TWI540382B - 感光性樹脂組成物 - Google Patents
感光性樹脂組成物 Download PDFInfo
- Publication number
- TWI540382B TWI540382B TW099105798A TW99105798A TWI540382B TW I540382 B TWI540382 B TW I540382B TW 099105798 A TW099105798 A TW 099105798A TW 99105798 A TW99105798 A TW 99105798A TW I540382 B TWI540382 B TW I540382B
- Authority
- TW
- Taiwan
- Prior art keywords
- photosensitive resin
- resin composition
- weight
- hydroxy
- bis
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims description 53
- 239000011229 interlayer Substances 0.000 claims description 23
- 239000012963 UV stabilizer Substances 0.000 claims description 16
- 239000000178 monomer Substances 0.000 claims description 16
- 239000002516 radical scavenger Substances 0.000 claims description 16
- 239000003822 epoxy resin Substances 0.000 claims description 14
- 229920000647 polyepoxide Polymers 0.000 claims description 14
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 11
- 239000002904 solvent Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 229920006243 acrylic copolymer Polymers 0.000 claims description 9
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 claims description 8
- 229920006026 co-polymeric resin Polymers 0.000 claims description 7
- 230000035945 sensitivity Effects 0.000 claims description 7
- 239000004094 surface-active agent Substances 0.000 claims description 6
- 229920001577 copolymer Polymers 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- BWJKLDGAAPQXGO-UHFFFAOYSA-N 2,2,6,6-tetramethyl-4-octadecoxypiperidine Chemical compound CCCCCCCCCCCCCCCCCCOC1CC(C)(C)NC(C)(C)C1 BWJKLDGAAPQXGO-UHFFFAOYSA-N 0.000 claims description 2
- LEGMPSODXUCYQS-UHFFFAOYSA-N C(C1=CC=CC=C1)=C1CC(NC(C1)(C)C)(C)C Chemical compound C(C1=CC=CC=C1)=C1CC(NC(C1)(C)C)(C)C LEGMPSODXUCYQS-UHFFFAOYSA-N 0.000 claims description 2
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 claims description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 2
- -1 octyl Phenyl Chemical group 0.000 description 23
- 239000004973 liquid crystal related substance Substances 0.000 description 20
- 239000000243 solution Substances 0.000 description 17
- 239000000203 mixture Substances 0.000 description 14
- 150000001875 compounds Chemical class 0.000 description 11
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 238000000576 coating method Methods 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 5
- 239000012964 benzotriazole Substances 0.000 description 5
- 125000003700 epoxy group Chemical group 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 150000001336 alkenes Chemical class 0.000 description 4
- 238000007334 copolymerization reaction Methods 0.000 description 4
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 4
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 4
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- SEEVRZDUPHZSOX-WPWMEQJKSA-N [(e)-1-[9-ethyl-6-(2-methylbenzoyl)carbazol-3-yl]ethylideneamino] acetate Chemical compound C=1C=C2N(CC)C3=CC=C(C(\C)=N\OC(C)=O)C=C3C2=CC=1C(=O)C1=CC=CC=C1C SEEVRZDUPHZSOX-WPWMEQJKSA-N 0.000 description 3
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 239000003505 polymerization initiator Substances 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000001291 vacuum drying Methods 0.000 description 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 2
- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 description 2
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 2
- GDUZPNKSJOOIDA-UHFFFAOYSA-N 7-oxabicyclo[4.1.0]heptan-4-yl 2-methylprop-2-enoate Chemical compound C1C(OC(=O)C(=C)C)CCC2OC21 GDUZPNKSJOOIDA-UHFFFAOYSA-N 0.000 description 2
- OSJIQLQSJBXTOH-UHFFFAOYSA-N 8-tricyclo[5.2.1.02,6]decanylmethyl prop-2-enoate Chemical compound C12CCCC2C2CC(COC(=O)C=C)C1C2 OSJIQLQSJBXTOH-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical group COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- FQUNFJULCYSSOP-UHFFFAOYSA-N bisoctrizole Chemical compound N1=C2C=CC=CC2=NN1C1=CC(C(C)(C)CC(C)(C)C)=CC(CC=2C(=C(C=C(C=2)C(C)(C)CC(C)(C)C)N2N=C3C=CC=CC3=N2)O)=C1O FQUNFJULCYSSOP-UHFFFAOYSA-N 0.000 description 2
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 125000004386 diacrylate group Chemical group 0.000 description 2
- 150000001990 dicarboxylic acid derivatives Chemical class 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
- LVHBHZANLOWSRM-UHFFFAOYSA-N itaconic acid Chemical compound OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 2
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- 229920000058 polyacrylate Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000000379 polymerizing effect Effects 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
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- 230000009257 reactivity Effects 0.000 description 2
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- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- KIJJAQMJSXOBIE-UHFFFAOYSA-N (2-methylcyclohexyl) 2-methylprop-2-enoate Chemical group CC1CCCCC1OC(=O)C(C)=C KIJJAQMJSXOBIE-UHFFFAOYSA-N 0.000 description 1
- SSLASPHAKUVIRG-UHFFFAOYSA-N (2-methylcyclohexyl) prop-2-enoate Chemical compound CC1CCCCC1OC(=O)C=C SSLASPHAKUVIRG-UHFFFAOYSA-N 0.000 description 1
- STGNLGBPLOVYMA-MAZDBSFSSA-N (E)-but-2-enedioic acid Chemical compound OC(=O)\C=C\C(O)=O.OC(=O)\C=C\C(O)=O STGNLGBPLOVYMA-MAZDBSFSSA-N 0.000 description 1
- PAHUTFPWSUWSCR-BHPSOXLSSA-N (z)-2-methylbut-2-enedioic acid Chemical compound OC(=O)C(/C)=C\C(O)=O.OC(=O)C(/C)=C\C(O)=O PAHUTFPWSUWSCR-BHPSOXLSSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
- CDPKRQSIFVWEFL-UHFFFAOYSA-N 1-[3-(benzotriazol-2-yl)-5-butylphenyl]butan-2-ol Chemical compound OC(CC=1C=C(C=C(C1)N1N=C2C(=N1)C=CC=C2)CCCC)CC CDPKRQSIFVWEFL-UHFFFAOYSA-N 0.000 description 1
- PHPRWKJDGHSJMI-UHFFFAOYSA-N 1-adamantyl prop-2-enoate Chemical compound C1C(C2)CC3CC2CC1(OC(=O)C=C)C3 PHPRWKJDGHSJMI-UHFFFAOYSA-N 0.000 description 1
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
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- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 1
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- ODDDCGGSPAPBOS-UHFFFAOYSA-N 1-ethoxypropan-2-yl propanoate Chemical compound CCOCC(C)OC(=O)CC ODDDCGGSPAPBOS-UHFFFAOYSA-N 0.000 description 1
- CXBDYQVECUFKRK-UHFFFAOYSA-N 1-methoxybutane Chemical compound CCCCOC CXBDYQVECUFKRK-UHFFFAOYSA-N 0.000 description 1
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- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 description 1
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- CBKJLMZJKHOGEQ-UHFFFAOYSA-N 2-(oxiran-2-yl)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCC1CO1 CBKJLMZJKHOGEQ-UHFFFAOYSA-N 0.000 description 1
- QNYBOILAKBSWFG-UHFFFAOYSA-N 2-(phenylmethoxymethyl)oxirane Chemical compound C1OC1COCC1=CC=CC=C1 QNYBOILAKBSWFG-UHFFFAOYSA-N 0.000 description 1
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- JFWFAUHHNYTWOO-UHFFFAOYSA-N 2-[(2-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC=C1COCC1OC1 JFWFAUHHNYTWOO-UHFFFAOYSA-N 0.000 description 1
- SITYOOWCYAYOKL-UHFFFAOYSA-N 2-[4,6-bis(2,4-dimethylphenyl)-1,3,5-triazin-2-yl]-5-(3-dodecoxy-2-hydroxypropoxy)phenol Chemical compound OC1=CC(OCC(O)COCCCCCCCCCCCC)=CC=C1C1=NC(C=2C(=CC(C)=CC=2)C)=NC(C=2C(=CC(C)=CC=2)C)=N1 SITYOOWCYAYOKL-UHFFFAOYSA-N 0.000 description 1
- MSTZGVRUOMBULC-UHFFFAOYSA-N 2-amino-4-[2-(3-amino-4-hydroxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phenol Chemical compound C1=C(O)C(N)=CC(C(C=2C=C(N)C(O)=CC=2)(C(F)(F)F)C(F)(F)F)=C1 MSTZGVRUOMBULC-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
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- RTANHMOFHGSZQO-UHFFFAOYSA-N 4-methoxy-2,4-dimethylpentanenitrile Chemical compound COC(C)(C)CC(C)C#N RTANHMOFHGSZQO-UHFFFAOYSA-N 0.000 description 1
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- COCLLEMEIJQBAG-UHFFFAOYSA-N 8-methylnonyl 2-methylprop-2-enoate Chemical compound CC(C)CCCCCCCOC(=O)C(C)=C COCLLEMEIJQBAG-UHFFFAOYSA-N 0.000 description 1
- LVGFPWDANALGOY-UHFFFAOYSA-N 8-methylnonyl prop-2-enoate Chemical compound CC(C)CCCCCCCOC(=O)C=C LVGFPWDANALGOY-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
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- JZHKIUBMQMDQRG-UHFFFAOYSA-N C(=C)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C(=C)C(C(OC)(OC)OC)CCCCCCCC JZHKIUBMQMDQRG-UHFFFAOYSA-N 0.000 description 1
- DBJFSFSBHGPDPG-UHFFFAOYSA-N C(C(=C)C)(=O)OCCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound C(C(=C)C)(=O)OCCCC(C(OC)(OC)OC)CCCCCCCC DBJFSFSBHGPDPG-UHFFFAOYSA-N 0.000 description 1
- VPLKXGORNUYFBO-UHFFFAOYSA-N C1(CC2C(CC1)O2)CCC(C(OC)(OC)OC)CCCCCCCC Chemical compound C1(CC2C(CC1)O2)CCC(C(OC)(OC)OC)CCCCCCCC VPLKXGORNUYFBO-UHFFFAOYSA-N 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- DCTLJGWMHPGCOS-UHFFFAOYSA-N Osajin Chemical compound C1=2C=CC(C)(C)OC=2C(CC=C(C)C)=C(O)C(C2=O)=C1OC=C2C1=CC=C(O)C=C1 DCTLJGWMHPGCOS-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 108010039918 Polylysine Proteins 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- YSMRWXYRXBRSND-UHFFFAOYSA-N TOTP Chemical compound CC1=CC=CC=C1OP(=O)(OC=1C(=CC=CC=1)C)OC1=CC=CC=C1C YSMRWXYRXBRSND-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 206010047571 Visual impairment Diseases 0.000 description 1
- TUOBEAZXHLTYLF-UHFFFAOYSA-N [2-(hydroxymethyl)-2-(prop-2-enoyloxymethyl)butyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(CC)COC(=O)C=C TUOBEAZXHLTYLF-UHFFFAOYSA-N 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- IDLJKTNBZKSHIY-UHFFFAOYSA-N [4-(diethylamino)phenyl]-phenylmethanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=CC=C1 IDLJKTNBZKSHIY-UHFFFAOYSA-N 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 239000004844 aliphatic epoxy resin Substances 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 150000007514 bases Chemical class 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- RSOILICUEWXSLA-UHFFFAOYSA-N bis(1,2,2,6,6-pentamethylpiperidin-4-yl) decanedioate Chemical compound C1C(C)(C)N(C)C(C)(C)CC1OC(=O)CCCCCCCCC(=O)OC1CC(C)(C)N(C)C(C)(C)C1 RSOILICUEWXSLA-UHFFFAOYSA-N 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- ZFMQKOWCDKKBIF-UHFFFAOYSA-N bis(3,5-difluorophenyl)phosphane Chemical compound FC1=CC(F)=CC(PC=2C=C(F)C=C(F)C=2)=C1 ZFMQKOWCDKKBIF-UHFFFAOYSA-N 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical group CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
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- 238000004132 cross linking Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- OIWOHHBRDFKZNC-UHFFFAOYSA-N cyclohexyl 2-methylprop-2-enoate Chemical group CC(=C)C(=O)OC1CCCCC1 OIWOHHBRDFKZNC-UHFFFAOYSA-N 0.000 description 1
- KBLWLMPSVYBVDK-UHFFFAOYSA-N cyclohexyl prop-2-enoate Chemical compound C=CC(=O)OC1CCCCC1 KBLWLMPSVYBVDK-UHFFFAOYSA-N 0.000 description 1
- 229960002887 deanol Drugs 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- HBGGXOJOCNVPFY-UHFFFAOYSA-N diisononyl phthalate Chemical compound CC(C)CCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCC(C)C HBGGXOJOCNVPFY-UHFFFAOYSA-N 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000012972 dimethylethanolamine Substances 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003623 enhancer Substances 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- XHZCGLONCCWGHA-UHFFFAOYSA-N ethyl propanoate;propane-1,2-diol Chemical compound CC(O)CO.CCOC(=O)CC XHZCGLONCCWGHA-UHFFFAOYSA-N 0.000 description 1
- 238000010528 free radical solution polymerization reaction Methods 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
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- 239000003112 inhibitor Substances 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 150000007529 inorganic bases Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000005641 methacryl group Chemical group 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- BNYVPFNFEWDGOV-UHFFFAOYSA-N methoxymethane;propanoic acid Chemical compound COC.CCC(O)=O BNYVPFNFEWDGOV-UHFFFAOYSA-N 0.000 description 1
- WYHUWFDCOJZMPO-UHFFFAOYSA-N methyl 2-methylprop-2-enoate;hydrochloride Chemical compound Cl.COC(=O)C(C)=C WYHUWFDCOJZMPO-UHFFFAOYSA-N 0.000 description 1
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- LUCXVPAZUDVVBT-UHFFFAOYSA-N methyl-[3-(2-methylphenoxy)-3-phenylpropyl]azanium;chloride Chemical group Cl.C=1C=CC=CC=1C(CCNC)OC1=CC=CC=C1C LUCXVPAZUDVVBT-UHFFFAOYSA-N 0.000 description 1
- HNEGQIOMVPPMNR-UHFFFAOYSA-N methylfumaric acid Natural products OC(=O)C(C)=CC(O)=O HNEGQIOMVPPMNR-UHFFFAOYSA-N 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 1
- DAZXVJBJRMWXJP-UHFFFAOYSA-N n,n-dimethylethylamine Chemical compound CCN(C)C DAZXVJBJRMWXJP-UHFFFAOYSA-N 0.000 description 1
- GNVRJGIVDSQCOP-UHFFFAOYSA-N n-ethyl-n-methylethanamine Chemical compound CCN(C)CC GNVRJGIVDSQCOP-UHFFFAOYSA-N 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 229920002114 octoxynol-9 Polymers 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- BQIVQQFTLJPGGJ-UHFFFAOYSA-N pent-1-enyl 2-methylprop-2-enoate Chemical compound CCCC=COC(=O)C(C)=C BQIVQQFTLJPGGJ-UHFFFAOYSA-N 0.000 description 1
- QIWKUEJZZCOPFV-UHFFFAOYSA-N phenyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1=CC=CC=C1 QIWKUEJZZCOPFV-UHFFFAOYSA-N 0.000 description 1
- WRAQQYDMVSCOTE-UHFFFAOYSA-N phenyl prop-2-enoate Chemical compound C=CC(=O)OC1=CC=CC=C1 WRAQQYDMVSCOTE-UHFFFAOYSA-N 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000029553 photosynthesis Effects 0.000 description 1
- 238000010672 photosynthesis Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
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- 229920002223 polystyrene Polymers 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- LYBIZMNPXTXVMV-UHFFFAOYSA-N propan-2-yl prop-2-enoate Chemical group CC(C)OC(=O)C=C LYBIZMNPXTXVMV-UHFFFAOYSA-N 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- RSVDRWTUCMTKBV-UHFFFAOYSA-N sbb057044 Chemical compound C12CC=CC2C2CC(OCCOC(=O)C=C)C1C2 RSVDRWTUCMTKBV-UHFFFAOYSA-N 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- UGJCNRLBGKEGEH-UHFFFAOYSA-N sodium-binding benzofuran isophthalate Chemical compound COC1=CC=2C=C(C=3C(=CC(=CC=3)C(O)=O)C(O)=O)OC=2C=C1N(CCOCC1)CCOCCOCCN1C(C(=CC=1C=2)OC)=CC=1OC=2C1=CC=C(C(O)=O)C=C1C(O)=O UGJCNRLBGKEGEH-UHFFFAOYSA-N 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133345—Insulating layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Materials For Photolithography (AREA)
- Liquid Crystal (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Description
本發明有關於感光性樹脂組成物,更詳而言之,是有關於使用於TFT-LCD的層間有機絕緣膜之形成,不僅可在光定向用液晶步驟中改善進行過度曝光時的液晶偏移現象,且圖案之解像度調節容易,尤其適合於形成層間有機絕緣膜之平坦化膜的感光性樹脂組成物。
對於TFT型液晶顯示元件或積體電路元件,係使用有機絕緣膜將配置於層間的配線之間予以絕緣。
尤其,為了進行TFT-LCD用光定向,必須使用非常大量的曝光能源以避免殘像等問題產生。使用習知之感光性樹脂組成物來作為使用於光定向的層間有機絕緣膜時,因耐光性低劣,使得層間有機絕緣膜因過度曝光而老化產生昇華物,或產生分解物而污染液晶,若液晶因這種現象受到污染,則會有畫素內的液晶不飽和之區域產生的問題,其改善為切實的需求。
為了解決此種習知技術的問題點,本發明之目的是在於提供一種感光性樹脂組成物,其使用於TFT-LCD的層間有機絕緣膜之形成,不僅可在光定向用液晶步驟中改善進行過度曝光時的液晶偏移現象,且圖案之解像度調節容易,尤其適合於形成層間有機絕緣膜之平坦化膜。
為了達成前述目的,本發明提供一種感光性樹脂組成物,其係用於形成TFT-LCD用層間有機絕緣膜者,其特徵在於含有0.01至20重量%之UV穩定劑或自由基捕捉劑。
又,本發明提供一種利用前述感光性樹脂組成物之TFT-LCD用層間有機絕緣膜的形成方法。
又,本發明提供一種含有前述感光性樹脂組成物之硬化體作為層間有機絕緣膜的TFT-LCD。
本發明的感光性樹脂組成物使用於形成TFT-LCD之層間有機絕緣膜,其不僅可在光定向用液晶步驟中改善進行過度曝光時的液晶偏移現象,且圖案之解像度調節容易,尤其適合於層間有機絕緣膜之平坦化膜形成。
以下,詳細說明本發明。
本發明人確認,使作為層間有機絕緣膜使用的感光性樹脂組成物中含有UV穩定劑或自由基捕捉劑(radical scavenger)在0.01至20重量%的情況下,不僅可改善在光定向用液晶步驟中進行過度曝光時的液晶偏移現象,且圖案之解像度調節容易,尤其適合於TFT-LCD之層間有機絕緣膜之平坦化膜形成,而完成了本發明。
本發明之感光性樹脂組成物的特徵在於含有0.01至20重量%之UV穩定劑或自由基捕捉劑。
本發明之UV穩定劑或自由基捕捉劑係在光定向用液晶步驟中吸收過度曝光能量,使之變化為無害的動能或熱能,藉此達成抑制層間有機絕緣膜因光所導致之分解及變色有機物之昇華物產生等的功能。亦即,前述UV穩定劑或自由基捕捉劑係可吸收及除去相對於過度曝光的紫外線,而在必須經由過度曝光來進行液晶之交聯、定向的液晶模式中,達成確保層間有機絕緣膜之可靠性的功能。
具體而言,前述UV穩定劑或自由基捕捉劑係可單獨使用或混合使用苯并三唑及其衍生物、三及其衍生物、哌啶及其衍生物之2種以上,於感光性樹脂組成物中,以含有0.01至20重量%為佳,更以在感光性樹脂組成物中含有0.1至10重量%為佳。又,以UV穩定劑及自由基捕捉劑各自含0.1至10重量%最佳。
更具體而言,作為前述苯并三唑及其衍生物者,可使用:羥苯基苯并三唑、2,2’-亞甲基-雙(6-(2H-苯并三唑-2-基)-4-(1,1,3,3-四甲基丁基)-苯酚、2-(2’-羥甲苯基)苯并三唑、2-[2’-羥基-3’,5’-雙(α、α-二甲基苄苯基)]苯并三唑、2-(2’-羥基-3’,5’-二丁基苯基)苯并三唑、2-(2’-羥基-3’-三級丁基-5’-甲苯基)-5-氯苯并三唑、2-(2’羥基-3’,5’-二-三級丁基苯基)-5-氯苯并三唑、2-(2’-羥基-3’,5’-二-三級戊基)苯并三唑、2-(2’羥基-,5’-三級辛基苯基)苯并三唑或者2,2’-亞甲基雙[4-(1,1,3,3-四甲基丁基)-6-(2-N-苯并三唑-2-基)苯酚]等。
又,前述三及其衍生物可使用:羥苯基-S-三、2-(4’-甲氧基苯基)-4,6-雙(2’-羥基-4’-正辛氧基苯基)-1,3,5-三、2,4-雙{[4-(3-(2-丙氧基)-2-羥基-丙氧基)-2-羥基]-苯基}-6-(4-甲氧基苯基)-1,3,5-三、2,4-雙{[4-(2-乙基-己氧基)-2-羥基]-苯基}-6-[4-(2-甲氧基乙基-羧基)-苯胺基]-1,3,5-三、2,4-雙{[4-(參(三甲基矽基氧基-矽基丙氧基)-2-羥基)]-苯基}-6-(4-甲氧基苯基)-1,3,5-三、2,4-雙{[4-(2’-甲基丙烯基氧基-2-羥基]-苯基}-6-(4-甲氧基苯基)-1,3,5-三、2,4-雙{[4-(1’,1’,3’,5’,5’,5’-七甲基三矽基-2’-甲基-丙氧基)-2-羥基]-苯基}-6-(4-甲氧基苯基)-1,3,5-三、2,4-雙{[4-(4-(2-丙氧基)-2-羥基-丙氧基)-2-羥基]-苯基}-6-[4-乙基羧基)-苯基胺基]-1,3,5-三或者2,4,6-三苯胺-(對-羧-2’-乙基-1’-氧基)-1,3,5-三等。
又,前述哌啶及其衍生物可使用:4-苯甲醯基-2,2,6,6-四甲基哌啶、或4-硬脂醯氧基-2,2,6,6-四甲基-哌啶等。
又,亦可使用市售之UV穩定劑或自由基捕捉劑,舉例而言,UV穩定劑者可使用汽巴(Ciba)公司之TINUVIN 109、171、384-2、400、405、411L、328、900、928、384-2、460、477、479、CGL77MPA-D type等,可單獨使用與之類似系統的衍生物或混合使用2種以上。自由基捕捉劑可使用汽巴(Ciba)公司之TINUVIN 123、292、292HP、144 type與CGL 052等,可單獨使用與之類似系統的衍生物或混合使用2種以上。
又,本發明之感光性樹脂組成物,係可使用前述UV穩定劑或自由基捕捉劑以外的公知用以形成有機絕緣膜之感光性樹脂組成物,適當之例子,係構成由:a)共聚物樹脂5至40重量%、b)光起始劑0.01至30重量%、c)具有乙烯性不飽和鍵(ethylenic unsaturated bond)的多官能性單體0.5至40重量%、d)前述UV穩定劑或自由基捕捉劑0.01至20重量%、及e)剩餘量的溶媒。
前述a)之共聚物樹脂係使用負型感光性樹脂組成物中所使用之公知共聚物樹脂,適當者可使用丙烯酸系共聚物樹脂或聚醯亞胺系共聚物樹脂。前述共聚物樹脂之聚苯乙烯換算重量平均分子量宜為5000~20000,在前述範圍內時,可同時滿足有機絕緣膜之顯影性、殘膜率、耐熱性、感度等。
前述a)共聚物樹脂之含量宜於感光性樹脂組成物中計5至40重量%。在前述範圍內時,不僅可滿足感度,且可同時滿足平坦度、解像度、耐熱性、透過度、耐衝擊性。
舉具體之例而言之,前述丙烯酸系共聚物係可採i)不飽和羧酸或其酐;ii)含環氧基不飽和化合物及iii)烯烴系不飽和化合物作為單體,在溶媒及聚合起始劑的存在下進行光合成後,藉由沉澱及過濾、真空乾燥(Vacuum Drying)步驟除去未反應單體而獲得。
本發明中所使用的前述a)i)不飽和羧酸、不飽和羧酸酐或該等之混合物,係可單獨或混合使用:丙烯酸、甲基丙烯酸等不飽和單羧酸;順丁烯二酸(馬來酸)、反丁烯二酸(延胡索酸)、甲基順丁烯二酸(檸康酸)、甲基反丁烯二酸(中康酸)、亞甲基丁二酸(伊康酸)等不飽和二羧酸;或者單獨或混合使用該等不飽和二羧酸之酸酐等,尤其,藉由使用丙烯酸、甲基丙烯酸或馬來酸酐,則在共聚合反應性及對屬顯影液之鹼水溶液的溶解性方面更佳。
前述不飽和羧酸、不飽和羧酸酐或該等之混合物,宜相對於全體總單體而含有15至45重量份。其含量在前述範圍內時,在鹼水溶液中的溶解性最為理想。
本發明中所使用的前述a)ii)之含環氧基不飽和化合物,係可使用縮水甘油丙烯酸酯(glycidyl acrylate)、縮水甘油甲基丙烯酸酯、α-乙基縮水甘油丙烯酸酯、α-正丙基縮水甘油丙烯酸酯、α-正丁基縮水甘油丙烯酸酯、丙烯酸-β-甲基縮水甘油酯、甲基丙烯酸-β-甲基縮水甘油酯、丙烯酸-β-乙基縮水甘油酯、甲基丙烯酸-β-乙基縮水甘油酯、丙烯酸-3,4-環氧丁基酯、甲基丙烯酸-3,4-環氧丁基酯、丙烯酸-6,7-環氧庚基酯、甲基丙烯酸-6,7-環氧庚基酯、α-乙基丙烯酸-6,7-環氧庚基酯、鄰-乙烯基芐基縮水甘油醚、間-乙烯基芐基縮水甘油醚、或者對-乙烯基芐基縮水甘油醚、甲基丙烯酸3,4-環氧基環己基酯等,前述化合物可單獨使用或混合2種以上使用。
尤其,前述含環氧基不飽和化合物,若使用縮水甘油甲基丙烯酸酯、甲基丙烯酸-β-甲基縮水甘油酯、甲基丙烯酸-6,7-環氧庚基酯、鄰-乙烯基芐基縮水甘油醚、間-乙烯基芐基縮水甘油醚、或者對-乙烯基芐基縮水甘油醚、甲基丙烯酸3,4-環氧基環己基酯等,則在共聚合反應及所得之圖案的耐熱性提升方面更佳。
前述含環氧基不飽和化合物係相對於全體總單體而以含有15至45重量份為佳。其含量在前述範圍內時,可同時滿足有機絕緣膜之耐熱性及感光性樹脂組成物之保存穩定性。
本發明中所使用的前述a)iii)之烯烴系不飽和化合物,係可使用甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸正丁酯、甲基丙烯酸二級丁酯、甲基丙烯酸三級丁酯、丙烯酸甲酯、丙烯酸異丙酯、甲基丙烯酸環己酯、2-甲基環己基甲基丙烯酸酯、二環戊烯基丙烯酸酯、二環戊基丙烯酸酯、二環戊烯基甲基丙烯酸酯、二環戊基甲基丙烯酸酯、1-金剛烷基(adamantyl)丙烯酸酯、1-金剛烷基甲基丙烯酸酯、二環戊基氧基乙基甲基丙烯酸酯、甲基丙烯酸異莰酯、丙烯酸環己酯、2-甲基環己基丙烯酸酯、二環戊基氧基乙基丙烯酸酯、丙烯酸異莰酯、甲基丙烯酸苯酯、丙烯酸苯酯、丙烯酸芐酯、2-羥乙基甲基丙烯酸酯、苯乙烯、σ-甲基苯乙烯、間-甲基苯乙烯、對-甲基苯乙烯、乙烯基甲苯、對-甲氧基苯乙烯、1,3-丁二烯、異戊二烯、或者是2,3-二甲基1,3-丁二烯等,前述化合物可單獨使用或混合2種以上使用。
尤其,前述烯烴系不飽和化合物若使用苯乙烯、二環戊基甲基丙烯酸酯、對-甲氧基苯乙烯,則在共聚合反應性及對屬顯影液之鹼水溶液之溶解性方面更佳。
前述烯烴系不飽和化合物,宜為相對於全體總單體而含有25至70重量份,更宜為含有25至45重量份。其含量在前述範圍內時,可使顯影後不會產生膨脹(Swelling),並可維持對屬顯影液之鹼水溶液之溶解性在理想狀態。
用以將前述單體溶液(Solution)聚合所使用的溶媒,可使用甲醇、四氫呋喃、甲苯、二烷等。
用以將如前述之單體進行溶液(Solution)聚合所使用的聚合起始劑,可使用光聚合起始劑,具體而言,可使用2,2-偶氮雙異丁腈、2,2-偶氮雙(2,4-二甲基戊腈)、2,2、-偶氮雙(4-甲氧基2,4-二甲基戊腈)、1,1-偶氮雙(環己烷-1-碳化腈)、或者二甲基2,2’-偶氮異丁酯等。
在溶媒及聚合起始劑存在下,使如前述之單體光反應,藉由沉澱及過濾、真空乾燥(Vacuum Drying)步驟,除去未反應單體所獲得之丙烯酸系共聚物,其聚苯乙烯換算重量平均分子量(Mw)以5,000至20,000為佳。
本發明中使用的前述b)之光起始劑之例,可使用三系、苯偶姻、乙醯苯系、咪唑系、氧葱酮或肟酯(oxime eater)系等之化合物,具體之例子,可使用2,4-雙三氯甲基-6-對-甲氧基苯乙烯基-s-三、2-對-甲氧基苯乙烯基-4,6-雙三氯甲基-s-三、2,4-三氯甲基-6-三、2,4-三氯甲基-4-甲基萘基-6-三、二苯甲酮、對-(二乙胺基)二苯甲酮、2,2-二環-4-苯氧基苯乙酮、2,2-二乙氧基苯乙酮、2-十二基9-氧硫、2,4-二甲基9-氧硫、2,4-二乙基9-氧硫、2,2-雙-2-氯苯基-4,5,4,5-四苯基-2-1,2-聯咪唑、汽巴特殊化學(CIBA Special Chemicals)公司的Irgacure 369、Irgacure 651、Irgacure 907、Darocur TPO、Irgacure 819、OXE-01、OXE-02、ADEKA公司的N-1919、NCI-831等化合物,該等化合物可單獨使用或混合2種以上使用。
前述光起始劑係當含量少於0.01重量%時,會由於低感度而導致殘膜率變差,而當超過30重量%時,在保存穩定性上會產生問題,且由於高硬化度而致使顯影時圖案的黏著力低下。
又,本發明中所使用的前述c)之具有乙烯性不飽和鍵的多官能性單體,一般而言係具有至少2個以上之乙烯系雙鍵的交聯性單體,可使用:1,4-丁二醇二丙烯酸酯、1,3-丁醇二丙烯酸酯、乙二醇二丙烯酸酯、三羥甲基丙烷二丙烯酸酯、三羥甲基丙烷三丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、三乙二醇二丙烯酸酯、聚乙二醇二丙烯酸酯、二季戊四醇六二丙烯酸酯、二季戊四醇三二丙烯酸酯、二季戊四醇二丙烯酸酯、山梨醇三丙烯酸酯、雙酚A二丙烯酸酯衍生物、二季戊四醇聚丙烯酸酯、或該等之甲基丙烯酸酯類等。
前述具有乙烯性不飽和鍵的多官能性單體,以含有0.5至40重量%為佳,更以含有5至20重量%為佳。若其含量少於0.5重量%時,則會因與感光性樹脂之低硬化度,而有難以實現接觸洞及圖案的問題,而若超過40重量%時,則會因高硬化度,而有顯影時接觸洞及圖案解像力低劣的問題。
本發明中所使用的前述d)之UV穩定劑或自由基捕捉劑係如前所述。
又,本發明中所使用的前述e)之溶媒,係使有機絕緣膜之平坦性以及塗布浸滲不會發生,以形成均勻的圖案截面(pattern profile)。
前述溶媒有:甲醇、乙醇、芐醇、己醇等醇類;乙二醇甲基醚乙酸酯、乙二醇乙基醚乙酸酯等乙二醇烷基醚乙酸酯類;乙二醇甲基醚丙酸酯、乙二醇乙基醚丙酸酯等乙二醇烷基醚丙酸酯類;乙二醇甲基醚、乙二醇乙基醚等乙二醇一烷基醚類;二乙二醇一甲基醚、二乙二醇一乙基醚、二乙二醇二甲基醚、二乙二醇甲基乙基醚等二乙二醇烷基醚類;丙二醇甲基醚乙酸酯、丙二醇乙基醚乙酸酯、丙二醇丙基醚乙酸酯等丙二醇烷基醚乙酸酯類;丙二醇甲基醚丙酸酯、丙二醇乙基醚丙酸酯、丙二醇丙基醚丙酸酯等丙二醇烷基醚丙酸酯類;丙二醇甲基醚、丙二醇乙基醚、丙二醇丙基醚、丙二醇丁基醚等丙二醇一烷基醚類;二丙二醇二甲基醚、二丙二醇二乙基醚等二丙二醇烷基醚類;丁醇一甲基醚、丁醇一乙基醚等丁醇一甲基醚一烷基醚類;二丁醇二甲基醚、二丁醇二乙基醚等二丁醇烷基醚類。
前述溶媒係以全體感光性樹脂組成物之殘量而含有,較佳為含有50至90重量%。在前述範圍內的情況下,可同時提升感光性樹脂組成物的塗布性及保存穩定性。
由前述成分所構成之本發明感光性樹脂組成物,可因應需要而進一步選擇性地含有環氧樹脂、黏著劑、感度增進劑、或界面活性劑。
前述環氧樹脂之作用係使由感光性樹脂組成物所獲得之圖案的耐熱性、感度等提升。
前述環氧樹脂,可使用雙酚A型環氧樹脂、酚醛清漆型環氧樹脂、甲酚清漆型環氧樹脂、環狀脂肪族環氧樹脂、縮水甘油酯型環氧樹脂、縮水甘油胺型環氧樹脂、雜環式環氧樹脂、或者是已將不同於a)之丙烯酸系共聚物的甲基丙烯酸縮水甘油酯(共)聚合而成之樹脂,尤其以使用雙酚A型環氧樹脂、甲酚清漆型環氧樹脂、縮水甘油酯型環氧樹脂為佳。
前述環氧樹脂係相對於本發明之感光性樹脂組成物,宜含有0.01至10重量%,其含量在前述範圍內時,可使塗布性及黏著性提升。
又,前述黏著劑之功能為提升與基板的黏著性,相對於本發明之感光性樹脂組成物,宜含有0.01至10重量%。
前述黏著劑可使用如羧基、甲基丙烯基、異氰酸酯基、或環氧基等具有反應性取代基之矽烷耦合劑等。具體而言,可使用γ-甲基丙烯氧基丙基三甲氧基矽烷、乙烯基三乙醯氧基矽烷、乙烯基三甲氧基矽烷、γ-異氰酸酯丙基三乙氧基矽烷、γ-環氧丙氧基丙基三甲氧基矽烷、或者是β-(3,4-環氧樹脂環己基)乙基三甲氧基矽烷等。
又,前述感度增進劑可使用選自於由苯二甲酸二辛酯、苯二甲酸二異壬酯、己二酸二辛酯、磷酸三甲苯酯、以及2,2,4-三甲基-1,3-戊二醇一異丁酯所構成之群之1種以上之化合物,其含量可含感光性樹脂組成物之0.1至10重量%。
又,前述界面活性劑之作用為使感光性樹脂組成物之塗布性或顯影性提升。
前述界面活性劑係可使用聚氧基乙烯辛基苯基醚、聚氧基乙烯壬基苯基醚、F171、F172、F173(商品名:大日本印墨社)、FC430、FC431(商品名;住友3M社)、或KP341(商品名;信越化學工業社)等。
前述界面活性劑係相對於本發明之感光性樹脂組成物而以含有0.0001至2重量%為佳,其含量在前述範圍內時,在感光性樹脂組成物之塗布性或顯影性之提升上會更佳。
由前述成分所構成的本發明感光性樹脂組成物之固形物濃度宜為10至50重量%,具有前述範圍之固形物成分的組成物,可藉由0.1~0.2μm之微孔過濾器等進行過濾之後加以使用。
又,本發明係提供利用前述感光性樹脂組成物之TFT-LCD用層間有機絕緣膜形成方法、及含有前述感光性樹脂組成物之硬化物來作為TFT-LCD用層間有機絕緣膜的顯示器。
本發明之TFT-LCD之層間有機絕緣膜形成方法,係一種利用感光性樹脂組成物於TFT-LCD之層間有機絕緣膜形成圖案之方法,其係以使用前述感光性樹脂組成物為其特徵,並使用在基材上進行感光性樹脂組成物塗布-預焙-曝光-顯影等眾所週知的圖案形成方法。
形成TFT-LCD之層間有機絕緣膜的方法,其具體性之一例如下。
首先,以噴霧法、輥子塗布法、旋轉塗布法等,將本發明之前述感光性樹脂組成物塗布於基板表面,藉預焙除去溶媒,而形成塗布膜。此時,前述預焙宜在80~115℃之溫度實施1~15分鐘。
之後,藉由預備之圖案,於前述業已形成之途布膜照射可見光、紫外光、遠紫外光、電子束、X射線等,再以顯影液顯影,除去不需要的部分,藉此形成預定圖案。
前述顯影液以使用鹼水溶液為佳,具體而言,可使用氫氧化鈉、氫氧化鉀、碳酸鈉等無機鹼類;乙基胺、正丙基胺等1級胺類;二乙基胺、正丙基胺等2級胺類;三甲基胺、甲基二乙基胺、二甲基乙基胺、三甲基胺等3級胺類;二甲基乙醇胺、甲基二乙醇胺、三乙醇胺等烷醇胺類;或者四甲基銨氫氧化合物、四乙基銨氫氧化合物等4級銨鹽之水溶液等。這時,前述顯影液係將鹼性化合物溶解為0.1~10重量%之濃度來使用,亦可添加適當量之如甲醇、乙醇等之水溶性有機溶媒及界面活性劑。
又,以如前述之顯影液顯影之後,以超純水洗淨30~90秒而除去不需要的部分,並乾燥而形成圖案,對前述業已形成之圖案照射紫外光等光之後,藉由烘箱等加熱裝置,以150~250℃的溫度進行加熱處理30~90分鐘,即可獲得最終圖案。
以下,揭示適當實施例以助理解本發明,然而下述實施例係僅用以例示本發明,本發明之範圍並不限定於下述實施例。
於具備冷卻器及攪拌機之2L燒瓶(Flask)中,投入異丙醇計400重量份、甲基丙烯酸計30重量份與苯乙烯計30重量份、甲基丙烯酸縮水甘油酯計25重量份、2-羥基乙基丙烯酸酯計15重量份的混合溶液。將前述液狀組成物於混合容器中以600rpm充分混合之後,添加2,2’-偶氮雙(2,4-二甲基戊腈)15重量份,使前述聚合混合溶液緩緩上升至50℃為止,於該溫度維持6小時而得到共聚物溶液。於所得到的聚合物中,添加磷酸計500ppm作為聚合抑制劑。將前述聚合業已中止的燒瓶之溫度下降到18℃並停頓1小時之後,得到所生成的析出物而將之過濾。將前述過濾取得的析出物85重量份,置入作為溶劑之丙二醇一乙基丙酸酯中,使析出物的含量成為45重量%,得到丙烯酸系共聚物。此時所得到的聚合物溶液之丙烯酸系聚合物的重量平均分子量(Mw)是9,000。
混合含有前述所製造之丙烯酸系共聚物的聚合物溶液計100重量份、作為光起始劑之OXE-02計10重量份、作為交聯性單體之二季戊四醇六二丙烯酸酯計40重量份、及作為UV穩定劑之TINUVIN 400計10重量份。於前述混合物中添加二乙二醇二甲基醚使固形物濃度成為35重量%而溶解後,以0.2μm之微孔過濾器過濾,製造出負型感光性樹脂組成物。
混合含有前述實施例1中所製造之丙烯酸系共聚物的聚合物溶液計100重量份、作為光起始劑之N-1919計5重量份、作為交聯性單體之二季戊四醇六丙烯酸酯計30重量份、及作為UV穩定劑及自由基捕捉劑之TINUVIN 460計5重量份、TINUVIN 292計5重量份。於前述混合物中添加PGMEA使固形物濃度成為35重量%而溶解後,以0.2μm之微孔過濾器過濾,製造出負型感光性樹脂組成物塗布溶液。
於具備冷卻器及攪拌機之燒瓶中,置入2,2-雙(3-胺基-4-羥苯基)六氟丙烷計50重量份、4,4-(六氟異亞丙基)二苯二甲酸酐50重量份,在常溫下添加NMP並攪拌24小時進行反應。於所生成之聚醯胺酸中添加與NMP同量之二甲苯,以除去因醯亞胺化反應所生成之水,在160℃反應5小時而製造出聚醯亞胺。使可溶性聚醯亞胺(6FDA/BAPAF)在氮環境氣體下溶解於DMAc之後,滴定與屬感光性基之甲基丙烯醯基-氯化物同當量之三乙胺,在0℃使之進行反應12小時,製造出感光性聚醯亞胺系共聚物。所製造之聚醯亞胺系共聚物之分子量為15000。
混合含有前述所製造之聚醯亞胺系共聚物的聚合物溶液計100重量份、作為光起始劑之OXE-02及NCI-831各計5重量份、作為交聯性單體之二季戊四醇六二丙烯酸酯計20重量份、及作為UV穩定劑及自由基捕捉劑之TINUVIN 479計5重量份、TINUVIN 292HP計5重量份。於前述混合物中添加PGMEA使固形物濃度成為35重量%而溶解後,以0.2μm之微孔過濾器過濾,製造出負型感光性樹脂組成物塗布溶液。
依下述表1之組成製造負型感光性樹脂組成物,除此之外,係以與前述實施例1相同的方法製造出負光阻抗蝕劑組成物。下述表1中之單位為重量份。
如下所述地對前述實施例1~3及比較例1評價感光性樹脂組成物之物性。
-對液晶偏移現象(AUA)之評價:使用前述實施例1~3及比較例1之感光性樹脂組成物來形成TFT基板之有機絕緣膜部分之後,與CF基板黏合。藉由毛細現象注入液晶後,藉曝光引起液晶之反應,繼而在已密封面板的狀態下,以500小時於每100小時掌握面板的液晶偏移現象產生程度。唯有到500小時為止未產生液晶偏移現象之情況,方可確認屬具備可靠性之有機絕緣膜感光性樹脂組成物之構成。
-對解像度之評價:於構成有下部TFT金屬電路之膜,將前述實施例1~3及比較例1之感光性樹脂組成物以光罩尺寸(Mask Size)10×12μm之大小形成圖案,將Bias(偏差)在1以下之情況顯示為解像度優秀,Bias(偏差)在2以下之情況顯示為良好,而Bias(偏差)在3以上之情況顯示為差。
-對平坦化度之評價:將前述實施例1~3及比較例1之感光性樹脂組成物曝光後形成圖案之後,以玻璃(Glass)之各48部分測定厚度,均勻性(uniformity)在2%以內之情況顯示為優秀,在2~5%之情況顯示為良好,而5%以上之情況顯示為差。
依據前述方法所測定之結果顯示於下述表2。
如表2所示可得知,本發明之實施例1~3之感光性樹脂組成物,相較於比較例1,液晶偏移現象獲得顯著改善,且在解像度及平坦化度方面也獲得提升。
Claims (7)
- 一種感光性樹脂組成物,係用於形成TFT-LCD用層間有機絕緣膜者,其特徵在於:含有a)共聚物樹脂5至40重量%;b)光起始劑0.01至30重量%;c)具有乙烯性不飽和鍵的多官能性單體0.5至40重量%;d)各1至10重量%之UV穩定劑及自由基捕捉劑;及e)剩餘量的溶劑,其中前述UV穩定劑及自由基捕捉劑係選自於下述構成之群組:三及其衍生物、哌啶及其衍生物,及其組合。
- 如申請專利範圍第1項之感光性樹脂組成物,其中前述三及其衍生物係羥苯基-S-三、2-(4’-甲氧基苯基)-4,6-雙(2’-羥基-4’-正辛氧基苯基)-1,3,5-三、2,4-雙{[4-(3-(2-丙氧基)-2-羥基-丙氧基)-2-羥基]-苯基}-6-(4-甲氧基苯基)-1,3,5-三、2,4-雙{[4-(2-乙基-己氧基)-2-羥基]-苯基}-6-[4-(2-甲氧基乙基-羧基)-苯胺基]-1,3,5-三、2,4-雙{[4-(參(三甲基矽基氧基-矽基丙氧基)-2-羥基]-苯基}-6-(4-甲氧基苯基)-1,3,5-三、2,4-雙{[4-(2’-甲基丙烯基氧基-2-羥基]-苯基}-6-(4-甲氧基苯基)-1,3,5-三、2,4-雙{[4-(1’,1’,3’,5’,5’,5’-七甲基三矽基-2’-甲基-丙氧基)-2-羥基]-苯基}-6-(4-甲氧基苯基)-1,3,5-三、2,4-雙{[4-(4-(2-丙氧基)-2-羥基-丙氧基)-2-羥基]-苯基}-6-[4-乙基羧基)-苯基胺基]-1,3,5-三或是2,4,6-三苯胺-(對-羧-2’-乙基-1’-氧基)-1,3,5-三。
- 如申請專利範圍第1項之感光性樹脂組成物,其中前述哌啶及其衍生物係4-苯甲醯基-2,2,6,6-四甲基哌啶或4- 硬脂醯氧基-2,2,6,6-四甲基-哌啶。
- 如申請專利範圍第1項所記載之感光性樹脂組成物,其中前述a)共聚物樹脂係重量平均分子量為5000~20000之丙烯酸系共聚物或聚醯亞胺系共聚物。
- 如申請專利範圍第1項所記載之感光性樹脂組成物,其中前述感光性樹脂組成物係更進而含有環氧樹脂、黏著劑、感度增進劑或界面活性劑。
- 一種TFT-LCD用層間有機絕緣膜形成方法,其特徵在於:利用如前述申請專利範圍第1~5項中任一項之感光性樹脂組成物。
- 一種TFT-LCD,其係含有如前述申請專利範圍第1~5項中任一項之感光性樹脂組成物之硬化體作為層間有機絕緣膜者。
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KR102433079B1 (ko) * | 2017-04-28 | 2022-08-17 | 주식회사 동진쎄미켐 | 감광성 수지 조성물 |
EP3647869A4 (en) * | 2017-06-28 | 2020-09-02 | Mitsubishi Gas Chemical Company, Inc. | MOVIE MATERIAL lithographic FILM FORMING COMPOSITION, OPTICAL COMPONENTS FORMING MATERIAL, RESIST COMPOSITION, RESIST STRUCTURE PRODUCTION PROCESS, RESIST LENGTH FILM, RADIATION SENSITIVE COMPOSITION, METHOD OF FORMING AN AMORPHOUS FILMS, MATERIAL FOR FORMING A lithographic LAYER FILMS, PROCESS FOR PRODUCING A lithographic LAYER FILMS AND METHOD FOR CIRCUIT PATTERN FORMATION |
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TWI386714B (zh) * | 2004-05-06 | 2013-02-21 | Dongjin Semichem Co Ltd | Tft-lcd用層間有機絕緣膜、tft-lcd用層間有機絕緣膜用丙烯酸系共聚合體樹脂及其製造方法 |
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DE102004058584A1 (de) * | 2004-12-03 | 2006-06-08 | Basf Ag | Strahlungshärtbare Beschichtungsmassen |
JP2007334290A (ja) | 2006-05-17 | 2007-12-27 | Mitsubishi Chemicals Corp | 保護膜用感光性熱硬化性組成物、カラーフィルタ、及び液晶表示装置 |
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JP5449688B2 (ja) * | 2008-03-26 | 2014-03-19 | 太陽ホールディングス株式会社 | 光硬化性熱硬化性樹脂組成物、そのドライフィルム及び硬化物並びにそれらを用いたプリント配線板 |
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US20100222473A1 (en) | 2010-09-02 |
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