14 | 2023-09-04 | 주식회사 에스알티 | U motion 게이트밸브 |
Citations (3)
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DE60012428T2 (de) * | 1999-06-14 | 2005-07-28 | Smc K.K. | Schieber |
DE102008051349B3 (de) * | 2008-10-15 | 2009-11-12 | Vat Holding Ag | Vakuumventil |
EP2749798A1 (de) * | 2012-12-27 | 2014-07-02 | VAT Holding AG | Vakuumschieberventil |
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DE19633798A1 (de) | 1996-08-22 | 1998-02-26 | Vat Holding Ag | Einrichtung zum Verschließen einer Öffnung in einem Behälter oder in einer Rohrleitung |
DE19746241C2 (de) | 1997-10-20 | 2000-05-31 | Vat Holding Ag Haag | Einrichtung zum Verschließen einer Öffnung |
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US6390448B1 (en) * | 2000-03-30 | 2002-05-21 | Lam Research Corporation | Single shaft dual cradle vacuum slot valve |
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JP4304365B2 (ja) * | 2002-12-16 | 2009-07-29 | Smc株式会社 | ゲートバルブ |
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JP2006526125A (ja) * | 2003-05-13 | 2006-11-16 | アプライド マテリアルズ インコーポレイテッド | 処理チャンバの開口を封止するための方法および装置 |
JP2004360754A (ja) * | 2003-06-03 | 2004-12-24 | Nippon Valqua Ind Ltd | 真空用ゲート弁 |
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US7841582B2 (en) * | 2004-06-02 | 2010-11-30 | Applied Materials, Inc. | Variable seal pressure slit valve doors for semiconductor manufacturing equipment |
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TWI705212B (zh) * | 2016-01-19 | 2020-09-21 | 瑞士商Vat控股股份有限公司 | 用於對壁中開口進行真空密封的密封裝置 |
-
2015
- 2015-12-04 WO PCT/EP2015/078616 patent/WO2016096471A1/de active Application Filing
- 2015-12-04 MY MYPI2017702085A patent/MY190405A/en unknown
- 2015-12-04 KR KR1020177016313A patent/KR102396227B1/ko active IP Right Grant
- 2015-12-04 US US15/536,501 patent/US10184291B2/en active Active
- 2015-12-04 JP JP2017532981A patent/JP6679594B2/ja active Active
- 2015-12-04 CN CN201580069473.XA patent/CN107110402B/zh active Active
- 2015-12-11 TW TW104141666A patent/TWI682120B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE60012428T2 (de) * | 1999-06-14 | 2005-07-28 | Smc K.K. | Schieber |
DE102008051349B3 (de) * | 2008-10-15 | 2009-11-12 | Vat Holding Ag | Vakuumventil |
EP2749798A1 (de) * | 2012-12-27 | 2014-07-02 | VAT Holding AG | Vakuumschieberventil |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113464009A (zh) * | 2021-08-06 | 2021-10-01 | 佛山市博顿光电科技有限公司 | 镀膜机开关门装置、系统,开关门控制方法以及镀膜机 |
Also Published As
Publication number | Publication date |
---|---|
US10184291B2 (en) | 2019-01-22 |
US20170328125A1 (en) | 2017-11-16 |
KR102396227B1 (ko) | 2022-05-09 |
CN107110402B (zh) | 2019-10-25 |
MY190405A (en) | 2022-04-21 |
KR20170097038A (ko) | 2017-08-25 |
CN107110402A (zh) | 2017-08-29 |
TWI682120B (zh) | 2020-01-11 |
JP6679594B2 (ja) | 2020-04-15 |
TW201634852A (zh) | 2016-10-01 |
JP2018501443A (ja) | 2018-01-18 |
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